Auxiliary platform, multi-directional auxiliary platform and semiconductor device

Abstract

The utility model provides an auxiliary platform, a multidirectional auxiliary platform and a semiconductor device, and relates to the technical field of semiconductors, the auxiliary platform comprises a first base and a first driving mechanism which are sequentially and movably arranged in a laminated manner, and a moving end, deviating from the first base, of the first driving mechanism can reciprocate relative to the first base along a first direction; the reading assembly is arranged between the first base and the moving end of the first driving mechanism; wherein the moving end of the first driving mechanism is used for placing an object to be placed, and the reading assembly is used for detecting data information after the moving end of the first driving mechanism deviates.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to an auxiliary platform, a multi-directional auxiliary platform, and semiconductor equipment. Background Technology

[0002] Semiconductor equipment refers to the general term for various equipment and tools used in the manufacturing process of semiconductor devices. These devices are mainly used for processes such as wafer preparation, mask preparation, exposure, substrate treatment, wet etching, dry etching, chemical vapor deposition, physical vapor deposition, photolithography, ion implantation, and chemical mechanical polishing.

[0003] With the increasing precision and integration of semiconductor equipment, the space reserved for alignment platforms is becoming increasingly limited, and the measurement accuracy of existing alignment platforms is not high.

[0004] Therefore, the aforementioned technical issues still need further resolution. Utility Model Content

[0005] The purpose of this invention is to provide an auxiliary platform, a multi-directional auxiliary platform, and a semiconductor device to alleviate the technical problems existing in the aforementioned related technologies.

[0006] This utility model provides an auxiliary platform, including:

[0007] A first base and a first drive mechanism are stacked and movably arranged in sequence. The moving end of the first drive mechanism away from the first base can reciprocate relative to the first base in a first direction.

[0008] A reading component is disposed between the first base and the moving end of the first drive mechanism;

[0009] The moving end of the first drive mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the moving end of the first drive mechanism is offset.

[0010] The purpose of this application and the technical problems to be solved can also be further achieved by the following technical measures.

[0011] Optionally, in the aforementioned auxiliary platform, the first drive mechanism includes:

[0012] A coil plate is disposed on the first base;

[0013] A coil is disposed on the coil plate;

[0014] A magnetic yoke is disposed on the coil;

[0015] A magnet is disposed on the magnetic yoke and located between the magnetic yoke and the first base;

[0016] The magnetic yoke forms the moving end of the first driving mechanism and drives the object to be placed to reciprocate along the first direction on the first base.

[0017] Optionally, the aforementioned auxiliary platform further includes:

[0018] Two sets of sliding parts are disposed between the magnetic yoke and the first base, and are respectively located on both sides of the coil plate;

[0019] The magnetic yoke is slidably connected to the first base via the sliding part.

[0020] Optionally, in the aforementioned auxiliary platform, each set of sliding parts includes:

[0021] A linear guide rail is disposed on the first base along the first direction and located on one side of the coil plate;

[0022] At least one slider is slidably connected to the linear guide rail, and the slider is connected to the magnetic yoke.

[0023] Optionally, in the aforementioned auxiliary platform, the slider of one of the sliding parts is connected to the magnetic yoke via the reading component.

[0024] Optionally, in the aforementioned auxiliary platform, the slider of the other sliding part is connected to the magnetic yoke via the protective part.

[0025] Optionally, in the aforementioned auxiliary platform, the reading component includes:

[0026] The ruler holder is connected to the magnetic yoke;

[0027] The grating ruler is connected to the ruler holder;

[0028] A reading head bracket is connected to the first base;

[0029] The reading head is connected to the reading head bracket;

[0030] In one of the sliding parts, the slider is connected to the magnetic yoke via the ruler holder.

[0031] Optionally, in the aforementioned auxiliary platform, the protective unit includes:

[0032] The anti-collision block is connected to the magnetic yoke;

[0033] Both pressure blocks are connected to the magnetic yoke, and the anti-collision block is located between the two pressure blocks. The anti-collision block extends in the direction of the first base and protrudes between the two pressure blocks.

