Lifting device for upper cover of etching chamber

Abstract

The utility model discloses an etching chamber upper cover lifting device, which belongs to the technical field of semiconductor etching equipment and comprises a rack, a support is arranged at one end of the rack, the support is connected with an upper cover, the support is in sliding connection with the rack along the vertical direction, the support is in sliding connection with the rack along the horizontal direction, and the upper cover is arranged on the support. The rack is provided with a vertical moving mechanism used for driving the support to slide vertically and a transverse moving mechanism used for driving the support to slide horizontally. The upper cover does not need to be opened manually, manpower is greatly saved, and convenience is improved.

Description

An etching chamber cover lifting device Technical Field

[0001] This utility model relates to the field of semiconductor etching equipment technology, and in particular to an etching chamber cover lifting device. Background Technology

[0002] Etching equipment is a common tool in the fabrication of semiconductor components such as chips. It typically uses gases such as microwaves or plasma to etch semiconductor components to form specific microstructures. In etching equipment, a quartz tube transmits microwaves or plasma to the cover of the etching chamber. The microwaves or plasma are then sprayed onto the surface of the semiconductor component until the relevant etching process is completed.

[0003] Regarding the aforementioned related technologies, the applicant discovered that the process chamber of the semiconductor etching equipment needs to have its top cover opened periodically for cleaning and maintenance. However, opening the top cover of the chamber is usually done manually, which is quite laborious.

[0004] Therefore, there is an urgent need for an etching chamber cover lifting device. Summary of the Invention

[0005] This invention addresses the shortcomings of existing technologies by providing a lifting device for the top cover of an etching chamber.

[0006] The technical solution of this utility model to solve the above-mentioned technical problems is as follows:

[0007] An etching chamber cover lifting device includes a frame, one end of which is provided with a bracket connected to the cover. The bracket is slidably connected to the frame in a vertical direction and in a horizontal direction. The frame is provided with a vertical movement mechanism for driving the bracket to slide vertically and a horizontal movement mechanism for driving the bracket to slide horizontally.

[0008] Furthermore, the bracket includes a first connecting frame and a second connecting frame, the second connecting frame being respectively disposed on both sides of the first connecting frame, the second connecting frame including a first connecting block and a second connecting block, the first connecting block being slidably connected to the second connecting block in the vertical direction, the first connecting block having multiple fixing holes in the vertical direction, and the second connecting block having a lifting limit pin, the first connecting block and the second connecting block being fixed by the lifting limit pin.

[0009] Furthermore, the vertical movement mechanism includes a cylinder, the base of which is connected to a third connecting block, the third connecting block being fixedly connected to a second connecting block, and the output end of the cylinder being connected to the bottom of a first connecting frame. The first connecting frame is driven to slide vertically by the lifting and lowering of the cylinder.

[0010] Furthermore, the cylinder uses a pilot-operated one-way throttle valve to construct a safety circuit.

[0011] Furthermore, the output end of the cylinder is provided with a floating joint.

[0012] Furthermore, a fourth connecting block is provided at one end of the frame near the support. The fourth connecting block is fixed to the end of the frame and is provided with a horizontal limiting pin, which fixes the fourth connecting block and the third connecting block.

[0013] Furthermore, the third connecting block is also provided with a guide rod, which passes through the second connecting frame, and the second connecting frame is slidably connected to the guide rod.

[0014] Furthermore, a top plate is provided, which is located above the first connecting frame and is fixedly connected to the top end of the guide rod.

[0015] Furthermore, the first connecting frame includes a main board and a lifting plate, the lifting plate being fixed below the main board, and the bottom end of the lifting plate being connected to the upper cover.

[0016] Furthermore, the transverse mechanism includes horizontal guide rails on both sides of the frame, and the bottom of the third connecting block is provided with a groove adapted to the horizontal guide rail; the end of the horizontal guide rail is provided with a translation limit block.

