Vacuum coating structure and vacuum coating apparatus

Abstract

The utility model discloses vacuum plating structure and vacuum plating equipment, vacuum plating structure includes: two transition chambers, be located between two transition chambers's plating chamber and be used for conveying transmission mechanism of carrier plate, transmission mechanism is located in the transition chamber, and transmission mechanism of one transition chamber conveys carrier plate to transmission mechanism of another transition chamber, so that the area of carrier plate in plating chamber is completely suspended. Transmission mechanism contains a plurality of transmission wheel groups that are arranged at intervals along the carrier plate conveying direction, and the transmission wheel group is composed of a pair of transmission wheels arranged oppositely, and the carrier plate comprises a plate body and two transmission edge frames respectively arranged on both sides of the plate body, the inner top surface of the transmission edge frame is a transmission surface, the transmission surface is placed on the transmission wheel, and the bottom of the transmission edge frame is an open mouth that is downwardly open. The utility model can reduce the film layer deposition of transmission wheel, reduce the probability of dust generated due to transmission transportation, and effectively improve the uniformity of substrate plating.

Description

Technical Field

[0001] This utility model relates to the field of solar cell technology, and in particular to vacuum coating structure and vacuum coating equipment. Background Technology

[0002] As a key sector in the global energy transition, the solar photovoltaic industry has experienced explosive growth in recent years, driven by both surging market demand and accelerated technological iteration. Simultaneously, the rapid advancement of solar cell technology, including N-type cells, perovskite cells, and crystalline silicon tandem cells, has significantly improved the conversion efficiency and manufacturing costs of photovoltaic cells. Against this backdrop, vacuum environment surface thin-film deposition technology, a core process in photovoltaic cell manufacturing, has become a key focus for the industry's technological breakthroughs, as the precision of its equipment and the cleanliness of the process directly determine the performance and yield of the cells.

[0003] Vacuum deposition technology deposits functional thin films on substrate surfaces using physical or chemical methods. It primarily encompasses physical vapor deposition (PVD), chemical vapor deposition (CVD), reactive plasma deposition (RPD), and atomic layer deposition (ALD). PVD achieves material transfer through physical processes such as evaporation and sputtering; CVD relies on gas-phase chemical reactions to generate solid films; RPD combines plasma excitation with reactive gases to achieve composite deposition; and ALD builds ultrathin structures layer by layer based on self-limiting surface reactions. These technologies use substrates such as silicon wafers and glass as carriers, depositing functional materials such as transparent conductive films, passivation layers, or antireflective layers to endow the substrate with specific optical and electrical properties, thereby improving the light absorption efficiency and carrier transport capacity of photovoltaic cells.

[0004] like Figure 1 , 2 As shown, in current vacuum coating equipment, vacuum environment surface thin film deposition technology is mainly used in coating chamber 2. Coating chamber 2 can be divided into upper coating chamber 21 and lower coating chamber 22. Upper coating chamber 21 deposits thin films on the upper surface of the substrate, and lower coating chamber 22 deposits thin films on the lower surface of the substrate. The substrate is transferred in coating chamber 2 via carrier plate 1. Its transmission system generally adopts a transmission wheel structure, and the transmission wheel 4 is located inside coating chamber 2. The transmission frame of carrier plate 1 is made of C-shaped steel or U-shaped steel. This design has a significant technical defect: during the coating process, due to the lack of effective protection measures, thin film material inevitably deposits on the surface of transmission wheel 4. When carrier plate 1 comes into contact with transmission wheel 4, the friction between the two causes the film layer to peel off and generate micron-sized dust. Figures 3a to 3c As shown, in the upper coating chamber 21, the sputtered film 6 mainly adheres to the substrate surface and the upper plane of the carrier plate 1, while dust 7 falls and accumulates inside the transmission frame 11; as Figures 4a to 4cAs shown, within the lower coating chamber 22, the sputtered film 6 adheres to the back of the substrate, the lower plane of the carrier plate, and the transmission gap. After the carrier plate 1 is transferred to the outlet chamber, the airflow disturbance generated when the chamber is ventilated (restoring normal pressure) causes dust to be re-entrained. Some particles are redeposited on the substrate surface, resulting in deterioration of optical performance (such as incident light obstruction), decrease in electrical performance (such as increased carrier recombination), and contamination in subsequent processes (such as electrode printing defects). Ultimately, this leads to a reduction in cell conversion efficiency and a loss in production yield.

