A fully automatic magnetic ring steam cleaning equipment

Abstract

The present invention proposes a fully automatic magnetic ring steam cleaning equipment, in which the magnetic ring is placed in a carrier mother basket, and an electrical controller is provided to control the cleaning, rinsing and drying processes. The equipment comprises a shell, an alkali cleaning structure, a water cleaning structure, a drying structure and a steam heating actuator. The feeding structure, the cleaning tank, the rinsing tank, the drying tank and the discharging structure are sequentially assembled together to form the main body of the equipment. A water system, an air system, a steam system and an electrical controller are installed inside the main body of the equipment. The feeding structure and the discharging structure are respectively connected to two ends of the shell, and a cleaning tank and a drying tank are provided between the feeding structure and the discharging structure. The carrier mother basket is transported to a grabbing position by the feeding structure for cleaning and drying, and then is transported to the discharging structure, thereby meeting the requirements of solar energy and LED industries for efficient and clean magnetic ring cleaning.

Description

Technical Field

[0001] The invention relates to a fully automatic magnetic ring steam cleaning device, which is used in the field of cleaning and drying magnetic rings in polysilicon production in the industry, so as to effectively remove particles attached to the surface and ensure that the magnetic rings are dry in and dry out. Background Art

[0002] In the current industry, the magnetic rings produced by polysilicon are generally cleaned manually, that is, the magnetic rings are placed in a stainless steel tank containing alkali solution, soaked for a long time, and then cleaned with pure water. This method is very inefficient, time-consuming and labor-intensive, and difficult to dry. For this reason, we propose a fully automatic magnetic ring steam cleaning equipment. Summary of the invention

[0003] The purpose of the present invention is to provide a fully automatic magnetic ring steam cleaning device to solve the time-consuming and labor-intensive problems in the polysilicon magnetic ring cleaning process in the semiconductor industry, improve the cleaning efficiency, and reduce the interference of human factors.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a fully automatic magnetic ring steam cleaning equipment, wherein the magnetic ring is placed in a carrying mother basket, and an electrical controller controls the cleaning, rinsing and drying processes, and comprises a shell, an alkali cleaning structure, a water cleaning structure, a drying structure and a steam heating actuator. The equipment is characterized in that a feeding structure, a cleaning tank, a rinsing tank, a drying tank and a discharging structure are assembled together in sequence to form a main body of the equipment, a water system, an air system, a steam system and an electrical controller are installed inside the main body of the equipment, the feeding structure and the discharging structure are respectively connected to the two ends of the shell, a cleaning tank and a drying tank are penetrated between the feeding structure and the discharging structure, the carrying mother basket is transported to a grabbing position by the feeding structure for cleaning and drying, and then is sent to the discharging structure, the cleaning tank and the drying tank are arranged in the shell, the shell is a closed structure, and a sealing is provided at the inlet of the cleaning tank. A sealing door 1, a sealing door 2 is provided at the outlet of the drying tank, and sensors are provided at the inlet of the cleaning tank and the outlet of the drying tank; the alkaline cleaning structure includes a cleaning chamber and an actuator 1 of the alkaline cleaning structure, a bubbling device 1 in the cleaning chamber connected to the gas system and an ultrasonic heating system arranged in the cleaning chamber are both controlled by the actuator 1; the water cleaning structure includes a cleaning chamber and an actuator 2 of the water cleaning structure, a bubbling device 2 in the cleaning chamber connected to the gas system and a heating system 2 arranged in the cleaning chamber are both controlled by the actuator 2; the drying structure includes a drying chamber and an actuator 3 of the gas drying structure, a gas drying circulation mechanism is provided outside the drying chamber, the gas drying circulation mechanism is controlled by the actuator 3, and the carrier basket is circulated and dried in the drying chamber; the carrier basket passes through the sealing door 2 through the discharging mechanism, and the sealing door 2 is equipped with a purge device.

