Method for correcting measured values ​​of an optical detection channel

Abstract

The invention relates to a method for correcting measured values ​​of a detection channel (DA, DB, DC), wherein measured values ​​are acquired by means of a specific arrangement (array) of a plurality of individually readable optical detectors (A1 to C7), and the measured values ​​of a selection of the optical detectors (A1 to C7) of the array are assigned to a respective detection channel. The method is characterized in that a plurality of optical detectors (A1 to C7) are grouped according to a basic pattern to form a detection channel (DA, DB, DC) and their measured values ​​are jointly assigned to the respective detection channel (DA, DB, DC), and if at least one defective detector (A3) is present, the grouping according to the basic pattern is cancelled at least for the respective detection channel (DA, DB, DC).For the discontinued aggregation of individual detectors (A1 to C7), a modified baseline pattern is defined, and measured values ​​from the individual detectors (A1 to C7) are acquired according to this modified baseline pattern. The measured values ​​of the defective individual detector are then corrected using measured values ​​from surrounding individual detectors (A1 to C7) within the modified baseline pattern. After correcting the measured values ​​of the respective defective individual detectors (A3), the acquired measured values ​​for each detection channel (DA, DB, DC) are subsequently evaluated according to the baseline pattern.

Description

The invention relates to a method for correcting measured values of one or more optical detection channels according to the preamble of the independent claim.For the acquisition of measurement values, in particular of intensity values of acquired radiation in the visible and invisible wavelength range, detectors are often used in the field of modern microscopy, which are constructed from a plurality of individual detector elements (also: individual detectors or pixels below). Examples of this are CCD chips and arrays of photodiodes, in particular avalanche photodiodes (avalanche photodiode=APD; single photon avalanche diode=SPAD). Selected individual detectors can be combined to form detection channels and their measured values read out as a common value and used further.Within such arrangements of many detector elements (array detector), it may occur that individual detector elements exhibit an undesired behavior. For example, detector elements either cannot function at all (so-called dead pixels) or they have a much higher noise than the average of the other detector elements (noise pixels or "scraper"). Subsequently, both dead pixels and noise pixels are summarized under the term of the defective individual detector or the defective pixel.Particularly when using a detector with a large number of individual detectors, defective pixels can be ignored without relevant losses in the achievable image quality. Their measurement value is set to zero. Alternatively, a corrected measured value can be assigned to the defective pixel, which can be calculated, for example, as the mean value of the measured values of the individual detectors surrounding the defective pixel (mean value method).In many applications, these procedures do not interfere further. Thus, in imaging a wide field microscope using a CCD camera, the averaging method can be easily applied to a defective pixel. When using an array detector as a confocal detector, on the other hand, the measurement value of the defective pixel can be set to zero. The latter would then correspond to a reduction in the active area of the array detector and a slight reduction in the quantum efficiency, but would moreover not mean any disruptive effects or even corrupted results in most conventional microspie methods.If, on the other hand, the position and the intensity of each individual pixel are of particular importance for the evaluation method used, the above-mentioned options are not well suited for handling defective pixels.The invention is based on the object of proposing improved possibilities for handling defective pixels which are assigned to a detection channel.The object is achieved with a method for correcting measured values of an in particular optical detection channel. Advantageous refinements and variants are the subject matter of the dependent claims.The measured values can be used directly as image values or converted into image values. The measurement values are recorded by means of a predetermined, i.e. known, arrangement (array) of a plurality of individually readable optical individual detectors. The individual detectors are not necessarily arranged in a regular pattern, but can also be arranged irregularly in embodiments of the invention, but always with known positions and relative positions to one another.Detected measured values of a selection of the optical individual detectors of the array are assigned to a respective detection channel. A detection channel in the sense of this description is thus formed by combining at least two individual detectors ("binning"), i.e. the common detection of their measured values. The advantage of this procedure is that a smaller