Target material fixing device for vacuum coating machine

Abstract

The utility model relates to the technical field of vacuum coating, in particular to a target material fixing device for a vacuum coating machine, which comprises a fixing frame, a movable plate and two clamping pieces, two first sliding rails are symmetrically arranged at the top of the fixing frame, the movable plate is in sliding fit with the first sliding rails, four second sliding rails are symmetrically arranged at the top of the movable plate, and the two clamping pieces are arranged on the movable plate. A first driving piece used for controlling the moving plate to slide is fixedly installed on the fixing frame, an adjusting assembly used for controlling the two clamping pieces to get close to each other or get away from each other is arranged on the moving plate, and self-locking assemblies are arranged at the positions, corresponding to the two first sliding rails, of the moving plate; the self-locking assembly is used for locking the adjusting assembly; by arranging the self-locking assembly, the screw rod can be locked by the self-locking assembly when the target material moves, and rotation of the threaded rod caused by vibration and the like is prevented, so that the stability of the target material in the sputtering process is ensured, and the situation that a thin film is not uniform or equipment is damaged due to movement or vibration is avoided.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a target fixing device for a vacuum coating machine. Background Technology

[0002] The target fixing device for vacuum coating machines is one of the key components in vacuum coating equipment. It is responsible for firmly mounting the target on the sputtering device to ensure that the target can stably supply material to form a uniform thin film during the sputtering process.

[0003] A target fixing device for a vacuum coating machine, disclosed in Chinese Patent Publication No. CN222574753U, helps to accurately fix the target material through the use of a support plate, a bidirectional lead screw, and a servo motor. This reduces the displacement or detachment of the target material during the coating process, ensuring the quality and stability of the coating. However, according to target fixing devices proposed in related fields and existing technologies, most existing devices use ordinary threaded rods and nuts for locking (such as double nuts for anti-loosening), without an active self-locking structure. Vibration during equipment operation can easily cause the nuts to loosen and the threaded rod to rotate, leading to target displacement. The displacement of the target material position directly results in uneven coating thickness (such as local film layers that are too thick or too thin). Especially in large-area sputtering, the consistency between the edge and center film layers is poor, reducing product yield. Utility Model Content

[0004] The purpose of this utility model is to overcome the shortcomings of the prior art, solve the problems mentioned in the background art, and provide a target fixing device for a vacuum coating machine.

[0005] The objective of this utility model is achieved through the following technical solution: a target fixing device for a vacuum coating machine, comprising a fixing frame, a movable plate, and two clamping members. Two first slide rails are symmetrically mounted on the top of the fixing frame, both of which are horizontally arranged. The movable plate slides in cooperation with the first slide rails. Four second slide rails are symmetrically mounted on the top of the movable plate, all of which are vertically arranged. The two clamping members slide in cooperation with the second slide rails. A first driving member for controlling the sliding of the movable plate is fixedly mounted on the fixing frame. An adjusting component for controlling the two clamping members to move closer or further apart is provided on the movable plate. A self-locking component is provided on each position of the movable plate corresponding to the two first slide rails. When the first driving member controls the sliding of the movable plate, the self-locking component locks the adjusting component.

[0006] Preferably, the first driving component is a hydraulic cylinder, and the output end of the first driving component is fixedly connected to the moving plate.

[0007] Preferably, the adjustment assembly includes a motor fixedly mounted on one side of the movable plate, and a lead screw is fixedly mounted on the output end of the motor.

[0008] Preferably, the lead screw is a left- or right-hand threaded rod, and both clamping members are threadedly engaged with the lead screw.

[0009] Preferably, the self-locking assembly includes a fixed base fixedly installed on the top of the movable plate, a movable component slidably disposed inside the fixed base, a ball bearing disposed at the bottom end of the movable component, a rotating hole being provided in the fixed base corresponding to the position of the lead screw, an arc-shaped groove being provided at the top end of the movable component, and a plurality of engaging components being fixedly disposed inside the arc-shaped groove.

[0010] Preferably, the lead screw is rotatably disposed inside the rotating hole, the radius of the arc-shaped groove is the same as the radius of the rotating hole, and a flexible layer is provided on the lead screw corresponding to the position of the arc-shaped groove, the outer surface of the flexible layer being flush with the outer surface of the lead screw.

[0011] Preferably, the top of each of the two first slide rails is provided with a settling groove corresponding to the position of the ball, the settling groove is located on the side close to the first driving member, and the moving plate is provided with a through hole corresponding to the position of the movable member.

[0012] Beneficial effects:

[0013] The target fixing device for this vacuum coating machine is equipped with a self-locking component. This component can lock the lead screw when the target moves, preventing the lead screw from rotating due to vibration or other reasons. This ensures the stability of the target during the sputtering process and avoids uneven film or equipment damage caused by movement or vibration. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a first-view structural schematic diagram of the fixing frame of this utility model;

[0016] Figure 2 This is a structural schematic diagram of the fixing frame of this utility model from a second perspective;

[0017] Figure 3 This is a schematic diagram showing the state of the moving plate when the ball bearings are inside the settling tank.

