Blue film stripping device
By designing a blue film stripping device, a robotic arm and a strong magnetic positioning column are used to achieve uniform separation of the blue film, solving the problems of wafer iron ring deformation and residual adhesive, improving efficiency and reducing labor costs.
Patent Information
- Application Number
- CN202520006352.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-02
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2035-01-02
AI Technical Summary
Manually peeling off the blue film can easily lead to uneven stress on the wafer's iron ring, causing deformation and leaving residual adhesive. It is also inefficient and has high labor costs.
Design a blue film stripping device, comprising a working chamber, a robotic arm, a ring-shaped film presser, and a strong magnetic positioning column. The robotic arm controls the ring-shaped film presser to apply force evenly to separate the blue film, and the strong magnetic positioning column is used to fix the wafer iron ring to avoid uneven force distribution.
This effectively avoids the problems of deformation and residual adhesive on the wafer iron ring after the blue film is peeled off, improves peeling efficiency, and saves labor costs.
Smart Images
Figure CN223743600U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of semiconductor packaging relates to a blue film stripping device. BACKGROUND
[0002] The process of fixing the wafer on the wafer iron ring through the blue film is called wafer ring, which is used for fixing the wafer, and is an indispensable part in the semiconductor manufacturing process. After each processing procedure of the wafer is completed, the wafer needs to be separated from the wafer iron ring. Manual stripping of the blue film is easy to cause uneven stress of the wafer iron ring, resulting in deformation of the wafer iron ring and residual blue film. Changing manual stripping of the blue film to automatic stripping of the blue film can effectively prevent deformation of the wafer iron ring and residual blue film caused by uneven stress.
[0003] Therefore, how to provide a blue film stripping device to avoid the problems of deformation of the wafer iron ring and residual blue film, improve the efficiency of stripping the blue film and save labor cost has become an important problem to be solved by the technical personnel in the field.
[0004] It should be noted that the above introduction to the technical background is only for the convenience of clearly and completely describing the technical scheme of the present application and facilitating the understanding of the technical personnel in the field. The above technical scheme cannot be considered as known to the technical personnel in the field only because it is described in the background section of the present application. CONTENT OF THE UTILITY MODEL
[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present utility model is to provide a blue film stripping device to solve the problem that manual stripping of the blue film is easy to cause uneven stress of the wafer iron ring, resulting in deformation of the wafer iron ring and residual blue film.
[0006] To achieve the above-mentioned purposes and other related purposes, the present utility model provides a blue film stripping device, comprising:
[0007] A work cabin and a cabin door, the cabin door is movably connected to one side of the work cabin, the work cabin is provided with a mechanical arm, an annular film presser and a plurality of strong magnetic positioning columns, the top end of the mechanical arm is fixed to the top of the work cabin, the bottom end of the mechanical arm is connected with the annular film presser, the bottom of the work cabin is provided with an opening, and a plurality of strong magnetic positioning columns are fixed to the bottom of the work cabin and distributed around the opening;
[0008] A switch button is located on the side wall of the work cabin.
[0009] A storage chamber and a storage chamber door, the storage chamber door is movably connected to one side of the storage chamber, and the storage chamber is located below the work cabin and communicates with the work cabin through the opening.
[0010] Optionally, the mechanical arm comprises a support and a telescopic arm, a fixed end of the telescopic arm is connected with the support, and a movable end of the telescopic arm is connected with the annular film press.
[0011] Optionally, the plurality of strong magnetic positioning columns are distributed along a circular track, the circular track is coaxial with the annular film press, and an inner diameter of the circular track is greater than an outer diameter of the annular film press.
[0012] Optionally, an inner diameter of the annular film press is greater than a diameter of the wafer, and an outer diameter of the annular film press is less than an inner diameter of the wafer iron ring.
[0013] Optionally, the device further comprises a first handle and a second handle, the first handle is located on the cabin door, and the second handle is located on the storage chamber door.
[0014] Optionally, the device further comprises a first visual window and a second visual window, the first visual window is arranged on the cabin door, and the second visual window is arranged on the storage chamber door.
[0015] Optionally, the device further comprises buffer cotton, and the buffer cotton is arranged in the interior of the storage chamber.
[0016] Optionally, the shape of the opening comprises any one of a circle and a polygon.
[0017] Optionally, the number of the mechanical arms is one or more.
[0018] Optionally, a rolling wheel and a wheel lock are arranged on the bottom of the storage chamber.
