Rotating stand stirring conduction device and coating machine

Abstract

The utility model relates to a rotating stand stirring conduction device and a coating machine. A baffle assembly is arranged adjacent to a rotating stand assembly, and a cargo cage is arranged on a cargo cage rotating disc assembly; the cargo cage turntable assembly is rotatably arranged on the rotating stand assembly; the cargo cage rotating disc assembly has a position capable of abutting against the baffle assembly in the rotating state of the rotating frame assembly so that the cargo cage rotating disc assembly can rotate by a first preset angle relative to the rotating frame assembly to be disengaged from contact with the baffle assembly in the state of abutting against the baffle assembly, and the cargo cage and the rotating frame assembly form a preset rotation angle. The problem that the rotation angle of the cargo cage is controllable is solved, the times that the surfaces of all base materials borne by each independent cargo cage pass through a target material coating area are consistent within the process time, and the consistency of the coating thickness and the uniformity of the surfaces of the base materials borne by the cargo cages can be improved; and for different technologies, the requirements for passing through the target material by the cargo cage surface base material are different, and only the cargo cage turntable assembly needs to be properly adjusted, so that the use is convenient and easy.

Description

Technical Field

[0001] This application relates to the field of magnetron sputtering coating, and in particular to a rotating frame drive and conduction device and a coating machine. Background Technology

[0002] Magnetron sputtering is a physical vapor deposition (PVD) technique that uses the combined action of magnetic and electric fields to sputter atoms or molecules from the surface of a target material, forming a thin film on the substrate. To obtain the desired film thickness, sputtering time and sputtering power need to be controlled.

[0003] Controllable rotation of the substrate holder is one of the main factors affecting the consistency of film thickness across different substrates. In traditional coating machines, substrate rotation is achieved through a gear transmission structure. Within a given processing time, the number of times each substrate surface faces the target is inconsistent, resulting in inconsistent film thickness across each substrate surface.

[0004] Specifically, traditional coating machines use a gear train to drive the rotation of the substrate cages within the furnace. However, this method cannot guarantee that the number of times each substrate surface in each individual cage passes the target coating area is consistent within the processing time. Therefore, the coating thickness and uniformity of the substrate surface in each cage cannot be guaranteed to be consistent. Furthermore, different processes have different requirements for the substrate surface passing through the target, making gear train adjustment insufficiently precise. Utility Model Content

[0005] Therefore, it is necessary to provide a rotating frame transmission device and a coating machine.

[0006] One embodiment of this application is a rotating frame actuation device, which includes a rotating frame assembly, a cargo cage turntable assembly, a cargo cage, and a baffle assembly; the baffle assembly is disposed adjacent to the rotating frame assembly, and the cargo cage is disposed on the cargo cage turntable assembly; the cargo cage turntable assembly is rotatably disposed on the rotating frame assembly; the cargo cage turntable assembly has a position that can abut against the baffle assembly when the rotating frame assembly is rotating, so that when abutting against the baffle assembly, it rotates relative to the rotating frame assembly by a first preset angle until it disengages from the baffle assembly, thereby forming a preset rotation angle between the cargo cage and the rotating frame assembly.

[0007] The aforementioned rotating frame actuation and transmission device, through the cooperation of the rotating frame assembly, the cargo cage turntable assembly, the cargo cage, and the baffle assembly, ensures that as the cargo cage turntable assembly rotates with the rotating frame assembly, the cargo cage, under the influence of the baffle assembly, rotates on its own axis while revolving around the central axis. This solves the problem of controllable rotation angle of the cargo cage, and ensures that the number of times each substrate surface carried by each individual cargo cage passes through the target coating area is consistent within the process time. Therefore, it helps to improve the consistency and uniformity of the coating thickness on the substrate surface carried by each cargo cage. Furthermore, for different processes with different requirements for the substrate surface of the cargo cage passing through the target, only the cargo cage turntable assembly needs to be adjusted appropriately, making it convenient, easy to use, and highly versatile.

[0008] In some embodiments, the cargo cage turntable assembly includes a first rotating shaft and a first rotating wheel connected to each other;

[0009] The first rotating shaft is rotatably mounted on the rotating frame assembly, and the cargo cage is mounted on the first rotating shaft;

[0010] The first rotating shaft passes through the first rotating wheel. When the rotating frame assembly is rotating, the first rotating wheel has a position that can abut against the baffle assembly. When abutting against the baffle assembly, it rotates relative to the rotating frame assembly by a first preset angle until it disengages from the baffle assembly, so that the cargo cage and the rotating frame assembly form the preset rotation angle.

[0011] In some embodiments, the cargo cage turntable assembly further includes a second wheel connected to the first rotating shaft, with the first rotating shaft passing through both the second wheel and the first wheel;

[0012] The second rotating wheel is fixed relative to and offset from the first rotating wheel, and the second rotating wheel does not contact the baffle assembly when the first rotating wheel abuts against the baffle assembly;

[0013] When the first rotating wheel is disengaged from the baffle assembly, the second rotating wheel has a position that can abut against the baffle assembly. When abutting against the baffle assembly, it rotates relative to the rotating frame assembly by a second preset angle until it disengages from the baffle assembly, thereby cooperating with the first rotating wheel to make the cargo cage and the rotating frame assembly form the preset rotation angle.

[0014] In some embodiments, the second wheel is a regular prism or the first wheel is a regular prism; or...

[0015] Both the second and first rotating wheels are regular octagonal prisms; or,

[0016] The rotating frame actuation and transmission device further includes a rotating wheel spacer, through which the first rotating shaft passes, and the second rotating wheel and the first rotating wheel are respectively sleeved outside the rotating wheel spacer, with a gap between the second rotating wheel and the first rotating wheel; or...

