Split type magnetron sputtering target material
By designing a split magnetron sputtering target, utilizing the connection between the fan-shaped target and the dovetail tenon structure, combined with the nano-silver conductive adhesive layer and sealing ring, the problem of replacing the entire traditional target is solved, achieving efficient utilization and low-cost maintenance.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- YANBIAN UNIV
- Filing Date
- 2025-03-04
- Publication Date
- 2026-04-21
AI Technical Summary
Traditional magnetron sputtering targets use an integral casting structure, which requires replacement of the entire target when local areas are damaged, resulting in low material utilization and high downtime costs.
The device employs a split magnetron sputtering target, which consists of multiple fan-shaped targets connected end to end to form a ring. Combined with a dovetail tenon structure and elastic locking components, a nano-silver conductive adhesive layer and a sealing ring are embedded to achieve rapid splicing and sealing of the target.
It improves the utilization rate of target materials, reduces annual maintenance costs, supports quick replacement of worn parts, is compatible with mainstream equipment, and simplifies the transformation process.
Smart Images
Figure CN224148154U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of magnetron sputtering target technology, and in particular to a split-type magnetron sputtering target. Background Technology
[0002] Magnetron sputtering is a high-speed, low-temperature sputtering technology that has developed rapidly since the 1970s and has become the mainstream vacuum coating technology. The basic principle of magnetron sputtering is to sputter the target material in a high-vacuum environment through the action of an electric field. The sputtered particles, under the combined influence of the magnetic and electric fields, move at high speed to reach the substrate surface, forming a uniform and dense thin film. Specifically, when the secondary electrons generated by sputtering are accelerated into high-energy electrons in the cathode drop region, they do not fly directly to the anode, but instead oscillate back and forth in an approximately cycloidal motion under the action of orthogonal electromagnetic fields. These high-energy electrons continuously collide with gas molecules and transfer energy to them, ionizing them and becoming low-energy electrons themselves. These low-energy electrons eventually drift along the magnetic field lines to the auxiliary anode near the cathode and are absorbed, avoiding the strong bombardment of the electrode by high-energy electrons, thus achieving low-temperature sputtering.
[0003] Traditional magnetron sputtering targets use an integral casting structure. When a local area (such as the runway erosion zone) is excessively worn down by ion bombardment, the entire target needs to be replaced, resulting in low material utilization (usually <45%) and high downtime costs. Summary of the Invention
[0004] The main purpose of this invention is to overcome the shortcomings of the existing technology and provide a split magnetron sputtering target.
[0005] The technical solution adopted by this utility model to achieve its technical objective is as follows: a split magnetron sputtering target material, comprising multiple fan-shaped targets, which are connected end-to-end by a tenon and mortise structure and arranged in a ring. An elastic locking component is also provided between the multiple fan-shaped targets and the tenon and mortise structure for connection. The multiple fan-shaped targets are locked together after being spliced by the elastic locking component and the tenon and mortise structure. The multiple fan-shaped targets are spliced into a whole structure by the tenon and mortise structure, so that the whole is arranged in a ring. Then, the multiple fan-shaped targets are pressed against each other by the cooperation of the elastic locking component, so that the connection between the multiple fan-shaped targets is tighter and the gaps are avoided.
[0006] After multiple fan-shaped targets are arranged in a ring, nano-silver conductive adhesive layers are embedded on both sides of the targets, and a sealing ring is fixedly provided on one side of the nano-silver conductive adhesive layer. The nano-silver conductive adhesive layer and the sealing ring ensure that the gap between the multiple fan-shaped targets is small after splicing, which meets the usage requirements.
[0007] Preferably, the mortise and tenon structure includes a dovetail tenon and a dovetail groove;
[0008] The dovetail tenons are set independently, and the dovetail grooves are opened at both ends of the fan-shaped target material. The multiple fan-shaped target materials are connected end to end in a ring arrangement through the tenon and mortise connection of the dovetail tenons and dovetail grooves.
[0009] Preferably, the mortise and tenon structure includes a dovetail tenon and a dovetail groove;
[0010] The dovetail tenon is fixed to one end of the fan-shaped target material, and the dovetail groove is opened at the other end of the fan-shaped target material. The multiple fan-shaped targets are connected end to end in a ring arrangement through the tenon and dovetail groove connection.
