High-temperature electrical property test fixture for ceramics
By designing a high-temperature electrical performance testing fixture for ceramics and utilizing a combination of high-temperature resistant insulating materials and electrode components, the reliability and accuracy issues of high-temperature electrical performance testing for ceramic materials were solved, enabling accurate testing of high-temperature resistivity RV, dielectric constant ε, dielectric loss tanθ, and dielectric breakdown strength Eb.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JUNYUAN ELECTRONIC TECHNOLOGY (HAINING) CO LTD
- Filing Date
- 2025-05-15
- Publication Date
- 2026-05-05
AI Technical Summary
Existing technologies have poor reliability in testing the high-temperature electrical properties of ceramic materials, especially high-temperature resistivity RV, dielectric constant ε, dielectric loss tanθ, and dielectric breakdown strength Eb, and are not easy to operate.
A high-temperature electrical performance testing fixture for ceramics was designed, including an upper cover assembly and a lower base assembly. The assemblies are made of high-temperature resistant insulating material and are equipped with an upper circular electrode, a ring electrode, and a lower circular electrode. These electrode assemblies are connected to the testing equipment to ensure reliable current conduction and accurate testing.
This improves the accuracy and efficiency of high-temperature volume resistivity testing, ensuring the reliability and accuracy of test data.
Smart Images
Figure CN224203249U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of fixture technology, and in particular to a high-temperature electrical performance testing fixture for ceramics. Background Technology
[0002] Devices made from high-temperature resistant functional ceramic materials are widely used in semiconductor equipment, typically operating in environments above 500°C. Semiconductor equipment such as PVD and CVD heaters impose extremely stringent performance requirements on these devices, especially regarding high-temperature electrical properties such as resistivity RV, dielectric constant ε, dielectric loss tanθ, and dielectric breakdown strength Eb. Therefore, obtaining more comprehensive, reliable, and accurate high-temperature electrical properties of functional ceramic materials has become a pressing problem to be solved.
[0003] Currently, small and micro enterprises and universities use the following method to test the electrical properties of ceramic materials: Ag / Pt paste is screen-printed onto the test sample, a layer of conductive electrode is deposited by high-temperature sintering, and then the test equipment is connected. However, the reliability of this method for testing high-temperature resistivity RV is poor because leakage current on the sample surface cannot be absorbed, resulting in lower test data. At the same time, this method is not easy to operate when testing high-temperature dielectric constant ε, dielectric loss tanθ, and dielectric breakdown strength Eb. Summary of the Invention
[0004] The technical problem to be solved by this utility model is to provide a high-temperature electrical performance testing fixture for ceramics, so as to solve the problems mentioned in the background art.
[0005] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:
[0006] A high-temperature electrical performance testing fixture for ceramics, comprising:
[0007] The upper cover assembly includes an upper cover body, and an upper circular electrode assembly and an annular electrode assembly are provided on one side of the upper cover body;
[0008] The lower base assembly cooperates with the upper cover assembly in the vertical direction. The lower base assembly includes a lower base body, on which a lower circular electrode assembly is provided. The circular ceramic to be tested is placed between the upper circular electrode assembly, the annular electrode assembly, and the lower circular electrode assembly.
[0009] Preferably, the upper circular electrode assembly includes an upper circular electrode and a first terminal connected to the upper circular electrode. The end of the first terminal away from the upper circular electrode is connected to a first connecting line, and the upper cover body is provided with a first connecting hole for cooperating with the first terminal.
[0010] Preferably, the annular electrode assembly includes an annular electrode and a second terminal connected to the annular electrode, with a second connecting line connected to the end of the second terminal away from the annular electrode, and the upper cover body is provided with a second connecting hole for cooperating with the second terminal.
[0011] Preferably, a separating annular protrusion is provided between the upper circular electrode and the annular electrode, and the thickness of the upper circular electrode is equal to the thickness of the annular electrode.
[0012] Preferably, the lower circular electrode assembly includes a lower circular electrode and a third terminal connected to the lower circular electrode. The end of the third terminal away from the lower circular electrode is provided with a third connecting line, and the lower base body is provided with a third connecting hole that mates with the third terminal.
[0013] Preferably, the upper cover body is provided with a lower annular protrusion on the side facing the lower base body, and the lower base body is provided with an upper annular protrusion on the side facing the upper cover body, and the lower annular protrusion is aligned with the upper annular protrusion.
[0014] Preferably, the inner ring of the lower annular protrusion is aligned with the outer ring of the circular ceramic to be tested, and the sum of the heights of the lower annular protrusion and the upper annular protrusion is less than or equal to the sum of the heights of the circular ceramic to be tested, the upper circular electrode, and the lower circular electrode.
