Cathode body and fluorescent tube using the same
A cathode body and cathode technology, applied in cold cathode manufacturing, parts of gas discharge lamps, gas discharge lamps, etc., can solve undisclosed, undisclosed cold cathode body sputtering, unspecified electron emission efficiency, etc., to achieve The effect of high electron emission efficiency
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[0060] figure 1 It is a figure which shows an example of the magnetron sputtering apparatus used in this invention, figure 2 It is a figure for demonstrating the cathode body manufacturing jig used for cathode body manufacture of this invention.
[0061] figure 1 The shown magnetron sputtering device has: a target (target) 1; a polygonal shape (for example, a regular 16-sided shape) columnar rotating shaft 2; The rotating magnet group 3 of the magnet group; the fixed outer peripheral plate magnet 4 disposed on the outer periphery of the rotating magnet group 3 so as to surround the rotating magnet group 3 ; And, on the target 1, a backing plate (bucking plate) 6 is bonded, and the parts other than the target 1 side of the columnar rotating shaft 2 and the helical plate magnet group 3 are covered by the paramagnet 15, and the paramagnet 15 is covered by the casing 7. covered by.
[0062] Viewed from the target 1 side, the fixed outer peripheral plate magnet 4 has a structu...
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