Novel magnetron sputtering improved film winding jig

Abstract

A mounting rod (2) is arranged on a substrate frame (1), an upper clamp (3) and a lower clamp (4) are arranged on the mounting rod (2), the upper clamp (3) and the lower clamp (4) are both of a double-groove type clamp structure, the upper clamp (3) is divided into an upper shell (31), a connecting plate (32) and a pressing buckle (33), the lower clamp (4) is divided into a lower shell (41), and the upper shell (31) is connected with the connecting plate (32). The lower shell (41) is provided with a supporting groove body (42), and after the design of the upper and lower double-sided clamps is completed, a baffle is placed on the inner side, and a normal product is placed on the outer side; the distance between the two pieces of glass is reduced in a back-to-back mode; target atoms originally sputtered to the back of a product can be blocked by the back baffle, the phenomenon of poor functions caused by film winding is avoided, and the jig is convenient to disassemble and can be quickly disassembled, assembled and transformed after being used.

Description

Technical Field

[0001] This utility model belongs to the field of glass processing technology. Specifically, this utility model relates to a novel magnetron sputtering improved film-wrapping tool. Background Technology

[0002] Vacuum coating is a common glass surface coating technology. In a vacuum environment, sputtered materials such as metals, alloys or compounds are coated onto the glass surface, solidified and deposited to form a film on the glass surface.

[0003] A patent application with patent number 202322282727.0 and publication date of February 20, 2024 discloses a vacuum coating substrate holder device. The substrate holder has a glass substrate, a clamping block at the top of the glass substrate, a support block at the bottom of the glass substrate, and fixing blocks on both sides of the bottom of the glass substrate. The clamping block, support block, and fixing block are all detachably connected to the substrate holder. The vacuum coating substrate holder device of this utility model is easy to operate, low in cost, and improves production efficiency.

[0004] In the existing technology, some manufacturers use stainless steel substrate holders that may diffract onto the back of the product during high-power sputtering of low-resistivity Shield ITO, resulting in malfunction. Usually, aluminum frame substrate holders need to be replaced for low-resistivity Shield ITO, which is time-consuming and affects efficiency. Utility Model Content

[0005] The present invention aims to provide a novel magnetron sputtering improved film-wrapping tool that ensures processing efficiency while reducing product defect rate.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a novel magnetron sputtering improved film-winding fixture, including a substrate holder, a mounting rod on the substrate holder, an upper clamp and a lower clamp on the mounting rod, both of which are double-groove clamp structures.

[0007] The mounting rods are arranged vertically on the substrate holder, with three rods in total. The upper clamp is located on the top and middle mounting rods, and the lower clamp is located on the bottom and middle mounting rods.

[0008] The upper clamps are arranged in pairs, with each pair of upper clamps arranged symmetrically on the left and right.

[0009] The upper clamp is divided into an upper shell that is snapped onto the mounting rod, and a connecting plate is provided on the upper shell. A buckle is provided on the connecting plate. The lower clamp is divided into a lower shell that is snapped onto the mounting rod, and a support groove is provided on the lower shell.

[0010] Two connecting plates and buckles are provided, arranged side by side on the upper shell, and the cross-section of the buckle is V-shaped.

[0011] The cross-section of the support groove is W-shaped.

[0012] The connecting plate is welded to the surface of the upper shell, and the connecting plate extends to the outside of the upper shell. The snap fastener is located at the end of the connecting plate away from the upper shell.

[0013] The end of the connecting plate with the snap fastener is inclined downwards.