[0034] Both buffer rubbers are connected to the first base, and the two pressure blocks are located between the two buffer rubbers;

[0035] Each of the pressing blocks corresponds to a slider of another sliding part and is pressed against the corresponding slider.

[0036] On the other hand, this application provides a multi-directional auxiliary platform, including:

[0037] At least two auxiliary platforms are stacked sequentially, and the auxiliary platforms include:

[0038] A first base and a first drive mechanism are stacked and movably arranged in sequence. The moving end of the first drive mechanism away from the first base can reciprocate relative to the first base in a first direction.

[0039] A reading component is disposed between the first base and the moving end of the first drive mechanism;

[0040] The moving end of the first drive mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the moving end of the first drive mechanism is offset.

[0041] The movable end of the auxiliary platform located above is used to place the object to be placed. Each movable end of the auxiliary platform can move back and forth along a straight line in the same plane, and the directions of movement of each movable end of the auxiliary platform are perpendicular to each other.

[0042] On the other hand, this application provides a semiconductor device, including:

[0043] At least two auxiliary platforms are stacked sequentially, and the auxiliary platforms include:

[0044] A first base and a first drive mechanism are stacked and movably arranged in sequence. The moving end of the first drive mechanism away from the first base can reciprocate relative to the first base in a first direction.

[0045] A reading component is disposed between the first base and the moving end of the first drive mechanism;

[0046] The moving end of the first drive mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the moving end of the first drive mechanism is offset.

[0047] The movable end of the auxiliary platform located above is used to place the object to be placed. Each movable end of the auxiliary platform can move back and forth along a straight line in the same plane, and the directions of movement of each movable end of the auxiliary platform are perpendicular to each other.

[0048] By employing the above technical solutions, the auxiliary platform, multi-directional auxiliary platform, and semiconductor device of this application have at least the following advantages:

[0049] The auxiliary platform provided in this application embodiment, by mounting a first drive mechanism on a first base, with the movable end of the first drive mechanism facing away from the first base used to place the object to be placed, allows the object to be moved reciprocally relative to the first base in a first direction via the movable end of the first drive mechanism. Through the cooperation of the first drive mechanism and the base, the component composition of the alignment platform in the prior art is effectively reduced, enabling the auxiliary platform to be applied in relatively confined spaces and achieve the corresponding alignment effect. Furthermore, workers can directly obtain data information through the reading component. This structural design can effectively improve the alignment accuracy of the auxiliary platform, thus solving the technical problems existing in the prior art. Attached Figure Description

[0050] To more clearly illustrate the technical solutions in the specific embodiments or related technologies of this utility model, the drawings used in the description of the specific embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0051] Figure 1 An exploded view of the auxiliary platform provided in Embodiment 1 of this utility model;

[0052] Figure 2 This is a schematic diagram of the structure of the multi-directional auxiliary platform provided in Embodiment 2 of this utility model.

[0053] icon:

[0054] 1. Magnetic yoke; 2. Magnet; 3. Coil; 4. Coil plate; 5. First base; 6. Linear guide rail; 7. Adhesion frame; 8. Grating ruler; 9. Reading head; 10. Reading head bracket; 11. Buffer rubber; 12. Anti-collision block; 13. Pressure block; 14. Guide rail pressure block. Detailed Implementation

[0055] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0056] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0057] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0058] Example 1

[0059] like Figure 1 As shown, the auxiliary platform proposed in Embodiment 1 of this utility model includes:

[0060] The first base 5 and the first drive mechanism are stacked and arranged in sequence. The moving end of the first drive mechanism away from the first base 5 can reciprocate relative to the first base 5 in a first direction.

[0061] A reading component is disposed between the first base 5 and the moving end of the first drive mechanism;

[0062] The moving end of the first drive mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the moving end of the first drive mechanism is offset.