[0011] Preferably, the elastic locking assembly includes an elastic block, a buffer groove, a mounting groove, and a spring;
[0012] The buffer groove and the mounting groove are formed inside the fan-shaped target material. The buffer groove is connected to the dovetail groove, and the mounting groove is connected to the buffer groove.
[0013] The elastic block is located inside the buffer groove, and one end of it is fixedly connected to the spring. The spring is located inside the mounting groove, and one end of it is fixed to the inner wall of the mounting groove.
[0014] When dovetail joints and dovetail grooves are required for mortise and tenon connections, the dovetail joint is pressed to lock into the dovetail groove. At the same time, the elastic locking block is provided with a sloping surface. When the dovetail joint is pressed, the elastic locking block retracts into the buffer groove. At this time, the spring is compressed. When the dovetail joint and the dovetail groove are fully engaged, the elastic locking block is pressed tightly into the locking groove opened in the dovetail joint under the action of the spring.
[0015] Preferably, the dovetail tenon has a groove inside that matches the elastic locking block. After the multiple fan-shaped targets are connected end to end to form a ring structure, the elastic locking block rests inside the groove.
[0016] Preferably, the sealing ring is a fluororubber O-ring.
[0017] Compared with the prior art, the beneficial effects of this utility model are:
[0018] This split-type magnetron sputtering target eliminates the need for complete target replacement when localized areas experience excessive wear; only the worn-out target needs to be replaced, significantly improving target utilization and reducing annual maintenance costs. Multiple high-purity fan-shaped targets are assembled into a ring, combined with a dovetail tenon and mortise structure and spring locking components, enabling boltless, rapid locking. Furthermore, a 50μm thick nano-silver conductive adhesive layer is embedded on both sides of the target's back, along with sealing rings (fluororubber O-rings) for a composite seal, ensuring the spacing between the multiple fan-shaped targets meets usage requirements. The standardized interface supports installation on mainstream equipment; modifications only require replacing the target mount flange, making replacement convenient in practical use. Attached Figure Description
[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0020] Figure 1 This is a schematic diagram of the main structure of a split magnetron sputtering target assembled using independent dovetail joints.
[0021] Figure 2 This is a schematic diagram of the main structure after disassembling the fan-shaped target and the independent dovetail tenon.
[0022] Figure 3 This is a schematic diagram of the front sectional view of the disassembled fan-shaped target and independent dovetail tenon.
[0023] Figure 4 This is a top view schematic diagram of the fan-shaped target, the nano-silver conductive adhesive layer, and the sealing ring.
[0024] Figure 5 This is a schematic diagram of the main structure of a split magnetron sputtering target assembled using dovetail tenons.
[0025] Figure 6 This is a schematic diagram of the main structure after disassembling the fan-shaped target material and the dovetail tenon that connects them as a whole.
[0026] Figure 7 This is a schematic diagram of the front sectional view of the disassembled fan-shaped target material and the integrally connected dovetail tenon.
[0027] The components include: 1. Fan-shaped target material; 2. Dovetail tenon; 201. Slot; 3. Dovetail groove; 301. Elastic block; 302. Buffer groove; 303. Mounting groove; 304. Spring; 4. Nano-silver conductive adhesive layer; 5. Sealing ring. Detailed Implementation
[0028] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0029] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0030] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. However, it should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit its scope. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of the present utility model. Example 1
[0031] Please see Figure 1-4 A split-type magnetron sputtering target includes multiple fan-shaped targets 1, each consisting of 6-8 high-purity fan-shaped targets. These targets are connected end-to-end via a tenon-and-mortise structure to form a ring. An elastic locking component connects the multiple fan-shaped targets 1 to the tenon-and-mortise structure, securing them together after assembly. The tenon-and-mortise structure integrates the multiple fan-shaped targets 1 into a single ring structure, and the elastic locking component further tightens the connections between them, preventing excessive gaps.
[0032] The mortise and tenon structure includes dovetail tenons 2 and dovetail grooves 3; the dovetail tenons 2 are set independently, and the dovetail grooves 3 are opened at both ends of the fan-shaped target material 1. The multiple fan-shaped target materials 1 are connected end to end in a ring arrangement through the mortise and tenon connection of the dovetail tenons 2 and the dovetail grooves 3.