[0019] As described above, the blue film stripping device comprises a working cabin, a cabin door, an on-off button, a storage chamber and a storage chamber door, the cabin door is movably connected to one side of the working cabin, the working cabin is provided with a mechanical arm, an annular film press and a plurality of strong magnetic positioning columns, a top end of the mechanical arm is fixed to a top portion of the working cabin, a bottom end of the mechanical arm is connected with the annular film press, an opening is arranged on a bottom portion of the working cabin, the plurality of strong magnetic positioning columns are fixed to the bottom portion of the working cabin and are distributed around the opening, the on-off button is arranged on a side wall of the working cabin, the storage chamber door is movably connected to one side of the storage chamber, and the storage chamber is arranged below the working cabin and is in communication with the working cabin through the opening. The blue film stripping device can effectively avoid uneven stress during the stripping of the blue film and solve the problems of deformation and residual glue of the wafer iron ring after the stripping of the blue film. BRIEF DESCRIPTION OF DRAWINGS
[0020] Figure 1 A structure front view of the blue film stripping device is shown.
[0021] Figure 2 A bottom view of the working cabin of the blue film stripping device is shown.
[0022] Figure 3 The figure shows the structure of the annular film presser in the blue film stripping device of the present application.
[0023] Figure 4 The figure shows one working state of the annular film presser in the blue film stripping device of the present application.
[0024] Figure 5 The figure shows another working state of the annular film presser in the blue film stripping device of the present application.
[0025] Figure 6 The figure shows still another working state of the annular film presser in the blue film stripping device of the present application.
[0026] Figure 7 The figure shows the top view of the bottom of the working cabin after the wafer iron ring is placed in the blue film stripping device of the present application.
[0027] Explanation of reference numerals
[0028] 1 working cabin
[0029] 2 cabin door
[0030] 3 mechanical arm
[0031] 301 support
[0032] 302 telescopic arm
[0033] 4 annular film presser
[0034] 5 strong magnetic positioning column
[0035] 6 switch button
[0036] 7 storage chamber
[0037] 8 storage chamber door
[0038] 9 opening
[0039] 10 first handle
[0040] 11 second handle
[0041] 12 first visual window
[0042] 13 second visual window
[0043] 14 scroll wheel
[0044] 15 wheel lock
[0045] 16 wafer
[0046] 17 wafer iron ring
[0047] 18 blue film
[0048] 19 release film
[0049] D1 inner diameter of a circular trajectory
[0050] D2 inner diameter of a ring-shaped platen
[0051] D3 outer diameter of a ring-shaped platen
[0052] D4 diameter of a wafer
[0053] D5 inner diameter of a wafer ring DETAILED DESCRIPTION
[0054] The above objects, features and advantages of the present application will become more apparent from specific description of embodiments of the present application when taken in conjunction with the accompanying drawings. The present application, however, can be embodied in various ways, not just the embodiments described below. Therefore, the specific description of the embodiments is not intended to limit the scope of the present application, and various modifications can be made from the description of the embodiments by those skilled in the art.
[0055] It should be emphasized that the term "comprises / comprising" when used in this specification is taken to mean the presence of stated features, integers, steps or components but not to the exclusion of one or more other features, integers, steps, components or groups thereof.
[0056] Features described and / or illustrated with respect to one implementation can be used in the same or similar manner in one or more other implementations, in combination with other features in the other implementations, or in place of other features in the other implementations.
[0057] As described in the detailed description of the embodiments of the present application, the schematic diagrams showing the structures of the devices are partially enlarged without the general scale for the convenience of description, and the schematic diagrams are only examples, which should not limit the scope of protection of the present application. In addition, the three-dimensional spatial dimensions of length, width and depth should be included in the actual manufacture.
[0058] For the convenience of description, spatial relationship words such as "under", "below", "lower", "underneath", "above", "upper" and the like can be used herein to describe the relationship of one element or feature to other elements or features shown in the drawings. It will be understood that these spatial relationship words are intended to include other orientations of the device in use or operation in addition to the orientations depicted in the drawings. In addition, when one layer is referred to as "between" two layers, it can be the only layer between the two layers, or one or more intervening layers can also be present.
[0059] In the context of the present application, a structure in which the first feature is described "on" the second feature can include embodiments in which the first and second features form direct contact, and can also include embodiments in which additional features are formed between the first and second features, such that the first and second features can not be in direct contact.
