Raw gas supply system

Abstract

To supply a solid raw material in a form not giving a bad influence on processing with a processing unit, to a raw material gas supply system for supplying raw material gas produced by evaporating the solid raw material to the processing unit.SOLUTION: A raw material gas supply system for supplying raw material gas produced by evaporating a solid raw material to a processing unit comprises: an evaporation device for producing the raw material gas by evaporating the solid raw material; a feeding mechanism for feeding a diffusion system to the evaporation device from a storage container for storing the diffusion system, in which the solid raw material diffused in liquid; and a separation mechanism for separating the solid raw material from the diffusion system in the evaporation device. The evaporation device temporarily stores the diffusion system, and the separation mechanism separates the solid raw material by evaporating a diffusion medium of the diffusion system temporarily stored in the evaporation device. The evaporation device has plural shelves for housing the diffusion system, and the shelves are laminated in a vertical direction.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a source gas supply system. [Background technology]

[0002] Patent Document 1 discloses a source gas supplying device that sublimates a solid source material in a source container and supplies the obtained source material together with a carrier gas to a consumption area. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2016-191140 A Summary of the Invention [Problem to be solved by the invention]

[0004] The technology according to the present disclosure supplies a source gas at a high flow rate from a source gas supply system that supplies a source gas generated by vaporizing a solid source to a processing device. [Means for solving the problem]

[0005] One aspect of the present disclosure is a raw material gas supply system that supplies a raw material gas generated by vaporizing a solid raw material to a processing device, the raw material gas supply system including: a vaporizer that vaporizes the solid raw material to generate the raw material gas; a delivery mechanism that delivers the dispersion system from a storage container that stores a dispersion system in which the solid raw material is dispersed in a liquid to the vaporizer; and a separation mechanism that separates the solid raw material from the dispersion system within the vaporizer, wherein the vaporizer temporarily stores the dispersion system, and the separation mechanism evaporates a dispersion medium of the dispersion system temporarily stored in the vaporizer to separate the solid raw material, and the vaporizer has a plurality of shelves that store the dispersion system, and the shelves are stacked in a vertical direction. Effect of the Invention

[0006] According to the present disclosure, a raw material gas can be supplied at a high flow rate from a raw material gas supply system that supplies a raw material gas generated by vaporizing a solid raw material to a processing device. [Brief description of the drawings]

[0007] [Figure 1] 1 is a system configuration diagram illustrating an outline of the configuration of a raw material gas supply system according to a first embodiment. [Diagram 2] FIG. 2 is a cross-sectional view showing an outline of the configuration of the vaporizer. [Diagram 3] FIG. 2 is an explanatory diagram of one step of a film forming process including a source gas supply process using a source gas supply system. [Figure 4] 10A to 10C are explanatory diagrams of other steps of a film forming process including a source gas supply process using the source gas supply system. [Diagram 5] 10A to 10C are explanatory diagrams of other steps of a film forming process including a source gas supply process using the source gas supply system. [Figure 6] 10A to 10C are explanatory diagrams of other steps of a film forming process including a source gas supply process using the source gas supply system. [Figure 7] FIG. 13 is a diagram showing another example of the vaporizer. [Figure 8] FIG. 13 is a diagram showing another example of the vaporizer. [Figure 9] FIG. 11 is a partially cutaway perspective view of another example of the vaporizer. [Figure 10] 10 is a perspective view of a first member of a tray assembly of the vaporizer of FIG. 9. FIG. [Figure 11] 10 is a perspective view of a second member of the tray assembly of the vaporizer of FIG. 9. FIG. [Figure 12] FIG. 13 is a diagram illustrating a part of a raw material gas supply system according to a second embodiment. [Figure 13] FIG. 11 is a diagram illustrating a part of a raw material gas supply system according to a third embodiment. [Figure 14] FIG. 13 is a system configuration diagram illustrating an outline of the configuration of a raw material gas supply system according to a fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] For example, in the manufacturing process of semiconductor devices, various processes, such as a film formation process for forming a desired film, such as a metal film, are repeatedly performed on a substrate, such as a semiconductor wafer (hereinafter referred to as a "wafer"), thereby manufacturing the desired semiconductor device on the wafer.

[0009] In a film forming process, a solid source material may be heated and vaporized to produce a source gas. For example, Patent Document 1 discloses a source gas supplying device that sublimates a solid source material in a source container, discharges a carrier gas from a carrier gas inlet into the source container, and supplies the sublimated source material together with the carrier gas to a film forming processing unit through a source gas flow path. In this source gas supplying device, when the remaining amount of solid source material in the source container becomes low, the source material is replenished by replacing the source container.

[0010] In this way, when the solid source material is sublimated in the source material container and supplied to the film forming apparatus, the source material container is usually installed near the film forming apparatus. However, in the method of replenishing the source material to the source material container by replacing the source material container as described above, if the source material container is installed near the film forming apparatus, the replacement work may adversely affect the film forming process.

[0011] Therefore, the technology disclosed herein makes it possible to replenish solid raw materials to a raw material gas supply system, which supplies the raw material gas generated by vaporizing a solid raw material to a processing device, in a form that does not adversely affect processing in the processing device.

[0012] Hereinafter, a source gas supply system and a source gas supply method according to the present embodiment will be described with reference to the drawings. In this specification and the drawings, elements having substantially the same functional configurations are denoted by the same reference numerals, and duplicated descriptions will be omitted.

[0013] [First embodiment] 1 is a system configuration diagram showing a schematic outline of the configuration of a source gas supply system according to Embodiment 1. A source gas supply system 1 of this example supplies a source gas to a film forming apparatus 500 serving as a processing apparatus for processing a substrate.

[0014] <Film forming equipment> 1, the film forming apparatus 500 includes a process vessel 501 configured to be capable of reducing pressure, a mounting table 502 provided in the process vessel 501 on which a wafer W as a substrate is horizontally mounted, and a gas inlet 503 for introducing a source gas or the like into the process vessel 501. In the film forming apparatus 500, a source gas is supplied from a source gas supply system 1, and a tungsten (W) film, for example, is formed by an ALD (Atomic Layer Deposition) method on the surface of the wafer W heated by a heater (not shown) of the mounting table 502. The film forming apparatus 500 is configured to be capable of supplying a reactive gas (reducing gas) that reacts with the source gas and an inert gas from a gas supply source (not shown) in addition to the source gas.

[0015] When a W film is formed in the film forming apparatus 500 as described above, the source gas supply system 1 supplies, for example, tungsten chloride (WCl x For example, a raw material gas generated by vaporizing a solid raw material such as WCl6) is supplied to the film forming apparatus 500.

[0016] <Raw gas supply system> The source gas supply system 1 includes, for example, two vaporizers 10 (10A and 10B), a storage container 20, a carrier gas supply source 30, and a pressure reduction mechanism 40.

[0017] The vaporizer 10 (10A, 10B) vaporizes (sublimates) a solid source material within the vaporizer 10 to generate a source gas. The vaporizers 10A and 10B are connected to the film forming apparatus 500 in parallel with each other.

[0018] In the source gas supply system 1, when a solid source material is supplied to the vaporizer 10 (10A, 10B), a dispersion in which the solid source material is dispersed in a liquid is supplied to the vaporizer 10 (10A, 10B).

