Cleaning device for vacuum coating machine

Abstract

The utility model discloses a cleaning device for vacuum coating equipment, which comprises an equipment main body and a cleaning head, two guide rails are mounted in the equipment main body, sliding blocks are mounted on the outer walls of the two guide rails in a sliding manner, an electric sliding rail is mounted on one sides of the two sliding blocks, an electric sliding block is mounted in the electric sliding rail in a sliding manner, and the cleaning head is mounted on the cleaning head. A driving mechanism for controlling the electric sliding rail to move up and down is arranged on one side of the electric sliding rail, a mounting base is mounted on one side of the electric sliding block, a second motor is mounted in the mounting base, and a connecting shaft is mounted at the output end of the second motor; the driving mechanism and the automatic supplementing mechanism control the cleaning head to work cooperatively, respectively control the cleaning head to move up and down and compensate the cleaning distance, cooperate with the electric sliding block to drive the electric sliding block to move left and right for cleaning, and drive the rotating table to drive the electric push rod and the cleaning head to control the cleaning angle. Therefore, sediments in the coating chamber can be quickly and comprehensively cleaned at multiple angles.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coating machine technical field, concretely is a kind of cleaning device for vacuum coating machine. BACKGROUND

[0002] In the field of vacuum coating technology, vacuum coating machine is the key equipment for thin film preparation. However, in the coating process, affected by various factors, such as unstable evaporation source power, gas pressure fluctuation, poor substrate surface state, etc., part of the coating material will splash on the inner wall, fixture, baffle and other components of the coating chamber and accumulate to form stubborn deposits.

[0003] The current traditional manual cleaning method has high labor intensity, low efficiency and is easy to damage the equipment. The chemical cleaning method has problems such as difficult solvent selection, high environmental risk, long time consumption, etc. Therefore, a cleaning device for vacuum coating machine is proposed. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of cleaning device for vacuum coating machine to solve the problems raised in the above background technology.

[0005] To achieve the above purpose, the utility model provides the following technical scheme: a kind of cleaning device for vacuum coating machine, including equipment main body and cleaning head, the inside of equipment main body is equipped with two guide rails, the outer wall of two guide rails is slidably installed with sliding block, the side of two sliding blocks is commonly installed with electric slide rail, the inside of electric slide rail is slidably installed with electric slide block, the side of electric slide rail is equipped with drive mechanism that moves up and down, the side of electric slide block is installed with mounting seat, the inside of mounting seat is installed with second motor, the output end of second motor is installed with connecting shaft, the other end of connecting shaft is installed with mounting table, the inside of mounting table is rotatably installed with rotating table, the side of rotating table is installed with third motor, the side of rotating table is equipped with automatic compensation mechanism that controls cleaning range of cleaning head.

[0006] Preferably, the drive mechanism includes a first motor, the first motor is installed on the electric slide rail, the output end of the first motor is installed with a driving wheel, the side of the driving wheel is engagedly installed with a toothed plate, and the toothed plate is installed on the equipment main body.

[0007] Preferably, the automatic compensation mechanism includes an electric push rod, the electric push rod is installed on the rotating table, the output end of the electric push rod is installed with a fixed seat, the inside of the fixed seat is installed with a fourth motor, and the output end of the fourth motor is fixed with the side of the cleaning head.

[0008] Preferably, the third motor is installed on the mounting table, and the connecting shaft is rotatably installed in the inside of the mounting seat.

[0009] Preferably, one end of the fourth motor is provided with a control valve, an output end of the control valve is provided with a connecting pipe, the other end of the connecting pipe is provided with a spray head, the spray head is arranged in the inside of the cleaning head, the other end of the control valve is provided with a cleaning liquid delivery pipe, the upper end of the cleaning liquid delivery pipe penetrates through the equipment body and is provided with a pump body, the pump body is arranged on the equipment body, and the cleaning head is arranged on the connecting pipe.

