An immersion microscope objective

Abstract

The present invention relates to the field of optical technology, and specifically to an immersion microscope objective lens, wherein a cover glass is arranged on one side of the object surface, and a first lens group, a second lens group and a third lens group are arranged in sequence on one side of the cover glass, and a liquid is arranged between the cover glass and the first lens group. The present invention arranges the first lens group, the second lens group and the third lens group in the immersion microscope objective lens optical system, wherein the first lens group has positive refractive power, the second lens group has positive refractive power, and the third lens group has negative refractive power, so that the entire immersion microscope objective lens optical system has good optical performance, and by limiting the focal distance, refractive index, Abbe number and thickness of the first lens group and the second lens group, the field curvature, distortion and aberration sensitivity of the objective lens optical system are further improved, thereby ensuring the optical performance of the immersion microscope objective lens optical system.

Description

Technical Field

[0001] The invention relates to the field of optical technology, in particular to an immersion microscope objective lens. Background Art

[0002] With the development of cancer cell immunofluorescence imaging, the requirements for the fluorescence performance of microscopes are getting higher and higher. The imaging quality under fluorescence is met by increasing the numerical aperture and magnification of the microscope immersion objective. Generally speaking, the numerical aperture cannot be increased infinitely, and the objective must be immersed in oil or a liquid with a higher refractive index. Cancer cell immunofluorescence detection requires a large magnification so that more details can be observed on the microscope, and good optical performance must be achieved on the g-line. For such an immersion microscope objective, it is difficult to correct axial aberrations and chromatic aberrations of magnification, because the influence of aberrations will cause the optical resolution performance to decrease. In the prior art, in immersion objectives with large numerical aperture and large magnification, a process of gluing the first lens and the second lens of the super hemisphere is used. This process not only requires high-precision machine tools and tooling to ensure that the lens is centered and coaxial, but also the yield rate that meets the tolerance is only 70-80%.

[0003] After searching, the Chinese patent "A Microscope Objective Lens (CN204116699U)" discloses a microscope objective lens, which uses thirteen glass lenses, with a numerical aperture of 1.0, and the first, second, and third lenses are cemented lenses. However, the numerical aperture is not large enough, which is not convenient for actual use and observation, and the cementation and centering of the first and second lenses is difficult, and the manufacturing cost is high;

[0004] After searching, the Chinese patent "Objective lens, optical system and microscope (CN110612468A)" discloses an objective lens, an optical system and a microscope. The microscope objective lens uses sixteen glass lenses, has a magnification of 25 times and a numerical aperture of 1.1, but the numerical aperture and magnification are not large enough, which is not convenient for actual use and observation. The gluing and centering of the first and second lenses is difficult, and a large number of lenses are used, resulting in high manufacturing costs.

[0005] After searching, the Chinese patent "Immersion Microscope Objective (CN110543005A)" discloses an immersion microscope objective, which uses nineteen glass lenses, has a magnification of 16 times, and a numerical aperture of 0.8. However, the numerical aperture and magnification are not large enough, which is not convenient for actual use and observation. The gluing and centering of the first and second lenses is difficult, a large number of lenses are used, and the manufacturing cost is high.

[0006] Therefore, those skilled in the art provide an immersion microscope objective to solve the problems raised in the above background technology. Summary of the invention

[0007] The object of the present invention is to provide an immersion microscope objective lens to solve the problems raised in the above background technology.

[0008] To achieve the above object, the present invention provides the following technical solution: an immersion microscope objective lens, comprising an object plane, a cover glass is disposed on one side of the object plane, a first lens group, a second lens group and a third lens group are sequentially disposed on one side of the cover glass, and a liquid is disposed between the cover glass and the first lens group;

[0009] The first lens group includes a super-hemispherical first lens with positive refractive power and a second lens with positive refractive power, the first lens is fixed in a lens holder A, and the side of the first lens facing the object plane is a first A surface, and the side of the first lens away from the first A surface is a first B surface, the second lens is fixed in a lens holder B, and the side of the second lens facing the object plane is a second A surface, and the side of the second lens away from the second A surface is a second B surface.

[0010] The second lens group includes a third lens, a fourth lens, a fifth lens and a sixth lens which are arranged in sequence from bottom to top, wherein the side of the third lens facing the object plane is a third A surface, and the side of the third lens away from the third A surface is a third B surface, the side of the fourth lens facing the object plane is a fourth A surface, and the side of the fourth lens away from the fourth A surface is a fourth B surface, the side of the fifth lens facing the object plane is a fifth A surface, and the side of the fifth lens away from the fifth A surface is a fifth B surface, the side of the sixth lens facing the object plane is a sixth A surface, and the side of the sixth lens away from the sixth A surface is a sixth B surface, the third B surface of the third lens is glued to the fourth A surface of the fourth lens, the fifth B surface of the fifth lens is glued to the sixth A surface of the sixth lens, the fourth lens and the third lens after gluing are both fixed in a lens seat C, and the fifth lens and the sixth lens after gluing are both fixed in a lens seat D.

[0011] The third lens group includes a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, a twelfth lens and a thirteenth lens which are arranged in sequence from bottom to top, the side of the seventh lens facing the object plane is the seventh A surface, and the side of the seventh lens away from the seventh A surface is the seventh B surface, the side of the eighth lens facing the object plane is the eighth A surface, and the side of the eighth lens away from the eighth A surface is the eighth B surface, the side of the ninth lens facing the object plane is the ninth A surface, and the side of the ninth lens away from the ninth A surface is the ninth B surface, the side of the tenth lens facing the object plane is the tenth A surface, and the side of the tenth lens away from the tenth A surface is the tenth B surface, the side of the eleventh lens facing the object plane is the eleventh A surface, and the side of the eleventh lens away from the eleventh A surface is the eleventh B surface, the side of the twelfth lens facing the object plane is the twelfth A surface, and the side of the twelfth lens away from the twelfth A surface is the twelfth B surface, the side of the thirteenth lens facing the object plane is the thirteenth A surface, and the side of the thirteenth lens away from the thirteenth A surface is the thirteenth B surface;

[0012] The seventh B surface of the seventh lens is glued to the eighth A surface of the eighth lens, and the seventh lens and the eighth lens are fixed in the lens seat E, the ninth B surface of the ninth lens is glued to the tenth A surface of the tenth lens, and the ninth lens and the tenth lens are both fixed in the lens seat F, the eleventh B surface of the eleventh lens is glued to the twelfth A surface of the twelfth lens, and the eleventh lens and the twelfth lens are fixed in the lens seat G, and the thirteenth lens is fixed in the lens seat H.

[0013] As a further solution of the present invention: one side of the lens seat A is connected to the lens seat B, and the distance between the lens seat A and the lens seat B is the interval between the first lens and the second lens on the optical axis, the other side of the lens seat B is connected to the lens seat C, and the distance between the lens seat B and the lens seat C is the interval between the second lens and the third lens on the optical axis, the other side of the lens seat C is connected to one side of the lens seat D, and the distance between the lens seat C and the lens seat D is the interval between the fourth lens and the fifth lens on the optical axis, one side of the lens seat E is connected to one side of the lens seat D, and The distance between the lens seat E and the lens seat D is the interval between the sixth lens and the seventh lens on the optical axis, one side of the lens seat F is connected to one side of the lens seat E, and the distance between the lens seat F and the lens seat E is the interval between the eighth lens and the ninth lens on the optical axis, the lens seat G is connected to one side of the lens seat F, and the distance between the lens seat G and the lens seat F is the interval between the tenth lens and the eleventh lens on the optical axis, and one side of the lens seat H is connected to the lens seat G, and the distance between the lens seat H and the lens seat G is the interval between the twelfth lens and the thirteenth lens on the optical axis.