[0060] It should be noted that the drawings provided in the embodiments only schematically illustrate the basic concept of the present application, and only show the components related to the present application in the drawings, rather than being drawn according to the number, shape and size of the components in actual implementation. The shape, number and proportion of each component in actual implementation can be arbitrarily changed, and the component layout pattern can also be more complex.
[0061] Please refer to Figure 1 , which shows the front view of the structure of the blue film stripping device of the present application. The blue film stripping device comprises a working cabin 1, a cabin door 2, an on-off button 6, a storage chamber 7 and a storage chamber door 8. The cabin door 2 is movably connected to one side of the working cabin 1. The working cabin 1 is provided with a mechanical arm 3, an annular film press 4 and a plurality of strong magnetic positioning columns 5. The top end of the mechanical arm 3 is fixed to the top of the working cabin 1. The bottom end of the mechanical arm 3 is connected to the annular film press 4. The bottom of the working cabin 1 is provided with an opening 9. A plurality of strong magnetic positioning columns 5 are fixed to the bottom of the working cabin 1 and distributed around the opening 9. The storage chamber door 8 is movably connected to one side of the storage chamber 7. The storage chamber 7 is located below the working cabin 1 and communicates with the working cabin 1 through the opening 9.
[0062] As an example, the mechanical arm 3 comprises a support 301 and a telescopic arm 302. The fixed end of the telescopic arm 302 is connected to the support 301. The movable end of the telescopic arm 302 is connected to the annular film press 4.
[0063] As an example, the number of the mechanical arm 3 is one or more. In the embodiment, the number of the mechanical arm 3 is two.
[0064] As an example, please refer to Figure 2 , which shows the plan view of the bottom of the working cabin 1 in the blue film stripping device of the present application. A plurality of strong magnetic positioning columns 5 are distributed along a circular track, which can better fit and fix the wafer iron ring. The circular track is coaxial with the annular film press 4, so that the annular film press 4 can be accurately pressed onto the blue film fitted on the wafer iron ring.
[0065] As an example, please refer to Figure 3, it is the structure schematic diagram of the annular film presser 4 in the blue film stripping device of the utility model, the inner diameter D1 of the circular track is greater than the outer diameter D3 of the annular film presser 4, to ensure that the annular film presser 4 is not blocked by the strong magnetic positioning column 5, can continue to move downward after contacting the blue film pasted on the wafer iron ring.
[0066] Specifically, when the blue film needs to be stripped, first open the cabin door 2, place the wafer iron ring with wafer on the strong magnetic positioning column 5, ensure the accurate placement position, then close the cabin door 2, press the switch button 6, the mechanical arm 3 controls the annular film presser 4 to make the downward pressing action, so as to complete the separation of the blue film, and the scrapped blue film after separation falls into the storage chamber 7 automatically through the opening 9.
[0067] In order to better illustrate the working process of the blue film stripping device of the utility model, please refer to Figure 4 And Figure 5 Among them, Figure 4 It is a working state schematic diagram of the annular film presser 4 in the blue film stripping device of the utility model, Figure 5 It is another working state schematic diagram of the annular film presser 4 in the blue film stripping device of the utility model, the blue film 18 in the area between the wafer 16 and the wafer iron ring 17 pressed by the annular film presser 4 is uniformly applied with force, slowly drives the wafer iron ring 17 and the blue film 18 to separate, so as to avoid the problems of deformation of the wafer iron ring 17 and residual glue of the blue film 18, and can improve the efficiency of stripping the blue film 18 and save the labor cost.
[0068] As an example, please refer to Figure 6 It is another working state schematic diagram of the annular film presser 4 in the blue film stripping device of the utility model, before pressing the switch button 6, a release film 19 or (release paper) can also be placed on the wafer 16, and the release film 19 is located between the annular film presser 4 and the wafer 16, which can protect the wafer 16.
[0069] As an example, please refer to Figure 7 It is a top view of the bottom of the working cabin 1 after the wafer iron ring 17 is placed in the blue film stripping device of the utility model, the inner diameter D2 of the annular film presser 4 is greater than the diameter D4 of the wafer 16, and the outer diameter D3 of the annular film presser 4 is less than the inner diameter D5 of the wafer iron ring 17, to ensure that the annular film presser 4 presses the blue film 18 in the area between the wafer 16 and the wafer iron ring 17, and avoid the annular film presser 4 touching the wafer 16 and causing damage to the wafer 16.