[0005] Therefore, how to design vacuum coating structures and equipment that can improve the cleanliness of the coating process is a technical problem that the industry urgently needs to solve. Utility Model Content

[0006] To address the shortcomings of existing technologies where the transmission wheel is directly exposed to the coating area and is prone to dust generation during transmission, this invention proposes a vacuum coating structure and vacuum coating equipment. This reduces film deposition on the transmission wheel, lowers the probability of dust generation during transmission, and effectively improves the uniformity of substrate coating.

[0007] The technical solution adopted in this utility model is to design a vacuum coating structure, including: two transition chambers, a coating chamber located between the two transition chambers, and a transmission mechanism for transporting the carrier plate. The transmission mechanism is located in the transition chamber, and the carrier plate is transported from the transmission mechanism in one transition chamber to the transmission mechanism in the other transition chamber, so that the area of ​​the carrier plate located in the coating chamber is completely suspended.

[0008] Furthermore, the transmission mechanism includes multiple sets of transmission wheels arranged at intervals along the transport direction of the carrier plate, each set consisting of a pair of transmission wheels arranged opposite to each other.

[0009] Furthermore, the carrier plate includes: a plate body and two transmission frame sides respectively disposed on both sides of the plate body. The inner top surface of the transmission frame side is the transmission surface of the carrier plate, the transmission surface is placed on the transmission wheel, and the bottom of the transmission frame side is an open opening facing downwards.

[0010] In some embodiments, the transmission frame is composed of a horizontal transmission plate and a first vertical plate. The bottom surface of the horizontal transmission plate is the transmission surface, and the first vertical plate is located inside the transmission wheel below it, and the first vertical plate is connected to the plate body.

[0011] In other embodiments, the transmission frame is composed of a horizontal transmission plate, a first vertical plate and a second vertical plate. The bottom surface of the horizontal transmission plate is the transmission surface. The first vertical plate is located inside the transmission wheel below it and is connected to the plate body. The second vertical plate is located outside the transmission wheel below it.

[0012] Furthermore, the vacuum coating structure includes a lower coating chamber, which is equipped with protective plates located on both sides of the carrier plate. The protective plates include horizontal baffles that shield the transmission surface of the carrier plate.

[0013] Furthermore, the protective plate is installed on the cavity of the lower coating chamber via a height adjustment structure, so that the height of the horizontal baffle is adjustable.

[0014] In some embodiments, the height adjustment structure includes: a strip-shaped waist hole and a fixing screw that passes through the strip-shaped waist hole and is fixed on the cavity; the two ends of the horizontal baffle are bent downward to form two vertical mounting plates, and the strip-shaped waist hole is disposed on the vertical mounting plates.

[0015] Furthermore, the coating chamber can be any one of PVD coating chamber, CVD coating chamber, RPD coating chamber, and ALD coating chamber.

[0016] This utility model also proposes a vacuum coating equipment, including the above-mentioned vacuum coating structure.

[0017] Compared with the prior art, the present invention has at least one of the following beneficial effects:

[0018] 1. No conveying mechanism is arranged in the coating chamber. Instead, the conveying mechanism is designed in the transition chamber. The conveying mechanism in the feeding transition chamber transports the carrier plate to the conveying mechanism in the discharging transition chamber. This makes the area of ​​the carrier plate in the coating chamber completely suspended. The conveying mechanism is not directly exposed to the coating environment, which reduces film deposition in the conveying mechanism and reduces the probability of dust generation due to transmission and transportation, thereby effectively improving the uniformity of substrate coating.

[0019] 2. The transmission frame of the carrier plate adopts an open design with the bottom facing downwards, so that dust will not accumulate in the transmission frame and will not cause the dust in the transmission frame to be stirred up by the airflow when the carrier plate is transported to the discharge transition chamber to be purged to the ambient atmospheric pressure.

