Evaporation equipment for perovskite battery

Abstract

The utility model relates to the technical field of battery evaporation, and discloses evaporation equipment for a perovskite battery, the evaporation equipment comprises an evaporation source, a heat conduction device and a heating device, the heat conduction device comprises an outer heat conduction sheet and a plurality of inner heat conduction sheets, the outer heat conduction sheet is placed in the evaporation source and is in contact with the inner wall of the evaporation source, and the inner heat conduction sheet is in contact with the inner wall of the evaporation source. The multiple inner heat-conducting fins are arranged at intervals in the circumferential direction of the inner wall of the outer heat-conducting fin. The heating device is connected with the outer wall of the evaporation source. The outer heat-conducting fins and the plurality of inner heat-conducting fins are arranged in the evaporation source, and the heat-conducting fins are tightly matched with the interior of the evaporation source, so that the phenomenon that the heat-conducting fins are separated is avoided, the heat conduction efficiency in the evaporation source is improved, and an evaporation material can quickly reach a stable evaporation state.

Description

TECHNICAL FIELD

[0001] The utility model relates to battery evaporation technology field, concretely relates to a kind of evaporation equipment for perovskite battery. BACKGROUND

[0002] Perovskite solar cell is a kind of photovoltaic cell that has developed rapidly in recent years, and in its preparation process, it usually needs to use vacuum thermal evaporation technology to deposit multiple thin films. The raw materials are generally powder-like sublimation materials, such as PbI2, PbBr2, FAI, MAI, etc. In order to ensure that these materials can sublimate smoothly and deposit on the substrate, the materials must be strictly preheated before evaporation. Preheating makes the temperature of the materials in the entire crucible close to uniform, so that a stable evaporation rate can be achieved to meet the evaporation requirements.

[0003] Currently, in the production process of perovskite solar cells, the evaporation equipment usually uses a crucible as a point source evaporation source, and heats the materials inside the crucible in the form of thermal radiation through heating wires acting on the crucible wall. The capacity of the crucible varies from 2 cc to 2000 cc, and as the capacity of the crucible increases, its diameter also expands, which leads to an increasing preheating time of the crucible, and also causes temperature differences between the crucible wall and the crucible center. The larger the diameter of the crucible, the greater the temperature difference. Therefore, the existing evaporation equipment sets a heat conduction device in the crucible, which includes four arc-shaped heat conduction sheets. The four heat conduction sheets are distributed in a ring shape by being tangent to each other inside the crucible, and the two ends of each heat conduction sheet are in contact with the inner wall of the crucible body. The two ends of each heat conduction sheet and the adjacent heat conduction sheets are connected by heating wires. The heating wires heat the heat conduction sheets, which then heat the materials inside the crucible, making the materials evenly heated and reducing the preheating time. However, in the preheating process of this evaporation equipment, the welding position of the heating wires and the heat conduction sheets is easily corroded by perovskite organic salt materials, and the heating wires are easily detached from the heat conduction sheets. The heat conduction device cannot continue to conduct heat, and its service life is short. SUMMARY

[0004] Therefore, the utility model provides an evaporation equipment for perovskite battery to solve the problem that the heating wires are easily detached from the crucible wall in the preheating process of the evaporation equipment, and the heat conduction effect is poor.

[0005] In the first aspect, the utility model provides an evaporation equipment for perovskite battery, which comprises:

[0006] an evaporation source;

[0007] a heat conduction device, which comprises an outer heat conduction sheet and multiple inner heat conduction sheets. The outer heat conduction sheet is placed inside the evaporation source and in contact with the inner wall of the evaporation source. The multiple inner heat conduction sheets are arranged along the circumference of the inner wall of the outer heat conduction sheet.

[0008] A heating device is connected to the outer wall of the evaporation source.

[0009] Advantages

[0010] By arranging the outer heat-conducting sheet and the plurality of inner heat-conducting sheets in the evaporation source, the heat conduction efficiency can be effectively improved, and the temperature distribution in the evaporation source is more uniform. The arrangement of the heat-conducting device can significantly reduce the temperature difference between the central region and the edge region in the crucible, thereby accelerating the preheating speed of the evaporation material and shortening the preheating time. Moreover, the evaporation device is heated by the heating device arranged on the outer wall of the evaporation source, and then the heat is transferred by the heat-conducting device, so that the evaporation source is uniformly heated. The evaporation source does not arrange a heating wire, and the heating wire is not connected to the heat-conducting sheet, so the heating wire will not be corroded and damaged by the evaporation material. The evaporation device has good heat-conducting effect and long service life, and can be used continuously.