[0017] The baffle assembly includes a first baffle, a second baffle, an insulating component, and a mounting base;

[0018] Both the first baffle and the second baffle are disposed on the mounting base and are insulated from the mounting base by the insulating member;

[0019] When the rotating frame assembly is rotating, the first rotating wheel has a position that can abut against the second baffle, so that when abutting against the second baffle, it rotates relative to the rotating frame assembly by a first preset angle until it disengages from the second baffle;

[0020] The second rotating wheel does not contact the second baffle when the first rotating wheel is abutting the second baffle, and when the first rotating wheel is disengaged from the second baffle, the second rotating wheel has a position that can abut the first baffle when the rotating frame assembly is rotating, so that when abutting the first baffle, it rotates relative to the rotating frame assembly by a second preset angle until it disengages from the first baffle.

[0021] In some embodiments, the rotating frame actuation device further includes a positioning structure, through which the first rotating shaft passes and is axially connected to the positioning structure;

[0022] The cargo cage is mounted on the positioning structure to rotate synchronously with the positioning structure.

[0023] The positioning structure elastically abuts against the first rotating wheel, and is used to elastically position itself against the positioning groove of the first rotating wheel when the first rotating wheel is not in contact with the baffle assembly, so that the cargo cage and the rotating frame assembly form the preset rotation angle.

[0024] In some embodiments, the positioning structure includes a spacer, a self-rotating shaft seat, a positioning seat, an elastic element, a pressure cap, a positioning steel ball, and a bearing pressure plate;

[0025] The first rotating shaft is axially connected to the self-rotating shaft seat through the spacer, the cargo cage is disposed on the bearing pressure plate, and the bearing pressure plate is disposed on the self-rotating shaft seat;

[0026] The positioning seat is connected to the self-rotating shaft seat, the elastic element, the pressure cap and the positioning steel ball are all disposed in the positioning seat, and the positioning steel ball has a portion that protrudes from the positioning seat;

[0027] The elastic element elastically abuts against the positioning steel ball through the pressure cap, so that the positioning steel ball elastically abuts against the first rotating wheel, and the positioning steel ball is elastically positioned in the positioning groove of the first rotating wheel when the first rotating wheel does not contact the baffle assembly.

[0028] In some embodiments, the spacer includes a first spacer, a second spacer, and a third spacer;

[0029] The self-rotating shaft seat is axially connected to the first rotating shaft through the first spacer, the second spacer and the third spacer, and the first spacer, the second spacer and the third spacer are arranged at intervals.

[0030] In some embodiments, the baffle assembly includes a baffle, an insulator, and a mounting base;

[0031] The baffle is disposed on the mounting base and is insulated from the mounting base by the insulating member;

[0032] The cargo cage turntable assembly has a position that can abut against the baffle when the turntable assembly is rotating.

[0033] In some embodiments, the number of baffle assemblies is at least two, or the baffle assembly has at least two baffles; or,

[0034] The insulating component includes a first insulating plate, a second insulating plate, a third insulating plate, and an insulating sleeve;

[0035] The baffle is mounted on the mounting base by an internal hex screw;

[0036] The insulating sleeve is provided between the hex socket screw and the baffle. The baffle assembly provides a washer and a spring washer between the hex socket screw and the mounting base. The hex socket screw passes through the washer, the spring washer and the insulating sleeve in sequence, and then is screwed to the mounting base.

[0037] The first insulating plate, the second insulating plate, and the third insulating plate are respectively arranged around the baffle.

[0038] In some embodiments, a coating machine includes a vacuum furnace and the rotating frame actuation device described in any embodiment, the rotating frame actuation device being disposed in the vacuum furnace. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of an embodiment of the rotating frame transmission device described in this application.

[0041] Figure 2 for Figure 1 A schematic diagram of the structure of the cargo cage turntable assembly in the embodiment shown.

[0042] Figure 3 for Figure 2 A schematic cross-sectional view along the AA direction of the embodiment shown.

[0043] Figure 4 for Figure 1 A schematic diagram of the baffle assembly in the embodiment shown.

[0044] Figure 5 for Figure 4 A schematic cross-sectional view along the BB direction of the embodiment shown.

[0045] Reference numerals: 1. Turntable assembly; 2. Cargo cage turntable assembly; 3. Cargo cage; 4. Baffle assembly; 5. First rotating shaft; 6. Second rotating wheel; 7. First rotating wheel; 8. Rotating wheel spacer; 9. First spacer; 10. Second spacer; 11. Third spacer; 12. Rotating shaft seat; 13. Positioning seat; 14. Elastic element; 15. Pressure cap; 16. Positioning steel ball; 17. Bearing pressure plate; 18. Fixed base plate; 19. First baffle; 20. Second baffle; 21. First insulating plate; 22. Second insulating plate; 23. Third insulating plate; 24. Insulating sleeve; 25. Gasket; 26. Spring washer; 27. Hex socket screw; 28. Upper turntable; 29. ​​Mounting seat; 30. Positioning groove; 31. First rotation direction; 32. Second rotation direction; 100. Turntable actuation and transmission device. Detailed Implementation

