Cleaning tank of edge removing machine

Abstract

The utility model provides an edge removing machine rinse tank which comprises a tank body, a tank cover, a medium input assembly and a filter screen, the tank cover is movably arranged at a top opening of the tank body, the medium input assembly and the filter screen are located in the tank body, and a medium output valve is arranged below the filter screen; the medium input assembly can input cleaning fluid, water and / or inert gas into the tank body; the medium input assembly comprises a first annular cabin and a second annular cabin which are coaxially distributed, the filter screen comprises a fixed filter screen and a detachable filter screen, the fixed filter screen is located below the first annular cabin and integrally formed with the tank body, and the detachable filter screen is located above the fixed filter screen and integrally formed with the tank body. And the second annular cabin is detachably connected with the first annular cabin or the second annular cabin. According to the utility model, the detachable filter screen can be directly detached when fragments occur, so that the fragment cleaning efficiency is improved, and the personnel injury probability is reduced; and corrosion of cleaning liquid mist to equipment outside the cleaning tank and air pollution are reduced through the tank cover and the second annular cabin.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor production, especially to a cleaning tank of edge removing machine. BACKGROUND

[0002] The cleaning link in the wafer production process is an important link for guaranteeing wafer quality and smooth running of the back-end processing procedure, and the cleaning link comprises physical cleaning and chemical cleaning, wherein the chemical cleaning is to utilize cleaning liquid and wafer surface dirt or excess oxide film (for example, wafer edge oxide film) loaded on the front-end processing procedure.

[0003] The conventional cleaning tank is only a cubic tank body with a top opening, and is provided with a liquid discharge pipe and a liquid discharge valve at the bottom; when it is necessary to remove the edge of the wafer, the wafer is fixed by a special wafer fixture and the edge of the wafer to be corroded is exposed, then the wafer fixture and the wafer are transferred to the cleaning tank for immersion, the wafer is removed after immersion, and the liquid discharge valve is opened to discharge the liquid.

[0004] However, the above cleaning tank has certain deficiencies in actual use:

[0005] For example, in the processing process, due to the vacuum fluctuation of the wafer fixture, the surface state condition and the state of the wafer itself, the wafer may be broken in the cleaning tank. When such a situation occurs, the operator needs to wear chemical protection gloves, face shields and other chemical protection equipment to pick up the broken pieces from the cleaning tank. Since the wafer is thin, the size of the broken pieces is different, the edge is sharp, the face shield affects the field of vision, and the gloves affect the grabbing, it is always difficult to pick up, and there is a risk of puncturing the gloves and corroding the skin, so the operation is difficult and the risk is high.

[0006] For another example, in the process of adding cleaning liquid and immersing the wafer, the top opening of the cleaning tank is not shielded, and the mist of the cleaning liquid is easy to spread outward, which can corrode the external equipment and reduce the air quality of the working environment, affecting the health of the production personnel. INVENTION CONTENTS

[0007] The utility model aims at providing a cleaning tank of edge removing machine to solve the problems in the above background.

[0008] The technical scheme of the utility model comprises: a cleaning tank of edge removing machine, which comprises a tank body, a tank cover, a medium input assembly and a filter screen, the tank cover is movably arranged at the top opening of the tank body, the medium input assembly and the filter screen are located in the tank body, and a medium output valve is arranged below the filter screen; wherein the medium input assembly can input cleaning liquid, water and / or inert gas into the tank body.

[0009] Further, the medium input assembly comprises:

[0010] The first annular cabin is provided with a first input pipe and a plurality of first nozzles, and the first nozzles can spray the cleaning liquid input by the first input pipe into the groove body.

[0011] The second annular cabin is coaxially distributed above the first annular cabin, and the second annular cabin is provided with a second input pipe and a plurality of second nozzles, and the second nozzles can spray water or inert gas input by the second input pipe to the lower side of the second annular cabin.

[0012] Further, the inner wall of the groove body is provided with a first storage step and a second storage step, and the first annular cabin is detachably arranged on the first storage step, and the second annular cabin is detachably arranged on the second storage step.

[0013] Further, the filter screen comprises:

[0014] The fixed filter screen is located below the first annular cabin and is integrally formed with the groove body.