[0015] The above technical solution has the following beneficial effects:
[0016] The technical solution of this application improves the accuracy of high-temperature volume resistivity testing by setting up an upper circular electrode assembly, an annular electrode assembly, and a lower circular electrode assembly. By setting up an upper cover body and a lower base body, the processing is simple, the preparation is easy, and the testing efficiency is improved. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of the structure for testing the high-temperature electrical properties of ceramics using existing technology.
[0018] Figure 2 This is a cross-sectional structural schematic diagram of the high-temperature electrical performance testing fixture for ceramics according to this utility model;
[0019] Figure 3 This is a cross-sectional view of the upper cover assembly of this utility model;
[0020] Figure 4 This is a cross-sectional view of the lower base assembly of this utility model;
[0021] Figure 5 This is a cross-sectional structural diagram of the upper cover body of this utility model;
[0022] Figure 6 This is a top view of the structure of the upper cover body of this utility model;
[0023] Figure 7 This is a cross-sectional structural diagram of the lower base body of this utility model;
[0024] Figure 8 This is a top view of the lower base body of this utility model. Detailed Implementation
[0025] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that these descriptions are for the purpose of aiding understanding of this utility model, but do not constitute a limitation thereof. Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.
[0026] Currently, for small and micro enterprises and universities, the following methods are used to test the electrical properties of ceramic materials: (Reference) Figure 1 Ag / Pt paste is screen-printed onto both sides of the circular ceramic 15 to be tested, and then an upper conductive electrode 19 and a lower conductive electrode 20 are deposited by high-temperature sintering. The test equipment is then connected through upper connecting line 21 and lower connecting line 22. However, the reliability of testing the high-temperature resistivity RV using this method is poor because there will be leakage current on the sample surface that cannot be absorbed, resulting in lower test data. At the same time, it is not easy to operate this method to test the high-temperature dielectric constant ε, dielectric loss tanθ, and dielectric breakdown strength Eb.
[0027] To address the aforementioned technical problems, this application discloses a high-temperature electrical performance testing fixture for ceramics, with reference to... Figures 2-8 The fixture includes:
[0028] The upper cover assembly includes an upper cover body 1, and an upper circular electrode assembly and an annular electrode assembly are provided on one side of the upper cover body 1.
[0029] The lower base assembly is matched with the upper cover assembly in the vertical direction. The lower base assembly includes a lower base body 6, on which a lower circular electrode assembly is provided. The circular ceramic to be tested 15 is placed between the upper circular electrode assembly, the annular electrode assembly and the lower circular electrode assembly.
[0030] Specifically, the upper cover assembly and the lower base assembly cooperate in the vertical direction to sandwich the circular ceramic 15 to be tested between them. The circular ceramic 15 to be tested is tested through the upper circular electrode assembly, the ring electrode assembly, and the lower circular electrode assembly. The upper cover body 1 and the lower base body 6 are made of the same material, which is a high-temperature resistant insulating material such as alumina or zirconium oxide. The circular ceramic 15 to be tested is a disc-shaped structure made of high-temperature resistant functional ceramic material.
[0031] Specifically, the testing method is as follows:
[0032] For high-temperature volume resistivity testing, install the equipment and the circular ceramic to be tested 15. Then, place the device in a high-temperature furnace. Connect the third connecting wire 18 to the high-voltage positive terminal of the test meter, and connect the first connecting wire 17 and the second connecting wire 16 to the low-voltage negative terminal of the test meter to obtain the test results.
[0033] To test the high-temperature dielectric constant ε and dielectric loss tanθ, install the equipment and the circular ceramic to be tested 15, then place it in the high-temperature furnace. Connect the first connecting line 17 and the third connecting line 18 to the LCR digital meter.
[0034] For the high-temperature dielectric breakdown strength Eb test, install the equipment and the circular ceramic to be tested 15, then place it in the high-temperature furnace. Connect the first connecting wire 17 and the third connecting wire 18 to the high voltage, gradually increase the voltage, and record the breakdown data.
[0035] In some embodiments, the upper circular electrode assembly includes an upper circular electrode 11 and a first terminal 10 connected to the upper circular electrode 11. The end of the first terminal 10 away from the upper circular electrode 11 is connected to a first connecting line 17. The upper cover body 1 is provided with a first connecting hole 5 for cooperating with the first terminal 10.