[0019] In addition, a "dispersion" generally refers to a dispersion medium that can be gas, liquid, or solid. It means a system in which a dispersion material, which may be gas, liquid, or solid, is dispersed in a dispersion medium. Dispersion includes suspension and colloid as sub-concepts. The dispersion supplied to the vaporizer 10 (10A, 10B) is a system in which a solid raw material is dispersed as a dispersoid in a liquid dispersion medium. More specifically, in this embodiment, the dispersion supplied to the vaporizer 10 (10A, 10B) is a suspension in which a solid raw material is suspended in a liquid. A "suspension" is synonymous with a slurry, and refers to a dispersion system in which solid particles are dispersed in a liquid, in which the particle size of the solid particles as the dispersed substance is larger than that of the sol described below, and which settles on standing.

[0020] In the raw material gas supply system 1, the solid raw material is separated from the suspension containing the solid raw material as a dispersoid in the vaporizer 10 (10A, 10B), and the vaporizer 10 (10A, 10B) vaporizes the solid raw material to generate raw material gas.

[0021] The storage container 20 stores a suspension of solid raw materials. The solid raw materials suspended in the suspension have, for example, a particle size of 10 mm or less. The dispersion medium of the suspension is, for example, a medium that does not react with the solid raw materials and in which the solid raw materials are insoluble. In this example, the dispersion medium of the suspension has a higher vapor pressure than the solid raw materials. When the solid raw material is WCl6, the dispersion medium is, for example, ethanol, octane, toluene, or the like. In addition, a pressurized gas supply pipe 100 and a refill pipe 110 are connected to the storage container 20 .

[0022] The pressurized gas supply pipe 100 connects a supply source (not shown) of a pressurized gas such as N2 gas to the storage container 20. The pressurized gas introduced into the storage container 20 through the pressurized gas supply pipe 100 presses the liquid surface of the suspension in the storage container 20, and the suspension is supplied to the supply pipe 110.

[0023] Supply pipe 110 connects storage container 20 and vaporizer 10 (10A, 10B). Supply pipe 110 has a common supply pipe 111 whose upstream end is connected to storage container 20, and supply branch pipes 112 and 113 branching from the downstream end of common pipe 111. The downstream end of branch pipe 112 is connected to vaporizer 10A, and the downstream end of branch pipe 113 is connected to vaporizer 10B. Common pipe 111 is provided with pump 51 that delivers the suspension to vaporizer 10 (10A, 10B), and branch pipes 112 and 113 are provided with on-off valves 52 and 53, respectively. In this embodiment, the pressurized gas supply pipe 100, the pump 51, the refill pipe 110, etc. constitute a delivery mechanism, which delivers the suspension from the storage container 20 to the vaporizer 10 (10A, 10B). Note that if the suspension can be delivered from the storage container 20 to the vaporizer 10 (10A, 10B) simply by introducing pressurized gas from the pressurized gas supply pipe, the pump 51 may be omitted.

[0024] Further, a stirring stage 21 is provided for the storage container 20 as a stirring device for stirring the suspension in the storage container 20. The storage container 20 is placed on the stirring stage 21, and is vibrated, for example, in the horizontal direction by a vibration mechanism (not shown). When the stirring stage 21 vibrates, the storage container 20 on the stirring stage 21 also vibrates, and as a result, the suspension in the storage container 20 can be stirred. The vibration direction of the stirring stage 21 is not limited to the horizontal direction, and may be, for example, the vertical direction.

[0025] Carrier gas supply source 30 stores carrier gas and supplies the stored carrier gas to vaporizer 10 (10A, 10B). The carrier gas supplied from carrier gas supply source 30 to vaporizer 10 (10A, 10B) is supplied to film forming apparatus 500 via a raw material gas supply pipe described later together with raw material gas generated by vaporizing solid raw material in vaporizer 10 (10A, 10B). Further, a carrier gas supply pipe 120 is connected to the carrier gas supply source 30 .

[0026] Carrier gas supply pipe 120 connects carrier gas supply source 30 and vaporizer 10 (10A, 10B). Carrier gas supply pipe 120 has common pipe 121 for carrier gas, the upstream end of which is connected to carrier gas supply source 30, and branch pipes 122, 123 for carrier gas branching from the downstream end of common pipe 121. The downstream end of branch pipe 122 is connected to vaporizer 10A, and the downstream end of branch pipe 123 is connected to vaporizer 10B. Branch pipes 122, 123 are provided with opening / closing valves 54, 55, which are carrier gas supply valves, respectively.

[0027] The pressure reducing mechanism 40 reduces the pressure inside the vaporizer 10 (10A, 10B). The pressure reducing mechanism 40 has an exhaust pump 41 that exhausts the inside of the vaporizer 10 (10A, 10B) and an exhaust pipe 42 that connects the exhaust pump 41 and the vaporizer 10 (10A, 10B). The exhaust pipe 42 has a common exhaust pipe 43 whose downstream end is connected to the exhaust pump 41, and exhaust branch pipes 44, 45 that converge at the upstream end of the common pipe 43. The upstream end of the branch pipe 44 is connected to the vaporizer 10A, and the upstream end of the branch pipe 45 is connected to the vaporizer 10B. The branch pipes 44, 45 are provided with opening and closing valves 56, 57, respectively.

[0028] Furthermore, in the source gas supply system 1, exhaust pipes 130 and 131 for discharging the dispersion medium of the suspension are connected to the vaporizers 10A and 10B, respectively. The exhaust pipes 130 and 131 are provided with on-off valves 58 and 59, respectively. Furthermore, in the source gas supply system 1, the vaporizer 10 (10A, 10B) and the film forming apparatus 500 are connected by a source gas supply pipe 70. The source gas supply pipe 70 has a common pipe 71 for source gas, the downstream end of which is connected to the film forming apparatus 500, and branch pipes 72 and 73 for source gas branched from the upstream end of the common pipe 71. The upstream end of the branch pipe 72 is connected to the vaporizer 10A, and the upstream end of the branch pipe 73 is connected to the vaporizer 10B. The common pipe 71 is provided with a mass flow meter 60 and a flow control valve 61 in this order from the upstream side, and the branch pipes 72 and 73 are provided with opening / closing valves 62 and 63 as source gas supply valves, respectively.

[0029] The raw material gas supply system 1 configured as above is provided with a control device U. The control device U is configured by, for example, a computer equipped with a CPU, a memory, and the like, and has a program storage unit (not shown). The program storage unit also stores a program for controlling various mechanisms and various valves to realize a film formation process including a raw material gas supply process using the raw material gas supply system 1. The above program may be recorded in a computer-readable storage medium and installed in the control device U from the storage medium. Also, a part or all of the program may be realized by dedicated hardware (circuit board).

[0030] <Vaporizer> Next, vaporizers 10 (10A, 10B) will be described using vaporizer 10A as an example with reference to Fig. 2. Fig. 2 is a cross-sectional view showing an outline of the configuration of vaporizer 10A.

[0031] 2, vaporization device 10A has container 201 as a housing for accommodating solid raw material separated from suspension discharged from storage container 20 by a discharge mechanism including pump 51 etc. Container 201 is formed in a cylindrical shape from, for example, a metal material having high thermal conductivity.