[0020] 3. The lower coating chamber is designed with a height-adjustable protective plate. The protective plate has a horizontal baffle located below the transmission surface. The horizontal baffle blocks the transmission surface of the carrier plate, preventing the target material from splashing onto the transmission surface. There is no film deposition on the transmission surface of the carrier plate, and no dust is generated by friction, thus avoiding affecting the coating process environment. Attached Figure Description

[0021] The present invention will now be described in detail with reference to the embodiments and accompanying drawings, wherein:

[0022] Figure 1 This is a schematic diagram of a vacuum coating structure in the prior art;

[0023] Figure 2 This is a schematic diagram of the transmission frame in the prior art;

[0024] Figure 3a This is a schematic diagram of the interior of the upper coating chamber in existing technology;

[0025] Figure 3byes Figure 3a A schematic diagram of sputtering at point A in the upper coating chamber with a carrier plate;

[0026] Figure 3c yes Figure 3a A schematic diagram of sputtering without a carrier plate at point A in the upper coating chamber;

[0027] Figure 4a This is a schematic diagram of the interior of the lower coating chamber in existing technology;

[0028] Figure 4b yes Figure 4a A schematic diagram of sputtering at point B in the lower coating chamber with a carrier plate;

[0029] Figure 4c yes Figure 4a A schematic diagram of sputtering at point B in the lower coating chamber without a carrier plate;

[0030] Figure 5 This is a schematic diagram of the vacuum coating structure of this utility model;

[0031] Figure 6 This is a schematic diagram of the transmission frame of this utility model;

[0032] Figure 7a This is a schematic diagram of the interior of the upper coating chamber of this utility model;

[0033] Figure 7b yes Figure 7a A schematic diagram of sputtering at point C in the upper coating chamber with a carrier plate;

[0034] Figure 8a This is a schematic diagram of the interior of the lower coating chamber of this utility model;

[0035] Figure 8b yes Figure 8a A schematic diagram of sputtering at point D in the lower coating chamber with a carrier plate but no protective plate;

[0036] Figure 8c yes Figure 8a A schematic diagram of sputtering at point D in the lower coating chamber, where there is a carrier plate and a protective plate;

[0037] Figure 9 This is a schematic diagram of the protective plate of this utility model;

[0038] Figure descriptions: 1. Carrier plate; 11. Transmission frame; 12. Transmission surface; 2. Coating chamber; 21. Upper coating chamber; 211. Upper rotating cathode; 22. Lower coating chamber; 221. Lower rotating cathode; 3. Transition chamber; 4. Transmission wheel; 5. Protective plate; 51. Horizontal baffle; 52. Vertical mounting plate; 521. Strip-shaped waist hole; 53. Fixing screw; 6. Sputtered film layer; 7. Dust. Detailed Implementation

[0039] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0040] like Figure 5 As shown, the vacuum coating structure proposed in this utility model includes: two transition chambers 3, a coating chamber 2 disposed between the two transition chambers 3, and a transfer mechanism for transporting the carrier plate 1. The transfer mechanism is disposed within the transition chamber 3, and the carrier plate 1 for carrying the substrate is placed on the transfer mechanism. The carrier plate 1 is transported from one transition chamber 3 to the other transition chamber 3 by the transfer mechanism, so that the area of ​​the carrier plate 1 located in the coating chamber 2 is completely suspended. The coating chamber 2 can be divided into an upper coating chamber 21 and a lower coating chamber 22. The upper coating chamber 21 is provided with an upper rotating cathode 211, with the cathode sputtering angle from top to bottom, depositing a thin film on the upper surface of the substrate. The lower coating chamber 22 is provided with a lower rotating cathode 221, with the cathode sputtering angle from bottom to top, depositing a thin film on the lower surface of the substrate. In actual applications, the coating chamber 2 of the vacuum coating structure is configured according to specific processing requirements. For example, the vacuum coating structure may only include the upper coating chamber 21, or only include the lower coating chamber 22, or include both the upper coating chamber 21 and the lower coating chamber 22.

[0041] For ease of understanding, since the carrier plate 1 is transported from one end of the coating chamber 2 to the other end of the coating chamber 2, the transition chamber 3 that feeds the carrier plate 1 inward is called the feeding transition chamber, and the transition chamber 3 that sends the carrier plate 1 outward is called the discharging transition chamber. Specifically, the carrier plate 1 is transported from the feeding transition chamber to the discharging transition chamber via a conveying mechanism. During this transport, the carrier plate 1 passes through the coating chamber 2, and the area of ​​the carrier plate 1 located within the coating chamber 2 is suspended in mid-air.

