Tray position detection mechanism and film growing device

Abstract

The utility model discloses a tray position detection mechanism and a thin film growth device, and relates to the technical field of thin film growth equipment. The tray position detection mechanism comprises a bearing assembly and a detection assembly, the bearing assembly comprises a carrying table, the detection assembly comprises a signal transmitting piece and a signal receiving piece, the signal transmitting piece and the signal receiving piece are oppositely arranged in a spaced mode, a signal channel is formed between the signal transmitting piece and the signal receiving piece, and at least part of the carrying table is located in the signal channel. The carrying platform is used for placing the tray and driving the tray to rotate, and in the rotating process, when the tray is not placed correctly, part of the area of the signal channel is blocked by the tray, so that signals received by the signal receiving part change. The tray position detection mechanism provided by the utility model can detect whether the tray is flatly placed on the carrying table or not, so that the position of the tray can be conveniently adjusted in time, the cost loss caused by unqualified grown films is reduced, and time and materials are saved.

Description

Technical Field

[0001] This application relates to the field of thin film growth equipment technology, and in particular to a tray position detection mechanism and a thin film growth device. Background Technology

[0002] Thin film growth equipment is widely used in material preparation processes in fields such as semiconductors and photovoltaics, with its core component being the high-temperature reaction chamber. Modern thin film growth equipment uses robotic arms to automatically transfer substrates and trays between the transfer chamber and the reaction chamber. During operation, the tray carrying the substrate needs to be precisely placed in a specific position within the reaction chamber to improve the uniformity and consistency of thin film growth.

[0003] Once the high-temperature reaction chamber is fully installed and in normal working order, operators cannot visually determine whether the tray is accurately positioned. In practice, it is usually necessary to wait until the thin film growth process is complete, then remove the tray and substrate from the transfer chamber together. Only by visually observing or using instruments to test parameters such as the thickness distribution and crystal quality of the thin film on the substrate surface can the accuracy of the tray's placement within the reaction chamber be indirectly inferred. This post-hoc verification method is not only inefficient, but also results in a waste of materials and time by the time a positional deviation is discovered. Utility Model Content

[0004] In view of this, this application provides a tray position detection mechanism and a film growth apparatus, with the aim of solving one of the technical problems in the prior art.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0006] In a first aspect, this application provides a pallet position detection mechanism, comprising:

[0007] Support components, including the platform;

[0008] The detection component includes a signal transmitter and a signal receiver, the signal transmitter and the signal receiver being arranged at a distance from each other and forming a signal channel between them. The platform is at least partially located within the signal channel. The platform is used to place a tray and drive the tray to rotate. During the rotation, when the tray is not properly positioned, a portion of the signal channel is blocked by the tray, causing a change in the signal received by the signal receiver.

[0009] A prompting element is connected to the signal receiver, and the prompting element is used to indicate whether the tray is placed correctly according to the signal emitted by the signal receiver.

[0010] In an optional embodiment, the signal transmitter includes a plurality of light emitters arranged in an array along a first direction, and the light beams emitted by the plurality of light emitters form the signal channel;

[0011] The signal receiver includes a plurality of optical receivers arranged in an array along a first direction, with a beam of light emitted by one optical transmitter corresponding to one optical receiver.

[0012] In an optional embodiment, the platform has a top surface for placing a tray, and a plurality of light emitters are disposed on both sides of the top surface in the first direction, and correspondingly, a plurality of light receivers are disposed on both sides of the top surface in the first direction.

[0013] In an optional embodiment, the support assembly further includes a drive member connected to the side of the platform away from the top surface, the drive member driving the platform to rotate.

[0014] In an optional embodiment, the top surface includes a main surface, an annular surface, and a connecting surface. The annular surface is disposed around the periphery of the main surface and spaced apart from the main surface. The connecting surface connects the outer edge of the main surface and the inner edge of the annular surface. In the first direction, the distance between the annular surface and the driving member is smaller than the distance between the main surface and the driving member.

[0015] In an alternative implementation, the top surface is completely located within the signal channel in the first direction.

