Vacuum pump system

Abstract

The utility model relates to the technical field of vacuum pumps, and discloses a vacuum pump system which comprises a vacuum tank, a first pipeline, a second pipeline, a third pipeline, a dry pump and a booster pump. The booster pump is communicated with the vacuum tank through a first pipeline, a first valve is arranged on the first pipeline, and the first valve is used for controlling on-off of the first pipeline; the front end of the dry pump is provided with a first air vent, the rear end of the dry pump is provided with a second air vent, the first air vent is communicated with the booster pump through a second pipeline, the second air vent is communicated with the vacuum tank through a third pipeline, the third pipeline is provided with a second valve, and the second valve is used for controlling the on-off of the third pipeline. By means of the vacuum storage and release effects of the vacuum tank, pressure balance of the front end and the rear end of the dry pump is achieved, the operation power of the booster pump is reduced, then full supply of power kinetic energy to the vacuum pump can be reduced, and the effects of efficiently saving energy and prolonging the service life of the dry pump are achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a vacuum pump technical field especially relates to a vacuum pump system. BACKGROUND

[0002] At present, vacuum pumps are widely used in the transmission cavity, scheduling cavity, process cavity, etc. of chemical vapor deposition, etching, ion implantation, sputtering coating, evaporation and other equipment, providing the vacuum environment required by the main equipment. In these applications, when the main equipment vacuum cavity reaches the required pressure, the vacuum pump will enter standby state. However, even in standby state, there is still a certain pressure difference between the front end and the rear end of the dry pump. In order to maintain this pressure balance, the vacuum pump still needs to run at high power in standby state, continuing to supply power and kinetic energy in full. This situation leads to waste of energy and increase of enterprise operating costs.

[0003] In order to solve this problem, some related technologies try to install an energy-saving module at the exhaust end of the vacuum pump. This energy-saving module will reduce the frequency of the booster pump according to the pressure change of the exhaust end when the vacuum pump is in standby state, and reduce the supply of power and kinetic energy through the signal of the main equipment, so as to achieve the purpose of reducing cost. However, this solution has several obvious defects: first, the energy-saving module needs regular maintenance, which increases additional maintenance cost; second, this method cannot quickly respond to system changes, with long reaction time; finally, the overall energy-saving efficiency is low, which cannot meet the demand of modern industry for high efficiency and energy saving. SUMMARY

[0004] The purpose of the utility model is to provide a vacuum pump system, which can maintain the pressure balance between the front end and the rear end of the dry pump in standby state of the vacuum pump, thereby reducing the operating power and achieving the effect of energy saving.

[0005] The embodiment of the application provides a vacuum pump system, which comprises a vacuum tank, a first pipeline, a second pipeline, a third pipeline, a dry pump and a booster pump.

[0006] The booster pump is communicated with the vacuum tank through the first pipeline, and a first valve is arranged on the first pipeline, which is used to control the on-off of the first pipeline.

[0007] The front end of the dry pump is provided with a first air vent, and the rear end of the dry pump is provided with a second air vent, the first air vent is communicated with the booster pump through the second pipeline, the second air vent is communicated with the vacuum tank through the third pipeline, and a second valve is arranged on the third pipeline, which is used to control the on-off of the third pipeline.

[0008] In one embodiment, a controller is further included, which is electrically connected with the first valve.

[0009] In an embodiment, a first pressure sensor is further included, the first pressure sensor is located in the dry pump, the first pressure sensor is located at the first vent, the first pressure sensor is electrically connected to the controller, and the controller is electrically connected to the first valve.

[0010] In an embodiment, a current sensor is further included, the current sensor is electrically connected to the booster pump, the current sensor is used to measure the current value of the booster pump, the current sensor is electrically connected to the controller, and the controller is electrically connected to the first valve.

[0011] In an embodiment, a current sensor is further included, the current sensor is electrically connected to the booster pump, the current sensor is used to measure the current value of the booster pump, the current sensor is electrically connected to the controller, and the controller is electrically connected to the second valve.

[0012] In an embodiment, a housing is further included, the booster pump and the dry pump are located in the housing, and the tank body of the vacuum tank is integrally formed with the housing or is fixedly installed on the outer wall of the housing.