[0015] The detachable filter screen is located above the fixed filter screen and is detachably connected with the first annular cabin or the second annular cabin.

[0016] Further, the detachable filter screen is provided with a high cantilever and a low cantilever; the high cantilever and the low cantilever are correspondingly arranged along the radial direction of the detachable filter screen, and the top ends of the high cantilever and the low cantilever are respectively detachably arranged on the top and bottom sides of the second annular cabin.

[0017] Further, the low cantilever and the high cantilever have the same structure, comprising an upper horizontal arm, an upper vertical arm, a lower vertical arm and a lower horizontal arm connected in sequence, the upper horizontal arm and the upper vertical arm are integrally formed, the lower vertical arm and the lower horizontal arm are integrally formed, and the upper vertical arm and the lower vertical arm can be relatively slid or fixed by buckling.

[0018] Further, the detachable filter screen comprises an upper pressing frame, a lower pressing frame and a net body, the upper pressing frame and the lower pressing frame are annular and buckled; the net body is located between the upper pressing frame and the lower pressing frame, and the outer diameter of the net body is greater than the inner diameter of the upper pressing frame and the inner diameter of the lower pressing frame.

[0019] Further, the groove body is provided with a conical bottom and a liquid discharge cabin, the first annular cabin and the liquid discharge cabin are respectively located on both sides of the conical bottom, the fixed filter screen is integrally formed at the tip of the conical bottom, the inner diameter of the liquid discharge cabin is greater than the outer diameter of the fixed filter screen, and the medium output valve is located on the liquid discharge cabin.

[0020] Further, the groove body is provided with a groove cover cylinder, a groove cover movable arm is rotationally connected to the top of the groove cover cylinder, the groove cover movable arm is in inverted L shape, and the other end of the groove cover movable arm is rotationally connected to the rotating shaft of the groove cover.

[0021] Further, the groove cover is correspondingly provided with two groups, and the proximal ends of the two groups of groove covers are respectively provided with arc-shaped grooves.

[0022] The utility model discloses have the beneficial effect in that: through the setting of fixed filter screen and detachable filter screen, the medium output valve and the pipe body of its rear end are protected, and when the fragment occurs, the detachable filter screen is directly removed, the detachable filter screen holds up the fragment, can directly remove the cleaning tank, avoids the operation of picking up the fragment in the narrow space full of corrosive cleaning liquid in the cleaning tank, can greatly improve the fragment cleaning efficiency, reduces the probability of personnel injury, through the groove cover of openable and closable, the second annular cabin of water or air spray, the diffusion of cleaning liquid mist is suppressed, the corrosion of cleaning liquid mist to the equipment outside the cleaning tank is reduced, and the pollution of cleaning liquid mist to the air in the working environment outside the cleaning tank is reduced, and the health of workers is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is the front view of the embodiment of the utility model;

[0024] Figure 2 It is the front view of the medium input assembly in the embodiment of the utility model;

[0025] Figure 3 It is the top view of the medium input assembly in the embodiment of the utility model;

[0026] Figure 4 It is the front view of the detachable filter screen in the embodiment of the utility model;

[0027] Figure 5 It is the connection side view of the groove cover movable arm and the groove cover in the embodiment of the utility model;

[0028] Figure 6 It is the top view of the groove cover in the embodiment of the utility model.

[0029] In the drawing:

[0030] 1, groove body;

[0031] 2, groove cover; 2.1, arc-shaped groove;

[0032] 3, medium input assembly; 3.1, first annular cabin; 3.2, second annular cabin; 3.3, first input pipe; 3.4, first spray head; 3.5, second input pipe; 3.6, second spray head; 3.7, annular plate; 3.8, annular U-shaped groove;

[0033] 4. Medium output valve;

[0034] 5. Tank cover cylinder;

[0035] 6. Tank cover movable arm;

[0036] 7. Rotation shaft;

[0037] 8. First storage step;

[0038] 9. Second storage step;

[0039] 10. Fixed filter screen;

[0040] 11. Removable filter screen; 11.1, upper pressing frame; 11.2, lower pressing frame; 11.3, screen body;

