PCB transport device

Abstract

To provide a substrate transport device that can be used in working environments where liquids, moisture, dust, etc., may affect the substrate transport device. [Solution] The substrate transport device includes an end effector 130 which includes a hand 140 for gripping the substrate W and a plunger 150 that contacts the substrate W and aligns the substrate W. The plunger 150 includes a contact portion 151 that contacts the substrate W, a shaft portion 155A that moves the contact portion 151 to contact the substrate W, and an isolation wall 157A that isolates an internal region 160, which includes a drive unit that drives the shaft portion 155A, from the outside. The isolation wall 157A includes a shaft hole 163 into which the shaft portion 155A extends into the internal region 160. The shaft portion 155A includes a cover 154A whose first end is connected to the shaft portion 155A and whose second end is connected to the isolation wall 157A.

Description

Technical Field

[0001] The present disclosure relates to a substrate transfer device, and more particularly to a substrate transfer device that can be used in a working environment where the substrate transfer device may be affected, such as under liquid, moisture, dust, etc.

Background Art

[0002] When manufacturing semiconductor substrates, liquid crystal substrates, panels, etc. (hereinafter, these may be collectively simply referred to as substrates), a plurality of manufacturing apparatuses are used. A transfer device for transferring substrates between these manufacturing apparatuses is used. The transfer device includes an industrial robot.

[0003] Patent Document 1 discloses a technique for reducing the wear amount of a seal member for preventing the intrusion of liquid into the inside of the hand of an industrial robot. In Patent Document 1, in the hand, a pressing member having a pressing portion that contacts the end surface of the transfer object 2 and presses the end surface of the transfer object against the contact surface of the end surface contact member has a rotation axis that is the rotation center of the pressing member and a first lever portion that extends from the rotation axis toward the outside in the radial direction of the rotation axis. In the hand portion, the pressing portion is connected to the tip of the first lever portion disposed outside the hand base.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In semiconductor manufacturing processes, there are various processes that use liquids, such as wet etching, wafer cleaning, photoresist-related processes, and CMP (Chemical Mechanical Polishing) processes. Furthermore, in semiconductor manufacturing processes, there are various processes that generate dust, such as etching, film deposition, photolithography, and dicing processes. Substrate handling equipment may be used in these external environments, and such equipment may contain components that are susceptible to external environmental influences, such as drive units, various sensors, air cylinders, or semiconductor substrates themselves. When these components are used in the aforementioned external environments, it can lead to malfunctions and failures. [Means for solving the problem]

[0006] A substrate transport device includes an end effector which includes a hand for gripping a substrate and a plunger that contacts the substrate to align it. The plunger includes a contact portion that contacts the substrate, a shaft portion that moves the contact portion to contact the substrate, and an isolation wall that isolates an internal region containing a drive unit that drives the shaft portion from the outside. The isolation wall includes a shaft hole into which the shaft portion extends into the internal region. The shaft portion is configured to include a cover whose first end is connected to the shaft portion and whose second end is connected to the isolation wall.

[0007] A substrate transport device includes an end effector comprising a hand for gripping a substrate and a plunger that contacts the substrate to align it. The plunger includes a contact portion that contacts the substrate and an isolation wall that isolates an internal region containing a drive unit that drives the contact portion from the outside. The isolation wall includes an axial hole into which the contact portion extends into the internal region, and the contact portion includes a cover whose first end is connected to the contact portion and whose second end is connected to the isolation wall. [Effects of the Invention]

[0008] In one or more embodiments of the substrate transport apparatus, the internal area in which the above-mentioned devices are housed can be isolated from the external environment, thereby reducing failures and malfunctions of the devices provided in the substrate transport apparatus. [Brief explanation of the drawing]

[0009] [Figure 1] This figure shows the top view of a substrate transport device according to one or more embodiments. [Figure 2A] This is a perspective view showing a portion of an end effector according to one or more embodiments. [Figure 2B] This is a perspective cross-sectional view showing a portion of an end effector according to one or more embodiments. [Figure 3A] This is a perspective view showing a plunger according to one or more embodiments. [Figure 3B] This is a diagram showing an example of a cover. [Figure 4] This is a cross-sectional view showing a plunger according to one or more embodiments. [Figure 5] This is a cross-sectional view showing a plunger according to one or more embodiments. [Figure 6] This is a cross-sectional view showing a plunger according to one or more embodiments. [Modes for carrying out the invention]