[0014] As a further solution of the present invention: the third lens has positive refractive power, the fourth lens has negative refractive power, the fifth lens has negative refractive power, and the sixth lens has positive refractive power.

[0015] As a further solution of the present invention: the seventh lens has positive refractive power, the eighth lens has negative refractive power, the ninth lens has positive refractive power, the tenth lens has negative refractive power, the eleventh lens has negative refractive power, the twelfth lens has positive refractive power, and the thirteenth lens has positive refractive power.

[0016] As a further solution of the present invention: the parameters of the cover glass and the liquid are:

[0017] The cover glass has a thickness T01 of 0.17, a refractive index N01 of 1.52, and an Abbe number V01 of 59.5;

[0018] The liquid thickness T02 is 0.20, the refractive index N02 is 1.52, and the Abbe number V02 is 41.3;

[0019] The optical parameters of each lens in the first lens group, the second lens group and the third lens group are:

[0020] The focal length f11 of the first lens is 8.47, the refractive index N11 is 1.60, the Abbe number V11 is 67.7, and the thickness T11 is 4.46;

[0021] The focal length f12 of the second lens is 12.02, the refractive index N12 is 1.91, the Abbe number V12 is 35.3, and the thickness T12 is 2.50;

[0022] The focal length f21 of the third lens is 27.73, the refractive index N21 is 1.44, the Abbe number V21 is 94.9, and the thickness T21 is 4.80;

[0023] The fourth lens has a focal length f22 of -937.00, a refractive index N22 of 1.61, an Abbe number V22 of 44.3, and a thickness T22 of 1.00;

[0024] The focal length f23 of the fifth lens is -53.74, the refractive index N23 is 1.74, the Abbe number V23 is 49.2, and the thickness T23 is 1.00;

[0025] The focal length f24 of the sixth lens is 51.46, the refractive index N24 is 1.44, the Abbe number V24 is 94.9, and the thickness T24 is 3.93;

[0026] The focal length f31 of the seventh lens is 26.69, the refractive index N31 is 1.50, the Abbe number V31 is 81.6, and the thickness T31 is 3.44;

[0027] The focal length f32 of the eighth lens is -42.99, the refractive index N32 is 1.74, the Abbe number V32 is 32.3, and the thickness T32 is 1.00;

[0028] The ninth lens has a focal length f33 of 8.96, a refractive index N33 of 1.60, an Abbe number V33 of 67.7, and a thickness T33 of 3.30;

[0029] The focal length f34 of the tenth lens is -5.03, the refractive index N34 is 1.75, the Abbe number V34 is 35.3, and the thickness T34 is 4.19;

[0030] The focal length f35 of the eleventh lens is -2.83, the refractive index N35 is 1.88, the Abbe number V35 is 40.8, and the thickness T35 is 3.36;

[0031] The focal length f36 of the twelfth lens is 13.17, the refractive index N36 is 1.80, the Abbe number V36 is 35.0, and the thickness T36 is 4.00;

[0032] The focal length f37 of the thirteenth lens is 33.46, the refractive index N37 is 1.50, the Abbe number V37 is 81.6, and the thickness T37 is 2.43.

[0033] As a further solution of the present invention: the parameters of the cover glass and the liquid are:

[0034] The cover glass has a thickness T01 of 0.17, a refractive index N01 of 1.52, and an Abbe number V01 of 59.5;

[0035] The liquid thickness T02 is 0.20, the refractive index N02 is 1.52, and the Abbe number V02 is 41.3;

[0036] The optical parameters of each lens in the first lens group, the second lens group and the third lens group are:

[0037] The focal length f11 of the first lens is 7.66, the refractive index N11 is 1.65, the Abbe number V11 is 39.7, and the thickness T11 is 4.47;

[0038] The focal length f12 of the second lens is 13.00, the refractive index N12 is 1.91, the Abbe number V12 is 35.3, and the thickness T12 is 2.11;

[0039] The focal length f21 of the third lens is 25.71, the refractive index N21 is 1.44, the Abbe number V21 is 94.9, and the thickness T21 is 4.36;

[0040] The fourth lens has a focal length f22 of -106.41, a refractive index N22 of 1.61, an Abbe number V22 of 44.3, and a thickness T22 of 1.00;

[0041] The fifth lens has a focal length f23 of -213.66, a refractive index N23 of 1.74, an Abbe number V23 of 49.2, and a thickness T23 of 1.00;

[0042] The sixth lens has a focal length f24 of 50.86, a refractive index N24 of 1.44, an Abbe number V24 of 94.9, and a thickness T24 of 3.77;

[0043] The focal length f31 of the seventh lens is 31.41, the refractive index N31 is 1.50, the Abbe number V31 is 81.6, and the thickness T31 is 3.28;

[0044] The focal length f32 of the eighth lens is -47.02, the refractive index N32 is 1.74, the Abbe number V32 is 32.3, and the thickness T32 is 1.00;

[0045] The ninth lens has a focal length f33 of 9.71, a refractive index N33 of 1.60, an Abbe number V33 of 67.7, and a thickness T33 of 3.32;

[0046] The focal length f34 of the tenth lens is -5.13, the refractive index N34 is 1.75, the Abbe number V34 is 35.3, and the thickness T34 is 6.15;

[0047] The focal length f35 of the eleventh lens is -2.80, the refractive index N35 is 1.88, the Abbe number V35 is 40.8, and the thickness T35 is 3.23;

[0048] The focal length f36 of the twelfth lens is 13.22, the refractive index N36 is 1.80, the Abbe number V36 is 35.0, and the thickness T36 is 4.13;

[0049] The focal length f37 of the thirteenth lens is 30.88, the refractive index N37 is 1.50, the Abbe number V37 is 81.6, and the thickness T37 is 2.71.

[0050] As a further solution of the present invention: the parameters of the cover glass and the liquid are:

[0051] The cover glass has a thickness T01 of 0.17, a refractive index N01 of 1.52, and an Abbe number V01 of 59.5;

[0052] The liquid thickness T02 is 0.20, the refractive index N02 is 1.52, and the Abbe number V02 is 41.3;

[0053] The optical parameters of each lens in the first lens group, the second lens group and the third lens group are:

[0054] The focal length f11 of the first lens is 7.58, the refractive index N11 is 1.67, the Abbe number V11 is 38.1, and the thickness T11 is 4.51;

[0055] The focal length f12 of the second lens is 14.08, the refractive index N12 is 1.75, the Abbe number V12 is 35.3, and the thickness T12 is 2.27.