[0046] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0047] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0048] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0049] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0050] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0051] This application discloses a rotating frame actuation and a coating machine, which includes some or all of the technical features of the following embodiments; that is, the rotating frame actuation and the coating machine include some or all of the following structures. In one embodiment of this application, a rotating frame actuation and actuation device includes a rotating frame assembly, a cargo cage turntable assembly, a cargo cage, and a baffle assembly; the baffle assembly is disposed adjacent to the rotating frame assembly, and the cargo cage is disposed on the cargo cage turntable assembly; the cargo cage turntable assembly is rotatably disposed on the rotating frame assembly; the cargo cage turntable assembly has a position that can abut against the baffle assembly when the rotating frame assembly is rotating, so that when abutting against the baffle assembly, it rotates relative to the rotating frame assembly by a first preset angle until it disengages from the baffle assembly, so that the cargo cage and the rotating frame assembly form a preset rotation angle. The aforementioned rotating frame actuation and transmission device, through the cooperation of the rotating frame assembly, the cargo cage turntable assembly, and the cargo cage and baffle assembly, ensures that as the cargo cage turntable assembly rotates with the rotating frame assembly, the cargo cage, under the influence of the baffle assembly, rotates on its own axis while revolving around the central axis. This solves the problem of controllable rotation angle of the cargo cage, and thus ensures that the number of times each substrate surface carried by each individual cargo cage passes through the target coating area is consistent within the process time. Therefore, it helps to improve the consistency and uniformity of the coating thickness on the substrate surface carried by each cargo cage. Furthermore, for different processes with different requirements for the substrate surface of the cargo cage passing through the target, only the cargo cage turntable assembly needs to be adjusted appropriately, making it convenient, easy to use, and highly versatile. The following section will combine... Figures 1 to 5 The rotating frame actuation and transmission device and the coating machine are described in detail.

[0052] To address the technical problem that traditional coating furnaces cannot guarantee a consistent number of times each substrate surface in each individual basket passes through the target coating area within the processing time, in some embodiments, a rotating frame towing and transmission device 100 is used. Figure 1As shown, it includes a rotating frame assembly 1, a cargo cage turntable assembly 2, a cargo cage 3, and a baffle assembly 4. The baffle assembly 4 is disposed adjacent to the rotating frame assembly 1, and the cargo cage 3 is disposed on the cargo cage turntable assembly 2. The cargo cage turntable assembly 2 is rotatably disposed on the rotating frame assembly 1. When the rotating frame assembly 1 is rotating, the cargo cage turntable assembly 2 has a position that can abut against the baffle assembly 4, so that when abutting against the baffle assembly 4, it rotates relative to the rotating frame assembly 1 by a first preset angle until it disengages from the baffle assembly 4, thereby forming a preset rotation angle between the cargo cage 3 and the rotating frame assembly 1. As an example, the rotating frame assembly 1 is mounted on the rotating shaft of a vacuum furnace device; as an example, the baffle assembly 4 is disposed inside the vacuum furnace device and adjacent to the rotating frame assembly 1. As an example, the cargo cage turntable assembly 2 rotates with the rotating frame assembly 1, and the cargo cage 3 rotates with the cargo cage turntable assembly 2. This structural design, through the cooperation of the rotating frame assembly 1, the cage turntable assembly 2, the cage 3, and the baffle assembly 4, ensures that as the cage turntable assembly 2 rotates with the rotating frame assembly 1, the cage 3, under the influence of the baffle assembly 4, rotates on its own axis while revolving around the rotating frame assembly 1. This solves the problem of controllable rotation angle of the cage 3, and ensures that the number of times each substrate surface carried by each individual cage 3 passes through the target coating area is consistent within the process time. Therefore, it helps to improve the consistency and uniformity of the coating thickness of the substrate surface carried by each cage 3. Furthermore, for different processes with different requirements for the substrate surface of the cage passing through the target, only the cage turntable assembly 2 needs to be adjusted appropriately, making it convenient, easy to use, and highly versatile.

[0053] To simplify the product structure and enhance the consistency of the rotation angle of the cargo cage 3, in some embodiments, a combination of Figure 2 and Figure 3 The cargo cage turntable assembly 2 includes a first rotating shaft 5 and a first rotating wheel 7 connected to each other; the first rotating shaft 5 is rotatably mounted on the rotating frame assembly 1, and the cargo cage 3 is mounted on the first rotating shaft 5; the first rotating shaft 5 passes through the first rotating wheel 7, and the first rotating wheel 7 has a position that can abut against the baffle assembly 4 when the rotating frame assembly 1 is rotating, so that when abutting against the baffle assembly 4, it rotates relative to the rotating frame assembly 1 by a first preset angle until it disengages from the baffle assembly 4, so that the cargo cage 3 and the rotating frame assembly 1 form the preset rotation angle. As an example, such as Figure 1As shown, the rotating frame assembly 1 rotates along the first rotation direction 31, and the cargo cage turntable assembly 2 remains stationary while in contact with the baffle assembly 4, that is, it rotates relative to the rotating frame assembly 1 along the second rotation direction 32, so that the cargo cage 3 and the rotating frame assembly 1 form the preset rotation angle. This structural design has the advantages of simple structure and accurate angle control. When the rotating frame assembly 1 drives the cargo cage turntable assembly 2 to rotate to a certain position, the first rotating wheel 7 abuts against the baffle assembly 4. At this time, the rotating frame assembly 1 continues to drive the cargo cage turntable assembly 2 to rotate. This rotation can be called revolution. As the first rotating wheel 7 abuts against the baffle assembly 4, the cargo cage 3 is subjected to the action of the first rotating wheel 7 and the baffle assembly 4, and a certain angle change occurs, forming the preset rotation angle. This rotation can be called rotation. Thus, as the cargo cage turntable assembly 2 rotates with the rotating frame assembly 1, the cargo cage 3 undergoes rotation under the action of the baffle assembly 4 while in the state of revolution. Therefore, when the number of revolutions and rotations reaches a certain level, the number of times each substrate surface carried on each individual cargo cage 3 passes through the target material coating area is consistent, thereby improving the consistency and uniformity of the coating thickness on the substrate surface carried by each cargo cage 3.

