Low-vibration slide valve vacuum pump

By designing a compression bladder and counterweight plate structure within the compression chamber of the slide valve vacuum pump, centrifugal force is used to stabilize the rotation of the eccentric wheel, and the vibration of the motor is absorbed by the rubber pad, thus solving the problem of large vibration in the slide valve vacuum pump and achieving more stable operation.

CN224301060UActive Publication Date: 2026-05-29HAIMEN HAIZHEN VACUUM EQUIP

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
HAIMEN HAIZHEN VACUUM EQUIP
Filing Date
2025-06-04
Publication Date
2026-05-29

AI Technical Summary

Technical Problem

The existing low-vibration slide valve vacuum pump has a large vibration due to gravity when the eccentric wheel rotates, which causes a shaking problem.

Method used

A low-vibration slide valve vacuum pump was designed. By setting a compression airbag and a counterweight plate in the compression chamber, the counterweight plate moves in opposite directions using centrifugal force, which enhances the stability of the eccentric wheel. The vibration of the drive motor is absorbed by the rubber pad, thereby reducing the overall vibration.

Benefits of technology

It effectively reduces the vibration of the slide valve vacuum pump during operation, improves the rotational stability of the eccentric wheel, and reduces the overall vibration amplitude of the equipment.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model relates to a vacuum pump technical field, concretely relates to a low vibration slide valve vacuum pump, including vacuum pump body, the inner wall fixedly connected with extrusion cavity of vacuum pump body, the middle part rotationally connected with rotating shaft of extrusion cavity, the middle part fixedly connected with hollow eccentric wheel of rotating shaft, one side fixedly connected with air inlet pipe of hollow eccentric wheel, both sides of extrusion cavity upper end all rotationally connected with moving track, the sliding connection between two moving tracks and air inlet pipe, the side of air inlet pipe lower extreme is provided with air inlet hole, one side fixedly connected with extrusion cavity inner chamber extrusion air bag, one side fixedly connected with extrusion plate of extrusion air bag. Compared with the prior art, the length of the overlapping of the first counterweight plate and the second counterweight plate will change according to the effect of the centrifugal force on the extrusion cavity, reducing the influence of the air inlet pipe on the extrusion cavity, improving the stability of the hollow eccentric wheel during rotation, and thereby reducing the vibration generated by the extrusion cavity and the vacuum pump body during operation.
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Description

Technical Field

[0001] This utility model relates to the field of vacuum pump technology, and in particular to a low-vibration slide valve vacuum pump. Background Technology

[0002] Like rotary vane pumps, valve-type oil-sealed mechanical pumps (also known as slide valve pumps) are a type of variable displacement gas transfer pump. However, compared to 2X rotary vane pumps, slide valve vacuum pumps are several times more durable. Their application range and operating conditions are basically the same as those of rotary vane pumps. Slide valve vacuum pumps are available in two models: single-stage H-type and double-stage 2H-type. Due to their structural characteristics, slide valve pumps have a much larger capacity than rotary vane pumps, and are therefore often used in large vacuum equipment. Because the rotating mass of a slide valve pump has a large eccentricity, if the slide valve does not have a good mass balance, it will generate large vibrations during operation.

[0003] In the prior art, Chinese patent CN2361879Y proposes a low-vibration slide valve vacuum pump. A counterweight is added to one side of the slide valve rod and another to the eccentric side of the eccentric wheel's inner cavity. This improvement significantly reduces vibration, eliminating the need for an external balance wheel. It allows for direct motor drive without deceleration, and its simplified structure makes processing and installation convenient. Chinese patent CN216842112U proposes a slide valve vacuum pump where the first support provides support to the drive motor, reducing its vertical vibration. An annular buffer is fitted onto the drive motor's outer housing to absorb vibrations generated by the main housing. The movement provides a certain filtering effect, further reducing the vertical vibration of the drive motor, thereby reducing the impact of the drive motor vibration on the bolts used to fix the drive motor and improving the problem of the bolts fixing the drive motor being easy to loosen. However, in practical applications, the position and weight of the counterweight installed in the eccentric wheel of the aforementioned low-vibration slide valve vacuum pump are fixed. The eccentric wheel is affected by its own weight when rotating, but the air inlet pipe installed at one end of the eccentric wheel is always located above the eccentric wheel. Therefore, the shaft will still be affected by gravity and shake when the eccentric wheel rotates, resulting in a large vibration problem when the slide valve vacuum pump is working. Therefore, we disclose a low-vibration slide valve vacuum pump. Utility Model Content

[0004] In view of this, the purpose of this utility model is to propose a low-vibration slide valve vacuum pump to solve the problem of excessive vibration during operation of slide valve vacuum pumps.

