Disassembling and assembling device for magnetic air floating sliding block of photoetching machine workpiece table

Abstract

The utility model relates to the technical field of ultra-precise air floating motion platforms, in particular to a dismounting device for a magnetic air floating sliding block of a photoetching machine workpiece table. The device comprises a bottom positioning plate and a mounting frame arranged on the bottom positioning plate, and further comprises distance plates which are arranged at the two ends of the mounting frame respectively and can be driven front and back, a driving module for driving the distance plates to move front and back, and positioning pins arranged on the upper side and the lower side of the section of the driving plate. And the plurality of groups of extension blocks are arranged on the mounting frame and between the distance plates. The utility model has the beneficial effects that according to the technical scheme, the motor is ensured to be accurately aligned with the X beam through the adjustment of the hand wheel, the uncertainty of manual operation is avoided, human errors are reduced, and the reliability of equipment and the safety of operation are improved; by adding the plastic protection plate, the accidental adsorption between the motor and the magnetic assembly is reduced, the operation difficulty and the safety risk are reduced, and the safe installation of the motor in a high magnetic environment is ensured.

Description

Technical Field

[0001] This utility model relates to the field of ultra-precision air-bearing motion platform technology, and in particular to a disassembly and assembly device for a magnetic air-bearing slider of a lithography machine workpiece stage. Background Technology

[0002] The ultra-precision stage is one of the core components of a lithography machine. Its motion accuracy directly affects the machine's resolution, while its speed and acceleration directly affect its production efficiency. To achieve high acceleration, high speed, and high precision motion over a long stroke range, lithography machine stages generally employ a coarse-fine stage stacked structure. The coarse stage performs large-stroke, micrometer-level precision motion; the micro (fine) stage, with a small stroke, is stacked on top of the coarse stage to compensate for its motion errors, ultimately achieving nanometer-level motion accuracy.

[0003] The existing technology, CN218844859U, uses a magnetic air-bearing sliding platform as the core component of the coarse motion stage. This platform is designed as a single frame capable of free translation in the X and Y planes, supported by air bearings and magnetically pre-tensioned by strong magnets attracting each other. A motion unit is arranged on the counterweight block, with the stators of two Y-axis linear motors rigidly fixed to the base. The motion unit and the counterweight block are connected by air-bearing guide rails. Ignoring pipeline pull and air-bearing friction, the forces exerted by the linear motors on the motion unit and the counterweight block are equal in magnitude and opposite in direction. Due to the reaction force exerted by the linear motors, the counterweight block moves to the opposite side, maintaining momentum conservation between the motion unit and the counterweight block. When the X and Y axis linear motors move simultaneously, the base performs free two-dimensional motion in the plane. Since the mass of the base can be designed to be greater than that of the motion unit, the adverse effects of excessive base travel on the overall machine space design are avoided while still satisfying momentum conservation.

[0004] The installation, disassembly, and adjustment of the magnetic air-bearing sliding platform are very difficult. Because the gap between the air-bearing module and the bottom guide rail is only 5-10µm, and the presence of a strong magnet causes a huge attraction between the platform and the bottom magnet, in order to achieve stable installation and adjustment within a very small range, it is necessary to design a disassembly and assembly device for the magnetic air-bearing slider of the lithography machine workpiece stage to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a disassembly and assembly device for the magnetic air-bearing slider of a lithography machine workpiece stage, so as to overcome the above-mentioned shortcomings of the existing technology.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A disassembly and assembly device for a magnetic air-floating slider of a lithography machine workpiece stage includes a bottom positioning plate and an mounting frame disposed on the bottom positioning plate. The device is characterized by further including a distance plate disposed at both ends of the mounting frame and capable of being driven back and forth, a drive module for driving the distance plate to move back and forth, positioning pins disposed on the upper and lower sides of the cross-section of the distance plate, and a plurality of extension blocks disposed on the mounting frame and placed between the distance plates.

[0008] Preferably, the extension block has a threaded hole.

