Probe card cleaning device in probe station test

Abstract

The utility model discloses a probe card cleaning device in probe station testing, which belongs to the technical field of semiconductor chip testing and specifically comprises a probe station body, a wafer bearing table, a top operating head and a probe card body. The probe station further comprises a probe card cleaning mechanism, the probe card cleaning mechanism comprises a moving frame, a cleaning plate, a cleaning brush and a nitrogen nozzle, the moving frame is fixedly connected to the probe station body, the cleaning plate is movably connected to the moving frame, the cleaning brush is fixedly connected to one side of the cleaning plate, and the nitrogen nozzle is fixedly connected to the other side of the cleaning plate. The other side of the cleaning plate is fixedly connected with a plurality of nitrogen nozzles; according to the utility model, the cleaning plate can drive the cleaning brush and the nitrogen nozzle to perform reciprocating telescopic motion, so that the probe card body can be cleaned without stopping production and taking down the probe card body, foreign matters on a probe on the probe card body can be effectively cleaned, the probe card body cannot be damaged, and the production efficiency is improved. And the yield and the efficiency of the tested product are improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor chip testing, and particularly relates to a cleaning needle card device in probe station testing. BACKGROUND

[0002] The probe station is mainly used for high-precision electrical measurement in the semiconductor industry. Usually, the product is placed on the object table in the vacuum space, then the probe contacts the product and is electrified to realize the testing of the product.

[0003] When the existing probe station device tests the product, the probe card is easy to be pierced by foreign matter when the needle is installed, or the probe is oxidized when testing the large-current product, which causes the misjudgment during the testing of the product and affects the testing result and the accuracy of the testing data. When this situation occurs, the needle card needs to be taken down to clean the foreign matter and then test again. In this way, we need to re-adjust the testing environment to continue testing, which will take a lot of time to handle this exception, and repeated testing is also required, which greatly affects the efficiency. Therefore, a cleaning needle card device in probe station testing is needed to solve the above technical problems. UTILITY MODEL CONTENT

[0004] To solve the problems in the background art, the utility model provides a cleaning needle card device in probe station testing, which has the characteristics of improving the production efficiency and product quality of the product and being relatively simple to operate.

[0005] To achieve the above purpose, the utility model provides the following technical scheme: a cleaning needle card device in probe station testing, comprising a probe station body, a piece receiving table, a top operating head and a probe card body, the piece receiving table is fixedly arranged on the object table of the probe station body, the top operating head is arranged above the piece receiving table and is fixedly connected with the support on the probe station body, and the probe card body is fixed below the top operating head.

[0006] It is characterized by further comprising a probe card cleaning mechanism, the probe card cleaning mechanism comprises a moving frame, a cleaning plate, a cleaning brush and a nitrogen nozzle, the moving frame is fixedly connected to the probe station body, the cleaning plate is movably connected to the moving frame, the cleaning brush is fixedly connected to one side of the cleaning plate, and the nitrogen nozzle is fixedly connected to the other side of the cleaning plate.

[0007] Preferably, the moving frame comprises a fixed rod, a stand and a moving rod, the fixed rod is arranged on one side of the piece receiving table, the fixed rod is fixedly connected to the probe station body through the stand below, the moving rod is slidably connected in the fixed rod, and the moving rod is fixedly connected to a limiting plate at one end and penetrates to the outside of the fixed rod.

[0008] Preferably, a driving assembly is arranged on the fixed rod for driving the moving rod to drive the cleaning plate to extend or retract, the driving assembly comprising a lead screw, a driving block and a driving motor, the lead screw being rotatably connected to the fixed rod, the driving block being threadedly sleeved on the lead screw, the driving block being slidably connected to a moving groove arranged on the fixed rod and being fixedly connected to the moving rod, and the driving motor being fixedly connected to the fixed rod and being drivingly connected to the lead screw.