amount of data must be forwarded and processed than if each individual detector is actually read individually.According to the invention, the method is characterized in that a plurality of optical individual detectors are combined (binning) according to a predefined or selected basic pattern to form a respective detection channel and their measured values are jointly assigned to the relevant detection channel. A basic pattern is understood below as meaning a defined spatial configuration or rule, according to which the individual detectors are assigned to a detection channel. Usually, but not necessarily, at least two detection channels are present.If at least one defective individual detector occurs, the summary according to the basic pattern is canceled at least for the relevant detection channel. For the canceled summary of individual detectors, a changed basic pattern is established and the measured values of the individual detectors are acquired in the meantime in accordance with the changed basic pattern.Using measurement values of individual detectors of the changed basic pattern, which are preferably arranged in a manner surrounding the defective individual detector, in particular adjacent, at least one measurement value of the defective individual detector is corrected. After the measurement values of the respective defective individual detectors have been corrected, a subsequent detection and / or evaluation of the detected measurement values per detection channel is carried out in accordance with the original basic pattern.The selection of the basic pattern can be effected in accordance with the respective requirements of the optical device used, for example a microscope, and the requirements of the evaluation routines to be used and desired specifications of the image qualities.In an advantageous embodiment, the individual detectors are arranged adjacent to one another in each case according to the basic pattern. In this way, a correction of the measurement value of the defective pixel can be carried out taking into account the measurement values of the individual detectors positioned spatially closest.In further embodiments, measurement values of individual detectors can additionally or alternatively be included for determining a corrected measurement value. The invention is described below by way of example with reference to a defective pixel. The method according to the invention can also be used if more than one defective pixel occurs per detection channel or defective pixels occur in different detection channels.In order to correct the measurement value of the defective pixel, the measurement values of the individual detectors that are adjacent to the defective individual detector directly and / or further away can be read individually and an average value can be formed from these measurement values. The mean value is assigned to the defective individual detector as a corrected measured value. In embodiments of the method, an adjacent individual detector does not necessarily have to directly adjoin the defective pixel. The individual detectors assigned to the detection channel are read out without the individual detectors used to form the mean value in the sense of a changed basic pattern and are assigned to the detection channel. Subsequently, each detection channel is assigned the measured values and the corrected measured values according to the basic pattern. This assignment can subsequently take place in the course of data acquisition or evaluation of the measured values of the detection channels.At least one of the adjacent individual detectors used for correction according to the basic pattern is assigned to a different detection channel than the defective individual detector. In this way, it is ensured that not only the individual detectors of the relevant detection channel are involved in the determination of the corrected measured value and the changed basic pattern deviates from the originally defined basic pattern.In a further developed embodiment, of the individual detectors used to form the mean value, those which, according to basic patterns, each belong to a common detection channel can be combined. In this way, even fewer data have to be transmitted or even fewer acquisition units (counters) are required, with which the respective measured values are acquired, for example counted or added. A corresponding weighting of the contributions of the combined individual detectors is advantageous.In a further embodiment of the method according to the invention, at least one first and one second detection unit (counter) are used, by means of which measured values of individual individual detectors can be detected simultaneously and independently of one another without loss of information, that is to say without loss of count.In this case, the individual detectors of the detection channel having a defective individual detector are combined without the defective individual detector in the sense of a changed basic pattern and their measured values are fed to a first detection unit. In addition, individual detectors adjacent to the defective individual detector, namely without the defective pixel, are combined and their measured values are fed to a