[0010] A substrate transport device according to one or more embodiments will be described in detail with reference to the drawings. In the drawings, identical or similar parts may be denoted by the same or similar reference numerals. The drawings are schematic, and the relationship between thickness and dimensions, and the ratios of length and thickness of each part are examples only and do not limit the scope of the technical concept. The relationships and ratios of dimensions may differ between drawings. In the following description, when describing the positional relationship of each component, terms such as "top," "bottom," "right side," and "left side" will be used as appropriate based on the orientation of the referenced drawing or a specific object, but these indications do not limit the scope of the technical concept. Expressions such as "top," "bottom," "right side," and "left side" may be used even if the parts are not touching each other. "Length direction" may mean the direction of the longer side on the main surface of the component. "Width direction" may mean the direction of the shorter side on the main surface of the component. "Height direction" and "up and down direction" may mean the direction related to the thickness of the main surface of the component. Furthermore, the X-axis, Y-axis, Z-axis, or combinations thereof may be displayed in the figures, and the terms "X-axis direction," "Y-axis direction," and "Z-axis direction" may be used in the specification or drawings to describe the direction.

[0011] Figure 1 shows a top view of a substrate transport device 100 according to one or more embodiments. This substrate transport device 100 includes a base 300, a link 600 rotatably connected to the base 300, and an end effector 130 rotatably connected around a rotation axis 601 for transporting substrates W. The substrate transport device 100 may also have an extendable elevator (not shown) that can move the link 600 and the end effector 130 vertically (in the Z direction shown). Although only one link 600 is shown in Figure 1, the substrate transport device 100 is not limited to this and may include two, three, four, or five links 600. Furthermore, the substrate transport device 100 may not include a link 600, and the end effector 130 may be directly connected to the elevator. Furthermore, the substrate transport device 100 may not include an elevator, and one or more links 600 may be directly connected to the base 300. The substrate transport device 100 in Figure 1 specifically shows a horizontal multi-joint type substrate transport device, but is not limited to this; so-called linear type substrate transport devices without joints or rotation mechanisms can also be implemented. The substrate transport device 100 is controlled by a controller (not shown). The controller controls various movements, including the lifting and lowering and rotational movements of the elevator, link 600, and end effector 130.

[0012] The end effector 130 includes a hand 140 for gripping substrates such as semiconductor substrates and liquid crystal substrates, and various panels (hereinafter collectively referred to simply as substrate W), and a plunger 150 that contacts the substrate W to grip and align the substrate W. The hand 140 includes substrate contact portions 141A, 141B, 142A, and 142B. The plunger 150 includes a movable contact portion 151 for gripping the substrate W. Under the control of the controller, the end effector 130 acquires the substrate W from a predetermined position using the hand 140 and transports the substrate W to a predetermined position. When acquiring a substrate W stored in a FOUP (Front Opening Unified Pod) or the like, the hand 140 is moved above or below the substrate W. When it is recognized that the hand 140 has reached a predetermined position on the substrate W, the movement of the hand 140 is stopped. After that, the hand 140 performs a gripping operation on the substrate W. At this time, the contact portion 151 of the plunger 150 moves and grips the substrate W. The hand 140 may use a so-called edge grip method to grip the substrate W. In the edge grip method, the substrate W is held to some extent by the substrate contact portions 141A, 141B, 142A, and 142B, and the contact portion 151 is moved to contact the substrate W. As a result, the contact portion 151 grips the substrate W. Alternatively, the hand 140 may use a vacuum suction method to grip the substrate W. For example, a vacuum portion (not shown) is provided on each of the substrate contact portions 141A, 141B, 142A, and 142B. After moving the contact portion 151 to contact the substrate W, the vacuum portion is brought close to or in contact with the top or bottom of the substrate W, and negative pressure is applied to the vacuum portion to suction the substrate W. This allows the end effector 130 to grip the substrate W and transport it to a predetermined position.

[0013] The substrate W includes substrates such as semiconductor substrates and liquid crystal substrates, as well as various types of panels. For example, the substrate W shown in Figure 1 is circular, but is not limited to this. The substrate W may be made of a transparent material containing a light-transmitting material, or it may be semi-transparent or opaque.