[0056] The focal length f21 of the third lens is 27.61, the refractive index N21 is 1.44, the Abbe number V21 is 94.9, and the thickness T21 is 4.40;

[0057] The fourth lens has a focal length f22 of -278.83, a refractive index N22 of 1.61, an Abbe number V22 of 44.3, and a thickness T22 of 1.00;

[0058] The fifth lens has a focal length f23 of -119.49, a refractive index N23 of 1.74, an Abbe number V23 of 49.2, and a thickness T23 of 1.00;

[0059] The sixth lens has a focal length f24 of 50.16, a refractive index N24 of 1.44, an Abbe number V24 of 94.9, and a thickness T24 of 3.75;

[0060] The focal length f31 of the seventh lens is 29.19, the refractive index N31 is 1.50, the Abbe number V31 is 81.6, and the thickness T31 is 3.30;

[0061] The focal length f32 of the eighth lens is -42.85, the refractive index N32 is 1.74, the Abbe number V32 is 32.3, and the thickness T32 is 1.00;

[0062] The ninth lens has a focal length f33 of 9.79, a refractive index N33 of 1.60, an Abbe number V33 of 67.7, and a thickness T33 of 3.33;

[0063] The focal length f34 of the tenth lens is -5.14, the refractive index N34 is 1.75, the Abbe number V34 is 35.3, and the thickness T34 is 6.23;

[0064] The focal length f35 of the eleventh lens is -2.76, the refractive index N35 is 1.88, the Abbe number V35 is 40.8, and the thickness T35 is 2.77;

[0065] The focal length f36 of the twelfth lens is 12.68, the refractive index N36 is 1.80, the Abbe number V36 is 35.0, and the thickness T36 is 4.13;

[0066] The focal length f37 of the thirteenth lens is 29.71, the refractive index N37 is 1.50, the Abbe number V37 is 81.6, and the thickness T37 is 2.74.

[0067] Compared with the prior art, the beneficial effect of the present invention is that: the present invention arranges the first lens group, the second lens group and the third lens group in the immersion microscope objective optical system, so that the first lens group has positive refractive power, the second lens group has positive refractive power, and the third lens group has negative refractive power, so that the entire immersion microscope objective optical system has good optical performance.

[0068] In addition, by limiting the focal distance, refractive index, Abbe number and thickness of the first lens group and the second lens group, the field curvature, distortion and aberration sensitivity of the objective optical system are further improved, thereby ensuring the optical performance of the immersion microscope objective optical system, so that the immersion microscope objective optical system has a large magnification, a large numerical aperture and a high resolution performance. The first lens and the second lens are not glued together and the number of lenses is small, which reduces the difficulty of processing and the yield rate that meets the tolerance can reach 80-90%. BRIEF DESCRIPTION OF THE DRAWINGS

[0069] Figure 1 A lens composition diagram of an immersion microscope objective optical system in Example 1;

[0070] Figure 2 is a spherical aberration diagram of an immersion microscope objective optical system in Example 1;

[0071] Figure 3 A field curvature diagram of an immersion microscope objective optical system in Example 1;

[0072] Figure 4 is a distortion diagram of an immersion microscope objective optical system in Example 1;

[0073] Figure 5 is a diagram of MTF (modulation transfer function) of an immersion microscope objective optical system in Example 1;

[0074] Figure 6 A lens composition diagram of an immersion microscope objective optical system in Example 2;

[0075] Figure 7 is a spherical aberration diagram of an immersion microscope objective optical system in Example 2;

[0076] Figure 8 A field curvature diagram of an immersion microscope objective optical system in Example 2;

[0077] Fig. 9is a distortion diagram of an immersion microscope objective optical system in Example 2;

[0078] Fig.10 is a diagram of MTF (modulation transfer function) of an immersion microscope objective optical system in Example 2;

[0079] Fig.11 A lens composition diagram of an immersion microscope objective optical system in Example 3;

[0080] Fig.12 is a spherical aberration diagram of an immersion microscope objective optical system in Example 3;

[0081] Fig.13 A field curvature diagram of an immersion microscope objective optical system in Example 3;

[0082] Fig.14 is a distortion diagram of an immersion microscope objective optical system in Example 3;

[0083] Fig.15 This is an MTF (modulation transfer function) diagram of an immersion microscope objective optical system in Example 3.

[0084] In the figure: 700, object plane; 701, cover glass; 702, liquid; 81, first lens group; 711, first lens; 712, second lens; 601, lens holder A; 602, lens holder B; 82, second lens group; 721, third lens; 722, fourth lens; 723, fifth lens; 724, sixth lens; 603, lens holder C; 604, lens holder D; 83, third lens group; 731, seventh lens; 732, eighth lens; 733, ninth lens; 734, tenth lens; 735, eleventh lens; 736, twelfth lens; 737, thirteenth lens; 605, lens holder E; 606, lens holder F; 607, lens holder G; 608, lens holder H. DETAILED DESCRIPTION

[0085] Example 1

[0086] See also Figures 1 to 5 In an embodiment of the present invention, an immersion microscope objective lens includes an object plane 700, a cover glass 701 is disposed on one side of the object plane 700, a first lens group 81, a second lens group 82 and a third lens group 83 are sequentially disposed on one side of the cover glass 701, and a liquid 702 is disposed between the cover glass 701 and the first lens group 81;

[0087] The first lens group 81 includes a super-hemispherical first lens 711 with positive refractive power and a second lens 712 with positive refractive power. The first lens 711 is fixed in the lens holder A601, and the side of the first lens 711 facing the object plane 700 is the first A surface, and the side of the first lens 711 away from the first A surface is the first B surface. The second lens 712 is fixed in the lens holder B602, and the side of the second lens 712 facing the object plane 700 is the second A surface, and the side of the second lens 712 away from the second A surface is the second B surface.

[0088] The second lens group 82 includes a third lens 721, a fourth lens 722, a fifth lens 723, and a sixth lens 724, which are arranged in sequence from bottom to top. The side of the third lens 721 facing the object plane 700 is a third A surface, and the side of the third lens 721 away from the third A surface is a third B surface. The side of the fourth lens 722 facing the object plane 700 is a fourth A surface, and the side of the fourth lens 722 away from the fourth A surface is a fourth B surface. The side of the fifth lens 723 facing the object plane 700 is a fifth A surface, and the side of the fifth lens 723 away from the fifth A surface is a fifth B surface. One side of the A surface is the fifth B surface, the side of the sixth lens 724 facing the object plane 700 is the sixth A surface, and the side of the sixth lens 724 away from the sixth A surface is the sixth B surface, the third B surface of the third lens 721 is glued to the fourth A surface of the fourth lens 722, the fifth B surface of the fifth lens 723 is glued to the sixth A surface of the sixth lens 724, the fourth lens 722 and the third lens 721 after gluing are both fixed in the lens seat C603, and the fifth lens 723 and the sixth lens 724 after gluing are both fixed in the lens seat D604.

[0089] The third lens group 83 includes a seventh lens 731, an eighth lens 732, a ninth lens 733, a tenth lens 734, an eleventh lens 735, a twelfth lens 736 and a thirteenth lens 737 which are arranged in sequence from bottom to top. The side of the seventh lens 731 facing the object plane 700 is the seventh A surface, and the side of the seventh lens 731 away from the seventh A surface is the seventh B surface. The side of the eighth lens 732 facing the object plane 700 is the eighth A surface, and the side of the eighth lens 732 away from the eighth A surface is the eighth B surface. The side of the ninth lens 733 facing the object plane 700 is the ninth A surface, and the ninth lens 733 away from the ninth A surface The side of the tenth lens 734 facing the object plane 700 is the ninth B surface, the side of the tenth lens 734 facing the object plane 700 is the tenth A surface, and the side of the tenth lens 734 away from the tenth A surface is the tenth B surface, the side of the eleventh lens 735 facing the object plane 700 is the eleventh A surface, and the side of the eleventh lens 735 away from the eleventh A surface is the eleventh B surface, the side of the twelfth lens 736 facing the object plane 700 is the twelfth A surface, and the side of the twelfth lens 736 away from the twelfth A surface is the twelfth B surface, the side of the thirteenth lens 737 facing the object plane 700 is the thirteenth A surface, and the side of the thirteenth lens 737 away from the thirteenth A surface is the thirteenth B surface;

[0090] The seventh B surface of the seventh lens 731 is glued to the eighth A surface of the eighth lens 732, and the seventh lens 731 and the eighth lens 732 are fixed in the lens seat E605, the ninth B surface of the ninth lens 733 is glued to the tenth A surface of the tenth lens 734, and the ninth lens 733 and the tenth lens 734 are both fixed in the lens seat F606, the eleventh B surface of the eleventh lens 735 is glued to the twelfth A surface of the twelfth lens 736, and the eleventh lens 735 and the twelfth lens 736 are fixed in the lens seat G607, and the thirteenth lens 737 is fixed in the lens seat H608.