[0016] Secondly, this application provides a thin film growth apparatus, comprising:

[0017] The pallet position detection mechanism described in any of the foregoing embodiments;

[0018] The reaction chamber is provided with an air inlet pipe and a transmission pipe. The platform is located inside the transmission pipe. The air inlet pipe is located on the side of the transmission pipe away from the driving component. A communication port is opened on the side of the air inlet pipe close to the transmission pipe. The top surface of the platform faces the communication port. The signal transmitter and the signal receiver are respectively located on the periphery of the transmission pipe, and the signal channel is formed inside the transmission pipe.

[0019] In an optional embodiment, the thin film growth apparatus further includes a transmission cavity that is connected to the transmission pipeline, a signal receiver being disposed on the side of the transmission pipeline near the transmission cavity, and a signal transmitter being disposed on the side of the transmission pipeline away from the transmission cavity.

[0020] In an optional embodiment, the thin film growth apparatus further includes a telescopic arm that extends into the transfer conduit to adjust the tray position.

[0021] In an optional embodiment, the thin film growth apparatus further includes a housing, the reaction chamber is disposed within the housing, and the signal receiver, the signal transmitter, the telescopic arm, and the transmission cavity are all located outside the housing.

[0022] Compared to existing technologies, the advantages of this application are as follows: This application proposes a pallet position detection mechanism, including a supporting component, a detection component, and a prompting component. The supporting component includes a platform, and the detection component includes a signal transmitter and a signal receiver. The signal transmitter and receiver are arranged at a distance from each other, forming a signal channel. The platform is at least partially located within the signal channel and is used to place the pallet and rotate it. During rotation, when the pallet is not properly positioned, a portion of the signal channel is blocked by the pallet, causing a change in the signal received by the signal receiver. The prompting component is signal-connected to the signal receiver and is used to indicate whether the pallet is properly positioned based on the signal emitted by the signal receiver. When the pallet is placed flat, the signal path within the signal channel is not blocked, resulting in a constant or minimal change in the signal and value received by the signal receiver. When the pallet is not placed flat, a portion of the signal path within the signal channel is blocked, causing a significant change in the signal and value received by the signal receiver. The prompting component indicates whether the pallet is not flat or is in a flat position based on the magnitude of the change in the signal received by the signal receiver. In this way, by checking and indicating whether the tray is placed flat on the platform before the reaction begins, the position of the tray can be adjusted in a timely manner, reducing cost losses caused by unqualified grown films and saving time and materials. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This paper shows one of the structural schematic diagrams of the pallet position detection mechanism in some embodiments of this application;

[0025] Figure 2 This is shown as a second schematic diagram of the pallet position detection mechanism in some embodiments of this application;

[0026] Figure 3 This is shown as the third of three structural schematic diagrams of the pallet position detection mechanism in some embodiments of this application;

[0027] Figure 4 The following are schematic diagrams of the reaction chamber structure in some embodiments of this application;

[0028] Figure 5 A schematic diagram of the thin film growth apparatus in some embodiments of this application is shown.

[0029] Key component symbols: 200-Tray; 300-Substrate; 100-Tray position detection mechanism; 110-Bearing assembly; 111-Stage; 112-Driver; 120-Detection assembly; 121-Signal transmitter; 122-Signal receiver; 123-Signal channel; 1111-Top surface; 11111-Main body surface; 11112-Annular surface; 11113-Connecting surface; 210-Groove; 1000-Thin film growth device; 400-Reaction chamber; 410-Insulation component; 420-Heating component; 430-Side plate; 440-Inlet pipe; 450-Transmission pipe; 441-Connecting port; 500-Transmission chamber; 600-Telescopic arm; 700-Housing; D1-First direction; D2-Second direction. Detailed Implementation

[0030] The embodiments of this application are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0031] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0033] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0034] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0035] like Figure 1 and Figure 2 As shown, a substrate 300 is placed on the upper surface of the tray 200, and the surface of the substrate 300 is used for growing a thin film. When the tray 200 is not placed flat, the surface of the substrate 300 is tilted, resulting in uneven film growth.

[0036] Modern thin film growth equipment uses robotic arms to automatically transfer substrates and trays between the transfer chamber and the reaction chamber. The following are some situations that may cause the tray to not land accurately on the stage:

[0037] When the robotic arm transfers the tray containing the substrate from the transfer chamber into the reaction chamber, vibration is inevitable. In severe cases, the tray may detach from its original position and fail to align with the stage inside the reaction chamber. Furthermore, due to the high temperature inside the reaction chamber, the tray on the robotic arm may shift as it expands with the temperature increase. Moreover, the accuracy of the robotic arm's transfer gradually deteriorates over time. Currently, the reaction chamber structure cannot determine whether the tray is placed flat on the stage surface inside the reaction chamber.