second detection unit. The combined measured values of the second detection unit are used to calculate a corrected measured value and to assign this to the defective individual detector as a corrected measured value.The evaluation of the detection channels then takes place again in accordance with the combinations of the individual detectors caused by the basic pattern.The advantage over the preceding embodiment of the method according to the invention is that fewer additional detection units are required. The advantage over the variant described below is that the result is more accurate.The corrected measured value according to the above-described embodiment can be advantageously determined by using the combined measured values determined by means of the second detection unit for calculating a corrected measured value, in particular an arithmetic mean value. The sum of their measured values will be multiplied by a factor 1 / n*, where n* is the number of individual detectors of the changed basic pattern.In the averaging, it is possible to round to integers. When rounding to integers special statistical distributions may be observed. For example, the Poisson distribution of the number of photons can be observed in the rounding process. This also applies to the other variants.In a further embodiment of the method, the correction of measurement values of a detection channel can also be effected in that those individual detectors whose measurement values are assigned to a specific detection channel and which comprise at least one defective individual detector are combined according to a changed basic pattern without the defective individual detector. The common measured values of the relevant detection channel are then multiplied by a factor n / (n-m), wherein n is the number of individual detectors assigned to the detection channel according to the basic pattern and m is the number of defective individual detectors of the individual detectors assigned to the detection channel according to the basic pattern. The result is used to correct the measured values of the defective individual detectors.For all the mentioned embodiments of the invention, the corrected measured values can be, for example, arithmetic or weighted mean values, or solutions of regression equations. In the latter case, for example, a line can be placed virtually over a number of individual detectors adjacent to the defective pixel and a regression equation can be determined on the basis of the respective measured values, with the aid of which regression equation a corrected measured value for the defective pixel is determined.The invention can be used advantageously in a method in which the distribution of the measured values of the detection channels, in particular expressed as intensities, is used to determine an origin of a signal on which the measured values are based. In this case, the knowledge of the specific position of the respective defective pixel can be taken into account in a subsequent evaluation. For example, in a subsequent evaluation, a correction of the spatial position of the center of gravity of the captured measured values (intensity distribution) of the relevant detection channels can be carried out.In order to carry out the method according to the invention, knowledge about the presence of defective pixels and their respective position within the array of individual detectors is required. This can be obtained in various ways and kept ready for use in the method according to the invention. It is possible, for example, for the positions and numbers of the defective individual detectors to be determined in advance, i.e. before the method is carried out, and to be stored in such a way that they can be called repeatedly. For example, the array detector to be used can be examined under fixed conditions with regard to the noise characteristic and the functionality of its individual detectors. If defective individual detectors are detected in this case, the noise behavior of which deviates significantly from the noise behavior of the other individual detectors or the noise of which exceeds a predetermined threshold value ("hot pixel" or "scraper") or which do not transmit any measured values ("dead pixel"), their individual positions are stored in such a way that they can be called up repeatedly. This can preferably be done electronically in lists, for example in so-called LUTs ("look-up table").The criteria that decide on the use or discard of the pixels can be dependent on the respective application. There may be, for example, several lists for different applications.In order to be able to react alternatively or additionally to the fact that the noise behavior of the "scrubbers" possibly changes over the useful life of the array detector and / or it manifests itself differently in changing operating conditions such as increasing or decreasing ambient temperature, the behavior of the individual detectors can be repeatedly examined after a predefined time period and / or after changed operating conditions have occurred. If necessary, an existing list of defective individual detectors of the array is updated.Changes in the operating conditions can be determined on the basis of a threshold