A cavity cover turnover mechanism

Abstract

The utility model relates to the technical field of semiconductor, especially point to a cavity cover turnover mechanism, including mounting seat, at least two symmetrical settings in mounting seat's turnover subassembly and cavity cover body, turnover subassembly includes with mounting seat connection's base, rotation connection in base's pivot and with pivot connection's turnover piece, turnover piece is connected with cavity cover body, cavity cover body is used for opening and closing cavity top end's opening, pivot cover is equipped with torsion spring, and both ends of torsion spring are connected with base and turnover piece respectively, when cavity cover body closes the opening of cavity, torsion spring is in the tensile state, the symmetry center of turnover subassembly is aligned with the center of cavity cover body, the utility model can alleviate manual operation burden, reduce the risk of turning over, and eliminate the hidden danger of safety.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a cavity cover flipping mechanism. Background Technology

[0002] Currently, the production equipment used in the semiconductor and photovoltaic industries is increasing rapidly. In pursuit of pure, ultra-thin compound films, vacuum coating equipment has become a hot research topic. From university laboratories to large-scale enterprise production lines, a large number of vacuum coating machines have become indispensable equipment for developing more efficient semiconductor and photovoltaic devices. Vacuum coating equipment consists of modules such as a transition chamber, a process chamber, a carrier disk, an in-cavity carrier disk transmission mechanism, a target crucible, vacuum pipelines, and process gas paths. Production is achieved through the synergistic effect of these modules. Because molecules generated by the thermal evaporation of the target material inevitably adhere to the cavity during the coating process, the vacuum coating equipment requires regular cleaning of the chamber.

[0003] Existing vacuum coating equipment typically uses a manual flip-top method, meaning that the vacuum chamber is maintained and repaired by manually opening the cover. During opening, the operator must continuously support the cover; support can only be removed once opening is complete. This means that even a moment's inattention during opening can result in injury to the operator, significantly increasing the workload and posing a major safety hazard. Utility Model Content

[0004] This utility model addresses the shortcomings of existing technologies by providing a cavity cover flipping mechanism, which reduces the burden of manual operation, lowers the risk of flipping the cover, and eliminates safety hazards.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model provides a cavity cover flipping mechanism, including a mounting base, at least two flipping components symmetrically arranged on the mounting base, and a cavity cover body;

[0007] The flipping assembly includes a base connected to the mounting base, a rotating shaft rotatably connected to the base, and a flipping component connected to the rotating shaft. The flipping component is connected to the cavity cover body, which is used to open and close the opening at the top of the cavity. The rotating shaft is fitted with a torsion spring, and the two ends of the torsion spring are respectively connected to the base and the flipping component.

[0008] When the cavity cover body closes the opening of the cavity, the torsion spring is in a stretched state;

[0009] The center of symmetry of the flipping assembly is aligned with the center of the cavity cover body.

[0010] The base is equipped with a one-way damper;

[0011] When the cavity cover body flips upward, the torsion spring provides an upward pulling force to the cavity cover body;

[0012] When the cavity cover body flips downward, the cavity cover body is subjected to an upward force from the one-way damper and the torsion spring, so that the cavity cover body flips downward slowly.

[0013] The mounting base has a receiving cavity on one side;

[0014] When the cavity cover body closes the cavity opening, one end of the cavity cover body extends into the receiving cavity.

[0015] The base is equipped with a support block, the support block is provided with a support part, the end of the flipping member away from the cavity cover body abuts against the support part, and the force exerted by the cavity cover body on the flipping member is directed towards the support part.

[0016] The support block is equipped with a positioning block, and the positioning block is provided with a positioning part. When the cavity cover body is flipped upward to the desired position, the center of gravity of the cavity cover body is located between the rotation center of the rotating shaft and the positioning part, and one end of the cavity cover body abuts against the positioning part.

[0017] The flipping component includes a flipping base plate connected to a rotating shaft and a flipping support connected to the flipping base plate. The flipping support is connected to the cavity cover body. The flipping base plate and the flipping support are inclined together, and the flipping base plate abuts against the support part.

[0018] A reinforcing block connects the flipping base plate and the flipping support.

[0019] The beneficial effects of this utility model are:

[0020] The symmetrically arranged flipping components provide a symmetrical and stable support structure, ensuring smooth flipping of the cavity cover and uniform force distribution. When the cavity cover closes the opening of the cavity, the torsion spring is in a stretched state, utilizing its stored energy to assist in opening the cavity cover, reducing the burden of manual operation, lowering the risk of flipping, and eliminating safety hazards. The torsion spring ensures that it has stored energy when the cavity cover is closed on the corresponding cavity, providing initial power for subsequent opening. The center of symmetry of the flipping components is aligned with the center of the cavity cover, ensuring balance during the flipping process and preventing the cavity cover from tilting or jamming. Attached Figure Description

[0021] Figure 1 This is a three-dimensional view of the installation structure of the cavity cover flipping mechanism and the cavity body.