[0032] A supply port 201a to which the downstream end of a supply branch pipe 112 is connected is formed in the center of the top wall of container 201. The suspension delivered from storage container 20 is introduced into vaporizer 10A, i.e., container 201, through supply port 201a. In addition, a supply valve 201b for opening and closing supply port 201a is provided for supply port 201a. Supply valve 201b is formed of, for example, a fluororesin such as PTFE.

[0033] The supply valve 201b closes the supply port 201a with its lower portion fitting within the supply port 201a. The supply port 201a is formed in a cone shape that opens at the bottom, and has a slope that slopes downward toward the center. The lower portion of the supply valve 201b that fits into this supply port 201a is formed in a shape corresponding to the cone shape, and like the supply port 201a, has a slope that slopes downward toward the center. The slope of the supply port 201a and the slope of the lower portion of the supply valve 201b form a sealing surface.

[0034] Further, a filter 202 having a large number of pores smaller than the solid raw material R in the suspension is provided inside the container 201. Specifically, the filter 202 is provided so as to extend in the horizontal direction inside the container 201, and is formed in a corrugated shape in cross section. In container 201, filter 202 allows the dispersion medium L of the suspension delivered from storage container 20 to pass through but does not allow the solid raw material R of the suspension to pass through, thereby separating the solid raw material R from the suspension. In other words, filter 202 constitutes a separation mechanism that separates the solid raw material from the suspension in vaporization device 10A. The solid raw material R separated by filter 202 is deposited on filter 202.

[0035] Furthermore, a drain port 201c to which the upstream end of the discharge pipe 130 is connected is connected to the center of the bottom wall of the container 201. The dispersion medium L of the suspension that has passed through the filter 202 is discharged to the outside of the container 201 via the drain port 201c.

[0036] Furthermore, the container 201 is provided with a carrier gas inlet 201d connected to the downstream end of the branch pipe 122 for the carrier gas and leading to the carrier gas supply source 30, and a gas supply port 201e connected to the upstream end of the branch pipe 72 for the raw material gas and leading to the film forming apparatus 500. The carrier gas inlet 201d is formed on one side of the container 201 with the filter 202 in between, and the gas supply port 201e is formed on the other side. In this example, the carrier gas inlet 201d is provided in the lower part of the side wall on one side of the horizontal direction of the container 201, while the gas supply port 201e is provided in the upper part of the side wall on the other side of the horizontal direction of the container 201. That is, in this example, the carrier gas inlet 201d and the gas supply port 201e are provided at diagonal positions in the container 201.

[0037] With the above-mentioned configuration, the carrier gas introduced into the container 201 through the branch pipe 122 and the carrier gas inlet 201d passes through the filter 202 and further passes between the solid raw materials R. Thereafter, the carrier gas is supplied to the film forming apparatus 500 through the gas supply port 201e and the branch pipe 72 together with the raw material gas generated by vaporizing the solid raw material R.

[0038] In addition, an exhaust port 201f to which the upstream end of an exhaust branch pipe 44 is connected is connected to the container 201. The inside of the container 201 is exhausted through this exhaust port 201f. The exhaust of the inside of the container 201 is performed when the dispersion medium of the suspension remaining in the container 201 is evaporated, etc.

[0039] A heating mechanism 203 such as a jacket heater is provided around the side wall of the container 201. The heating mechanism 203 heats the container 201 and promotes vaporization of the solid source material R in the container 201.

[0040] Although detailed description will be omitted, the configuration of vaporizer 10B is the same as that of vaporizer 10A. In the following, the container, filter, supply valve, and heating mechanism of vaporizer 10B may be described as container 201, filter 202, supply valve 201b, and heating mechanism 203, similarly to vaporizer 10A.

[0041] <Film formation process> Next, an example of a film formation process including a raw material gas supply process using the raw material gas supply system 1 will be described with reference to Figures 3 to 6. In Figures 3 to 6, valves in an open state are painted white, valves in a closed state are painted black, and pipes through which the suspension, carrier gas, and raw material gas flow are shown by thick lines, and descriptions of the open and closed states of other valves are omitted. In the following description, it is assumed that at the start of the process, vaporizer 10B is in a state in which replenishment of solid raw material is not required, and vaporizer 10A is in a state in which replenishment of solid raw material is required.

[0042] (Film formation using source gas from vaporizer 10B) First, in a state where the supply valve 201b (see FIG. 2) of the vaporizer 10B is closed and the vaporizer 10B is heated by the heating mechanism 203, the on-off valve 55 of the branch pipe 123 for the carrier gas and the on-off valve 63 of the branch pipe 73 for the raw material gas are opened as shown in FIG. 3. As a result, the solid raw material R in the container 201 of the vaporizer 10B, which is communicated with the film forming apparatus 500 and depressurized, is vaporized to generate the raw material gas, which is supplied to the film forming apparatus 500 through the branch pipe 73 while the inside of the container 201 is pressurized by the carrier gas. At this time, the on-off valve 53 of the branch pipe 113 for supply, the on-off valve 59 of the exhaust pipe 131, and the on-off valve 57 of the branch pipe 45 for exhaust are closed.

[0043] When a source gas is supplied to the film forming apparatus 500, the source gas is adsorbed onto the surface of the wafer W heated by a heater (not shown) of the mounting table 502. Then, after a predetermined time has elapsed, the on-off valve 63 of the branch pipe 73 for the raw material gas is closed, and the supply of the raw material gas to the film forming apparatus 500 is stopped. Next, an inert gas is supplied as a replacement gas from a gas supply source (not shown) to the film forming apparatus 500, and after the gas in the processing vessel 501 is replaced, a reactive gas such as H2 gas is supplied from a gas supply source (not shown) to the film forming apparatus 500. As a result, the raw material adsorbed on the wafer W is reduced, and a tungsten film of, for example, one atomic layer is formed.

[0044] Then, after the supply of the reactive gas is stopped, a replacement gas is supplied from a gas supply source (not shown) to the film forming apparatus 500 to replace the gas in the processing vessel 501. Thereafter, the on-off valve 63 of the branch pipe 73 for the source gas is opened, and the supply of the source gas is resumed. A desired film having a desired thickness is formed on the wafer W by repeating the above-mentioned supply of the source gas, supply of the replacement gas, supply of the reaction gas, and supply of the replacement gas several times.

[0045] (Supply of solid raw material to vaporizer 10A) In parallel with the film formation using the source gas from the vaporizer 10B as described above, the solid source material is replenished to the vaporizer 10A. In other words, when the source gas can be supplied from the vaporizer 10B to the film formation apparatus 500, the suspension is sent from the storage container 20 to the vaporizer 10A, and the solid source material is separated from the suspension in the vaporizer 10A.

[0046] Specifically, first, the on-off valve 53 of the branch pipe 113 for supply is closed and the on-off valve 52 of the branch pipe 112 is open, and the on-off valve 201b of the vaporizer 10A and the on-off valve 58 of the exhaust pipe 130 are opened. Then, the pressurized gas is introduced into the storage container 20 through the pressurized gas supply pipe 100, and the pump 51 is driven. As a result, the suspension in the storage container 20 is supplied to the vaporizer 10A through the common pipe 111 for supply and the branch pipe 112. The suspension supplied to the vaporizer 10A is filtered and separated by the filter 202, and the solid raw material R is deposited on the filter 202, and the dispersion medium L that has passed through the filter 202 is discharged through the exhaust pipe 130. At this time, the on-off valve 54 of the branch pipe 122 for the carrier gas and the on-off valve 56 of the branch pipe 44 for exhaust are closed.