[0091] Further, one side of the lens seat A601 is connected to the lens seat B602, and the distance between the lens seat A601 and the lens seat B602 is the interval between the first lens 711 and the second lens 712 on the optical axis, the other side of the lens seat B602 is connected to the lens seat C603, and the distance between the lens seat B602 and the lens seat C603 is the interval between the second lens 712 and the third lens 721 on the optical axis, the other side of the lens seat C603 is connected to one side of the lens seat D604, and the distance between the lens seat C603 and the lens seat D604 is the interval between the fourth lens 722 and the fifth lens 723 on the optical axis, and one side of the lens seat E605 is connected to one side of the lens seat D604, and the lens seat E605 is connected to The distance between the lens seat D604 is the interval between the sixth lens 724 and the seventh lens 731 on the optical axis, one side of the lens seat F606 is connected to one side of the lens seat E605, and the distance between the lens seat F606 and the lens seat E605 is the interval between the eighth lens 732 and the ninth lens 733 on the optical axis, the lens seat G607 is connected to one side of the lens seat F606, and the distance between the lens seat G607 and the lens seat F606 is the interval between the tenth lens 734 and the eleventh lens 735 on the optical axis, and one side of the lens seat H608 is connected to the lens seat G607, and the distance between the lens seat H608 and the lens seat G607 is the interval between the twelfth lens 736 and the thirteenth lens 737 on the optical axis.

[0092] Furthermore, the third lens 721 has positive refractive power, the fourth lens 722 has negative refractive power, the fifth lens 723 has negative refractive power, and the sixth lens 724 has positive refractive power.

[0093] Furthermore, the seventh lens 731 has positive refractive power, the eighth lens 732 has negative refractive power, the ninth lens 733 has positive refractive power, the tenth lens 734 has negative refractive power, the eleventh lens 735 has negative refractive power, the twelfth lens 736 has positive refractive power, and the thirteenth lens 737 has positive refractive power.

[0094] Furthermore, the parameters of the cover glass 701 and the liquid 702 are:

[0095] The cover glass 701 has a thickness T01 of 0.17, a refractive index N01 of 1.52, and an Abbe number V01 of 59.5;

[0096] The thickness T02 of the liquid 702 is 0.20, the refractive index N02 is 1.52, and the Abbe number V02 is 41.3;

[0097] The optical parameters of each lens in the first lens group 81, the second lens group 82 and the third lens group 83 are:

[0098] The focal length f11 of the first lens 711 is 8.47, the refractive index N11 is 1.60, the Abbe number V11 is 67.7, and the thickness T11 is 4.46;

[0099] The second lens 712 has a focal length f12 of 12.02, a refractive index N12 of 1.91, an Abbe number V12 of 35.3, and a thickness T12 of 2.50;

[0100] The third lens 721 has a focal length f21 of 27.73, a refractive index N21 of 1.44, an Abbe number V21 of 94.9, and a thickness T21 of 4.80;

[0101] The fourth lens 722 has a focal length f22 of -937.00, a refractive index N22 of 1.61, an Abbe number V22 of 44.3, and a thickness T22 of 1.00;

[0102] The fifth lens 723 has a focal length f23 of -53.74, a refractive index N23 of 1.74, an Abbe number V23 of 49.2, and a thickness T23 of 1.00;

[0103] The sixth lens 724 has a focal length f24 of 51.46, a refractive index N24 of 1.44, an Abbe number V24 of 94.9, and a thickness T24 of 3.93;

[0104] The focal length f31 of the seventh lens 731 is 26.69, the refractive index N31 is 1.50, the Abbe number V31 is 81.6, and the thickness T31 is 3.44;

[0105] The eighth lens 732 has a focal length f32 of -42.99, a refractive index N32 of 1.74, an Abbe number V32 of 32.3, and a thickness T32 of 1.00;

[0106] The focal length f33 of the ninth lens 733 is 8.96, the refractive index N33 is 1.60, the Abbe number V33 is 67.7, and the thickness T33 is 3.30;

[0107] The focal length f34 of the tenth lens 734 is -5.03, the refractive index N34 is 1.75, the Abbe number V34 is 35.3, and the thickness T34 is 4.19;

[0108] The focal length f35 of the eleventh lens 735 is -2.83, the refractive index N35 is 1.88, the Abbe number V35 is 40.8, and the thickness T35 is 3.36;

[0109] The focal length f36 of the twelfth lens 736 is 13.17, the refractive index N36 is 1.80, the Abbe number V36 is 35.0, and the thickness T36 is 4.00;

[0110] The focal length f37 of the thirteenth lens 737 is 33.46, the refractive index N37 is 1.50, the Abbe number V37 is 81.6, and the thickness T37 is 2.43.

[0111] Additional parameters:

[0112]

[0113] The focal length of the first lens group 81 is the combined focal length of the first lens 711 to the second lens 712, that is, f1 is 6.42, the focal length of the second lens group 82 is the combined focal length of the third lens 721 to the sixth lens 724, that is, f2 is 10.35, the focal length of the third lens group 83 is the combined focal length of the seventh lens 731 to the thirteenth lens 737, that is, f3 is -13.82, and the focal length f of the entire immersion microscope optical system is 3.6.

[0114] Then |f2 / f1| is 1.61, |f1 / f3| is 0.46, and |f / f1| is 0.56. The immersion microscope optical system within the focal length value range enlarges the system magnification, while reducing the field curvature of the immersion microscope optical system OB, improving the resolution capability of the immersion microscope optical system OB, and effectively compensating for the distortion of the optical system.

[0115] The focal length of the first lens group 81 is the combined focal length of the first lens 711 to the second lens 712, that is, f1 is 6.42, the focal length f11 of the first lens 711 is 8.47, the focal length f12 of the second lens 712 is 12.02, and the curvature radius R112 of the first lens 711 toward the image plane is -3.332.

[0116] Then |f11 / f1| is 1.32, |f12 / f1| is 1.87, and |f11 / R112| is 2.54. The immersion microscope optical system within this numerical range can better compensate for the field curvature, and the first lens and the second lens do not need to be glued together, thereby reducing the difficulty of processing.

[0117] The length of the first lens group 81 on the optical axis, i.e. T1, is 7.06, the length T2 of the second lens group 82 on the optical axis is 13.89, the length T3 of the third lens group 83 on the optical axis is 24.30, T1 / T2 is 0.51, T1 / T3 is 0.29, T11 / T1 is 0.63, T12 / T1 is 0.35, T21 / T2 is 0.35, T22 / T2 is 0.07, T23 / T2 is 0.07, and T24 / T2 is 0.28.

[0118] From the above, it can be seen that f is the focal distance of the immersion microscope objective optical system, that is, f is 3.6, NA is the object side numerical aperture of the immersion microscope objective optical system, that is, NA is 1.20, and N02 is the refractive index of the liquid in the immersion liquid of the immersion microscope objective optical system, that is, N02 is 1.52, then |NA*N02 / f| is 0.51, so that the immersion microscope objective optical system has the characteristics of large numerical aperture.