[0063] Specifically, most of the alignment platforms used in existing semiconductor equipment are driven by telescopic cylinders to move the placement plate. With the increasing precision and high integration of semiconductor equipment, the space reserved for the alignment platform is somewhat compact, and the measurement accuracy of the existing alignment platforms is not high. Therefore, this application solves the technical problems existing in the prior art by reducing the number of components of the alignment platform to ensure that the alignment platform can be used in a smaller space and improving the measurement accuracy of the alignment platform.

[0064] The first drive mechanism is mounted on the first base 5, which supports and fixes the first drive mechanism. The moving end of the first drive mechanism away from the first base 5 is used to place the object to be placed. Therefore, the object to be placed can reciprocate relative to the first base 5 in the first direction through the moving end of the first drive mechanism. Through the cooperation between the first drive mechanism and the base, the component composition of the alignment platform in the prior art is effectively reduced, so that the auxiliary platform can be applied in a relatively small space and achieve the corresponding alignment effect.

[0065] A reading component is disposed at the moving end of the first base 5 and the first drive mechanism. The reading component detects the data information resulting from the movement of the moving end of the first drive mechanism from its initial position to the desired position, including the distance traveled. The operator can obtain this data information directly by observing the reading displayed on the reading component, and / or through an electronic device connected to the reading component, such as a computer. This structural design effectively improves the alignment accuracy of the auxiliary platform, thus solving the technical problems existing in the prior art.

[0066] Furthermore, the first direction is any straight line direction located in the same plane as the first base 5, and this straight line direction is used to be consistent with the alignment direction required by the semiconductor device.

[0067] like Figure 1 As shown, in a specific implementation, the first driving mechanism includes:

[0068] Coil plate 4 is disposed on the first base 5;

[0069] Coil 3 is disposed on the coil plate 4;

[0070] Magnetic yoke 1 is disposed on the coil 3;

[0071] Magnet 2 is disposed on the magnetic yoke 1 and located between the magnetic yoke 1 and the first base 5;

[0072] The magnetic yoke 1 forms the moving end of the first driving mechanism and drives the object to be placed to reciprocate along the first direction on the first base 5.

[0073] Specifically, this application provides an embodiment of a first driving mechanism, which includes a magnetic yoke 1, a magnet 2, a coil 3, and a coil plate 4. The installation methods of the magnetic yoke 1, magnet 2, coil 3, and coil plate 4 are all conventional connection methods. The specific connection methods are known to those skilled in the art and will not be described in detail here.

[0074] The yoke 1, magnet 2, coil 3, and coil plate 4 form the power system. The coil 3 generates a traveling wave magnetic field when three-phase alternating current is applied, and the magnet 2 generates a constant magnetic field. The two together form an electromagnetic force, which in turn moves the mover (magnet 2 and yoke 1).

[0075] like Figure 1 As shown, in specific implementation, it also includes:

[0076] Two sets of sliding parts are disposed between the magnetic yoke 1 and the first base 5, and are respectively located on both sides of the coil plate 4;

[0077] The magnetic yoke 1 is slidably connected to the first base 5 via the sliding part.

[0078] Specifically, the magnetic yoke 1 is slidably connected to the first base 5 via a sliding part. This structural design facilitates improved stability of the magnetic yoke 1 moving on the first base 5. The number of sliding parts can be single or multiple, but two are preferred in this application.

[0079] like Figure 1 As shown, in a specific implementation, each group of sliding parts includes:

[0080] Linear guide rail 6, which is disposed on the first base 5 along the first direction and located on one side of the coil plate 4;

[0081] At least one slider is slidably connected to the linear guide rail 6, and the slider is connected to the magnetic yoke 1.

[0082] Specifically, this application provides an embodiment of a sliding part, wherein each set of sliding parts includes: a linear guide rail 6 and at least one slider.