[0014] Figure 2A is a perspective view showing a portion of the end effector 130A according to one or more embodiments. Figure 2B is a perspective cross-sectional view showing a portion of the end effector 130A according to one or more embodiments. In Figures 2A and 2B, the hand 140 is omitted for convenience of explanation. The end effector 130A includes a plunger 150A. The plunger 150A includes a contact portion 151A that abuts against a substrate (not shown) and fixes the substrate, and a holder 153A that holds the contact portion 151A and makes the contact portion 151A movable. The holder 153A is connected to a shaft portion 155A. The first end of the shaft portion 155A is connected to the holder 153A, and the second end extends into an internal region 160 through a shaft hole provided in the isolation wall 157A and is connected to a drive unit (not shown). The drive unit provides power to the shaft 155A, causing the shaft 155A to reciprocate, for example, in the longitudinal direction of the shaft 155A (the X direction in the figure). The holder 153A also reciprocates along with the reciprocating motion of the shaft 155A. As the holder 153A reciprocates, the contact portion 151A moves and contacts the substrate, fixing the substrate in place. The shaft 155A includes a cover 154A that covers at least a portion of the shaft 155A, and a connecting portion 156A connected to the cover 154A.

[0015] The cover 154A has its first end connected to the connecting portion 156A and its second end connected to the isolation wall 157A. The connecting portion 156A has a convex portion that protrudes from the shaft portion 155A, and the first end of the cover 154A is connected to the side surface of the connecting portion 156A. Because the first end of the cover 154A is connected to the connecting portion 156A, it moves in accordance with the reciprocating motion of the shaft portion 155A. Therefore, the cover 154A may be retractable. The isolation wall 157A is a wall provided to isolate the internal region 160 from the outside. Since it is sufficient for the drive of the drive unit to be transmitted to the contact portion 151A, the shaft portion 155A and the contact portion 151A may be directly connected. In other words, the holder 153A is not necessarily required. Also, since it is sufficient for the drive of the drive unit to be transmitted to the contact portion 151A, the contact portion 151A may be connected to the drive unit. In other words, the shaft portion 155A is not necessarily required. If the contact portion 151A is directly connected to the drive unit, the connecting portion 156A that connects to the cover 154A may be provided on the contact portion 151A. In this case, the first end of the cover 154A is connected to the connecting portion 156A provided on the contact portion 151A, and the second end is connected to the isolation wall 157A.

[0016] Regarding the connection between the cover 154A and the connection part 156A, and the connection between the cover 154A and the partition wall 157A, they are connected inside the cover 154A to prevent the intrusion of the external environment. Specifically, they are connected so as to seal the inside of the cover 154A from the external environment that may contain liquid, moisture, dust, etc. They may also be hermetically connected so that the external environment does not enter the inside of the cover 154A. The connection between the cover 154A and the connection part 156A, and the connection between the cover 154A and the partition wall 157A may also be a connection by screwing in terms of high reliability. In this case, a plate (not shown) may be provided between the cover 154A and the connection part 156A, and between the cover 154A and the partition wall 157A, and the cover 154A may be connected to the connection part 156A and the cover 154A may be connected to the partition wall 157A through the plate. Also, the connection between the cover 154A and the connection part 156A, and the connection between the cover 154A and the partition wall 157A may be connected by an adhesive in terms of easy installation. Also, from the viewpoint of ease of replacement, grooves may be formed in the connection part 156A and the partition wall 157A, and the cover 154A may be connected so as to be fitted in. Furthermore, the connection between the cover 154A and the connection part 156A, and the connection between the cover 154A and the partition wall 157A may be such that the connection part 156A is sealed using other parts.

[0017] Figure 3A is a perspective view showing a plunger 150B according to one or more embodiments. The plunger 150B has a shaft part 155B including a connection part 156B. The cover 154B has a first end connected to the connection part 156B and a second end connected to the connection part 159A of the partition wall 157B. The connection part 156B has a convex part protruding from the shaft part 155B, and the first end of the cover 154B is connected to the side surface of the connection part 156B. The partition wall 157B is a wall provided to seal the internal region 160 from the outside, and includes a connection part 159A. The connection part 159A has a shape protruding from the partition wall 157B, and the second end of the cover 154B is connected to the protruding surface of the connection part 159A.