[0036] Specifically, the upper circular electrode 11 is connected to an external testing device via the first terminal 10 and the first connecting line 17 to test the circular ceramic 15 to be tested. The first terminal 10 is made of a material such as silver or platinum. The upper circular electrode 11 is located on the side of the upper cover body 1 facing the lower base body 6, and can be bonded to the upper cover body 1. The upper cover body 1 is provided with a first connecting hole 5 for mounting the first terminal 10. The first terminal 10 is installed through the first connecting hole 5, and its other end is connected to the first connecting line 17. The bottom of the first terminal 10 is flush with the bottom side wall of the upper cover body 1, and the upper end can extend beyond the upper side wall of the upper cover body 1 to facilitate wiring with the first connecting line 17.
[0037] In some embodiments, the annular electrode assembly includes an annular electrode 12 and a second terminal 9 connected to the annular electrode 12. The end of the second terminal 9 away from the annular electrode 12 is connected to a second connecting line 16. The upper cover body 1 is provided with a second connecting hole 4 for cooperating with the second terminal 9.
[0038] Specifically, the annular electrode 12 is connected to external testing equipment via the second terminal 9 and the second connecting line 16 to test the circular ceramic 15 to be tested. Similarly, the manufacturing material of the second terminal 9 is the same as that of the first terminal 10, which is silver or platinum. The length and size of the second terminal 9 can be consistent with those of the first terminal 10 for easy manufacturing. The second terminal 9 is set in the second connecting hole 4, which is through in the vertical direction. One end of the second terminal 9 is connected to the annular electrode 12, and the other end extends beyond the upper side wall of the upper cover body 1. The annular electrode 12 has an annular structure and is set on the same side as the upper circular electrode 11, surrounding the upper circular electrode 11. That is, the inner diameter of the annular electrode 12 is larger than the diameter of the upper circular electrode 11.
[0039] In some embodiments, a separating annular protrusion 3 is provided between the upper circular electrode 11 and the annular electrode 12, and the thickness of the upper circular electrode 11 is equal to the thickness of the annular electrode 12.
[0040] Specifically, the upper circular electrode 11 is separated from the ring electrode 12 by a separating annular protrusion 3. The material of the separating annular protrusion 3 is the same as that of the upper cover body 1, which is a high-temperature resistant insulating material such as alumina or zirconium oxide. By setting the separating annular protrusion 3, the positions of the upper circular electrode 11 and the ring electrode 12 can be restricted, making it easier to match their positions. It can also prevent the upper circular electrode 11 and the ring electrode 12 from communicating with each other. Specifically, the upper circular electrode 11 and the ring electrode 12 can be connected to the upper cover body 1 by adhesive bonding.
[0041] In some embodiments, the lower circular electrode assembly includes a lower circular electrode 13 and a third terminal 14 connected to the lower circular electrode 13. The end of the third terminal 14 away from the lower circular electrode 13 is provided with a third connecting line 18, and the lower base body 6 is provided with a third connecting hole 8 that cooperates with the third terminal 14.
[0042] Specifically, the lower circular electrode 13 is connected to external testing equipment via the third terminal 14 and the third connecting line 18. The third connecting hole 8 is set vertically and passes through the lower base body 6. The third connecting line 18 is located at the bottom of the lower base body 6. The diameter of the lower circular electrode 13 can be the same as the outer diameter of the ring electrode 12. In use, several support columns can also be set at the bottom of the lower base body 6 to raise the lower base body 6 and leave space for the third connecting line 18 for easy connection. Alternatively, the lower base body 6 can be placed on a platform with an opening, and the end of the third terminal 14 extends into the hole of the platform. The third connecting line 18 enters the lower part of the platform through the hole.
[0043] In some embodiments, the upper cover body 1 is provided with a lower annular protrusion 2 on the side facing the lower base body 6, and the lower base body 6 is provided with an upper annular protrusion 7 on the side facing the upper cover body 1, with the lower annular protrusion 2 and the upper annular protrusion 7 aligned.
[0044] Specifically, by setting the lower annular protrusion 2, the position of the annular electrode 12 is restricted between the lower annular protrusion 2 and the annular protrusion 3. The material of the lower annular protrusion 2 is the same as that of the upper cover body 1, which is a high-temperature resistant insulating material such as alumina or zirconium oxide. The lower annular protrusion 2 can be integrally formed with the upper cover body 1. The lower base body 6 is provided with an upper annular protrusion 7. Similarly, the material of the upper annular protrusion 7 is the same as that of the lower base body 6, and it can also be integrally formed. By setting the upper annular protrusion 7, the position of the lower circular electrode 13 is restricted, and because it is a high-temperature insulating material, the accuracy of the test is ensured.