[0054] In some embodiments, the cargo cage turntable assembly 2 further includes a second rotating wheel 6 connected to the first rotating shaft 5, with the first rotating shaft 5 passing through the second rotating wheel 6 and the first rotating wheel 7 respectively; the second rotating wheel 6 is relatively fixed and offset from the first rotating wheel 7, and the second rotating wheel 6 does not contact the baffle assembly 4 when the first rotating wheel 7 is abutting against the baffle assembly 4; when the first rotating wheel 7 is disengaged from the baffle assembly 4, the second rotating wheel 6 has a position that can abut against the baffle assembly 4, so that when abutting against the baffle assembly 4, it rotates relative to the rotating frame assembly 1 by a second preset angle until it disengages from the baffle assembly 4, thereby cooperating with the first rotating wheel 7 to make the cargo cage 3 and the rotating frame assembly 1 form the preset rotation angle. With this structural design, while the cargo cage turntable assembly 2 and the cargo cage 3 on it revolve with the rotating frame assembly 1, the cargo cage 3 also rotates twice with the second rotating wheel 6 and the first rotating wheel 7 under the action of the baffle assembly 4. This adjusts the position of the cargo cage 3 and the substrate on it during the coating process, so that the number of times each substrate surface carried on each individual cargo cage 3 passes through the target coating area is consistent, thereby further improving the consistency and uniformity of the coating thickness on the substrate surface carried by each cargo cage 3.

[0055] The shapes of the first rotating wheel 7 and the second rotating wheel 6, and the rotation mechanism achieved by these shapes, are illustrated below. In some embodiments, the second rotating wheel 6 is a regular prism, or the first rotating wheel 7 is a regular prism; in some embodiments, the second rotating wheel 6 is a regular square prism, and the first rotating wheel 7 is a regular hexagonal prism; in some embodiments, the second rotating wheel 6 is a regular decagonal prism, and the first rotating wheel 7 is a regular octagonal prism. Alternatively, in some embodiments, both the second rotating wheel 6 and the first rotating wheel 7 are regular prisms. As an example, such as Figure 2 As shown, both the second rotating wheel 6 and the first rotating wheel 7 are regular octagonal prisms; in other embodiments, both the second rotating wheel 6 and the first rotating wheel 7 are regular hexagonal prisms, regular nonagonal prisms, or regular decagonal prisms, etc., which can be set or adjusted according to actual needs. Taking only the first rotating wheel 7 and the first rotating wheel 7 being a regular hexagonal prism as an example, the baffle assembly 4 moves one side of the first rotating wheel 7 each time. Due to structural reasons, when it is moved halfway, the first rotating wheel 7 disengages from the baffle assembly 4, and therefore rotates halfway through the 60-degree angle relative to the rotating frame assembly 1, that is, the first preset angle is 30 degrees, and the preset rotation angle at this time is 30 degrees. When both the second rotating wheel 6 and the first rotating wheel 7 are present, with the second rotating wheel 6 being a regular square prism and the first rotating wheel 7 being a regular hexagonal prism, under the action of the baffle assembly 4, one side of the first rotating wheel 7 is first obstructed, causing it to rotate halfway relative to the rotating frame assembly 1. Then, one side of the second rotating wheel 6 is obstructed, causing it to rotate halfway again relative to the rotating frame assembly 1. The first preset angle is 30 degrees, and the second preset angle is half of 90 degrees, i.e., 45 degrees. At this time, the preset rotation angle is 75 degrees. Other embodiments follow the same principle and will not be elaborated further. As mentioned above, this structural design makes the coating environment of the substrate carried by each cargo cage 3 more uniform during coating, thus helping to improve the consistency of the coating thickness on the substrate surface and the uniformity of the substrate surface.

[0056] In embodiments where both the second rotating wheel 6 and the first rotating wheel 7 exist, to avoid mutual interference between them, in some embodiments, the rotating frame actuation device 100 further includes a rotating wheel spacer 8. The first rotating shaft 5 passes through the rotating wheel spacer 8, and the second rotating wheel 6 and the first rotating wheel 7 are respectively sleeved outside the rotating wheel spacer 8, with a gap between them. This structural design allows the baffle assembly 4 to block the second rotating wheel 6 and the first rotating wheel 7 at different positions, such as different heights, thereby controlling the first preset angle, the second preset angle, and the preset rotation angle; in various embodiments, the preset rotation angle can also be referred to as the asynchronous angle.

[0057] To maximize the accuracy of the preset rotation angle, combined with Figure 2 and Figure 3In some embodiments, the rotating frame actuation device 100 further includes a positioning structure, the first rotating shaft 5 passes through the positioning structure and is axially connected to the positioning structure; the cargo cage 3 is disposed on the positioning structure to rotate synchronously with the positioning structure; the positioning structure elastically abuts against the first rotating wheel 7, and is used to elastically position itself against the positioning groove 30 of the first rotating wheel 7 when the first rotating wheel 7 is not in contact with the baffle assembly 4, so that the cargo cage 3 and the rotating frame assembly 1 form the preset rotation angle. With this structural design, during the rotation of the cage 3 by the baffle assembly 4 in conjunction with the first rotating wheel 7 and / or the second rotating wheel 6, the positioning structure elastically positions and abuts against the positioning groove 30. Since the position of the positioning groove 30 is fixed, and the rotation of the first rotating wheel 7 and / or the second rotating wheel 6 caused by the action of the baffle assembly 4 is also fixed, the positioning groove 30 that the positioning structure elastically positions and abuts against is also fixed. Thus, the rotation angle of the cage 3 achieved each time under the action of the baffle assembly 4 is also fixed, which helps to improve the accuracy of the preset rotation angle, thereby ensuring the consistency of the coating thickness and the uniformity of the substrate surface.