value of a predetermined operating parameter in each case. For this purpose, for example, exceeding or falling below a defined threshold value can be used as an absolute feature of a changing operating state.Furthermore, it is possible to use relative changes as a basis for decision. Thus, a difference of the values of an operating parameter, for example the ambient temperature, from a reference state valid to that point can be determined and an admissible deviation from the reference state can be used for the determination of a changed operating state. A temperature change of, for example, 10 K or intervals of 10 K each relative to an output temperature set as a reference state can be defined as a change in the operating conditions and can lead to a check for defective individual detectors and an update of the list. Lists can also be created for absolute or relative changes of operating conditions, stored in a retrievable manner and updated as appropriate.The invention is directed to the correction of measurement values of optical detection channels, wherein these are formed from a plurality of measurement values. In the case of the above-mentioned combination or "binning", the provision of incorrect values of the relevant detection channel can be reduced by means of the method according to the invention.The method according to the invention is of particular importance if the values of a detection channel are taken into account together with its relative local position within the array of individual detectors. Thus, for example, based on the spatial positions of the detection channels on the array and their measurement values, a localization of an origin of the signal acquired by means of the array can be carried out mathematically, which is in particular below the diffraction-limited resolution of the used detection optics.In particular, within the scope of the method according to the invention, measured values of a plurality of detection channels can be evaluated and an intensity distribution of recorded measured values of at least one object to be imaged can be determined. For example, an object to be imaged can be a sample labeled with fluorophores that emits fluorescent light of at least one specific wavelength. The fluorophores can be excited by means of suitable excitation radiation to emit the fluorescent light, as is known, for example, from the field of fluorescence microscopy.The intensity distribution can be used to determine the origin of a signal on which the measured values are based. In this case, the spatial resolution of the origin is advantageously better than a diffraction-limited determination of the origin.To carry out the method according to the invention, a microscope can be used, the control unit and / or evaluation unit of which is configured to carry out the method, in particular in the variants A, B and C described in more detail below. Such a microscope is encompassed by the invention.The invention is explained in more detail below with reference to exemplary embodiments and figures. The following are shown: FIG. 1 shows a schematic illustration of a section from an array detector and, by way of example, a summary (binning) of in each case a plurality of individual detectors to form detection channels in a plan view of the detection surface of the array detector; FIG. 2 shows a schematic illustration of three detection channels with a defective pixel on an array detector with individual detectors arranged periodically offset with respect to one another; FIG. 3 shows a schematic illustration of three detection channels on an array detector with individual detectors arranged row by row and column by column; FIG. 4 shows a schematic illustration of a first embodiment of the method according to the invention (variant A); FIG. 5 shows a schematic illustration of the assignment of measured values resulting from the method according to the invention; FIG. 6 shows a schematic illustration of a first substep of a second configuration of the method according to the invention (variant B); FIG. 7 shows a schematic illustration of a second substep of the second configuration of the method according to the invention (variant B); FIG. 8 shows a schematic illustration of a first substep and a second substep of a third configuration of the method according to the invention (variant C); FIG. 9 shows a schematic illustration of an optical device, in particular of a microscope, for carrying out the method according to the invention.When carrying out the method according to the invention, an array 1 of individual detectors, which is known in principle and of which a selection is designated here and below by way of example as A1 to A7, B1 to B7 and C1 to C7, respectively, is used. FIG. 1 shows only a section of the entire detection surface of the array detector 1. In each case seven individual detectors A 1 to A 7, B 1 to B 7 and C 1 to C 7, respectively, are combined (binning) and each form a detection channel DA, DB and DC (see FIG. 2 ). Further detection channels can be formed, which is shown in FIG. 1 by way of example by the seven individual detectors filled with a rectangular pattern.Within the individual detectors A1 to A7 assigned to the detection channel