Plasma rotating mechanism

Abstract

The utility model discloses a kind of plasma rotating mechanism, comprising: rotating main seat, X-axis module and Y-axis module are provided on the rotating main seat, the Y-axis module is located on the X-axis module, is moved by X-axis module drive, the Y-axis module is connected with first connecting arm, second connecting arm is formed with the forward extension in the lower end of rotating main seat, the second connecting arm is connected with support seat, first rotating member is provided on the support seat;Plasma cleaning gun, the upper end of the plasma cleaning gun is connected with the first connecting arm, the lower end of the plasma cleaning gun is clamped on the first rotating member and can be rotated. The utility model can realize large-angle swing and rotation of plasma cleaning gun, can clean the different positions of product to be cleaned, no longer need disassembly, reduce the risk of damage.

Description

Technical Field

[0001] This utility model relates to the field of plasma cleaning equipment, and in particular to a plasma rotation mechanism. Background Technology

[0002] Plasma cleaning is a novel surface treatment technology that utilizes the chemical reaction between active particles in plasma and the material surface to remove contaminants and impurities, thereby improving the surface properties of the material. Plasma cleaning technology offers advantages such as high efficiency, environmental friendliness, and no secondary pollution, and has been widely applied in fields such as microelectronics, semiconductors, optoelectronics, and aerospace.

[0003] Existing plasma cleaning equipment typically uses a fixed-position ion source assembly method, meaning that the height and angle are fixed. When the position needs to be changed, the ion source must be disassembled and reassembled, which is not only cumbersome and time-consuming, but also seriously affects the overall uptime of the equipment, and may also pose a risk of personal injury and equipment damage. Utility Model Content

[0004] The purpose of this invention is to overcome the above-mentioned defects in the prior art and provide a plasma rotation mechanism that can realize the large-angle swing and rotation of the plasma cleaning gun, enabling cleaning of different positions of the product to be cleaned without the need for disassembly and assembly, thus reducing the risk of damage.

[0005] To achieve the above objectives, this utility model provides a plasma rotation mechanism, comprising:

[0006] A rotating main seat is provided with an X-axis module and a Y-axis module. The Y-axis module is located on the X-axis module and is driven to move by the X-axis module. The Y-axis module is connected to a first connecting arm. A second connecting arm extends forward from the lower end of the rotating main seat to form a second connecting arm. The second connecting arm is connected to a support seat. A first rotating component is provided on the support seat.

[0007] A plasma cleaning gun, the upper end of which is connected to the first connecting arm, and the lower end of which is engaged with the first rotating component to achieve rotation.

[0008] Furthermore, it also includes a second connecting seat, which is fixedly connected to the first connecting arm. A second rotating component is provided on the second connecting seat, and the upper end of the plasma cleaning gun is engaged with the second rotating component. The cooperation between the second connecting seat and the second rotating component with the plasma cleaning gun allows the plasma cleaning gun to be pushed to swing and rotate as needed. The second rotating component provides good assistance to the plasma cleaning gun during rotation, improving the flexibility of the plasma cleaning gun's rotation and preventing collisions between the plasma cleaning gun and the first connecting arm or the second connecting seat during rotation.

[0009] Furthermore, a locking spring is provided between the first rotating component and the second rotating component, enabling the first rotating component and the second rotating component to rotate synchronously. The locking spring allows the first and second transmission components to move in sync, improving the flexibility and accuracy of the plasma cleaning gun's rotation.

[0010] Furthermore, a locking port is provided on one side of the second connecting seat, and a locking hole is provided on the side of the locking port. This can improve the efficiency of assembly and maintenance.

[0011] Furthermore, it also includes limiting components and several limiting posts. The limiting posts are disposed on the second connecting seat and adjacent to the plasma cleaning gun. One side of the limiting component is fixedly connected to the plasma cleaning gun, and the other side of the limiting component away from the plasma cleaning gun extends outward to form a limiting extension arm, which is positioned between the limiting posts. The cooperation of the limiting posts and limiting components limits the rotation of the plasma cleaning gun, ensuring only the rotation of the working area is controlled. This improves cleaning accuracy and prevents the plasma cleaning gun from rotating too far, detaching from the area to be cleaned, causing the equipment to idle, and potentially damaging other components.