[0041] 12. High cantilever; 12.1, upper horizontal arm; 12.2, upper vertical arm; 12.3, lower vertical arm; 12.4, lower horizontal arm;

[0042] 13. Low cantilever;

[0043] 14. Buckling hole;

[0044] 15. Buckling block;

[0045] 16. Conical bottom;

[0046] 17. Liquid discharge cabin. DETAILED DESCRIPTION

[0047] The technical solutions of the present application will be described clearly and completely below in combination with the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0048] In the description of the utility model, it is necessary to understand that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can explicitly or implicitly include one or more features. In the description of the utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0049] In the description of the utility model, it should be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood through specific circumstances.

[0050] Reference is made to the accompanying drawings Figures 1-6 The embodiment provides a cleaning tank of a wafer edge trimming machine, which comprises a tank body 1, a tank cover 2, a medium input assembly 3 and a filter screen, the tank body 1 is a cuboid structure with an open top, the tank cover 2 is movably arranged at the open top of the tank body 1, the medium input assembly 3 and the filter screen are located in the tank body 1, and a medium output valve 4 is arranged below the filter screen; wherein the medium input assembly 3 can input cleaning liquid, water and / or inert gas into the tank body 1.

[0051] When the wafer is trimmed, the wafer can be clamped by a professional jig and transferred to the cleaning tank, the tank cover 2 is covered, the medium input assembly 3 is used to input the cleaning liquid into the tank body 1, the exposed part of the wafer is corroded, after the trimming is completed, the wafer is removed from the cleaning tank, and the cleaning liquid can be discharged by using the medium output valve 4. By adopting the above scheme, the cleaning liquid mist diffused upward can be blocked by using the tank cover 2 in the process of spraying or immersing the cleaning liquid, so that the equipment is prevented from being damaged and the air quality of the production environment is improved.

[0052] Reference is made to the accompanying drawings Figure 1 and 5The groove body 1 of the embodiment is provided with a groove cover cylinder 5, the top of the groove cover cylinder 5 is rotationally connected with a groove cover movable arm 6, the groove cover movable arm 6 is in inverted L shape, the other end thereof is rotationally connected with a rotating shaft 7 of a groove cover 2, the groove cover 2 is fixedly arranged on the top of the groove cover movable arm 6, and the rotating shaft 7 of the groove cover 2 is separated from the groove cover 2, and the rotating shaft 7 of the groove cover 2 is fixedly arranged on the groove body 1. In the process of movement of the groove cover movable arm 6, the groove cover 2 rotates around the rotating shaft 7 of the groove cover 2. When the piston rod of the groove cover cylinder 5 is elongated, the end of the groove cover movable arm 6 connected with the groove cover cylinder 5 is lifted and rotated, thereby driving the end of the groove cover movable arm 6 connected with the rotating shaft 7 of the groove cover 2 to rotate, so as to open the groove cover 2. When the piston rod of the groove cover cylinder 5 is retracted, the end of the groove cover movable arm 6 connected with the groove cover cylinder 5 is lowered and reversely rotated, thereby driving the end of the groove cover movable arm 6 connected with the rotating shaft 7 of the groove cover 2 to reversely rotate, so as to close the groove cover 2.

[0053] Since the wafer also needs to be clamped by a jig when being immersed, two sets of groove covers 2 are arranged in the embodiment, and the proximal ends of the two sets of groove covers 2 are respectively provided with arc-shaped grooves 2.1, and the two sets of arc-shaped grooves 2.1 are arranged to surround a ring-shaped hole connected between the inside and outside of the groove body 1, for avoiding the jig (such as the arm of a mechanical arm, the lifting rod of a suction cup, etc.) of the wafer.