[0005] To achieve the above objectives, this utility model provides a low-vibration slide valve vacuum pump, comprising a vacuum pump body, an extrusion chamber disposed on the inner wall of the vacuum pump body, a rotating shaft rotatably connected to the center of the extrusion chamber, a hollow eccentric wheel fixedly connected to the center of the rotating shaft, an air inlet pipe fixedly connected to one side of the hollow eccentric wheel, movable tracks rotatably connected to both sides of the upper end of the extrusion chamber, the two movable tracks being slidably connected to the air inlet pipe, an air inlet hole opened on one side of the lower end of the air inlet pipe, an extrusion airbag fixedly connected to one side of the inner cavity of the extrusion chamber, an extrusion plate fixedly connected to one side of the extrusion airbag, two first telescopic rods fixedly connected to the center of the extrusion plate, one end of the first telescopic rods being fixedly connected to the rotating shaft, a first counterweight plate and a second counterweight plate fixedly connected to both ends of the extrusion airbag, the extrusion airbag being located in the extrusion chamber near the air inlet pipe, and the first counterweight plate and the second counterweight plate being located in the extrusion chamber away from the air inlet pipe.

[0006] Preferably, the top end of the extrusion chamber is fixedly connected to an air inlet chamber, and the upper end of one side of the extrusion chamber is fixedly connected to an air outlet valve.

[0007] Preferably, a first sliding groove is provided on both sides of the air intake pipe, a sliding rod is fixedly connected to one side of the moving track, the sliding rod is slidably connected in the first sliding groove, and a number of equidistantly distributed spheres are movably engaged in the middle of the sliding rod, with one side of the spheres penetrating to the outside of the sliding rod and fitting against the inner wall of the first sliding groove.

[0008] Preferably, the compression airbag is a semi-circular arc-shaped airbag, the first counterweight plate and the second counterweight plate are both arc-shaped, one end of the first counterweight plate and the second counterweight plate are attached together, and the compression plate is an arc-shaped plate.

[0009] Preferably, two second sliding grooves are formed on one side of the first counterweight plate, and two sliding rails are fixedly connected to one side of the second counterweight plate. The sliding rails are slidably connected in the second sliding grooves, and the sides of the sliding rails and the second sliding grooves are T-shaped.

[0010] Preferably, the first telescopic rod includes a sleeve, a sleeve rod, and a connecting spring. The sleeve is fixedly connected to the rotating shaft, the sleeve rod is movably sleeved inside the sleeve, the connecting spring is located inside the sleeve, and both ends of the connecting spring are fixedly connected to the sleeve rod and the rotating shaft, respectively. The sleeve is fixedly connected to the rotating shaft, and the sleeve rod is fixedly connected to the extrusion plate.

[0011] Preferably, a connecting plate is fixedly connected to the bottom end of the vacuum pump body, a motor frame is fixedly connected to the top end of the connecting plate, a drive motor is fixedly connected to the middle part of the motor frame, the output end of the drive motor passes through the vacuum pump body to the extrusion chamber and is fixedly sleeved with the rotating shaft, a plurality of second telescopic rods are fixedly connected to the bottom end of the connecting plate, a support frame is fixedly connected to the bottom end of the second telescopic rods, and a rubber pad is fixedly connected between the drive motor and the motor frame.

