Feeding system of polycrystalline silicon reduction furnace and reduction furnace

Abstract

The utility model discloses a feeding system of a polycrystalline silicon reduction furnace and the reduction furnace, the feeding system of the polycrystalline silicon reduction furnace comprises a reduction furnace main body, a reduction base and an outer cover are provided with a plurality of mutually communicated annular feeding channels, and the annular feeding channels are provided with a plurality of feeding ports on the reduction base; the conveying pipe is communicated with the annular feeding channel; the injection orifice is formed in the center of the reduction base, an air exhaust unit is arranged at the injection orifice, and mixed gas can flow through each silicon rod through the annular feeding channel and the multiple feeding ports evenly formed in the annular feeding channel, so that the problem that the generation rates of polycrystalline silicon on the inner silicon rod and the outer silicon rod are inconsistent is solved; in addition, the injection orifice is formed in the center of the reduction furnace and is matched with the air exhaust unit, so that the discharging speed of the feeding hole in the inner side can be further increased, the discharging speed of the feeding holes in the inner side and the outer side can be further reduced, meanwhile, the airflow speed in the reduction furnace can be increased, the forming speed of polycrystalline silicon is increased, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to polycrystalline silicon production equipment technical field, concretely is a kind of polycrystalline silicon reduction furnace's feeding system and reduction furnace. BACKGROUND

[0002] At present, polycrystalline silicon is formed on silicon rod by introducing refined trichlorosilane and hydrogen gas mixture into reduction furnace during production, when feeding, generally, feed inlet and feed pipe are connected by being arranged on the lower side of the outer cover of reduction furnace, so that mixed gas is put into reduction furnace, then discharge pipe is formed on the top of outer cover to form gas circulation, so that polycrystalline silicon is formed on silicon rod.

[0003] However, the above feeding mode cannot make gas flow uniformly to each silicon rod, so that the formation rate of polycrystalline silicon at the center position of reduction furnace is lower than that at the outer side, so that the formation speed of inner and outer polycrystalline silicon is inconsistent, which affects the overall production rate and quality, therefore, we design feeding system and reduction furnace of the feeding system.

[0004] The above content is only used to assist understanding of the technical scheme of the utility model, and does not represent that the above content is the closest prior art. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a kind of feeding system of polycrystalline silicon reduction furnace to solve the problems raised in the above background art, to achieve the above purpose, the utility model provides the following technical scheme: a kind of feeding system of polycrystalline silicon reduction furnace, including reduction furnace main body, the reduction furnace main body includes reduction base and the outer cover being set on the reduction base, the reduction base and outer cover are provided with annular feeding channel being communicated, the annular feeding channel is provided with multiple feed inlets on the reduction base;

[0006] feed pipe, and the annular feeding channel is communicated and feeds into reduction furnace main body from the reduction base;

[0007] spraying port, set in the center of reduction base, and communicated with annular feeding channel, the spraying port position is provided with suction unit.

[0008] Preferably, the annular feeding channel includes:

[0009] first annular channel, is set on the bottom of outer cover, and is detachably communicated with feed pipe;

[0010] Multiple second annular channels are sequentially concentrically arranged on the reduction base with silicon rod annular arrangement and communicated with the first annular channel.

[0011] Preferably, the plurality of feed ports are opened on the reduction base at the locations of the plurality of second annular channels and feed materials into the main body of the reduction furnace.

[0012] Preferably, the injection port is connected to the innermost second annular channel.

[0013] Preferably, the air extraction unit includes:

[0014] An air extraction groove is formed at the center of the reduction base and is connected to the second annular channel;

[0015] The opening and closing door is rotatably mounted on the reduction base at the outlet of the extraction tank to control the communication between the extraction tank and the inside of the reduction furnace;

[0016] A sliding piston is slidably disposed within the air extraction groove;

[0017] A power component is connected to the sliding piston to drive the sliding piston to slide up and down;

[0018] Two elastic telescopic components are symmetrically arranged between the sliding piston and the opening / closing door, so as to synchronously drive the opening / closing door to open and close when the power component drives the sliding piston to slide.

[0019] Preferably, the elastic telescopic member includes:

[0020] A connecting rod is rotatably connected to the opening and closing door at one end and a sliding cylinder is provided at the other end. The connecting rod is slidably limited inside the sliding cylinder, and the end of the sliding cylinder away from the connecting rod is rotatably connected to a sliding piston.

[0021] A compression spring is fitted inside the slide cylinder onto the connecting rod. One end of the compression spring is fixed to the end of the connecting pipe inside the slide cylinder, and the other end abuts against the outer end of the slide cylinder.

[0022] Preferably, a limiting plate is provided at the lower end of the opening and closing door for the air extraction groove.