[0083] The linear guide 6 is connected to the first base 5 along the first direction. The linear guide 6 and the first base 5 can be connected directly or indirectly. The connection can be detachable or fixed, such as by bolting or welding.

[0084] The linear guide 6 is slidably connected to the slider. In this application, the number of sliders is preferably two. The slider and the magnetic yoke 1 can be connected directly or indirectly. The connection can be detachable or fixed, such as bolt connection or welding.

[0085] This application provides another implementation of the sliding part (not shown in the figure), that is, each set of sliding parts includes a slider and a slide rail. A slide rail is provided on the first base 5 along the first direction. The slide rail is located on one side of the coil plate 4. A slider corresponding to the slide rail is provided on the magnetic yoke 1. The slider is embedded in the corresponding slide rail and is slidably connected to the corresponding slide rail.

[0086] like Figure 1 As shown, in a specific implementation, the slider of one of the sliding parts is connected to the magnetic yoke 1 through the reading component;

[0087] The protective part, the slider of the other sliding part is connected to the magnetic yoke 1 through the protective part.

[0088] The reading components include:

[0089] The ruler holder is connected to the magnetic yoke 1;

[0090] The grating ruler 8 is connected to the ruler holder;

[0091] The reading head bracket 10 is connected to the first base 5;

[0092] The reading head 9 is connected to the reading head bracket 10;

[0093] In one of the sliding parts, the slider is connected to the magnetic yoke 1 via the ruler holder;

[0094] The protective section includes:

[0095] The anti-collision block 12 is connected to the magnetic yoke 1;

[0096] Both pressure blocks 13 are connected to the magnetic yoke 1. The anti-collision block 12 is located between the two pressure blocks 13. The anti-collision block 12 extends toward the direction of the first base 5 and protrudes between the two pressure blocks 13.

[0097] Both buffer rubbers 11 are connected to the first base 5, and the two pressure blocks 13 are located between the two buffer rubbers 11;

[0098] Each of the pressing blocks 13 corresponds to a slider of another sliding part and is pressed against the corresponding slider.

[0099] Specifically, the ruler holder is used to fix the grating ruler 8 to the magnetic yoke 1, and the reading head 9 holder is used to fix the reading head 9 to the first base 5. The surface of the grating ruler 8 is engraved with dense, equidistant lines (the grating pitch is usually 20 μm or less), forming alternating bright and dark moiré fringes through optical interference or diffraction principles. The reading head 9 includes components such as a light source, lens, indicator grating, and photoelectric element, and is responsible for receiving the displacement signal of the grating ruler 8 and converting it into an electrical signal (such as a sine wave or square wave).

[0100] The grating ruler 8 is mounted on the magnetic yoke 1, while the reading head 9 is fixed to the first base 5. When the grating ruler 8 moves, the fine lines on the grating interact with the sensor inside the reading head 9, generating moiré fringes. These fringes are converted into electrical signals by photoelectric devices. Light source illumination: Light emitted from the light source illuminates the grating ruler. The width and spacing of the fringes on the grating ruler are extremely small, typically within the range of tens or hundreds of micrometers. Moiré fringe formation: When the indicator grating and the grating ruler form a certain angle and overlap, alternating bright and dark moiré fringes are generated perpendicular to the grating lines. The displacement of these fringes is proportional to the displacement of the grating. Signal conversion: The moiré fringes are converted into electrical signals by photoelectric devices. After amplification and shaping by the circuit, two sinusoidal or square wave signals A and B with a 90-degree phase difference are obtained. The number of cycles of these signals is proportional to the distance the ruler moves.

[0101] In addition, the sliding part located on the same side as the reading component is connected to the slider of the corresponding sliding part via a ruler holder.

[0102] A limiting groove is formed on the side of the first base 5 opposite to the anti-collision block 12. The limiting groove is used to limit the range of movement of the magnetic yoke 1 relative to the first base 5. The first base 5 and the anti-collision block 12 cooperate to limit the range of movement of the magnetic yoke 1.