[0013] In an embodiment, the first valve and the second valve are both one-way valves or three-way valves.

[0014] In an embodiment, filters for filtering dust are arranged in the first pipeline and the third pipeline.

[0015] In an embodiment, a three-way valve and a filter for filtering dust are further included.

[0016] The first pipeline includes a first sub-pipeline and a second sub-pipeline, the third pipeline includes the first sub-pipeline and a third sub-pipeline, the first sub-pipeline, the second sub-pipeline and the third sub-pipeline are communicated through the three-way valve, and the filter is arranged in the first sub-pipeline.

[0017] The first valve is arranged on the second sub-pipeline, and the second valve is arranged on the third sub-pipeline.

[0018] In an embodiment, a first pressure sensor, a second pressure sensor and an alarm are further included, the first pressure sensor and the second pressure sensor are located in the dry pump, the first pressure sensor is located at the first vent and is used to measure the first air pressure value of the first vent, the second pressure sensor is located at the second vent and is used to measure the second air pressure value of the second vent, and the first pressure sensor and the second pressure sensor are respectively electrically connected to the alarm.

[0019] The utility model discloses a vacuum pump system, including vacuum jar, first pipeline, second pipeline, third pipeline, dry pump and booster pump, and the booster pump is communicated with the vacuum jar through the first pipeline, is equipped with the first valve on the first pipeline, and the first valve is used to control the on-off of first pipeline, and the front end of dry pump is equipped with first air vent, and the rear end of dry pump is equipped with second air vent, and the first air vent is communicated with the booster pump through the second pipeline, and the second air vent is communicated with the vacuum jar through the third pipeline. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 A structure diagram of a vacuum pump is provided for an exemplary embodiment of the utility model;

[0021] Figure 2 A structure diagram of a vacuum pump is provided for another exemplary embodiment of the utility model.

[0022] Reference numerals in the drawings:

[0023] 1, vacuum jar;2, first pipeline;3, second pipeline;4, third pipeline;5, dry pump;6, booster pump;7, first valve;8, second valve;9, controller;10, three-way valve;21, first sub-pipeline;22, second sub-pipeline;41, third sub-pipeline;51, first air vent;52, second air vent;53, compression cavity. DETAILED DESCRIPTION

[0024] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0025] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this application, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0026] To address the problems existing in the prior art, this utility model provides a vacuum pump system, such as... Figure 1 As shown, the vacuum pump system includes: a vacuum tank 1, a first pipe 2, a second pipe 3, a third pipe 4, a dry pump 5, and a booster pump 6; the booster pump 6 is connected to the vacuum tank 1 through the first pipe 2, and a first valve 7 is provided on the first pipe 2 to control the opening and closing of the first pipe 2; the front end of the dry pump 5 is provided with a first vent 51, and the rear end of the dry pump is provided with a second vent 52. The first vent 51 is connected to the booster pump 6 through the second pipe 3, and the second vent 52 is connected to the vacuum tank 1 through the third pipe 4. A second valve 8 is provided on the third pipe 4 to control the opening and closing of the third pipe 4.

[0027] The vacuum pump system aims to solve the problem of pressure balance between the front end and the rear end of the dry pump 5 when the vacuum pump enters standby state, and reduce the operating power to save energy. The utility model discloses a first pipeline 2 is communicated with the vacuum tank 1 through the booster pump 6, the third pipeline 4 is communicated with the vacuum tank 1 through the dry pump 5, and the circulation of gas is realized. Finally, the first valve 7 and the second valve 8 are arranged to control the on-off of the first pipeline 2 and the third pipeline 4. When the vacuum pump works normally, the first valve is opened, and the vacuum tank is vacuumized. When the vacuum pump enters standby state, the second valve is opened, and the vacuum tank is vacuumized, so that the vacuum pressure balance between the front end and the rear end of the dry pump 5 is maintained. By using the vacuum storage and release effect of the vacuum tank 1, the vacuum pump can ensure the pressure balance between the front end and the rear end of the dry pump 5 in standby state, and the operating power of the booster pump 6 can be reduced (in standby state, the first valve 7 is closed, and the booster pump 6 does not need to vacuumize the vacuum tank 1), and the full supply of power kinetic energy of the vacuum pump can be reduced, the energy can be saved efficiently, and the problems of energy waste, long reaction time and low energy saving efficiency in the prior art can be solved. The service life of the dry pump can also be prolonged.