[0018] The connections between cover 154B and connector 156B, and between cover 154B and connector 159A, are made in a manner that prevents external elements from entering the interior of cover 154B. Specifically, the connections are made in a manner that seals the interior of cover 154B from external elements that may contain liquids, moisture, dust, etc. In Figure 3A, the connections between cover 154B and connector 156B, and between cover 154B and connector 159A, may be made by screw fastening for greater reliability. In this case, a plate 158A may be provided at the connection between cover 154B and connector 156B, and cover 154B may be sandwiched between the plate 158A and connector 156B and then screwed in. Similarly, a plate 158A may be provided at the connection between cover 154B and connector 156B, and cover 154B may be sandwiched between the plate 158A and connector 156B and then screwed in. Similarly, a plate 158B may be provided to connect the cover 154B and the connector 159A, and the cover 154B may be sandwiched between the plate 158B and the connector 159A and screwed in place. The shaft 155B may vibrate because it reciprocates, for example, in the longitudinal direction of the shaft 155B (the X direction in the figure). By providing plates 158A and 158B, it is possible not only to prevent intrusion into the interior of the cover 154B from the external environment, but also to mitigate the loosening of screws due to vibration. In addition, the connection between the cover 154B and the connector 156B, and the connection between the cover 154B and the connector 159A may be made by adhesive for ease of installation. Furthermore, from the viewpoint of ease of replacement, grooves may be formed in the connectors 156B and 159A, and the cover 154B may be fitted into them. Furthermore, the connection between cover 154B and connector 156B, and the connection between cover 154B and connector 159A may be sealed using other components.

[0019] By connecting the cover 154B to the connection part 156B and connecting the cover 154B to the connection part 159A, it is possible to prevent the intrusion of liquids, dust, etc. from the external environment into the inside of the cover 154B. The partition wall 157B is provided with a shaft hole for the shaft part 155B to extend into the internal area 160. Therefore, there is a possibility that liquids, etc. may enter the internal area 160 from the external environment through the shaft hole. In the internal area 160, there may be arranged devices that may be affected by the external environment, such as a driving part for driving the shaft part 155B, various sensors, an air cylinder, or a semiconductor substrate, etc. According to the substrate transfer device according to one or more embodiments, it is possible to reduce the influence of liquids, etc. from the external environment through the shaft hole and protect various devices in the internal area 160.

[0020] In the plunger 150B shown in FIG. 3A, the cover 154B is connected to the connection part 159A of the partition wall 157B and the connection part 156B having a convex part. By connecting the cover 154B to the convex part of the connection part 156B, a space is created between the shaft part 155B and the cover 154B. Therefore, it has an unexpected effect from the perspective of the prior art of reducing the friction between the shaft part 155B and the cover 154B. In Patent Document 1, the seal member adheres to the outer peripheral surface of the rotating shaft for isolation. In this case, the prevention of the intrusion of liquids, dust, etc. from the external environment into the inside may be reduced, and friction may occur between the seal member and the rotating shaft. In the substrate transfer device according to one or more embodiments, it is possible to improve the prevention of the intrusion of liquids, dust, etc. from the external environment into the inside and minimize the generation of friction in the shaft part 155B. Thus, the substrate transfer device according to one or more embodiments has an unexpected effect.

[0021] Figure 3B shows an example of cover 154C. Cover 154C has an accordion structure in the center where mountain folds and valley folds are repeated alternately. When the shaft portion 155B moves back and forth, cover 154C expands and contracts. As a result, even when the shaft portion 155B moves back and forth, the inside of cover 154C can be sealed from the external environment, thereby reducing the influence of the external environment and protecting the devices stored in the internal area 160. In addition, the accordion structure becomes thin and compact when folded, which reduces interference with other devices. To reduce the influence of the external environment on the internal area 160, cover 154C may be arranged to cover the perimeter of shaft portion 155B from the convex portion of connection portion 156B to the isolation wall 157B. Although cover 154C shown in Figure 3B is cylindrical, it is not necessarily limited to a cylindrical shape as long as it covers the perimeter of shaft portion 155B; for example, it may be rectangular.

[0022] Here, it is preferable to adjust the width of the mountain folds and valley folds in the accordion structure of the cover 154C so as not to interfere with the shaft portion 155B when it expands and contracts. The longitudinal length of the cover 154C may also be determined based on the range of the reciprocating motion of the shaft portion 155B. It is preferable that the longitudinal length of the cover 154C is within a range that does not hinder the reciprocating motion of the shaft portion 155B. For example, it is preferable that the longitudinal length of the cover 154C is greater than or equal to the distance between the connecting portion 156B and the connecting portion 159A when the connecting portion 156B is closest to the internal region 160. It is also preferable that the longitudinal length of the cover 154C is greater than or equal to the distance between the connecting portion 156B and the connecting portion 159A when the shaft portion 155B is furthest from the internal region 160. For example, if the reciprocating motion of the shaft portion 155B has a travel distance of 10 mm, the longitudinal length of the cover 154C may be 5 mm or more and 50 mm or less, but preferably 7 mm or more and 25 mm or less.