[0011] In an optional embodiment, the evaporation source is a crucible, the crucible has a cylindrical accommodating cavity, and the outer heat-conducting sheet is a cylindrical heat-conducting sheet arranged in the accommodating cavity.

[0012] Advantages

[0013] The outer heat-conducting sheet is designed as a cylindrical heat-conducting sheet, which is attached to the inner wall of the cylindrical accommodating cavity of the crucible, thereby maximizing the heat-conducting area and ensuring that the heat can be quickly transferred to the evaporation material.

[0014] In an optional embodiment, the inner heat-conducting sheet is a flat plate heat-conducting sheet.

[0015] Advantages

[0016] The inner heat-conducting sheet adopts a flat plate structure, which makes the heat-conducting path more uniform and intuitive, and effectively avoids the local heat accumulation phenomenon caused by complex structure.

[0017] In an optional embodiment, the inner heat-conducting sheet is a corrugated heat-conducting sheet.

[0018] Advantages

[0019] The corrugated structure can further expand the surface area of the heat-conducting sheet, enhance the heat-conducting efficiency, and adapt to the preheating needs of larger capacity crucibles.

[0020] In an optional embodiment, a plurality of the inner heat-conducting sheets are arranged in a circumferential array on the inner wall of the outer heat-conducting sheet.

[0021] Advantages

[0022] By arranging a plurality of inner heat-conducting sheets in a circumferential array on the inner wall of the outer heat-conducting sheet, the heat distribution can be optimized, and the evaporation material can be uniformly heated from different directions.

[0023] In an alternative embodiment, the inner heat-conducting plates are connected to each other away from the end connected to the outer heat-conducting plates.

[0024] Advantages

[0025] The inner heat-conducting plates are connected to each other away from the end connected to the outer heat-conducting plates, forming a stable heat-conducting structure frame, which enhances the structural strength between the heat-conducting plates and the heat conduction effect at the center of the crucible.

[0026] In an alternative embodiment, the four flat heat-conducting plates are arranged in a cross shape in the cylindrical heat-conducting plate.

[0027] Advantages

[0028] The heat-conducting plates are arranged in a cross shape in the cylindrical heat-conducting plate, which optimizes the heat transfer path inside the cylindrical heat-conducting plate and makes the heat distribution in the crucible more uniform.

[0029] In an alternative embodiment, the heat-conducting device is made of tantalum or molybdenum.

[0030] Advantages

[0031] Tantalum or molybdenum has excellent heat conduction performance and high-temperature resistance, which can greatly improve the preheating efficiency. In addition, tantalum or molybdenum has strong chemical stability and is not easy to react with the evaporation material, ensuring the purity of the evaporation material during evaporation.

[0032] In an alternative embodiment, the heating device is a heating wire, and the heating wire is connected to the outer wall of the evaporation source.

[0033] In an alternative embodiment, an auxiliary heating device is further included, and the auxiliary heating device is an external electrode connected to the heat-conducting device.

[0034] Advantages

[0035] The auxiliary heating device can directly heat the heat-conducting device, faster achieve heat balance between the heat-conducting plates, ensure uniform heating of the evaporation material, greatly shorten the preheating time and improve the preheating uniformity. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings described below are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0037] Figure 1The structure diagram of the evaporation equipment for the perovskite battery of the embodiment 1 of the utility model;

[0038] Figure 2 The structure diagram of the heat conduction device of the evaporation equipment for the perovskite battery of the embodiment 1 of the utility model;

[0039] Figure 3 The top view of the heat conduction device of the evaporation equipment for the perovskite battery of the embodiment 2 of the utility model;

[0040] Figure 4 The top view of the heat conduction device of the evaporation equipment for the perovskite battery of the embodiment 3 of the utility model.

[0041] Mark explanation:

[0042] 1, evaporation source;

[0043] 2, heat conduction device, 21, outer heat conduction sheet, 22, inner heat conduction sheet;

[0044] 3, heating device;

[0045] 4, auxiliary heating device. Specific implementation

[0046] In order to make the purpose, technical scheme and advantage of the embodiment of the utility model more clear, the technical scheme in the embodiment of the utility model will be described clearly and completely in the following with the drawings in the embodiment of the utility model, obviously, the described embodiment is a part of the embodiment of the utility model, rather than all the embodiments. Based on the embodiment in the utility model, all other embodiments obtained by the person skilled in the art without creative labor are within the protection scope of the utility model.