[0045] In some embodiments, the inner ring of the lower annular protrusion 2 is aligned with the outer ring of the circular ceramic 15 to be tested, and the sum of the heights of the lower annular protrusion 2 and the upper annular protrusion 7 is less than or equal to the sum of the heights of the circular ceramic 15 to be tested, the upper circular electrode 11, and the lower circular electrode 13.
[0046] Specifically, after aligning the lower annular protrusion 2 and the upper annular protrusion 7, the circular ceramic to be tested 15 needs to be placed inside. After the circular ceramic to be tested 15 is placed inside, if the sum of the heights of the lower annular protrusion 2 and the upper annular protrusion 7 is equal to the sum of the heights of the circular ceramic to be tested 15, the upper circular electrode 11, and the lower circular electrode 13, then the lower annular protrusion 2 and the upper annular protrusion 7 will contact each other. If the sum of the heights of the lower annular protrusion 2 and the upper annular protrusion 7 is less than the sum of the heights of the circular ceramic to be tested 15, the upper circular electrode 11, and the lower circular electrode 13, then there will be a certain gap between the lower annular protrusion 2 and the upper annular protrusion 7 after the circular ceramic to be tested 15 is placed inside, but this will not affect the test.
[0047] The technical solution of this application improves the accuracy of high-temperature volume resistivity testing by setting up an upper circular electrode assembly, an annular electrode assembly and a lower circular electrode assembly. By setting up an upper cover body 1 and a lower base body 6, the processing is simple, the preparation is easy, and the testing efficiency is improved.
[0048] The embodiments of this utility model have been described in detail above with reference to the accompanying drawings, but this utility model is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of this utility model, and these variations still fall within the protection scope of this utility model.
Claims
1. A high-temperature electrical performance testing fixture for ceramics, characterized in that, include: The upper cover assembly includes an upper cover body (1), and an upper circular electrode assembly and an annular electrode assembly are provided on one side of the upper cover body (1). The lower base assembly is configured to cooperate with the upper cover assembly in the vertical direction. The lower base assembly includes a lower base body (6) and a lower circular electrode assembly is provided on the lower base body (6). The circular ceramic to be tested (15) is placed between the upper circular electrode assembly, the annular electrode assembly and the lower circular electrode assembly.
2. The high-temperature electrical performance testing fixture for ceramics according to claim 1, characterized in that, The upper circular electrode assembly includes an upper circular electrode (11) and a first terminal (10) connected to the upper circular electrode (11). The end of the first terminal (10) away from the upper circular electrode (11) is connected to a first connecting line (17). The upper cover body (1) is provided with a first connecting hole (5) for cooperating with the first terminal (10).
3. A high-temperature electrical performance testing fixture for ceramics according to claim 2, characterized in that, The annular electrode assembly includes an annular electrode (12) and a second terminal (9) connected to the annular electrode (12). A second connecting line (16) is connected to one end of the second terminal (9) away from the annular electrode (12). The upper cover body (1) is provided with a second connecting hole (4) for cooperating with the second terminal (9).
4. A high-temperature electrical performance testing fixture for ceramics according to claim 3, characterized in that, A separating annular protrusion (3) is provided between the upper circular electrode (11) and the annular electrode (12), and the thickness of the upper circular electrode (11) is equal to the thickness of the annular electrode (12).
5. A high-temperature electrical performance testing fixture for ceramics according to claim 3, characterized in that, The lower circular electrode assembly includes a lower circular electrode (13) and a third terminal (14) connected to the lower circular electrode (13). The end of the third terminal (14) away from the lower circular electrode (13) is provided with a third connecting line (18). The lower base body (6) is provided with a third connecting hole (8) that cooperates with the third terminal (14).
6. A high-temperature electrical performance testing fixture for ceramics according to claim 5, characterized in that, The upper cover body (1) is provided with a lower annular protrusion (2) on the side facing the lower base body (6), and the lower base body (6) is provided with an upper annular protrusion (7) on the side facing the upper cover body (1). The lower annular protrusion (2) and the upper annular protrusion (7) are aligned.
7. A high-temperature electrical performance testing fixture for ceramics according to claim 6, characterized in that, The inner ring of the lower annular protrusion (2) is aligned with the outer ring of the circular ceramic (15) to be tested. The sum of the heights of the lower annular protrusion (2) and the upper annular protrusion (7) is less than or equal to the sum of the heights of the circular ceramic (15), the upper circular electrode (11), and the lower circular electrode (13).