[0023] The cover 154C may be made of a material that can expand and contract. It does not necessarily have to be an accordion structure as long as it can expand and contract within a range that does not hinder the reciprocating motion of the shaft portion 155B. For the material of the cover 154C, rubber such as fluororubber, chloroprene (CR) rubber, or silicone rubber is preferable because it has excellent heat resistance, oil resistance, weather resistance, and corrosion resistance. For the material of the cover 154C, if there is a significant pressure difference between the external environment and the internal region 160, or if the external environment is a vacuum, metal is preferable from the viewpoint of airtightness.

[0024] Figure 4 is a cross-sectional view showing a plunger 150C according to one or more embodiments. The plunger 150C includes a contact portion 151C that abuts against a substrate (not shown) and fixes the substrate, and a holder 153C that holds the contact portion 151C and makes the contact portion 151C movable. The holder 153C is connected to a shaft portion 155C. The first end of the shaft portion 155C is connected to the holder 153C, and the second end extends through a shaft hole 163 into an internal region 160 and is connected to a drive unit (not shown). The drive unit powers the shaft portion 155C, and the shaft portion 155C reciprocates, for example, in the longitudinal direction of the shaft portion 155C. As the shaft portion 155C moves, the holder 153C also moves. As the holder 153C moves, the contact portion 151C moves and abuts against the substrate to fix the substrate. The shaft portion 155C includes a cover 154D that covers at least a part of the shaft portion 155C, and a connecting portion 156C connected to the cover 154D. The cover 154D has a first end connected to the connecting portion 156C and a second end connected to an isolation wall 157C. The connecting portion 156C has a convex portion that protrudes from the shaft portion 155C, and the first end of the cover 154D is connected to the side surface of the connecting portion 156B. The isolation wall 157C is a wall provided to isolate the internal region 160 from the outside. The isolation wall 157C is provided with an axial hole 163 for the shaft portion 155C to extend into the internal region 160. The internal region 160 may contain internal devices 164 that may be affected by the external environment, such as a drive unit for driving the shaft portion 155C, various sensors, an air cylinder, or a semiconductor substrate. According to one or more embodiments of the substrate transport device, the influence of liquids and other external elements from the external environment can be reduced through the axial hole 163, thereby protecting various devices located in the internal region 160.

[0025] In the plunger 150C shown in Figure 4, sealing members 161C and 162C are included inside the isolation wall 157C. However, if the cover 154D makes it unlikely that the plunger 150C will be affected by the external environment, the plunger 150C does not need to include sealing members 161C and 162C.

[0026] Figure 5 is a cross-sectional view showing a plunger 150D according to one or more embodiments. The plunger 150D includes a contact portion 151C that abuts against a substrate (not shown) and fixes the substrate, and a holder 153C that holds the contact portion 151C and makes the contact portion 151C movable. The holder 153C is connected to a shaft portion 155C. The first end of the shaft portion 155C is connected to the holder 153C, and the second end extends through a shaft hole 163 into an internal region 160 and is connected to a drive unit (not shown). The drive unit powers the shaft portion 155C, and the shaft portion 155C reciprocates, for example, in the longitudinal direction of the shaft portion 155C. As the shaft portion 155C moves, the holder 153C also moves. As the holder 153C moves, the contact portion 151C moves and abuts against the substrate to fix the substrate. The shaft portion 155C includes a cover 154D that covers at least a part of the shaft portion 155C, and a connecting portion 156C connected to the cover 154D. Here, in the plunger 150D, the cover 154D has its first end connected to the connecting portion 156C and its second end connected to the connecting portion 159B of the isolation wall 157C. The connecting portion 159B has a shape that protrudes from the isolation wall 157C and has a convex shape that protrudes in the direction approaching the cover 154D (X-axis direction). In Figure 5, the side and top surfaces of the connecting portion 159B are planar, but are not limited to this and may be curved. In particular, if the shaft portion 155C is cylindrical or if the shaft hole 163 is circular, the connecting portion 159B may have a circular shape that protrudes so as to surround the shaft hole 163. The connecting portion 159B has a convex portion that protrudes from the shaft portion 155C, and the first end of the cover 154D is connected to the side surface of the connecting portion 156B. The isolation wall 157C is a wall provided to isolate the internal region 160 from the outside. The isolation wall 157C is provided with an axial hole 163 for the shaft portion 155C to extend into the internal region 160. The internal region 160 may contain internal devices 164 that may be affected by the external environment, such as a drive unit that drives the shaft portion 155C, various sensors, an air cylinder, or a semiconductor substrate. According to one or more embodiments of the substrate transport device, the influence of liquids and other substances from the external environment can be reduced through the axial hole 163, thereby protecting the various devices in the internal region 160.