[0005] Preferably, the electrical controller includes an operation panel of manual buttons and automatic buttons controlled by MCU / CPU, and the operation panel includes a programmable logic controller PLC. The controller PLC receives sensor signals to control the electrically connected actuator 1 of the alkaline cleaning structure, the actuator 2 of the water cleaning structure, the sealing door, the actuator 3 of the steam drying structure, and the steam heating actuator 4.

[0006] Preferably, the alkaline cleaning structure is provided with three cleaning tanks.

[0007] Preferably, the sensors are respectively arranged at the inlet and outlet of the feeding structure, at both sides of the inside and outside of the cleaning chamber, at the outside of the drying chamber, and at the inlet and outlet of the discharging structure.

[0008] Preferably, the following steps are followed:

[0009] ——Put the mother basket with the ceramic rings to be cleaned on the feeding structure, and the sensor transmits the signal to the electrical controller to control the opening of the sealing door at the feeding end. After the ceramic rings enter the set position in the cleaning chamber with the mother basket under the action of the mechanical arm, the position sensor sends a signal, the cleaning tank cover and the sealing door are closed, and the actuator of the cleaning structure starts to work, and the cleaning is completed in the cleaning chamber; the cleaning actuator stops cleaning, the tank cover door is instructed to open, and the mechanical arm is started to transport the mother basket to the drying chamber. After the drying tank cover door is closed, the actuator of the drying structure starts to work, and the drying is completed through the gas path system;

[0010] ——After drying is completed, the sealed door 2 at the discharge end is opened, and the mother basket is transported to the discharge end through the mechanical arm and the discharge structure, and the entire cleaning and drying process is completed.

[0011] Preferably, the following steps are followed: manual or automatic operation is selected,

[0012] ——When manual is selected, the control valves of cleaning, drying, water system, gas system and steam system are all completed manually, and the parameter settings of cleaning, drying and conveying mechanism are carried out after the administrator enters the password to confirm;

[0013] ——When automatic operation is selected, the equipment automatically performs self-inspection on each part, and the automatic process starts after meeting the requirements. The automatic process is as follows: after the magnetic ring's carrier basket is placed on the feeding structure and meets the requirements, an opening signal is given, and the sealing door 1 is opened; after the carrier basket enters the grabbing position of the robotic arm, the sealing door 1 is closed, and the robotic arm transports the carrier basket to the alkali cleaning chamber, and performs cleaning in the alkali cleaning chamber. After cleaning, it is determined whether the water cleaning chamber is working. If not, the alkali cleaning tank cover door is opened; the robotic arm transports the carrier basket to the water cleaning chamber, and performs cleaning in the water cleaning chamber. After cleaning, it is determined whether the water cleaning gun is working. If not, the drying chamber tank cover door is opened, and the robotic arm transports the carrier basket to the drying chamber, and performs drying in the drying chamber. After drying, it is determined whether there is material in the discharging structure. If not, the sealing door 2 is opened to cool the carrier basket. After the discharging is in place, the sealing door 2 is closed, and the carrier basket waits for material to be taken at the discharging structure.

[0014] Preferably, the steps of automatically performing self-inspection on each part of the device are as follows:

[0015] ——Judge whether the automatic state is met all the way, enter the automatic mode if it is met, detect whether the sealing door and the slot cover door are closed, and whether the liquid level in each cavity reaches the corresponding position;

[0016] ——The other way judges whether the alkali system and water system, CDA pressure, nitrogen pressure, frequency conversion fault, error alarm, if it is no, press the start button, otherwise it will automatically return to the self-check to judge whether it meets the automatic state.