[0042] The coating chamber 2 of this invention does not contain a transmission mechanism. Instead, the transmission mechanism is designed inside the transition chamber 3 to ensure that the transmission mechanism is not directly exposed to the coating environment. This significantly reduces the film deposition on the surface of the transmission mechanism and lowers the probability of dust generation due to transmission friction in traditional technologies, thereby effectively improving the uniformity of substrate coating.

[0043] The specific type of transmission mechanism can be selected according to actual needs. For both horizontal and vertical vacuum coating equipment, transmission wheels 4 are commonly used for transportation. Figure 5 As shown, in some feasible embodiments of this utility model, the transmission mechanism includes multiple transmission wheel sets arranged at intervals along the transport direction of the carrier plate 1. Each transmission wheel set consists of a pair of transmission wheels 4 arranged opposite to each other. During the rotation of the transmission wheel set, the carrier plate 1 is transported forward.

[0044] Based on the transportation using drive wheel 4, as a preferred solution, such as Figure 6 As shown, the carrier plate 1 includes a plate body and two transmission frame frames 11. Each side of the plate body has a transmission frame frame 11, and the carrier plate 1 is placed on the transmission wheel assembly via the transmission frame frames 11. Specifically, the inner top surface of the transmission frame frame 11 is a transmission surface 12, which is placed on the transmission wheel 4. The bottom of the transmission frame frame 11 is an open opening facing downwards, preventing dust from accumulating inside the transmission frame frame 11. This avoids the dust being stirred up by the airflow when the carrier plate 1 is transported to the discharge transition chamber and subjected to blasting to ambient atmospheric pressure, which would then adhere to the substrate and affect subsequent substrate processing.

[0045] For ease of understanding, the specific shape of the transmission frame 11 will be described using two feasible embodiments of the present invention as examples. The transmission frames 11 on both sides of the carrier plate 1 can be designed to have the same shape, or the transmission frames 11 on both sides of the carrier plate 1 can be designed to have different shapes.

[0046] See Figure 6 In the first feasible embodiment, the right-side transmission frame 11 is composed of a horizontal transmission plate and a first vertical plate, with an approximately inverted L-shape. The horizontal transmission plate is placed on the transmission wheel 4 below it, meaning the bottom surface of the horizontal transmission plate is the transmission surface 12 of the carrier plate 1. The transmission surface 12 contacts the transmission wheel 4 during the transport of the carrier plate 1. The first vertical plate is located inside the transmission wheel 4 below it, and the plate body is connected between the first vertical plates of the two sides of the transmission frame 11. When there is dust in the cavity, because the bottom of the transmission frame 11 is open, dust will not fall and accumulate inside the transmission frame 11, reducing the dust flying caused by the airflow impact on the carrier plate.

[0047] See Figure 6 In the second feasible embodiment, the left transmission frame 11 is composed of a horizontal transmission plate, a first vertical plate, and a second vertical plate. The horizontal transmission plate is placed on the transmission wheel 4 below it, meaning the bottom surface of the horizontal transmission plate is the transmission surface 12 of the carrier plate 1. The transmission surface 12 contacts the transmission wheel 4 during the transport of the carrier plate 1. The first vertical plate is located inside the transmission wheel 4 below it, and the second vertical plate is located outside the transmission wheel 4 below it. The plates are connected between the first vertical plates of the two transmission frame 11s on both sides. The second feasible embodiment only has one more second vertical plate than the first feasible embodiment. Vertical edges are designed on both the inner and outer sides of the transmission wheel 4, resulting in better positioning of the carrier plate 1 and preventing shaking during transport. At the same time, since the bottom of both embodiments is open, dust accumulation can be reduced and dust flying caused by transmission and transportation can be avoided.

[0048] like Figures 7a to 7bAs shown, taking a vacuum coating structure including an upper coating chamber 21 as an example, the drive wheel 4 is located in the transition chamber 3. The rotation of the drive wheel 4 transports the carrier plate 1 into the upper coating chamber 21. During this period, the upper rotating cathode 211 is always in the sputtering coating state. Since the drive wheel 4 is arranged in the transition chamber 3, there is no thin film deposition on the drive wheel 4. Since the upper coating chamber 21 is a top-down thin film deposition, most of the target material is deposited on the upper surface of the carrier plate 1, and only a small amount of target material is deposited around the drive surface 12 of the carrier plate 1. When the drive wheel 4 and the drive surface 12 of the carrier plate 1 are rubbed together, although a small amount of dust will be generated, the bottom of the drive frame 11 of the carrier plate 1 is open, so that the dust cannot accumulate inside the drive frame 11, thereby reducing the probability of dust being transported to the discharge transition chamber with the carrier plate 1.