[0028] As Figure 1 The vacuum pump system further comprises a controller 9, and the controller 9 is electrically connected with the first valve 7. When the controller 9 receives the vacuumizing instruction, the controller 9 controls the first valve 7 to be opened, and the booster pump 6 starts to vacuumize the vacuum tank 1. After vacuumizing the vacuum tank 1, the controller 9 controls the first valve 7 to be closed, so that the vacuum tank 1 can maintain a certain vacuum state for subsequent standby use of the vacuum pump system.

[0029] In some embodiments, the controller 9 can adopt various implementation manners, for example, an electronic control unit (ECU) can be used to realize automatic control. Specifically, the controller 9 is provided with a first sensor and a second sensor, the first sensor is used to acquire the state information of the first valve 7, the second sensor is used to acquire the state information of the second valve 8, and the controller 9 decides the opening and closing states of the first valve 7 and the second valve 8 according to the state information acquired by the first sensor and the second sensor and the preset control logic.

[0030] As a preferred embodiment, the vacuum pump system further comprises a wireless communication module, which is wirelessly connected with the controller 9 and a remote control system respectively. The controller 9 communicates with the remote control system through the wireless communication module. The remote control system sends a vacuum extraction instruction to the controller 9 through the wireless communication module. After receiving the vacuum extraction instruction, the controller 9 controls the first valve 7 to be opened, and the booster pump 6 starts to perform vacuum extraction on the vacuum tank 1. Remote monitoring and control are realized, and the tediousness and errors of traditional manual operation are avoided. In addition, the controller 9 can be integrated into the main control system of the vacuum pump and work cooperatively with other control modules, thereby improving the integration degree of the vacuum pump system, reducing the space area of the vacuum pump system, and saving resources.

[0031] In some embodiments, the vacuum pump system further comprises a first pressure sensor (not shown) and the controller 9. The first pressure sensor is located in the dry pump 5 and at the first vent 51. The first pressure sensor is electrically connected with the controller 9, and the controller 9 is electrically connected with the first valve 7. When the controller 9 determines that the gas pressure detected by the first pressure sensor presents a growth trend, the controller 9 controls the first valve 7 to be opened, and the booster pump 6 starts to perform vacuum extraction on the vacuum tank 1. After the vacuum extraction on the vacuum tank 1, the controller 9 controls the first valve 7 to be closed, so as to maintain a certain vacuum state of the vacuum tank 1.

[0032] In some embodiments, the vacuum pump system further comprises a current sensor (not shown) and the controller 9. The current sensor is electrically connected with the booster pump 6 and is used to measure the current value of the booster pump 6. The current sensor is electrically connected with the controller 9, and the controller 9 is electrically connected with the first valve 7. According to the calculation formula of power, P = UI, P is the power value of the booster pump 6, U is the voltage across the booster pump 6, and I is the current value flowing through the booster pump 6. When the current sensor detects that the current value flowing through the booster pump 6 presents an upward trend, it can be deduced that the power of the booster pump 6 also presents an upward trend. At this time, the controller 9 controls the first valve 7 to be opened, and the booster pump 6 starts to perform vacuum extraction on the vacuum tank 1. After the vacuum extraction on the vacuum tank 1, the controller 9 controls the first valve 7 to be closed, so as to maintain a certain vacuum state of the vacuum tank 1.

[0033] In some embodiments, the vacuum pump system further comprises a current sensor and a controller 9. The current sensor is electrically connected to the booster pump 6 and is used to measure the current value of the booster pump 6. The current sensor is electrically connected to the controller 9, and the controller 9 is electrically connected to the second valve 8. When the current sensor detects that the current value flowing through the booster pump 6 stabilizes at a specified value, it indicates that the vacuum pump enters the standby state at this time. The controller 9 controls the opening of the second valve 8, and the vacuum tank 1 performs vacuum extraction on the dry pump 5 through the third pipeline 4 and the second vent 52, so as to maintain the pressure of the front end and the rear end of the dry pump 5 at an optimal balance state. This can reduce the operating power of the booster pump 6, play a role in high-efficiency energy saving and prolong the service life of the dry pump 5.