[0047] At the timing when a desired amount of solid raw material R is deposited on filter 202 of vaporizer 10A, the introduction of the pressurized gas and the operation of pump 51 are stopped. Specifically, the timing is, for example, the timing when a predetermined time has elapsed since the introduction of the pressurized gas into storage container 20 and the operation of pump 51 were started.

[0048] Thereafter, the dispersion medium of the suspension in the container 201 of the vaporizer 10A is evaporated. Specifically, for example, as shown in FIG. 4, the on-off valve 52 of the supply branch pipe 112, the supply valve 201b (see FIG. 2) of the vaporizer 10A, and the on-off valve 58 of the exhaust pipe 130 are closed, and the on-off valve 56 of the exhaust branch pipe 44 is opened. In this state, the exhaust pump 41 is driven to reduce the pressure inside the container 201 of the vaporizer 10A, thereby evaporating the dispersion medium of the suspension in the container 201. During the evaporation of the dispersion medium, the pressure inside the container 201 is adjusted to a pressure lower than the vapor pressure of the dispersion medium and higher than the vapor pressure of the solid raw material. At the timing when the evaporation of the dispersion medium is completed, specifically, at the timing when a predetermined time has elapsed since the on-off valve 56 of the exhaust branch pipe 44 was opened, the on-off valve 56 is closed. This completes the supply of the solid raw material to the vaporizer 10A. The step of evaporating the dispersion medium may be omitted.

[0049] (Switching of raw gas supplier) When a predetermined time has elapsed since the start of film formation using the raw material gas from the vaporizer 10B, specifically, when film formation has been performed on a predetermined number of wafers W, the solid raw material R in the vaporizer 10B becomes low, so the source of the raw material gas is switched to the vaporizer 10A.

[0050] 5, first, the on-off valve 63 of the branch pipe 73 for the raw material gas and the on-off valve 55 of the branch pipe 123 for the carrier gas connected to the vaporizer 10B are closed. Then, in a state in which the supply valve 201b of the vaporizer 10A is closed and the vaporizer 10A is heated by the heating mechanism 203, the on-off valve 54 of the branch pipe 122 for the carrier gas and the on-off valve 62 of the branch pipe 72 for the raw material gas are opened. As a result, the solid raw material R in the container 201 of the vaporizer 10A, which is in communication with the film forming apparatus 500 and depressurized, is vaporized to generate the raw material gas, which is supplied to the film forming apparatus 500 through the branch pipe 72 while the inside of the container 201 is pressurized by the carrier gas. Then, in the same manner as described above, the supply of the source gas, the supply of the replacement gas, the supply of the reaction gas, and the supply of the replacement gas are repeated several times, so that a desired film having a desired thickness is formed on the wafer W.

[0051] (Supply of solid raw material to vaporizer 10B) In parallel with the film formation using the source gas from the vaporizer 10A as described above, the solid source material is replenished to the vaporizer 10B. In other words, when the source gas can be supplied from the vaporizer 10A to the film formation apparatus 500, the suspension is sent from the storage container 20 to the vaporizer 10B, and the solid source material is separated from the suspension in the vaporizer 10B.

[0052] Specifically, first, in a state where the on-off valve 52 of the supply branch pipe 112 is closed and the on-off valve 53 of the branch pipe 113 is open, the supply valve 201b of the vaporizer 10B and the on-off valve 59 of the discharge pipe 131 are opened. Then, the pressurized gas is introduced into the storage container 20 through the pressurized gas supply pipe 100, and the pump 51 is driven. As a result, the suspension in the storage container 20 is supplied to the vaporizer 10B through the supply common pipe 111 and the branch pipe 113. The suspension supplied to the vaporizer 10B has the solid raw material R separated by the filter 202 and deposited on the filter 202, and the dispersion medium L that has passed through the filter 202 is discharged through the discharge pipe 131. At the timing when a desired amount of solid source material R is deposited on filter 202 of vaporizer 10B, the introduction of pressurized gas into storage container 20 and the operation of pump 51 are stopped.

[0053] Thereafter, the dispersion medium of the suspension in the container 201 of the vaporizer 10B is evaporated. Specifically, for example, as shown in FIG. 6, the on-off valve 52 of the supply branch pipe 112, the supply valve 201b (see FIG. 2) of the vaporizer 10B, and the on-off valve 58 of the exhaust pipe 130 are closed, and the on-off valve 57 of the exhaust branch pipe 45 is opened. In this state, the exhaust pump 41 is driven to reduce the pressure inside the container 201 of the vaporizer 10B, thereby evaporating the dispersion medium of the suspension in the container 201. At the timing when the evaporation of the dispersion medium is completed, the on-off valve 57 of the exhaust branch pipe 45 is closed. This completes the supply of the solid raw material to the vaporizer 10B. Note that this step of evaporating the dispersion medium may be omitted.

[0054] The suspension in storage container 20 is stirred by stirring stage 21 at least when the suspension is being supplied to vaporizers 10A and 10B. Furthermore, when the suspension is being supplied to the vaporizer 10A, the heating of the vaporizer 10A by the heating mechanism 203 is stopped. The same applies to the vaporizer 10B. From the viewpoint of improving the operation rate, after the solid raw material is replenished to vaporizer 10A, preheating may be performed by heating container 201 to a predetermined temperature (for example, 120°C to 130°C lower than the sublimation temperature of WCl6) by heating mechanism 203 until the gas supply from vaporizer 10A starts. The same applies to vaporizer 10B.

[0055] When the amount of raw material gas in the gas supplied from the vaporizers 10A and 10B to the film forming apparatus 500 (hereinafter referred to as the "pickup amount") decreases, the unvaporized solid raw material R in the vaporizers 10A and 10B may be discharged. As a method for discharging the solid raw material R, for example, the following methods (A) and (B) are available. (A) A method of vaporizing the solid source material R by at least one of heating the solid source material R by the heating mechanism 203 and reducing the pressure inside the container 201 by the pressure reduction mechanism 40, and exhausting the solid source material R via the film forming apparatus 500 or the pressure reduction mechanism 40. (B) A method in which the solid raw material R is melted by a heating mechanism 203 and discharged through discharge pipes 130 and 131.

[0056] As described above, in the raw material gas supply system 1 according to the present embodiment, when the solid raw material R is supplied to the vaporizer 10 (10A, 10B), the solid raw material R is sent out from the storage container 20 that stores the suspension in which the solid raw material R is suspended in liquid by the sending mechanism. Then, the solid raw material R is separated from the suspension in the vaporizer 10 (10A, 10B) by a separation mechanism composed of a filter 202 and the like. Therefore, according to the present embodiment, even if the vaporizer 10 (10A, 10B) is installed near the film forming apparatus 500, when the solid raw material is supplied to the vaporizer 10 (10A, 10B), no work near the film forming apparatus 500 is required. Therefore, the solid raw material R can be supplied to the vaporizer 10 (10A, 10B) in a form that does not adversely affect the film forming process in the film forming apparatus 500.