[0012] Furthermore, the end of the limiting member forms a semi-annular wrapping portion, which matches the shape of the plasma cleaning gun. This wrapping portion is fixed to the first rotating member and wraps around the upper end of the plasma cleaning gun. The wrapping portion allows for better connection with the plasma cleaning gun, resulting in more stable operation.

[0013] Furthermore, the X-axis module includes a first slide rail, a first lead screw drive assembly, and an X-axis motor linked to the first lead screw drive assembly. Both the X-axis motor and the first slide rail are fixedly connected to the rotating main seat. A first sliding seat is provided on the first slide rail, and the first sliding seat is connected to the first lead screw drive assembly. This allows the first connecting arm to rotate the plasma cleaning gun in the lateral direction. The cooperation between the X-axis motor and the first lead screw drive assembly improves the accuracy of movement, provides efficient and precise thrust, and thus enhances the cleaning effect.

[0014] Furthermore, the Y-axis module includes a second slide rail, a second lead screw drive assembly, and a Y-axis motor linked to the second lead screw drive assembly. Both the second slide rail and the Y-axis motor are fixedly connected to the first sliding seat. A second sliding seat is provided on the second slide rail and connected to the first lead screw drive assembly. The first connecting arm is fixedly connected to the second sliding seat. This allows the first connecting arm to drive the plasma cleaning gun to rotate longitudinally. The cooperation between the Y-axis motor and the second lead screw drive assembly improves the accuracy of movement, provides efficient and precise thrust, and thus enhances the cleaning effect.

[0015] Furthermore, both the first and second rotating components are spherical bearings. Using spherical bearings allows for large-angle oscillation and rotation of the plasma cleaning gun, adapting to complex product cleaning needs.

[0016] Furthermore, the plasma cleaning gun, the first rotating component, and the second rotating component are provided in two sets. Providing two sets improves cleaning efficiency.

[0017] Compared with the prior art, the present invention has the following advantages:

[0018] 1. This utility model uses X-axis and Y-axis modules to drive the plasma cleaning gun, especially using a lead screw transmission method, preferably a ball screw, which can precisely control the lead. With the help of a servo motor, it can achieve a repeatability accuracy of ±0.01mm or even higher.

[0019] 2. The first rotating component uses a spherical bearing, which allows the plasma cleaning gun to swing and rotate at a large angle after assembly. Combined with the X-axis and Y-axis modules, the angle of the plasma cleaning gun can be adjusted. Thus, under different environmental requirements, only the swing angle of the plasma cleaning gun needs to be adjusted to meet the cleaning needs at different angles. There is no need to disassemble and adjust again, which effectively avoids equipment wear and tear and improves service life.

[0020] 3. This utility model also includes a second connecting seat and a second rotating component, which, in conjunction with the X-axis module and the Y-axis module, can prevent uneven force on the plasma cleaning gun from causing positional deviation, improve the accuracy of rotation during operation, and ensure the quality of cleaning and the safety of the equipment. Attached Figure Description

[0021] To more clearly illustrate the technology in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a plasma rotation mechanism according to this utility model;

[0023] Figure 2 yes Figure 1 A structural diagram from another perspective;

[0024] Figure 3 yes Figure 1 Another structural diagram from a different perspective;

[0025] Figure 4This is an assembly diagram of the plasma cleaning gun, the first rotating component, the second rotating component, the extension arm, and the locking spring in this embodiment.

[0026] The diagram includes:

[0027] 1. Rotating main seat; 11. Second connecting arm; 12. Support seat; 2. Plasma cleaning gun; 3. X-axis module; 31. First slide rail; 32. First lead screw drive assembly; 33. X-axis motor; 34. First sliding seat; 4. Y-axis module; 41. Second slide rail; 42. Second lead screw drive assembly; 43. Y-axis motor; 44. Second sliding seat; 441. First connecting arm; 442. Extension arm; 443. Wrapping part; 5. First rotating component; 7. Second connecting seat; 71. Locking port; 72. Locking hole; 73. Limiting post; 8. Second rotating component; 9. Locking circlip; 10. Limiting component; 101. Limiting extension arm; 102. Wrapping part. Detailed Implementation

[0028] The technology of this embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiment is one embodiment of the present invention, and not all embodiments thereof. Based on this embodiment of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0030] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second", such descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated.

[0031] Please see Figures 1 to 4 The present invention provides a plasma rotation mechanism, including a rotating main seat 1 and a plasma cleaning gun 2.