[0034] In some embodiments, the vacuum pump system further comprises a housing, and the booster pump 6 and the dry pump 5 are located in the housing. The tank body of the vacuum tank 1 can be integrally formed with the housing or fixedly installed on the outer wall of the housing. Specifically, the tank body of the vacuum tank 1 can be fixed by welding, bolt connection or other mechanical fixing methods. By welding, a more tight and permanent connection can be achieved, which is suitable for applications requiring high strength and high stability. The bolt connection method provides greater flexibility, facilitating later maintenance and replacement. The mechanical fixing method can achieve quick installation and disassembly through buckles, clamps, etc., which is suitable for applications requiring frequent maintenance. Further, a sealing ring or gasket can be provided at the connection between the tank body of the vacuum tank 1 and the housing to further reduce the risk of leakage and improve the sealing performance of the system.

[0035] The tank body of the vacuum tank 1 is integrally integrated or fixedly installed on the housing in the present application, so that the entire vacuum pump system is more compact, reducing the complexity of pipeline connection and potential leakage points. Thus, the reliability and stability of the device are improved. In addition, by this integrated mode, the pressure loss between the housing and the tank body of the vacuum tank 1 can be reduced, and the working efficiency of the system can be improved. Compared with the prior art, the technical scheme of the present application realizes higher performance and lower maintenance cost through the optimization of the structure.

[0036] In some embodiments, the first valve 7 and the second valve 8 are both one-way valves or three-way valves. Specifically, the use of one-way valves can ensure that the gas flow only flows in one direction, thereby preventing backflow and maintaining the stability of the system. The three-way valve can switch between different pipelines, making the path of the gas flow more flexible and adapting to different working conditions and requirements. The selection of these two types of valves provides higher flexibility and reliability for the system. By reasonably selecting and configuring one-way valves and three-way valves, precise control of gas flow can be achieved, improving the overall efficiency and reliability of the system. The present application can solve the problem of inefficient control of gas flow in the standby state in the prior art by selecting one-way valves and three-way valves.

[0037] In some embodiments, the first valve 7 and the second valve 8 are one or more. Multiple valves are used to control the flow rate of gas through the pipeline, thereby regulating the vacuum level inside the container.

[0038] As a preferred embodiment, the present invention is as follows: Figure 1 and Figure 2 As shown, both the first valve 7 and the second valve 8 are provided, and both are one-way valves. Specifically, the use of one-way valves ensures that airflow flows in only one direction, thereby preventing backflow and maintaining system stability. This application solves the problem of inefficient airflow control in standby mode in the prior art by selecting one-way valves.

[0039] In an exemplary embodiment, such as Figure 1 As shown, the vacuum pump system also includes a three-way valve 10 and a dust filter (not shown); the first pipe 2 includes a first sub-pipe 21 and a second sub-pipe 22, and the third pipe 4 includes a first sub-pipe 21 and a third sub-pipe 41. The first sub-pipe 21, the second sub-pipe 22, and the third sub-pipe 41 are connected by the three-way valve, and the filter is installed inside the first sub-pipe 21; the first valve 7 is installed on the second sub-pipe 22, and the second valve 8 is installed on the third sub-pipe 41. In this application, the first pipe 2 and the third pipe 4 share a first sub-pipe 21 and a dust filter installed inside the first sub-pipe 21. When the vacuum tank 1 releases and stores vacuum, the pipe of the first sub-pipe 21 is reused, saving pipe costs. In this application, the gas is effectively filtered during the process of gas flowing from the vacuum tank 1 to the booster pump 6 and during the process of gas flowing from the dry pump 5 to the vacuum tank 1, thereby preventing impurities from entering the booster pump 6 or the vacuum tank 1, and ensuring the working efficiency and life of the booster pump 6 or the vacuum tank 1.