[0009] Preferably, plastic protective plates are provided on the outer sides of the distance plates at both ends.

[0010] Preferably, the drive module includes lead screws respectively installed at both ends of the mounting frame and threadedly connected to the distance plate, rollers respectively installed with the lead screws and located at the outer ends, handwheels respectively installed with the rollers via rotating shafts, and belts wound around the two sets of rollers.

[0011] Preferably, a plurality of shafts are provided between the mounting frame and the bottom positioning plate, each shaft is fitted with a spring, the mounting frame has a shaft hole for inserting the shaft, one end of the spring is positioned against the bottom positioning plate, and the other end is positioned against the shaft hole.

[0012] The beneficial effects of this utility model are: the handwheel adjustment of this technical solution ensures accurate alignment between the motor and the X-beam, avoids the uncertainty of manual operation, reduces human error, and improves the reliability and safety of the equipment; the addition of the plastic protective plate reduces accidental adsorption between the motor and the magnetic components, reduces the difficulty of operation and safety risks, and ensures the safe installation of the motor in a high magnetic environment. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the disassembly and assembly device for a magnetic air-floating slider of a lithography machine workpiece stage according to the present invention.

[0014] Figure 2 This is a partial schematic diagram of the disassembly and assembly device for the magnetic air-floating slider of a lithography machine workpiece stage according to the present invention.

[0015] In the diagram: 1. Bottom positioning plate; 2. Mounting frame; 3. Distance plate; 4. Drive module; 5. Positioning pin; 6. Extension block; 41. Lead screw; 42. Roller; 43. Handwheel; 44. Belt; 7. Shaft; 8. Spring. Detailed Implementation

[0016] Reference Figures 1 to 2A disassembly and assembly device for a magnetic air-floating slider of a lithography machine workpiece stage, comprising a bottom positioning plate 1, an mounting frame 2 disposed on the bottom positioning plate, a distance plate 3 disposed at both ends of the mounting frame and capable of being driven back and forth, a drive module 4 for driving the distance plate to move back and forth, and positioning pins 5 disposed on the upper and lower sides of the cross-section of the distance plate.

[0017] The positioning pin 5 is used to ensure precise alignment between the motor and the mounting holes of the X-beam during installation. The positioning pin acts as a guide during installation, reducing the possibility of installation errors. Specifically, it is inserted into the mounting holes of the X-beam to hold the motor and X-beam in a fixed position. The positioning pin design ensures precise alignment between the motor and the X-beam holes during installation, avoiding the need for multiple alignment attempts, a common time-consuming problem in existing technologies. The positioning pin reduces the time spent on repeated alignment adjustments during installation, improving work efficiency, especially in production environments requiring efficient disassembly and assembly, significantly improving equipment maintenance efficiency.

[0018] To provide necessary support and space, ensuring sufficient operating space for the motor during installation and adequate support on the X-beam, several sets of extension blocks 6 are placed on the mounting frame between the distance plates. These extension blocks have threaded holes for fixing to the upper half of the upper magnetic air-bearing slider. Bolts are threaded into these holes and fixed to the upper half of the extension blocks, ensuring smooth and reliable contact with the X-beam. The extension blocks eliminate the need for additional manpower or auxiliary equipment to support or secure the motor during installation, whereas existing technologies may require multiple operators. This tool significantly simplifies the process, allowing a single person to safely install the motor; it reduces manpower requirements and, through optimized tool design, makes installation more stable and safer, simplifying the operation steps.

[0019] During motor installation and removal, the strong magnetic force poses a certain risk. Plastic protective plates 9 are installed on the outer sides of the distance plates at both ends to prevent direct contact between the motor coil and the X-beam magnetic plate. Due to the strong magnetic force, these plates prevent the motor from accidentally attracting the magnetic plate, which could lead to operational errors or equipment damage. The plastic protective plates are mounted on the distance plates via a rotating shaft. Before installing the motor, the plastic protective plates are installed first and secured in their corresponding positions. The plastic protective plates in the tool effectively prevent accidental attraction between the motor coil and the X-beam magnetic plate, a common problem in existing technologies. The X-beam's magnetic force is extremely strong (approximately 6700N). Without protective measures, the motor could be attracted by the magnetism during installation, leading to installation failure or even equipment damage.