[0022] Figure 2 This is a three-dimensional structural diagram of the cavity cover flipping mechanism.

[0023] Figure 3This is a cross-sectional view of the mounting structure of the flip assembly and the rotating shaft.

[0024] Figure 4 A 3D view of the connection structure of the flip component.

[0025] Figure 5 This is a three-dimensional diagram of the connection structure between the support block and the positioning block.

[0026] 1. Mounting base; 101. Receiving cavity; 2. Flip assembly;

[0027] 21. Base; 22. Rotating shaft;

[0028] 23. Flip-over component; 231. Flip-over base plate; 232. Flip-over support;

[0029] 3. Cavity cover body;

[0030] 300. Torsion spring;

[0031] 4. Unidirectional damper;

[0032] 5. Support block; 51. Support section;

[0033] 6. Positioning block; 61. Positioning part;

[0034] 7. Reinforcing blocks. Detailed Implementation

[0035] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0036] refer to Figures 1 to 5 As shown, this utility model provides a cavity cover flipping mechanism, including a mounting base 1, at least two flipping components 2 symmetrically arranged on the mounting base 1, and a cavity cover body 3, providing a symmetrical and stable support structure to ensure that the cavity cover body 3 flips smoothly and is subjected to uniform force; the flipping component 2 includes a base 21 connected to the mounting base 1, a rotating shaft 22 rotatably connected to the base 21, and a flipping element 23 connected to the rotating shaft 22. The flipping element 23 is connected to the cavity cover body 3. The cavity cover body 3 is used to open and close the opening at the top of the cavity. The rotating shaft 22 is fitted with a torsion spring 300, and the two ends of the torsion spring 300 are respectively connected to the base 21 and the flipping element 23.

[0037] refer to Figure 1 , 2 As shown, in practical applications, the mounting base 1 is connected to the cavity, and manual force is applied when the cavity cover body 3 needs to be flipped; when the cavity cover body 3 closes the opening of the cavity, refer to Figure 3 As shown, the torsion spring 300 is in a stretched state. The energy stored in the torsion spring 300 provides assistance for opening the cavity cover body 3, reducing the burden of manual operation, reducing the danger of flipping the cover, and eliminating safety hazards. The torsion spring 300 ensures that it has stored energy when the cavity cover body 3 is closed on the corresponding cavity, providing initial power for subsequent opening. The center of symmetry of the flipping component 2 is aligned with the center of the cavity cover body 3 to ensure balance during the flipping process and prevent the cavity cover body 3 from tilting or getting stuck.

[0038] refer to Figure 1 , 2 As shown, in this embodiment, the base 21 is equipped with a one-way damper 4. In actual application, the one-way damper 4 is a rotary damper, which relies on the viscosity of the internal damping oil to generate damping motion and slow down the rotation speed of the cavity cover body 3. When the cavity cover body 3 flips upward, the torsion spring 300 provides an upward pulling force to the cavity cover body 3, resisting the opening process and making the operation easier. When the cavity cover body 3 flips downward, the cavity cover body 3 is subjected to an upward force from the one-way damper 4 and the torsion spring 300, so that the cavity cover body 3 slowly flips downward. The one-way damper 4 offsets part of the gravity, and with the residual force of the torsion spring 300, the cavity cover body 3 is closed uniformly, slowly, and controllably, which greatly improves the safety of operation and prevents the cavity cover body 3 from falling quickly and injuring people.

[0039] refer to Figure 1 , 2 As shown, in this embodiment, a receiving cavity 101 is provided on one side of the mounting base 1; when the cavity cover body 3 closes the cavity opening, one end of the cavity cover body 3 extends into the receiving cavity 101, which facilitates ensuring that the cavity cover body 3 is closed in place. The structure is compact and conducive to sealing or positioning in narrow spaces.

[0040] refer to Figure 2 , 4 As shown in Figure 5, in this embodiment, the base 21 is equipped with a support block 5, the support block 5 is provided with a support part 51, and the end of the flipping member 23 away from the cavity cover body 3 abuts against the support part 51. The force exerted by the cavity cover body 3 on the flipping member 23 is directed towards the support part 51. In actual application, when the cavity cover body 3 is in a closed state, the support block 5 bears most of the load from the cavity cover body 3 through the support part 51, including gravity and possible sealing force, and transmits the load to the base 21 and the mounting seat 1 through the support part 51, effectively reducing the static load of the rotating shaft 22 and the torsion spring 300, improving the durability and stability of the mechanism, and ensuring reliable support through the force pointing design.