[0040] In another exemplary embodiment, such as Figure 2 As shown, filters (not shown) for filtering dust are installed in the first pipe 2 and the third pipe 4. Specifically, the filters can take various forms and be made of different materials; for example, high-efficiency filters or multi-layer filters can be used to improve filtration efficiency. Specifically, the filters can be made of corrosion-resistant materials to adapt to different working environments. As a preferred embodiment, the installation position of the filters can be adjusted according to the spatial layout of the first pipe 2 and the third pipe 4 to ensure optimal filtration. Furthermore, the filters can be designed with a detachable structure for easy maintenance and replacement.

[0041] This application effectively filters the gas during the flow of gas from vacuum tank 1 to booster pump 6 and from dry pump 5 to vacuum tank 1, thereby preventing impurities from entering booster pump 6 or vacuum tank 1 and ensuring the working efficiency and lifespan of booster pump 6 or vacuum tank 1. Compared with the prior art, the technical solution of this application is simple and easy to implement, requires no additional maintenance costs, can respond quickly, and improves working efficiency.

[0042] In some embodiments, such as Figure 2 As shown, the dry pump 5 includes multiple compression chambers 53 arranged in parallel and connected in series. The first vent 51 is connected to the compression chamber near the front end of the dry pump 5, and the second vent 52 is connected to the compression chamber near the rear end of the dry pump 5. The number of compression chambers can be determined according to the compression ratio inside the dry pump 5. The compression ratio refers to the ratio of the pressure value of the first vent 51 to the pressure value of the second vent 52.

[0043] In another exemplary embodiment, such as Figure 2 As shown, the compression chamber 53 inside the dry pump 5 is divided into five compression chambers according to the compression ratio inside the dry pump 5. The opening of the first compression chamber in the series-connected five chambers is connected to the first vent 51, and the opening of the last compression chamber is connected to the second vent 52. Specifically, the compression chamber 53 of the dry pump 5 can be adjusted according to different compression ratios to ensure that the dry pump 5 maintains its optimal operating state under different working conditions. For example, when the compression ratio of the dry pump 5 is high, the number of compression chambers can be appropriately increased to distribute the compression load, reduce the pressure of a single compression chamber, and thus improve the overall efficiency of the dry pump 5. Conversely, when the compression ratio is low, the number of compression chambers can be reduced to concentrate the compression capacity and improve the working efficiency of the dry pump 5. In this way, this application can optimize the operating efficiency of the dry pump 5 under different working conditions, reduce energy consumption, and extend the service life of the dry pump 5. Compared with the prior art, the technical solution of this application can better adapt to different working needs and provide a more stable and efficient vacuum environment.

[0044] In some embodiments, the vacuum pump system further includes a first pressure sensor (not shown), a second pressure sensor (not shown), and an alarm (not shown). The first and second pressure sensors are located inside the dry pump 5. The first pressure sensor is located at the first vent 51 and is used to measure the first air pressure value at the first vent 51. The second pressure sensor is located at the second vent 52 and is used to measure the second air pressure value at the second vent 52. The first and second pressure sensors are electrically connected to the alarm. The alarm is used to sound an alarm when the difference between the first and second air pressure values ​​is outside a specified pressure difference range. Thus, when the vacuum tank cannot maintain the pressure at the front and rear ends of the dry pump 5 in an optimal balance, an alarm can be triggered for manual intervention.

[0045] In some specific embodiments, the remote control system sends a vacuum extraction command to the controller 9 via a wireless communication module. The controller 9 receives the vacuum extraction command and controls the opening of the first valve 7, at which point the booster pump 6 begins to extract a vacuum from the vacuum tank 1. After the vacuum tank 1 is vacuumed, the controller 9 controls the closing of the first valve 7 to maintain a certain vacuum state in the vacuum tank 1. At this time, the vacuum pump operates normally.

[0046] When the current sensor detects that the current flowing through the booster pump 6 has stabilized at a certain value, it indicates that the vacuum pump has entered standby mode. The controller 9 then opens the second valve 8, and the vacuum tank 1 uses the third pipe 4 and the second vent 52 to vacuum the dry pump 5. The controller continuously acquires the first and second air pressure values ​​and calculates the difference between them. When the difference between the first and second air pressure values ​​falls outside a specified pressure difference range, the wireless transmission module sends an alarm message to the alarm device, which then sounds an alarm.