[0047] Embodiment 1

[0048] The embodiment of the utility model will be described in the following with Figures 1 to 2 The embodiment of the utility model.

[0049] According to the embodiment of the utility model, on the one hand, an evaporation equipment for perovskite battery is provided, which comprises: evaporation source 1, heat conduction device 2 and heating device 3;Heat conduction device 2 includes: one outer heat conduction sheet 21 and multiple inner heat conduction sheets 22, outer heat conduction sheet 21 is placed in evaporation source 1, and is in contact with the inner wall of evaporation source 1, multiple inner heat conduction sheets 22 are arranged along the circumference of the inner wall of outer heat conduction sheet 21;Heating device 3 is connected with the outer wall of evaporation source 1.

[0050] The evaporation source 1 provides a uniform and stable preheating environment for the evaporation material as a container. The outer heat-conducting sheet 21 is placed inside the evaporation source 1 in abutment with the inner wall of the evaporation source 1, and the inner heat-conducting sheet 22 is placed inside the outer heat-conducting sheet 21 and is arranged in the circumferential direction of the inner wall of the outer heat-conducting sheet 21 in the outer heat-conducting sheet 21, and can be connected to the inner wall of the outer heat-conducting sheet 21 by welding. In this embodiment, the outer heat-conducting sheet 21 and the inner heat-conducting sheet 22 have the same height and are both lower than the height of the inner wall of the evaporation source 1. Of course, in other embodiments, the heights of the outer heat-conducting sheet 21 and the inner heat-conducting sheet 22 can also be different.

[0051] When the heating device 3 heats the outer wall of the evaporation source 1, the outer heat-conducting sheet 21 absorbs the heat on the evaporation source 1 and then diffuses the heat to the inner heat-conducting sheet 22 and the evaporation material. Since the evaporation material is in contact with the outer heat-conducting sheet 21 and the inner heat-conducting sheet 22, the uniform distribution of the inner heat-conducting sheet 22 in the outer heat-conducting sheet 21 ensures that the evaporation material is uniformly heated in the evaporation source 1. There is no difference in temperature between the edge region and the center region of the evaporation source 1 during the preheating process, and the evaporation material can be uniformly heated and quickly reach a stable evaporation state.

[0052] In one embodiment, the evaporation source 1 is a crucible, and the crucible has a cylindrical accommodating cavity. The outer heat-conducting sheet 21 is a cylindrical heat-conducting sheet arranged in the accommodating cavity.

[0053] The crucible is made of boron nitride or ceramic material, and has a thermal conductivity of 33 W / (m·K), a good expansion coefficient, and good thermal shock resistance, and does not react with the evaporation material.

[0054] The outer heat-conducting sheet 21 has a cylindrical structure that matches the circular accommodating cavity inside the crucible. The outer diameter of the outer heat-conducting sheet 21 is slightly smaller than the inner diameter of the crucible to ensure that it can be smoothly placed in the inner cavity of the crucible and abut the inner wall. In order to ensure the stability of the outer heat-conducting sheet 21 in the crucible, high-temperature resistant screws or heat-resistant insulating gaskets can be used to fix the outer heat-conducting sheet 21. The cylindrical structure of the outer heat-conducting sheet 21 can uniformly diffuse heat along its circumferential direction and further transmit heat to the plurality of inner heat-conducting sheets 22 and the evaporation material through the inner wall of the outer heat-conducting sheet 21.

[0055] In some embodiments, the inner heat-conducting sheet 22 is a flat heat-conducting sheet.

[0056] The flat heat-conducting plate design offers excellent mechanical stability, forming a robust support structure within the crucible and preventing deformation or displacement in high-temperature environments. Due to its smooth and uniform surface, the plate avoids localized overheating or underheating of the evaporating material, ensuring a uniform temperature environment from the center to the edge of the crucible. The thickness of the flat heat-conducting plate is typically controlled within the range of 1-3 mm, depending on the crucible's capacity and heating requirements, ensuring both sufficient mechanical strength and rapid, efficient heat transfer.

[0057] In some embodiments, a plurality of inner heat-conducting plates 22 are arranged in a circumferential array on the inner wall of the outer heat-conducting plate 21.

[0058] Each inner heat-conducting plate 22 is arranged radially, with its central axis pointing towards the center of the crucible, and the included angle between any two adjacent inner heat-conducting plates 22 is equal. The inner heat-conducting plates 22 are arranged in a circumferential array to form an efficient heat transfer network, which evenly diffuses heat to every part of the crucible and reduces the temperature difference between the inner wall of the crucible and the central area.