[0038] In response to the above problems, such as Figure 1 As shown, an embodiment of this application provides a pallet position detection mechanism 100, which is mainly used to detect and indicate whether the pallet 200 is placed flat on the surface of the platform 111.

[0039] The pallet position detection mechanism 100 includes a load-bearing component 110, a detection component 120, and a prompting element (not shown).

[0040] The carrier component 110 includes a platform 111, and the detection component 120 includes a signal transmitter 121 and a signal receiver 122. The signal transmitter 121 and the signal receiver 122 are arranged at a distance from each other, and a signal channel 123 is formed between them. The platform 111 is at least partially located within the signal channel 123. The platform 111 is used to place the tray 200 and rotate the tray 200. During rotation, when the tray 200 is not properly positioned, a portion of the signal channel 123 is blocked by the tray 200, causing a change in the signal received by the signal receiver 122. A prompting component is signal-connected to the signal receiver 122 and is used to indicate whether the tray 200 is properly positioned based on the signal emitted by the signal receiver. When the tray 200 is placed flat, the signal path within the signal channel 123 is not blocked, ensuring that the signal and its value received by the signal receiver 122 (e.g., the value of the luminous flux received by the signal receiver when infrared light is used as the signal) remain unchanged or change only slightly. When the tray 200 is not placed flat, part of the signal path within the signal channel 123 is blocked, causing a large change in the signal and its value received by the signal receiver 122 (e.g., the value of the luminous flux received by the signal receiver when infrared light is used as the signal). The indicator message indicates whether the tray 200 is not placed flat or is in a flattened position based on the magnitude of the change in the signal received by the signal receiver 122. By detecting and indicating whether the tray 200 is placed flat on the stage 111, the position of the tray 200 can be adjusted in a timely manner, reducing cost losses caused by unqualified grown films and saving time and materials.

[0041] The detection component 120 includes a signal processor (not shown), which processes the signal received by the signal receiver 122 into a waveform curve. For example, when the tray 200 is placed flat, the waveform is a basically flat line; when the tray 200 is not placed flat, the waveform is in the form of a sine or cosine.

[0042] In one embodiment, the processor uses an amplifier NPN output with a monitor output to convert the signal into a waveform signal.

[0043] The indicator uses Keyence amplifiers with NPN output, such as the LV-N1 series amplifiers with single-channel, dual-channel (LV-N11CN / LV-N12CN), (LV-N11N / LV-N12N) / monitor (LV-N11MN) outputs, which can output signals to indicate whether the tray 200 is placed flat.

[0044] In some implementations, such as Figures 1 to 3 As shown, the signal transmitter 121 includes multiple light transmitters, which are arranged in an array along the first direction D1, and the light beams emitted by the multiple light transmitters form a signal channel 123.

[0045] It should be noted that the first direction D1 is the axial direction of the stage 111, and the second direction D2 is the horizontal direction or the direction of the light beam emitted by the light emitter. The first direction D1 and the second direction D2 are perpendicular.

[0046] In some implementations, such as Figures 1 to 3 As shown, the signal receiver 122 includes a plurality of optical receivers arranged in an array along a first direction D1, and a beam of light emitted by one optical transmitter is directed into one optical receiver.

[0047] Multiple light emitters emit parallel beams or intersecting beams, forming a signal channel 123 in the area containing these beams. When the tray 200 is not placed flat on the stage 111, some beams are blocked, resulting in signal loss received by the signal receiver 122 (e.g., ...). Figure 2 and Figure 3 The central beam displayed is obstructed by the uneven tray 200, resulting in a false signal.

[0048] For example, the signal transmitter 121 uses the transmitter of a Keyence LV-NH100 laser sensor, and the signal receiver 122 uses the receiver of a Keyence LV-NH100 laser sensor.

[0049] In some implementations, such as Figures 1 to 3 As shown, the stage 111 has a top surface 1111 for placing the tray 200, and a plurality of light emitters are disposed on both sides of the top surface 1111 in the first direction D1. Correspondingly, a plurality of light receivers are disposed on both sides of the top surface 1111 in the first direction D1.