[0012] The beneficial effects of this utility model are as follows: By restricting the position of the extrusion airbag through the extrusion chamber, when the rotating shaft drives the extrusion chamber to rotate, it will simultaneously drive the first telescopic rod and the extrusion plate to rotate. Due to the centrifugal force generated during rotation, the first telescopic rod is stretched, extruding the extrusion plate, and then extruding one side of the extrusion airbag. This causes the extrusion airbag to expand and extrude to both ends, thereby causing the extrusion airbag to extrude the first counterweight plate and the second counterweight plate to move towards each other. This allows the first and second counterweight plates to overlap on the side of the extrusion chamber away from the air inlet pipe, increasing the weight on the side of the extrusion chamber away from the air inlet pipe. This makes the extrusion chamber more stable when rotating. Furthermore, the overlap length of the first and second counterweight plates will change according to the centrifugal force acting on the extrusion chamber, reducing the influence of the air inlet pipe on the extrusion chamber, improving the stability of the hollow eccentric wheel during rotation, and thus reducing the vibration generated by the extrusion chamber and the vacuum pump body during operation.

[0013] By synchronously vibrating the motor frame and the vacuum pump body, the vibration difference between the drive motor and the extrusion chamber is reduced, thereby reducing the occurrence of vibration in the extrusion chamber. The vibration generated when the drive motor is working is partially absorbed by the rubber pad, reducing the vibration generated when the drive motor is working. This also allows some of the vibration generated by the connecting plate to be absorbed by the second telescopic rod, reducing the vibration amplitude generated by the vacuum pump body and the motor frame. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of an embodiment of the present utility model;

[0016] Figure 2 This is a partial cross-sectional structural diagram of the air intake chamber of this utility model;

[0017] Figure 3 This is a partially cutaway three-dimensional structural diagram of the hollow eccentric wheel of this utility model;

[0018] Figure 4 This is a partial cross-sectional three-dimensional structural diagram of the air intake pipe of this utility model.

[0019] The diagram is marked as follows:

[0020] 1. Vacuum pump body; 2. Extrusion chamber; 3. Rotating shaft; 4. Hollow eccentric wheel; 5. Inlet pipe; 6. Inlet chamber; 7. Moving track; 8. Sliding rod; 9. First sliding groove; 10. Ball; 11. Inlet hole; 12. Extrusion airbag; 13. Extrusion plate; 14. First telescopic rod; 15. First counterweight plate; 16. Second counterweight plate; 17. Sliding track; 18. Second sliding groove; 19. Drive motor; 20. Motor frame; 21. Connecting plate; 22. Second telescopic rod; 23. Support frame. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments.