[0017] Compared with the existing general practices, the advantages of the present invention are:

[0018] 1. High degree of automation, different cleaning and drying steps can be performed according to different process conditions;

[0019] 2. Further improve the cleaning efficiency of the magnetic ring to achieve continuous production;

[0020] 3. Realize dry in and dry out to avoid interference from human factors;

[0021] 4. The magnetic ring carries the mother basket to carry out corresponding process cleaning in the cavity to achieve comprehensive cleaning;

[0022] 5. Use factory steam for heating to reduce manufacturing costs, reduce energy loss, and save energy;

[0023] 6. Greatly reduce the number of operators and reduce labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is the front view of the present invention;

[0025] Figure 2 It is a left side view of the present invention;

[0026] Figure 3 It is a right side view of the present invention;

[0027] Figure 4 This is a tank layout diagram of the present invention;

[0028] Figure 5 It is the pipeline diagram of the present invention;

[0029] Figure 6 It is the pipeline principle diagram of the present invention;

[0030] Figure 7 For the present invention Figure 6 The enlarged schematic diagram at A in the middle;

[0031] Figure 8 For the present invention Figure 6 The enlarged schematic diagram of point B in the middle;

[0032] Fig. 9 For the present invention Figure 6 The enlarged schematic diagram at C in the middle;

[0033] Fig.10 For the present invention Figure 6 The enlarged schematic diagram of point B in the middle;

[0034] Fig.11 For the present invention Figure 6 The enlarged schematic diagram at E in the middle;

[0035] Fig.12 For the present invention Figure 6 The enlarged schematic diagram at F in the middle;

[0036] Fig.13 For the present invention Figure 6 The enlarged schematic diagram at G in the middle;

[0037] Description of the numbers in the figure:

[0038] 1. Feeding structure; 2. Control panel; 3. Sealing door 1; 4. Sealing door 2; 5. Discharging structure; 6. Feeding system; 7. Alkali cleaning chamber; 8. Water cleaning quick discharge chamber; 9. Cold water cleaning chamber; 10. Hot water cleaning chamber; 11. Drying chamber; 12. Discharging system; 13. Carrying mother basket; 14. Water system; 15. Alkali solution system; 16. Conveying mechanism; DETAILED DESCRIPTION

[0039] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0040] like Figure 1 and Fig.13As shown, a fully automatic magnetic ring steam cleaning equipment is used, the magnetic ring is placed in a bearing mother basket 13, and the alkali cleaning, water cleaning and drying processes are controlled by an electrical controller 2, including a shell, an alkali cleaning mechanism, a water cleaning mechanism and a gas drying mechanism, a feeding mechanism 1, an alkali cleaning chamber 7, a quick-discharge cleaning chamber 8, a water cleaning chamber 9, a hot water cleaning chamber 10, a drying chamber 11, and a discharging mechanism 5 are assembled together in sequence to form the main part of the equipment, and a feeding grabbing system 6, a water system 14, an alkali solution system 15, a discharging placing and taking system 12, a conveying mechanism 16 and an electrical controller 2 are installed inside the main part of the equipment, the two ends of the conveying mechanism 16 are respectively connected to the feeding structure 1 and the discharging structure 5, and the alkali cleaning chamber 7, the quick-discharge cleaning chamber 8, the water cleaning chamber 9, the hot water cleaning chamber 10, and the drying chamber 11 are passed through the middle, the bearing mother basket 13 is grabbed by the mechanical arm at the feeding system 6 through the feeding structure 1, and is placed on the discharging system 12 after being cleaned and dried on the conveying mechanism 16, and the cleaning chamber and the drying chamber are both placed The shell is a closed structure. Sealed doors 1, 2, 3, 4 and position sensors are arranged between the feeding system 6, the cleaning chamber, the drying chamber and the discharging system. Position sensors are arranged at the slot cover actuators of the cleaning chamber and the drying chamber and the conveying mechanism. The alkali cleaning mechanism includes an alkali cleaning chamber 7 and an actuator of an alkali cleaning structure. The bubbling device connected to the gas system in the cleaning chamber is controlled by the actuator. The ultrasonic and steam heating systems in the cleaning chamber are controlled by the actuator. The water cleaning mechanism includes cleaning chambers 8, 9, 10 and an actuator of a water cleaning structure. The bubbling device connected to the gas system in the cleaning chamber is controlled by the actuator. The steam heating system in the cleaning chamber is controlled by the actuator. The drying structure includes a drying chamber 11 and an actuator of a steam drying structure. The gas drying vacuum pumping mechanism outside the drying chamber is controlled by the actuator. The mother basket is dried in the drying chamber. When the mother basket passes through the sealed door 2 4 with the discharging mechanism, the purge device installed here is opened to eliminate the high temperature generated by the drying tank on the mother basket.

