Folding inspection equipment
By designing a folding inspection device and utilizing the alternating arrangement of fixed components and fixed blocks, the problem of reduced inspection reliability caused by deformation of thin-film glass during folding was solved, and rapid and reliable flexural strength measurement was achieved.
Patent Information
- Application Number
- CN202520329013.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2024-04-09
- Filing Date
- 2025-02-27
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2035-02-27
AI Technical Summary
Existing technologies for inspecting the folding of thin-film glass are prone to reduced reliability due to deformation, and require separate inspection of cracks, which increases time consumption.
The folding inspection equipment uses a design of first and second plates, fixing components, and fixing blocks to prevent deformation of the thin film glass. The fixing blocks are alternately arranged in the first and second directions to fix multiple outer surfaces of the thin film glass, ensuring that the position of the thin film glass remains unchanged when pressure is applied, thus improving the reliability of the flexural strength test.
It effectively prevents deformation of the thin-film glass during the folding process, simplifies the inspection process, shortens the inspection time, and improves the reliability of flexural strength measurement.
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Figure CN223883160U_ABST
Abstract
Description
[0001] Cross Reference to Related Applications
[0002] This application claims priority to and a bar prosequi of Korean Patent Application No. 10-2024-0047769 filed on April 9, 2024, in the Korean Intellectual Property Office, the entire contents of which are hereby incorporated by reference. TECHNICAL FIELD
[0003] The present disclosure relates to a folding inspection apparatus, and more particularly, to a folding inspection apparatus for thin film glass. BACKGROUND
[0004] A display device includes a display module including a window and a display panel. The display panel can include various elements such as display elements, touch elements, or detection elements, etc., which are activated in response to an electrical signal.
[0005] The window protects the display panel and provides an active area to a user. Accordingly, the user provides an input to the display panel or receives information generated in the display panel through the window. In addition, the display panel can be stably protected from external impact through the window.
[0006] Recently, due to a trend of providing slimness of a display device and expandability of a display area, a folding property of a display module is becoming important. SUMMARY
[0007] The present disclosure provides a folding inspection apparatus which prevents a decrease in inspection reliability caused by deformation of thin film glass when folding the thin film glass and measuring a flexural strength of the thin film glass.
[0008] The present disclosure also provides a folding inspection apparatus which can shorten a time required for inspection since a crack of the thin film glass does not need to be separately inspected.
[0009] Embodiments of the present application provide a folding inspection apparatus including: a first plate on which a foldable film glass is seated; a second plate facing the first plate in a first direction and on which the foldable film glass is disposed; a first fixing member disposed on one end of the first plate and in which a plurality of first grooves are defined; a second fixing member disposed on one end of the second plate and in which a plurality of second grooves corresponding to the plurality of first grooves in the first direction are defined, respectively; a first fixing block coupled to a portion of the plurality of first grooves and in contact with at least one outer surface among a plurality of outer surfaces of the foldable film glass; and a second fixing block coupled to a portion of the plurality of second grooves and in contact with at least one outer surface among the plurality of outer surfaces of the foldable film glass, wherein the first fixing block and the second fixing block do not overlap each other in the first direction.
[0010] In embodiments, the first fixing block and the second fixing block can each be provided as a plurality, and the plurality of first fixing blocks and the plurality of second fixing blocks can be alternately disposed in a second direction crossing the first direction and in a third direction crossing the second direction.
[0011] In embodiments, a first thickness of the first fixing block along the first direction and a second thickness of the second fixing block along the first direction can be greater than a thickness of the foldable film glass along the first direction.
[0012] In embodiments, the plurality of first grooves can include a first (1-1) groove extending in a second direction crossing the first direction and a first (1-2) groove extending in a third direction crossing the second direction, the plurality of second grooves can include a second (2-1) groove extending in the second direction and a second (2-2) groove extending in the third direction, and the first (1-1) groove can correspond to the second (2-1) groove in the first direction, and the first (1-2) groove can correspond to the second (2-2) groove in the first direction.
[0013] In embodiments, the first (1-1) groove can be provided as a plurality, at least one of the plurality of first (1-1) grooves can extend to the first (1-2) groove, the second (2-1) groove can be provided as a plurality, and at least one of the plurality of second (2-1) grooves can extend to the second (2-2) groove.
[0014] In an embodiment, the first (1-1) groove and the first (2-1) groove can each be provided as a plurality, the plurality of first (1-1) grooves can include a first row in which first (1-1) grooves among the plurality of first (1-1) grooves are arranged along the second direction, and a second row in which first (1-1) grooves among the plurality of first (1-1) grooves are arranged along the second direction, and the second row is spaced apart from the first row along the third direction, and the plurality of first (2-1) grooves can include a third row in which first (2-1) grooves among the plurality of first (2-1) grooves are arranged along the second direction, and a fourth row in which first (2-1) grooves among the plurality of first (2-1) grooves are arranged along the second direction, and the fourth row is spaced apart from the third row along the third direction.
[0015] In an embodiment, the first (1-2) groove and the first (2-2) groove can each be provided as a plurality, and the plurality of first (1-2) grooves can be arranged along the third direction, and the plurality of first (2-2) grooves can be arranged along the third direction.
[0016] In an embodiment, the first fixing block can be provided as a plurality, the plurality of first fixing blocks can include a first (1-1) fixing block coupled to the first (1-1) groove, and a first (1-2) fixing block coupled to the first (1-2) groove, the second fixing block can be provided as a plurality, and the plurality of second fixing blocks can include a first (2-1) fixing block coupled to the first (2-1) groove, and a first (2-2) fixing block coupled to the first (2-2) groove.
[0017] In an embodiment, a minimum distance between the plurality of first fixing blocks and the plurality of second fixing blocks along the second direction can be about 5 mm or more.
[0018] In an embodiment, the first (1-1) fixing block and the first (2-1) fixing block can be in contact with a first outer surface extending in the second direction among the plurality of outer surfaces of the foldable thin film glass, and the first (1-2) fixing block and the first (2-2) fixing block can be in contact with a second outer surface extending in the third direction among the plurality of outer surfaces of the foldable thin film glass.
[0019] In an embodiment, the foldable thin film glass disposed on the first plate and the second plate can include a folded portion, a curvature of the folded portion becoming larger as the first plate and the second plate approach each other.
[0020] In an embodiment, the first fixing member can correspond to the second fixing member in the first direction.