[0033] The elastic locking assembly includes an elastic locking block 301, a buffer groove 302, a mounting groove 303, and a spring 304. The buffer groove 302 and the mounting groove 303 are formed inside the fan-shaped target material 1. The buffer groove 302 is connected to the dovetail groove 3, and the mounting groove 303 is connected to the buffer groove 302. The elastic locking block 301 is located inside the buffer groove 302, and one end of it is fixedly connected to the spring 304. The spring 304 is located inside the mounting groove 303, and one end of it is fixed to the inner wall of the mounting groove 303. The dovetail tenon 2 has a locking groove 201 that matches the elastic locking block 301. After multiple fan-shaped target materials 1 are connected end to end to form a ring structure, the elastic locking block 301 rests against the inside of the locking groove 201.
[0034] When a dovetail tenon 2 and a dovetail groove 3 are required for mortise and tenon connection, the dovetail tenon 2 is pressed to lock into the dovetail groove 3. At the same time, the elastic locking block 301 is provided with a sloping surface. When the dovetail tenon 2 is pressed, the elastic locking block 301 retracts into the buffer groove 302. At this time, the spring 304 is compressed. When the dovetail tenon 2 and the dovetail groove 3 are fully engaged, the elastic locking block 301 is pressed tightly into the locking groove 201 opened in the dovetail tenon 2 under the action of the spring 304.
[0035] Multiple fan-shaped targets 1 are arranged in a ring, and nano-silver conductive adhesive layers 4 are embedded on both sides of each target. A sealing ring 5, which is a fluororubber O-ring, is fixedly installed on one side of the nano-silver conductive adhesive layer 4. The nano-silver conductive adhesive layer 4 and the sealing ring 5 ensure that the gaps between the multiple fan-shaped targets 1 are small after splicing, thus meeting the usage requirements. Example 2
[0036] Please see Figure 4-7 Based on the above embodiments, the split magnetron sputtering target material includes multiple fan-shaped targets 1, which are configured as 6-8 high-purity fan-shaped targets. The multiple fan-shaped targets 1 are connected end to end by a tenon and mortise structure and arranged in a ring. An elastic locking component is also provided between the multiple fan-shaped targets 1 and the tenon and mortise structure for connection. The multiple fan-shaped targets 1 are locked after splicing by the elastic locking component and the tenon and mortise structure. The multiple fan-shaped targets 1 are spliced into a whole structure by the tenon and mortise structure, so that the whole is arranged in a ring. Then, the multiple fan-shaped targets 1 are pressed against each other by the cooperation of the elastic locking component, so that the connection between the multiple fan-shaped targets 1 is tighter and the gaps are avoided.
[0037] The mortise and tenon structure includes a dovetail tenon 2 and a dovetail groove 3; the dovetail tenon 2 is fixed at one end of the fan-shaped target material 1, and the dovetail groove 3 is opened at the other end of the fan-shaped target material 1. The multiple fan-shaped target materials 1 are connected end to end in a ring arrangement through the mortise and tenon connection of the dovetail tenon 2 and the dovetail groove 3.
[0038] The elastic locking assembly includes an elastic locking block 301, a buffer groove 302, a mounting groove 303, and a spring 304. The buffer groove 302 and the mounting groove 303 are formed inside the fan-shaped target material 1. The buffer groove 302 is connected to the dovetail groove 3, and the mounting groove 303 is connected to the buffer groove 302. The elastic locking block 301 is located inside the buffer groove 302, and one end of it is fixedly connected to the spring 304. The spring 304 is located inside the mounting groove 303, and one end of it is fixed to the inner wall of the mounting groove 303. The dovetail tenon 2 has a locking groove 201 that matches the elastic locking block 301. After multiple fan-shaped target materials 1 are connected end to end to form a ring structure, the elastic locking block 301 rests against the inside of the locking groove 201.
[0039] When a dovetail tenon 2 and a dovetail groove 3 are required for mortise and tenon connection, the dovetail tenon 2 is pressed to lock into the dovetail groove 3. At the same time, the elastic locking block 301 is provided with a sloping surface. When the dovetail tenon 2 is pressed, the elastic locking block 301 retracts into the buffer groove 302. At this time, the spring 304 is compressed. When the dovetail tenon 2 and the dovetail groove 3 are fully engaged, the elastic locking block 301 is pressed tightly into the locking groove 201 opened in the dovetail tenon 2 under the action of the spring 304.
