Inductor and manufacturing method therefor

Abstract

The present invention provides an inductor that can meet the needs for miniaturization and low resistance, and a manufacturing method therefor. An inductor manufacturing method of the present invention includes the steps of: providing a stack-type positive electrode oxide film body, which includes a step of stacking a first divided body part having a first through part formed therein and a second divided body part having a second through part formed therein, so that the first through part and the second through part are aligned with each other with a bonding part therebetween, and a step of removing the bonding part between the first through part and the second through part; forming vertical connection parts by filling the first through part and the second through part with a metal material; forming an upper connection part connecting the vertical connection parts with each other on the upper part of the stack-type positive electrode oxide film body; and forming a lower connection part connecting the vertical connection parts with each other on the lower part of the stack-type positive electrode oxide film body.

Description

Inductor and method for manufacturing the same

[0001] The present invention relates to an inductor and a method for manufacturing the same.

[0002] An inductor is a passive component that utilizes the electromagnetic action generated by passing current through a wire wound around a core. A wide range of inductors are being developed for use in high-frequency circuits, general circuits, decoupling circuits, and power supply circuits. While some inductors have variable inductance, most are fixed. They are available in leaded and surface-mount types, and structurally classified into wound, laminated, and thin-film types.

[0003] Inductors can be combined with capacitors to form resonant circuits, or used in filter circuits to filter specific signals or for impedance matching. With the recent advancement of electronic and communication devices, issues such as environmental and communication failures are emerging. Consequently, technology is advancing toward increased functional complexity, higher integration, and higher efficiency.

[0004] As the miniaturization and high-performance of electronic and communication devices accelerate, the components and devices used are increasingly required to minimize heat generation through miniaturization and low resistance. Consequently, research is needed to miniaturize and reduce the resistance of inductors used in electronic and communication devices.

[0005] The wound inductor developed to date is manufactured by winding the wire while maintaining the coil shape and thermally fusing the wire to form a coil element, then embedding the coil element in a slurry-type magnetic core, and compressing and hardening the magnetic core. A thin-film inductor is manufactured by providing a support member, forming a conductive layer on the upper and lower surfaces of the support member, patterning it to form a coil pattern, and then laminating a magnetic sheet on top of it, compressing and hardening it to form a magnetic body. A multilayer inductor is manufactured by forming a via by punching a ceramic sheet using a laser, printing a conductive pattern with a conductive metal on the ceramic sheet to fill the via, laminating multiple sheets, and then sintering them to form an integrated body.

[0006] However, the structure of the inductor manufactured through the above manufacturing process has limitations in meeting the needs for miniaturization and low resistance demanded by the market, and there are also limitations in increasing the inductance value.

[0007] [Prior Art Literature]

[0008] [Patent Document]

[0009] (Patent Document 1) Korean Patent Publication No. 10-2020-0115286

[0010] (Patent Document 2) Korean Patent Gazette Registration No. 10-2093558

[0011] The present invention has been devised to solve the problems of the above-described prior art, and its purpose is to provide an inductor and a manufacturing method thereof that can satisfy the needs for miniaturization and low resistance.

[0012] Meanwhile, the present invention has been devised to solve the problems of the above-described prior art, and its purpose is to provide an inductor capable of increasing an inductance value and a method for manufacturing the same.

[0013] In order to achieve the above-described object, a method for manufacturing an inductor according to the present invention comprises the steps of: providing a laminated anodized film body including a step of laminating a first divided body part having a first through-portion formed therein and a second divided body part having a second through-hole formed therein such that the first through-portion and the second through-portion are aligned with each other with a joint therebetween; and a step of removing the joint between the first through-portion and the second through-portion; a step of forming a vertical connection part by filling a metal material into the first through-portion and the second through-portion; a step of forming an upper connection part connecting the vertical connection parts at an upper portion of the laminated anodized film body; and a step of forming a lower connection part connecting the vertical connection parts at a lower portion of the laminated anodized film body.