[0119] according to Figures 2 to 5 The various aberration diagrams and MTF performance diagrams show the various aberrations and the resolution capability. When the aberrations are relatively small, better quality images can be observed.

[0120] Specifically, Figure 2 This is the spherical aberration diagram of Example 1, where the horizontal axis is the spherical aberration amount, in mm, the vertical axis is the image height, in mm, the solid line represents the d line, the dotted line represents the C line, the single-dot chain line represents the F line, and the double-dot chain line represents the g line. The spherical aberration is controlled within ±0.002 mm, so that the central resolution of the immersion microscope objective optics is optimal.

[0121] Figure 3 3 is the field curvature diagram of Example 1, wherein the horizontal axis is the object plane movement, in mm, the vertical axis is the image height, in mm, the solid line represents the sagittal relative to each wavelength of light, and the dotted line represents the meridian relative to each wavelength. From the distribution of the field curvature, it can be seen that the field curvature of the immersion microscope objective optics is controlled within ±0.002 mm, so that the central resolution of the objective optics is optimal.

[0122] Figure 4 : is the distortion diagram of Example 1, wherein the horizontal axis is the distortion amount, in %, and the vertical axis is the image height, in mm. From the distribution of the distortion, it can be seen that the distortion of the immersion microscope objective optics is controlled within ±1.5%, so that the central resolution of the immersion microscope objective optics is optimal.

[0123] Figure 5 : This is the MTF (Modulation Transfer Function) diagram of Example 1, where the horizontal axis is the spatial frequency in cycles / mm, the vertical axis is the modulation, i.e., MTF, the solid line represents the modulation (MTF) of the central image plane of the immersion microscope objective optical system, and the dotted line represents the diffraction limit.

[0124] Example 2

[0125] See also Figures 6 to 10 , completely in accordance with the structure of Example 1, except that:

[0126] The parameters of the cover glass 701 and the liquid 702 are:

[0127] The cover glass 701 has a thickness T01 of 0.17, a refractive index N01 of 1.52, and an Abbe number V01 of 59.5;

[0128] The thickness T02 of the liquid 702 is 0.20, the refractive index N02 is 1.52, and the Abbe number V02 is 41.3;

[0129] The optical parameters of each lens in the first lens group 81, the second lens group 82 and the third lens group 83 are:

[0130] The focal length f11 of the first lens 711 is 7.66, the refractive index N11 is 1.65, the Abbe number V11 is 39.7, and the thickness T11 is 4.47;

[0131] The second lens 712 has a focal length f12 of 13.00, a refractive index N12 of 1.91, an Abbe number V12 of 35.3, and a thickness T12 of 2.11;

[0132] The third lens 721 has a focal length f21 of 25.71, a refractive index N21 of 1.44, an Abbe number V21 of 94.9, and a thickness T21 of 4.36;

[0133] The fourth lens 722 has a focal length f22 of -106.41, a refractive index N22 of 1.61, an Abbe number V22 of 44.3, and a thickness T22 of 1.00;

[0134] The fifth lens 723 has a focal length f23 of -213.66, a refractive index N23 of 1.74, an Abbe number V23 of 49.2, and a thickness T23 of 1.00;

[0135] The sixth lens 724 has a focal length f24 of 50.86, a refractive index N24 of 1.44, an Abbe number V24 of 94.9, and a thickness T24 of 3.77;

[0136] The focal length f31 of the seventh lens 731 is 31.41, the refractive index N31 is 1.50, the Abbe number V31 is 81.6, and the thickness T31 is 3.28;

[0137] The eighth lens 732 has a focal length f32 of -47.02, a refractive index N32 of 1.74, an Abbe number V32 of 32.3, and a thickness T32 of 1.00;

[0138] The focal length f33 of the ninth lens 733 is 9.71, the refractive index N33 is 1.60, the Abbe number V33 is 67.7, and the thickness T33 is 3.32;

[0139] The focal length f34 of the tenth lens 734 is -5.13, the refractive index N34 is 1.75, the Abbe number V34 is 35.3, and the thickness T34 is 6.15;

[0140] The focal length f35 of the eleventh lens 735 is -2.80, the refractive index N35 is 1.88, the Abbe number V35 is 40.8, and the thickness T35 is 3.23;

[0141] The focal length f36 of the twelfth lens 736 is 13.22, the refractive index N36 is 1.80, the Abbe number V36 is 35.0, and the thickness T36 is 4.13;

[0142] The focal length f37 of the thirteenth lens 737 is 30.88, the refractive index N37 is 1.50, the Abbe number V37 is 81.6, and the thickness T37 is 2.71.

[0143] Additional parameters:

[0144]

[0145] The focal length of the first lens group 81 is the combined focal length of the first lens 711 to the second lens 712, that is, f1 is 5.93, the focal length of the second lens group 82 is the combined focal length of the third lens 721 to the sixth lens 724, that is, f2 is 10.72, and the focal length of the third lens group 83 is the combined focal length of the seventh lens 731 to the thirteenth lens 737, that is, f3 is -16.47; the focal length f of the entire immersion microscope optical system is 3.6.

[0146] Then |f2 / f1| is 1.81, |f1 / f3| is 0.46, and |f / f1| is 0.61. The immersion microscope optical system within the focal length value range enlarges the system magnification, while reducing the field curvature of the immersion microscope optical system OB, improving the resolution capability of the immersion microscope optical system OB, and effectively compensating for the distortion of the optical system.

[0147] The focal length of the first lens group 81 is the combined focal length of the first lens 711 to the second lens 712, that is, f1 is 5.93, the focal length f11 of the first lens 711 is 7.66, and the focal length f12 of the second lens 712 is 13.00. The curvature radius R112 of the first lens 711 toward the image plane is -3.321.

[0148] Then |f11 / f1| is 1.29, |f12 / f1| is 2.19, and |f11 / R112| is 2.31. The immersion microscope optical system within this numerical range can better compensate for the field curvature, and the first lens and the second lens do not need to be glued together, thereby reducing the difficulty of processing.

[0149] In this embodiment, the length of the first lens group 81 on the optical axis, i.e. T1, is 6.68, the length T2 of the second lens group 82 on the optical axis is 13.69; the length T3 of the third lens group 83 on the optical axis is 26.23; T1 / T2 is 0.49, T1 / T3 is 0.25, T11 / T1 is 0.67, T12 / T1 is 0.32, T21 / T2 is 0.32, T22 / T2 is 0.07, T23 / T2 is 0.07, and T24 / T2 is 0.28.

[0150] As can be seen from the above, in this embodiment, f is the focal length of the immersion microscope objective optical system, that is, f is 3.6; NA is the object numerical aperture of the immersion microscope objective optical system, that is, NA is 1.20; N02 is the refractive index of the liquid in the immersion liquid of the immersion microscope objective optical system, that is, N02 is 1.52, then |NA*N02 / f| is 0.51. This makes the immersion microscope objective optical system have the characteristics of large numerical aperture;

[0151] Specifically, Figure 7 This is the spherical aberration diagram of Example 2, where the horizontal axis is the spherical aberration amount, in mm, the vertical axis is the image height, in mm, the solid line represents the d line, the dotted line represents the C line, the single-dash line represents the F line, and the double-dash line represents the g line. The spherical aberration of the immersion microscope objective optical system is controlled within ±0.002 mm, so that the central resolution of the immersion microscope objective optical system is optimal.