[0009] Preferably, the nitrogen supply device is further provided, a gas conveying pipeline is connected to a gas conveying end of the nitrogen supply device, a communication pipeline is connected to a gas conveying end of the gas conveying pipeline, and the communication pipeline is fixedly connected to the cleaning plate and communicates with the nitrogen nozzle on the cleaning plate.

[0010] Preferably, a gas jet end of the nitrogen nozzle is curved towards the probe card body.

[0011] Preferably, a dust collecting mechanism is further provided, the dust collecting mechanism comprising a negative pressure box, a dust collecting cavity, a dust suction cavity and a filter plate, the negative pressure box being arranged between the limiting plate and the cleaning plate, the dust collecting cavity being arranged in the negative pressure box, the dust suction cavity being arranged on the cleaning plate and communicating with the dust collecting cavity, and the filter plate being detachably connected in the dust suction cavity.

[0012] Preferably, a negative pressure dust suction device is further provided, a dust suction pipeline is connected to a dust suction end of the negative pressure dust suction device, the dust suction end of the dust suction pipeline penetrates into the negative pressure box and is connected with a dust suction hopper, and the dust suction hopper is fixedly connected inside the negative pressure box.

[0013] Compared with the prior art, the utility model has the advantages that:

[0014] The cleaning plate can drive the cleaning brush and the nitrogen nozzle to reciprocatingly extend and retract after the probe card body moves upward to a specific position, the cleaning brush can clean the probe card, or the nitrogen nozzle can spray the probe card body, so that the probe card body can be cleaned without stopping production and taking down the probe card body, the foreign matters on the probe of the probe card body can be effectively cleaned, the probe card body is not damaged, and the yield and efficiency of the product are improved. BRIEF DESCRIPTION OF DRAWINGS

[0015] The accompanying drawings are included to provide a further understanding of the utility model, constitute a part of the specification and are used to explain the utility model together with embodiments of the utility model and do not constitute a limitation on the utility model. In the drawings:

[0016] Figure 1 It is a structural schematic view of the utility model;

[0017] Figure 2 It is a three-dimensional structural schematic view of the probe card cleaning mechanism of the utility model;

[0018] Figure 3 It is the side view section structure schematic view of the probe card cleaning mechanism of the utility model;

[0019] Figure 4 It is the three-dimensional structure schematic view of the cleaning brush and the nitrogen nozzle of the utility model;

[0020] Figure 5 It is the section structure schematic view of the negative pressure box of the utility model;

[0021] In the figure: 1, probe table body; 2, piece bearing table; 3, probe card body; 4, moving frame; 41, fixed rod; 42, stand; 43, moving rod; 44, limit plate; 45, lead screw; 46, drive block; 47, moving groove; 48, drive motor; 5, cleaning plate; 6, cleaning brush; 7, nitrogen nozzle; 8, gas pipeline; 9, communication pipeline; 10, dust collecting mechanism; 101, negative pressure box; 102, dust collecting cavity; 103, dust suction cavity; 104, filter plate; 105, dust suction pipeline; 106, dust suction hopper. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0023] Embodiment 1

[0024] Please refer to Figures 1-5 The embodiment provides the following technical scheme: a probe table testing clean needle card device, including a probe table body 1, a piece bearing table 2, a top operating head and a probe card body 3, the piece bearing table 2 is fixedly arranged on the object carrying platform of the probe table body 1, the top operating head is arranged above the piece bearing table 2 and is fixedly connected with the support on the probe table body 1, the probe card body 3 is fixed below the top operating head, through the arranged piece bearing table 2 and top operating table, after positioning and placing the product to be tested, the probe card body 3 can be quickly aligned with the product to be tested, so that the probe card body 3 is in contact with the product to be tested to test the product to be tested.