[0020] The distance between the motor and the worktable (or X-beam) is controlled by a distance plate, preventing direct contact between the motor and the X-beam or other sensitive components during installation or disassembly, which could cause scratches or damage to the equipment surface. The distance plate and handwheel are used together to precisely control the motor's movement path, preventing physical damage to the equipment surface and extending the equipment's service life.

[0021] The drive module 4 includes lead screws 41 respectively installed at both ends of the mounting frame 2 and threadedly connected to the distance plate, rollers 42 respectively installed in conjunction with the lead screws and located at the outer ends, handwheels 43 respectively installed in conjunction with the rollers via rotating shafts, and belts 44 wound around the two sets of rollers; the two sets of rollers are connected to each other by the belts, so that when one handwheel is rotated, the other side can rotate synchronously, thereby driving the distance plate synchronously to ensure its accuracy; by rotating the handwheel clockwise or counterclockwise, the operator can precisely control the forward and backward movement of the distance plate to ensure that the motor can safely and accurately approach or move away from the X-beam;

[0022] By controlling the height of the tool with a handwheel, the motor can be precisely aligned with the X-beam, avoiding errors and misalignments caused by manual operation in existing technologies. This significantly improves the accuracy of the installation process and reduces potential mechanical damage when the motor is connected to the X-beam.

[0023] To accommodate different heights, several sets of shafts 7 are provided between the mounting frame and the bottom positioning plate 1. Springs 8 are sleeved on the shafts. The mounting frame has shaft holes for inserting the shafts. One end of the spring supports the bottom positioning plate 1, and the other end supports the shaft hole. The entire structure can be adjusted up and down by pressing the mounting frame, thus adapting to the disassembly of sliders of different heights.

[0024] The advantages of this utility model are that the handwheel adjustment ensures accurate alignment between the motor and the X-beam, avoiding the uncertainty of manual operation, reducing human error, and improving the reliability and safety of the equipment; the addition of the plastic protective plate reduces accidental attraction between the motor and the magnetic components, lowers the difficulty of operation and safety risks, and ensures the safe installation of the motor in a high magnetic environment.

[0025] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A disassembly and assembly device for a magnetic air-floating slider of a lithography machine workpiece stage, comprising a bottom positioning plate and a mounting frame disposed on the bottom positioning plate, characterized in that: It also includes distance plates respectively disposed at both ends of the mounting frame and capable of being driven back and forth, a drive module for driving the distance plates to move back and forth, positioning pins disposed on the upper and lower sides of the cross-section of the distance plates, and several sets of extension blocks on the mounting frame and placed between the distance plates.

2. The disassembly and assembly device for the magnetic air-bearing slider of a lithography machine workpiece stage according to claim 1, characterized in that: The extension block has a threaded hole.

3. The disassembly and assembly device for the magnetic air-bearing slider of a lithography machine workpiece stage according to claim 1, characterized in that: Plastic protective plates are installed on the outer side of the distance plates at both ends.

4. The disassembly and assembly device for the magnetic air-bearing slider of a lithography machine workpiece stage according to claim 1, characterized in that: The drive module includes lead screws respectively installed at both ends of the mounting frame and threaded to the distance plate, rollers respectively installed with the lead screws and placed at the outer ends, handwheels respectively installed with the rollers via rotating shafts, and belts wound around the two sets of rollers.

5. The disassembly and assembly device for the magnetic air-bearing slider of a lithography machine workpiece stage according to claim 1, characterized in that: Several sets of shafts are provided between the mounting frame and the bottom positioning plate. Springs are sleeved on the shafts. The mounting frame has shaft holes for inserting the shafts. One end of the spring supports the bottom positioning plate, and the other end supports the shaft hole.

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