[0058] The following provides further examples of positioning structures. In some embodiments, such as... Figure 2 and Figure 3As shown, the positioning structure includes a spacer, a rotating shaft seat 12, a positioning seat 13, an elastic element 14, a pressure cap 15, a positioning steel ball 16, and a bearing pressure plate 17. The first rotating shaft 5 is axially connected to the rotating shaft seat 12 through the spacer. The cargo cage 3 is disposed on the bearing pressure plate 17, and the bearing pressure plate 17 is disposed on the rotating shaft seat 12. The positioning seat 13 is connected to the rotating shaft seat 12. The elastic element 14, the pressure cap 15, and the positioning steel ball 16 are all disposed in the positioning seat 13, and the positioning steel ball 16 has a portion protruding from the positioning seat 13. The elastic element 14 elastically abuts against the positioning steel ball 16 through the pressure cap 15, so that the positioning steel ball 16 elastically abuts against the first rotating wheel 7, and so that the positioning steel ball 16 is elastically positioned and abuts against the positioning groove 30 of the first rotating wheel 7 when the first rotating wheel 7 does not contact the baffle assembly 4. In this embodiment, the elastic element 14 is a rectangular spring. In other embodiments, the elastic element 14 may also be a ring-shaped spring or a cylindrical spring. In some embodiments, the spacer includes a first spacer 9, a second spacer 10, and a third spacer 11; the self-rotating shaft seat 12 is axially connected to the first rotating shaft 5 through the first spacer 9, the second spacer 10, and the third spacer 11, and the first spacer 9, the second spacer 10, and the third spacer 11 are arranged at intervals. This structural design, on the one hand, is beneficial to ensuring the positioning stability and controllability of the positioning steel ball 16 and the positioning groove 30 as much as possible through the cooperation of the positioning seat 13, the elastic element 14, the pressure cap 15, and the positioning steel ball 16; on the other hand, it is beneficial to ensure the support stability of the cargo cage 3 as much as possible through the cooperation of the spacer, the self-rotating shaft seat 12, and the bearing pressure plate 17, and, in conjunction with the embodiment of the first spacer 9, the second spacer 10, and the third spacer 11, further improves the support stability of the cargo cage 3.

[0059] In some of these embodiments, such as Figure 4 As shown, the baffle assembly 4 includes a baffle, an insulating component, and a mounting base 29. The baffle is disposed on the mounting base 29 and is insulated from the mounting base 29 by the insulating component. The cargo cage turntable assembly 2 has a position that can abut against the baffle when the turntable assembly 1 is rotating. As an example, the mounting base 29 is disposed on the bottom plate of the vacuum furnace equipment. This structural design ensures that the baffle is insulated from the bottom plate of the vacuum furnace equipment, thereby protecting the substrates carried on the cargo cage 3 and avoiding defects caused by the coating process while ensuring the consistency of the coating thickness and uniformity of each substrate.

[0060] For embodiments having a first rotating wheel 7 and a second rotating wheel 6, in some embodiments, such as Figure 4As shown, the baffle assembly 4 includes a first baffle 19 and a second baffle 20. When the rotating frame assembly 1 is rotating, the first rotating wheel 7 has a position that can abut against the second baffle 20, so that when abutting against the second baffle 20, it rotates relative to the rotating frame assembly 1 by a first preset angle until it disengages from the second baffle 20. The second rotating wheel 6 does not contact the second baffle 20 when the first rotating wheel 7 abuts against the second baffle 20, and when the first rotating wheel 7 is disengaged from the second baffle 20, the second rotating wheel 6 has a position that can abut against the first baffle 19 when the rotating frame assembly 1 is rotating, so that when abutting against the first baffle 19, it rotates relative to the rotating frame assembly 1 by a second preset angle until it disengages from the first baffle 19. As an example, the first baffle 19 and the second baffle 20 are respectively insulatedly disposed on the bottom plate of the vacuum furnace equipment. This structural design makes it simple to achieve the preset rotation angle and easy to adjust. It only requires changing the shape of the first rotating wheel 7 and the second rotating wheel 6, and matching the corresponding first baffle 19 and second baffle 20.

[0061] Exemplarily, in some of these embodiments, such as Figure 4 and Figure 5 As shown, the baffle assembly 4 includes a baffle, a first insulating plate 21, a second insulating plate 22, a third insulating plate 23, an insulating sleeve 24, a gasket 25, a spring washer 26, and an internal hexagon screw 27. The baffle is mounted on the mounting base 29 via the internal hexagon screw 27. The insulating sleeve 24 is provided between the internal hexagon screw 27 and the baffle. The gasket 25 and the spring washer 26 are provided between the internal hexagon screw 27 and the mounting base 29. The internal hexagon screw 27 passes sequentially through the gasket 25, the spring washer 26, and the insulating sleeve 24, and is screwed onto the mounting base 29. The first insulating plate 21, the second insulating plate 22, and the third insulating plate 23 are respectively arranged around the baffle. In this embodiment, the number of mounting bases 29 is at least two. The rotating frame actuation device is provided with a fixed base plate 18, and adjacent mounting bases 29 are fixed together by the fixed base plate 18. In this embodiment, as shown... Figure 4As shown, the baffle includes a first baffle 19 and a second baffle 20. Each baffle is mounted on the mounting base 29 by an internal hexagonal screw 27. That is, the first baffle 19 and the second baffle 20 are mounted on different mounting bases 29 by different internal hexagonal screws 27. This structural design ensures that in the coating environment, the baffles, including the first baffle 19 and the second baffle 20, are insulated from the mounting base 29, thereby ensuring that the cargo cage turntable assembly 2 is insulated from the bottom plate of the vacuum furnace equipment. This, in turn, ensures the insulation of the cargo cage 3 relative to the vacuum furnace equipment, thus properly protecting the substrates carried on the cargo cage 3. While ensuring the consistency of the coating thickness and uniformity of each substrate, defects caused by the coating process are avoided.