[0021] In an embodiment, the foldable thin film glass can include a first portion disposed on the first plate, a second portion disposed on the second plate, and a folding portion connected to the first portion and the second portion and being foldable, the first fixing block can fix an end of the first portion, and the second fixing block can fix an end of the second portion.
[0022] In an embodiment, a thickness of the foldable thin film glass can be about 100 micrometers or less.
[0023] In an embodiment, the first fixing member can be detachably coupled to the first plate, and the second fixing member can be detachably coupled to the second plate.
[0024] In an embodiment, the first fixing block can be detachably coupled to the first fixing member, and the second fixing block can be detachably coupled to the second fixing member.
[0025] In an embodiment of the present disclosure, a folding inspection apparatus includes a first plate on which a foldable thin film glass is disposed, a second plate facing the first plate in a first direction and on which the foldable thin film glass is also disposed, a first fixing member disposed on one end of the first plate and in which a plurality of first grooves are defined, a second fixing member disposed on one end of the second plate and in which a plurality of second grooves corresponding to the plurality of first grooves in the first direction are defined, respectively, a first fixing block coupled to a portion of the plurality of first grooves and in contact with at least one outer surface among a plurality of outer surfaces of the foldable thin film glass, and a second fixing block coupled to a portion of the plurality of second grooves and in contact with at least one outer surface among the plurality of outer surfaces of the foldable thin film glass, wherein the first fixing block and the second fixing block are each provided as a plurality, and the plurality of first fixing blocks and the plurality of second fixing blocks are alternately disposed along a second direction crossing the first direction and along a third direction crossing the second direction.
[0026] In an embodiment, a first thickness of the first fixing block in the first direction and a second thickness of the second fixing block in the first direction can be greater than a thickness of the foldable thin film glass in the first direction.
[0027] In an embodiment, a minimum distance between the plurality of first fixing blocks and the plurality of second fixing blocks in the second direction can be about 5 mm or more.
[0028] In an embodiment, the foldable thin film glass can include a first portion disposed on the first plate, a second portion disposed on the second plate, and a folding portion connected to the first portion and the second portion and being foldable, the first fixing block can fix an end of the first portion, and the second fixing block can fix an end of the second portion. BRIEF DESCRIPTION OF DRAWINGS
[0029] The accompanying drawings are included to provide a further understanding of the present application, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the present application and, together with the description, serve to explain the principles of the present application. In the drawings:
[0030] Figures 1A-1C is a perspective view of an embodiment of a display device according to the present application;
[0031] Figure 2A and Figure 2B is a perspective view of another embodiment of a display device according to the present application;
[0032] Figure 3 is a cross-sectional view of an embodiment of a display module according to the present application;
[0033] Figure 4 is a perspective view of an embodiment of a folding inspection apparatus according to the present application;
[0034] Figure 5 is a perspective view of an embodiment of a folding inspection apparatus according to the present application;
[0035] Figure 6 is a front perspective view of an embodiment of a folding inspection apparatus according to the present application;
[0036] Figure 7 is a perspective view of an embodiment of a second fixing member and a second plate of a folding inspection apparatus according to the present application;
[0037] Figure 8 is a perspective view of an embodiment of a first fixing member and a first plate of a folding inspection apparatus according to the present application;
[0038] Figure 9 is a plan view of an embodiment of a first fixing member and a second fixing member according to the present application;
[0039] Figure 10A and Figure 10B is a plan view of another embodiment of a first fixing member and a second fixing member according to the present application; and
[0040] Figure 11A and Figure 11B is a plan view of another embodiment of the first and second fixing members according to the present utility model. DETAILED DESCRIPTION
[0041] In this specification, it will be understood that when an element (or a region, layer, part, etc.) is referred to as being "on" another element or layer, "connected to" or "coupled to" another element or layer, it can be directly present on / connected to / coupled to the other element or layer or one intervening element can be present.
[0042] Throughout this specification and the accompanying drawings, like reference numerals or symbols refer to like elements. Also, in the drawings, the thickness, proportions and sizes of elements are exaggerated for the sake of effective description of the technical content. As used herein, the term "and / or" includes any combination of one or more of the associated listed items and all combinations thereof.
[0043] Various components can be described using terms such as first and second, but the components should not be limited by these terms. These terms are used only for the purpose of distinguishing one component from another component. For example, a first component can be referred to as a second component, and similarly, a second component can be referred to as a first component without departing from the scope of the utility model. Singular expressions include plural expressions unless the context clearly dictates otherwise.
[0044] For ease of description, spatial relative terms such as "below", "under", "lower", "over", and "upper" can be used herein to describe a relationship of one element or feature to another element (s) or feature (s) as illustrated in the drawings. It will be understood that the spatial relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the drawings.
[0045] It will also be understood that the terms "including" and / or "comprising", when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.
[0046] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
[0047] Hereinafter, embodiments of the present application will be described with reference to the accompanying drawings.
[0048] Figures 1A-1C is a perspective view of an embodiment of the display device according to the present application. Figure 1A shows the display device in an unfolded state, Figure 1B shows a state in which the display device is folded in a first mode, and Figure 1C shows a state in which the display device is folded in a second mode. The first mode can be an inner folding state, and the second mode can be an outer folding state. Hereinafter, embodiments of the present application will be described with reference to Figures 1A-1C
[0049] With reference to Figure 1A , the display device DD in the embodiments of the present application can have a quadrilateral shape in a plan view, for example, a rectangular shape having a short side extending in a first direction DR1 and a long side extending in a second direction DR2 intersecting the first direction DR1. However, the present application is not limited thereto, and the display device DD can have various shapes such as a circular shape and a polygonal shape. The display device DD can be a flexible display device.
[0050] Hereinafter, a direction substantially intersecting a plane defined by the first direction DR1 and the second direction DR2 can be defined as a third direction DR3. Further, in the present specification, the expression "in a plan view" can mean "a state observed from the third direction DR3". Hereinafter, the first direction DR1 to the third direction DR3 are shown in the drawings, and the directions indicated by the first direction DR1 to the third direction DR3 described herein can have a relative concept, and thus can be changed to other directions.
[0051] The display device DD can include a window WN and a display panel DP. The window WN can be disposed on an upper surface of the display panel DP, and can protect the display panel DP. The window WN can be optically transparent, and can have a predetermined rigidity. In the present embodiment, the window WN can include glass. The window WN can have a relatively small thickness so as to have flexibility. In an embodiment, for example, the window WN can have a thickness of, for example, less than about 100 micrometers (pm).
