Special gas safe storage device

Abstract

The utility model relates to the technical field of semiconductor processing, and provides a special gas safety storage device which comprises a tank body and a gas supply pipe group arranged at the top of the tank body, the tank body comprises a sealing cover and an outer tank fixed at the bottom of the sealing cover in a threaded mode, and a gas storage inner tank inserted in the outer tank is fixed on the inner side of the sealing cover. An annular plug is arranged in a clamping cavity of the outer tank and the gas storage inner tank in a sliding manner, and a movable plug is arranged in an inner cavity of the gas storage inner tank in a sliding manner; the clamping cavity is formed by the outer tank and the gas storage inner tank, the annular plug and the movable plug are arranged to achieve double-cavity isolation, the clamping cavity of the outer tank and the gas storage inner tank is used for being filled with inert gas such as nitrogen, a protection layer is formed, external air is isolated from direct contact with special gas, the independent cavity of the gas storage inner tank is specially used for storing the special gas, and cross contamination is avoided; the problem that the special gas which is not clearly mentioned in the prior art is easily polluted by environmental gas is solved, air in the clamping cavity is replaced by inert gas, the special gas oxidation or reaction risk is reduced, and the storage safety is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically to a special gas safety storage device. Background Technology

[0002] Semiconductors are materials whose conductivity at room temperature falls between that of conductors and insulators. They are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, and high-power power conversion. For example, diodes are devices made using semiconductors. From both a technological and economic development perspective, the importance of semiconductors is immense, affecting most electronic products. During semiconductor processing, specialized gases are required as protective atmospheres, and these gases are mostly stored in canisters.

[0003] For example, patent CN215807841U discloses a special gas supply device for semiconductor manufacturing and processing, including a storage tank and a container. One side of the storage tank has a loading / unloading port with a sealing cap threaded inside. The other side of the storage tank has a through hole. The container is located inside the storage tank, and one end of the container is fixedly connected to an outlet pipe. The end of the outlet pipe, away from the container, passes through the through hole and extends to the outside of the storage tank. This special gas supply device, through the coordinated arrangement of a cavity, spiral tube, water tank, water pump, return pipe, and condenser, achieves the purpose of cooling the storage tank, thus achieving the effect of cooling and storing the special gas inside the container, ensuring the stability of the special gas during storage. By setting an adjustment mechanism, it achieves the effect of tilting the container to exhaust gas, allowing the special gas inside the container to be completely discharged, avoiding waste.

[0004] However, the special gas supply device mentioned above lacks an effective gas isolation mechanism, which may lead to contamination of the special gas. When venting, the tank is tilted by adjusting the position of the tank through a set adjustment mechanism. This venting method is incomplete and easily causes waste. This utility model solves these problems by using a double plug structure and inert gas injection, thereby improving safety and efficiency. Utility Model Content

[0005] This invention proposes a special gas safety storage device, which solves the problems of low safety and incomplete venting in the prior art due to the lack of a gas isolation mechanism.

[0006] The technical solution of this utility model is as follows: A special gas safety storage device includes a tank body and a gas supply pipe assembly disposed on the top of the tank body. The tank body includes a cap and an outer tank threadedly fixed to the bottom of the cap. An inner gas storage tank is fixed inside the outer tank and inserted into the inner tank. An annular plug is slidably disposed in the cavity between the outer tank and the inner gas storage tank. A movable plug is slidably disposed in the inner cavity of the inner gas storage tank. An air injection and exhaust pipe is disposed on one side of the bottom of the outer tank for injecting inert gas after the air in the cavity below the annular plug is discharged. A pneumatic device is disposed on one side of the top of the cap for injecting air into the cavity above the annular plug to assist in the discharge of special gas in the inner gas storage tank. A filter element is disposed at the joint between the cap and the outer tank for filtering the air injected by the pneumatic device.

[0007] Preferably, the pneumatic device includes an air pump, which is fixedly installed on the outside of the cover, and the output end of the air pump is connected to an air guide pipe leading to the inner cavity of the cover.