[0022] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0023] like Figures 1-4As shown, a low-vibration slide valve vacuum pump includes a vacuum pump body 1. A squeezing chamber 2 is provided on the inner wall of the vacuum pump body 1. A rotating shaft 3 is rotatably connected to the center of the squeezing chamber 2. A hollow eccentric wheel 4 is fixedly connected to the center of the rotating shaft 3. An air inlet pipe 5 is fixedly connected to one side of the hollow eccentric wheel 4. Moving tracks 7 are rotatably connected to both sides of the upper end of the squeezing chamber 2. The two moving tracks 7 are slidably connected to the air inlet pipe 5. An air inlet hole 11 is opened on one side of the lower end of the air inlet pipe 5. A squeezing air bladder 12 is fixedly connected to one side of the inner cavity of the squeezing chamber 2. A squeezing plate 13 is fixedly connected to one side of the squeezing air bladder 12. Two first telescopic rods 14 are fixedly connected to the center of the squeezing plate 13. One end of the first telescopic rod 14 is fixedly connected to the rotating shaft 3. The two ends of the squeezing air bladder 12 are respectively... A first counterweight plate 15 and a second counterweight plate 16 are fixedly connected. The compression airbag 12 is located in the compression chamber 2 on the side near the air inlet pipe 5. The first counterweight plate 15 and the second counterweight plate 16 are located in the compression chamber 2 on the side away from the air inlet pipe 5. The top of the compression chamber 2 is fixedly connected to the air inlet chamber 6, and the upper end of one side of the compression chamber 2 is fixedly connected to the air outlet valve. The air inlet pipe 5 has a first sliding groove 9 on both sides. A sliding rod 8 is fixedly connected to one side of the moving track 7. The sliding rod 8 is slidably connected in the first sliding groove 9. Several equidistantly distributed balls 10 are movably engaged in the middle of the sliding rod 8. One side of the balls 10 extends to the outside of the sliding rod 8 and fits against the inner wall of the first sliding groove 9. The compression airbag 12 is a semi-circular arc-shaped airbag. The first counterweight plate 15 and the second counterweight plate 16 are fixedly connected in the compression chamber 2. All 16 are arc-shaped. One end of the first counterweight plate 15 and the second counterweight plate 16 are attached together. The extrusion plate 13 is an arc-shaped plate. Two second sliding grooves 18 are opened on one side of the first counterweight plate 15. Two sliding rails 17 are fixedly connected to one side of the second counterweight plate 16. The sliding rails 17 are slidably connected in the second sliding grooves 18. The sides of the sliding rails 17 and the second sliding grooves 18 are both T-shaped. The first telescopic rod 14 includes a sleeve, a sleeve rod, and a connecting spring. The sleeve is fixedly connected to the rotating shaft 3. The sleeve rod is movably sleeved in the sleeve. The connecting spring is located in the sleeve. The two ends of the connecting spring are fixedly connected to the sleeve rod and the rotating shaft 3, respectively. The sleeve is fixedly connected to the rotating shaft 3. The sleeve rod is fixedly connected to the extrusion plate 13. In use, the extrusion plate 14 is fixedly connected to the inner wall of the vacuum pump body 1. The compression chamber 2 fixes the position of the vacuum pump body 1. A rotating shaft 3 is rotatably connected to the middle of the compression chamber 2, and a hollow eccentric wheel 4 is fixedly connected to the middle of the rotating shaft 3. This restricts the position of the rotating shaft 3, allowing the rotating shaft 3 to drive the hollow eccentric wheel 4 to rotate. An air inlet pipe 5 is fixedly connected to one side of the hollow eccentric wheel 4. Moving rails 7 are rotatably connected to both sides of the upper end of the compression chamber 2. The two moving rails 7 are slidably connected to the air inlet pipe 5, allowing the compression chamber 2 to restrict the movement of the air inlet pipe 5, which in turn restricts the rotation of the hollow eccentric wheel 4. An air inlet hole 11 is opened on one side of the lower end of the air inlet pipe 5, allowing gas in the air inlet pipe 5 to enter the compression chamber 2 through the air inlet hole 11.A compression airbag 12 is fixedly connected to one side of the inner cavity of the compression chamber 2. A compression plate 13 is fixedly connected to one side of the compression airbag 12. Two first telescopic rods 14 are fixedly connected to the middle of the compression plate 13. One end of the first telescopic rod 14 is fixedly connected to the rotating shaft 3. A first counterweight plate 15 and a second counterweight plate 16 are fixedly connected to both ends of the compression airbag 12, respectively. The compression airbag 12 is located in the compression chamber 2 on the side closer to the air inlet pipe 5, while the first counterweight plate 15 and the second counterweight plate 16 are located in the compression chamber 2 on the side away from the air inlet pipe 5. This relatively fixes the rotating shaft 3, the first telescopic rods 14, and the compression plate 13, thus restricting the position of the compression airbag 12 in the compression chamber 2. Consequently, when the rotating shaft 3 drives the compression chamber 2 to rotate, it simultaneously drives the first telescopic rods 15, 16, and 17. The rotation of the compression plate 13 and the centrifugal force generated during rotation causes the first telescopic rod 14 to stretch, compressing the compression plate 13 and subsequently one side of the compression airbag 12. This causes the compression airbag 12 to expand and compress towards both ends, resulting in the compression airbag 12 pressing the first counterweight plate 15 and the second counterweight plate 16 to move towards each other. This causes the first counterweight plate 15 and the second counterweight plate 16 to overlap on the side of the compression chamber 2 away from the air inlet pipe 5, increasing the weight on the side of the compression chamber 2 away from the air inlet pipe 5. This makes the compression chamber 2 more stable during rotation, and the overlap length of the first counterweight plate 15 and the second counterweight plate 16 changes according to the centrifugal force acting on the compression chamber 2, reducing the influence of the air inlet pipe 5 on the compression chamber 2 and improving the stability of the hollow eccentric wheel 4 during rotation. To improve stability and reduce vibrations generated during operation of the extrusion chamber 2 and vacuum pump body 1, an inlet chamber 6 is fixedly connected to the top of the extrusion chamber 2, and an outlet valve is fixedly connected to the upper end of one side of the extrusion chamber 2. This allows gas to enter the inlet pipe 5 through the inlet chamber 6, and the compressed gas in the extrusion chamber 2 to flow out through the outlet valve. First sliding grooves 9 are provided on both sides of the inlet pipe 5. A sliding rod 8 is fixedly connected to one side of the moving track 7, and the sliding rod 8 is slidably connected within the first sliding groove 9. Several equidistantly distributed spheres 10 are movably engaged in the middle of the sliding rod 8. One side of each sphere 10 extends to the outside of the sliding rod 8 and fits against the inner wall of the first sliding groove 9. This cooperation between the sliding rod 8 and the first sliding groove 9 restricts the movement direction of the inlet pipe 5, thereby ensuring the stability of the inlet pipe. 5. The movement is relatively stable and not prone to shaking, reducing the occurrence of vibration in the compression chamber 2. The ball 10 reduces the resistance when the sliding rod 8 slides. The compression airbag 12 is a semi-circular arc-shaped airbag. The first counterweight plate 15 and the second counterweight plate 16 are also arc-shaped, with one end of the first counterweight plate 15 and the second counterweight plate 16 fitting together. The compression plate 13 is an arc-shaped plate, so that the compression airbag 12 and the first counterweight plate 15 and the second counterweight plate 16 are located at opposite ends of the compression chamber 2. This allows the compression airbag 12 to generate a force that compresses the first counterweight plate 15 and the second counterweight plate 16 when compressed by the compression plate 13. Two second sliding grooves 18 are opened on one side of the first counterweight plate 15, and two sliding rails 17 are fixedly connected to one side of the second counterweight plate 16.The sliding track 17 is slidably connected within the second sliding groove 18. Both the sliding track 17 and the second sliding groove 18 have T-shaped sides, ensuring that the movement of the first counterweight plate 15 and the second counterweight plate 16 does not affect the rotating shaft 3. The first telescopic rod 14, comprising a sleeve, a rod, and a connecting spring, is used. The sleeve is fixedly connected to the rotating shaft 3, the rod is movably fitted inside the sleeve, and the connecting spring is located inside the sleeve. Both ends of the connecting spring are fixedly connected to the rod and the rotating shaft 3, respectively. The sleeve is fixedly connected to the rotating shaft 3, and the rod is fixedly connected to the compression plate 13. When the rotating shaft 3 rotates, it drives the first telescopic rod 14 to extend, thereby causing the first telescopic rod 14 to push the compression plate 13 to move and compress the airbag 12.