[0010] Preferably, the outer wall of the connecting pipe is provided with a dust suction box, a plurality of cleaning brushes are arranged on the outer wall of the dust suction box in a circumferential arrangement, one side of the dust suction box is provided with a dust suction pipe, and the upper end of the dust suction pipe penetrates through the equipment body and is provided with a dust collector.

[0011] Preferably, the inside of the dust suction box and the dust suction pipe are connected with each other, one side of the electric push rod is provided with a limiting telescopic rod, and the other end of the limiting telescopic rod is arranged on the fixing seat.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] 1. The utility model discloses a cleaning head is controlled by a drive mechanism and an automatic supplementing mechanism to work cooperatively, the cleaning head is controlled to move up and down and the distance of cleaning is compensated respectively, the electric slide is driven to move left and right to clean, the electric push rod and the cleaning head are driven to rotate the rotating table to realize cleaning angle control, so that the deposits in the inside of the coating chamber can be cleaned quickly, comprehensively and from multiple angles, and the cleaning efficiency is higher compared with the traditional manual cleaning mode.

[0014] 2. The utility model discloses a cleaning head is controlled by a drive mechanism and an automatic supplementing mechanism to work cooperatively, the cleaning head is controlled to move up and down and the distance of cleaning is compensated respectively, the electric slide is driven to move left and right to clean, the electric push rod and the cleaning head are driven to rotate the rotating table to realize cleaning angle control, so that the deposits in the inside of the coating chamber can be cleaned quickly, comprehensively and from multiple angles, and the cleaning efficiency is higher compared with the traditional manual cleaning mode.

[0015] The dust and debris generated during cleaning are sucked into the inside of the dust suction box through the cleaning head and the cleaning brush, the dust suction pipe penetrating the dust suction box is used to convey the sucked dust and debris to the inside of the dust collector for centralized collection, thereby reducing the cleaning burden of the coating chamber in the later period and facilitating actual use. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a main structure schematic view of the utility model;

[0017] Figure 2 It is a main structure schematic view of the utility model;

[0018] Figure 3 It is an enlarged view of A in the utility model; Figure 2 ​

[0019] Figure 4 For Figure 2 the enlarged view at B in FIG.

[0020] Figure 5 is a schematic view of a cross-section connection structure of the rotating table and the third motor of the utility model.

[0021] In the figure: 1, equipment main body; 2, guide rail; 3, sliding block; 4, electric sliding rail; 5, electric sliding block; 6, first motor; 7, driving wheel; 8, toothed plate; 9, mounting seat; 10, second motor; 11, connecting shaft; 12, mounting table; 13, rotating table; 14, third motor; 15, electric push rod; 16, fixed seat; 17, fourth motor; 18, cleaning head; 19, control valve; 20, connecting pipe; 21, spray head; 22, cleaning liquid delivery pipe; 23, pump body; 24, dust suction box; 25, cleaning brush; 26, dust suction pipe; 27, dust collector; 28, limit telescopic rod. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be apparently and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0023] Embodiment 1: please refer to Figures 1-5 The utility model provides a kind of technical solutions: a cleaning device for vacuum coating machine, including equipment main body 1 and cleaning head 18, the inside of equipment main body 1 is equipped with two guide rails 2, the outer wall of two guide rails 2 is slidably installed with sliding block 3, the side of two sliding blocks 3 is commonly installed with electric sliding rail 4, the inside of electric sliding rail 4 is slidably installed with electric sliding block 5, the side of electric sliding rail 4 is equipped with the drive mechanism of controlling electric sliding rail 4 up and down movement, the side of electric sliding block 5 is installed with mounting seat 9, the inside of mounting seat 9 is installed with second motor 10, the output end of second motor 10 is installed with connecting shaft 11, the other end of connecting shaft 11 is installed with mounting table 12, the inside of mounting table 12 is rotatably installed with rotating table 13, the side of rotating table 13 is installed with third motor 14, the side of rotating table 13 is equipped with the automatic compensation mechanism of controlling cleaning range of cleaning head 18, cleaning head 18 is controlled to work in cooperation by drive mechanism and automatic replenishment mechanism, respectively control cleaning head 18 up and down movement and the distance of compensation to cleaning, cooperate with electric sliding block 5 to drive it to move left and right cleaning, simultaneously drive rotating table 13 to drive electric push rod 15 and cleaning head 18 to realize cleaning angle control, so that the deposit inside coating chamber can be cleaned quickly, comprehensively and multi-angle.