[0057] Furthermore, according to this embodiment, the storage container 20 to be replaced does not also serve as an evaporation device, and there is a high degree of freedom in where it can be installed, so the storage container 20 can be installed in a location that makes it easy to perform the replacement work.

[0058] In addition, since the solid raw material cannot be expected to transfer heat by convection heat conduction like the gaseous raw material or the liquid raw material, it takes a long time to heat the raw material itself. In contrast, if the solid raw material R is replenished by supplying a suspension in which the solid raw material R is suspended by a delivery mechanism as in the present embodiment, a configuration can be adopted in which the solid raw material R is alternately replenished to the two vaporizers 10 (10A, 10B). In this configuration in which the solid raw material R is alternately replenished, while a raw material gas is being supplied from one vaporizer, the solid raw material R can be replenished to the other vaporizer and the solid raw material R can be heated in the other vaporizer. Therefore, even when a solid raw material R that takes a long time to heat is used, it is possible to prevent a decrease in the throughput of the film formation process due to the waiting time until the solid raw material R is heated to a desired temperature.

[0059] As a source gas supply method different from the present embodiment, a liquid source obtained by dissolving a solid source in a solvent is supplied to a vaporizer, and the liquid source is vaporized in the vaporizer to generate and supply a source gas. In this method, the liquid source contains carbon from the solvent, so there is a risk that the quality of the film formed by the source gas may deteriorate. In contrast, in the source gas supply method according to the present embodiment, the dispersion medium and the solid source are separated before generating the source gas, so a high-quality film can be formed.

[0060] Furthermore, when directly vaporizing a liquid raw material obtained by dissolving a solid raw material in a solvent, the solvent needs to have approximately the same vapor pressure as the solid raw material, and the type of solvent is limited. In contrast, when vaporizing the solid raw material after separating it from the suspension as in this embodiment, the dispersion medium basically only needs to have a vapor pressure higher than that of the solid raw material, and the type of dispersion medium is not limited.

[0061] In addition, as a method of supplying the solid source material different from the present embodiment, a method of supplying the solid source material to the vaporizer in the form of a solution in which the solid source material is dissolved in a solvent, and then evaporating only the solvent from the solution in the vaporizer to precipitate the solid source material, thereby supplying the solid source material to the vaporizer. Compared to this method, the supply method according to the present embodiment can form a film of higher quality because the solid source material does not change in quality when it is supplied to the vaporizer.

[0062] In this embodiment, the filter 202 that separates the solid raw material R from the suspension is formed in a corrugated shape in cross section. Therefore, the area of ​​the solid raw material R separated by the filter 202 and deposited on the filter 202 that comes into contact with the carrier gas passing through the filter 202 is large. Therefore, even if the amount of the solid raw material R is small, a high pickup amount can be obtained.

[0063] Furthermore, in this embodiment, a carrier gas inlet 201d is provided on one side of the filter 202 in the container 201, and a gas supply port 201e is provided on the other side. Therefore, the carrier gas reaches the gas supply port 201e through the solid raw material R deposited on the filter 202, so that a high pickup amount can be reliably obtained.

[0064] Furthermore, in this embodiment, there is provided an agitation stage 21 that agitates the suspension in the storage container 20. Therefore, the ratio of the solid raw material R in the suspension supplied to the vaporization device 10 (10A, 10B) can be made uniform.

[0065] The stirring mechanism is not limited to the above example, and may be configured, for example, by a rotating body provided in the storage container 20 and a driving source for rotating the rotating body. In this case, the driving source may be provided inside or outside the storage container 20. Furthermore, the mechanism for stirring the suspension may be provided not only in the storage container 20 but also in the supply pipe 110 or the like. Instead of using a mechanism for stirring the suspension as described above, the suspension may be constantly circulated within a circulation path, and when it is necessary to replenish solid raw material, the suspension may be supplied from the circulation path to the vaporization device 10 (10A, 10B) to be replenished.

[0066] Furthermore, in this embodiment, the source gas supply system 1 has two vaporizers 10A and 10B connected in parallel to each other. Then, when one of the vaporizers 10A and 10B is in a state in which it is possible to supply the source gas to the film forming apparatus 500, the suspension is sent from the storage container 20 to the other of the vaporizers 10A and 10B to replenish the solid source material R. Therefore, when replenishing the solid source material, it is not necessary to stop the source gas supply system 1, and the supply of the source gas can be continued. Therefore, the throughput of the film forming process can be improved.

[0067] Also, unlike the present embodiment, when there is only one vaporizer that also serves as a source container, and the source is replenished by replacing the vaporizer, i.e., the source container, in order to shorten the time during which the source gas supply system is stopped during replenishment and prevent a decrease in throughput, the following may be done. That is, the source container may be made larger and filled with a large amount of solid source material. However, if a very expensive solid source material such as WCl6 is filled in a large amount in one container to be replaced, a large loss will be incurred if a problem occurs in the container due to an accident or the like during the replacement work. Therefore, it is difficult for semiconductor manufacturers to introduce a method of filling a large amount of solid source material in a container to be replaced and preventing a decrease in the throughput of the film formation process. In contrast, in this embodiment, the throughput of the film formation process can be improved even if the container to be replaced, i.e., the storage container 20, is not filled with a large amount. Therefore, the solid source supply method according to this embodiment is easy for semiconductor manufacturers to introduce.

[0068] In this embodiment, a supply valve 201b is provided to cut off communication between the supply pipe 110 and the vaporizer 10 (10A, 10B) when the source gas is supplied from the vaporizer 10 (10A, 10B) to the vaporizer 10 (10A, 10B). This makes it possible to prevent unnecessary gas components from being mixed into the source gas.

[0069] In the above, the start and stop of the supply of the source gas from the vaporizer 10A to the film forming apparatus 500 is switched by using the on-off valve 62 provided in the branch pipe 72 for the source gas. Instead of this, a switching valve may be provided downstream of the flow control valve 61 in the common pipe 71 for the source gas, and when the source gas from the vaporizer 10A is used, the on-off valve 62 in the branch pipe 72 may be always kept open, and the start and stop of the supply of the source gas may be switched by the switching valve in the common pipe 71. The same applies to the supply of the source gas from the vaporizer 10B.

[0070] <Another Example of Vaporizer 1> FIG. 7 is a diagram showing another example of the vaporizer. Vaporizer 300 in FIG. 7 has convex portion 301a formed in the center of container 301 so as to protrude upward from the bottom wall. The top of the protrusion 301a is formed in a cone shape, and the upper surface thereof is configured as a surface inclined downward toward the outside in the radial direction. A space K communicating with the drainage port 201c is formed inside the lower part of the protrusion 301a, and a hole 301b communicating with the space K from the outside of the protrusion 301a is formed on the side of the lower part of the protrusion 301a.

[0071] In the vaporizer 300, a filter 302 is provided between the inner peripheral surface of the sidewall of the container 301 and the outer peripheral surface of the protruding portion 301a, along the inner peripheral surface of the sidewall. The upper surface of the filter 302 is an inclined surface 302a that slopes downward toward the outside in the radial direction. Therefore, the solid raw material R in the suspension blocked by the filter 302 moves outward and downward along the inclined surface 302a of the filter 302. Therefore, most of the solid raw material R in the suspension is deposited on the filter 302 at a position close to the sidewall of the container 301 that is heated by the heating mechanism 203. Therefore, the solid raw material R deposited on the filter 302 can be efficiently vaporized by the heating mechanism 203.