[0027] Figure 6 is a cross-sectional view showing a plunger 150E according to one or more embodiments. In the plunger 150E, the cover 154D has its first end connected to a connecting portion 156C and its second end connected to a connecting portion 159C of the isolation wall 157C. The connecting portion 159C has a shape that protrudes from the isolation wall 157C and protrudes in the direction approaching the cover 154D (X-axis direction). In Figure 6, the side and top surfaces of the connecting portion 159C are planar, but are not limited to this and may be curved. In particular, when the shaft portion 155C is cylindrical or the shaft hole 163 is circular, the connecting portion 159C may have a circular shape that protrudes so as to surround the shaft hole 163. Here, the side surface of the connecting portion 159C has a shape that is in contact with the shaft portion 155C. That is, a part of the side surface of the connecting portion 159C is arranged without a step difference with the surface of the shaft hole 163. The internal region 160 may contain internal devices 164 that are susceptible to external environmental influences, such as a drive unit for driving the shaft portion 155C, various sensors, an air cylinder, or a semiconductor substrate. According to one or more embodiments of the substrate transport device, the influence of liquids and other external elements from the external environment can be reduced through the shaft hole 163, thereby protecting the various devices in the internal region 160. Furthermore, since the side surface of the connection portion 159C has a shape that contacts the shaft portion 155C, the thickness of the shaft hole 163 increases. Therefore, it may be possible to further reduce the influence of the external environment on the internal devices 164.

[0028] The above describes one or more embodiments of a substrate transport device. In semiconductor manufacturing processes, there are various processes that use liquids, such as wet etching, wafer cleaning processes, photoresist-related processes, and CMP (Chemical Mechanical Polishing) processes. In addition, in semiconductor manufacturing processes, there are various processes that generate dust, such as etching processes, film deposition processes, photolithography processes, and dicing processes. Substrate transport devices may be used in these external environments, and such devices may contain components that are susceptible to external environmental influences, such as drive units, various sensors, air cylinders, or semiconductor substrates. When these devices are used in the external environments described above, it can cause failures or malfunctions. In the substrate transport device according to one or more embodiments, the internal area where the above-mentioned devices are housed can be isolated from the external environment, thereby reducing failures and malfunctions of the devices provided in the substrate transport device. This improves the reliability of the substrate transport device.

[0029] One or more embodiments described herein can be combined with one another insofar as they are practicable within the scope of the intended embodiments. The embodiments described herein should be considered in all respects to be illustrative and not limiting. The illustrated and described embodiments can be extended to include other embodiments in addition to those specifically described without departing from the technical scope. The technical scope should be determined not by the foregoing description alone, but in light of the specification including its equivalents. Accordingly, all configurations including the technical scope and the scope of equivalents are intended to be included in the technical scope.

[0030] The one or more exemplary embodiments described above are specific examples of the following embodiments.

[0031] (Aspect 1) A hand for gripping the circuit board, The end effector includes a plunger that contacts the substrate and aligns the substrate, The plunger is A contact portion that contacts the substrate, A shaft portion that moves the contact portion in order to contact the substrate, The plunger includes an isolation wall that isolates the internal region of the plunger from the outside, The isolation wall includes an axial hole through which the shaft portion extends into the internal region. The substrate transport device includes a shaft portion, the first end of which is connected to the shaft portion, and the second end of which is connected to the isolation wall.

[0032] (Aspect 2) The substrate transport apparatus according to embodiment 1, wherein the shaft portion includes a convex portion protruding from the shaft portion.

[0033] (Aspect 3) The cover is connected to the convex portion, as described in embodiment 2 of the substrate transport device.

[0034] (Aspect 4) The substrate transport device according to embodiment 3, wherein the cover includes a plate that sandwiches the cover with the convex portion, and the plate is connected to the convex portion.