[0032] like Figure 1 and Figure 2As shown, an X-axis module 3 and a Y-axis module 4 are provided on the rotating main seat 1. The Y-axis module 4 is mounted on the X-axis module 3 and is driven to move by the X-axis module 3. Specifically, the X-axis module 3 includes a first slide rail 31, a first lead screw transmission assembly 32, and an X-axis motor 33 that is linked to the first lead screw transmission assembly 32. The X-axis motor 33 and the first slide rail 31 are both fixed to the rotating main seat 1. A first sliding seat 34 is slidably mounted on the first slide rail 31 and is connected to the first lead screw transmission assembly 32. The Y-axis module 4... The system includes a second slide rail 41, a second lead screw drive assembly 42, and a Y-axis motor 43 that is linked to the second lead screw drive assembly 42. The second slide rail 41 and the Y-axis motor 43 are both fixedly connected to the first sliding seat 34. The second sliding seat 44 is slidably disposed on the second slide rail 41 and is connected to the first lead screw drive assembly 32. In this embodiment, both the first lead screw drive assembly 32 and the second lead screw drive assembly 42 can be commercially available ball screw assemblies, and both the X-axis motor 33 and the Y-axis motor 43 can be servo motors.

[0033] A first connecting arm 441 is connected to the second sliding seat 44. A second connecting arm 11 extends forward from the lower end of the rotating main seat 1 and is connected to a support seat 12. A first rotating member 5 is provided on the support seat 12. In this embodiment, the first rotating member 5 is a spherical bearing. The lower end of the plasma cleaning gun 2 is engaged with the rotating ball of the first rotating member 5 to achieve rotation.

[0034] like Figure 3 and Figure 4 As shown, the upper end of the plasma cleaning gun 2 is connected to the first connecting arm 441 to realize the input of driving force. In order to ensure the uniformity of force transmission between the X-axis module 3 and the Y-axis module 4, this embodiment also includes a second connecting seat 7. The second connecting seat 7 is fixedly connected to the first connecting arm 441. A second rotating member 8 is provided on the second connecting seat 7. The upper end of the plasma cleaning gun 2 is engaged on the rotating ball of the second rotating member 8. The second rotating member 8 also adopts a spherical bearing (spherical sliding bearing). By pulling the second connecting seat 7, the plasma cleaning gun 2 is pushed, so that the plasma cleaning gun 2 can swing and rotate on the support seat 12 in coordination with the first transmission member.

[0035] To facilitate the installation of the second rotating component 8, a locking port 71 is provided on one side of the second connecting seat 7 in this embodiment, and a locking hole 72 is provided on one side of the locking port 71. The locking port 71 can be locked by directly inserting bolts or other parts into the locking hole 72, thereby facilitating the disassembly, repair and installation of the second rotating component 8.

[0036] To ensure improved flexibility and accuracy of the plasma cleaning gun 2's rotation, in this embodiment, a locking spring 9 is provided between the first rotating component 5 and the second rotating component 8, enabling the first and second transmission components to move in sync.

[0037] To control the rotation angle of the plasma cleaning gun 2, ensuring it can only swing or rotate within the working area, this embodiment also includes a limiting member 10 and several limiting posts 73. Typically, each limiting member 10 is equipped with two limiting posts 73, such as... Figure 2 As shown, the two limiting posts 73 are disposed on the second connecting seat 7 and are adjacent to the plasma cleaning gun 2. One side of the limiting member 10 is fixedly connected to the plasma cleaning gun 2, and the other side of the limiting member 10 away from the plasma cleaning gun 2 extends outward to form a limiting extension arm 101. The limiting extension arm 101 is placed in the gap between the two limiting posts 73.

[0038] The end of the limiting member 10 forms a semi-annular wrapping portion 102, which matches the shape of the plasma cleaning gun 2. After being fixed to the first rotating member 5, the wrapping portion 102 wraps around the upper end of the plasma cleaning gun 2, making the force on the plasma cleaning gun 2 more uniform and further improving the accuracy during swinging or rotating.

[0039] like Figure 1 As shown, in this embodiment, there are two sets of plasma cleaning gun 2, first rotating component 5 and second rotating component 8, which can simultaneously clean the product and improve the cleaning efficiency. Of course, in other embodiments, the number can be increased or decreased according to the needs. For example, three sets or four sets can be set, all of which are within the protection scope of this utility model and will not be listed one by one.