[0008] Preferably, a turntable is welded and fixed to the outside of the cap, and a sealing gasket is fixed to the outer can at the contact point with the cap.

[0009] Preferably, the air filter includes a filter plate, which is snapped into the joint between the cover and the outer can, and the filter plate has a plurality of annularly distributed guide holes, and a filter element is fixed in the guide holes.

[0010] Preferably, the air injection and exhaust pipe includes an air injection pipe that leads to the cavity between the outer tank and the inner tank, a first air valve is provided on the air injection pipe, an exhaust pipe is connected to the air injection pipe, and a second air valve is provided on the exhaust pipe.

[0011] Preferably, the bottom inner side of the outer tank is provided with a first stop protrusion located above the gas injection pipe.

[0012] Preferably, the bottom of the gas storage tank has several annularly distributed openings, and the inner side of the bottom of the gas storage tank has a second stop protrusion located above the openings.

[0013] The beneficial effects of this utility model are as follows:

[0014] 1. In this utility model, an outer tank and an inner gas storage tank form a cavity, and an annular plug and a movable plug are provided to achieve double-cavity isolation. The cavity between the outer tank and the inner gas storage tank is used to fill inert gas such as nitrogen to form a protective layer, which isolates the outside air from direct contact with the special gas. The inner gas storage tank is an independent cavity specifically for storing the special gas, avoiding cross-contamination. This solves the problem that the special gas is easily contaminated by environmental gases, which is not explicitly mentioned in the prior art. By replacing the air in the cavity with inert gas, the risk of oxidation or reaction of the special gas is reduced, and the storage safety is improved.

[0015] 2. This utility model combines a pneumatic device and an injection / exhaust pipe to achieve active injection and directional discharge of inert gas. During the injection stage, inert gas is injected into the clamping cavity through the injection pipe, pushing the annular plug downward and expelling the original air. During the exhaust stage, the pneumatic device injects compressed air into the clamping cavity above the annular plug, pushing the annular plug downward. The inert gas enters the gas storage tank through the port, pushing out the movable plug to release the special gas. Compared with the "tilted exhaust" design in the prior art, this utility model uses the air pressure difference to drive the double plug linkage to achieve auxiliary discharge of the special gas, avoiding residue and waste. The dual air valve design of the injection / exhaust pipe can accurately control the gas flow direction and prevent gas mixing due to misoperation. Attached Figure Description

[0016] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0017] Figure 1 This is a schematic diagram of the overall structure of a special gas safety storage device proposed in this utility model;

[0018] Figure 2 This is a schematic diagram of the disassembly structure of a special gas safety storage device proposed in this utility model;

[0019] Figure 3 This is a schematic cross-sectional view of the special gas safety storage device proposed in this utility model;

[0020] Figure 4 for Figure 3 Enlarged structural diagram at point A in the middle;

[0021] Figure 5 for Figure 3 Enlarged structural diagram at point B;

[0022] In the diagram: 1. Tank body; 11. Cover; 111. Turntable; 12. Outer tank; 121. Sealing gasket; 122. First stop protrusion; 13. Inner gas storage tank; 131. Port; 132. Second stop protrusion; 14. Annular plug; 15. Movable plug; 2. Gas supply pipe assembly; 3. Pneumatic device; 31. Air pump; 32. Air guide pipe; 4. Injection and exhaust pipe fittings; 41. Injection pipe; 42. First air valve; 43. Exhaust pipe; 44. Second air valve; 5. Filter element; 51. Filter plate; 52. Filter element. Detailed Implementation

[0023] The technical solutions of this utility model will be clearly and completely described below with reference to the embodiments of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this utility model.