[0024] As Figure 2 and 3 shown, the drive mechanism includes a first motor 6 mounted on the electric slide rail 4, the output end of the first motor 6 is installed with a driving wheel 7, one side of the driving wheel 7 is engaged with a tooth plate 8 installed on the device body 1, when the first motor 6 rotates, the driving wheel 7 rotates with it, since the tooth plate 8 is fixed, the driving wheel 7 rolls on the tooth plate 8, thereby driving the electric slide rail 4 to move up and down as a whole, the two sides of the electric slide rail 4 are slidably installed on the guide rail 2 inside the device body 1 through the sliding block 3, thereby realizing the control of the up and down movement of the cleaning head 18.

[0025] As Figure 3 and 5 shown, the automatic replenishment mechanism includes an electric push rod 15 mounted on the rotating table 13, the output end of the electric push rod 15 is installed with a fixed seat 16, the inside of the fixed seat 16 is installed with a fourth motor 17, the output end of the fourth motor 17 is fixed with one side of the cleaning head 18, the electric push rod is used to expand the cleaning range of the cleaning head 18, which is installed on the fixed seat 16, drives the fourth motor 17 to rotate, thereby driving the electric push rod 15 and the cleaning head 18 to rotate together, adjusting the cleaning direction according to actual needs, the third motor 14 is installed on the mounting table 12, and the connecting shaft 11 is rotatably installed in the inside of the mounting seat 9.

[0026] The working principle is: when it is needed to control the cleaning head 18 to move in the vertical direction, the first motor 6 in the drive mechanism is started, the first motor 6 is installed on the electric slide rail 4, the output end of which is installed with a driving wheel 7, the driving wheel 7 is engaged with a tooth plate 8 installed on the device body 1, when the first motor 6 rotates, the driving wheel 7 rotates with it, since the tooth plate 8 is fixed, the driving wheel 7 rolls on the tooth plate 8, thereby driving the electric slide rail 4 to move up and down as a whole, the two sides of the electric slide rail 4 are slidably installed on the guide rail 2 inside the device body 1 through the sliding block 3, the guide rail 2 provides guidance and support for the up and down movement of the electric slide rail 4, ensuring its smooth and accurate movement, the up and down movement of the electric slide rail 4 drives the mounting seat 9 installed on one side of it and the subsequent connected cleaning head 18 and other components to move up and down together, thereby realizing the cleaning of the deposits at different height positions in the vertical direction of the cleaning head 18;

[0027] When the cleaning head 18 needs to move left and right in the horizontal direction, the electric sliding block 5 slides in the electric sliding rail 4, the movement of the electric sliding block 5 is controlled by the control system, and can move left and right in the electric sliding rail 4 at a certain speed and stroke according to the pre-set program or the manual instruction of the operator, one side of the electric sliding block 5 is provided with the mounting seat 9, so that the left and right movement of the electric sliding block 5 drives the mounting seat 9 and the components such as the cleaning head 18 connected thereto to move in the horizontal direction, so as to clean the deposits at different positions in the horizontal direction inside the coating chamber, through the cooperation of the electric sliding block 5 and the electric sliding rail 4, the cleaning head 18 can cover a larger planar area in the coating chamber, and the comprehensiveness of cleaning is improved.

[0028] The third motor 14 is installed on the mounting table 12, and the output end thereof is connected with the rotating table 13, when it is needed to adjust the cleaning angle of the cleaning head 18, the third motor 14 is started to drive the rotating table 13 to rotate in the mounting table 12, the rotation of the rotating table 13 can change the angle of the electric push rod 15 and the cleaning head 18 installed on one side thereof, when it is needed to clean the deposits in the corners or inclined surfaces of the coating chamber, the third motor 14 can accurately control the rotation angle of the rotating table 13, so that the cleaning head 18 can be aligned with the position to be cleaned at a suitable angle, and the effectiveness of the cleaning work is ensured, the rotation range of the rotating table 13 can be designed according to actual needs to meet the cleaning requirements at different angle positions.