[0050] See also Figure 2 and Figure 3 When the tray 200 is not placed flat on the platform 111, a height difference exists between the two ends of the tray 200 in the first direction D1. Multiple light emitters are positioned on both sides of the top surface 1111 in the first direction D1. In this way, part of the signal emitting element 121 extends below the tray 200, so that the tray 200 is within the signal channel 123. This avoids the situation where the signal channel 123 floats entirely above the tray 200, making it impossible to accurately detect the position of the tray 200, thus improving the accuracy of detection.

[0051] It should be noted that, in one embodiment, the light receiver and the light emitter are located on the same side, and a light emitter is provided at the original position of the light receiver to increase the area of ​​the signal channel 123, so that the detection component 120 can detect more quickly and accurately.

[0052] In some implementations, such as Figure 5As shown, the carrier component 110 also includes a drive component 112, which is connected to the side of the stage 111 away from the top surface 1111. The drive component 112 drives the stage 111 to rotate around the axis, so that the film growth thickness is uniform.

[0053] In some implementations, such as Figure 3 As shown, the top surface 1111 includes the main surface 11111, the annular surface 11112, and the connecting surface 11113.

[0054] The annular surface 11112 is arranged around the periphery of the main surface 11111 and spaced apart from it. The connecting surface 11113 connects the outer edge of the main surface 11111 and the inner edge of the annular surface 11112. In the first direction D1, the distance between the annular surface 11112 and the driving member 112 is smaller than the distance between the main surface 11111 and the driving member 112. A groove 210 is formed on the bottom surface of the tray 200, and the shape of the groove 210 matches the shape of the top surface 1111. When the tray 200 is placed flat on the stage 111, the groove 210 on the bottom of the tray 200 engages with the top surface 1111, making the surface of the tray 200 horizontal. The groove 210 on the bottom surface of the tray 200 fits into the convex top surface 1111 on the top of the stage 111, preventing the tray 200 from shifting when the stage 111 rotates, thus improving the success rate of film growth.

[0055] In some embodiments, in the first direction D1, the top surface 1111 is completely within the signal channel 123. This allows the tray 200 to be located more within the signal channel 123.

[0056] This application provides a thin film growth apparatus 1000, including a tray position detection mechanism 100 and a reaction chamber 400 as described in any of the foregoing embodiments. For example... Figure 4 As shown, the reaction chamber 400 is roughly in the shape of a hollow cylinder.

[0057] like Figure 4 The reaction chamber 400 includes a hollow cylindrical heat insulation component 410, a heating component 420 disposed on the inner wall of the heat insulation component 410, and side plates 430 sealed at both ends of the heat insulation component 410.

[0058] The reaction chamber 400 is provided with an air inlet pipe 440 and a transmission pipe 450. The ends of the air inlet pipe 440 and the transmission pipe 450 are respectively connected to the side plate 430. The air inlet pipe 440 and the transmission pipe 450 are connected along the second direction D2.

[0059] The stage 111 is located within the transfer conduit 450 to reduce interference from the air intake on the position of the tray 200. The air intake conduit 440 is located on the side of the transfer conduit 450 away from the drive unit 112, such as... Figure 5As shown, the air inlet pipe 440 is located above the transfer pipe 450, which makes the film growth more uniform. Both the transfer pipe 450 and the air inlet pipe 440 are located upstream of the reaction chamber 400, and the transfer pipe 450 and the air inlet pipe 440 are separated vertically. The transfer channel is cleaner than the position located downstream of the reaction chamber 400, and is less affected by falling objects during transfer.

[0060] The intake pipe 440 has a connecting port 441 on the side near the transmission pipe 450. The top surface 1111 of the platform 111 faces the connecting port 441. The signal transmitter 121 and the signal receiver 122 are respectively located on the periphery of the transmission pipe 450, and the signal channel 123 is formed inside the transmission pipe 450, making the combination structure of the detection component 120 and the reaction chamber 400 more compact.

[0061] In one embodiment, the thin film growth apparatus 1000 further includes a transfer cavity 500.

[0062] like Figure 5 As shown, the transmission cavity 500 is connected to the transmission pipeline 450. The signal receiver 122 is located on the side of the transmission pipeline 450 close to the transmission cavity 500, and the signal transmitter 121 is located on the side of the transmission pipeline 450 away from the transmission cavity 500.