[0040] The working principle of this utility model can be briefly described as follows: the X-axis module 3 can drive the plasma cleaning gun 2 to swing left and right. For example, when the X-axis module moves to the left, the first connecting arm 441 pushes the upper end of the plasma cleaning gun 2 to the left. With the cooperation of the first rotating part 5, the cleaning port at the lower end of the plasma cleaning gun 2 will swing to the right. Similarly, the Y-axis module 4 controls the back-and-forth swing of the plasma cleaning gun 2. The movement directions of the X-axis module 3 and the Y-axis module 4 are opposite to the swing direction of the cleaning port of the plasma cleaning gun 2. When the X-axis module 3 and the Y-axis module 4 operate at the same time, the cleaning port of the plasma cleaning gun 2 will rotate.

[0041] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A plasma rotation mechanism, characterized in that, include: A rotating main seat (1) is provided with an X-axis module (3) and a Y-axis module (4). The Y-axis module (4) is located on the X-axis module (3) and is driven to move by the X-axis module (3). The Y-axis module (4) is connected to a first connecting arm (441). A second connecting arm (11) extends forward from the lower end of the rotating main seat (1). The second connecting arm (11) is connected to a support seat (12). A first rotating component (5) is provided on the support seat (12). The plasma cleaning gun (2) is connected at its upper end to the first connecting arm (441) and at its lower end to the first rotating part (5) to achieve rotation.

2. The plasma rotation mechanism according to claim 1, characterized in that, It also includes a second connecting seat (7), which is fixedly connected to the first connecting arm (441). A second rotating member (8) is provided on the second connecting seat (7), and the upper end of the plasma cleaning gun (2) is engaged with the second rotating member (8).

3. The plasma rotation mechanism according to claim 2, characterized in that, A locking spring (9) is provided between the first rotating member (5) and the second rotating member (8) so that the first rotating member (5) and the second rotating member (8) rotate synchronously.

4. A plasma rotating mechanism according to claim 2, characterized in that, The second connecting seat (7) has a locking port (71) on one side and a locking hole (72) on one side of the locking port (71).

5. A plasma rotating mechanism according to claim 2, characterized in that, It also includes a limiting member (10) and several limiting posts (73). The limiting posts (73) are disposed on the second connecting seat (7) and adjacent to the plasma cleaning gun (2). One side of the limiting member (10) is fixedly connected to the plasma cleaning gun (2). The other side of the limiting member (10) away from the plasma cleaning gun (2) extends outward to form a limiting extension arm (101). The limiting extension arm (101) is placed between the limiting posts (73).

6. A plasma rotating mechanism according to claim 5, characterized in that, The end of the limiting member (10) forms a semi-circular wrapping part (102), which matches the shape of the plasma cleaning gun (2). After the wrapping part (102) is fixed to the first rotating member (5), it wraps the upper end of the plasma cleaning gun (2).

7. A plasma rotating mechanism according to claim 1, characterized in that, The X-axis module (3) includes a first slide rail (31), a first lead screw drive group (32), and an X-axis motor (33) that is linked to the first lead screw drive group (32). The X-axis motor (33) and the first slide rail (31) are both fixed on the rotating main seat (1). A first sliding seat (34) is provided on the first slide rail (31), and the first sliding seat (34) is connected to the first lead screw drive group (32).

8. A plasma rotating mechanism according to claim 7, characterized in that, The Y-axis module (4) includes a second slide rail (41), a second lead screw transmission group (42), and a Y-axis motor (43) that is linked to the second lead screw transmission group (42). The second slide rail (41) and the Y-axis motor (43) are both fixedly connected to the first sliding seat (34). A second sliding seat (44) is provided on the second slide rail (41). The second sliding seat (44) is connected to the first lead screw transmission group (32), and the first connecting arm (441) is fixedly connected to the second sliding seat (44).

9. A plasma rotating mechanism according to claim 2, characterized in that, The first rotating component (5) is a spherical bearing, and the second rotating component (8) is a spherical bearing.

10. A plasma rotation mechanism according to any one of claims 2 to 9, characterized in that, The plasma cleaning gun (2), the first rotating component (5), and the second rotating component (8) are provided in two sets.

Images