[0059] In other embodiments, the inner heat-conducting sheet 22 may also be arranged irregularly around the inner wall of the outer heat-conducting sheet 21, that is, the included angle between two adjacent inner heat-conducting sheets 22 may not be equal.

[0060] In some embodiments, the inner heat-conducting plate 22 is connected to the end of itself that is connected to the outer heat-conducting plate 21.

[0061] The inner heat-conducting sheet 22 is connected to the outer heat-conducting sheet 21 by welding at the end away from the outer heat-conducting sheet 21, and the end close to the outer heat-conducting sheet 21 is welded to the outer heat-conducting sheet 21 to form a stable support frame, thereby avoiding deformation or detachment of the inner heat-conducting sheet 22 from the outer heat-conducting sheet 21 due to thermal expansion and contraction.

[0062] In one embodiment, four flat heat-conducting plates are arranged in a cross shape inside a cylindrical heat-conducting plate.

[0063] Specifically, such as Figure 2 As shown, in this embodiment, four inner heat-conducting plates 22 are arranged in a circular array, with the included angle between adjacent inner heat-conducting plates being 90°. The inner heat-conducting plates 22 are flat, and the ends of the four inner heat-conducting plates 22 furthest from their connection to the outer heat-conducting plate 21 are connected together. In the central region of the cross-shaped structure, the intersection points of the four heat-conducting plates are fixed by welding. The welding material is the same as that of the heat-conducting plates, ensuring good welding and heat conduction effects while avoiding thermal expansion problems caused by material differences. A certain thermal expansion gap is appropriately left at the connection area at the intersection to prevent stress concentration or structural deformation caused by thermal expansion and contraction in high-temperature environments.

[0064] In some embodiments, the heat conduction device 2 is made of tantalum or molybdenum.

[0065] The inner heat conduction sheet 22 and the outer heat conduction sheet 21 are made of tantalum or molybdenum. According to specific needs, molybdenum or tantalum can be used separately or in combination to fully exert the characteristics of the two materials. Molybdenum has high thermal conductivity (142.35 W / (m·K)) and can quickly transfer heat while having excellent high-temperature resistance and oxidation resistance. The thermal conductivity of tantalum is relatively low (57 W / (m·K)), but it has stronger high-temperature resistance and excellent corrosion resistance, and especially has higher chemical stability in extreme environments (such as corrosive gases released during evaporation of perovskite materials). Therefore, molybdenum and tantalum can meet the various needs of evaporation equipment under different working conditions.

[0066] In one embodiment, the heating device 3 is a heating wire connected to the outer wall of the evaporation source 1.

[0067] The heating wire is a point source heating wire designed in a spiral or corrugated structure and made of high-resistance, high-melting-point, and corrosion-resistant materials to increase its surface area and improve its thermal radiation efficiency. The surface of the heating wire is treated with an oxidation-resistant process and coated with a high-efficiency radiation coating (such as a black body coating) to enhance its radiation performance and oxidation resistance in high-temperature environments. The heating wire is arranged closely along the outer wall of the crucible and fixed using high-temperature-resistant fixing parts.

[0068] During operation, the heating wire is powered to quickly heat up through resistance heat and transfer heat to the outer wall of the crucible in the form of thermal radiation. After the outer wall of the crucible is heated, the heat is evenly spread to the inner heat conduction sheet 22 through the outer heat conduction sheet 21, and then transferred to the evaporation material in the crucible by the inner heat conduction sheet 22.

[0069] In one embodiment, the evaporation equipment further comprises an auxiliary heating device 4, which is an external electrode connected to the heat conduction device 2.

[0070] Specifically, the positive and negative electrodes of the external electrode are fixed on two pieces of the inner heat conduction sheet 22 using mechanical clamps. The clamps are made of high-temperature-resistant metal materials and designed as elastic tightening structures to ensure that the auxiliary heating device 4 can adapt to the thermal expansion of metals in high-temperature environments. During operation, the external electrode provides additional heat to the inner heat conduction sheet 22 through an electric current, and the heat is further spread to the inside of the crucible from the inner heat conduction sheet 22 to ensure that the evaporation material is uniformly heated from the center to the edge area.