[0062] The following will continue to combine Figures 1 to 5 The example illustrates the rotating frame actuation and transmission device 100. In one embodiment, the rotating frame actuation and transmission device 100 includes a rotating frame assembly 1, a cargo cage turntable assembly 2, a cargo cage 3, and a baffle assembly 4. The main components are machined from materials such as stainless steel or polyetheretherketone (PEEK). As an example, the rotating frame assembly 1 is mounted on the rotating shaft of the vacuum furnace equipment. The rotation shaft seat 12 of the cargo cage turntable assembly 2 is fixedly connected to the rotating frame assembly 1 by screws. The cargo cage 3 is placed in the slots of the upper turntable 28 of the rotating frame assembly 1 and the slots of the cargo cage turntable assembly 2, i.e., the cargo cage 3 is located between the upper turntable 28 of the rotating frame assembly 1 and the cargo cage turntable assembly 2, for example, between two slots. The baffle assembly 4 is mounted to the bottom plate inside the vacuum furnace by screws. The rotation of the rotating frame assembly 1 drives the cargo cage turntable assembly 2 and the cargo cage 3 to rotate synchronously, with no relative displacement during the rotation. Figure 2 and Figure 3 As shown, the second rotating wheel 6 and the first rotating wheel 7 are fixed on the first rotating shaft 5. The first rotating shaft 5 is connected to the self-rotating shaft seat 12 by a bearing, so the first rotating shaft 5 can drive the second rotating wheel 6 and the first rotating wheel 7 to rotate synchronously. Since the cargo cage 3 is fixed through the slot of the first rotating shaft 5 and the upper turntable 28, the cargo cage 3 can also rotate synchronously when the first rotating shaft 5 rotates. The second rotating wheel 6 and the first rotating wheel 7 in the cargo cage turntable assembly 2 are both regular octagons, and are stacked and fixed on the first rotating shaft 5 in the cargo cage turntable assembly 2 with a 22.5° offset from each other.

[0063] When the rotating frame assembly 1 drives the cargo cage turntable assembly 2 to rotate, that is, when the rotating frame assembly 1 rotates, the cargo cage turntable assembly 2 rotates synchronously with the rotating frame assembly 1. When the cargo cage turntable assembly 2 rotates with the rotating frame assembly 1 to the position of the baffle assembly 4, the second rotating wheel 6 in the cargo cage turntable assembly 2 contacts the first baffle 19 in the baffle assembly 4, and under the action of rotational force, the first baffle 19 pushes the second rotating wheel 6, the first rotating wheel 7, the first rotating shaft 5, the cargo cage 3, etc. in the cargo cage turntable assembly 2 to rotate 22.5° around the first rotating shaft 5. As the rotating frame assembly 1 continues to rotate, the second rotating wheel 6 disengages from the first baffle 19, and the positioning steel ball 16 is positioned in the elastic element 14, such as a rectangular spring. The pressure of the ball slides into the slot of the first rotating wheel 7 to achieve positioning; when the first rotating wheel 7 in the cargo cage turntable assembly 2 rotates with the rotating frame assembly 1 and comes into contact with the second baffle 20 in the baffle assembly 4, the second baffle 20 pushes the first rotating wheel 7, the second rotating wheel 6, the first rotating shaft 5, the cargo cage 3, etc. to rotate 22.5° around the first rotating shaft 5 in the cargo cage turntable assembly 2 under the action of rotational force; as the rotating frame assembly 1 continues to rotate, the first rotating wheel 7 disengages from the second baffle 20, and the positioning steel ball 16 slides into the slot of the first rotating wheel 7 under the pressure of the elastic element 14 to achieve positioning; at this time, the cargo cage 3 rotates a total of 45° after two actions, that is, the cargo cage 3 rotates 45° for every rotation of the rotating frame assembly 1. In this structural design, the baffle assembly 4 includes two baffles, namely the first baffle 19 and the second baffle 20. As the rotating frame assembly 1 revolves, each baffle controllably allows the cargo cage 3 to have a rotation angle relative to the rotating frame assembly 1. In this embodiment, the rotation angle is 22.5 degrees. Therefore, the problem of controllable rotation angle of the cargo cage 3 is solved by the cooperation of the baffle assembly 4 and the cargo cage turntable assembly 2. Furthermore, the pre-pressing positioning device of the positioning steel ball 16 is added, enabling the cargo cage 3 to achieve positioning after disengaging from the baffle assembly 4. During production, the cargo cage 3 can rotate synchronously with the cargo cage turntable assembly 2 to achieve controllable rotation angle. In addition, the positioning steel ball 16 slides into the slot of the first rotating wheel 7 under the pressure of the elastic element 14 to achieve positioning. Furthermore, the second wheel 6 and the first wheel 7 in the cargo cage turntable assembly 2 come into contact with the first baffle 19 and the second baffle 20 in the baffle assembly 4. Due to the obstruction of the first baffle 19 and the second baffle 20, the second wheel 6 and the first wheel 7 will drive the first shaft 5 in the cargo cage turntable assembly 2 to rotate by 22.5°, and the cargo cage 3 will also rotate by 22.5° with the first shaft 5.