[0017] In summary, compared with the prior art, the beneficial effects of the above technical solution are:

[0018] (1) The lifting limit pin is manually pulled out from the top fixing hole on the first connecting block, the cylinder lifts the second connecting frame upward, the second connecting frame drives the top cover upward synchronously, after the top cover is separated from the chamber, the lifting limit pin is inserted into the bottom fixing hole of the first connecting block to achieve the purpose of fixing the position of the second connecting frame, that is, to achieve the lifting and fixing of the top cover of the process chamber; when it is necessary to move the second connecting frame and the top cover, the translation limit pin is pulled out, and the top cover is manually pushed to the other side of the horizontal guide rail. After the top cover is moved, it is convenient for manual cleaning, maintenance and other work of the process chamber; in this technical solution, the lifting of the top cover does not require manual intervention, that is, it does not require manual lifting of the top cover, which greatly reduces manpower, and when the second connecting frame is moved on the horizontal guide rail, that is, when the top cover is moved, it only needs to be pushed manually. Because of the setting of the horizontal guide rail, this operation also greatly reduces manpower and improves convenience;

[0019] (2) The cylinder uses a pilot-operated one-way throttle valve to build a safety circuit, which can keep the cylinder in its current position and prevent it from falling in the event of an unexpected interruption of the air supply. Attached Figure Description

[0020] Figure 1 is a schematic diagram of the overall structure of an etching chamber cover lifting device according to an embodiment of the present invention;

[0021] Figure 2 is a structural schematic diagram of a lifting device for an etching chamber cover according to an embodiment of the present invention, showing a prominent lifting limit pin.

[0022] Figure 3 is a front view of an etching chamber cover lifting device according to an embodiment of the present invention;

[0023] Figure 4 is a schematic diagram of the protruding cylinder and floating joint in an etching chamber cover lifting device according to an embodiment of the present invention.

[0024] Figure 5 is a schematic diagram of the air path of the cylinder in an etching chamber cover lifting device according to an embodiment of the present invention.

[0025] Figure 6 is a partial schematic diagram of an etching chamber cover lifting device according to an embodiment of the present invention.

[0026] Explanation of reference numerals in the attached drawings: 1. Top plate; 2. Bracket; 3. Top cover; 4. Bearing; 5. Guide rod; 6. Floating joint; 7. Cylinder; 8. Horizontal limit pin; 9. First connecting block; 10. Position sensor; 11. Lifting limit pin; 12. Horizontal guide rail; 13. Frame; 14. Junction box; 15. Translation limit block; 16. Pilot-operated one-way throttle valve; 17. Second connecting block; 18. Third connecting block; 19. Fourth connecting block; 20. Main board; 21. Lifting plate. Detailed Implementation

[0027] The principles and features of this utility model are described below with reference to all the accompanying drawings. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0028] This utility model discloses an etching chamber cover lifting device.

[0029] Referring to Figures 1-6, an etching chamber cover lifting device includes a frame 13. A bracket 2 is provided at one end of the frame 13. The bracket 2 is connected to the cover 3. The bracket 2 is slidably connected to the frame 13 in both the vertical and horizontal directions. The frame 13 is provided with a vertical movement mechanism for driving the bracket 2 to slide vertically and a horizontal movement mechanism for driving the bracket 2 to slide horizontally. The frame 13 also includes a junction box 14 and other structures for easy wiring and power supply.

[0030] The vertical movement mechanism drives the support 2 to move upward, which in turn moves the upper cover 3 upward, thus separating the upper cover 3 from the chamber. Then, the operator activates the horizontal movement mechanism to drive the support 2 to slide horizontally, moving the upper cover 3 to a predetermined position so that the operator can clean and maintain the chamber.

[0031] The horizontal movement mechanism includes horizontal guide rails 12 on both sides of the frame 13, and the vertical movement mechanism includes a third connecting block 18. The bottom of the third connecting block 18 is provided with a groove that is adapted to the horizontal guide rail 12. The end of the horizontal guide rail 12 is provided with a translation limit block 15, which is used to limit the sliding of the bracket 2 and prevent the bracket 2 from detaching from the horizontal guide rail 12 during the sliding process.