[0052] The display panel DP can display an image IM in response to an electrical signal. In the present embodiment, the display panel DP can display the image IM in the upper surface, and the window WN can cover the upper surface in which the image IM is substantially displayed. The display panel DP can be a self-emissive display panel, and can be, for example, an organic light-emitting display panel, an inorganic light-emitting display panel, or a quantum dot light-emitting display panel. However, this is an illustrative embodiment, and the display panel DP can be various display panels (such as a reflective display panel) as long as the display panel displays an image in response to an electrical signal and has flexibility.
[0053] The present utility model is not limited to specific embodiments.
[0054] The display device DD can include a folding area FA and a plurality of non-folding areas NFA1 and NFA2. The non-folding areas NFA1 and NFA2 can include a first non-folding area NFA1 and a second non-folding area NFA2. The folding area FA can be disposed between the first non-folding area NFA1 and the second non-folding area NFA2.
[0055] The folding area FA can be an area overlapping the folding axis FX in a plan view, and the shape of the folding area FA can be deformed to fold during folding. In the present embodiment, the folding area FA, the first non-folding area NFA1, and the second non-folding area NFA2 can be arranged in the first direction DR1.
[0056] As an example, one folding area FA and two non-folding areas NFA1 and NFA2 are shown, but the number of folding areas FA and the number of non-folding areas NFA1 and NFA2 are not limited thereto. In an embodiment, for example, the display device DD can include a plurality of non-folding areas (the number of which is more than two), and a plurality of folding areas disposed between the plurality of non-folding areas.
[0057] The front surface IS of the display device DD can have a flat surface defined by the first direction DR1 and the second direction DR2. In the present embodiment, the front surface IS of the display device DD can be a display surface. The display device DD can provide an image IM generated in the display device DD to a user through the front surface IS (or the display surface).
[0058] The front surface IS can include a display area DA and a non-display area NDA around the display area DA. The display area DA can display an image, and the non-display area NDA can not display an image. The non-display area NDA can surround the display area DA, and can define an edge of the display device DD printed in a predetermined color.
[0059] The display device DD can include at least one sensor SN and at least one camera CA. The sensor SN and the camera CA can be adjacent to an edge of the display device DD. The sensor SN and the camera CA can be disposed in the display area DA adjacent to the non-display area NDA. The sensor SN and the camera CA can be disposed in the second non-fold area NFA2, but the present disclosure is not limited thereto. The sensor SN and the camera CA can be disposed in the first non-fold area NFA1.
[0060] Light can be transmitted through a portion of the display device DD in which the sensor SN and the camera CA are disposed and provided to the sensor SN and the camera CA. In an embodiment, for example, the sensor SN can be a proximity / illuminance sensor, but the type of the sensor SN is not limited thereto. The camera CA can capture an external image. The sensor SN and the camera CA can each be provided as a plurality.
[0061] Referring to Figure 1B and Figure 1C , the display device DD can be a foldable or unfolded folding (foldable) display device DD. The folding axis FX can be defined as a major axis (or a long axis) parallel to a long side of the display device DD. In the present embodiment, the folding area FA of the display device DD can be folded with respect to the folding axis FX parallel to the second direction DR2. However, this is an illustrative embodiment, and the folding axis FX can be set in a different direction and set as a plurality. The present disclosure is not limited to a specific embodiment.
[0062] Referring to Figure 1B , the display device DD can be folded inwardly such that the front surface IS (referring to Figure 1A ) is not exposed to the outside. When the display device DD is folded, the first non-fold area NFA1 and the second non-fold area NFA2 can face each other. Here, the front surface IS of the display device DD can be folded so as to surround the folding axis FX, and the rear surface RS of the display panel DP of the display device DD can be exposed to the outside.
[0063] Referring to Figure 1C , the display device DD can be folded outwardly, and when the display device DD is folded, the first non-fold area NFA1 and the second non-fold area NFA2 can face each other. Here, the rear surface RS of the display device DD (referring to Figure 1B ) can be folded so as to surround the folding axis FX, and the front surface IS of the display panel DP of the display device DD (referring to Figure 1A ) can be exposed to the outside.
[0064] Figure 2A and Figure 2B are perspective views of another embodiment of a display device according to the present disclosure. Figure 2AThe front surface IS, the display area DA, the non-display area NDA, the sensor SN, and the camera CA illustrated in FIG. 1A can correspond to, respectively, Figure 1A The front surface IS, the display area DA, the non-display area NDA, the sensor SN, and the camera CA illustrated in FIG. 1A. Hereinafter, repeated explanations will be omitted.
[0065] Referring to Figure 2A , the display device DD' can have a quadrilateral shape in a plan view, for example, a rectangular shape having a long side extending in the first direction DR1 and a short side extending in the second direction DR2.
[0066] The first non-folded area NFA1, the folded area FA, and the second non-folded area NFA2 can be arranged in the first direction DR1. The folded area FA can be disposed between the first non-folded area NFA1 and the second non-folded area NFA2.
[0067] Referring to Figure 2A and Figure 2B , in the display device DD', the folding axis FX can be defined as a minor axis (or a short axis) parallel to the short side of the display device DD'. Accordingly, the folded area FA can be bent with respect to the folding axis FX' parallel to the second direction DR2, and thus the display device DD' can be folded.
[0068] In the present embodiment, the display device DD' can include a display module DM and a housing HS. The display module DM can be accommodated in a space provided by the housing HS. The housing HS can include a first housing HSI and a second housing HS2. The first housing HSI can overlap the first non-folded area NFA1, and the second housing HS2 can overlap the second non-folded area NFA2. Since the housing HS includes the first housing HSI and the second housing HS2 separated from each other, the folding operation of the display module DM can be conveniently performed. Figure 2B The display device DD' in an inner folding state is illustrated. Here, the rear surface HSI_R of the first housing HSI can be exposed to be observed from the outside, and can protect the display module DM. This is an illustrative embodiment, and the shape and folding operation of the housing HS can be variously changed. The present application is not limited to a specific embodiment.