[0014] Meanwhile, a method for manufacturing an inductor according to the present invention comprises the steps of: laminating a first divided body part and a second divided body part, each having a first through-hole formed therein, with a joint therebetween; removing the joint located at a lower portion of the first through-hole part; and forming a second through-hole part in the second divided body part using the first through-hole part; providing a laminated anodized film body; filling a metal material into the first through-hole part and the second through-hole part to form a vertical connection part; forming an upper connection part connecting the vertical connection parts at an upper portion of the laminated anodized film body; and forming a lower connection part connecting the vertical connection parts at a lower portion of the laminated anodized film body.

[0015] Meanwhile, an inductor according to the present invention includes a laminated anodized film body and a coil portion, wherein the coil portion includes a plurality of vertical connecting portions penetrating the laminated anodized film body; an upper connecting portion connecting the vertical connecting portions at an upper portion of the laminated anodized film body; and a lower connecting portion connecting the vertical connecting portions at a lower portion of the laminated anodized film body, wherein the laminated anodized film body includes at least two divided body portions made of anodized film material; and a joining portion provided between the divided body portions for joining the divided body portions.

[0016] Additionally, the height of the laminated anodic oxide film body is 200 ㎛ or more and 400 ㎛ or less.

[0017] The present invention provides an inductor and a manufacturing method thereof that can satisfy the needs for miniaturization and low resistance.

[0018] Meanwhile, the present invention provides an inductor capable of increasing an inductance value and a method for manufacturing the same.

[0019] Figure 1 is a plan view of an inductor according to a preferred embodiment of the present invention.

[0020] Figure 2 is a cross-sectional view taken along line AA' of Figure 1.

[0021] Figure 3 is a cross-sectional view of a laminated anodic oxide film body according to a preferred embodiment of the present invention.

[0022] FIGS. 4A to 4C are drawings showing a method for manufacturing a laminated anodic oxide film body according to a preferred embodiment of the present invention.

[0023] FIG. 5 is a drawing showing a cross-section and an enlarged view thereof of a laminated anodic oxide film body according to a preferred embodiment of the present invention.

[0024] FIGS. 6a and 6b are enlarged views of a joint portion of a laminated anodic oxide film body according to a preferred embodiment of the present invention.

[0025] FIGS. 7a to 8c are drawings showing modified examples of a method for manufacturing a laminated anodic oxide film body according to a preferred embodiment of the present invention.

[0026] The following merely exemplifies the principles of the invention. Therefore, those skilled in the art will be able to implement the principles of the invention and invent various devices within the scope and spirit of the invention, even if not explicitly described or illustrated herein. Furthermore, all conditional terms and embodiments listed herein are expressly intended, in principle, to facilitate understanding of the invention's concepts and should be understood as being solely intended to facilitate understanding and are not intended to be limited to the specifically enumerated embodiments and conditions.

[0027] The above-described purposes, features and advantages will become clearer through the following detailed description with reference to the attached drawings, so that a person having ordinary skill in the art to which the invention pertains can easily practice the technical idea of ​​the invention.

[0028] Embodiments described herein will be described with reference to cross-sectional and / or perspective views, which are ideal exemplary illustrations of the present invention. The thicknesses of membranes and regions depicted in these drawings are exaggerated for the purpose of effectively explaining the technical contents. The shapes of the exemplary drawings may be modified due to manufacturing techniques and / or tolerances. Furthermore, the number of molded articles depicted in the drawings is only a portion of the figures for illustrative purposes. Therefore, embodiments of the present invention are not limited to the specific shapes depicted, but also include variations in shapes resulting from the manufacturing process.

[0029] The following is a detailed explanation with reference to the drawings.

[0030] FIG. 1 is a plan view of an inductor according to a preferred embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line AA' of FIG. 1.