[0032] The frame 13 is also equipped with a position sensor 10, as shown in Figure 1. The position sensor 10 is located on one side of the horizontal guide rail 12. The main function of the position sensor 10 is to detect whether the displacement of the transverse mechanism has reached the predetermined position. When the predetermined position is reached, there is an output signal, so that the cylinder 7 can align and merge the upper cover 3 with the bottom cavity to form a sealed chamber.

[0033] The vertical movement mechanism also includes a cylinder 7, which is vertically positioned. The base of the cylinder 7 is connected to the third connecting block 18, and the output end of the cylinder 7 is connected to the bottom of the bracket 2. The lifting and lowering of the cylinder 7 drives the bracket 2 to slide vertically, and then the sliding of the bracket 2 drives the upper cover 3 to move synchronously. Furthermore, the cylinder 7 uses a pilot-operated one-way throttle valve 16 to construct a safety circuit, as shown in Figure 5.

[0034] Furthermore, a floating joint 6 is fixedly provided at the output end of the cylinder 7, and the bracket 2 is fixedly connected to the output end of the cylinder 7 through the floating joint 6. Among them, the floating joint 6 is a mechanical connection component widely used in the field of industrial automation. Its core function is to solve the installation error problem between the cylinder and the actuator, and improve the system stability and service life. Its main functions are as follows: (1) Compensating for eccentricity and parallelism errors. Through the internal elastic structure, it can absorb the axial eccentricity and angular deviation caused by processing and assembly errors between the cylinder and the actuator, and avoid piston rod bending or seal wear caused by rigid connection; (2) Eliminating interference between the two shafts. The floating joint can dynamically adjust the relative position of the connecting parts, reduce mechanical interference caused by vibration, etc., and ensure the smoothness of power transmission.

[0035] The bracket 2 includes a first connecting frame and a second connecting frame. Two second connecting frames are provided, one on each side of the first connecting frame. The first connecting frame includes a main board 20 and lifting plates 21. The main board 20 is convex in shape and horizontally positioned. Four lifting plates 21 are provided, each vertically positioned, with one end fixed to the bottom of the main board 20 and the other end connected to the upper cover 3. The connection method can be a fixed connection. The second connecting frame includes a first connecting block 9 and a second connecting block 17. The second connecting block 17 is vertically arranged and fixedly connected to a third connecting block 18, which supports the second connecting block 17. The first connecting block 9 is located above the third connecting block 18 and to the side of the second connecting block 17. The first connecting block 9 is slidably connected to the second connecting block 17 in the vertical direction. The first connecting block 9 has a T-shaped structure and is mainly used to connect the bracket 2 and provide pin holes for the lifting limit pin 11 to ensure the limit. The first connecting block 9 is fixedly connected to both sides of the main board 20, so that the first connecting block 9 and the main board 20 can rise and fall synchronously. The first connecting block 9 has multiple fixing holes in the vertical direction. In this embodiment, two fixing holes are used as an example, namely the upper fixing hole and the lower fixing hole. The second connecting block 17 is provided with a lifting limit pin 11, which fixes the first connecting block 9 and the second connecting block 17.

[0036] The frame 13 is also provided with a fourth connecting block 19 at one end near the support 2. The fourth connecting block 19 is fixed to the end of the frame 13. The fourth connecting block 19 is provided with a horizontal limiting pin 8, which fixes the fourth connecting block 19 and the third connecting block 18.

[0037] Specifically, when the upper cover 3 needs to be opened, the lifting limit pin 11 is pulled out from the upper fixing hole, the cylinder 7 is activated, the piston rod of the cylinder 7 extends, driving the first connecting block 9 and the main board 20 to slide upward. During the upward sliding process, the main board 20 moves the upper cover 3 synchronously, thus opening the chamber. After the upper cover 3 is opened, the lower fixing hole is aligned with the lifting limit pin 11. The operator inserts the lifting limit pin 11 into the lower fixing hole to fix the second connecting block 17 and the first connecting block 9. When the upper cover 3 needs to be moved horizontally, the operator pulls out the horizontal limit pin 8. There is no connection between the third connecting block 18 and the fourth connecting block 19. Then, the operator pushes the entire bracket 2, or pushes the vertical movement mechanism on one side of the bracket 2, etc., to move the entire bracket 2, so that the upper cover 3 can be moved to a suitable position, thereby facilitating the operator to clean or maintain the chamber. When the upper cover 3 covers the chamber, the lifting limit pin 11 is inserted into the upper fixing hole of the first connecting block 9, and the horizontal limit pin 8 is inserted into the hole on the third connecting block 18, so as to fix the bracket 2 as a whole.