[0103] Two buffer rubbers 11 are set in the limiting groove, and the anti-collision block 12 is located between the two buffer rubbers 11. The setting of the buffer rubbers 11 can reduce the damage to the first base 5 caused by the anti-collision block 12 when it is in the limiting position, and improve the use effect of the device.

[0104] The linear guide rail 6 of the sliding part, which is located on the same side as the protective part, is stably pressed onto the first base 5 by the guide rail pressure block 14. The guide rail pressure block 14 not only provides a secondary fixing effect, but also facilitates the positioning and installation of the linear guide rail 6.

[0105] The number of pressure blocks 13 is the same as the number of sliders in the sliding part on the same side of the protective part, and they correspond one-to-one. The setting of pressure blocks 13 can make the linear guide rail 6 slide stably with the slider, thus improving the performance of the device.

[0106] However, it should be noted that by embedding the coil 3 within the first base 5, the height of the auxiliary platform is minimized in this application. The repeatability (i.e., error range) of the auxiliary platform in this application is ±0.5μm, meaning that better repeatability can be achieved. Secondly, the size of any component in this application can be adaptively adjusted according to actual needs to meet the requirements of different working conditions, which will not be elaborated further here.

[0107] Example 2

[0108] like Figure 1 - Figure 2 As shown, Embodiment 2 of this utility model proposes a multi-directional auxiliary platform, comprising: at least two auxiliary platforms stacked sequentially, wherein the auxiliary platform includes:

[0109] The first base 5 and the first drive mechanism are stacked and arranged in sequence. The moving end of the first drive mechanism away from the first base 5 can reciprocate relative to the first base 5 in a first direction.

[0110] A reading component is disposed between the first base 5 and the moving end of the first drive mechanism;

[0111] The moving end of the first drive mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the moving end of the first drive mechanism is offset.

[0112] The movable end of the auxiliary platform located above is used to place the object to be placed. Each movable end of the auxiliary platform can move back and forth along a straight line in the same plane, and the directions of movement of each movable end of the auxiliary platform are perpendicular to each other.

[0113] Specifically, most of the alignment platforms used in existing semiconductor equipment are driven by telescopic cylinders to move the placement plate. With the increasing precision and high integration of semiconductor equipment, the space reserved for the alignment platform is somewhat compact, and the measurement accuracy of the existing alignment platforms is not high. Therefore, this application solves the technical problems existing in the prior art by reducing the number of components of the alignment platform to ensure that the alignment platform can be used in a smaller space and improving the measurement accuracy of the alignment platform.

[0114] The first drive mechanism is mounted on the first base 5, which supports and fixes the first drive mechanism. The moving end of the first drive mechanism away from the first base 5 is used to place the object to be placed. Therefore, the object to be placed can reciprocate relative to the first base 5 in the first direction through the moving end of the first drive mechanism. Through the cooperation between the first drive mechanism and the base, the component composition of the alignment platform in the prior art is effectively reduced, so that the auxiliary platform can be applied in a relatively small space and achieve the corresponding alignment effect.

[0115] A reading component is disposed at the moving end of the first base 5 and the first drive mechanism. The reading component detects the data information resulting from the movement of the moving end of the first drive mechanism from its initial position to the desired position, including the distance traveled. The operator can obtain this data information directly by observing the reading displayed on the reading component, and / or through an electronic device connected to the reading component, such as a computer. This structural design effectively improves the alignment accuracy of the auxiliary platform, thus solving the technical problems existing in the prior art.

[0116] Multiple auxiliary platforms are stacked sequentially. This structural design facilitates multi-directional alignment of the auxiliary platforms. The following example illustrates two auxiliary platforms stacked sequentially:

[0117] The moving end of the first drive mechanism of the lower auxiliary platform is connected to the first base 5 of the upper auxiliary platform. The moving end of the first drive mechanism of the lower auxiliary platform can drive the upper auxiliary platform to reciprocate along a straight line.