[0031] An inductor (1000) according to a preferred first embodiment of the present invention includes a laminated anodic oxide film body (100) and a coil portion (200), and the coil portion (200) includes a plurality of vertical connection portions (210) penetrating the laminated anodic oxide film body (100) and a horizontal connection portion (230) connecting the vertical connection portions.

[0032] The coil portion (200) is composed of an electrically conductive material, and may preferably be formed by including a metal having high electrical conductivity. For example, the material constituting the coil portion (200) includes silver (Ag), palladium (Pd), aluminum (Al), nickel (Ni), titanium (Ti), gold (Au), copper (Cu), platinum (Pt), or an alloy thereof.

[0033] The coil portion (200) includes a winding portion (201) and a pad portion (205). The pad portion (205) includes a first pad portion (251) connected to one end of the winding portion (201) and a second pad portion (253) connected to the other end of the winding portion (201). The winding portion (201) is formed between the first and second pad portions (251, 253). The first pad portion (251) is connected to a first external electrode (not shown), and the second pad portion (253) is connected to a second external electrode (not shown). The first and second external electrodes (not shown) are formed of copper (Cu), nickel (Ni), tin (Sn), or an alloy thereof. The first and second pad portions (251, 253) may be provided on the same surface of the laminated anodized film body (100), for example, on the upper surface. However, it is not limited to this.

[0034] The winding portion (201) includes a plurality of vertical connecting portions (210) penetrating the laminated anodic oxide film body (100) and horizontal connecting portions (230) connecting the vertical connecting portions (210). The winding portion (201) is formed by winding so as to wrap around a portion of the laminated anodic oxide film body (100) such that the horizontal connecting portions (230) are provided on the outside of the laminated anodic oxide film body (100) and the vertical connecting portions (210) are provided on the inside of the laminated anodic oxide film body (100).

[0035] The vertical connecting portion (210) is formed by filling an electrically conductive material into a vertical penetration portion (130) that penetrates the laminated anodized film body (100) upwardly and downwardly. The vertical connecting portion (210) includes a first row of vertical connecting portions (215) located on one side of the laminated anodized film body (100) and a second row of vertical connecting portions (217) located on the other side of the laminated anodized film body (100). The vertical connecting portions (210) arranged in the column direction are arranged to be spaced apart from each other by a certain distance.

[0036] The horizontal connection part (230) is provided on the surface side of the laminated anodic oxide film body (100) and is made of an electrically conductive material, and may be the same material as the vertical connection part (210). The horizontal connection part (230) includes an upper connection part (235) that connects the vertical connection parts (210) at the upper part of the laminated anodic oxide film body (100) and a lower connection part (237) that connects the vertical connection parts (210) at the lower part of the laminated anodic oxide film body (100).

[0037] The upper connecting portion (235) is configured to connect one of the vertical connecting portions (210) of the first row of vertical connecting portions (215) with the vertical connecting portion (210) that is at the shortest distance among the vertical connecting portions (217) of the second row. The upper connecting portion (235) may be provided in a diagonal shape having an upward slope with respect to the drawing of Fig. 1. The vertical connecting portions (210) arranged in the column direction are arranged to be spaced apart from each other by a certain distance. Therefore, the upper connecting portions (235) may have an inclination angle of the same angle.

[0038] The lower connecting portion (237) is configured to connect one of the vertical connecting portions (210) of the second row of vertical connecting portions (217) with the vertical connecting portion (210) that is at the shortest distance among the vertical connecting portions (215) of the first row. The lower connecting portion (237) may be provided as a diagonal line having an upward left slope based on the drawing of Fig. 1. The lower connecting portions (237) may have slopes at the same angle.

[0039] The upper connecting portion (235) and the lower connecting portion (237) are connected through the vertical connecting portion (210), and the coil as a whole has a shape in which it is wound while penetrating the laminated anodic oxide film body (100) through the vertical connecting portion (210), and the internal area of ​​the coil portion (200) formed by the first and second rows of vertical connecting portions (215, 217) and the upper and lower connecting portions (235, 237) has a rectangular cross-section shape.