[0152] Figure 8 This is a field curvature diagram of Example 2, where the horizontal axis is the object plane movement, in mm, the vertical axis is the image height, in mm, the solid line represents the sagittal relative to each wavelength of light, and the dotted line represents the meridian relative to each wavelength. From the distribution of field curvature, it can be seen that the field curvature of the immersion microscope objective optical system is controlled within ±0.002mm, so that the center resolution of the objective optical system is optimal.

[0153] Fig. 9 : is a distortion diagram of Example 2, wherein the abscissa is the distortion amount, in %, and the ordinate is the image height, in mm. From the distribution of the distortion, it can be seen that the distortion of the immersion microscope objective optical system is controlled within ±1.5%, so that the central resolution of the immersion microscope objective optical system is optimal;

[0154] Fig.10: This is the MTF (Modulation Transfer Function) diagram of Example 2, where the horizontal axis is the spatial frequency in cycles / mm, the vertical axis is the modulation, i.e., MTF, the solid line represents the modulation (MTF) of the central image plane of the immersion microscope objective optical system, and the dotted line represents the diffraction limit.

[0155] Example 3

[0156] See also Figures 11 to 15 , completely in accordance with the structure of Example 1, the differences between Example 1 and Example 2 are:

[0157] The parameters of the cover glass 701 and the liquid 702 are:

[0158] The cover glass 701 has a thickness T01 of 0.17, a refractive index N01 of 1.52, and an Abbe number V01 of 59.5;

[0159] The thickness T02 of the liquid 702 is 0.20, the refractive index N02 is 1.52, and the Abbe number V02 is 41.3;

[0160] The optical parameters of each lens in the first lens group 81, the second lens group 82 and the third lens group 83 are:

[0161] The focal length f11 of the first lens 711 is 7.58, the refractive index N11 is 1.67, the Abbe number V11 is 38.1, and the thickness T11 is 4.51;

[0162] The second lens 712 has a focal length f12 of 14.08, a refractive index N12 of 1.75, an Abbe number V12 of 35.3, and a thickness T12 of 2.27.

[0163] The third lens 721 has a focal length f21 of 27.61, a refractive index N21 of 1.44, an Abbe number V21 of 94.9, and a thickness T21 of 4.40;

[0164] The fourth lens 722 has a focal length f22 of -278.83, a refractive index N22 of 1.61, an Abbe number V22 of 44.3, and a thickness T22 of 1.00;

[0165] The fifth lens 723 has a focal length f23 of -119.49, a refractive index N23 of 1.74, an Abbe number V23 of 49.2, and a thickness T23 of 1.00;

[0166] The sixth lens 724 has a focal length f24 of 50.16, a refractive index N24 of 1.44, an Abbe number V24 of 94.9, and a thickness T24 of 3.75;

[0167] The focal length f31 of the seventh lens 731 is 29.19, the refractive index N31 is 1.50, the Abbe number V31 is 81.6, and the thickness T31 is 3.30;

[0168] The eighth lens 732 has a focal length f32 of -42.85, a refractive index N32 of 1.74, an Abbe number V32 of 32.3, and a thickness T32 of 1.00;

[0169] The focal length f33 of the ninth lens 733 is 9.79, the refractive index N33 is 1.60, the Abbe number V33 is 67.7, and the thickness T33 is 3.33;

[0170] The focal length f34 of the tenth lens 734 is -5.14, the refractive index N34 is 1.75, the Abbe number V34 is 35.3, and the thickness T34 is 6.23;

[0171] The focal length f35 of the eleventh lens 735 is -2.76, the refractive index N35 is 1.88, the Abbe number V35 is 40.8, and the thickness T35 is 2.77;

[0172] The focal length f36 of the twelfth lens 736 is 12.68, the refractive index N36 is 1.80, the Abbe number V36 is 35.0, and the thickness T36 is 4.13;

[0173] The focal length f37 of the thirteenth lens 737 is 29.71, the refractive index N37 is 1.50, the Abbe number V37 is 81.6, and the thickness T37 is 2.74.

[0174] Additional parameters:

[0175]

[0176] The focal length of the first lens group 81 is the combined focal length of the first lens 711 to the second lens 712, that is, f1 is 6.06, the focal length of the second lens group 82 is the combined focal length of the third lens 721 to the sixth lens 724, that is, f2 is 11.08, and the focal length of the third lens group 83 is the combined focal length of the seventh lens 731 to the thirteenth lens 737, that is, f3 is -16.56; the focal length f of the entire immersion microscope optical system is 3.6.

[0177] Then |f2 / f1| is 1.83, |f1 / f3| is 0.36, and |f / f1| is 0.59. The immersion microscope optical system within the focal length value range enlarges the system magnification, while reducing the field curvature of the immersion microscope optical system OB, improving the resolution capability of the immersion microscope optical system OB, and effectively compensating for the distortion of the optical system.

[0178] The focal length of the first lens group 81 is the combined focal length of the first lens 711 to the second lens 712, that is, f1 is 6.06, the focal length f11 of the first lens 711 is 7.58, and the focal length f12 of the second lens 712 is 14.08. The curvature radius R112 of the first lens 711 toward the image plane is -3.382.

[0179] Then |f11 / f1| is 1.252, |f12 / f1| is 2.32, and |f11 / R112| is 2.24. The immersion microscope optical system within this numerical range can better compensate for the field curvature, and the first lens and the second lens do not need to be glued together, thereby reducing the difficulty of processing.

[0180] In this embodiment, the length of the first lens group 81 on the optical axis, i.e. T1, is 6.88, the length T2 of the second lens group 82 on the optical axis is 14.47; the length T3 of the third lens group 83 on the optical axis is 25.98; T1 / T2 is 0.48, T1 / T3 is 0.26, T11 / T1 is 0.66, T12 / T1 is 0.33, T21 / T2 is 0.30, T22 / T2 is 0.07, T23 / T2 is 0.07, and T24 / T2 is 0.26.

[0181] From the above, it can be seen that in this embodiment, f is the focal length of the immersion microscope objective optical system, that is, f is 3.6; NA is the object side numerical aperture of the immersion microscope objective optical system, that is, NA is 1.20; N02 is the refractive index of the liquid in the immersion liquid of the immersion microscope objective optical system, that is, N02 is 1.52, then |NA*N02 / f| is 0.51, so that the immersion microscope objective optical system has the characteristics of large numerical aperture.

[0182] Specifically, Fig.12 This is the spherical aberration diagram of Example 3, where the horizontal axis is the spherical aberration amount, in mm, the vertical axis is the image height, in mm, the solid line represents the d line, the dotted line represents the C line, the single-dash line represents the F line, and the double-dash line represents the g line. The spherical aberration of the immersion microscope objective optical system is controlled within ±0.002 mm, so that the central resolution of the immersion microscope objective optical system is optimal.

[0183] Fig.13 This is a field curvature diagram of Example 3, where the horizontal axis is the object plane movement, in mm, and the vertical axis is the image height, in mm. The solid line represents the sagittal relative to each wavelength of light, and the dotted line represents the meridian relative to each wavelength. From the distribution of the field curvature, it can be seen that the field curvature of the immersion microscope objective optical system is controlled within ±0.002mm, so that the central resolution of the objective optical system is optimal.

[0184] Fig.14: is the distortion diagram of Example 3, wherein the horizontal axis is the distortion amount, in %, and the vertical axis is the image height, in mm. From the distribution of the distortion, it can be seen that the distortion of the immersion microscope objective optical system is controlled within ±1.5%, so that the central resolution of the immersion microscope objective optical system is optimal.