[0069] Figure 3 is a cross-sectional view of an embodiment of a display module according to the present application. Referring to Figure 3 , the display module DM can include a display panel DP, an input sensing part SP, an anti-reflection layer RP, and a window WN. This is an illustrative embodiment, and in the display module DM, at least any one of the input sensing part SP and the anti-reflection layer RP can be omitted. In addition to Figure 3In addition to the four components shown in the middle, other layers can be attached, and the present application is not limited to the specific embodiments.
[0070] The display panel DP can be a flexible display panel. The display panel DP in the embodiments of the present application can be a light emitting display panel, and is not particularly limited. In embodiments, for example, the display panel DP can be an organic light emitting display panel or an inorganic light emitting display panel. The light emitting layer of the organic light emitting display panel can include an organic light emitting material. The light emitting layer of the inorganic light emitting display panel can include quantum dots or quantum rods, etc. Hereinafter, the display panel DP will be described as an organic light emitting display panel.
[0071] The input sensing part SP can be provided on the display panel DP. The input sensing part SP can include a plurality of sensing parts (not shown) for sensing an external input in a capacitive manner. The input sensing part SP can be manufactured directly on the display panel DP during the manufacturing of the display module DM. However, the present application is not limited thereto, and the input sensing part SP can be manufactured as a panel independent of the display panel DP, and attached to the display panel DP by an adhesive layer.
[0072] The anti-reflection layer RP can be provided on the input sensing part SP. The anti-reflection layer RP can be formed directly on the input sensing part SP, or can be coupled to the input sensing part SP by an adhesive layer. The anti-reflection layer RP can be defined as a film for preventing reflection of external light. The anti-reflection layer RP can reduce reflection of external light incident from the outside of the display device DD toward the display panel DP through the window WN.
[0073] When external light propagating toward the display panel DP is reflected from the display panel DP and provided again to a user outside the display panel DP, the user can observe the external light as if the display panel is a mirror. To prevent such a phenomenon, for example, the anti-reflection layer RP can include a plurality of color filters for displaying the same color as that of the pixels of the display panel DP.
[0074] The color filter can filter the external light to the same color as that of the pixel. In this case, the external light can not be visible to the user. However, the present application is not limited thereto, and the anti-reflection layer RP can include a polarizing film for reducing reflection of external light. The polarizing film can include a phase retarder and / or a polarizer.
[0075] The window WN can be provided on the anti-reflection layer RP. The window WN can be formed directly on the anti-reflection layer RP, or can be coupled to the anti-reflection layer RP by an adhesive layer. The window WN can protect the display panel DP, the input sensing part SP, and the anti-reflection layer RP from external impact and scratches.
[0076] Figure 4is a perspective view of an embodiment of a folding inspection apparatus according to the present utility model.
[0077] With reference to Figure 4 , the folding inspection apparatus FD can include a first plate HFR (or an upper plate), a second plate LFR (or a lower plate), a first fixing member CM1, a second fixing member CM2, a first fixing block FM1, and a second fixing block FM2.
[0078] The folding inspection apparatus FD can space the first plate HFR and the second plate LFR apart from each other by a distance sufficient for the foldable thin film glass UTG to be disposed (e.g., seated) therebetween. Then, after the foldable thin film glass UTG is disposed (e.g., seated) between the first plate HFR and the second plate LFR, pressure can be applied by bringing the first plate HFR and the second plate LFR closer to each other. Here, the first plate HFR can be lowered at a constant speed until the thin film glass UTG breaks. The distance between the first plate HFR and the second plate LFR when the thin film glass UTG breaks can be a deflection strength guarantee distance of the thin film glass UTG.
[0079] In the folding inspection apparatus FD according to the present utility model, the first fixing block FM1 and the second fixing block FM2 can prevent deformation of the thin film glass UTG, thereby improving reliability of deflection strength inspection. Since separate inspection of a crack line is omitted by preventing deformation of the thin film glass UTG, the folding inspection apparatus FD according to the present utility model can reduce processing time.
[0080] The thin film glass UTG to be inspected by the folding inspection apparatus FD can include a first portion PUP1 disposed (e.g., seated) on the first plate HFR, a second portion PUP2 disposed (e.g., seated) on the second plate LFR, and a folding portion FUP foldable and connected to the first portion PUP1 and the second portion PUP2.
[0081] The first plate HFR can have a planar shape parallel to a plane defined by the first direction DR1 and the second direction DR2. The foldable thin film glass UTG can be disposed (e.g., seated) on the first plate HFR. The first plate HFR can be movable along a third direction DR3. After the thin film glass UTG is disposed (e.g., seated) on the first plate HFR, the first plate HFR can apply pressure to the thin film glass UTG while the first plate HFR moves toward the second plate LFR. The first plate HFR can include or be composed of a material having sufficient durability and rigidity that does not deform or break even when the first plate HFR applies pressure to the thin film glass UTG.
[0082] A first portion PUP1 of the thin film glass UTG can be disposed (e.g., seated) on the first plate HFR. The first portion PUP1 can be disposed on a lower surface of the first plate HFR. Unlike the folded portion FUP, the first portion PUP1 can contact the first plate HFR without being folded. The first portion PUP1 can be parallel to a plane defined by the first direction DR1 and the second direction DR2.
[0083] The second plate LFR can be opposite the first plate HFR in the third direction DR3, and the thin film glass UTG can be disposed (e.g., seated) on the second plate LFR. The second plate LFR can have a planar shape parallel to a plane defined by the first direction DR1 and the second direction DR2. The second plate LFR can be disposed spaced apart from the first plate HFR by a predetermined distance in the third direction DR3. The foldable thin film glass UTG can be disposed (e.g., seated) on the second plate LFR. The second plate LFR can include or be composed of a material having sufficient durability and rigidity that does not deform or break even when the second plate LFR exerts pressure on the thin film glass UTG.
[0084] A second portion PUP2 of the thin film glass UTG can be disposed (e.g., seated) on the second plate LFR. The second portion PUP2 can be disposed on an upper surface of the second plate LFR. Unlike the folded portion FUP, the second portion PUP2 can contact the second plate LFR without being folded. The second portion PUP2 can be parallel to a plane defined by the first direction DR1 and the second direction DR2.
[0085] As the first plate HFR moves in a direction opposite the third direction DR3, a distance between the first plate HFR and the second plate LFR can decrease, and pressure can be exerted on the thin film glass UTG. Accordingly, a curvature of the folded portion FUP can increase.