[0072] The apex of the pyramidal top of the convex portion 301a of the container 301 is provided at a position facing the supply port 201a, and the filter 302 is located below the pyramidal top of the convex portion 301a. Therefore, the solid raw material R in the suspension supplied into the container 301 through the supply port 201a can be moved to the side of the container in a plan view without being left in the center of the container.

[0073] <Another Example of Vaporizer 2> FIG. 8 is a diagram showing another example of the vaporizer. In the vaporizers 10 (10A, 10B), 300 of the above examples, filters 202, 302 are provided in the containers 201, 301 to separate the solid raw material R in the suspension. In contrast, the vaporizer 310 of FIG. 8 is not provided with a filter. In the vaporizer 310, the container 311 is used as a storage unit that temporarily stores a dispersion system (suspension in this embodiment) in which the solid raw material is dispersed. In this example, a separation mechanism that separates the solid raw material vaporizes (evaporates) only the dispersion medium of the suspension temporarily stored in the container 311 to separate the solid raw material R from the suspension. The evaporation of the dispersion medium L of the suspension is performed, for example, by reducing the pressure using the pressure reducing mechanism 40 (see FIG. 1), heating using the heating mechanism 203, or a combination of these.

[0074] The vaporizer 310 has a plurality of shelves 311a for storing the suspension S in a container 311. When the dispersion medium of the suspension S stored in the shelves 311a evaporates, a solid raw material remains in the shelves 311a. The shelves 311a are stacked in the vertical direction. The shelves 311a adjacent to each other in the vertical direction are provided so as to protrude in alternate directions. More specifically, the shelves 311a each have a shape with a notched edge of a circle in a plan view, and the notched parts of the shelves 311a adjacent to each other in the vertical direction face each other with the center of the container 311 between them in a plan view as described above.

[0075] By providing shelf 311a as described above, a labyrinth-structured carrier gas flow path is formed in container 311. According to vaporizer 310, since the carrier gas flow path has a labyrinth structure and is long, a high pickup amount can be obtained. Furthermore, by providing the shelves 311a as described above, the suspension S supplied from the supply port 201a can be supplied to all the shelves 311a in order from above.

[0076] In this example, the carrier gas inlet 201d is provided in a position on the container side wall at the base side of the lowest shelf 311a, between said shelf 311a and the bottom wall of the container, and the gas supply port 201e is provided in a position on the container side wall at the base side of the uppermost shelf 311a, between said shelf 311a and the top wall of the container.

[0077] <Another Example 3 of Vaporizer> Figures 9 to 11 are diagrams showing another example of the vaporizer, Figure 9 is a perspective view showing the vaporizer of this example with a part broken away, and Figures 10 and 11 are perspective views showing a first member and a second member of a tray assembly described later. 9 to 11, like the vaporizer 310 in Fig. 7, does not have a filter for separating the solid raw material R in the suspension, and has multiple shelves in a container. However, in the vaporizer 320, the flow path of the carrier gas is formed in a spiral shape, and multiple shelves are provided along this flow path. The specific details will be explained below.

[0078] Vaporizer 320 has a tray assembly 322 in a container 321, as shown in FIG. 8, and is provided with a supply port 201a, etc. Although not shown, the container 321 is also provided with a carrier gas inlet 201d, a gas supply port 201e, and an exhaust port 201f. The tray assembly 322 has a first member 323 and a second member 324 .

[0079] As shown in FIG. 10, the first member 323 has a cylindrical side wall 323a, a disk-shaped bottom wall 323b, and a columnar portion 323c extending upward from the bottom wall 323b. As shown in FIG. 9, a gap G is provided between the side wall 323a and the inner circumferential surface of the side wall of the container 321. 10, the side wall 323a is formed with a plurality of through holes 323d arranged at equal intervals along the circumferential direction. The through holes 323d are provided at positions corresponding to the lowest shelf among a plurality of shelves described below so that the carrier gas is supplied to the shelf.

[0080] The second member 324 of the tray assembly 322 is disposed between the side wall 323a and the columnar portion 323c of the first member 323 and at a position above the bottom wall 323b of the first member. The second member 324, together with the first member 323, forms the following (a) and (b). (a) A spiral carrier gas flow path centered on the central axis of the container 321, as shown by arrow M. (b) A plurality of shelves 322a, in which suspension liquids are stored, arranged along the path of the carrier gas.

[0081] In the illustrated example, four carrier gas flow paths are formed.

[0082] The carrier gas supplied into the container 321 through the carrier gas inlet 201d (see FIG. 8) flows into the lowermost shelf 322a through the gap G and the through-hole 323d, flows along the flow path of the carrier gas, and reaches the uppermost shelf 322a. Since the uppermost shelf 322a is open in the container 321, the carrier gas that has reached the uppermost shelf 322a is output from the gas supply port 201e (see FIG. 8) together with the raw material gas.

[0083] According to the vaporizer 320, the flow path of the carrier gas is formed in a spiral shape and is long, so that a high pickup amount can be obtained. Furthermore, by providing the shelves 322a as described above, the suspension supplied from the supply port 201a can be supplied to all the shelves 322a in order from above.

[0084] As described above, the vaporizers 310 and 320 are not provided with a filter for separating the solid raw material R in the suspension. Therefore, the vaporizers 310 and 320 do not have a drain port formed in the containers 311 and 321 for discharging the dispersion medium of the suspension that has passed through the filter to the outside of the container 311. Therefore, when the vaporizers 310 and 320 are used, the discharge pipes 130 and 131 (see FIG. 1) are omitted.

[0085] [Second embodiment] FIG. 12 is a diagram illustrating a part of the source gas supply system according to the second embodiment. As shown in FIG. The source gas supply system according to the present embodiment includes a cleaning mechanism 400 that supplies a fluid to the sealing surface between the supply valve 201b and the supply port 201a to clean the sealing surface. The fluid is, for example, the same liquid as the dispersion medium of the suspension.

[0086] The cleaning mechanism 400 includes a fluid source 401 and a cleaning fluid supply pipe 402 . The fluid source 401 stores a fluid for cleaning the sealing surface between the supply valve 201b and the supply port 201a (hereinafter referred to as "cleaning fluid"), and supplies the stored fluid to the above-mentioned sealing surface. The cleaning fluid supply pipe 402 connects the fluid source 401 and the branch pipe 112 of the supply pipe 110. The cleaning fluid supply pipe 402 is provided with an on-off valve 403.

[0087] In cleaning with the cleaning fluid, for example, after supplying the suspension to the vaporizer 10A with the supply valve 201b and the on-off valve 52 of the supply branch pipe 112 in an open state, the supply of the suspension is stopped by first closing the on-off valve 52 while keeping the supply valve 201b in an open state. Then, the on-off valve 403 of the cleaning fluid supply pipe 402 is opened. As a result, the cleaning fluid that has passed through the cleaning fluid supply pipe 402 and the branch pipe 112 is supplied to the sealing surface between the supply valve 201b and the supply port 201a, and the sealing surface can be cleaned.