[0024] Please see Figure 1 , Figure 2 and Figure 3 This utility model provides a technical solution: a special gas safety storage device, including a tank body 1 and a gas supply pipe assembly 2 disposed on the top of the tank body 1. The tank body 1 includes a cover 11 and an outer tank 12 threadedly fixed to the bottom of the cover 11. An inner gas storage tank 13 is fixed inside the outer tank 12 and inserted into it. An annular plug 14 is slidably disposed in the cavity between the outer tank 12 and the inner gas storage tank 13. A movable plug 15 is slidably disposed in the cavity of the inner gas storage tank 13. An air injection / exhaust pipe 4 is disposed on one side of the bottom of the outer tank 12 for injecting inert gas into the cavity below the annular plug 14 after the air is discharged. An air injection / exhaust pipe 4 is disposed on one side of the top of the cover 11 for injecting air into the cavity above the annular plug 14. The pneumatic device 3, which assists in the discharge of special gas from the inner gas storage tank 13, has a filter element 5 at the joint between the cover 11 and the outer tank 12 for filtering the air injected by the pneumatic device 3. The outer tank 12 and the inner gas storage tank 13 form a cavity, and a ring plug 14 and a movable plug 15 are provided to achieve double cavity isolation. The cavity between the outer tank and the inner gas storage tank is used to fill inert gas such as nitrogen to form a protective layer, which isolates the outside air from direct contact with the special gas. The inner gas storage tank is an independent cavity specifically for storing special gas to avoid cross-contamination. The inert gas protection mechanism avoids the risk of combustion or explosion in the event of special gas leakage. The dual-valve design of the injection and exhaust pipes can isolate the inner and outer cavities to prevent accidents caused by misoperation.

[0025] Please see Figure 3 and Figure 4 The pneumatic device 3 includes an air pump 31, which is fixedly installed on the outside of the cover 11. The output end of the air pump 31 is connected to an air guide pipe 32 leading to the inner cavity of the cover 11.

[0026] Furthermore, a turntable 111 is welded and fixed to the outside of the cap 11 to assist in the installation and disassembly of the outer can 12 and the cap 11. A sealing gasket 121 is fixed at the contact point between the outer can 12 and the cap 11 for sealing after the outer can 12 and the cap 11 are installed. The outer can 12 and the cap 11 are connected by threads, which facilitates disassembly and maintenance. The turntable 111 and the sealing gasket 121 enhance the sealing performance and simplify the operation.

[0027] Please see Figure 2 and Figure 4 The air filter element 5 includes a filter plate 51, which is snapped into the joint between the cover 11 and the outer tank 12. The filter plate 51 has several annularly distributed guide holes, and a filter element 52 is fixed inside the guide holes. The air filter element 5, which includes the filter plate 51 and the filter element 52, is added to the air intake path of the pneumatic device 3 to filter the injected air and avoid air pollution.

[0028] Please see Figure 3 and Figure 5 The air injection and exhaust pipe fitting 4 includes an air injection pipe 41, which leads to the cavity between the outer tank 12 and the inner gas storage tank 13. A first air valve 42 is provided on the air injection pipe 41, and an exhaust pipe 43 is connected to the air injection pipe 41. A second air valve 44 is provided on the exhaust pipe 43. The dual valves are driven by the air pressure difference to achieve the auxiliary discharge of the special gas, avoiding residue and waste. The dual air valve design of the air injection and exhaust pipe fitting can accurately control the gas flow direction and prevent gas mixing caused by misoperation.

[0029] Furthermore, the bottom inner side of the outer tank 12 is provided with a first stop protrusion 122 located above the air injection pipe 41. The design of the first stop protrusion 122 above the air injection pipe 41 prevents the ring plug 14 from sliding down excessively.

[0030] Furthermore, the bottom of the gas storage tank 13 has several annularly distributed openings 131. The bottom inner side of the gas storage tank 13 has a second stop protrusion 132 located above the openings 131. The design of the openings 131 and the second stop protrusion 132 at the bottom of the gas storage tank prevents excessive displacement of the movable plug. The stop protrusion design can prevent the plug from falling off or getting stuck, improving the reliability of the device. Combined with the pneumatic device 3 and the injection and exhaust pipes 4, the active injection and directional discharge of inert gas can be realized. During the injection stage, inert gas is injected into the clamping cavity through the injection pipe 41, pushing the annular plug 14 down and expelling the original air. During the exhaust stage, the pneumatic device 3 injects compressed air into the clamping cavity above the annular plug, pushing the annular plug down. The inert gas enters the gas storage tank 13 through the openings 131, pushing out the movable plug 15 to release the special gas.