[0041] Figure 1 as well as Figure 4 The magnetic ring carrier basket 13 to be cleaned is shown waiting for cleaning on the feed structure 1, and the previous batch of magnetic rings are cleaned in the alkaline cleaning chamber 7. When the alkaline cleaning chamber 7 is cleaned, the next batch of magnetic ring carrier baskets 13 are cleaned in the chamber under the action of the feed system 6 and the conveying structure 16, and there are clean and dry magnetic ring carrier baskets on the discharge structure 5. The present invention is a continuous cleaning and drying production equipment with high efficiency and reduced human factors and secondary pollution.

[0042] like Figure 2The sealing door 3 shown is supported by a cylinder, and there are supporting guide rails on both sides of the door to facilitate the movement of the door and the entry and exit of the carrier basket 13, and to ensure that the cleaning chamber and the drying chamber are relatively closed from the outside world when in working state. During the cleaning procedure, the sealing doors 1 and 2 are automatically closed to prevent foreign debris from splashing into the chamber. During continuous production, the cleaned carrier basket can be prevented from being contaminated again.

[0043] First, place the mother basket 13 with the ceramic rings to be cleaned on the feed structure 1, open the feed end sealing door 13 after being sensed by the sensor, and transport the mother basket to the alkaline cleaning chamber 7 through the feed system 6 and the conveying mechanism 16, and use the alkaline cleaning system 15 to complete the alkaline cleaning; then start the conveying mechanism 16 to transport the mother basket to the water cleaning chamber, and complete the spray cleaning through the water system 14; finally, start the conveying mechanism 16 to transport the mother basket to the drying chamber 11, and the mother basket circulates and dries in the drying chamber until it is completely dry; open the discharge end sealing door 24, and the mother basket 13 is transported to the discharge structure 5 through the discharge system 12, and the entire cleaning and drying process is completed. When the mother basket passes through the sealing door 2 with the discharge mechanism, the purge device installed here is opened to eliminate the high temperature generated by the drying tank on the mother basket.

[0044] The above steps are all controlled by the electrical controller 2, which includes an operation panel with manual buttons and automatic buttons controlled by an MCU / CPU, containing a programmable logic controller PLC, which receives sensor signals to control the electrically connected sealing doors one and two, the conveying mechanism, the actuator of the alkali cleaning structure, the actuator of the water cleaning structure and the actuator of the steam drying structure, etc.

[0045] like Figure 4 As shown, the alkali cleaning structure is provided with three cleaning tanks, which can clean three supporting mother baskets at the same time. The supporting mother baskets start cleaning after entering the cleaning chamber, wherein the alkali solution is heated by factory steam, and the alkali solution consumption is supplemented by starting the liquid replenishment tank through the pressure difference liquid level signal.

[0046] The electrical controller 2 controls each moving part and sensor, wherein the conveying mechanism is responsible for conveying the carrier mother basket from the feeding structure 1 to the alkali cleaning chamber 7, the water cleaning chambers 8, 9, 10, the drying chamber 11 and the discharging structure 5 in sequence; each chamber is opened or closed by a sealing door and a slot cover door, so that the chamber is relatively closed when in working state; the alkali circuit system 15 and the water circuit system 14 add alkali solution and pure water to the chamber in a quantitative and regular manner, and clean the ceramic ring through pump circulation, ultrasound and steam heating; the gas circuit system cleans the ceramic ring by bubbling, and dries it by a steam-heated vacuum device.