[0054] In the embodiment, the medium input assembly 3 includes a first annular cabin 3.1 and a second annular cabin 3.2, the first annular cabin 3.1 is provided with a first input pipe 3.3 and a plurality of first spray heads 3.4, the outlet of the first spray head 3.4 is directed to the axis of the first annular cabin 3.1, and is used for spraying the cleaning liquid input by the first input pipe 3.3 into the groove body 1; the second annular cabin 3.2 is coaxially arranged above the first annular cabin 3.1, the second annular cabin 3.2 is provided with a second input pipe 3.5 and a plurality of second spray heads 3.6, the outlet of the second spray head 3.6 is directed to the axis of the second annular cabin 3.2 and is inclined to the first annular cabin 3.1, and is used for spraying the water or inert gas input by the second input pipe 3.5 below the second annular cabin 3.2. The water or inert gas sprayed by the second spray head 3.6 suppresses the upward diffusion of the cleaning liquid mist below, thereby protecting the equipment and personnel safety.

[0055] The water sprayed by the second spray head 3.6 can be water mist, and the fineness and speed of the water mist sprayed by the second spray head 3.6 can be adjusted, so as to achieve the effect of neither excessively reducing the concentration of the cleaning liquid (because the concentration of the cleaning liquid suitable for processing the wafer is a range value) nor resisting the diffusion trend of the cleaning liquid mist.

[0056] The second nozzle 3.6 can spray water or inert gas, and the second input pipe 3.5 can be connected to two groups of medium supply pipes (not shown in the figure), one group of medium supply pipes is a water supply pipe, and the other group of medium supply pipes is a gas supply pipe, and valves are arranged on the two groups of medium supply pipes, which can be automatically controlled or manually controlled to realize switching between gas supply and water supply.

[0057] In order to facilitate the installation, disassembly and maintenance of the equipment, the first and second storage steps 8 and 9 are arranged on the inner wall of the tank body 1, and the first and second storage steps 8 and 9 are annular and coaxial. The first annular cabin 3.1 is detachably arranged on the first storage step 8, and the second annular cabin 3.2 is detachably arranged on the second storage step 9. The above-mentioned detachable connection mode is the prior art in the field, for example, it can be bolted.

[0058] Referring to the accompanying drawings Figure 2 The first annular cabin 3.1 and the second annular cabin 3.2 are similar in structure, and each includes an annular plate 3.7 at the top and an annular U-shaped groove 3.8 at the bottom. The annular plate 3.7 is provided with an input hole for mounting the first input pipe 3.3 or the second input pipe 3.5. The annular U-shaped groove 3.8 has an opening facing the annular plate 3.7 and is welded and fixed with the annular plate 3.7. The annular U-shaped groove 3.8 is provided with an output hole on the side wall close to the axis thereof for mounting the first nozzle 3.4 or the second nozzle 3.6. After the annular U-shaped groove 3.8 is welded and fixed with the annular plate 3.7, a closed cavity is formed which can only communicate with the outside through the input hole and the output hole.

[0059] In order to ensure the uniformity of the spraying of cleaning liquid, water or inert gas, to make the periphery of the wafer uniformly contact the cleaning liquid at the same time, to ensure the cleaning effect, and to make the water or inert gas uniformly suppress the diffused cleaning liquid mist, a plurality of first nozzles 3.4 can be uniformly distributed around the circumference of the first annular cabin 3.1, and a plurality of second nozzles 3.6 can be uniformly distributed around the circumference of the second annular cabin 3.2.

[0060] In the embodiment, the filter screen includes a fixed filter screen 10 and a detachable filter screen 11. The fixed filter screen 10 is located below the first annular cabin 3.1 and is integrally formed with the tank body 1. The detachable filter screen 11 is located above the fixed filter screen 10 and is detachably connected with the first annular cabin 3.1 or the second annular cabin 3.2. The fixed filter screen 10 can prevent debris or slag from entering the medium output valve 4 and the pipeline at the rear end thereof along with the cleaning liquid, causing blockage or damage to the pipeline. The detachable filter screen 11 can directly receive wafer fragments. When fragments occur, they can be removed from the cleaning tank and transferred outside the tank, without the need to pick up the fragments in a cramped and corrosive cleaning liquid-filled space in the cleaning tank, which can greatly improve the efficiency of fragment cleaning and reduce the risk of personnel injury.

