Single-chamber rotary double-door coating machine
By designing a single-chamber rotary double-door coating machine and adopting a double-door alternating operation method, the problem of low production efficiency of existing equipment has been solved, and high-efficiency production has been achieved under limited space and cost.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN THREE BEAM COATING TECH CO LTD
- Filing Date
- 2025-05-30
- Publication Date
- 2026-06-23
AI Technical Summary
Existing dual-chamber high vacuum coating equipment has low production efficiency due to limited production space or the need to control equipment costs. It also lacks a transfer system, resulting in long cycles for feeding, coating, and material change.
Design a single-chamber rotary double-door coating machine, which adopts a single coating chamber structure and is equipped with a single chamber double door to realize the alternating loading and unloading and coating production. It uses a vacuum pump to draw vacuum and drives the workpiece rotating frame to rotate through a motor to achieve uniform coating of the workpiece.
While reducing equipment costs, production efficiency has been improved, achieving seamless integration of feeding, coating and unloading, making full use of coating waiting time and reducing working hours.
Smart Images
Figure CN224394995U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of coating machine technology, and in particular to a single-chamber rotary double-door coating machine. Background Technology
[0002] Vacuum coating technology is a surface treatment technique performed in a high vacuum environment. It uses physical or chemical methods to deposit a thin film on the surface of a substrate to impart new physical, chemical, or mechanical properties to the substrate. The high vacuum environment effectively reduces the influence of gaseous impurities on the coating process, ensuring the high purity of the coating material. By controlling temperature, pressure, and time, precise control of film thickness and uniformity can be achieved. It is widely used in automotive, electronics, optics, medical, and aerospace fields. Magnetron sputtering is one of the high vacuum coating technologies. Current high vacuum magnetron sputtering equipment has single-chamber, double-chamber, and multi-chamber structures. Single-chamber structures are generally used in small laboratories or for teaching purposes. Double-chamber structures are used in small and medium-sized enterprises and generally consist of a feeding chamber and a coating chamber. Existing double-chamber structures, due to limited production space or cost control, lack a transfer system, resulting in long cycles for feeding, coating, and material change, leading to low production efficiency.
[0003] Therefore, existing technologies have shortcomings and need to be improved. Utility Model Content
[0004] The technical problem this invention aims to solve is to provide a single-chamber rotary double-door coating machine. This machine utilizes a single coating chamber structure with double doors, alternating between loading / unloading and coating production, achieving the functionality of a double-chamber structure. This maximizes production efficiency while reducing equipment costs.
[0005] The technical solution of this utility model is as follows: A single-chamber rotary double-door coating machine is provided, comprising: a frame, a coating chamber mounted on the frame, a left door chamber movably connected to the left side of the coating chamber, a right door chamber movably connected to the right side of the coating chamber, a left workpiece rotating frame mounted in the left door chamber, a right workpiece rotating frame mounted in the right door chamber, and a sputtering target mounted in the coating chamber; the left door chamber and the right door chamber can be combined with the coating chamber to form a sealed vacuum coating chamber.
[0006] The right workpiece trolley is loaded with the substrate to be plated. The right door compartment cooperates with the coating chamber, allowing the right workpiece trolley to be fed into the coating chamber. The coating chamber is then closed, a vacuum is drawn, and sputtering coating is performed. Meanwhile, the left workpiece trolley in the left door compartment can continue loading substrates for preparation. Once the workpiece on the right workpiece trolley in the right door compartment has completed coating, the vent is released, the door is opened, and the right door compartment is rotated to pull out the right workpiece trolley. Then, the left door compartment cooperates with the coating chamber to send the workpiece on the left workpiece trolley into the coating chamber for the next round of coating. During the coating waiting time, the workpieces on the right workpiece trolley are unloaded and processed, and the next batch of workpieces is prepared for loading, alternating in a cyclical manner.
[0007] Furthermore, the coating chamber is connected to the left and right door chambers via a rotating shaft.
[0008] Furthermore, the single-chamber rotary double-door coating machine also includes: a left rotating rolling track, a right rotating rolling track, a left support roller installed at the bottom of the left door compartment, and a right support roller installed at the bottom of the right door compartment; the left support roller is located at the bottom of the left door compartment, and the right support roller is located at the bottom of the right door compartment, and the rollers roll on the track to realize the opening and closing of the left and right door compartments.
[0009] Furthermore, the single-chamber rotary double-door coating machine also includes a vacuum pump mounted on the frame, the vacuum pump being connected to the coating chamber. The vacuum pump is used for evacuating a vacuum.
[0010] Furthermore, the single-chamber rotary double-door coating machine also includes: a left motor installed on the left door compartment and a left gear connected to the central shaft of the left workpiece rotating frame; the left motor is used to drive the left gear, thereby causing the left workpiece rotating frame to rotate and ensuring uniform coating of each workpiece.
[0011] Furthermore, the single-chamber rotary double-door coating machine also includes: a right motor installed on the right door compartment and a right gear connected to the central shaft of the right workpiece rotating frame; the right motor is used to drive the right gear, thereby causing the right workpiece rotating frame to rotate and ensuring uniform coating of each workpiece.
[0012] By adopting the above solution, this utility model provides a single-chamber rotary double-door coating machine. Under limited production space and production cost, the existing coating chamber structure can be operated alternately with double doors. This achieves seamless connection between feeding, coating, and unloading without affecting the coating production time, making full use of the idle time during the coating waiting period, reducing working time, and greatly improving work efficiency. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the structure of one embodiment of the present invention;
[0014] Figure 2 for Figure 1 A structural schematic diagram from another perspective of the embodiment;
[0015] Figure 3 This is a schematic diagram of the structure when the left compartment door and the coating compartment are fitted together.