[0047] The present invention provides an operating method of a fully automatic magnetic ring steam cleaning device, which comprises the following steps: selecting manual or automatic operation:

[0048] (1) When manual is selected, the control valves of cleaning, drying, water system, gas system and steam system are all completed manually. The parameter settings of cleaning, drying and conveying mechanisms are performed after the administrator enters the password to confirm;

[0049] (2) When automatic operation is selected, Figure 6 This is the pipeline view of this equipment. The equipment automatically performs self-inspection on each part. After meeting the requirements, the automatic process starts. The automatic process is as follows: after the magnetic ring's carrier basket is placed on the feeding structure and meets the requirements, an opening signal is given, and the sealing door is opened; after the carrier basket enters the grabbing position of the robotic arm, the sealing door is closed, and the robotic arm transports the carrier basket to the alkali cleaning chamber, and performs cleaning in the alkali cleaning chamber. After cleaning, it is determined whether the water cleaning chamber is working. If not, the alkali cleaning tank cover door is opened; the robotic arm transports the carrier basket to the water cleaning chamber, and performs cleaning in the water cleaning chamber. After cleaning, it is determined whether the water cleaning gun is working. If not, the drying chamber tank cover door is opened, and the robotic arm transports the carrier basket to the drying chamber, and performs drying in the drying chamber. After drying, it is determined whether there is material in the discharging structure. If not, the sealing door is opened to cool the carrier basket. After the discharging is in place, the sealing door is closed, and the carrier basket waits for material to be taken at the discharging structure.

[0050] The equipment automatically performs self-inspection on various parts, including: one way to judge whether the automatic state is met, and enter the automatic mode if it is met, to detect whether the sealing door and the slot cover door are closed, and whether the liquid level in each cavity reaches the corresponding position; the other way to judge whether the alkali system and the water system, the steam system, the CDA pressure, the nitrogen pressure, the frequency conversion fault, the error alarm, if not, press the start button, otherwise it automatically returns to the self-inspection to judge whether the automatic state is met.