[0023] A reduction furnace, wherein a discharge pipe is provided at the top of the main body of the reduction furnace.

[0024] Compared with the prior art, the beneficial effects of this utility model are:

[0025] This invention utilizes an annular feeding channel and multiple uniformly arranged feeding ports to allow mixed gas to flow through each silicon rod, thereby reducing the problem of inconsistent polysilicon formation rates on the inner and outer silicon rods. Furthermore, by setting an injection port in the center of the reduction furnace in conjunction with an extraction unit, the discharge speed of the inner feeding port can be further accelerated, thereby further reducing the discharge speed of the inner and outer feeding ports. At the same time, it can also accelerate the airflow speed inside the reduction furnace to speed up the polysilicon formation rate and improve production efficiency. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0027] Figure 2 This is a top view of the interior of this utility model;

[0028] Figure 3 This is a front sectional view of the air extraction unit of this utility model;

[0029] Figure 4 for Figure 2 Enlarged view of point A in the middle.

[0030] Reference numerals in the attached drawings: 1-Reduction base; 2-Outer cover; 3-Annular feeding channel; 31-First annular channel; 32-Second annular channel; 4-Feed inlet; 5-Conveying pipe; 6-Injection nozzle; 7-Evacuation unit; 71-Evacuation groove; 72-Opening and closing door; 73-Sliding piston; 74-Power component; 75-Elastic telescopic component; 751-Connecting rod; 752-Slide cylinder; 753-Compression spring; 76-Limiting plate; 8-Discharge pipe. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] Please see Figures 1-4 This utility model provides a technical solution: a feeding system for a polycrystalline silicon reduction furnace, including a reduction furnace body, the reduction furnace body including a reduction base 1 and an outer cover 2 disposed on the reduction base 1, the reduction base 1 and the outer cover 2 being provided with a plurality of interconnected annular feeding channels 3, and the annular feeding channels 3 being provided with a plurality of feeding ports 4 on the reduction base 1.

[0033] The conveying pipe 5 is connected to the annular feeding channel 3 and feeds material into the main body of the reduction furnace from the reduction base 1. The conveying pipe 5 is fed quantitatively by a conveying pump.

[0034] The injection port 6 is located at the center of the reduction base 1 and is connected to the annular feed channel 3. An air extraction unit 7 is provided at the position of the injection port 6.

[0035] The annular feed channel 3 includes:

[0036] The first annular channel 31 is provided at the bottom of the outer cover 2 and is detachably connected to the conveying pipe 5;

[0037] Multiple second annular channels 32 are arranged concentrically in a ring on the reduction base 1 and connected to the first annular channel 31.

[0038] In addition, multiple feed ports 4 are opened on the reduction base 1 at multiple locations of the second annular channel 32, and feed materials into the reduction furnace body.

[0039] Meanwhile, the injection port 6 is connected to the innermost second annular channel 32.

[0040] The air extraction unit 7 includes:

[0041] An air extraction groove 71 is opened at the center of the reduction base 1 and is connected to the second annular channel 32;

[0042] The opening and closing door 72 is rotatably mounted on the reduction base 1 at the outlet of the exhaust trough 71 to control the communication between the exhaust trough 71 and the inside of the reduction furnace;

[0043] The sliding piston 73 is slidably disposed within the air extraction groove 71;

[0044] The power component 74 is connected to the sliding piston 73 to drive the sliding piston 73 to slide up and down. The power component 74 can also be set as an electric telescopic rod or other device with telescopic function, such as a cylinder, etc., and its telescopic end is connected to the telescopic end of the sliding piston 73.

[0045] Two elastic telescopic members 75 are symmetrically arranged between the sliding piston 73 and the opening and closing door 72, and are used to simultaneously drive the opening and closing door 72 to open and close when the power member 74 drives the sliding piston 73 to slide.

[0046] Additionally, the elastic telescopic member 75 includes:

[0047] A connecting rod 751 is rotatably connected to the opening and closing door 72 at one end and a sliding cylinder 752 is provided at the other end. The connecting rod 751 is slidably limited inside the sliding cylinder 752. The end of the sliding cylinder 752 away from the connecting rod 751 is rotatably connected to the sliding piston 73.

[0048] A compression spring 753 is sleeved inside the slide cylinder 752 on the connecting rod 751. One end of the compression spring 753 is fixed to the end of the connecting pipe inside the slide cylinder 752, and the other end abuts against the outer end of the slide cylinder 752.

[0049] Meanwhile, the air extraction groove 71 is provided with a limiting plate 76 at the lower end of the opening and closing door 72 to limit the downward rotation of the opening and closing door 72.