[0018] Figure 4 This utility model Figure 3 Enlarged structural diagram at point A;

[0019] Figure 5 This is a schematic diagram showing the state of the moving plate when the ball bearings of this utility model are in contact with the surface of the first slide rail;

[0020] Figure 6 This utility model Figure 5 Enlarged structural diagram at point B;

[0021] Figure 7 This is a schematic diagram of the structure of the first slide rail of this utility model;

[0022] Figure 8 This is a schematic diagram of the structure of the fixing base of this utility model;

[0023] Figure 9 This is a schematic diagram of the internal structure of the fixing base of this utility model.

[0024] In the diagram: 1. Fixed frame; 2. Moving plate; 201. Through hole; 3. Clamping component; 4. First slide rail; 401. Settling groove; 5. Second slide rail; 6. First driving component; 7. Adjustment component; 701. Motor; 702. Lead screw; 7021. Flexible layer; 8. Self-locking component; 801. Fixed base; 802. Moving component; 803. Rotating hole; 804. Arc groove; 805. Engaging component; 806. Ball bearing. Detailed Implementation

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] Additional aspects and advantages of this invention will be further set forth in the description which follows in conjunction with the accompanying drawings, and in part will be obvious from the description or may be learned by practice of the invention.

[0027] like Figures 1 to 9As shown, a target fixing device for a vacuum coating machine includes a fixing frame 1, a movable plate 2, and two clamping members 3. Two first slide rails 4 are symmetrically installed on the top of the fixing frame 1. Both first slide rails 4 are arranged horizontally, and the movable plate 2 slides with the first slide rails 4. Four second slide rails 5 are symmetrically installed on the top of the movable plate 2. All four second slide rails 5 are arranged vertically, and the two clamping members 3 slide with the second slide rails 5. A first driving member 6 for controlling the sliding of the movable plate 2 is fixedly installed on the fixing frame 1. The movable plate 2 is provided with an adjusting component 7 for controlling the two clamping members 3 to move closer or further apart. A self-locking component 8 is provided at the position of the movable plate 2 corresponding to the two first slide rails 4. When the first driving member 6 controls the sliding of the movable plate 2, the self-locking component 8 is used to lock the adjusting component 7.

[0028] like Figure 1 and Figure 2 As shown, the first driving component 6 is a hydraulic cylinder, and the output end of the first driving component 6 is fixedly connected to the moving plate 2. The adjustment component 7 includes a motor 701 fixedly installed on one side of the moving plate 2. A lead screw 702 is fixedly installed on the output end of the motor 701. The lead screw 702 is a left- or right-hand threaded rod. Both clamping components 3 are threadedly engaged with the lead screw 702. When fixing the target material, the target material is first placed between the two clamping components 3, and then the motor 701 controls the lead screw 702 to rotate, so that the two clamping components 3 clamp the target material. After the target material is fixed, the first driving component 6 controls the moving plate 2 to slide.

[0029] like Figures 3 to 9As shown, the self-locking assembly 8 includes a fixed base 801 fixedly installed on the top of the movable plate 2. A movable component 802 is slidably disposed inside the fixed base 801. A ball bearing 806 is disposed at the bottom end of the movable component 802. A rotating hole 803 is provided in the fixed base 801 corresponding to the position of the lead screw 702. An arc-shaped groove 804 is provided at the top end of the movable component 802. Multiple engaging components 805 are fixedly disposed inside the arc-shaped groove 804. Settling grooves 401 are provided on the top of both first slide rails 4 corresponding to the positions of the ball bearings 806. The settling grooves 401 are located on the side near the first driving component 6. A through hole 201 is provided in the movable plate 2 corresponding to the position of the movable component 802. The lead screw 702 is rotatably disposed inside the rotating hole 803. The radius of the arc-shaped groove 804 is the same as the radius of the rotating hole 803. A flexible layer 7021 is provided in the lead screw 702 corresponding to the position of the arc-shaped groove 804. The outer surface of the flexible layer 7021 is flush with the outer surface of the lead screw 702. When the moving plate 2 slides, the ball 806 disengages from the settling groove 401, and then the ball 806 causes the moving part 802 to slide to one side of the lead screw 702. This causes multiple engaging parts 805 inside the arc groove 804 to engage with the flexible layer 7021 on the surface of the lead screw 702. Once the engaging parts 805 engage with the flexible layer 7021, the lead screw 702 cannot rotate. This prevents the lead screw 702 from rotating due to vibration or other reasons, thus ensuring the stability of the target material during sputtering and avoiding uneven film or equipment damage caused by movement or vibration. At the same time, due to the presence of the self-locking component 8, even if there is an error or external interference during operation, the lead screw 702 will not rotate unexpectedly, thus protecting the target material and sputtering device from damage.

[0030] In summary, because the overall structure is mechanical and does not rely on electronic or electrical systems, it has high reliability, is not easily affected by electromagnetic interference, and is easy to maintain.