[0035] (Aspect 5) The substrate transport apparatus according to embodiment 1, wherein the cover includes a material that expands and contracts.

[0036] (Aspect 6) The substrate transport apparatus according to embodiment 1, wherein the cover has an accordion structure.

[0037] (Aspect 7) The substrate transport apparatus according to embodiment 6, wherein there is a space between the cover and the shaft portion.

[0038] (Pattern 8) The substrate transport device according to embodiment 1, wherein the cover has a cylindrical shape and covers the periphery of the shaft portion from the convex portion to the isolation wall.

[0039] (Aspect 9) The substrate transport apparatus according to embodiment 1, wherein the cover has a first end that is sealed off from the external environment and connected to the shaft portion, and a second end that is sealed off from the external environment and connected to the isolation wall.

[0040] (Aspect 10) The substrate transport device according to embodiment 1, wherein a drive unit for driving the shaft portion is arranged in the internal region.

[0041] (Aspect 11) The substrate transport device according to embodiment 10, wherein a sensor is arranged in the internal region.

[0042] (Aspect 12) The substrate transport apparatus described in embodiment 1 is used in a process that uses liquid.

[0043] (Aspect 13) A hand for gripping the circuit board, The end effector includes a plunger that contacts the substrate and aligns the substrate, The plunger is A contact portion that contacts the substrate, It includes an isolation wall that isolates the internal region, including the drive unit that drives the contact portion, from the outside, The isolation wall includes an axial hole in which the contact portion extends into the internal region. The substrate transport device includes a cover, the contact portion of which the first end is connected to the contact portion and the second end is connected to the isolation wall. [Explanation of Symbols]

[0044] W board 100 Substrate transport device 130 End Effector 140 hands 141A,141B,142A,142B Board contact part 150 plungers 151 Contact part 153 Holder 154A, 154B, 154C, 154D Cover 155A,155B,155C Shaft 156A, 159A, 156B, 159B, 156C, 159C connection part 157A,157B,157C Isolation wall 158A, 158B Plate 160 Internal area 161C, 162C sealing member 163 Shaft hole 300 base 600 links 601 Rotation axis

Claims

1. In a substrate transport device, A hand for gripping the circuit board, The end effector includes a plunger that contacts the substrate and aligns the substrate, The plunger is A contact portion that contacts the substrate, A shaft portion that moves the contact portion in order to contact the substrate, The plunger includes an isolation wall that isolates the internal region of the plunger from the outside, The isolation wall includes an axial hole through which the shaft portion extends into the internal region. The substrate transport device includes a shaft portion, the first end of which is connected to the shaft portion, and the second end of which is connected to the isolation wall.

2. The substrate transport apparatus according to claim 1, wherein the shaft portion includes a convex portion protruding from the shaft portion.

3. The substrate transport device according to claim 2, wherein the cover is connected to the convex portion.

4. The substrate transport device according to claim 3, wherein the cover includes a plate that sandwiches the cover with the convex portion, and the plate is connected to the convex portion.

5. The substrate transport apparatus according to claim 1, wherein the cover includes a material that expands and contracts.

6. The substrate transport apparatus according to claim 1, wherein the cover has an accordion structure.

7. The substrate transport device according to claim 6, wherein there is a space between the cover and the shaft portion.

8. The substrate transport device according to claim 2, wherein the cover has a cylindrical shape and covers the periphery of the shaft portion from the convex portion to the isolation wall.

9. The substrate transport apparatus according to claim 1, wherein the cover has a first end that is sealed off from the external environment and connected to the shaft portion, and a second end that is sealed off from the external environment and connected to the isolation wall.

10. The substrate transport device according to claim 1, wherein a drive unit for driving the shaft portion is arranged in the internal region.

11. The substrate transport device according to claim 10, wherein a sensor is arranged in the internal region.

12. The substrate transport apparatus described in claim 1 is used in a process that uses liquid.

13. In a substrate transport device, A hand for gripping the circuit board, The end effector includes a plunger that contacts the substrate and aligns the substrate, The plunger is A contact portion that contacts the substrate, It includes an isolation wall that isolates the internal region, including the drive unit that drives the contact portion, from the outside, The isolation wall includes an axial hole in which the contact portion extends into the internal region. The substrate transport device includes a cover whose first end is connected to the contact portion and whose second end is connected to the isolation wall.

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