DA, a defective pixel A3 has been detected, which either generates excessive noise or provides no signals at all. The exemplary assumption that the individual detector A 3 shown in black represents a defective pixel applies to all exemplary embodiments.The individual detectors A1 to C7 shown in FIG. 2 are arranged vertically and horizontally periodically offset with respect to one another, as is customary, for example, in the case of APD arrays or SPAD arrays. The individual detectors A1 to A7, B1 to B7 and C1 to C7 are arranged in basic patterns in which six of the individual detectors are present around a central individual detector A4, B4 and C4, respectively. In further embodiments of the method, other basic patterns can be selected.For the method according to the invention, array detectors 1 can also be used in which the individual detectors, in this example A1 to C9, are arranged row by row and column by column (FIG. 3 ). Such array detectors may be, for example, CCD or CMOS chips. In the exemplary embodiment according to FIG. 3, nine individual detectors A 1 to A 9, B 1 to B 9 and C 1 to C 9 are each arranged in basic patterns of 3 x 3 individual detectors and are assigned to the respective detection channels DA, DB and DC.The detection channels DA, DB and DC are offset from one another in the vertical direction.In further embodiments of the invention, the manner of combining to form detection channels can be carried out differently from that described above. In addition, other numbers of individual detectors and / or other relative positions to one another can be realized.An embodiment of the method according to the invention, also referred to here as variant A, is illustrated in FIGS. 4 and 5. The measured values of the individual detectors A 1, A 4, A 6, B 5, B 7 and C 2 directly adjacent to the defective pixel A 3 are individually read out and are held at least for the determination of a corrected measured value. The remaining individual detectors of each detection channel DA, DB and DC are combined in the sense of a changed basic pattern. For the detection channel DA, this relates to the individual detectors A 2, A 5 and A 7, for the detection channel DB to the individual detectors B 1 to B 4 and B 6, and for the detection channel DC to the individual detectors C 1 and C 3 to C 7. The detection channels formed in the meantime on account of the changed basic patterns are referred to as DAsub, DBsuband DCsub, respectively (FIG. 4 ).The measured values of the individual detectors A1, A4, A6, B5, B7 and C2 are used to calculate an average value from these (see the extracted image section). This average value determined in this way is assigned to the defective pixel A 3 as a corrected measured value, which is marked A 3 k(FIG. 5 ).Although this procedure increases the number of required detection units from three to nine, this is still significantly less than if the twenty-one individual detectors of the three detection channels DA, DB and DC were individually read out.In order to further reduce the data volume during the determination of the corrected measured value or to keep the required number of detection units 8 (see FIGS. 6, 7 and 9 ) low, the individual detectors A 1, A 4, A 6 and B 5 and B 7 each belonging to a basic pattern can also be combined (indicated with broken solid line). In a subsequent calculation of the corrected mean value, the contributions of the individual groups must then be weighted accordingly. Thus, in the example, A3kis calculated as follows:In this way, the number of required detection units 8 can be limited to six.The defective pixel A 3 subsequently enters into an evaluation as a pixel with a corrected measured value A 3 k. In this case, the detection channel DA is used as the sum of the measured values of the detection channel DAsub and of the detectors A 1, A 4, A 6, individually or already combined, and A 3 k. The detection channels DB and DC are each provided for evaluation as the sum of the detection channels DBsub and DCsub and of the individual detectors B 5 and B 7 and C 2 respectively associated according to the basic pattern (FIG. 5 ).In an embodiment of the method according to the invention, also referred to as variant B_, a special embodiment of the optical device used for carrying out the method, in particular of the microscope M (see FIG. 9 ), is required. It is necessary that at least selected individual detectors can be assigned simultaneously to two different detection units 8 (counters) without loss of information and their measured values can be registered, for example, both by means of a first detection unit 8DAsub and by means of a second detection unit 8sec (FIGS. 6 and 7 ).The individual detectors A 1, A 2, A 4, A 5, A 6 and A 7 are combined in a changed basic pattern in a detection channel DAsub and measured by the first detection unit 8DAsub. The individual detectors B 1-B 7 and C 1-C 7 are combined according to the basic pattern to form the detection channels DB and DC, respectively, and are detected by means of the detection units 8B and 8C, respectively.In addition, the individual detectors A 1, A 4, A 6, B 5, B 7, C 2 are combined and measured by means of the detection unit 8 sec(FIG. 7 ). The intermediate