[0014] The technical advantages of this utility model are as follows: With the design of the upper and lower double-sided clamps, a baffle is placed on the inner side and the normal product is placed on the outer side; by using two glass plates back to back and reducing the distance between the glass plates, the target material atoms that were originally sputtered to the back of the product can be blocked by the back baffle, avoiding the functional defects caused by the film wrapping; the fixture is easy to disassemble and can be quickly disassembled and transformed after use. Attached Figure Description

[0015] This manual includes the following figures, which illustrate the following:

[0016] Figure 1 This is a schematic diagram of the structure of a novel magnetron sputtering improved film-wrapping tool according to this utility model;

[0017] Figure 2 for Figure 1 A schematic diagram of the upper and lower clamps of a novel magnetron sputtering improved film-winding fixture;

[0018] Figure 3 for Figure 1 A schematic diagram of the upper fixture for a novel magnetron sputtering improved film-wrapping tool;

[0019] Figure 4 for Figure 1 A schematic diagram of the lower fixture for a novel magnetron sputtering improved film-coating tooling.

[0020] The markings in the diagram are: 1. Substrate holder; 2. Mounting rod; 3. Upper clamp; 31. Upper shell; 32. Connecting plate; 33. Press buckle; 4. Lower clamp; 41. Lower shell; 42. Support groove. Detailed Implementation

[0021] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings, in order to help those skilled in the art to have a more complete, accurate and in-depth understanding of the utility model concept and technical solution, and to facilitate its implementation.

[0022] Please see Figure 1-4A novel magnetron sputtering improved film-coating fixture includes a substrate holder 1, a mounting rod 2 on the substrate holder 1, and an upper clamp 3 and a lower clamp 4 on the mounting rod 2. Both the upper clamp 3 and the lower clamp 4 are double-groove clamp structures. With the design of the upper and lower double-sided clamps, a baffle is placed on the inner side, and the normal product is placed on the outer side. By using two glass plates back to back and reducing the distance between the glass plates, the target atoms that would normally be sputtered to the back of the product are blocked by the back baffle, avoiding the functional defects caused by film coating. The fixture is easy to disassemble and can be quickly disassembled and reassembled after use.

[0023] There are three mounting rods 2 arranged vertically on the substrate frame 1. The upper clamp 3 is set on the top and middle mounting rods 2, and the lower clamp 4 is set on the bottom and middle mounting rods 2. Two rows of glass can be set on the substrate frame 1 to improve processing efficiency. At the same time, the glass between the mounting rods 2 is clamped by the upper clamp 3 and the lower clamp 4 on the upper and lower sides.

[0024] The upper clamps 3 are set in pairs, with each pair of upper clamps 3 arranged symmetrically on the left and right sides; the symmetrical arrangement of the upper clamps 3 can minimize the occupation of the mounting rod 2 position, improve space utilization, reduce costs and improve processing efficiency.

[0025] The upper clamp 3 is an upper shell 31 that is snapped onto the mounting rod 2. The upper shell 31 is provided with a connecting plate 32 and a snap fastener 33. The lower clamp 4 is a lower shell 41 that is snapped onto the mounting rod 2. The lower shell 41 is provided with a support groove 42. Both the upper shell 31 and the lower shell 41 are U-shaped structures with one side wider than the other side. They are installed by utilizing the pressure of the material body and the friction between the material and the mounting rod 2. After installation, screws are tightened to improve the installation strength and prevent the glass from falling off. The upper shell 31 is snapped onto the bottom of the mounting rod 2, and the lower shell 41 is snapped onto the top of the mounting rod 2. The snap fastener 33 on the upper shell 31 is fastened to the top of the glass, while the bottom of the glass is placed in the support groove 42, which fixes the glass from the top and bottom.

[0026] There are two connecting plates 32 and snap fasteners 33, which are arranged side by side on the upper shell 31. The cross-section of the snap fastener 33 is V-shaped. The two snap fasteners 33 can cooperate with two workpieces at the same time to achieve the purpose of installing a glass product and a baffle.

[0027] The cross-section of the support groove 42 is W-shaped; the bottoms of two workpieces can be placed into the support groove 42 at the same time, and the support groove 42 is used for support and fixation.

[0028] The connecting plate 32 is welded to the surface of the upper shell 31 and extends to the outside of the upper shell 31. The snap fastener 33 is located at the end of the connecting plate 32 away from the upper shell 31. This makes the snap fastener 33 away from the upper shell 31. Since the upper shell 31 is fixed to the mounting rod 2, the snap fastener 33 connected to the upper shell 31 by the connecting plate 32 can be bent to make the snap fastener 33 fasten to the top of the glass. This can adapt to glass products of different sizes and improve the processing application range.