[0016] Figure 4 This is a schematic diagram of the structure when the right compartment door and the coating compartment are combined. Detailed Implementation
[0017] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
[0018] Please see Figures 1-4 This utility model provides a single-chamber rotary double-door coating machine, comprising: a frame 10, a coating chamber 11 mounted on the frame 10, a left door chamber 12 movably connected to the left side of the coating chamber 11, a right door chamber 13 movably connected to the right side of the coating chamber 11, a left workpiece rotating frame 14 installed in the left door chamber 12, a right workpiece rotating frame 15 installed in the right door chamber 13, and a sputtering target 16 installed in the coating chamber 11; the left door chamber 12 and the right door chamber 13 can be fitted with the coating chamber 11 to form a sealed vacuum coating chamber. The ion source 30 is used to generate high-energy particles, which bombard the sputtering target 16 to form a gaseous coating material. The gaseous coating material is deposited on the workpiece to be coated, thus completing the coating process.
[0019] The right workpiece carrier 15 is loaded with the substrate to be plated. The right door chamber 13 cooperates with the coating chamber 11, allowing the right workpiece carrier 15 to be fed into the coating chamber along with the right door chamber 13. The coating chamber is then closed, a vacuum is drawn, and sputtering coating is performed. At this time, the left workpiece carrier 14 in the left door chamber 12 can continue to load the substrate to be plated for preparation. After the workpiece on the right workpiece carrier 15 in the right door chamber 13 has been coated, the air is released and the door is opened. The right door chamber 13 is then rotated to pull out the right workpiece carrier. The left door chamber 12 is then cooperated with the coating chamber 11 to send the workpiece to be plated on the left workpiece carrier 14 into the coating chamber for the next round of coating operations. During the waiting time for coating, the workpiece on the right workpiece carrier 15 is unloaded and processed, and the next batch of workpieces to be plated is prepared for loading, alternating in a cyclical manner.
[0020] In this embodiment, the frame 10 is connected to the left door compartment 12 and the right door compartment 13 via a pivot 17.
[0021] In this embodiment, the single-chamber rotary double-door coating machine further includes: a left rotating rolling track 18, a right rotating rolling track 19, a left support roller 20 installed at the bottom of the left door compartment 12, and a right support roller 21 installed at the bottom of the right door compartment 13; the left support roller 20 is located at the bottom of the left door compartment 12, and the right support roller 21 is located at the bottom of the right door compartment 13. The rollers roll on the track, which facilitates the movement of the left door compartment 12 and the right door compartment 13, and enables the opening and closing of the left door compartment 12 and the right door compartment 13.
[0022] In this embodiment, the single-chamber rotary double-door coating machine further includes a vacuum pump 22 mounted on the frame 10, the vacuum pump 22 being connected to the coating chamber 11. The vacuum pump 22 is used for evacuating a vacuum.
[0023] In this embodiment, the single-chamber rotary double-door coating machine further includes: a left motor 23 installed on the left door compartment 12 and a left gear 24 connected to the central axis of the left workpiece rotating frame 14; the left motor 23 is used to drive the left gear 24, thereby causing the left workpiece rotating frame 14 to rotate and making each workpiece coated evenly.
[0024] In this embodiment, the single-chamber rotary double-door coating machine further includes: a right motor 25 installed on the right door compartment 13 and a right gear 26 connected to the central axis of the right workpiece rotating frame 15; the right motor 25 is used to drive the right gear 26, thereby causing the right workpiece rotating frame 15 to rotate and making each workpiece coated evenly.
[0025] In summary, this utility model provides a single-chamber rotary double-door coating machine. Under limited production space and cost, it enables the existing coating chamber structure to operate alternately with double doors. This achieves seamless connection between loading, coating, and unloading without affecting coating production time, making full use of the idle time during the coating waiting period, reducing working time, and greatly improving work efficiency.
[0026] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A single chamber rotary dual door coating machine, characterized in that, include: The equipment includes a frame, a coating chamber mounted on the frame, a left door chamber movably connected to the left side of the coating chamber, a right door chamber movably connected to the right side of the coating chamber, a left workpiece rotating frame installed in the left door chamber, a right workpiece rotating frame installed in the right door chamber, and a sputtering target installed in the coating chamber; both the left and right door chambers can be fitted with the coating chamber to form a sealed vacuum coating chamber.
2. The single chamber rotary dual door coater of claim 1, wherein, The coating chamber is connected to the left and right door chambers via a rotating shaft.
3. The single chamber rotary dual door coating machine of claim 1, wherein, Also includes: A left-rotating rolling track, a right-rotating rolling track, a left support roller installed at the bottom of the left door compartment, and a right support roller installed at the bottom of the right door compartment; The left support roller is located at the bottom of the left door compartment, and the right support roller is located at the bottom of the right door compartment.
4. The single chamber rotary dual door coating machine of claim 1, wherein, Also includes: A vacuum pump is mounted on the frame and is connected to the coating chamber.
5. The single chamber rotary dual door coating machine of claim 1, wherein, Also includes: A left motor installed on the left door compartment is connected to a left gear via the central shaft of the left workpiece rotating frame; the left motor drives the left gear.
6. The single chamber rotary dual door coating machine of claim 1, wherein, Also includes: A right motor installed on the right door compartment is connected to a right gear via the central shaft of the right workpiece rotating frame; the right motor drives the right gear.