Process Chamber Mixer
JP1790475SActive Publication Date: 2025-02-04APPLIED MATERIALS INC
Patent Information
- Application Number
- JP2024014884D
- Authority / Receiving Office
- JP · JP
- Patent Type
- Designs
- Current Assignee / Owner
- Priority Date
- 2024-01-19
- Filing Date
- 2024-07-19
- Publication Date
- 2025-02-04
- Estimated Expiration
- 2049-07-19
Smart Images
Figure 0001790475000001 
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Abstract
This article is attached, for example, to the top lid of a process chamber in an assembled state inserted into a process chamber manifold, and is used to mix multiple gases flowing in from the outside within the central bore of this article and deliver the mixed gas to the process chamber below.
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Citation Information
Cited By
Process chamber mixer
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