Jet height error compensation method for electrohydrodynamic printing of large-area micro-nano structures
A technology of micro-nano structure and height error, which is applied in printing and other directions, can solve the problems of large-area micro-nano structure limitation, difficulty in further improving structural morphology, and affecting performance.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Publication Date
- 2018-05-15
Smart Images

Figure 1 
Figure 2 
Figure 3
Abstract
Description
technical field
[0001] The invention relates to the technical field of electrohydrodynamic printing, in particular to a jet height error compensation method for electrohydrodynamic printing of large-area micro-nano structures. Background technique
[0002] Electrohydrodynamic printing has broad application prospects in electronic devices, wearable devices, flexible electronic displays, solar thin-film batteries, biological scaffolds, tissue engineering, organic light-emitting diodes, and biosensors. The traditional polymer device preparation technology generally uses light, particle, mechanical or physical contact technology to prepare polymer devices on various substrates, such as photolithographic printing technology, electron beam printing technology, interference lithography technology, laser direct write etc. These preparation technologies involve many steps and complex processes, resulting in high development and production costs, and a long time period, requiring hig...
Examples
Embodiment Construction
[0036] Embodiments of the present invention will be further described below with reference to the accompanying drawings:
[0037] Such as figure 1 As shown, a jet height error compensation method for electrohydrodynamic printing of large-area micro-nanostructures includes the following steps:
[0038] 1. Determine the number of substrate constraint points.
[0039]According to the electrohydrodynamic printing area, determine the number of constraint points, determine the number of constraint points on the X-axis and Y-axis in the XY plane of the substrate as N and M, generally N≥3, M≥3, the larger the printing area , the larger the value of N and M, the number of constraint points is N×M, and the X-axis and Y-axis positions of each constraint point are obtained according to the moving distance of the motion platform of the electrohydrodynamic device, and the N×M The coordinates of a constraint point on the XY plane are (x i ,y i ) N×M , where 1≤i≤N×M.
[0040] 2. Determi...