[0061] The detachable filter screen 11 is buckled with a high cantilever 12 and a low cantilever 13; the high cantilever 12 and the low cantilever 13 are correspondingly arranged along the radial direction of the detachable filter screen 11 to balance the mass of both sides of the detachable filter screen 11, and the top ends of the high cantilever 12 and the low cantilever 13 are respectively detachably arranged on the top and the bottom of the second annular cabin 3.2. The detachable connection mode is the prior art in the field, for example, it can be fixed by binding with a strap.

[0062] When debris occurs, the detachable filter screen 11 can be lifted out of the cleaning tank by using the high cantilever 12 and the low cantilever 13. However, since the detachable filter screen 11, the high cantilever 12 and the low cantilever 13 are only needed to be removed when debris occurs, and the occurrence of debris is uncontrollable and unpredictable, sometimes with high probability and sometimes with low probability, the long-term stability of the installation state needs to be ensured under the premise of meeting the convenience of disassembling the detachable filter screen 11. The high cantilever 12 abuts against the top of the second annular cabin 3.2 to counteract the self-weight of the detachable filter screen 11 and disperse the downward pulling force received by the strap structure. The low cantilever 13 abuts against the bottom of the second annular cabin 3.2 to counteract the buoyancy received by the detachable filter screen 11 when immersed in the cleaning liquid and disperse the upward pushing force received by the strap structure, thereby improving the stability and prolonging the service life.

[0063] Referring to the accompanying drawings Figure 2 The low cantilever 13 has the same structure as the high cantilever 12, including an upper horizontal arm 12.1, an upper vertical arm 12.2, a lower vertical arm 12.3 and a lower horizontal arm 12.4 connected in sequence. The upper horizontal arm 12.1 and the upper vertical arm 12.2 are integrally formed, the lower vertical arm 12.3 and the lower horizontal arm 12.4 are integrally formed, and the upper vertical arm 12.2 and the lower vertical arm 12.3 are relatively slidable or buckled and fixed. The upper horizontal arm 12.1 is used for abutting against the second annular cabin 3.2 and binding and fixing, the lower horizontal arm 12.4 is used for connecting the detachable filter screen 11, and the upper vertical arm 12.2 and the lower vertical arm 12.3 are relatively slidable to adjust the overlapping degree, so as to change the total height of the high cantilever 12 (or the low cantilever 13). By adjusting the total height of the high cantilever 12 (or the low cantilever 13) and replacing the detachable filter screen 11 with different diameters, the detachable filter screen 11 can be arranged in a 5-inch, 6-inch or 8-inch cleaning tank for circulation use. The high cantilever 12 and the low cantilever 13 can be circulated and used, thereby reducing the cost consumption.

[0064] The adjustment mode of the total length of the upper vertical arm 12.2 and the lower vertical arm 12.3 is that a plurality of buckling holes 14 with different heights are arranged on the upper vertical arm 12.2, and a buckling block 15 is arranged on the lower vertical arm 12.3. The buckling block 15 is arranged in different buckling holes 14.

[0065] In order to facilitate equipment maintenance, the detachable filter screen 11 is configured to include an upper pressing frame 11.1, a lower pressing frame 11.2 and a screen body 11.3, the upper pressing frame 11.1 and the lower pressing frame 11.2 are both annular and buckled, the screen body 11.3 is located between the upper pressing frame 11.1 and the lower pressing frame 11.2, and the outer diameter of the screen body 11.3 is greater than the inner diameter of the upper pressing frame 11.1 and the inner diameter of the lower pressing frame 11.2. By using the above scheme, the screen body 11.3 can be replaced in time when the screen body 11.3 is damaged, instead of replacing the entire detachable filter screen 11, thereby reducing the cost of consumables. Except for special description, the buckling mode described above is a common technical means in the art, for example, a common buckle and a clamping groove are used for connection, and therefore no further description is made.

[0066] In order to smoothly drain liquid, the tank body 1 of the embodiment is provided with a conical bottom 16 and a liquid drainage cabin 17, the first annular cabin 3.1 and the liquid drainage cabin 17 are located on the two sides of the conical bottom 16 respectively, the fixed filter screen 10 is integrally formed at the tip of the conical bottom 16, the inner diameter of the liquid drainage cabin 17 is greater than the outer diameter of the fixed filter screen 10, and the medium output valve 4 is located on the liquid drainage cabin 17. The conical bottom 16 is used to guide the rapid drainage of the cleaning liquid.