[0024] As a preferred embodiment of this example, Figure 1 and Figure 2 As shown, a connecting plate 21 is fixedly connected to the bottom of the vacuum pump body 1, a motor frame 20 is fixedly connected to the top of the connecting plate 21, a drive motor 19 is fixedly connected to the middle of the motor frame 20, and the output end of the drive motor 19 passes through the vacuum pump body 1 to the extrusion chamber 2 and is fixedly sleeved with the rotating shaft 3. Several second telescopic rods 22 are fixedly connected to the bottom of the connecting plate 21, and a support frame 23 is fixedly connected to the bottom of the second telescopic rods 22. A rubber pad is fixedly connected between the drive motor 19 and the motor frame 20. The fixed connection allows the drive motor 19 to drive the hollow eccentric wheel 4 to rotate via the rotating shaft 3, which also causes the motor frame 20 and the vacuum pump body 1 to vibrate synchronously, reducing the vibration difference between the drive motor 19 and the extrusion chamber 2, thereby reducing the occurrence of vibration in the extrusion chamber 2. Several second telescopic rods 22 are fixedly connected to the bottom end of the connecting plate 21, and a support frame 23 is fixedly connected to the bottom end of the second telescopic rods 22. A rubber pad is fixedly connected between the drive motor 19 and the motor frame 20, so that the vibration generated by the drive motor 19 during operation is partially absorbed by the rubber pad, reducing the vibration of the drive motor 19 during operation. The vibration generated by the connecting plate 21 is partially absorbed by the second telescopic rods 22, reducing the vibration amplitude generated by the vacuum pump body 1 and the motor frame 20.