[0040] Figure 3 is a cross-sectional view of a laminated anodic oxide film body (100) according to a preferred embodiment of the present invention.

[0041] Referring to FIG. 3, the laminated anodized film body (100) includes at least two split body parts made of anodized film material, and a joint (150) provided between the split body parts to join the split body parts. For example, the laminated anodized film body (100) is composed of a first split body part (110) and a second split body part (130), but is not limited to two.

[0042] There is no limitation on the material of the joint (150) as long as it can manufacture an inductor (1000) by joining the first split body part (110) and the second split body part (130) according to a preferred embodiment of the present invention. There is no limitation on the shape of the joint (150), such as a film-shaped configuration, a configuration in which a liquid substance solidifies, or a solidified shape.

[0043] The first divided body part (110) and the second divided body part (130) are composed of an anodic oxide film material. An anodic oxide film refers to a film formed by anodizing a base metal, and pores refer to holes formed in the process of forming an anodic oxide film by anodizing a metal. For example, when the base metal is aluminum (Al) or an aluminum alloy, when the base metal is anodized, an anodic oxide film made of aluminum oxide (Al2O3) is formed on the surface of the base metal. The anodic oxide film formed as described above is vertically divided into a barrier layer (10) in which no pores (p) are formed inside, and a porous layer (20) in which pores (p) are formed inside. When the base metal on which an anodic oxide film having a barrier layer (10) and a porous layer (20) is formed on the surface is removed, only an anodic oxide film made of aluminum oxide (Al2O3) remains.

[0044] The anodic oxide film has a coefficient of thermal expansion of 2 to 3 ppm / ℃. Therefore, when exposed to a high temperature environment, there is little thermal deformation due to temperature. Since the inductor (1000) according to a preferred embodiment of the present invention includes a coil portion (200), it should not be deformed in response to the temperature of the surrounding environment. By configuring the first divided body portion (110) and the second divided body portion (130) constituting the inductor (1000) according to a preferred embodiment of the present invention with an anodic oxide film material, the thermal deformation of the inductor (1000) can be minimized. As a result, the coil of the coil portion (200) can be prevented from being broken or the inductance from being changed.

[0045] A method for manufacturing an inductor according to a preferred embodiment of the present invention includes a step of laminating a first divided body part (110) having a first through-hole (111) formed therein and a second divided body part (130) having a second through-hole (131) formed therein with a joint (150) therebetween so that the first through-hole (111) and the second through-hole (131) are aligned with each other, and a step of removing the joint (150) between the first through-hole (111) and the second through-hole (131). Thereafter, the method includes a step of forming a vertical connection (210) by filling a metal material into the first penetration (111) and the second penetration (131), a step of forming an upper connection (235) connecting the vertical connection (210) at the top of the laminated anodic oxide film body (100), and a step of forming a lower connection (237) connecting the vertical connection (210) at the bottom of the laminated anodic oxide film body (100).

[0046] FIGS. 4a to 4c are drawings showing a method for manufacturing a laminated anodic oxide film body (100) according to a preferred embodiment of the present invention.

[0047] Referring to FIG. 4a, a step of laminating a first divided body part (110) in which a first through-hole (111) is formed and a second divided body part (130) in which a second through-hole (131) is formed is performed so that the first through-hole (111) and the second through-hole (131) are aligned with each other with a joint (150) therebetween.

[0048] Next, referring to FIG. 4b, a step of removing the joint (150) between the first through-hole (111) and the second through-hole (131) is performed. A method of removing the joint (150) may be a method using a laser. However, the present invention is not limited thereto, and any physical or chemical method may be used as long as the joint (150) is removed so that the first through-hole (111) and the second through-hole (131) can be connected to each other.