[0070] As an example, the blue film stripping device further comprises a first handle 10 and a second handle 11, the first handle 10 is located on the cabin door 2, and the second handle 11 is located on the storage room door 8.
[0071] As an example, the blue film stripping device further comprises a first visual window 12 and a second visual window 13, the first visual window 12 is opened on the cabin door 2, an operator can observe the working process of the annular film presser 4 through the first visual window 12, and the annular film presser 4 can be adjusted in time when the annular film presser 4 deviates from a predetermined track, and the second visual window 13 is opened on the storage room door 8, and whether there is waste blue film in the storage room 7 can be displayed.
[0072] As an example, the blue film stripping device further comprises a first visual window 12 and a second visual window 13, the first visual window 12 is opened on the cabin door 2, an operator can observe the working process of the annular film presser 4 through the first visual window 12, and the annular film presser 4 can be adjusted in time when the annular film presser 4 deviates from a predetermined track, and the second visual window 13 is opened on the storage room door 8, and whether there is waste blue film in the storage room 7 can be displayed.
[0073] As an example, the shape of the opening 9 comprises any one of a circle and a polygon, and in the embodiment, the shape of the opening 9 is a circle.
[0074] As an example, the bottom of the storage room 7 is provided with a rolling wheel 14 and a wheel lock 15, so that an operator can move the blue film stripping device.
[0075] As an example, the blue film stripping device further comprises a first visual window 12 and a second visual window 13, the first visual window 12 is opened on the cabin door 2, an operator can observe the working process of the annular film presser 4 through the first visual window 12, and the annular film presser 4 can be adjusted in time when the annular film presser 4 deviates from a predetermined track, and the second visual window 13 is opened on the storage room door 8, and whether there is waste blue film in the storage room 7 can be displayed.
[0076] The above embodiment only exemplarily illustrates the principle and effect of the blue film stripping device, and is not used to limit the blue film stripping device. Any person skilled in the art can modify or change the above embodiment without departing from the spirit and scope of the blue film stripping device. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the blue film stripping device should be covered by the claims of the blue film stripping device.
Claims
1. A blue membrane peeling apparatus characterized by comprising: The utility model relates to a wafer processing device, comprising: a working cabin and a cabin door, the cabin door being movably connected to one side of the working cabin, the working cabin being provided with a mechanical arm, an annular film presser and a plurality of strong magnetic positioning columns, the top end of the mechanical arm being fixed to the top of the working cabin, the bottom end of the mechanical arm being connected to the annular film presser, the bottom of the working cabin being provided with an opening, and the plurality of strong magnetic positioning columns being fixed to the bottom of the working cabin and distributed around the opening; a switch button located on the sidewall of the working cabin; a storage chamber and a storage chamber door, the storage chamber door being movably connected to one side of the storage chamber, the storage chamber being located below the working cabin and being in communication with the working cabin through the opening.
2. The blue film peeling apparatus according to claim 1, characterized by: The mechanical arm comprises a support and a telescopic arm, the fixed end of the telescopic arm being connected to the support, and the movable end of the telescopic arm being connected to the annular film presser.
3. The blue film peeling apparatus according to claim 1, characterized by: The plurality of strong magnetic positioning columns are distributed along a circular track, the circular track being coaxial with the annular film presser, and the inner diameter of the circular track being greater than the outer diameter of the annular film presser.
4. The blue film peeling apparatus according to claim 1, characterized by: The inner diameter of the annular film presser is greater than the diameter of a wafer, and the outer diameter of the annular film presser is less than the inner diameter of a wafer iron ring.
5. The blue film peeling apparatus according to claim 1, characterized by: The utility model further comprises a first handle and a second handle, the first handle being located on the cabin door, and the second handle being located on the storage chamber door.
6. The blue film peeling apparatus according to claim 1, characterized by: The utility model further comprises a first visual window and a second visual window, the first visual window being formed on the cabin door, and the second visual window being formed on the storage chamber door.
7. The blue film peeling apparatus according to claim 1, characterized by: The utility model further comprises buffer cotton, which is placed inside the storage chamber.
8. The blue film peeling apparatus according to claim 1, characterized by: The shape of the opening comprises any one of a circle and a polygon.
9. The blue film peeling apparatus according to claim 1, characterized by: The number of the mechanical arms is one or more.
10. The blue film peeling apparatus according to claim 1, characterized by: The bottom of the storage chamber is provided with a rolling wheel and a wheel lock.