[0051] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A fully automatic magnetic ring steam cleaning device, which places the magnetic ring in a carrying mother basket, has an electrical controller to control the cleaning, rinsing and drying processes, and includes a shell, an alkali cleaning structure, a water cleaning structure, a drying structure and a steam heating actuator, characterized in that: The feeding structure, the cleaning tank, the rinsing tank, the drying tank and the discharging structure are assembled together in sequence to form the main body of the equipment. A water system, a gas system, a steam system and an electrical controller are installed inside the main body of the equipment. The feeding structure and the discharging structure are respectively connected to the two ends of the shell. A cleaning tank and a drying tank are passed through the feeding structure and the discharging structure. The supporting mother basket is transported to the grabbing position by the feeding structure for cleaning and drying, and then sent to the discharging structure. The cleaning tank and the drying tank are arranged in the outer shell. The outer shell is a closed structure. A sealing door 1 is provided at the inlet of the cleaning tank, and a sealing door 2 is provided at the outlet of the drying tank. Sensors are provided at the inlet and outlet of the cleaning tank; the alkaline cleaning structure, The embodiment comprises a cleaning chamber and an actuator 1 of an alkaline cleaning structure, wherein a bubbling device 1 in the cleaning chamber connected to the gas circuit system and an ultrasonic heating system in the cleaning chamber are both controlled by the actuator 1; the water cleaning structure comprises a cleaning chamber and an actuator 2 of the water cleaning structure, wherein a bubbling device 2 in the cleaning chamber connected to the gas circuit system and a heating system 2 in the cleaning chamber are both controlled by the actuator 2; the drying structure comprises a drying chamber and an actuator 3 of a gas drying structure, wherein a gas drying circulation mechanism is provided outside the drying chamber, wherein the gas drying circulation mechanism is controlled by the actuator 3, and the carrier mother basket is circulated and dried in the drying chamber; the carrier mother basket passes through a sealing door 2 through a discharging mechanism, and a purge device is installed on the sealing door 2; The electrical controller includes an operation panel of manual buttons and automatic buttons controlled by MCU / CPU, and the operation panel includes a programmable logic controller PLC, and the controller PLC receives sensor signals to control the electrically connected actuator 1 of the alkali cleaning structure, the actuator 2 of the water cleaning structure, the sealing door, the actuator 3 of the steam drying structure, and the steam heating actuator 4; The alkaline cleaning structure is provided with three cleaning tanks; The sensors are respectively arranged at the inlet and outlet of the feeding structure, the inside and outside of the cleaning chamber, the outside of the drying chamber, and the inlet and outlet of the discharging structure; The electrical controller controls all moving parts and sensors, among which the conveying mechanism is responsible for conveying the mother basket from the feeding structure to the alkali cleaning chamber, water cleaning chamber, drying chamber and discharging structure in sequence; each chamber is opened or closed by a sealing door and a slot cover door, so that the chamber is relatively closed when in working state; the alkali circuit system and the water circuit system add alkali solution and pure water into the chamber in a quantitative and regular manner, and then clean the ceramic ring through pump circulation, ultrasound and steam heating; the gas circuit system cleans the ceramic ring by bubbling, and dries it by a steam-heated vacuum device; The operation method of the fully automatic magnetic ring steam cleaning equipment is as follows: ——Put the mother basket with the ceramic rings to be cleaned on the feeding structure, and the sensor transmits the signal to the electrical controller to control the opening of the sealing door at the feeding end. After the ceramic rings enter the set position in the cleaning chamber with the mother basket under the action of the mechanical arm, the position sensor sends a signal, the cleaning tank cover and the sealing door are closed, and the actuator of the cleaning structure starts to work, and the cleaning is completed in the cleaning chamber; the cleaning actuator stops cleaning, the tank cover door is instructed to open, and the mechanical arm is started to transport the mother basket to the drying chamber. After the drying tank cover door is closed, the actuator of the drying structure starts to work, and the drying is completed through the gas path system; ——After drying is completed, the second sealed door at the discharge end is opened, and the mother basket is transported to the discharge end through the mechanical arm and the discharge structure, and the entire cleaning and drying process is completed; ——When manual is selected, the control valves of cleaning, drying, water system, gas system and steam system are all completed manually, and the parameter settings of cleaning, drying and conveying mechanism are carried out after the administrator enters the password to confirm; ——When automatic operation is selected, the equipment automatically performs self-inspection on each part, and the automatic process starts after meeting the requirements. The automatic process is as follows: after the magnetic ring's carrier basket is placed on the feeding structure and meets the requirements, an opening signal is given, and the sealing door 1 is opened; after the carrier basket enters the grabbing position of the robotic arm, the sealing door 1 is closed, and the robotic arm transports the carrier basket to the alkali cleaning chamber, and performs cleaning in the alkali cleaning chamber. After cleaning, it is determined whether the water cleaning chamber is working. If not, the alkali cleaning tank cover door is opened; the robotic arm transports the carrier basket to the water cleaning chamber, and performs cleaning in the water cleaning chamber. After cleaning, it is determined whether the water cleaning gun is working. If not, the drying chamber tank cover door is opened, and the robotic arm transports the carrier basket to the drying chamber, and performs drying in the drying chamber. After drying, it is determined whether there is material in the discharging structure. If not, the sealing door 2 is opened to cool the carrier basket. After the discharging is in place, the sealing door 2 is closed, and the carrier basket waits for material to be taken at the discharging structure.

2. According to the operating method of the fully automatic magnetic ring steam cleaning equipment of claim 1, the steps of the equipment automatically performing self-inspection on each part are as follows: ——Judge whether the automatic state is met all the way, enter the automatic mode if it is met, detect whether the sealing door and the slot cover door are closed, and whether the liquid level in each cavity reaches the corresponding position; ——The other way judges whether the alkali system and water system, CDA pressure, nitrogen pressure, frequency conversion fault, error alarm, if it is no, press the start button, otherwise it will automatically return to the self-check to judge whether it meets the automatic state.

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