[0050] In actual operation, the conveying pipe 5 feeds a mixture of trichlorosilane and hydrogen gas into the annular feed channel 3. This mixture first enters the first annular channel 31 inside the outer cover 2, then enters the second annular channel 32, and is discharged from the feed inlets 4 evenly distributed on the reduction base 1. To increase the discharge speed of the feed inlets 4 on the side away from the conveying pipe 5, the initial opening and closing gate 72 and the elastic telescopic component 75 are adjusted as follows during actual feeding. Figure 3 As shown in the diagram, during operation, the power component 74 first drives the sliding piston 73 to slide downwards. At this time, the airflow will move into the suction groove 71. At this time, the opening and closing door 72 is in the open and closed state, and the elastic telescopic component 75 will be stretched. Then, the power component 74 drives the sliding piston 73 to slide upwards, discharging the mixed gas in the suction groove upwards. When it reaches the initial state, since the opening and closing door 72 is closed, the discharged mixed gas will be discharged into the innermost annular feed channel 3. Then it continues to move upwards until the opening and closing door 72 opens, and the airflow will be discharged upwards from there.

[0051] The technologies implemented in this workflow are as follows: First, by extending and retracting the sliding piston, the amount of mixed gas output from the center of the reduction furnace during quantitative material feeding can be increased, thereby reducing the flow difference between the inner and outer sides and solving the problem of inconsistent polycrystalline silicon formation rates between the inner and outer sides; Second, the airflow generated at the opening and closing door can accelerate the formation rate of the silicon rod at the very center, further balancing the difference between the inner and outer sides.

[0052] A reduction furnace, wherein a discharge pipe 8 is provided on the top of the main body of the reduction furnace.

[0053] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0054] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A feeding system for a polycrystalline silicon reduction furnace, comprising a reduction furnace body, the reduction furnace body including a reduction base (1) and an outer cover (2) disposed on the reduction base (1), characterized in that, The reduction base (1) is provided with multiple annular feeding channels (3), and multiple feeding ports (4) are opened on the annular feeding channels (3). The conveying pipe (5) is connected to each of the annular feeding channels (3) and is used to introduce mixed gas into each of the annular feeding channels (3); The injection port (6) is located at the center of the reduction base (1) and is connected to the annular feeding channel (3) at the center. An air extraction unit (7) is provided at the injection port (6). The air extraction unit (7) includes: An air extraction groove (71) is located at the center of the reduction base (1) and is opened below and connected to the injection port (6); The opening and closing door (72) is rotatably mounted on the reduction base (1) at the outlet of the extraction groove (71) to control the communication between the extraction groove (71) and the inside of the reduction furnace; A sliding piston (73) is slidably disposed within the air extraction groove (71); The power component (74) is connected to the sliding piston (73) to drive the sliding piston (73) to slide up and down; Two elastic telescopic members (75) are symmetrically arranged between the sliding piston (73) and the opening and closing door (72) to simultaneously drive the opening and closing door (72) to open and close when the power member (74) drives the sliding piston (73) to slide.

2. The feeding system for a polycrystalline silicon reduction furnace according to claim 1, characterized in that, The annular feed channel (3) includes: The first annular channel (31) is provided at the bottom of the outer cover (2) and is detachably connected to the conveying pipe (5); Multiple second annular channels (32) are arranged concentrically in a silicon rod ring on the reduction base (1) and connected to the first annular channel (31).

3. The feeding system for a polycrystalline silicon reduction furnace according to claim 2, characterized in that, Multiple feed ports (4) are opened on the reduction base (1) at multiple locations of the second annular channel (32) and feed into the reduction furnace body.

4. The feeding system for a polycrystalline silicon reduction furnace according to claim 2, characterized in that, The injection port (6) is connected to the innermost second annular channel (32).

5. The feeding system for a polycrystalline silicon reduction furnace according to claim 1, characterized in that, The elastic telescopic member (75) includes: A connecting rod (751) is rotatably connected to the opening and closing door (72) at one end and a sliding cylinder (752) is provided at the other end. The connecting rod (751) is limited and slidably arranged inside the sliding cylinder (752). The end of the sliding cylinder (752) away from the connecting rod (751) is rotatably connected to the sliding piston (73). A compression spring (753) is sleeved inside the slide cylinder (752) on the connecting rod (751). One end of the compression spring (753) is fixed to the end of the connecting pipe inside the slide cylinder (752), and the other end abuts against the outer end of the slide cylinder (752).

6. The feeding system for a polycrystalline silicon reduction furnace according to claim 5, characterized in that, The air extraction slot (71) is located at the lower end of the opening and closing door (72) and a limiting plate (76) is provided.

7. A reduction furnace, characterized in that, The feeding system of a polycrystalline silicon reduction furnace according to any one of claims 1-6 is provided with a discharge pipe (8) at the top of the main body of the reduction furnace.

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