[0086] The first fixing member CM1 can be disposed on one end of the first plate HFR, and a plurality of first grooves GR1 can be defined in the first fixing member CM1. The plurality of first grooves GR1 defined in the first fixing member CM1 will be described later.
[0087] The first fixing member CM1 can be disposed at a position corresponding to the second fixing member CM2 in the third direction DR3. The first fixing member CM1 can have a shape extending from the first plate HFR. A width of the first fixing member CM1 in the first direction DR1 can be the same as a width of the first plate HFR in the first direction DR1. A lower surface of the first fixing member CM1 can be smoothly connected to a lower surface of the first plate HFR and can extend in the second direction DR2.
[0088] The first fixing member CM1 can be detachably coupled to one end of the first plate HFR. Accordingly, various types of the first fixing member CM1 can be coupled depending on the size of the thin film glass UTG, and various sizes of the thin film glass UTG can be fixed. Accordingly, the folding inspection can be performed regardless of the size of the thin film glass UTG.
[0089] The second fixing member CM2 can be provided on one end of the second plate LFR, and a plurality of second grooves GR2 can be defined in the second fixing member CM2. The plurality of second grooves GR2 can respectively correspond to the first grooves GR1 in the third direction DR3. The plurality of second grooves GR2 defined in the second fixing member CM2 will be described later.
[0090] The second fixing member CM2 can be provided at a position corresponding to the first fixing member CM1 in the third direction DR3. The second fixing member CM2 can have a shape extending from the second plate LFR. A width of the second fixing member CM2 in the first direction DR1 can be the same as a width of the second plate LFR in the first direction DR1. An upper surface of the second fixing member CM2 can be smoothly connected to an upper surface of the second plate LFR, and can extend in the second direction DR2.
[0091] The second fixing member CM2 can be detachably coupled to one end of the second plate LFR. Accordingly, various types of the second fixing member CM2 can be coupled depending on the size of the thin film glass UTG, and various sizes of the thin film glass UTG can be fixed. Accordingly, the folding inspection can be performed regardless of the size of the thin film glass UTG.
[0092] The first fixing block FM1 can be coupled to a portion of the plurality of first grooves GR1, and can be in contact with at least one of outer surfaces of the thin film glass UTG. When the first plate HFR and the second plate LFR apply pressure to the thin film glass UTG, the first fixing block FM1 can fix the first portion PUP1 of the thin film glass UTG such that a position of the first portion PUP1 of the thin film glass UTG in the first direction DR1 and the second direction DR2 does not change. The first fixing block FM1 can fix an end of the first portion PUP1.
[0093] The first fixing block FM1 can be coupled to a portion of the first groove GR1, and can protrude in a direction opposite to the third direction DR3. The first fixing block FM1 can be installed into a portion of the first groove GR1. A first thickness of the first fixing block FM1 in the third direction DR3 can be greater than a thickness of the thin film glass UTG in the third direction DR3.
[0094] When the first fixing block FM1 is coupled to the first groove GR1, the protrusion height of the first fixing block FM1 in the direction opposite to the third direction DR3 can be greater than the thickness of the thin film glass UTG. Accordingly, the first fixing block FM1 can more firmly fix the first portion PUP1 of the thin film glass UTG.
[0095] In an embodiment, for example, when the first fixing block FM1 is coupled to the first groove GR1, and the protrusion height of the first fixing block FM1 in the direction opposite to the third direction DR3 is less than the thickness of the thin film glass UTG, the force applied to the portion of the outer surface of the thin film glass UTG which is in contact with the first fixing block FM1 can be different from the force applied to the portion of the outer surface of the thin film glass UTG which is not in contact with the first fixing block FM1. Accordingly, deformation of the thin film glass UTG can occur, and the reliability of the flexural strength measurement result can decrease. When the first fixing block FM1 is coupled to the first groove GR1, the decrease in the reliability of the measurement result can be prevented by making the protrusion height of the first fixing block FM1 in the direction opposite to the third direction DR3 greater than the thickness of the thin film glass UTG.
[0096] Since it is desired that the first fixing block FM1 fix the thin film glass UTG at a predetermined position even when pressure is applied to the thin film glass UTG, the first fixing block FM1 can include or consist of a material having sufficient durability and rigidity. In an embodiment, for example, the first fixing block FM1 can include stainless steel and aluminum, or the like.
[0097] The first fixing block FM1 can include a first (1-1) fixing block FM1-1 and a first (1-2) fixing block FM1-2. The first (1-1) fixing block FM1-1 can fix the thin film glass UTG by being in contact with the outer surface extending in the first direction DR1 among the outer surfaces of the first portion PUP1. The first (1-2) fixing block FM1-2 can fix the thin film glass UTG by being in contact with the outer surface extending in the second direction DR2 among the outer surfaces of the first portion PUP1.
[0098] The first fixing block FM1 can be detachably coupled to the first fixing member CM1. The first fixing block FM1 can be detachably coupled to a portion of the first groove GR1. The first (1-1) fixing block FM1-1 can be detachably coupled to the first (1-1) groove GR1-1 (refer to FIG. 2A). The first (1-2) fixing block FM1-2 can be detachably coupled to the first (1-2) groove GR1-2 (refer to FIG. 2B). That is, the setting of the first fixing block FM1 can be changed as needed. Figure 9 Figure 9
[0099] The second fixing block FM2 can be coupled to a portion of the second grooves GR2 and can be in contact with at least one of the outer surfaces of the thin film glass UTG. When the first plate HFR and the second plate LFR apply pressure to the thin film glass UTG, the second fixing block FM2 can fix the second portion PUP2 of the thin film glass UTG such that the positions of the second portion PUP2 of the thin film glass UTG in the first direction DR1 and the second direction DR2 do not change. The second fixing block FM2 can fix the end of the second portion PUP2.
[0100] The second fixing block FM2 can be coupled to a portion of the second grooves GR2 and can protrude in the third direction DR3. The second fixing block FM2 can be installed into a portion of the second grooves GR2. A second thickness of the second fixing block FM2 in the third direction DR3 can be greater than a thickness of the thin film glass UTG in the third direction DR3.
[0101] When the second fixing block FM2 is coupled to the second grooves GR2, a protrusion height of the second fixing block FM2 in the third direction DR3 can be greater than the thickness of the thin film glass UTG. Accordingly, the second fixing block FM2 can more firmly fix the second portion PUP2 of the thin film glass UTG.