[0185] Fig.15 : This is the MTF (Modulation Transfer Function) diagram of Example 3, where the horizontal axis is the spatial frequency in cycles / mm, the vertical axis is the modulation, i.e., MTF, the solid line represents the modulation (MTF) of the central image plane of the immersion microscope objective optical system, and the dotted line represents the diffraction limit.

[0186] In summary, the present invention arranges the first lens group 81, the second lens group 82 and the third lens group 83 in the immersion microscope objective optical system, so that the first lens group 81 has positive refractive power, the second lens group 82 has positive refractive power, and the third lens group 83 has negative refractive power, so that the entire immersion microscope objective optical system has good optical performance.

[0187] In addition, by limiting the focal length, refractive index, Abbe number and thickness of the first lens group 81 and the second lens group 82, the field curvature, distortion and aberration sensitivity of the objective optical system are further improved, thereby ensuring the optical performance of the immersion microscope objective optical system, so that the immersion microscope objective optical system has a large magnification, a large numerical aperture and a high resolution performance. The first lens and the second lens are not glued together and the number of lenses is small, which reduces the processing difficulty and the yield rate that meets the tolerance can reach 80-90%.

[0188] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An immersion microscope objective lens, comprising an object plane (700), characterized in that: A cover glass (701) is disposed on one side of the object plane (700), a first lens group (81), a second lens group (82) and a third lens group (83) are sequentially disposed on one side of the cover glass (701), and a liquid (702) is disposed between the cover glass (701) and the first lens group (81); The first lens group (81) comprises a first super-hemispherical lens (711) having positive refractive power and a second lens (712) having positive refractive power, the first lens (711) being fixed in a lens holder A (601), and a side of the first lens (711) facing the object plane (700) being a first A surface, and a side of the first lens (711) away from the first A surface being a first B surface, the second lens (712) being fixed in a lens holder B (602), and a side of the second lens (712) facing the object plane (700) being a second A surface, and a side of the second lens (712) away from the second A surface being a second B surface; The second lens group (82) comprises a third lens (721), a fourth lens (722), a fifth lens (723) and a sixth lens (724) which are arranged in sequence from bottom to top; the side of the third lens (721) facing the object plane (700) is a third A surface, and the side of the third lens (721) away from the third A surface is a third B surface; the side of the fourth lens (722) facing the object plane (700) is a fourth A surface, and the side of the fourth lens (722) away from the fourth A surface is a fourth B surface; the side of the fifth lens (723) facing the object plane (700) is a fifth A surface, and the side of the fifth lens (723) away from the fifth A surface is a fifth B surface; the side of the sixth lens (724) facing the object plane (700) is a fourth The sixth lens (724) has six A surfaces, and the side of the sixth lens (724) away from the sixth A surface is the sixth B surface, the third B surface of the third lens (721) is glued to the fourth A surface of the fourth lens (722), the fifth B surface of the fifth lens (723) is glued to the sixth A surface of the sixth lens (724), the fourth lens (722) and the third lens (721) are both fixed in the lens seat C (603) after being glued, and the fifth lens (723) and the sixth lens (724) are both fixed in the lens seat D (604) after being glued; the third lens (721) has positive refractive power, the fourth lens (722) has negative refractive power, the fifth lens (723) has negative refractive power, and the sixth lens (724) has positive refractive power; The third lens group (83) comprises a seventh lens (731), an eighth lens (732), a ninth lens (733), a tenth lens (734), an eleventh lens (735), a twelfth lens (736) and a thirteenth lens (737) which are arranged in order from bottom to top. The side of the seventh lens (731) facing the object plane (700) is a seventh A surface, and the side of the seventh lens (731) away from the seventh A surface is a seventh B surface. The side of the eighth lens (732) facing the object plane (700) is an eighth A surface, and the side of the eighth lens (732) away from the eighth A surface is an eighth B surface. The side of the ninth lens (733) facing the object plane (700) is a ninth A surface, and the side of the ninth lens (733) away from the ninth A surface is a ninth B surface. The side of the tenth lens (734) facing the object plane (700) is a tenth A surface, and the side of the tenth lens (734) away from the tenth A surface is a tenth The side of the eleventh lens (735) facing the object plane (700) is the eleventh A surface, and the side of the eleventh lens (735) away from the eleventh A surface is the eleventh B surface, the side of the twelfth lens (736) facing the object plane (700) is the twelfth A surface, and the side of the twelfth lens (736) away from the twelfth A surface is the twelfth B surface, the side of the thirteenth lens (737) facing the object plane (700) is the thirteenth A surface, and the side of the thirteenth lens (737) away from the thirteenth A surface is the thirteenth B surface; the seventh lens (731) has positive refractive power, the eighth lens (732) has negative refractive power, the ninth lens (733) has positive refractive power, the tenth lens (734) has negative refractive power, the eleventh lens (735) has negative refractive power, the twelfth lens (736) has positive refractive power, and the thirteenth lens (737) has positive refractive power; The seventh B surface of the seventh lens (731) is glued to the eighth A surface of the eighth lens (732), and the seventh lens (731) and the eighth lens (732) are fixed in the lens seat E (605); the ninth B surface of the ninth lens (733) is glued to the tenth A surface of the tenth lens (734), and the ninth lens (733) and the tenth lens (734) are both fixed in the lens seat F (606); the eleventh B surface of the eleventh lens (735) is glued to the twelfth A surface of the twelfth lens (736), and the eleventh lens (735) and the twelfth lens (736) are fixed in the lens seat G (607); and the thirteenth lens (737) is fixed in the lens seat H (608).

2. An immersion microscope objective according to claim 1, characterized in that: One side of the lens seat A (601) is connected to the lens seat B (602), and the distance between the lens seat A (601) and the lens seat B (602) is the interval between the first lens (711) and the second lens (712) on the optical axis. The other side of the lens seat B (602) is connected to the lens seat C (603), and the distance between the lens seat B (602) and the lens seat C (603) is the interval between the second lens (712) and the third lens (721) on the optical axis. The other side of the lens seat C (603) is connected to one side of the lens seat D (604), and the distance between the lens seat C (603) and the lens seat D (604) is the interval between the fourth lens (722) and the fifth lens (723) on the optical axis. One side of the lens seat E (605) is connected to one side of the lens seat D (604), and the lens seat E (605) is connected to the lens seat D (604). The distance between the lens seat D (604) is the interval between the sixth lens (724) and the seventh lens (731) on the optical axis, one side of the lens seat F (606) is connected to one side of the lens seat E (605), and the distance between the lens seat F (606) and the lens seat E (605) is the interval between the eighth lens (732) and the ninth lens (733) on the optical axis, the lens seat G (607) is connected to one side of the lens seat F (606), and the distance between the lens seat G (607) and the lens seat F (606) is the interval between the tenth lens (734) and the eleventh lens (735) on the optical axis, and one side of the lens seat H (608) is connected to the lens seat G (607), and the distance between the lens seat H (608) and the lens seat G (607) is the interval between the twelfth lens (736) and the thirteenth lens (737) on the optical axis.