[0071] A use process of an evaporation equipment for perovskite batteries:

[0072] The sublimation evaporation material (such as PbI2, PbBr2, etc.) is loaded in the accommodating cavity of the crucible in powder form, and the evaporation material is uniformly distributed to avoid local sublimation unevenness. The heating device 3 is started, and the heating wire is powered to generate resistance heat, and the resistance heat is transmitted inward through the outer wall of the crucible. The outer heat conduction sheet 21 absorbs the heat emitted by the inner wall of the crucible, and diffuses to the inner heat conduction sheet 22, and then the inner heat conduction sheet 22 transmits heat to the evaporation material in the crucible. In order to improve the preheating efficiency, the auxiliary heating device 4 (external electrode) can be started to heat the inner heat conduction sheet 22, thereby shortening the preheating time.

[0073] Embodiment 2

[0074] The difference between this embodiment and embodiment 1 is that the shape of the inner heat conduction sheet 22 is different, and the rest of the structure is the same, which will not be repeated. In this embodiment, as shown in Figure 3 , the inner heat conduction sheet 22 is a corrugated heat conduction sheet.

[0075] The shape of the heat conduction sheet can also be corrugated, and the corrugated geometry significantly increases the heat conduction area of the inner heat conduction sheet 22, and increases the contact area with the evaporation material. The corrugated heat conduction sheet can further disperse heat to each area of the evaporation material, and the heating device 3 transmits heat to the outer heat conduction sheet 21 through the outer wall of the crucible. The heat is diffused along the outer heat conduction sheet 21 and transmitted to the corrugated heat conduction sheet, and the corrugated heat conduction sheet makes the evaporation material heat more uniformly.

[0076] Embodiment 3

[0077] The difference between this embodiment and embodiment 1 is that the connection mode of the inner heat conduction sheet 22 is different, and the rest of the structure is the same, which will not be repeated. In this embodiment, as shown in Figure 4 , the end of the inner heat conduction sheet 22 away from the connection with the outer heat conduction sheet 21 is not connected, but the four inner heat conduction sheets 22 can heat the evaporation material at the center position, and ensure the preheating effect of the crucible. In this way, space is left in the center of the crucible, and more evaporation material can be accommodated in the crucible, and the process of connecting the four inner heat conduction sheets when processing the heating device 3 is saved.

[0078] Although the embodiments of the present application are described in conjunction with the drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present application, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A vapor deposition apparatus for perovskite solar cells, characterized in that, include: Evaporation source (1); A heat-conducting device (2) includes an outer heat-conducting plate (21) and a plurality of inner heat-conducting plates (22). The outer heat-conducting plate (21) is placed inside the evaporation source (1) and is in contact with the inner wall of the evaporation source (1). The plurality of inner heat-conducting plates (22) are arranged circumferentially along the inner wall of the outer heat-conducting plate (21). Heating device (3) is connected to the outer wall of the evaporation source (1).

2. The vapor deposition equipment for perovskite solar cells according to claim 1, characterized in that, The evaporation source (1) is a crucible with a cylindrical cavity, and the external heat-conducting plate (21) is a cylindrical heat-conducting plate disposed in the cavity.

3. The vapor deposition equipment for perovskite solar cells according to claim 2, characterized in that, The internal heat-conducting sheet (22) is a flat heat-conducting sheet.

4. The vapor deposition equipment for perovskite solar cells according to claim 2, characterized in that, The internal heat-conducting sheet (22) is a corrugated heat-conducting sheet.

5. The vapor deposition equipment for perovskite solar cells according to claim 3 or 4, characterized in that, Multiple inner heat-conducting plates (22) are arranged in a circumferential array on the inner wall of the outer heat-conducting plate (21).

6. The vapor deposition equipment for perovskite solar cells according to claim 5, characterized in that, The inner heat-conducting plate (22) is connected to the end of itself that is connected to the outer heat-conducting plate (21).

7. The vapor deposition equipment for perovskite solar cells according to claim 6, characterized in that, The four flat heat-conducting plates are arranged in a cross shape inside the cylindrical heat-conducting plate.

8. The vapor deposition equipment for perovskite solar cells according to claim 1, characterized in that, The heat-conducting device (2) is made of tan or molybdenum.

9. The vapor deposition equipment for perovskite solar cells according to claim 1, characterized in that, The heating device (3) is a heating wire, which is connected to the outer wall of the evaporation source (1).

10. The vapor deposition equipment for perovskite solar cells according to claim 1, characterized in that, It also includes an auxiliary heating device (4), which is an external electrode connected to the heat-conducting device (2).

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