[0049] Next, referring to FIG. 4c, a step of forming a vertical connection (210) by filling a metal material into the first penetration portion (111) and the second penetration portion (131) is performed. The method of filling the metal material may use a plating method. However, the present invention is not limited thereto, and there is no limitation on any method that can fill the metal material into the first penetration portion (111) and the second penetration portion (131).

[0050] FIG. 5 is a drawing showing a cross-section and an enlarged view thereof of a laminated anodic oxide film body (100) according to a preferred embodiment of the present invention, and FIGS. 6a and 6b are enlarged drawings of a joint portion of a laminated anodic oxide film body (100) according to a preferred embodiment of the present invention.

[0051] The first split body part (110) and the second split body part (130) include a barrier layer (10) having no pores (p) formed vertically inside, and a porous layer (20) having pores (p) formed inside, and the part joined to the joint part (150) is the porous layer (20). A crown protrusion (CD) is formed on the upper part of the porous layer (20). Based on each pore (P), the upper surface has a concave groove shape, and the crown protrusion (CD) is formed when the concave grooves overlap with adjacent concave grooves.

[0052] Based on the joint (150), the porous layer (20) is positioned on the side of the joint (150) and the barrier layer (10) is positioned on the opposite side. Since a crown projection (CD) is provided on the surface side of the porous layer (20), the first split body part (110) and the second split body part (130) are joined so that the crown projection (CD) faces the joint (150). Since the surface side of the porous layer (20) is joined over a wider area due to the configuration of the crown projection (CD), the joining strength is improved.

[0053] Meanwhile, the barrier layer (10) is located on the upper surface and the lower surface of the laminated anodic oxide film body (100).

[0054] In the subsequent process, a photoresist may be provided on the upper surface of the laminated anodized film body (100) to form an upper connection portion (235), and a photoresist may be provided on the lower surface of the laminated anodized film body (100) to form a lower connection portion (237). At this time, if the photoresist is provided on a barrier layer without pores (p), the photoresist does not remain in the subsequent removal process and is easily removed. Conversely, if the porous layer (20) is located on the upper surface or the lower surface of the laminated anodized film body (100), the photoresist remains in the pores (p), which complicates the cleaning process and causes a problem in that the quality of the inductor (1000) deteriorates due to the residue.

[0055] When joining the first split body part (110) and the second split body part (130) to each other, the crown protrusions (CD) adjacent to each other in the upper and lower directions may be positioned opposite each other as shown in FIG. 6a, or the crown protrusions (CD) adjacent to each other in the upper and lower directions may be positioned in a zigzag pattern as shown in FIG. 6b, or the two cases may be joined to each other in a mixed form. Through this, the joining strength of the first split body part (110) and the second split body part (130) is improved.

[0056] FIGS. 7a to 8c are drawings showing modified examples of a method for manufacturing a laminated anodic oxide film body (100) according to a preferred embodiment of the present invention.

[0057] A method for manufacturing a laminated anodic oxide film body (100) includes a step of laminating a first divided body part (110) having a first through-hole part (111) formed therein and a second divided body part (130) without a through-hole part with a joint part (150) interposed therebetween, a step of removing the joint part (150) located at the lower portion of the first through-hole part (111), and a step of forming a second through-hole part (131) in the second divided body part (130) using the first through-hole part (111).

[0058] First, referring to Fig. 7a, a first split body part (110) having a first through-hole (111) formed therein is prepared. A photoresist (PR) is formed on the upper surface of the first split body part (110), patterned to form an opening, and the first split body part (110) is wet-etched through the opening to form a first through-hole (111) in the first split body part (110).

[0059] Next, referring to FIG. 7b, a step of laminating a first divided body part (110) having a first penetration part (111) formed and a second divided body part (130) without a penetration part with a joint part (150) interposed therebetween is performed.

[0060] Next, referring to Fig. 7c, a step of removing the joint (150) located at the lower portion of the first through-hole (111) is performed. A method of removing the joint (150) located at the lower portion of the first through-hole (111) may use a laser or etching method, but is not limited thereto.

