Broadband vibration energy collector structure and manufacturing method thereof

Abstract

The invention provides a manufacturing method of a vibration energy collector. The manufacturing method comprises the following steps that an upper framework and a lower framework are provided, and a metal layer is formed on the lower surface of the upper framework and the upper surface of the lower framework respectively; a piezoelectric film is provided, and a metal layer is formed on the surface of the piezoelectric film; the piezoelectric film is fixed in the middle by utilizing the lower framework and the upper framework so that a sandwich structure is formed; and a mass block is arranged in the middle position of the piezoelectric film. Correspondingly, the invention also provides a vibration energy collector structure. The piezoelectric film is enabled to greatly deform via vibration of the mass block, and broad frequency range of vibration energy collection is realized by utilizing nonlinear elastic deformation of the organic piezoelectric film and converted into electric energy to be outputted so that performance of the vibration energy collector is effectively enhanced.

Description

technical field [0001] The invention relates to the field of micro-electromechanical system processing, in particular to a novel broadband vibration energy collection device and a manufacturing method thereof. Background technique [0002] In recent years, the application range of electronic devices and sensors has been expanding, while traditional power supply methods, such as electrochemical batteries, have shortcomings such as short life, frequent replacement, and limited storage energy. Therefore, the research on new power supply technology is very urgent. Vibration energy is a kind of energy that exists widely in the natural environment, and the vibration energy harvester is a tiny device that collects and converts the vibration energy in the environment into electrical energy output. There are generally three types of vibration-based energy harvesting methods: piezoelectric, electrostatic, and electromagnetic. Compared with electrostatic and electromagnetic types, pi...

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