[0047] When the vacuum pump resumes normal operation, the remote control system sends a vacuum extraction command to the controller 9 via the wireless communication module. The controller 9 receives the command and, within a specified time, closes the second valve 8 and opens the first valve 7, allowing the booster pump 6 to perform normal vacuum extraction on the vacuum tank 1. The system continues to acquire values ​​from the current sensor and the first pressure sensor. When either the first pressure sensor or the current sensor value shows an upward trend, the first valve 7 is opened again to continue vacuum extraction from the vacuum tank 1, preparing it for use when the vacuum pump enters standby mode later.

[0048] By utilizing the vacuum storage and release function of vacuum tank 1, the vacuum pump can not only ensure the pressure balance between the front and rear ends of dry pump 5 in standby mode, but also reduce the operating power of booster pump (in standby mode, the first valve 7 is closed, and booster pump does not need to vacuum the vacuum tank), thus achieving efficient energy saving and extending the service life of dry pump 5.

[0049] In the above embodiments, the first pipe 2, the second pipe 3, and the third pipe 4 can all be manufactured from various materials, such as stainless steel, aluminum alloy, or other corrosion-resistant materials, to ensure good durability and stability during use. Furthermore, the diameter and length of the first pipe 2, the second pipe 3, and the third pipe 4 can be adjusted according to actual application requirements to optimize the connection between the booster pump 6, the dry pump 5, and the vacuum tank 1.

[0050] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A vacuum pumping system, characterized by, The application relates to a vacuum tank, a first pipeline, a second pipeline, a third pipeline, a dry pump and a booster pump. The booster pump is communicated with the vacuum tank through the first pipeline, and a first valve is arranged on the first pipeline and used for controlling the opening and closing of the first pipeline. The front end of the dry pump is provided with a first air vent, the rear end of the dry pump is provided with a second air vent, the first air vent is communicated with the booster pump through the second pipeline, the second air vent is communicated with the vacuum tank through the third pipeline, and a second valve is arranged on the third pipeline and used for controlling the opening and closing of the third pipeline. A controller is further arranged and electrically connected with the first valve.

2. The vacuum pumping system of claim 1, wherein, A first pressure sensor is further arranged in the dry pump, the first pressure sensor is arranged at the first air vent, the first pressure sensor is electrically connected with the controller, and the controller is electrically connected with the first valve.

3. The vacuum pumping system of claim 1, wherein, A current sensor is further arranged and electrically connected with the booster pump, the current sensor is used for measuring the current value of the booster pump, the current sensor is electrically connected with the controller, and the controller is electrically connected with the first valve.

4. The vacuum pumping system of claim 1, wherein, A current sensor is further arranged and electrically connected with the booster pump, the current sensor is used for measuring the current value of the booster pump, the current sensor is electrically connected with the controller, and the controller is electrically connected with the second valve.

5. The vacuum pumping system of claim 1, wherein, A shell is further arranged, the booster pump and the dry pump are arranged in the shell, and the tank body of the vacuum tank is integrally formed with the shell or fixedly installed on the outer wall of the shell.

6. The vacuum pumping system of claim 1, wherein, The first valve and the second valve are one-way valves or three-way valves.

7. The vacuum pumping system of claim 1, wherein, A filter for filtering dust is arranged in the first pipeline and the third pipeline.

8. The vacuum pumping system of claim 1, wherein, A three-way valve and a filter for filtering dust are further arranged.

9. The vacuum pumping system of claim 1, wherein, The first pipeline comprises a first sub-pipeline and a second sub-pipeline, the third pipeline comprises the first sub-pipeline and a third sub-pipeline, the first sub-pipeline, the second sub-pipeline and the third sub-pipeline are communicated through the three-way valve, and the filter is arranged in the first sub-pipeline. The first valve is arranged on the second sub-pipeline, and the second valve is arranged on the third sub-pipeline. A first pressure sensor, a second pressure sensor and an alarm are further arranged, the first pressure sensor and the second pressure sensor are arranged in the dry pump, the first pressure sensor is arranged at the first air vent and used for measuring the first air pressure value of the first air vent, and the second pressure sensor is arranged at the second air vent and used for measuring the second air pressure value of the second air vent.

10. The vacuum pumping system of claim 1, wherein, The first pressure sensor and the second pressure sensor are respectively electrically connected with the alarm. ​

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