[0049] like Figure 8a As shown, in some embodiments of this utility model, the vacuum coating structure includes a lower coating chamber 22, and a drive wheel 4 is disposed in the transition chamber 3. The drive wheel 4 rotates to transport the carrier plate 1 into the lower coating chamber 22. During this period, the lower rotating cathode 221 is always in the sputtering coating state. Since the drive wheel 4 is arranged in the transition chamber 3, no thin film is deposited on the drive wheel 4. Because the lower coating chamber 22 deposits thin films from bottom to top, such as Figure 8b As shown, when the lower coating chamber 22 is not designed with a protective plate 5, a large amount of sputtered film 6 will be deposited on the inner surface of the transmission frame 11, such as... Figure 8c As shown, when designing the protective plate 5 in the lower coating chamber 22, a protective plate 5 is provided on each side of the carrier plate 1. The protective plate 5 includes a horizontal baffle 51. The horizontal baffle 51 blocks the area below the transmission surface 12 of the carrier plate 1. The thin film is deposited on the horizontal baffle 51 and will not be deposited on the transmission surface 12 of the carrier plate 1. Since there is no film deposition on the transmission surface 12, there will be no friction to generate dust, thus avoiding affecting the coating process environment.

[0050] Based on this, as an optimization, the protective plate 5 is installed on the cavity of the lower coating chamber 22 through a height adjustment structure, so that the height of the horizontal baffle 51 is adjustable. By adjusting the height of the protective plate 5, the vertical distance between the horizontal baffle and the transmission surface 12 of the carrier plate 1 can be controlled. Under the premise that the two do not interfere with each other, the smaller the distance between them, the less film deposition occurs on the transmission surface 12 of the carrier plate 1. When the protective plate 5 is adjusted to a suitable height, the effect of no film deposition can be achieved, avoiding dust generation due to transmission and transportation. At the same time, in the sputtering coating process (especially magnetron sputtering), the closed magnetic field generated by the magnetron target is used to confine the plasma. The magnetic field distribution directly affects the sputtering efficiency and film quality. The height adjustment of the protective plate 5 can also reduce the interference of the protective plate layout on the electromagnetic field of the lower coating chamber 22, and improve the uniformity of the substrate coating.

[0051] The specific type of height adjustment mechanism can be selected according to actual needs. This utility model does not impose any special restrictions on this. The following section provides examples of the specific implementation methods of the height adjustment mechanism.

[0052] For example, such as Figure 9 As shown, in some feasible embodiments of this utility model, the height adjustment structure includes: a strip-shaped waist hole 521 and a fixing screw 53 that passes through the strip-shaped waist hole 521 and is fixed on the cavity. The two ends of the horizontal baffle 51 are bent downward to form two vertical mounting plates 52. The strip-shaped waist hole 521 is set on the vertical mounting plate 52. After the fixing screw 53 is adjusted up and down in the strip-shaped waist hole 521, it is then locked and fixed on the cavity of the lower coating chamber 22.

[0053] For example, in some other feasible embodiments of this utility model, a screw height adjustment block is provided on the upper surface of the protective plate 5. The screw height adjustment block is arranged in the vertical direction. By rotating the screw, the length of the screw passing through the protective plate is adjusted, thereby raising or lowering the protective plate.

[0054] For example, in some other feasible embodiments of this utility model, studs are provided below the protective plate 5, and the protective plate is supported and fixed by the studs. By using studs of different heights, the height of the protective plate can be adjusted.

[0055] It should be noted that the vacuum coating structure proposed in this utility model is applicable to technologies such as PVD, CVD, RPD, and ALD. That is, the coating chamber can be any one of PVD coating chamber, CVD coating chamber, RPD coating chamber, and ALD coating chamber. The PVD coating chamber can achieve material transfer through physical processes such as vapor deposition and sputtering.