[0102] In an embodiment, for example, when the second fixing block FM2 is coupled to the second grooves GR2, and a protrusion height of the second fixing block FM2 in the third direction DR3 is less than the thickness of the thin film glass UTG, a force applied to a portion of the outer surface of the thin film glass UTG which is in contact with the second fixing block FM2 can be different from a force applied to a portion of the outer surface of the thin film glass UTG which is not in contact with the second fixing block. Accordingly, deformation of the thin film glass UTG can occur, and reliability of the flexural strength measurement result can decrease. When the second fixing block FM2 is coupled to the second grooves GR2, the decrease in reliability of the measurement result can be prevented by making the protrusion height of the second fixing block FM2 in the third direction DR3 greater than the thickness of the thin film glass UTG.
[0103] Since it is desired that the second fixing block FM2 fix the thin film glass UTG at a predetermined position even when pressure is applied to the thin film glass UTG, the second fixing block FM2 can include or be composed of a material having sufficient durability and rigidity. In an embodiment, for example, the second fixing block FM2 can include stainless steel and aluminum.
[0104] The second fixing block FM2 can include a first (2-1) fixing block FM2-1 and a second (2-2) fixing block FM2-2. The first (2-1) fixing block FM2-1 can fix the thin film glass UTG by contacting an outer surface extending in the first direction DR1 among outer surfaces of the second part PUP2. The second (2-2) fixing block FM2-2 can fix the thin film glass UTG by contacting an outer surface extending in the second direction DR2 among the outer surfaces of the second part PUP2.
[0105] Figure 5 is a perspective view of an embodiment of a folding inspection apparatus according to the present disclosure.
[0106] Referring to Figure 5 , the distance DIP between the first plate HFR and the second plate LFR is reduced, and a pressure can be applied to the thin film glass UTG disposed (e.g., seated) between the first plate HFR and the second plate LFR in the third direction DR3. Accordingly, the curvature of the folding portion FUP can become larger. The folding inspection apparatus FD can measure the flexural strength of the thin film glass UTG by measuring the distance DIP between the first plate HFR and the second plate LFR at the time when the thin film glass UTG is broken.
[0107] The first fixing block FM1 and the second fixing block FM2 can not overlap each other in the third direction DR3. The first fixing block FM1 and the second fixing block FM2 can each be provided as a plurality, and the plurality of first fixing blocks FM1 and the plurality of second fixing blocks FM2 can be alternately disposed along the first direction DR1. Some of the first fixing blocks FM1 among the plurality of first fixing blocks FM1 and some of the second fixing blocks FM2 among the second fixing blocks FM2 can be alternately disposed along the second direction DR2.
[0108] Accordingly, although the first fixing block FM1 and the second fixing block FM2 each have a height greater than the thickness of the thin film glass UTG, it is possible to prevent the first fixing block FM1 and the second fixing block FM2 from contacting or interfering with each other when the first plate HFR and the second plate LFR approach each other.
[0109] Figure 6 is a front perspective view of an embodiment of a folding inspection apparatus according to the present disclosure.
[0110] Referring to Figure 6 , the minimum distances DI1 and DI2 between the first fixing block FM1 and the second fixing block FM2 along the first direction DR1 can be about 5 mm or more. In the case where the minimum distances DI1 and DI2 between the first fixing block FM1 and the second fixing block FM2 are less than about 5 mm, the first fixing block FM1 and the second fixing block FM2 can be easily interfered with or contacted with each other when the first plate HFR and the second plate LFR approach each other.
[0111] A width WD1 of the first fixing block FM1 along the first direction DR1 and a width WD2 of the second fixing block FM2 along the first direction DR1 can be greater than minimum distances DI1 and DI2 along the first direction DR1 between the first fixing block FM1 and the second fixing block FM2.
[0112] A thickness TH1 by which the first fixing block FM1 protrudes from the first fixing member CM1 can be greater than a thickness TH3 of the thin film glass UTG. A thickness TH2 by which the second fixing block FM2 protrudes from the second fixing member CM2 can be greater than the thickness TH3 of the thin film glass UTG. Here, the thickness of the thin film glass UTG can be about 100 µm or less. When the thickness of the thin film glass UTG is greater than about 100 µm, the thin film glass UTG can not be easily folded, and thus can not be suitable for use in inspecting an object.
[0113] Figure 7 is a perspective view of an embodiment of a second fixing member and a second plate of a folding inspection apparatus according to the present disclosure.
[0114] Referring to Figure 7 , the plurality of second grooves GR2 can include (2-1)th grooves GR2-1 extending in the first direction DR1 and (2-2)th grooves GR2-2 extending in the second direction DR2. As Figure 7 indicated in FIG. 2B, some of the (2-1)th grooves GR2-1 among the (2-1)th grooves GR2-1 can extend to the (2-2)th grooves GR2-2. Among the (2-1)th grooves GR2-1, the (2-1)th grooves GR2-1 closest to the (2-2)th grooves GR2-2 can extend to the (2-2)th grooves GR2-2. Accordingly, the (2-1)th grooves GR2-1 and the (2-2)th grooves GR2-2 extending to each other can define grooves bent in an L shape. However, the (2-2)th grooves GR2-2 and some of the (2-1)th grooves GR2-1 do not necessarily extend to each other, and can exist separately while being spaced apart from each other.
[0115] The plurality of (2-1)th grooves GR2-1 can extend in the first direction DR1, and can be arranged along the first direction DR1. The plurality of (2-2)th grooves GR2-2 can extend in the second direction DR2.
[0116] The second fixing block FM2 can be provided as a plurality, and the plurality of second fixing blocks FM2 can include a (2-1)th fixing block FM2-1 and a (2-2)th fixing block FM2-2. The (2-1)th fixing block FM2-1 can be detachably coupled to the (2-1)th groove GR2-1. The (2-2)th fixing block FM2-2 can be detachably coupled to the (2-2)th groove GR2-2.
[0117] The (2-1) fixing block FM2-1 can be in contact with the first outer surface ST1 of the second part PUP2, and thus prevent the second part PUP2 from moving in the second direction DR2. The (2-2) fixing block FM2-2 can be in contact with the second outer surface ST2 of the second part PUP2, and thus prevent the second part PUP2 from moving in the first direction DR1.
[0118] Figure 8 is a perspective view of an embodiment of a first fixing member and a first plate of a folding inspection apparatus according to the present utility model.