[0088] Also, for example, after the cleaning fluid is once supplied, the cleaning fluid may be stored in the branch pipe 112 by closing the supply valve 201b, and then the supply valve 201b may be opened to allow a large amount of cleaning fluid to flow at once onto the sealing surface of the supply valve 201b and the supply port 201a. This increases the flow rate of the cleaning fluid supplied to the sealing surface, thereby improving the cleanliness of the sealing surface. The process of storing the cleaning fluid and then flowing the cleaning fluid at once may be performed multiple times.

[0089] By cleaning the sealing surfaces between the supply valve 201b and the supply port 201a in this manner, it is possible to prevent solid raw materials in the suspension from adhering to the sealing surfaces and impairing the airtightness. In the above description, the cleaning fluid is a liquid, but it may be a gas. When a gas is used as the cleaning fluid, the sealing surface can be cleaned by, for example, spraying the gas onto the sealing surface.

[0090] [Third embodiment] FIG. 13 is a diagram illustrating a part of the source gas supply system according to the third embodiment. As shown in FIG. In the above embodiment, the suspension is delivered from the storage container 20 to the vaporizer 10 (10A, 10B) by pressure feeding. In contrast, in the source gas supply system according to this embodiment, the delivery mechanism 410 that delivers the suspension from the storage container 20 to the vaporizer 10 (10A, 10B) delivers the suspension by gravity acting on the suspension. The specific details will be explained below.

[0091] In this embodiment, the storage container 20 is located above the vaporizer 10 (10A, 10B). The delivery mechanism 410 has a supply pipe 420 that connects the vaporizer 10 (10A, 10B) to the storage container 20 located above it. Supply pipe 420 has supply common pipe 421, the upstream end of which is connected to storage container 20, and supply branch pipes 422, 423 branching off from the downstream end of common pipe 421. The downstream end of branch pipe 422 is connected to vaporizer 10A, and the downstream end of branch pipe 423 is connected to vaporizer 10B. Branch pipes 422, 423 are provided with on-off valves 52, 53, respectively.

[0092] Common pipe 421 is a straight pipe and is provided so as to extend in the vertical direction. This allows the suspension in storage container 20 to be smoothly transported to the downstream end of common pipe 421 branching into branch pipes 442 and 423 by gravity acting on the suspension. Moreover, each of the branch pipes 422, 423 is a straight pipe and is provided so as to be inclined with respect to the vertical and horizontal planes, that is, to extend in an oblique direction. This allows the suspension that reaches the upstream end of the branch pipes 422, 423 to be smoothly transported by gravity along the branch pipes 422, 423 to the vaporizer 10 (10A, 10B).

[0093] <Modifications of carrier gas introduction and exhaust methods> In the above example, the carrier gas is introduced into the container of the vaporizer so as to flow from bottom to top within the container, but it may be introduced so as to flow from top to bottom.

[0094] In the above example, the carrier gas inlet 201d, the gas supply port 201e, and the exhaust port 201f are provided independently of the supply port 201a and the drain port 201c. Alternatively, the carrier gas inlet 201d, the gas supply port 201e, and the exhaust port 201f may be common to the supply port 201a and the drain port 201c.

[0095] For example, when the carrier gas inlet 201d, the gas supply port 201e, the exhaust port 201f, and the refill port 201a are to be shared, the following may be done. That is, the branch pipes 122 and 123 for the carrier gas, the branch pipes 72 and 73 for the raw material gas, and the branch pipes 44 and 45 for exhaust may be connected to the branch pipes 112 and 113 for refill. Similarly, when the carrier gas inlet 201d, the gas supply port 201e, the exhaust port 201f, and the drain port 201c are to be shared, the following may be done. That is, the branch pipes 122 and 123 for the carrier gas, the branch pipes 72 and 73 for the raw material gas, and the branch pipes 44 and 45 for exhaust may be connected to the exhaust pipes 130 and 131.

[0096] [Fourth embodiment] FIG. 14 is a system configuration diagram that illustrates an outline of the configuration of a raw material gas supply system according to the fourth embodiment. In the above embodiment, when the solid raw material is supplied to the vaporizer 10 (10A, 10B), a suspension containing the solid raw material as a dispersoid is supplied to the vaporizer 10 (10A, 10B). In contrast, in the raw material gas supply system 1' in Fig. 14, when the solid raw material is supplied to the vaporizer 10' (10A', 10B'), a sol containing the solid raw material as a dispersoid is supplied to the vaporizer 10' (10A', 10B').

[0097] "Sol" is synonymous with colloid solution, and refers to a dispersion system in which solid particles are dispersed in a liquid, and the particle size of the solid particles as dispersoid is small and they do not settle even if left alone. "Sol" is a subordinate concept of colloid. Colloid is a subordinate concept of dispersion system.

[0098] In the raw material gas supply system 1', a solid raw material is separated from a sol (hereinafter sometimes referred to as a "raw material sol") having the solid raw material as a dispersoid in the vaporizer 10' (10A', 10B'), and the vaporizer 10' (10A', 10B') vaporizes the solid raw material to generate a raw material gas.

[0099] In addition, in the raw material sol, the solid raw material does not settle even if it is left alone, so the stirring stage 21 (see FIG. 1) may be omitted as shown in FIG.

[0100] The raw material sol is stored in the storage container 20'. The raw material sol is made of solid material having a particle size of, for example, 1 mm or less. The dispersion medium of the raw material sol is made of, for example, the same material as that of the suspension.

[0101] The raw material sol is pushed out of the storage container 20' by the pressurized gas introduced into the storage container 20' via the pressurized gas supply pipe 100, and is supplied to the supply pipe 110. The raw material sol supplied to the supply pipe 110 is sent to the vaporizer 10' (10A', 10B') by, for example, the pump 51.

[0102] When the dispersoid concentration in the raw material sol, i.e., the solid raw material concentration, is high and the viscosity of the raw material sol is high, the vaporizer 10' (10A', 10B') has a cylindrical container obtained by removing the shelf 311a from the vaporizer 310 in FIG. 8. When using such a vaporizer 10' (10A', 10B'), the exhaust pipes 130, 131 (see FIG. 1) are omitted in the raw material gas supply system 1'. When the solid raw material is produced in the vaporizer 10' (10A', 10B'), only the dispersion medium of the raw material sol temporarily stored in the container of the vaporizer 10' (10A', 10B') is evaporated to separate the solid raw material from the raw material sol. The evaporation of the dispersion medium is performed, for example, by reducing the pressure by the pressure reducing mechanism 40, heating by a heating mechanism that heats the container, or a combination of these.

[0103] Furthermore, when the vaporizer 10' (10A', 10B') has the above-mentioned cylindrical container, the positions of the carrier gas inlet and exhaust port are appropriately adjusted.

[0104] When the solid raw material concentration in the raw material sol is low and the viscosity of the raw material sol is low, the vaporizer 10' (10A', 10B') may be the same as those shown in Figs. 2 and 7 to 11.

[0105] When a raw material sol is used, a cleaning mechanism 400 may be provided as in the second embodiment. When a raw material sol is used, the raw material sol may be sent to the vaporizer 10' (10A', 10B') by gravity acting on the raw material sol as in the third embodiment.