[0067] Compared with the prior art, the beneficial effects of the utility model are that: through the setting of the fixed filter screen 10 and the detachable filter screen 11, the medium output valve 4 and the pipe body at the rear end thereof are protected, and when the debris occurs, the detachable filter screen 11 can be directly removed, the debris is held up by the detachable filter screen 11, and the cleaning tank can be directly removed, so that the operation of picking up the debris in the narrow space filled with corrosive cleaning liquid in the cleaning tank is avoided, the debris cleaning efficiency can be greatly improved, and the probability of personnel injury is reduced; through the openable tank cover 2 and the second annular cabin 3.2 capable of spraying water or air, the diffusion of the cleaning liquid mist is suppressed, the corrosion of the cleaning liquid mist on the equipment outside the cleaning tank is reduced, the pollution of the cleaning liquid mist on the air in the working environment outside the cleaning tank is reduced, and the health of workers is ensured.

[0068] The above is the preferred embodiment of the utility model, and it should be pointed out that, for ordinary technical personnel in the technical field, some improvements and refinements can be made without departing from the principle of the utility model, and these improvements and refinements should also be regarded as the protection range of the utility model.

Claims

1. An edge beader cleaning tank characterized by, The utility model provides a cleaning tank, including groove, groove cover, medium input component and filter screen, the groove cover activity sets up at the top opening of groove, medium input component and filter screen are located in groove, the filter screen below is equipped with medium output valve, wherein, medium input component can input cleaning fluid, water and / or inert gas to groove.

2. The edger wash tank of claim 1, wherein, The medium input component includes: The first annular cabin is equipped with a first input pipe and a plurality of first nozzles, and the first nozzles can spray the cleaning fluid input by the first input pipe into the groove. The second annular cabin is coaxially distributed above the first annular cabin, and the second annular cabin is equipped with a second input pipe and a plurality of second nozzles.

3. The edger wash tank of claim 2, wherein, The inner wall of the groove is provided with a first storage step and a second storage step, and the first annular cabin is detachably arranged on the first storage step, and the second annular cabin is detachably arranged on the second storage step.

4. The edger wash tank of claim 2 or 3, wherein, The filter screen includes: The fixed filter screen is located below the first annular cabin and is integrally formed with the groove. The detachable filter screen is located above the fixed filter screen and is detachably connected with the first annular cabin or the second annular cabin.

5. The edger wash tank of claim 4, wherein, The detachable filter screen is detachably arranged on the top and bottom sides of the second annular cabin.

6. The edger wash tank of claim 5, wherein, The low cantilever and the high cantilever are arranged corresponding to the radial direction of the detachable filter screen, and the top ends of the low cantilever and the high cantilever are detachably arranged on the top and bottom sides of the second annular cabin, respectively.

7. The edger wash tank of claim 5 or 6, wherein, The low cantilever and the high cantilever have the same structure, which includes an upper horizontal arm, an upper vertical arm, a lower vertical arm, and a lower horizontal arm connected in sequence.

8. The edger wash tank of claim 7, wherein, The upper horizontal arm and the upper vertical arm are integrally formed, the lower vertical arm and the lower horizontal arm are integrally formed, and the upper vertical arm and the lower vertical arm can be relatively slid or detachably fixed.

9. The edger wash tank of any of claims 1-3, 5-6, 8, wherein, The detachable filter screen includes an upper pressing frame, a lower pressing frame, and a mesh body.

10. The edger wash tank of claim 9, wherein, The groove is provided with a conical bottom and a liquid discharge cabin, and the first annular cabin and the liquid discharge cabin are located on both sides of the conical bottom. The groove is provided with a groove cover cylinder, and the top of the groove cover cylinder is rotatably connected with a groove cover movable arm. The groove cover movable arm is in the shape of an inverted L, and the other end of the groove cover movable arm is rotatably connected with a rotating shaft of the groove cover. The groove cover is fixedly arranged on the top of the groove cover movable arm. The groove cover is provided with two groups of arc-shaped grooves corresponding to the two groups of groove covers.

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