[0119] Referring to Figure 8 , the plurality of first grooves GR1 can include (1-1) grooves GR1-1 extending in the first direction DR1 and (1-2) grooves GR1-2 extending in the second direction DR2. As Figure 8 indicated in FIG. 1, some of the (1-1) grooves GR1-1 among the (1-1) grooves GR1-1 can extend to the (1-2) grooves GR1-2. Among the (1-1) grooves GR1-1, the (1-1) grooves GR1-1 closest to the (1-2) grooves GR1-2 can extend to the (1-2) grooves GR1-2. Accordingly, the (1-1) grooves GR1-1 and the (1-2) grooves GR1-2 extending to each other can define grooves bent in an L shape. However, the (1-2) grooves GR1-2 and some of the (1-1) grooves GR1-1 do not necessarily extend to each other, and can exist separately while being spaced apart from each other.
[0120] The plurality of (1-1) grooves GR1-1 can extend in the first direction DR1, and can be arranged along the first direction DR1. The plurality of (1-2) grooves GR1-2 can extend in the second direction DR2.
[0121] The first fixing block FM1 can be provided as a plurality, and the plurality of first fixing blocks FM1 can include (1-1) fixing blocks FM1-1 and (1-2) fixing blocks FM1-2. The (1-1) fixing blocks FM1-1 can be detachably coupled to the (1-1) grooves GR1-1. The (1-2) fixing blocks FM1-2 can be detachably coupled to the (1-2) grooves GR1-2.
[0122] The (1-1) fixing block FM1-1 can be in contact with the first outer surface ST1 of the first part PUP1, and thus prevent the first part PUP1 from moving in the second direction DR2. The (1-2) fixing block FM1-2 can be in contact with the second outer surface ST2 of the first part PUP1, and thus prevent the first part PUP1 from moving in the first direction DR1.
[0123] Referring to Figures 6-8 , the first (1-1) grooves GR1-1 can respectively correspond to the second (2-1) grooves GR2-1 in the third direction DR3. The first (1-2) grooves GR1-2 can respectively correspond to the second (2-2) grooves GR2-2 in the third direction DR3.
[0124] Figure 9 is a plan view of an embodiment of the first and second fixing members according to the present utility model. More specifically, Figure 9 is a plan view showing the first and second fixing members CM1 and CM2 in Figure 4 .
[0125] Referring to Figure 9 , the first, second, and third directions DR1', DR2', and DR3' can indicate relative directions, and can indicate directions different from the above-described first, second, and third directions DR1, DR2, and DR3 (refer to Figures 4-8 ). Here, the first fixing block FM1 coupled to the first grooves GR1 and the second fixing block FM2 coupled to the second grooves GR2 are shown in hatching.
[0126] The plurality of first (1-1) grooves GR1-1 can extend along the second direction DR2' and can be arranged along the second direction DR2'. The first (1-1) fixing block FM1-1 can be coupled to a portion of the first (1-1) grooves GR1-1. The plurality of first (1-2) grooves GR1-2 can extend along the third direction DR3'. The first (1-2) fixing block FM1-2 can be coupled to the first (1-2) grooves GR1-2.
[0127] The plurality of second (2-1) grooves GR2-1 can extend along the second direction DR2' and can be arranged along the second direction DR2'. The second (2-1) fixing block FM2-1 can be coupled to a portion of the second (2-1) grooves GR2-1. The plurality of second (2-2) grooves GR2-2 can extend along the third direction DR3'. The second (2-2) fixing block FM2-2 can be coupled to the second (2-2) grooves GR2-2.
[0128] Referring to Figure 5 and Figure 9 , as Figure 5As illustrated in the middle, the first fixing blocks FM1 and the second fixing blocks FM2 can not overlap each other even when the first plate HFR and the second plate LFR approach each other. The first (1-1) fixing block FM1-1 and the second (2-1) fixing block FM2-1 can be spaced apart from each other at a predetermined distance and arranged to engage with each other, and can not overlap each other. The first (1-2) fixing block FM1-2 and the second (2-2) fixing block FM2-2 can be spaced apart from each other at a predetermined distance and arranged to engage with each other, and can not overlap each other.
[0129] Figure 10A and Figure 10B is a plan view of another embodiment of the first fixing member and the second fixing member according to the present disclosure.
[0130] Referring to Figure 10A and Figure 10B The first (1-1) groove GR1-1 can be included in the first row HR1 and the second row HR2. The first row HR1 can be a row in which the first (1-1) groove GR1-1 is arranged along the second direction DR2'. The second row HR2 can be a row spaced apart from the first row HR1 at a predetermined distance along the third direction DR3', and can be a row in which the first (1-1) groove GR1-1 is arranged along the second direction DR2'. In the first row HR1, the first (1-1a) groove GR1-1a can be arranged along the second direction DR2'. In the second row HR2, the first (1-1b) groove GR1-1b can be arranged along the second direction DR2'.
[0131] The first (1-2) groove GR1-2 can include the first (1-2a) groove GR1-2a and the first (1-2b) groove GR1-2b arranged along the third direction DR3'.
[0132] The first (1-2) groove GR1-2 can include the first (1-2a) groove GR1-2a and the first (1-2b) groove GR1-2b arranged along the third direction DR3'.
[0133] The first (1-2) groove GR1-2 can include the first (1-2a) groove GR1-2a and the first (1-2b) groove GR1-2b arranged along the third direction DR3'.
[0134] Referring toFigure 10A and Figure 10B The first and second fixed blocks FM1 and FM2 can be coupled to the first and second grooves GR1 and GR2, respectively, based on a size of the thin film glass UTG (refer to Figure 4 ).
[0135] In an embodiment, for example, as shown in Figure 10A , when the size of the thin film glass UTG in the third direction DR3' is relatively large, the first fixed block FM1 can be coupled to the first groove GR1 of the second row HR2, and the second fixed block FM2 can be coupled to the second groove GR2 of the fourth row HR4.
[0136] As shown in Figure 10B , when the size of the thin film glass UTG in the third direction DR3' is relatively small, the first fixed block FM1 can be coupled to the first groove GR1 of the first row HR1, and the second fixed block FM2 can be coupled to the second groove GR2 of the third row HR3.
[0137] Figure 11A and Figure 11B is a plan view of another embodiment of the first and second fixed members according to the present disclosure.