[0041] refer to Figure 2 , 5As shown, in this embodiment, the support block 5 is equipped with a positioning block 6, and the positioning block 6 is provided with a positioning part 61. When the cavity cover body 3 is flipped upward to the desired position, the center of gravity of the cavity cover body 3 is located between the rotation center of the rotating shaft 22 and the positioning part 61, and one end of the cavity cover body 3 abuts against the positioning part 61. In practical applications, the positioning block 6 provides a hard limit when the cavity cover body 3 is fully opened. The design of placing the center of gravity between the rotating shaft 22 and the positioning part 61, combined with the abutment against the positioning part 61, makes the open state have self-stabilizing characteristics. Even if manual labor is removed, the cavity cover body 3 can maintain a stable open state under the combined action of gravity and the positioning block 6, without the need for continuous manual support, completely freeing the operator's hands and greatly improving safety and ease of operation.

[0042] refer to Figure 4 , 5 As shown, in this embodiment, the flipping component 23 includes a flipping base plate 231 connected to the rotating shaft 22 and a flipping support 232 connected to the flipping base plate 231. The flipping support 232 is connected to the cavity cover body 3. The flipping base plate 231 and the flipping support 232 are inclined together, and the flipping base plate 231 abuts against the support part 51. In actual application, the force of the cavity cover body 3 can be effectively transmitted to the flipping base plate 231 through the flipping support 232 by the inclined connection, and is finally balanced by the reaction force of the support part 51, forming a stable support structure. This ensures that the cavity cover body 3 maintains stable support during rotation, highlighting the key connection and force relationship.

[0043] refer to Figure 4 , 5 As shown in this embodiment, a reinforcing block 7 is connected between the flip base plate 231 and the flip support 232 to enhance the connection stability between the flip base plate 231 and the flip support 232 and ensure the smooth transmission of load.

[0044] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A cavity cover flipping mechanism, characterized in that, It includes a mounting base (1), at least two flipping components (2) symmetrically arranged on the mounting base (1), and a cavity cover body (3); The flipping assembly (2) includes a base (21) connected to the mounting base (1), a rotating shaft (22) rotatably connected to the base (21), and a flipping component (23) connected to the rotating shaft (22). The flipping component (23) is connected to the cavity cover body (3). The cavity cover body (3) is used to open and close the opening at the top of the cavity. The rotating shaft (22) is fitted with a torsion spring (300). The two ends of the torsion spring (300) are respectively connected to the base (21) and the flipping component (23). When the cavity cover body (3) closes the opening of the cavity, the torsion spring (300) is in a stretched state; The center of symmetry of the flipping component (2) is aligned with the center of the cavity cover body (3).

2. The cavity cover flipping mechanism according to claim 1, characterized in that, The base (21) is equipped with a one-way damper (4); When the cavity cover body (3) is flipped upward, the torsion spring (300) provides an upward pulling force on the cavity cover body (3); When the cavity cover body (3) flips downward, the cavity cover body (3) is subjected to an upward force from the one-way damper (4) and the torsion spring (300), so that the cavity cover body (3) flips downward slowly.

3. The cavity cover flipping mechanism according to claim 1, characterized in that, A receiving cavity (101) is provided on one side of the mounting base (1); When the cavity cover body (3) closes the cavity opening, one end of the cavity cover body (3) extends into the receiving cavity (101).

4. The cavity cover flipping mechanism according to claim 2, characterized in that, The base (21) is equipped with a support block (5), the support block (5) is provided with a support part (51), the end of the flipping member (23) away from the cavity cover body (3) abuts against the support part (51), and the force exerted by the cavity cover body (3) on the flipping member (23) is directed towards the support part (51).

5. The cavity cover flipping mechanism according to claim 4, characterized in that, The support block (5) is equipped with a positioning block (6), and the positioning block (6) is provided with a positioning part (61). When the cavity cover body (3) is flipped upward to the desired position, the center of gravity of the cavity cover body (3) is located between the rotation center of the rotating shaft (22) and the positioning part (61), and one end of the cavity cover body (3) abuts against the positioning part (61).

6. The cavity cover flipping mechanism according to claim 4, characterized in that, The flipping component (23) includes a flipping base plate (231) connected to the rotating shaft (22) and a flipping support (232) connected to the flipping base plate (231). The flipping support (232) is connected to the cavity cover body (3). The flipping base plate (231) and the flipping support (232) are inclined together. The flipping base plate (231) abuts against the support part (51).

7. The cavity cover flipping mechanism according to claim 6, characterized in that, A reinforcing block (7) is connected between the flip base plate (231) and the flip support (232).

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