[0064] In one embodiment, both the second rotating wheel 6 and the first rotating wheel 7 of the rotating frame actuation and transmission device 100 are connected to the first rotating shaft 5, and their function is to drive the first rotating shaft 5 to rotate. Taking the rotation of the cargo cage turntable assembly 2 by 45° when the rotating frame assembly 1 rotates one revolution as an example, since the rotation angle of 45° is too large, if only one rotating wheel is used to achieve the rotation of the shaft by 45°, the impact force generated when the rotating wheel and the baffle are in contact at a high linear speed will be extremely large, which will easily cause damage to the rotating wheel and the baffle. Therefore, it is divided into two rotating wheels, namely the second rotating wheel 6 and the first rotating wheel 7, which drive the first rotating shaft 5 to rotate once to achieve the requirement of rotating the cargo cage turntable assembly 2 by 45° per revolution. This can reduce the rotation angle of a single rotating wheel and improve the service life of the rotating wheel and the baffle. It is understood that in each embodiment, the 45° angle is only an example and is not a limitation on the rotation angle of the cargo cage 3 of the rotating frame actuation and transmission device 100. Those skilled in the art can use 60 degrees, 72 degrees or other rotation angles. As an example, the rotating frame assembly 1 is mounted on the rotating shaft of the vacuum furnace equipment. The cargo cage turntable assembly 2 is fixedly connected to the rotating frame assembly 1 by screws. The cargo cage 3 is placed in the slots of the rotating frame assembly 1 and the cargo cage turntable assembly 2. The baffle assembly 4 is installed on the bottom plate inside the vacuum furnace by screws. The rotation of the rotating frame assembly 1 drives the cargo cage turntable assembly 2 and the cargo cage 3 to rotate synchronously without relative displacement during the rotation. The second rotating wheel 6 and the first rotating wheel 7 in the cargo cage turntable assembly 2 are both regular octagons, stacked and fixed on the first rotating shaft 5 in the cargo cage turntable assembly 2 with a 22.5° offset from each other. When the rotating frame assembly 1 drives the cargo cage turntable assembly 2 to rotate, the second rotating wheel 6 in the cargo cage turntable assembly 2 contacts the first baffle 19 in the baffle assembly 4. The second rotating wheel 6, due to the obstruction of the first baffle 19, drives the first rotating shaft 5 in the cargo cage turntable assembly 2 to rotate 22.5°. Simultaneously, the cargo cage 3 also rotates 22.5° with the first rotating shaft 5. When the second rotating wheel 6 disengages from the first baffle 19, the positioning steel ball 16 slides into the slot of the first rotating wheel 7 under the pressure of the rectangular spring 14, achieving positioning. When the cargo cage turntable assembly 2... When the first rotating wheel 7 contacts the second baffle 20 in the baffle assembly 4, the first rotating wheel 7 will rotate the first rotating shaft 5 in the cargo cage turntable assembly 2 by 22.5° due to the obstruction of the second baffle 20. At the same time, the cargo cage 3 will also rotate 22.5° with the first rotating shaft 5. When the first rotating wheel 7 disengages from the second baffle 20, the positioning steel ball 16 slides into the slot of the first rotating wheel 7 under the pressure of the rectangular spring 14 to achieve positioning. At this time, the cargo cage 3 rotates 45° after two actions, that is, the cargo cage 3 rotates 45° for every one revolution of the rotating frame assembly 1.

[0065] To address the controllability of the number of times each substrate surface in the target coating area passes through the rotating rack of a coating machine, this application provides a coating machine in some embodiments. This machine includes a vacuum furnace and the rotating rack actuation and transmission device 100 described in any embodiment, wherein the rotating rack actuation and transmission device 100 is disposed within the vacuum furnace. Because the rotating rack actuation and transmission device 100 described in any embodiment is used, the coating machine also possesses the beneficial technical effects of the rotating rack actuation and transmission device 100, which will not be elaborated upon here.

[0066] It should be noted that other embodiments of this application also include a rotating frame conveying device and a coating machine formed by combining the technical features of the above embodiments.

[0067] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0068] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A rotating frame actuation and transmission device (100), characterized in that, It includes a rotating frame assembly (1), a cargo cage turntable assembly (2), a cargo cage (3), and a baffle assembly (4). The baffle assembly (4) is disposed adjacent to the rotating frame assembly (1), and the cargo cage (3) is disposed on the cargo cage turntable assembly (2); The cargo cage turntable assembly (2) is rotatably mounted on the turntable assembly (1); When the rotating frame assembly (1) is rotating, the cargo cage turntable assembly (2) has a position that can abut against the baffle assembly (4) so ​​that when it abuts against the baffle assembly (4), it rotates relative to the rotating frame assembly (1) by a first preset angle until it disengages from the baffle assembly (4), so that the cargo cage (3) and the rotating frame assembly (1) form a preset rotation angle.

2. The rotating frame actuation and transmission device (100) according to claim 1, characterized in that, The cargo cage turntable assembly (2) includes a first rotating shaft (5) and a first rotating wheel (7) connected to each other. The first rotating shaft (5) is rotatably mounted on the rotating frame assembly (1), and the cargo cage (3) is mounted on the first rotating shaft (5); The first rotating shaft (5) passes through the first rotating wheel (7). When the rotating frame assembly (1) is rotating, the first rotating wheel (7) has a position that can abut against the baffle assembly (4). When abutting against the baffle assembly (4), it rotates relative to the rotating frame assembly (1) by a first preset angle until it disengages from the baffle assembly (4), so that the cargo cage (3) and the rotating frame assembly (1) form the preset rotation angle.