[0038] The third connecting block 18 is provided with a guide rod 5, which is vertically set. One end of the guide rod 5 is fixedly connected to the third connecting block 18, and the other end of the guide rod 5 passes through the main board 20. The main board 20 is provided with a bearing 4 to facilitate the sliding of the main board 20.

[0039] Furthermore, a top plate 1 is provided at the end of the guide rod 5 near the main board 20. The top plate 1 is located above the main board 20 and is fixedly connected to the top of the guide rod 5. The top plate 1 can limit the vertical sliding of the main board 20 through the four fixed guide rods 5, and the reinforcement at the top can also improve the overall strength of the bracket 2.

[0040] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A lifting device for an etching chamber cover, characterized in that: Includes a frame (13), one end of which is provided with a support (2), the support (2) is connected to a top cover (3), the support (2) is slidably connected to the frame (13) in the vertical direction and slidably connected to the frame (13) in the horizontal direction, the frame (13) is provided with a vertical movement mechanism for driving the support (2) to slide vertically and a horizontal movement mechanism for driving the support (2) to slide horizontally.

2. The etching chamber cover lifting device according to claim 1, characterized in that: The bracket (2) includes a first connecting frame and a second connecting frame. The second connecting frame is respectively located on both sides of the first connecting frame. The second connecting frame includes a first connecting block (9) and a second connecting block (17). The first connecting block (9) is slidably connected to the second connecting block (17) in the vertical direction. The first connecting block (9) has multiple fixing holes in the vertical direction. The second connecting block (17) is provided with a lifting limit pin (11). The first connecting block (9) and the second connecting block (17) are fixed by the lifting limit pin (11).

3. The etching chamber cover lifting device according to claim 2, characterized in that: The vertical movement mechanism includes a cylinder (7), the base of which is connected to a third connecting block (18), the third connecting block (18) is fixedly connected to a second connecting block (17), the output end of which is connected to the bottom of a first connecting frame, and the first connecting frame is driven to slide vertically by the lifting and lowering of the cylinder (7).

4. The etching chamber cover lifting device according to claim 3, characterized in that: The cylinder (7) uses a pilot-operated one-way throttle valve (16) to construct a safety circuit.

5. The etching chamber cover lifting device according to claim 3, characterized in that: The output end of the cylinder (7) is provided with a floating joint (6).

6. The etching chamber cover lifting device according to any one of claims 3 to 5, characterized in that: The frame (13) is also provided with a fourth connecting block (19) at one end near the support (2). The fourth connecting block (19) is fixed at the end of the frame (13). The fourth connecting block (19) is provided with a horizontal limiting pin (8). The fourth connecting block (19) and the third connecting block (18) are fixed by the horizontal limiting pin (8).

7. The etching chamber cover lifting device according to any one of claims 3 to 5, characterized in that: The third connecting block (18) is also provided with a guide rod (5), which passes through the second connecting frame and is slidably connected to the guide rod (5).

8. The etching chamber cover lifting device according to claim 7, characterized in that: It is also provided with a top plate (1), which is located above the first connecting frame and is fixedly connected to the top end of the guide rod (5).

9. The etching chamber cover lifting device according to claim 8, characterized in that: The first connecting frame includes a main board (20) and a lifting plate (21). The lifting plate (21) is fixed below the main board (20), and the bottom end of the lifting plate (21) is connected to the top cover (3).

10. The etching chamber cover lifting device according to claim 3, characterized in that: The transverse mechanism includes horizontal guide rails (12) on both sides of the frame (13), and the bottom of the third connecting block (18) is provided with a groove that matches the horizontal guide rails (12); the end of the horizontal guide rails (12) is provided with a translation limit block (15).

Images