detection channel thus generated is referred to herein as a combined detection channel Dcomb. The detected value of the combined detection channel Dcomb is divided by the number of individual detectors involved in its occurrence, i.e. six in this case. The value thus calculated is assigned to the defective pixel A 3 as a corrected measurement value (single detector A 3 k). The number of required detection units is four in the example.In order to now determine the value of the detection channel DA, the detected measured values of the detection channel DAsub and the value A3k are added. The evaluation can then take place again according to the respective basic pattern (see also FIG. 5 ).In a further embodiment of the method (variant C), the individual detectors A 1 and A 2 and also A 4 to A 7 are combined to form a detection channel DAsub (FIG. 8 ). The corrected measurement value for the defective single detector A 3 is determined by multiplying the resulting measurement value of the detection channel DAsub by a factor (n / (n-m)). In this case, n is the number of individual detectors of the detection channel DA, i.e. seven in this example. The term m is the number of defective pixels in this detection channel. In the example, the detection channel DA is also corrected.The individual detectors B 1 to B 7 and C 1 to C 7 are assigned to the detection channels DB and DC according to the basic pattern. Only three detection units are required, but the accuracy of the correction is somewhat lower than in the other two variants.Optionally, a mathematical adaptation of the center of gravity of the detection channel DA can be carried out. Since exactly the position of the defective pixel A 3 is known, the center of gravity of the relevant detection channel and the profile of the intensity distribution of the detected measured values determined from a plurality of detection channels can be adjusted accordingly.FIG. 9 shows, in a greatly simplified manner, a microscope M suitable for carrying out the method according to the invention. Radiation (illumination radiation) comprising at least one selected wavelength reaches a sample 4 (object 4) from a light source 2 by means of an illumination optical unit 3. This is provided, for example, with at least one fluorophore, which is excited to emit fluorescent radiation by the action of the selected wavelength (excitation wavelength). The sample 4 can be present on an optionally adjustable sample table 5.Emitted fluorescence radiation, in other embodiments of the invention a transmitted or reflected radiation, is collected as detection radiation by means of an objective 6 and directed onto the array detector 1 by means of further optical elements 7. The detection radiation is detected by the latter as described above and the corresponding measured values are registered for each individual detector or for each detection channel by a number of detection units 8 (shown in simplified form). The measured values are transmitted to an evaluation unit 9. This is configured to carry out the method according to the invention. For this purpose, the evaluation unit 9 can also have a control function and, for example, set the manner of combining the individual detectors into detection channels according to basic pattern or changed basic pattern (illustrated by dashed lines).In addition, the evaluation unit 9 can keep available the list of defective individual detectors and generate updated lists if necessary.Reference numerals denote reference numerals1 Array detector 2 Light source 3 Illumination optical unit 4 Sample, object 5 Sample stage 6 Objective 7 Detection optical unit 8 Detection unit 8DAsubFirst detection unit 8sec Second detection unit 8B, 8C Detection unit (of the detection channels DB and DC) 9 Control unit / evaluation unit oA Optical axis A 1-A 7; B 1-B 7; C 1-C 7 Individual detector A 3 k Defekte pixel with corrected measurement value DA; DB; DC Detection channel DAsub, DBsub, DCsub Intermediate Detection channel Dcomb Combined Detection channel

Claims

Method for correcting measured values of a detection channel (DA, DB, DC), wherein - measured values are detected by means of a specific arrangement (array) of a plurality of individually readable optical individual detectors (A1 to C7), and - the measured values are assigned to a respective detection channel of a selection of the optical individual detectors (A1 to C7) of the array, characterized in that - a plurality of optical individual detectors (A1 to C7) are combined according to a basic pattern to form in each case one detection channel (DA, DB, DC) and their measured values are jointly assigned to the relevant detection channel (DA, DB, DC); In the presence of at least one defective individual detector (A3), the summary according to the basic pattern is canceled at least for the relevant detection channel (DA, DB, DC), - a changed basic pattern is defined for the canceled summary of individual detectors (A1 to C7) and measured values of the individual detectors (A1 to C7) are detected in accordance with the changed basic pattern; - correction of the measured values of the defective individual detector is carried out using measured values of individual detectors (A1 to