[0118] The moving end of the first drive mechanism on the upper auxiliary platform is used to place the object to be placed, and the moving end of the first drive mechanism on the upper auxiliary platform can drive the object to be placed to reciprocate along another straight line.

[0119] The directions in which the moving end of the first drive mechanism of the lower auxiliary platform moves and the directions in which the moving end of the first drive mechanism of the upper auxiliary platform moves are both two directions within the same plane, and the two directions are perpendicular to each other.

[0120] The connected auxiliary platforms can be detachably connected. This structural design facilitates the later maintenance of the device and makes it easy to apply the device to different scenarios. For example, when a unidirectional alignment platform is required, technicians can use one auxiliary platform for alignment operation; when two or more alignment platforms are required, technicians can select the number of auxiliary platforms to stack and assemble them according to actual needs to achieve multi-directional adjustment alignment effect.

[0121] The multi-directional auxiliary platform in this embodiment two can directly use the auxiliary platform provided in the above embodiment one. For the specific implementation structure, please refer to the relevant content described in the above embodiment one, which will not be repeated here.

[0122] Example 3

[0123] like Figure 1 - Figure 2 As shown, Embodiment 3 of this utility model proposes a semiconductor device, comprising:

[0124] At least two auxiliary platforms are stacked sequentially, and the auxiliary platforms include:

[0125] The first base 5 and the first drive mechanism are stacked and arranged in sequence. The moving end of the first drive mechanism away from the first base 5 can reciprocate relative to the first base 5 in a first direction.

[0126] A reading component is disposed between the first base 5 and the moving end of the first drive mechanism;

[0127] The moving end of the first drive mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the moving end of the first drive mechanism is offset.

[0128] The movable end of the auxiliary platform located above is used to place the object to be placed. Each movable end of the auxiliary platform can move back and forth along a straight line in the same plane, and the directions of movement of each movable end of the auxiliary platform are perpendicular to each other.

[0129] Specifically, most of the alignment platforms used in existing semiconductor equipment are driven by telescopic cylinders to move the placement plate. With the increasing precision and high integration of semiconductor equipment, the space reserved for the alignment platform is somewhat compact, and the measurement accuracy of the existing alignment platforms is not high. Therefore, this application solves the technical problems existing in the prior art by reducing the number of components of the alignment platform to ensure that the alignment platform can be used in a smaller space and improving the measurement accuracy of the alignment platform.

[0130] The first drive mechanism is mounted on the first base 5, which supports and fixes the first drive mechanism. The moving end of the first drive mechanism away from the first base 5 is used to place the object to be placed. Therefore, the object to be placed can reciprocate relative to the first base 5 in the first direction through the moving end of the first drive mechanism. Through the cooperation between the first drive mechanism and the base, the component composition of the alignment platform in the prior art is effectively reduced, so that the auxiliary platform can be applied in a relatively small space and achieve the corresponding alignment effect.

[0131] A reading component is disposed at the moving end of the first base 5 and the first drive mechanism. The reading component detects the data information resulting from the movement of the moving end of the first drive mechanism from its initial position to the desired position, including the distance traveled. The operator can obtain this data information directly by observing the reading displayed on the reading component, and / or through an electronic device connected to the reading component, such as a computer. This structural design effectively improves the alignment accuracy of the auxiliary platform, thus solving the technical problems existing in the prior art.

[0132] Multiple auxiliary platforms are stacked sequentially. This structural design facilitates multi-directional alignment of the auxiliary platforms. The following example illustrates two auxiliary platforms stacked sequentially:

[0133] The moving end of the first drive mechanism of the lower auxiliary platform is connected to the first base 5 of the upper auxiliary platform. The moving end of the first drive mechanism of the lower auxiliary platform can drive the upper auxiliary platform to reciprocate along a straight line.