[0138] Referring to Figure 11A and Figure 11B , the (1-2) groove GR1-2 can include a (1-2a) groove GR1-2a and a (1-2b) groove GR1-2b arranged in the second direction DR2'. The (2-2) groove GR2-2 can include a (2-2a) groove GR2-2a and a (2-2b) groove GR2-2b arranged in the second direction DR2'. The first and second fixed blocks FM1 and FM2 can be coupled to the (1-2) groove GR1-2 and the (2-2) groove GR2-2, respectively, based on a size of the thin film glass UTG.
[0139] In an embodiment, for example, as shown in Figure 11A , when the size of the thin film glass UTG in the second direction DR2' is relatively large, the (1-2) fixed block FM1-2 can be coupled to the (1-2b) groove GR1-2b, and the (2-2) fixed block FM2-2 can be coupled to the (2-2b) groove GR2-2b.
[0140] As shown in Figure 11B , when the size of the thin film glass UTG in the second direction DR2' is relatively small, the (1-2) fixed block FM1-2 can be coupled to the (1-2a) groove GR1-2a, and the (2-2) fixed block FM2-2 can be coupled to the (2-2a) groove GR2-2a.
[0141] In the display device according to the present application, the first fixing block and the second fixing block can be alternately arranged while not overlapping each other, and can not interfere with each other even in a state in which the film glass is folded, so that deformation of the film glass can be prevented.
[0142] In the above, the description has been made with reference to the embodiments, but it will be understood by those skilled in the art or those of ordinary skill in the related art that various modifications and changes can be made to the present application within the scope of the spirit and technical range of the present application described in the appended claims. Therefore, the technical scope of the present application is not limited to what is described in the detailed description of the specification, but should be determined by the claims.
Claims
1. A folded inspection apparatus, characterized in that, The folding inspection apparatus includes: a first plate on which the foldable thin film glass is disposed; a second plate facing the first plate in a first direction, and on which the foldable thin film glass is further disposed; a first fixing member provided on one end of the first plate, and in which a plurality of first grooves are defined; a second fixing member provided on one end of the second plate, and in which a plurality of second grooves corresponding to the plurality of first grooves, respectively, in the first direction are defined; a first fixing block coupled to a portion of the plurality of first grooves, and in contact with at least one outer surface among a plurality of outer surfaces of the foldable thin film glass; and a second fixing block coupled to a portion of the plurality of second grooves, and in contact with at least one outer surface among the plurality of outer surfaces of the foldable thin film glass, wherein the first fixing block and the second fixing block do not overlap with each other in the first direction.
2. The folded inspection apparatus of claim 1, wherein, The first fixing block and the second fixing block are each provided as a plurality, and the plurality of first fixing blocks and the plurality of second fixing blocks are alternately disposed in a second direction crossing the first direction and in a third direction crossing the second direction.
3. The folded inspection apparatus of claim 1, wherein, A first thickness of the first fixing block along the first direction and a second thickness of the second fixing block along the first direction are greater than a thickness of the foldable thin film glass along the first direction.
4. The folded inspection apparatus of claim 1, wherein, The plurality of first grooves include a 1-1 groove extending in a second direction crossing the first direction and a 1-2 groove extending in a third direction crossing the second direction, the plurality of second grooves include a 2-1 groove extending in the second direction and a 2-2 groove extending in the third direction, and the 1-1 groove corresponds to the 2-1 groove in the first direction, and the 1-2 groove corresponds to the 2-2 groove in the first direction.
5. The folded inspection apparatus of claim 4, wherein, The 1-1 groove is provided as a plurality, at least one 1-1 groove of the plurality of 1-1 grooves extends to the 1-2 groove, the 2-1 groove is provided as a plurality, and at least one 2-1 groove of the plurality of 2-1 grooves extends to the 2-2 groove, wherein a plurality of 1-1 grooves include a first row in which 1-1 grooves among the plurality of 1-1 grooves are arranged along the second direction and a second row in which 1-1 grooves among the plurality of 1-1 grooves are arranged along the second direction, and the second row is spaced apart from the first row along the third direction, and a plurality of 2-1 grooves include a third row in which 2-1 grooves among the plurality of 2-1 grooves are arranged along the second direction and a fourth row in which 2-1 grooves among the plurality of 2-1 grooves are arranged along the second direction, and the fourth row is spaced apart from the third row along the third direction, and wherein the first-2 grooves and the second-2 grooves are each provided as a plurality, and a plurality of first-2 grooves are arranged along the third direction, and a plurality of second-2 grooves are arranged along the third direction.
6. The folded inspection apparatus of claim 4, wherein, the first fixing blocks are provided as a plurality, the plurality of first fixing blocks include a first-1 fixing block coupled to the first-1 grooves and a first-2 fixing block coupled to the first-2 grooves, the second fixing blocks are provided as a plurality, and the plurality of second fixing blocks include a second-1 fixing block coupled to the second-1 grooves and a second-2 fixing block coupled to the second-2 grooves, and wherein a minimum distance between the plurality of first fixing blocks and the plurality of second fixing blocks in the second direction is 5 mm or more, and wherein the first-1 fixing block and the second-1 fixing block are in contact with a first outer surface extending in the second direction among the plurality of outer surfaces of the foldable thin film glass, and the first-2 fixing block and the second-2 fixing block are in contact with a second outer surface extending in the third direction among the plurality of outer surfaces of the foldable thin film glass.
7. The folded inspection apparatus of claim 1, wherein, the foldable thin film glass disposed on the first plate and the second plate includes a folded portion, and a curvature of the folded portion becomes larger as the first plate and the second plate approach each other.
8. The folded inspection apparatus of claim 1, wherein, the first fixing member corresponds to the second fixing member in the first direction.
9. The folded inspection apparatus of claim 1, wherein, the foldable thin film glass includes: a first portion disposed on the first plate; a second portion disposed on the second plate; and a folded portion connected to the first portion and the second portion and foldable, the first fixing block fixes an end of the first portion, and the second fixing block fixes an end of the second portion.
10. The folded inspection apparatus of claim 1, wherein, a thickness of the foldable thin film glass is 100 micrometers or less, wherein the first fixing member is detachably coupled to the first plate, and the second fixing member is detachably coupled to the second plate, and wherein the first fixing block is detachably coupled to the first fixing member, and the second fixing block is detachably coupled to the second fixing member.
Citation Information
Patent Citations
Atomic layer etching method using gas pulsing
KR1020240047769A