Strip-shaped clamp for MEMS device

By designing a strip-shaped fixture with parallel elongated sections and rounded corners, the problems of high cleaning difficulty and high cost of MEMS device fixtures were solved, achieving efficient cleaning and low-cost MEMS device packaging, and improving packaging yield.

CN224172457UActive Publication Date: 2026-04-28XINZHIYUAN INTELLIGENT EQUIPMENT MANUFACTURING (SUZHOU) CO LTD
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Patent Information

Application Number
CN202520967725.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-05-16
Publication Date
2026-04-28
Estimated Expiration
2035-05-16

AI Technical Summary

Technical Problem

Existing MEMS device fixtures have many hard-to-clean areas, are complex to manufacture and costly, and the excessive protection of non-critical areas by traditional fixtures limits the improvement of packaging yield.

Method used

Design a strip-shaped fixture, including a frame section and a central section. The central section is composed of multiple parallel strip sections that form strip-shaped openings with rounded corners. It is made of 8407 mold steel and blackened. It is used to cover MEMS sensors and expose application-specific integrated circuits, simplifying the manufacturing process and reducing material usage.

Benefits of technology

It effectively reduces cleaning dead spots, improves cleaning efficiency, lowers manufacturing costs, increases packaging yield, ensures critical protection of MEMS sensor areas, and avoids resin spots affecting device performance during the injection molding process.

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Abstract

The utility model relates to the technical field of MEMS device packaging, and particularly discloses a strip-shaped clamp for an MEMS device, and the MEMS device comprises an MEMS sensor and a special integrated circuit needing to be subjected to an injection molding process; the strip-shaped clamp comprises a frame part and a central part; the central part comprises a plurality of parallel long strip parts which are arranged at intervals; the two ends of each long strip part in the plurality of long strip parts are respectively connected with the frame part so as to form a plurality of strip-shaped openings; the corners of the strip-shaped opening are arranged to be fillets; and under the condition that the MEMS device is arranged below the strip-shaped clamp, the strip-shaped opening is used for exposing an application-specific integrated circuit of the MEMS device so as to carry out an injection molding process, and the strip-shaped part is used for covering an MEMS sensor of the MEMS device. According to the strip-shaped clamp, the cleaning difficulty can be reduced, the manufacturing cost can be reduced, the influence of sputtered resin points in the injection molding process on the performance of the MEMS device can be effectively prevented, and the packaging yield of the MEMS device is effectively improved.
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