[0029] The electric push rod 15 is installed on the rotating table 13, and the output end thereof is connected with the fixed seat 16, the fourth motor 17 is installed in the fixed seat 16, and the output end of the fourth motor 17 is fixed with the cleaning head 18, when it is needed to compensate the cleaning range of the cleaning head 18, the electric push rod 15 works, and the electric push rod 15 can be extended and retracted, so as to drive the fixed seat 16 and the cleaning head 18 to extend or retract in the horizontal direction, for example, when it is needed to clean the deposits in some recessed or protruding positions, the electric push rod 15 can extend the cleaning head 18 to a suitable position, so that the cleaning head 18 can be closer to the deposits, and the cleaning effect is improved, at the same time, the fourth motor 17 can control the rotation of the cleaning head 18 itself, and further expand the cleaning range, so as to ensure that the deposits on the surfaces with complex shapes can be effectively cleaned, the extension stroke of the electric push rod 15 can be designed according to actual conditions to meet the cleaning requirements at different depth positions, it should be noted that the mechanical control operation elements involved in the present scheme can adopt a programmable logic controller PLC, which can be installed in the control box of the vacuum coating machine, and is used for controlling the driving connection between the electric telescopic rod 15 and the motor, after the cleaning is completed, the cleaning equipment is driven to move to one side of the inner wall of the coating machine, and the normal processing will not be affected.

[0030] Example 2: as Figure 1 and 4As shown, in order to improve the cleaning effect, especially for stubborn stains, one end of the fourth motor 17 is provided with a control valve 19, the output end of the control valve 19 is provided with a connecting pipe 20, the other end of the connecting pipe 20 is provided with a spray head 21, the spray head 21 is installed in the inside of the cleaning head 18, the other end of the control valve 19 is provided with a cleaning liquid delivery pipe 22, the upper end of the cleaning liquid delivery pipe 22 penetrates through the equipment main body 1 and is provided with a pump body 23, the pump body 23 is installed on the equipment main body 1, the cleaning head 18 is installed on the connecting pipe 20, and the pump body 23 is controlled to work. The pump body 23 is installed on the equipment main body 1, which delivers the external cleaning liquid to the inside of the connecting pipe 20 through the cleaning liquid delivery pipe 22. The other end of the connecting pipe 20 is provided with the spray head 21, and the spray head 21 is installed in the inside of the cleaning head 18. The cleaning liquid is sprayed to the inner wall of the coating chamber and other parts to be cleaned under the action of pressure through the spray head 21, so that the deposits are wetted and softened, and are more easily removed by the cleaning brush 25, thereby improving the cleaning efficiency and quality.

[0031] During the cleaning process, dust and debris will be generated, in order to prevent the dust and debris from floating and re-attaching in the coating chamber, the outer wall of the connecting pipe 20 is provided with a dust collection box 24, the outer wall of the dust collection box 24 is provided with a plurality of cleaning brushes 25 arranged in a circle, one side of the dust collection box 24 is provided with a dust suction pipe 26, the upper end of the dust suction pipe 26 penetrates through the equipment main body 1 and is provided with a dust collector 27, the dust collector 27 is installed on the equipment main body 1, the inside of the dust collection box 24 and the dust suction pipe 26 are connected to each other, one side of the electric push rod 15 is provided with a limiting telescopic rod 28, the other end of the limiting telescopic rod 28 is installed on the fixed seat 16, and the dust collector 27 is started. The dust collector 27 is installed on the equipment main body 1, is connected with the dust collection box 24 through the dust suction pipe 26, the outer wall of the dust collection box 24 is provided with a plurality of cleaning brushes 25, when the cleaning brushes 25 brush off the deposits, part of the dust and debris will be raised by the cleaning brushes 25, at this time, the suction force generated by the dust collector 27 is transmitted to the inside of the dust collection box 24 through the dust suction pipe 26, the cleaning brushes 25 around the dust collection box 24 will roll the dust and debris into the dust collection box 24 in the rotating process, and then the dust and debris are sucked away by the dust collector 27 through the dust suction pipe 26 and are concentrated in the dust bag or dust collection container of the dust collector 27. In this way, the inside of the coating chamber can be kept clean, secondary pollution can be avoided, and the burden of cleaning the coating chamber in the later period is also reduced.

