1results about How to "Lower limit temperature" patented technology

The application provides a temperature control device for semiconductor process, which comprises a compressor temperature control unit, a Peltier temperature control unit and a medium circulation unit. The compressor temperature control unit comprises a compressor, a condenser and an evaporator. The Peltier temperature control unit comprises a Peltier sheet, a circulating medium heat exchanger connected with the cold side of the Peltier sheet and a refrigerant heat exchanger connected with the hot side of the Peltier sheet. The medium circulation unit circulates medium, and the medium flows through the circulating medium heat exchanger. The exhaust port of the compressor is connected with the inlet of the condenser, the outlet of the condenser is divided into a first refrigerant branch and a second refrigerant branch, the first refrigerant branch is connected with the refrigerant inlet of the evaporator, the second refrigerant branch is connected with the refrigerant inlet of the refrigerant heat exchanger, and the refrigerant outlet of the evaporator and the refrigerant outlet of the refrigerant heat exchanger are combined and connected with the suction port of the compressor. The device greatly improves the heat dissipation capacity of the hot side of the Peltier sheet, thereby reducing the working temperature of the Peltier sheet and improving the refrigeration efficiency.