[0134] The moving end of the first drive mechanism on the upper auxiliary platform is used to place the object to be placed, and the moving end of the first drive mechanism on the upper auxiliary platform can drive the object to be placed to reciprocate along another straight line.

[0135] The directions in which the moving end of the first drive mechanism of the lower auxiliary platform moves and the directions in which the moving end of the first drive mechanism of the upper auxiliary platform moves are both two directions within the same plane, and the two directions are perpendicular to each other.

[0136] The connected auxiliary platforms can be detachably connected. This structural design facilitates the later maintenance of the device and makes it easy to apply the device to different scenarios. For example, when a unidirectional alignment platform is required, technicians can use one auxiliary platform for alignment operation; when two or more alignment platforms are required, technicians can select the number of auxiliary platforms to stack and assemble them according to actual needs to achieve multi-directional adjustment alignment effect.

[0137] The semiconductor device in this embodiment three can directly use the multi-directional auxiliary platform provided in embodiment two above. For the specific implementation structure, please refer to the relevant content described in embodiment two above, which will not be repeated here.

[0138] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. An auxiliary platform, characterized in that, include: A first base and a first drive mechanism are stacked and movably arranged in sequence. The moving end of the first drive mechanism away from the first base can reciprocate relative to the first base in a first direction. A reading component is disposed between the first base and the moving end of the first drive mechanism; The moving end of the first drive mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the moving end of the first drive mechanism is offset.

2. The auxiliary platform according to claim 1, characterized in that, The first driving mechanism includes: A coil plate is disposed on the first base; A coil is disposed on the coil plate; A magnetic yoke is disposed on the coil; A magnet is disposed on the magnetic yoke and located between the magnetic yoke and the first base; The magnetic yoke forms the moving end of the first driving mechanism and drives the object to be placed to reciprocate along the first direction on the first base.

3. The auxiliary platform according to claim 2, characterized in that, Also includes: Two sets of sliding parts are disposed between the magnetic yoke and the first base, and are respectively located on both sides of the coil plate; The magnetic yoke is slidably connected to the first base via the sliding part.

4. The auxiliary platform according to claim 3, characterized in that, Each set of sliding parts includes: A linear guide rail is disposed on the first base along the first direction and located on one side of the coil plate; At least one slider is slidably connected to the linear guide rail, and the slider is connected to the magnetic yoke.

5. The auxiliary platform according to claim 4, characterized in that, The slider of one of the sliding parts is connected to the magnetic yoke via the reading assembly.

6. The auxiliary platform according to claim 5, characterized in that, Also includes: The slider of the other sliding part is connected to the magnetic yoke through the protective part.

7. The auxiliary platform according to claim 5, characterized in that, The reading component includes: The ruler holder is connected to the magnetic yoke; The grating ruler is connected to the ruler holder; A reading head bracket is connected to the first base; The reading head is connected to the reading head bracket; In one of the sliding parts, the slider is connected to the magnetic yoke via the ruler holder.

8. The auxiliary platform according to claim 6, characterized in that, The protective part includes: The anti-collision block is connected to the magnetic yoke; Both pressure blocks are connected to the magnetic yoke, and the anti-collision block is located between the two pressure blocks. The anti-collision block extends in the direction of the first base and protrudes between the two pressure blocks. Both buffer rubbers are connected to the first base, and the two pressure blocks are located between the two buffer rubbers; Each of the pressing blocks corresponds to a slider of another sliding part and is pressed against the corresponding slider.

9. A multi-directional auxiliary platform, characterized in that, include: At least two auxiliary platforms as described in any one of claims 1-8 are stacked sequentially. The movable end of the auxiliary platform located above is used to place the object to be placed. Each movable end of the auxiliary platform can move back and forth along a straight line in the same plane, and the directions of movement of each movable end of the auxiliary platform are perpendicular to each other.

10. A semiconductor device, characterized in that, include: The multi-directional auxiliary platform as described in claim 9 above.

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