[0032] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A cleaning device for a vacuum coater, comprising a device body (1) and a cleaning head (18), characterized in that: The inside of the equipment body (1) is internally mounted with two guide rails (2), the outer walls of the two guide rails (2) are slidably mounted with sliding blocks (3), one side of the two sliding blocks (3) is commonly mounted with an electric sliding rail (4), the inside of the electric sliding rail (4) is slidably mounted with an electric sliding block (5), one side of the electric sliding rail (4) is provided with a drive mechanism for controlling the up-down movement of the electric sliding rail (4), one side of the electric sliding block (5) is mounted with a mounting seat (9), the inside of the mounting seat (9) is mounted with a second motor (10), the output end of the second motor (10) is mounted with a connecting shaft (11), the other end of the connecting shaft (11) is mounted with a mounting table (12), the inside of the mounting table (12) is rotatably mounted with a rotating table (13), one side of the rotating table (13) is mounted with a third motor (14), one side of the rotating table (13) is provided with an automatic compensation mechanism for controlling the cleaning range of the cleaning head (18).

2. The cleaning device for vacuum coating machine according to claim 1, characterized in that: The drive mechanism comprises a first motor (6), the first motor (6) is mounted on the electric sliding rail (4), the output end of the first motor (6) is mounted with a driving wheel (7), one side of the driving wheel (7) is meshedly mounted with a toothed plate (8), the toothed plate (8) is mounted on the equipment body (1).

3. The cleaning device for vacuum coating machine according to claim 1, characterized in that: The automatic compensation mechanism comprises an electric push rod (15), the electric push rod (15) is mounted on the rotating table (13), the output end of the electric push rod (15) is mounted with a fixing seat (16), the inside of the fixing seat (16) is mounted with a fourth motor (17), the output end of the fourth motor (17) is fixed with one side of the cleaning head (18).

4. The cleaning device for vacuum coating machine according to claim 1, characterized in that: The third motor (14) is mounted on the mounting table (12), the connecting shaft (11) is rotatably mounted in the inside of the mounting seat (9).

5. The cleaning device for vacuum coating machine according to claim 3, characterized in that: One end of the fourth motor (17) is mounted with a control valve (19), the output end of the control valve (19) is mounted with a connecting pipe (20), the other end of the connecting pipe (20) is mounted with a spray head (21), the spray head (21) is mounted in the inside of the cleaning head (18), the other end of the control valve (19) is mounted with a cleaning liquid delivery pipe (22), the upper end of the cleaning liquid delivery pipe (22) penetrates through the equipment body (1) and is mounted with a pump body (23), the pump body (23) is mounted on the equipment body (1), the cleaning head (18) is mounted on the connecting pipe (20).

6. The cleaning device for vacuum coating machine according to claim 5, characterized in that: The outer wall of the connecting pipe (20) is mounted with a dust collection box (24), a plurality of cleaning brushes (25) are circumferentially arranged on the outer wall of the dust collection box (24), one side of the dust collection box (24) is mounted with a dust collection pipe (26), the upper end of the dust collection pipe (26) penetrates through the equipment body (1) and is mounted with a dust collector (27), the dust collector (27) is mounted on the equipment body (1).

7. The cleaning device for vacuum coating machine according to claim 6, characterized in that: The inside of the dust collection box (24) and the dust collection pipe (26) are connected with each other, one side of the electric push rod (15) is mounted with a limiting telescopic rod (28), the other end of the limiting telescopic rod (28) is mounted on the fixing seat (16).

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