[0031] The working principle and usage process of this utility model are as follows: The special gas is stored in the gas storage tank 13. First, the first gas valve 42 is closed and the second gas valve 44 is opened. The air in the clamping cavity below the annular plug 14 is extracted through the exhaust pipe 43. Then, the second gas valve 44 is closed and the first gas valve 42 is opened. Inert gas is introduced into the clamping cavity below the annular plug 14 through the gas injection pipe 41. When using the special gas in the gas storage tank 13, the gas supply pipe group 2 is connected to the gas-using equipment and the gas pump 31 is turned on. Air is injected into the cover 11 through the gas guide pipe 32. Then, after being filtered by the filter element 52 on the filter plate 51, it enters the clamping cavity above the annular plug 14. Under the action of air pressure, the annular plug 14 is pushed down and slid, thereby injecting the inert gas in the clamping cavity into the bottom cavity of the gas storage tank 13 through the port 131. Under the action of air pressure, the movable plug 15 is pushed up and slid, thereby pushing out the special gas stored in the gas storage tank 13 to supply the gas-using equipment.

[0032] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A special gas safety storage device, comprising a tank (1) and a gas supply pipe assembly (2) disposed on the top of the tank (1), characterized in that, The tank body (1) includes a cap (11) and an outer tank (12) threaded to the bottom of the cap (11). An inner gas storage tank (13) inserted into the outer tank (12) is fixed inside the cap (11). An annular plug (14) is slidably disposed in the cavity between the outer tank (12) and the inner gas storage tank (13). A movable plug (15) is slidably disposed in the cavity of the inner gas storage tank (13). An air injection and exhaust pipe (4) is provided on one side of the bottom of the outer tank (12) for injecting inert gas after the air in the cavity below the annular plug (14) is discharged. A pneumatic device (3) is provided on one side of the top of the cap (11) for injecting air into the cavity above the annular plug (14) to assist the discharge of special gas in the inner gas storage tank (13). A filter element (5) is provided at the joint between the cap (11) and the outer tank (12) for filtering the air injected by the pneumatic device (3).

2. The special gas safety storage device according to claim 1, characterized in that, The pneumatic device (3) includes an air pump (31), which is fixedly installed on the outside of the cover (11). The output end of the air pump (31) is connected to an air guide pipe (32) leading to the inner cavity of the cover (11).

3. The special gas safety storage device according to claim 1, characterized in that, A turntable (111) is welded and fixed to the outside of the cap (11), and a sealing gasket (121) is fixed to the outer can (12) at the contact point with the cap (11).

4. A special gas safety storage device according to claim 1, characterized in that, The air filter (5) includes a filter plate (51), which is fitted into the joint between the cover (11) and the outer can (12). The filter plate (51) has several annularly distributed guide holes, and a filter element (52) is fixed inside the guide holes.

5. A special gas safety storage device according to claim 1, characterized in that, The air injection and exhaust pipe fitting (4) includes an air injection pipe (41), which leads to the cavity between the outer tank (12) and the inner gas storage tank (13). A first air valve (42) is provided on the air injection pipe (41), and an exhaust pipe (43) is connected to the air injection pipe (41). A second air valve (44) is provided on the exhaust pipe (43).

6. A special gas safety storage device according to claim 5, characterized in that, The bottom inner side of the outer tank (12) is provided with a first stop protrusion (122) located above the gas injection pipe (41).

7. A special gas safety storage device according to claim 6, characterized in that, The bottom of the gas storage tank (13) has several annularly distributed openings (131), and the bottom inner side of the gas storage tank (13) has a second stop protrusion (132) located above the openings (131).

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