[0025] The probe card cleaning mechanism comprises a moving frame 4, a cleaning plate 5, a cleaning brush 6 and a nitrogen nozzle 7, the moving frame 4 is fixedly connected to the probe station body 1, the cleaning plate 5 is movably connected to the moving frame 4, the cleaning brush 6 is fixedly connected to the left side of the cleaning plate 5, and the nitrogen nozzle 7 is fixedly connected to the right side of the cleaning plate 5; after the probe card body 3 moves upward to a specific position, the cleaning plate 5 can drive the cleaning brush 6 and the nitrogen nozzle 7 to reciprocatingly move, so that the cleaning brush 6 can clean the probe card, or the nitrogen nozzle 7 can spray the probe card body 3, thereby the cleaning of the probe card body 3 can be completed without stopping production and taking down the probe card body 3, the foreign matters on the probes of the probe card body 3 can be effectively cleaned, and the probe card body 3 is not damaged, and the yield and efficiency of the tested product are improved.

[0026] In some embodiments, the cleaning brush 6 and the nitrogen nozzle 7 on the cleaning plate 5 are annularly distributed on the cleaning plate 5 with the probe card body 3 as the center, and the jetting end of the nitrogen nozzle 7 is bent towards the cleaning brush 6 and the probe card body 3, so that the probe card body 3 can be better cleaned.

[0027] The moving frame 4 comprises a fixed rod 41, a stand 42 and a moving rod 43, the fixed rod 41 is arranged on one side of the wafer holding table 2, the fixed rod 41 is fixedly connected to the probe station body 1 through the stand 42 below, the moving rod 43 is slidably connected in the fixed rod 41, one end of the moving rod 43 penetrates to the outside of the fixed rod 41 and is fixedly connected to a limiting plate 44, and the fixed rod 41, the stand 42, the moving rod 43 and the limiting plate 44 can make the cleaning plate 5 extend or retract, so that the cleaning brush 6 or the nitrogen nozzle 7 can clean the probe card body 3 during the movement of the cleaning plate 5.

[0028] The fixed rod 41 is provided with a driving assembly for driving the moving rod 43 to drive the cleaning plate 5 to extend or retract, the driving assembly comprises a lead screw 45, a driving block 46 and a driving motor 48, the lead screw 45 is rotatably connected to the fixed rod 41, the driving block 46 is threadedly sleeved on the lead screw 45, the driving block 46 is slidably connected in a moving groove 47 arranged on the fixed rod 41 and is fixedly connected to the moving rod 43, and the driving motor 48 is fixedly connected to the fixed rod 41 and is in transmission connection with the lead screw 45, so that the driving motor 48 can drive the lead screw 45 to rotate and drive the driving block 46 to reciprocatingly move in the moving groove 47 of the fixed rod 41, thereby the moving rod 43 can be driven to extend or retract into the fixed rod 41.

[0029] The nitrogen supply device is connected with a gas conveying pipeline 8, the gas conveying pipeline 8 is connected with a communication pipeline 9, the communication pipeline 9 is fixedly connected to the cleaning plate 5 and communicates with the nitrogen nozzle 7 on the cleaning plate 5, in some embodiments, the gas conveying pipeline 8 is divided into a fixed section and an extension section, the fixed section of the gas conveying pipeline 8 is fixed to the fixed rod 41, the gas inlet of the fixed section of the gas conveying pipeline 8 is connected with the gas supply device, the gas outlet of the fixed section of the gas conveying pipeline 8 is connected with the gas inlet of the extension section of the gas conveying pipeline 8, and the gas outlet of the extension section of the gas conveying pipeline 8 is connected with the communication pipeline 9, through the gas conveying pipeline 8, the communication pipeline 9 can be always provided with the nitrogen source in the extension process of the cleaning plate 5, and the nitrogen nozzle 7 can spray the probe card body 3.