3. The rotating frame actuation and transmission device (100) according to claim 2, characterized in that, The cargo cage turntable assembly (2) also includes a second wheel (6) connected to the first rotating shaft (5), and the first rotating shaft (5) passes through the second wheel (6) and the first wheel (7) respectively. The second rotating wheel (6) is fixed relative to and offset from the first rotating wheel (7). The second rotating wheel (6) does not contact the baffle assembly (4) when the first rotating wheel (7) is in contact with the baffle assembly (4). When the first rotating wheel (7) is out of contact with the baffle assembly (4), the second rotating wheel (6) has a position that can abut against the baffle assembly (4), so that when abutting against the baffle assembly (4), it rotates relative to the rotating frame assembly (1) by a second preset angle until it is out of contact with the baffle assembly (4), thereby cooperating with the first rotating wheel (7) to make the cargo cage (3) and the rotating frame assembly (1) form the preset rotation angle.

4. The rotating frame actuation and transmission device (100) according to claim 3, characterized in that, The second rotating wheel (6) is a regular prism or the first rotating wheel (7) is a regular prism; or, Both the second rotating wheel (6) and the first rotating wheel (7) are regular octagonal prisms; or, The rotating frame actuation device (100) further includes a rotating wheel spacer (8), through which the first rotating shaft (5) passes. The second rotating wheel (6) and the first rotating wheel (7) are respectively sleeved on the outside of the rotating wheel spacer (8), and there is a gap between the second rotating wheel (6) and the first rotating wheel (7); or, The baffle assembly (4) includes a first baffle (19), a second baffle (20), an insulating component, and a mounting base (29). The first baffle (19) and the second baffle (20) are both disposed on the mounting base (29) and are insulated from the mounting base (29) by the insulating member; When the rotating frame assembly (1) is rotating, the first rotating wheel (7) has a position that can abut against the second baffle (20), so that when it abuts against the second baffle (20), it rotates relative to the rotating frame assembly (1) by a first preset angle until it disengages from the second baffle (20); The second rotating wheel (6) does not contact the second baffle (20) when the first rotating wheel (7) is in contact with the second baffle (20), and when the first rotating wheel (7) is out of contact with the second baffle (20), the second rotating wheel (6) has a position that can abut against the first baffle (19) when the rotating frame assembly (1) is rotating, so that when it abuts against the first baffle (19), it rotates relative to the rotating frame assembly (1) by a second preset angle until it is out of contact with the first baffle (19).

5. The rotating frame actuation and transmission device (100) according to claim 2, characterized in that, The rotating frame actuation transmission device (100) further includes a positioning structure, and the first rotating shaft (5) passes through the positioning structure and is axially connected to the positioning structure; The cargo cage (3) is mounted on the positioning structure to rotate synchronously with the positioning structure; The positioning structure elastically abuts against the first rotating wheel (7) and is used to elastically position itself in the positioning groove (30) of the first rotating wheel (7) when the first rotating wheel (7) is not in contact with the baffle assembly (4), so that the cargo cage (3) and the rotating frame assembly (1) form the preset rotation angle.

6. The rotating frame actuation and transmission device (100) according to claim 5, characterized in that, The positioning structure includes a spacer, a self-rotating shaft seat (12), a positioning seat (13), an elastic element (14), a pressure cap (15), a positioning steel ball (16), and a bearing pressure plate (17). The first rotating shaft (5) is axially connected to the self-rotating shaft seat (12) through the spacer, the cargo cage (3) is disposed on the bearing pressure plate (17), and the bearing pressure plate (17) is disposed on the self-rotating shaft seat (12); The positioning seat (13) is connected to the self-rotating shaft seat (12). The elastic element (14), the pressure cap (15) and the positioning steel ball (16) are all disposed in the positioning seat (13), and the positioning steel ball (16) has a portion that protrudes from the positioning seat (13). The elastic element (14) elastically abuts against the positioning steel ball (16) through the pressure cap (15), so that the positioning steel ball (16) elastically abuts against the first rotating wheel (7), and the positioning steel ball (16) is elastically positioned in the positioning groove (30) of the first rotating wheel (7) when the first rotating wheel (7) does not contact the baffle assembly (4).

7. The rotating frame actuation and transmission device (100) according to claim 6, characterized in that, The spacer includes a first spacer (9), a second spacer (10) and a third spacer (11); The self-rotating shaft seat (12) is axially connected to the first rotating shaft (5) through the first spacer (9), the second spacer (10) and the third spacer (11), and the first spacer (9), the second spacer (10) and the third spacer (11) are arranged at intervals.

8. The rotating frame actuation and transmission device (100) according to claim 1, characterized in that, The baffle assembly (4) includes a baffle (19, 20), an insulating component, and a mounting base (29). The baffles (19, 20) are disposed on the mounting base (29) and are insulated from the mounting base (29) by the insulating member; The cargo cage turntable assembly (2) has a position that can abut against the baffle (19, 20) when the turntable assembly (1) is rotating.

9. The rotating frame actuation and transmission device (100) according to claim 8, characterized in that, The number of the baffle assembly (4) is at least two, or the baffle assembly (4) has at least two of the baffles (19, 20); or, The insulating components include a first insulating plate (21), a second insulating plate (22), a third insulating plate (23), and an insulating sleeve (24). The baffles (19, 20) are mounted on the mounting base (29) by hex socket screws (27); The insulating sleeve (24) is provided between the hex socket screw (27) and the baffle (19, 20). The baffle assembly (4) provides a washer (25) and a spring washer (26) between the hex socket screw (27) and the mounting base (29). The hex socket screw (27) passes through the washer (25), the spring washer (26) and the insulating sleeve (24) in sequence, and then is screwed to the mounting base (29). The first insulating plate (21), the second insulating plate (22) and the third insulating plate (23) are respectively arranged around the baffle (19, 20).

10. A coating machine, characterized in that, It includes a vacuum furnace device and a rotating frame actuation and transmission device (100) as described in any one of claims 1 to 9, wherein the rotating frame actuation and transmission device (100) is disposed in the vacuum furnace device.

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