[0040] Multiple fan-shaped targets 1 are arranged in a ring, and nano-silver conductive adhesive layers 4 are embedded on both sides of each target. A sealing ring 5, which is a fluororubber O-ring, is fixedly installed on one side of the nano-silver conductive adhesive layer 4. The nano-silver conductive adhesive layer 4 and the sealing ring 5 ensure that the gaps between the multiple fan-shaped targets 1 are small after splicing, thus meeting the usage requirements.
[0041] The solution in this embodiment can be selectively combined with solutions in other embodiments.
[0042] The working principle and specific construction process of this split-type magnetron sputtering target:
[0043] In terms of structural design, 6-8 high-purity fan-shaped target materials (purity ≥99.995%) are spliced into a ring, combined with radial dovetail tenons and spring locking components for boltless and quick locking.
[0044] In terms of sealing technology, a composite seal is formed by embedding a nano-silver conductive adhesive layer (50μm thick) on both sides of the back of the target material and a sealing ring (Shore hardness 70A).
[0045] In terms of compatibility, the standardized interface matches the ISO 16080 magnetron target specification and supports installation on mainstream equipment (such as the Applied Materials Endura platform). Modification only requires replacing the target mount flange.
[0046] It should be noted that although the above embodiments have been described herein, this does not limit the scope of patent protection for this utility model. Therefore, any changes and modifications made to the embodiments described herein based on the innovative concept of this utility model, or equivalent structural, procedural, or functional transformations made using the content of this utility model's specification and drawings, directly or indirectly applying the above technical solutions to other related technical fields, are all included within the scope of protection of this utility model patent.
Claims
1. A split magnetron sputter target, characterized in that: It includes multiple fan-shaped targets (1), which are connected end to end by a tenon and mortise structure and arranged in a ring. An elastic locking component is also provided between the multiple fan-shaped targets (1) and the tenon and mortise structure to lock the multiple fan-shaped targets (1) after splicing through the elastic locking component and the tenon and mortise structure. After multiple fan-shaped targets (1) are arranged in a ring, nano-silver conductive adhesive layers (4) are embedded on both sides of them, and a sealing ring (5) is fixedly provided on one side of the nano-silver conductive adhesive layer (4).
2. The split magnetron sputter target of claim 1, wherein: The mortise and tenon structure includes a dovetail tenon (2) and a dovetail groove (3); The dovetail tenon (2) is set independently, and the dovetail groove (3) is opened at both ends of the fan-shaped target material (1). The multiple fan-shaped target materials (1) are connected end to end in a ring arrangement through the tenon and mortise connection of the dovetail tenon (2) and the dovetail groove (3).
3. The split magnetron sputter target of claim 1, wherein: The mortise and tenon structure includes a dovetail tenon (2) and a dovetail groove (3); The dovetail tenon (2) is fixed to one end of the fan-shaped target material (1), and the dovetail groove (3) is opened at the other end of the fan-shaped target material (1). The multiple fan-shaped target materials (1) are connected end to end in a ring arrangement through the tenon and mortise connection of the dovetail tenon (2) and the dovetail groove (3).
4. The split magnetron sputter target of claim 2 or 3, wherein: The elastic locking assembly includes an elastic block (301), a buffer groove (302), a mounting groove (303), and a spring (304). The buffer groove (302) and the mounting groove (303) are formed inside the fan-shaped target material (1). The buffer groove (302) is connected to the dovetail groove (3), and the mounting groove (303) is connected to the buffer groove (302). The elastic block (301) is located inside the buffer groove (302), and one end of it is fixedly connected to the spring (304). The spring (304) is located inside the mounting groove (303), and one end of it is fixed to the inner wall of the mounting groove (303).
5. The split magnetron sputter target of claim 4, wherein: The dovetail tenon (2) has a slot (201) inside that matches the elastic block (301). After the multiple fan-shaped targets (1) are connected end to end to form a ring structure, the elastic block (301) rests inside the slot (201).
6. The split magnetron sputter target of claim 1, wherein: The sealing ring (5) is a fluororubber O-ring.