[0063] In some implementations, such as Figure 5 As shown, the thin film growth apparatus 1000 also includes a telescopic arm 600, which is used to move the tray 200 from the transfer cavity 500 to the stage 111 in the transfer pipe. The telescopic arm 600 is also used to extend into the transfer pipe 450 to adjust the position of the tray 200. After the adjustment is completed, the telescopic arm 600 retracts into the transfer cavity 500.

[0064] In one embodiment, a camera is mounted at the end of the telescopic arm 600 to capture images of the position of the tray 200 within the transmission pipeline 450 and transmit the captured information to an external device. This allows the operator to quickly adjust the position of the tray 200 based on the camera's feedback. Once the tray 200 has been adjusted, the camera is removed from the reaction chamber to prevent damage from high temperatures.

[0065] In some implementations, such as Figure 5 As shown, the thin film growth apparatus 1000 also includes a housing 700, with a reaction chamber 400 located inside the housing 700. The signal receiver 122, the signal transmitter 121, the telescopic arm 600, and the transmission chamber 500 are all located outside the housing 700, which helps to extend the service life and facilitate maintenance.

[0066] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0067] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A tray position detecting mechanism characterized by comprising: include: Support components, including the platform; The detection component includes a signal transmitter and a signal receiver, the signal transmitter and the signal receiver being arranged at a distance from each other and forming a signal channel between them. The platform is at least partially located within the signal channel. The platform is used to place a tray and drive the tray to rotate. During the rotation, when the tray is not properly positioned, a portion of the signal channel is blocked by the tray, causing a change in the signal received by the signal receiver. A prompting device is connected to the signal receiver, and the prompting device is used to indicate whether the tray is placed correctly according to the signal emitted by the signal receiver.

2. The tray position detecting mechanism according to claim 1, characterized by The signal transmitter includes multiple light emitters, which are arranged in an array along a first direction, and the light beams emitted by the multiple light emitters form the signal channel; The signal receiver includes a plurality of optical receivers arranged in an array along a first direction, with a beam of light emitted by one optical transmitter corresponding to one optical receiver.

3. The pallet position detection mechanism according to claim 2, characterized in that, The platform has a top surface for placing a tray, and a plurality of light emitters are disposed on both sides of the top surface in the first direction, and correspondingly, a plurality of light receivers are disposed on both sides of the top surface in the first direction.

4. The pallet position detection mechanism according to claim 3, characterized in that, The support assembly also includes a drive component, which is connected to the side of the platform away from the top surface, and the drive component drives the platform to rotate.

5. The pallet position detection mechanism according to claim 4, characterized in that, The top surface includes a main surface, an annular surface, and a connecting surface. The annular surface is arranged around the periphery of the main surface and spaced apart from the main surface. The connecting surface connects the outer edge of the main surface and the inner edge of the annular surface. In the first direction, the distance between the annular surface and the driving member is smaller than the distance between the main surface and the driving member.

6. The pallet position detection mechanism according to claim 4, characterized in that, In the first direction, the top surface is completely located within the signal channel.

7. A thin film growth apparatus, characterized in that, include: The pallet position detection mechanism according to any one of claims 4 to 6; The reaction chamber is provided with an air inlet pipe and a transmission pipe. The platform is located inside the transmission pipe. The air inlet pipe is located on the side of the transmission pipe away from the driving component. A communication port is opened on the side of the air inlet pipe close to the transmission pipe. The top surface of the platform faces the communication port. The signal transmitter and the signal receiver are respectively located on the periphery of the transmission pipe, and the signal channel is formed inside the transmission pipe.

8. The thin film growth apparatus according to claim 7, characterized in that, The thin film growth apparatus further includes a transmission cavity, which is connected to the transmission pipeline. The signal receiver is located on the side of the transmission pipeline closer to the transmission cavity, and the signal transmitter is located on the side of the transmission pipeline away from the transmission cavity.

9. The thin film growth apparatus according to claim 8, characterized in that, The thin film growth apparatus also includes a telescopic arm that extends into the transfer conduit to adjust the position of the tray.

10. The thin film growth apparatus according to claim 9, characterized in that, The thin film growth apparatus also includes a housing, the reaction chamber is disposed inside the housing, and the signal receiver, the signal transmitter, the telescopic arm and the transmission cavity are all located outside the housing.

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