[0030] Embodiment 2

[0031] Please refer to Figures 1-5 In order to collect the debris generated by the cleaning brush 6 or the nitrogen nozzle 7 when the probe card body 3 is cleaned, a dust collecting mechanism 10 is arranged on the cleaning plate 5, the dust collecting mechanism 10 comprises a negative pressure box 101, a dust collecting cavity 102, a dust suction cavity 103 and a filter plate 104, the negative pressure box 101 is arranged between the limiting plate 44 and the cleaning plate 5, the dust collecting cavity 102 is arranged in the negative pressure box 101, the dust suction cavity 103 is arranged on the cleaning plate 5 and communicates with the dust collecting cavity 102, and the filter plate 104 is detachably connected in the dust suction cavity 103, through the negative pressure box 101, the dust collecting cavity 102, the dust suction cavity 103 and the filter plate 104, the debris generated in the working process of the cleaning brush 6 or the nitrogen nozzle 7 can be absorbed, the debris generated after cleaning is avoided from remaining on the probe card body 3 or falling on the wafer supporting table 2, so that the test result of the probe card body 3 on the product to be tested can still be affected.

[0032] The negative pressure dust collection device is connected with a dust suction pipeline 105, the dust suction end of the dust suction pipeline 105 penetrates into the negative pressure box 101 and is connected with a dust suction hopper 106, the dust suction hopper 106 is fixedly connected inside the negative pressure box 101, in some embodiments, the dust suction pipeline 105 is divided into a fixed section and an extension section, the fixed section of the dust suction pipeline 105 is fixed to the fixed rod 41, the gas inlet of the fixed section of the dust suction pipeline 105 is connected with the negative pressure dust collection device, the gas outlet of the fixed section of the dust suction pipeline 105 is connected with the gas inlet of the extension section of the dust suction pipeline 105, and the gas outlet of the extension section of the dust suction pipeline 105 is connected with the dust suction hopper 106, through the dust suction pipeline 105, the dust suction box can be always provided with negative pressure in the extension process of the cleaning plate 5, and the debris can be better absorbed and treated.

[0033] The utility model discloses a working principle: when using, through the control system of setting up on probe platform body 1, drive motor 48 drive screw rod 45 rotation, drive block 46 drive movable rod 43 and make the cleaning plate 5 drive cleaning brush 6 and nitrogen nozzle 7 move to probe card body 3 along fixed rod 41 outward stretch out,

[0034] When needing to carry out the nitrogen blowing of probe card body 3 continuously, after the top operating head drives probe card body 3 to move up to the specific first position, the bottom of the probe on probe card body 3 does not contact the top of cleaning brush 6 on cleaning plate 5, makes cleaning plate 5 drive cleaning brush 6 and nitrogen nozzle 7 move to the right side of probe card body 3, then starts nitrogen supply equipment, and nitrogen enters each nitrogen nozzle 7 inside through gas pipeline 8, communication pipeline 9, in the process of cleaning plate 5 drive nitrogen nozzle 7 and move left, makes nitrogen nozzle 7 carry out the nitrogen blowing of probe card body 3, can clean the aluminum scrap, dust and other foreign matters attached on the probe of probe card body 3;

[0035] When nitrogen does not hinder the foreign matter on probe card body 3 and carries out cleaning, closes nitrogen equipment, and the top operating head drives probe card body 3 and moves to the specific second position, and the height of second position is lower than the height of first position, at this time, the probe on probe card body 3 contacts cleaning brush 6 on cleaning plate 5, makes cleaning plate 5 drive cleaning brush 6 and move right, in the process of cleaning brush 6 and move, complete the cleaning of the foreign matter attached on the probe of probe card body 3;

[0036] When using cleaning brush 6 or nitrogen and carrying out the cleaning of the foreign matter attached on the probe, still need to start negative pressure dust collection equipment, and the dust suction cavity 103 and dust collection cavity 102 on cleaning plate 5 are in the negative pressure state, can carry out absorption treatment to the foreign matter in the cleaning process.