C7) of the changed basic pattern arranged in a surrounding manner, and - after correction of the measured values of the respective defective individual detectors (A3), a subsequent evaluation of the detected measured values per detection channel (DA, DB, DC) is carried out in accordance with the basic pattern.Method according to claim 1, characterised in that the individual detectors (A1 to C7) are arranged adjacent to one another in each case according to the basic pattern.Method according to Claim 1 or 2, characterized in that the measurement values of the individual detectors (A1 to C7) adjacent to the defective individual detector (A3) are individually read out or the adjacent individual detectors (A1 to C7) belonging to a common detection channel (DA, DB, DC) in each case according to the basic pattern are combined in each case, a mean value is formed from these measurement values and is assigned to the defective individual detector (A3) as a corrected measurement value and the measurement values and the corrected measurement values are subsequently assigned to each detection channel (DA, DB, DC) according to the basic pattern, wherein at least one of the adjacent individual detectors (A1 to C7) used for correction is assigned to a different detection channel (DA, DB, DC) than the defective individual detector (A3) according to the basic pattern.Method according to Claim 1 or 2, characterized bythe use of a first and a second detection unit (8), by means of which measured values of individual individual detectors (A1 to C7) can be detected simultaneously and independently of one another without loss of information, wherein - the individual detectors (A1 to C7) without the defective individual detector (A3) are combined according to the basic pattern and their measured values are fed to a first detection unit (8DAsub), - individual detectors (A1 to C7) adjacent to the defective individual detector (A3) are combined and their measured values are fed as a combined detection channel (Dcomb) to a second detection unit (8sec), - and the combined measured values of the individual detectors (A1 to C7) of the changed basic pattern are used, in order to calculate a corrected measured value and assign this to the defective individual detector as a corrected measured value.Method according to Claim 4, characterized in that the combined measured values determined by means of the second detection unit (8sec) are used to calculate a corrected measured value by multiplying their sum by a factor 1 / n*, wherein n* is the number of individual detectors (A1 to C7) of the combined detection channel (Dcomb).Method according to one of the preceding claims, characterized in that the corrected measured values are arithmetic or weighted mean values, or solutions of regression equations.Method according to Claim 1, characterized in that those individual detectors (A1 to C7) whose measurement values are assigned to a specific detection channel (DA, DB, DC) and which comprise at least one defective individual detector (A3), without the defective individual detector (A3), are combined in the sense of a changed basic pattern and the common measurement values of the relevant detection channel (DA, DB, DC) are multiplied by a factor n / (n-m), where n is the number of individual detectors (A1 to C7) assigned to the detection channel (DA, DB, DC) in accordance with the basic pattern and m is the number of defective individual detectors (A3) of the individual detectors assigned to the detection channel in accordance with the basic pattern, and the result is used for correcting the measurement values of the defective individual detectors.Method according to Claim 7, characterized in that, in an evaluation following the acquisition of the measured values, the spatial position of the centre of gravity of the acquired measured values (intensity distribution) is corrected.Method according to one of the preceding claims, characterized in that the positions and numbers of the defective individual detectors (A3) are determined in advance and are stored such that they can be called repeatedly.Method according to one of Claims 1 to 9, characterized in that the determination of the defective individual detectors (A3) is repeated after a predetermined time period and / or after changed operating conditions have occurred, and a list of defective individual detectors (A3) of the array is updated if appropriate.Method according to Claim 10, characterized in that the presence of changed operating conditions is determined on the basis of a threshold value of a predetermined operating parameter in each case.Method according to one of the preceding claims, characterized in that measured values of a plurality of detection channels (DA, DB, DC) are evaluated and an intensity distribution of recorded measured values of at least one object (4) to be imaged is determined.Method according to Claim 12, characterized in that the intensity distribution is used to determine an origin location of a signal on which the measurement values are based, the precision of the location determination being below (better) than a diffraction-limited determination of the origin location.

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