[0056] This utility model also proposes a vacuum coating equipment, including the above-mentioned vacuum coating structure. The vacuum coating equipment includes, but is not limited to, horizontal vacuum coating equipment and vertical vacuum coating equipment.

[0057] like Figure 5 As shown, in some embodiments of this utility model, the vacuum coating equipment includes a first transition chamber, an upper coating chamber 21, a second transition chamber, a lower coating chamber 22, and a third transition chamber arranged sequentially. Relative to the upper coating chamber 21, the first transition chamber is a feeding transition chamber, and the second transition chamber is a discharging transition chamber. Relative to the lower coating chamber 22, the second transition chamber is a feeding transition chamber, and the third transition chamber is a feeding transition chamber. The first, second, and third transition chambers are all equipped with a transmission mechanism. The bottom of the transmission frame 11 of the carrier plate 1 is an open opening, and the lower coating chamber 22 is equipped with a protective plate 5.

[0058] It should be noted that the terminology used above is for describing specific embodiments only and is not intended to limit the exemplary embodiments according to this utility model. When the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof. The order of execution of actions, steps, etc., in the apparatus and methods shown in the specification and drawings can be implemented in any order unless a specific express order is specified, and as long as the output of the preceding process is not used in the subsequent process. Similar sequential terms used for ease of description do not imply that such an order must be followed.

[0059] Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0060] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. Vacuum coating structure, including: Two transition chambers (3), a coating chamber (2) disposed between the two transition chambers (3), and a transport mechanism for transporting a carrier plate (1), characterized in that the transport mechanism is disposed in the transition chamber (3), and the carrier plate (1) is transported from one of the transition chambers (3) to the other of the transition chambers (3) by the transport mechanism, such that the area of ​​the carrier plate (1) located in the coating chamber (2) is completely suspended.

2. The vacuum coating structure according to claim 1, characterized in that, The transmission mechanism includes a plurality of transmission wheel sets arranged at intervals along the transport direction of the carrier plate (1), and the transmission wheel sets are composed of a pair of transmission wheels (4) arranged opposite to each other.

3. The vacuum coating structure according to claim 2, characterized in that, The carrier plate (1) includes: a plate body and two transmission frame edges (11) respectively disposed on both sides of the plate body. The inner top surface of the transmission frame edge (11) is the transmission surface (12) of the carrier plate (1). The transmission surface (12) is placed on the transmission wheel (4). The bottom of the transmission frame edge (11) is an open opening facing downwards.

4. The vacuum coating structure according to claim 3, characterized in that, The transmission frame (11) is composed of a horizontal transmission plate and a first vertical plate. The bottom surface of the horizontal transmission plate is the transmission surface (12). The first vertical plate is located inside the transmission wheel (4) below it, and the first vertical plate is connected to the plate body.

5. The vacuum coating structure according to claim 3, characterized in that, The transmission frame (11) is composed of a horizontal transmission plate, a first vertical plate and a second vertical plate. The bottom surface of the horizontal transmission plate is the transmission surface (12). The first vertical plate is located inside the transmission wheel (4) below it and is connected to the plate body. The second vertical plate is located outside the transmission wheel (4) below it.

6. The vacuum coating structure according to claim 3, characterized in that, The vacuum coating structure includes a lower coating chamber (22), which is provided with protective plates (5) located on both sides of the carrier plate (1); the protective plate (5) includes a horizontal baffle (51), which shields the transmission surface (12) of the carrier plate (1) below.

7. The vacuum coating structure according to claim 6, characterized in that, The protective plate (5) is installed on the cavity of the lower coating chamber (22) through a height adjustment structure so that the height of the horizontal baffle (51) is adjustable.

8. The vacuum coating structure according to claim 7, characterized in that, The height adjustment structure includes: a strip-shaped waist hole (521) and a fixing screw (53) that passes through the strip-shaped waist hole (521) and is fixed on the cavity. The two ends of the horizontal baffle (51) are bent downward to form two vertical mounting plates (52), and the strip-shaped waist hole (521) is provided on the vertical mounting plate (52).

9. The vacuum coating structure according to any one of claims 1 to 8, characterized in that, The coating chamber (2) is any one of PVD coating chamber, CVD coating chamber, RPD coating chamber, and ALD coating chamber.

10. A vacuum coating equipment, characterized in that, The vacuum coating equipment includes the vacuum coating structure as described in any one of claims 1 to 9.

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