[0106] In the case of using a raw material sol as in this embodiment, similarly to the first embodiment, when supplying the solid raw material to the vaporizer 10' (10A', 10B'), no work is required near the film forming apparatus 500. Therefore, the solid raw material can be supplied to the vaporizer 10' (10A', 10B') in a form that does not adversely affect the film formation process in the film forming apparatus 500.

[0107] Also in this embodiment, the storage container 20' to be replaced does not also function as an evaporation device, and there is a high degree of freedom in where it can be installed, so that the storage container 20' can be installed in a location that makes it easy to perform the replacement work.

[0108] Furthermore, in this embodiment, as in the first embodiment, a configuration can be adopted in which the solid source material is alternately replenished to the two vaporizers 10' (10A', 10B'). Therefore, even when a solid source material that requires a long time to heat is used, it is possible to prevent a decrease in throughput of the film formation process due to the waiting time until the solid source material is heated to a desired temperature.

[0109] Also in this embodiment, similarly to the first embodiment, a solid source material is not dissolved in a solvent to form a liquid source material, so that a high quality film can be formed.

[0110] Furthermore, in this embodiment as well, similarly to the first embodiment, the type of dispersion medium is not limited.

[0111] In addition, in this embodiment, the raw material concentration in the replenished dispersion can be made higher than in the first embodiment, because no precipitation of the solid raw material occurs. Therefore, the solid raw material can be replenished to the vaporizer more efficiently.

[0112] [Other applications] The embodiments disclosed herein should be considered as illustrative and not restrictive in all respects. The above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims.

[0113] Note that the following configurations also fall within the technical scope of the present disclosure. (1) A raw material gas supply system that supplies a raw material gas generated by vaporizing a solid raw material to a processing device, comprising: a vaporizer for vaporizing the solid source material to generate the source gas; a delivery mechanism that delivers the dispersion from a storage container that stores the dispersion in which the solid raw material is dispersed in a liquid to the vaporizer; a separation mechanism for separating the solid source material from the dispersion system within the vaporizer; A raw material gas supply system comprising: According to the above (1), the solid source material can be replenished to the source gas supply system in a form that does not adversely affect the processing in the processing equipment.

[0114] (2) The source gas supply system according to (1), wherein the separation mechanism has a filter provided in the vaporizer and having a plurality of holes smaller than the solid source.

[0115] (3) The raw material gas supply system according to (2), wherein the filter is formed in a corrugated shape in cross section.

[0116] (4) the housing of the vaporizer has a refill port for the dispersion above the filter; The raw material gas supply system according to (2) or (3), wherein the filter is provided along an inner peripheral surface of a side wall of a housing of the vaporizer, and an upper surface of the filter is an inclined surface that slopes downward radially outward. According to the above (4), the solid source material can be efficiently vaporized.

[0117] (5) The source gas supply system according to (4) above, further comprising a heating mechanism for heating a side wall of the housing.

[0118] (6) the housing of the vaporizer has a carrier gas inlet port communicating with a carrier gas supply source and a gas supply port communicating with the processing device; The raw material gas supply system according to any one of (2) to (5), wherein the carrier gas inlet is provided on one side of the casing with the filter therebetween, and the gas supply port is provided on the other side. According to the above (6), a high pick-up amount can be reliably obtained.

[0119] (7) a refill valve for opening and closing a refill port of the dispersion system of the vaporizer; The source gas supply system according to any one of (1) to (6), further comprising a cleaning mechanism that supplies a fluid to a sealing surface of the make-up valve to clean the sealing surface. According to the above (7), it is possible to prevent the sealing performance of the vaporizer from being impaired.

[0120] (8) The vaporizer temporarily stores the dispersion, The source gas supply system according to any one of (1) to (7), wherein the separation mechanism evaporates a dispersion medium of the suspension temporarily stored in the vaporizer to separate the solid source material.

[0121] (9) The source gas supply system according to (8), wherein the vaporizer has a plurality of shelves for accommodating the dispersion.

[0122] (10) The source gas supply system according to (9), wherein the shelves are stacked in the vertical direction.

[0123] (11) The source gas supply system according to (10), wherein the shelves adjacent in the vertical direction are formed so as to protrude in alternate directions. According to the above (11), the flow path of the carrier gas can be lengthened, and the pickup amount can be increased.

[0124] (12) The flow path of the carrier gas is formed in a spiral shape, The source gas supply system according to (10), wherein the shelves are arranged along the flow path. According to the above (12), the flow path of the carrier gas can be lengthened, and the pickup amount can be increased.

[0125] (13) The raw material gas supply system according to any one of (1) to (12), wherein the delivery mechanism pressure-feeds the dispersion from the storage container to the vaporizer.

[0126] (14) The source gas supply system according to any one of (1) to (13), wherein the delivery mechanism delivers the suspension by gravity acting on the suspension.

[0127] (15) A plurality of the vaporizers connected in parallel to each other; and a control device configured to output a control signal when a portion of the plurality of vaporizers is in a state capable of supplying the raw material gas to the processing device, so that the dispersion is sent from the storage container to another of the vaporizers and the solid raw material is separated from the dispersion in the vaporizer. According to the above (15), the source gas can be continuously supplied even when the solid source is replenished.

[0128] (16) The raw material gas supply system according to any one of (1) to (15), wherein the dispersion is a suspension containing the solid raw material as a dispersoid.

[0129] (17) The source gas supply system according to (16), further comprising a stirring device for stirring the suspension in the storage container. According to the above (17), the ratio of the solid raw material in the suspension supplied to the vaporizer can be made uniform.

[0130] (18) The raw material gas supply system according to any one of (1) to (15), wherein the dispersion is a sol having the solid raw material as a dispersoid.

[0131] (19) A source gas supply method for supplying a source gas generated by vaporizing a solid source to a processing device, comprising the steps of: A step of delivering the dispersion, in which the solid raw material is dispersed in a liquid, from a storage container that stores the dispersion to a vaporizer; separating the solid feedstock from the dispersion in the vaporizer; vaporizing the separated solid source material in the vaporizer to generate a source gas; and supplying the generated raw material gas to the processing device. [Explanation of symbols]

[0132] 1, 1' Raw material gas supply system 10A, 10B, 10A', 10B', 300, 310, 320 Vaporizer 20 Storage Container 40 Pressure reducing mechanism 51 Pump 100 Pressurized gas supply pipe 203 Heating mechanism 420 Supply pipe 500 Film deposition equipment R solid raw material S Suspension

Claims

[Claim 1] A raw material gas supply system that supplies a raw material gas generated by vaporizing a solid raw material to a processing device, comprising: a vaporizer for vaporizing the solid source material to generate the source gas; a delivery mechanism that delivers the dispersion from a storage container that stores the dispersion in which the solid raw material is dispersed in a liquid to the vaporizer; a separation mechanism for separating the solid source material from the dispersion system within the vaporizer; Equipped with The vaporizer temporarily stores the dispersion, the separation mechanism evaporates a dispersion medium of the dispersion system temporarily stored in the vaporizer to separate the solid raw material; The vaporizer has a plurality of shelves for accommodating the dispersion, the shelves being stacked in a vertical direction.

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