[0037] Finally, it should be noted that: the foregoing merely for preferred embodiment of the utility model has been described, and does not limit the utility model, although the utility model has been described in detail with reference to the foregoing embodiment, for the person skilled in the art, still can modify the technical scheme recorded in the foregoing each embodiment, or equivalent replacement to some technical features. Any modification, equivalent replacement, improvement etc. that is made within the spirit and principle of the utility model, should be included in the protection scope of the utility model.

Claims

1. A probe station test in cleaning needle card device, including probe station body (1), the piece is supported in the station (2), top operating head and probe card body (3), the piece is supported in the station (2) fixedly arranged on the object platform of probe station body (1), the top operating head is set up above the piece is supported in the station (2) and is fixedly connected with the support on probe station body (1), the probe card body (3) is fixed below the top operating head, still including probe card cleaning mechanism, the probe card cleaning mechanism includes moving frame (4), cleaning plate (5), cleaning brush (6) and nitrogen gas nozzle (7), the moving frame (4) is fixedly connected on probe station body (1), the moving frame (4) is movably connected with cleaning plate (5), one side of the cleaning plate (5) is fixedly connected with cleaning brush (6), the other side of the cleaning plate (5) is fixedly connected with a plurality of nitrogen gas nozzle (7). characterized in that The moving frame (4) includes fixed rod (41), stand (42) and moving rod (43), the fixed rod (41) is arranged on one side of the piece is supported in the station (2), the fixed rod (41) is fixedly connected with probe station body (1) through stand (42) below, the fixed rod (41) is slidably connected with moving rod (43) inside, one end of the moving rod (43) penetrates to the outside of the fixed rod (41) and is fixedly connected with the limit board (44).

2. The probe station test in-process cleaning pin chuck device of claim 1, wherein: The fixed rod (41) is provided with a driving assembly for driving the moving rod (43) to drive the cleaning plate (5) to extend or retract, the driving assembly includes lead screw (45), driving block (46) and driving motor (48), the lead screw (45) is rotatably connected on the fixed rod (41), the lead screw (45) is threadedly sleeved with the driving block (46), the driving block (46) is slidably connected in the moving slot (47) provided on the fixed rod (41) and is fixedly connected with the moving rod (43), the driving motor (48) is fixedly connected on the fixed rod (41) and is drivingly connected with the lead screw (45).

3. The probe station test in-process cleaning pin chuck device of claim 2, wherein: It further includes a nitrogen supply device, the gas supply end of the nitrogen supply device is connected with a gas supply pipeline (8), the gas supply end of the gas supply pipeline (8) is connected with a communication pipeline (9), the communication pipeline (9) is fixedly connected on the cleaning plate (5) and is communicated with the nitrogen gas nozzle (7) on the cleaning plate (5).

4. The probe station test in-process cleaning pin chuck apparatus of claim 1, wherein: The gas injection end of the nitrogen gas nozzle (7) is curved towards the cleaning brush (6) and is arranged towards the probe card body (3).

5. The probe station test in-process cleaning pin chuck apparatus of claim 4, wherein: It further includes a dust collecting mechanism (10), the dust collecting mechanism (10) includes a negative pressure box (101), a dust collecting cavity (102), a dust suction cavity (103) and a filter plate (104), the negative pressure box (101) is arranged between the limit board (44) and the cleaning plate (5), the negative pressure box (101) is provided with a dust collecting cavity (102) inside, the dust suction cavity (103) is arranged on the cleaning plate (5) and is communicated with the dust collecting cavity (102), the dust suction cavity (103) is removably connected with the filter plate (104) inside.

6. The probe station test in-process cleaning pin chuck apparatus of claim 1, wherein: ​ 7. The probe station test in-process cleaning pin chuck apparatus of claim 6, wherein: Also include a negative pressure cleaning equipment, the cleaning end of the negative pressure cleaning equipment is connected with a cleaning pipeline (105), the cleaning end of the cleaning pipeline (105) is penetrated into a negative pressure box (101) and is connected with a dust hopper (106), the dust hopper (106) is fixedly connected inside the negative pressure box (101).

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