[0029] The end of the connecting plate 32 with the snap fastener 33 is tilted downwards; the connecting plate 32 can be bent to facilitate the subsequent snap fastener 33 to fasten and fix it.

[0030] Working principle: By installing the glass product and the baffle used to block splashing in the support groove 42, and pressing the buckle 33 downward, quick installation is achieved. Two pieces of glass are installed on the substrate frame 1, one for processing and the other for blocking splashing. After processing, the buckle 33 is pushed upward to disengage from the glass, and then the glass is pulled out from the support groove 42 to complete the disassembly. Disassembly and installation are convenient. The overall structure of this tooling fixture is simple, consisting of the outer substrate frame 1 and the middle mounting rod 2, both of which are connected by screws. The upper clamp 3 and the lower clamp 4 are also fixed to the mounting rod 2 by screws, making installation and disassembly convenient. After use, it can be quickly disassembled and reassembled.

[0031] The technical advantages of this utility model are as follows: With the design of the upper and lower double-sided clamps, a baffle is placed on the inner side and the normal product is placed on the outer side; by using two glass plates back to back and reducing the distance between the glass plates, the target material atoms that were originally sputtered to the back of the product can be blocked by the back baffle, avoiding the functional defects caused by the film wrapping; the fixture is easy to disassemble and can be quickly disassembled and transformed after use.

[0032] The present invention has been described above by way of example with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any non-substantial improvements made using the inventive concept and technical solution of the present invention; or the direct application of the inventive concept and technical solution to other situations without modification, are all within the protection scope of the present invention.

Claims

1. A novel magnetron sputtering improved winding jig, comprising a substrate holder (1), wherein a mounting rod (2) is arranged on the substrate holder (1), characterized in that: The mounting rod (2) is provided with an upper clamp (3) and a lower clamp (4), and the upper clamp (3) and the lower clamp (4) are both double-groove clamp structures.

2. A novel magnetic control sputtering improved wire winding jig according to claim 1, characterized in that: The mounting rod (2) is arranged in three on the substrate rack (1) in an up-down distribution, the upper clamp (3) is arranged on the mounting rod (2) at the top and the middle, and the lower clamp (4) is arranged on the mounting rod (2) at the bottom and the middle.

3. The novel magnetic control sputtering improved wire winding jig according to claim 1 or 2, characterized in that: The upper clamps (3) are arranged in pairs and are arranged symmetrically left and right.

4. The novel magnetic control sputtering improved wire winding jig according to claim 1 or 2, characterized in that: The upper clamp (3) is divided into an upper shell (31) clamped on the mounting rod (2), the upper shell (31) is provided with a connecting plate (32), the connecting plate (32) is provided with a pressing buckle (33), the lower clamp (4) is divided into a lower shell (41) clamped on the mounting rod (2), and the lower shell (41) is provided with a supporting groove body (42).

5. The novel magnetic control sputtering improved wire winding jig according to claim 4, wherein: The connecting plate (32) and the pressing buckle (33) are provided with two and arranged side by side on the upper shell (31), and the cross section of the pressing buckle (33) is V-shaped.

6. A novel magnetic control sputtering improved wire winding jig according to claim 4, characterized in that: The cross section of the supporting groove body (42) is W-shaped.

7. The novel magnetic control sputtering improved wire winding jig according to claim 4 or 5, characterized in that: The connecting plate (32) is welded on the surface of the upper shell (31), the connecting plate (32) extends to the outside of the upper shell (31), and the pressing buckle (33) is arranged at the end of the connecting plate (32) away from the upper shell (31).

8. A novel magnetic control sputtering improved wire winding jig according to claim 4, characterized in that: The end of the connecting plate (32) provided with the pressing buckle (33) is inclined downward.

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