[0031] The work process is as follows:

[0032] S1: As Figure 1 , Figure 4 and Figure 6 As shown, in the initial state, the ball 806 is inside the settling tank 401, and the multiple engagement pieces 805 inside the arc groove 804 are not engaged with the flexible layer 7021 on the surface of the lead screw 702. At this time, the lead screw 702 can be rotated by the motor 701.

[0033] S2: As Figure 1 and Figure 2 As shown, when fixing the target, the target is first placed between the two clamping parts 3, and then the screw 702 is rotated by the motor 701 so that the two clamping parts 3 clamp the target.

[0034] S3: As Figure 1 and Figure 2As shown, after the target material is fixed, the moving plate 2 is controlled to slide by the first driving component 6;

[0035] S4: As Figure 4 and Figure 6 As shown, when the movable plate 2 slides, the ball 806 will disengage from the settling groove 401, and then the ball 806 will cause the movable part 802 to slide to one side of the lead screw 702, so that the multiple engaging parts 805 inside the arc groove 804 engage with the flexible layer 7021 on the surface of the lead screw 702.

[0036] S5: As Figure 4 and Figure 6 As shown, when the engaging member 805 engages with the flexible layer 7021, the lead screw 702 cannot rotate. This prevents the lead screw 702 from rotating due to vibration or other reasons, thus ensuring the stability of the target material during sputtering and avoiding uneven film or equipment damage caused by movement or vibration. At the same time, due to the presence of the self-locking component 8, even if there is an error or external interference during operation, the lead screw 702 will not rotate unexpectedly, thus protecting the target material and sputtering device from damage.

[0037] S6: As Figure 1 , Figure 4 and Figure 6 As shown, after the target material is processed, the moving plate 2 is controlled to slide in the opposite direction by the first driving component 6, so that the ball 806 is inside the settling tank 401. The multiple engagement parts 805 inside the arc groove 804 do not engage with the flexible layer 7021 on the surface of the lead screw 702. At this time, the lead screw 702 can be rotated by the motor 701, and then the target material can be taken out.

[0038] The hydraulic cylinder and motor 701 described in this application are both well-known technologies in this field, therefore their specific structures and working principles are not described in detail.

[0039] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A target fixing device for a vacuum coating machine, characterized in that: The device includes a fixed frame (1), a movable plate (2), and two clamping members (3). The top of the fixed frame (1) is symmetrically equipped with two first slide rails (4), both of which are horizontally arranged. The movable plate (2) slides in cooperation with the first slide rails (4). The top of the movable plate (2) is symmetrically equipped with four second slide rails (5), all of which are vertically arranged. The two clamping members (3) slide in cooperation with the second slide rails (5). The fixed frame (1) is fixedly equipped with a first driving member (6) for controlling the sliding of the movable plate (2). The movable plate (2) is provided with an adjustment component (7) for controlling the two clamping members (3) to move closer or further apart from each other. The movable plate (2) is provided with a self-locking component (8) at the position corresponding to the two first slide rails (4). When the first driving member (6) controls the movable plate (2) to slide, the self-locking component (8) is used to lock the adjustment component (7).

2. The target fixing device for a vacuum coating machine according to claim 1, characterized in that: The first driving component (6) is a hydraulic cylinder, and the output end of the first driving component (6) is fixedly connected to the moving plate (2).

3. The target fixing device for a vacuum coating machine according to claim 1, characterized in that: The adjustment assembly (7) includes a motor (701) fixedly installed on one side of the movable plate (2), and a lead screw (702) is fixedly installed at the output end of the motor (701).

4. The target fixing device for a vacuum coating machine according to claim 3, characterized in that: The lead screw (702) is a left- or right-hand threaded rod, and both clamping members (3) are threadedly engaged with the lead screw (702).

5. The target fixing device for a vacuum coating machine according to claim 4, characterized in that: The self-locking assembly (8) includes a fixed base (801) fixedly installed on the top of the movable plate (2). A movable part (802) is slidably provided inside the fixed base (801). A ball bearing (806) is provided at the bottom end of the movable part (802). A rotating hole (803) is provided in the fixed base (801) corresponding to the position of the lead screw (702). An arc groove (804) is provided at the top end of the movable part (802). A plurality of engaging parts (805) are fixedly provided inside the arc groove (804).

6. The target fixing device for a vacuum coating machine according to claim 5, characterized in that: The lead screw (702) is rotatably disposed inside the rotating hole (803). The radius of the arc groove (804) is the same as the radius of the rotating hole (803). A flexible layer (7021) is provided on the lead screw (702) corresponding to the position of the arc groove (804). The outer surface of the flexible layer (7021) is flush with the outer surface of the lead screw (702).

7. The target fixing device for a vacuum coating machine according to claim 6, characterized in that: The top of each of the two first slide rails (4) is provided with a settling groove (401) corresponding to the position of the ball (806). The settling groove (401) is located on the side close to the first drive member (6). The moving plate (2) is provided with a through hole (201) corresponding to the position of the movable member (802).

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