[0061] Next, referring to FIG. 8a, a second through-hole portion (131) is formed in a second divided body portion (130) using the first through-hole portion (111) of the first divided body portion (110). The method for forming the second through-hole portion (131) in the second divided body portion (130) may be the same as the method for forming the first through-hole portion (111). The second through-hole portion (131) may be formed by wet etching using a material that reacts to an anodic oxide film.

[0062] In forming the second penetration portion (131) in the second divided body portion (130), since the first divided body portion (110) having the first penetration portion (111) is used as a mask, the second penetration portion (131) is formed at a position corresponding to the first penetration portion (111). Therefore, there is no need to align the first penetration portion (111) and the second penetration portion (131) with each other.

[0063] Next, referring to FIG. 7b, a step of forming a vertical connection portion (210) by filling a metal material into the first through-hole portion (111) and the second through-hole portion (131) is performed. Next, referring to FIG. 7c, the photoresist (PR) is removed. The reason why the photoresist (PR) is removed after filling the metal material is because, if the photoresist (PR) is removed before filling the metal material, the residue of the photoresist (PR) may remain on the inner walls of the first through-hole portion (111) and the second through-hole portion (131) during the removal process, which may deteriorate the quality of the vertical connection portion (210).

[0064] As described above, the present invention has been described with reference to preferred embodiments thereof, but it will be apparent to those skilled in the art that various modifications or variations may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the following claims.

[0065] [Explanation of symbols]

[0066] 100: Laminated anodized body

[0067] 110: First division body part

[0068] 130: Second split body part

[0069] 150: Joint

[0070] 200: Coil section

[0071] 201: Winding section

[0072] 205: Pad section

[0073] 210: Vertical connection

[0074] 230: Horizontal connection

Claims

1. A step for providing a laminated anodic oxide film body, comprising: a step of laminating a first divided body part having a first penetration part formed therein and a second divided body part having a second penetration hole formed therein with a joint therebetween so that the first penetration part and the second penetration part are aligned with each other; and a step of removing the joint between the first penetration part and the second penetration part. A step of forming a vertical connection by filling a metal material into the first penetration portion and the second penetration portion; A step of forming an upper connecting portion connecting the vertical connecting portions on the upper portion of the above-described laminated anodic oxide film body; and A method for manufacturing an inductor, comprising: forming a lower connecting portion connecting the vertical connecting portions at the lower portion of the laminated anodic oxide film body.

2. A step for providing a laminated anodic oxide film body, including a step of laminating a first divided body part and a second divided body part with a first through-hole formed therein with a joint therebetween, a step of removing the joint located at a lower portion of the first through-hole part, and a step of forming a second through-hole part in the second divided body part using the first through-hole part; A step of forming a vertical connection by filling a metal material into the first penetration portion and the second penetration portion; A step of forming an upper connecting portion connecting the vertical connecting portions on the upper portion of the above-described laminated anodic oxide film body; and A method for manufacturing an inductor, comprising: forming a lower connecting portion connecting the vertical connecting portions at the lower portion of the laminated anodic oxide film body.

3. In an inductor including a laminated anodic oxide film body and a coil section, The above coil part A plurality of vertical connecting portions penetrating the above-mentioned laminated anodic oxide film body; An upper connecting portion connecting the vertical connecting portions at the upper portion of the above-described laminated anodic oxide film body; and Including a lower connecting portion connecting the vertical connecting portions at the lower portion of the above-mentioned laminated anodic oxide film body, The above laminated anodic oxide film body At least two split body parts composed of an anodic oxide material; and An inductor, comprising a joint portion for joining the divided body portions provided between the divided body portions.

4. In paragraph 1, An inductor wherein the height of the above-mentioned laminated anodic oxide film body is 200㎛ or more and 400㎛ or less.

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