[0025] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples; within the framework of the present invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in the details for the sake of brevity.

[0026] This utility model is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A low-vibration slide valve vacuum pump, comprising a vacuum pump body (1), characterized in that, The inner wall of the vacuum pump body (1) is provided with a squeezing chamber (2). A rotating shaft (3) is rotatably connected to the middle of the squeezing chamber (2). A hollow eccentric wheel (4) is fixedly connected to the middle of the rotating shaft (3). An air inlet pipe (5) is fixedly connected to one side of the hollow eccentric wheel (4). Moving tracks (7) are rotatably connected to both sides of the upper end of the squeezing chamber (2). The two moving tracks (7) are slidably connected to the air inlet pipe (5). An air inlet hole (11) is opened on one side of the lower end of the air inlet pipe (5). A squeezing air bag (12) is fixedly connected to one side of the inner cavity of the squeezing chamber (2). A compression plate (13) is fixedly connected to one side of the compression airbag (12). Two first telescopic rods (14) are fixedly connected to the middle of the compression plate (13). One end of the first telescopic rod (14) is fixedly connected to the rotating shaft (3). A first counterweight plate (15) and a second counterweight plate (16) are fixedly connected to both ends of the compression airbag (12). The compression airbag (12) is located in the compression chamber (2) on the side close to the air inlet pipe (5). The first counterweight plate (15) and the second counterweight plate (16) are located in the compression chamber (2) on the side away from the air inlet pipe (5).

2. The low-vibration slide valve vacuum pump according to claim 1, characterized in that, The top of the extrusion chamber (2) is fixedly connected to the air inlet chamber (6), and the upper end of one side of the extrusion chamber (2) is fixedly connected to the air outlet valve.

3. The low-vibration slide valve vacuum pump according to claim 1, characterized in that, The air intake pipe (5) has a first sliding groove (9) on both sides. A sliding rod (8) is fixedly connected to one side of the moving track (7). The sliding rod (8) is slidably connected in the first sliding groove (9). A number of equidistantly distributed spheres (10) are movably engaged in the middle of the sliding rod (8). One side of the spheres (10) extends through to the outside of the sliding rod (8) and fits against the inner wall of the first sliding groove (9).

4. The low-vibration slide valve vacuum pump according to claim 1, characterized in that, The compression airbag (12) is a semi-circular arc-shaped airbag. The first counterweight plate (15) and the second counterweight plate (16) are both arc-shaped. One end of the first counterweight plate (15) and the second counterweight plate (16) are attached together. The compression plate (13) is an arc-shaped plate.

5. The low-vibration slide valve vacuum pump according to claim 1, characterized in that, Two second sliding grooves (18) are provided on one side of the first counterweight plate (15), and two sliding rails (17) are fixedly connected to one side of the second counterweight plate (16). The sliding rails (17) are slidably connected in the second sliding grooves (18), and the sides of the sliding rails (17) and the second sliding grooves (18) are both T-shaped.

6. The low-vibration slide valve vacuum pump according to claim 1, characterized in that, The first telescopic rod (14) includes a sleeve, a rod and a connecting spring. The sleeve is fixedly connected to the rotating shaft (3). The rod is movably sleeved inside the sleeve. The connecting spring is located inside the sleeve. The two ends of the connecting spring are fixedly connected to the rod and the rotating shaft (3) respectively. The rod is fixedly connected to the extrusion plate (13).

7. The low-vibration slide valve vacuum pump according to claim 1, characterized in that, A connecting plate (21) is fixedly connected to the bottom end of the vacuum pump body (1). A motor frame (20) is fixedly connected to the top end of the connecting plate (21). A drive motor (19) is fixedly connected to the middle part of the motor frame (20). The output end of the drive motor (19) passes through the vacuum pump body (1) and into the extrusion chamber (2), where it is fixedly sleeved with the rotating shaft (3). A plurality of second telescopic rods (22) are fixedly connected to the bottom end of the connecting plate (21). A support frame (23) is fixedly connected to the bottom end of the second telescopic rods (22). A rubber pad is fixedly connected between the drive motor (19) and the motor frame (20).