3. An immersion microscope objective according to claim 1, characterized in that: The parameters of the cover glass (701) and the liquid (702) are: The cover glass (701) has a thickness T01 of 0.17, a refractive index N01 of 1.52, and an Abbe number V01 of 59.5; The liquid (702) has a thickness T02 of 0.20, a refractive index N02 of 1.52, and an Abbe number V02 of 41.3; The optical parameters of each lens in the first lens group (81), the second lens group (82) and the third lens group (83) are: The focal length f11 of the first lens (711) is 8.47, the refractive index N11 is 1.60, the Abbe number V11 is 67.7, and the thickness T11 is 4.46; The focal length f12 of the second lens (712) is 12.02, the refractive index N12 is 1.91, the Abbe number V12 is 35.3, and the thickness T12 is 2.50; The third lens (721) has a focal length f21 of 27.73, a refractive index N21 of 1.44, an Abbe number V21 of 94.9, and a thickness T21 of 4.80; The fourth lens (722) has a focal length f22 of -937.00, a refractive index N22 of 1.61, an Abbe number V22 of 44.3, and a thickness T22 of 1.00; The fifth lens (723) has a focal length f23 of -53.74, a refractive index N23 of 1.74, an Abbe number V23 of 49.2, and a thickness T23 of 1.00; The sixth lens (724) has a focal length f24 of 51.46, a refractive index N24 of 1.44, an Abbe number V24 of 94.9, and a thickness T24 of 3.93; The seventh lens (731) has a focal length f31 of 26.69, a refractive index N31 of 1.50, an Abbe number V31 of 81.6, and a thickness T31 of 3.44; The eighth lens (732) has a focal length f32 of -42.99, a refractive index N32 of 1.74, an Abbe number V32 of 32.3, and a thickness T32 of 1.00; The ninth lens (733) has a focal length f33 of 8.96, a refractive index N33 of 1.60, an Abbe number V33 of 67.7, and a thickness T33 of 3.30; The focal length f34 of the tenth lens (734) is -5.03, the refractive index N34 is 1.75, the Abbe number V34 is 35.3, and the thickness T34 is 4.19; The focal length f35 of the eleventh lens (735) is -2.83, the refractive index N35 is 1.88, the Abbe number V35 is 40.8, and the thickness T35 is 3.36; The focal length f36 of the twelfth lens (736) is 13.17, the refractive index N36 is 1.80, the Abbe number V36 is 35.0, and the thickness T36 is 4.00; The focal length f37 of the thirteenth lens (737) is 33.46, the refractive index N37 is 1.50, the Abbe number V37 is 81.6, and the thickness T37 is 2.

43.

4. An immersion microscope objective according to claim 1, characterized in that: The parameters of the cover glass (701) and the liquid (702) are: The cover glass (701) has a thickness T01 of 0.17, a refractive index N01 of 1.52, and an Abbe number V01 of 59.5; The liquid (702) has a thickness T02 of 0.20, a refractive index N02 of 1.52, and an Abbe number V02 of 41.3; The optical parameters of each lens in the first lens group (81), the second lens group (82) and the third lens group (83) are: The focal length f11 of the first lens (711) is 7.66, the refractive index N11 is 1.65, the Abbe number V11 is 39.7, and the thickness T11 is 4.47; The focal length f12 of the second lens (712) is 13.00, the refractive index N12 is 1.91, the Abbe number V12 is 35.3, and the thickness T12 is 2.11; The focal length f21 of the third lens (721) is 25.71, the refractive index N21 is 1.44, the Abbe number V21 is 94.9, and the thickness T21 is 4.36; The fourth lens (722) has a focal length f22 of -106.41, a refractive index N22 of 1.61, an Abbe number V22 of 44.3, and a thickness T22 of 1.00; The fifth lens (723) has a focal length f23 of -213.66, a refractive index N23 of 1.74, an Abbe number V23 of 49.2, and a thickness T23 of 1.00; The sixth lens (724) has a focal length f24 of 50.86, a refractive index N24 of 1.44, an Abbe number V24 of 94.9, and a thickness T24 of 3.77; The seventh lens (731) has a focal length f31 of 31.41, a refractive index N31 of 1.50, an Abbe number V31 of 81.6, and a thickness T31 of 3.28; The eighth lens (732) has a focal length f32 of -47.02, a refractive index N32 of 1.74, an Abbe number V32 of 32.3, and a thickness T32 of 1.00; The ninth lens (733) has a focal length f33 of 9.71, a refractive index N33 of 1.60, an Abbe number V33 of 67.7, and a thickness T33 of 3.32; The focal length f34 of the tenth lens (734) is -5.13, the refractive index N34 is 1.75, the Abbe number V34 is 35.3, and the thickness T34 is 6.15; The focal length f35 of the eleventh lens (735) is -2.80, the refractive index N35 is 1.88, the Abbe number V35 is 40.8, and the thickness T35 is 3.23; The focal length f36 of the twelfth lens (736) is 13.22, the refractive index N36 is 1.80, the Abbe number V36 is 35.0, and the thickness T36 is 4.13; The focal length f37 of the thirteenth lens (737) is 30.88, the refractive index N37 is 1.50, the Abbe number V37 is 81.6, and the thickness T37 is 2.

71.

5. The immersion microscope objective lens according to claim 1, characterized in that: The parameters of the cover glass (701) and the liquid (702) are: The cover glass (701) has a thickness T01 of 0.17, a refractive index N01 of 1.52, and an Abbe number V01 of 59.5; the liquid (702) has a thickness T02 of 0.20, a refractive index N02 of 1.52, and an Abbe number V02 of 41.3; The optical parameters of each lens in the first lens group (81), the second lens group (82) and the third lens group (83) are: The focal length f11 of the first lens (711) is 7.58, the refractive index N11 is 1.67, the Abbe number V11 is 38.1, and the thickness T11 is 4.51; The focal length f12 of the second lens (712) is 14.08, the refractive index N12 is 1.75, the Abbe number V12 is 35.3, and the thickness T12 is 2.27; The focal length f21 of the third lens (721) is 27.61, the refractive index N21 is 1.44, the Abbe number V21 is 94.9, and the thickness T21 is 4.40; The fourth lens (722) has a focal length f22 of -278.83, a refractive index N22 of 1.61, an Abbe number V22 of 44.3, and a thickness T22 of 1.00; The fifth lens (723) has a focal length f23 of -119.49, a refractive index N23 of 1.74, an Abbe number V23 of 49.2, and a thickness T23 of 1.00; The sixth lens (724) has a focal length f24 of 50.16, a refractive index N24 of 1.44, an Abbe number V24 of 94.9, and a thickness T24 of 3.75; The seventh lens (731) has a focal length f31 of 29.19, a refractive index N31 of 1.50, an Abbe number V31 of 81.6, and a thickness T31 of 3.30; The eighth lens (732) has a focal length f32 of -42.85, a refractive index N32 of 1.74, an Abbe number V32 of 32.3, and a thickness T32 of 1.00; The ninth lens (733) has a focal length f33 of 9.79, a refractive index N33 of 1.60, an Abbe number V33 of 67.7, and a thickness T33 of 3.33; The focal length f34 of the tenth lens (734) is -5.14, the refractive index N34 is 1.75, the Abbe number V34 is 35.3, and the thickness T34 is 6.23; The focal length f35 of the eleventh lens (735) is -2.76, the refractive index N35 is 1.88, the Abbe number V35 is 40.8, and the thickness T35 is 2.77; The focal length f36 of the twelfth lens (736) is 12.68, the refractive index N36 is 1.80, the Abbe number V36 is 35.0, and the thickness T36 is 4.13; The focal length f37 of the thirteenth lens (737) is 29.71, the refractive index N37 is 1.50, the Abbe number V37 is 81.6, and the thickness T37 is 2.74.

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