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Cathode body and fluorescent tube using the same

A cathode body and cathode technology, applied in cold cathode manufacturing, parts of gas discharge lamps, gas discharge lamps, etc., can solve undisclosed, undisclosed cold cathode body sputtering, unspecified electron emission efficiency, etc., to achieve The effect of high electron emission efficiency

Inactive Publication Date: 2010-08-11
TOHOKU UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method is to form an aluminum layer and a LaB layer on a flat glass substrate by sputtering. 6 layer, which does not disclose the method of sputtering to a cold cathode body having a concave-convex cylindrical cup shape
In addition, Patent Document 3 does not disclose t

Method used

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  • Cathode body and fluorescent tube using the same
  • Cathode body and fluorescent tube using the same
  • Cathode body and fluorescent tube using the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] figure 1 It is a figure which shows an example of the magnetron sputtering apparatus used in this invention, figure 2 It is a figure for demonstrating the cathode body manufacturing jig used for cathode body manufacture of this invention.

[0061] figure 1 The shown magnetron sputtering device has: a target (target) 1; a polygonal shape (for example, a regular 16-sided shape) columnar rotating shaft 2; The rotating magnet group 3 of the magnet group; the fixed outer peripheral plate magnet 4 disposed on the outer periphery of the rotating magnet group 3 so as to surround the rotating magnet group 3 ; And, on the target 1, a backing plate (bucking plate) 6 is bonded, and the parts other than the target 1 side of the columnar rotating shaft 2 and the helical plate magnet group 3 are covered by the paramagnet 15, and the paramagnet 15 is covered by the casing 7. covered by.

[0062] Viewed from the target 1 side, the fixed outer peripheral plate magnet 4 has a structu...

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PUM

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Abstract

Provided is a cathode body having high luminance, high efficiency and long service life. The cathode body is manufactured by forming a LaB6 film on a cylindrical cup, which is formed of a highly heat conductive metal alloy containing a lanthanum oxide, by using a magnetron sputter apparatus which can perform sputtering at a low electron temperature.

Description

technical field [0001] The present invention relates to a cathode body, a fluorescent tube including the cathode body, and a method of manufacturing the same. Background technique [0002] Generally, a cold cathode fluorescent tube including such a cathode body is used in a backlight light source of a liquid crystal display device such as a monitor or a liquid crystal television, and the like. The cold cathode fluorescent tube has a fluorescent tube body and a pair of cold electrode bodies that emit electrons. The fluorescent tube body is formed of a glass tube, and the inner wall is coated with a fluorescent substance, and a mixed gas such as Hg-Ar is sealed in the fluorescent tube body. [0003] Patent Document 1 proposes a cold cathode fluorescent tube including a cylindrical cup-shaped cold cathode body. Specifically, the cylindrical cup-shaped cold cathode body for electron emission has: a cylindrical cup formed of nickel; as the main emission layer. In addition, Pat...

Claims

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Application Information

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IPC IPC(8): H01J61/06H01J9/02H01J61/70
CPCH01J9/022H01J61/0675H01J61/72
Inventor 大见忠弘后藤哲也
Owner TOHOKU UNIV