On-chip fluid manipulation module, acoustic fluid chip and analysis device

Abstract

The present application relates to the technical field of micro-electromechanical systems, and provides an on-chip fluid manipulation module, including a microfluidic channel, a Lamb wave resonator located at the base of the microfluidic channel, and the Lamb wave resonator includes parallel interdigitated electrodes, and the direction of the electrodes can be: perpendicular to the extension direction of the microfluidic channel, or parallel to the extension direction of the microfluidic channel, and a magnet can be set on the opposite side; or a bending part of the microfluidic channel can be set. Through different combinations of microfluidic channels and Lamb wave resonators, the functions of on-chip flow resistors, liquid agitators, particle traps, and fluid drivers can be realized, and because the acoustic fluid effect of the Lamb wave resonator is stable, it is used to drive the on-chip fluid to achieve high driving efficiency and reduce the problem of bubble oscillation.

Description

Technical Field

[0001] The present application relates to the technical field of micro-electromechanical systems, and in particular to an on-chip fluid manipulation module, an acoustic fluid chip, and an analysis device. Background Art

[0002] Point-of-care testing (POCT) is a new in vitro diagnostic method that uses portable analytical instruments and supporting reagents to perform rapid testing at the sampling site. Due to its high portability, good sensitivity, short detection time, simple use process, and low overall cost, it has gradually become an alternative method for sample testing in traditional large hospitals and central laboratories, and has shown great potential in health management, environmental monitoring, food safety analysis, and biosafety testing. Among them, microfluidic devices are one of the ideal platforms for achieving point-of-care testing because they can handle small-volume samples, reduce reagent consumption, shorten response time, and are miniaturized. However, traditional microfluidic platforms still require the help of peripheral pumps, valves, mixers, and optical detection components to complete biochemical testing.

[0003] Therefore, in order to achieve real-time testing, self-driven microfluidic devices have been proposed and gradually developed; the technologies used to construct on-chip fluid manipulation components can be divided into two categories: passive and active. Relatively speaking, active manipulation technology has more advantages in regulating fluid flow rate and movement direction, which mainly includes electrical method, magnetic method, photothermal method and acoustic method. Among them, the fluid manipulation technology based on acoustic method has attracted widespread attention from researchers because of its small size, convenient drive, easy integration, good biocompatibility and low dependence on the medium.

[0004] At present, several typical electromechanical transducers, including bubble-based piezoelectric ceramic transducers, bulk acoustic wave resonators, and surface acoustic wave resonators, have been used to build on-chip fluid-driven components. However, they still have problems such as low energy conversion efficiency and unstable bubble oscillation. Summary of the invention

[0005] The present application provides an on-chip fluid manipulation module, an acoustic fluid chip and an analysis device to improve energy conversion efficiency and reduce problems such as bubble oscillation.

[0006] The first aspect of the present application provides an on-chip fluid manipulation module, including a microfluidic channel and a Lamb wave resonator located at the base of the microfluidic channel, wherein the Lamb wave resonator includes parallel forked-finger electrodes, and the direction of the electrodes is perpendicular to the extension direction of the microfluidic channel, so as to realize the function of a flow resistor when generating Lamb waves.

[0007] A second aspect of the present application provides an on-chip fluid manipulation module, including a microfluidic channel and a Lamb wave resonator located at the base of the microfluidic channel, wherein the Lamb wave resonator includes parallel interdigitated electrodes, and the direction of the electrodes is parallel to the extension direction of the microfluidic channel, so as to realize an on-chip liquid stirring function when generating Lamb waves.

[0008] The third aspect of the present application provides an on-chip fluid manipulation module, including a microfluidic channel and a Lamb wave resonator located at the base of the microfluidic channel, wherein the Lamb wave resonator includes parallel forked-finger electrodes, the direction of the electrodes is parallel to the extension direction of the microfluidic channel, and a magnet is arranged on one side wall of the microfluidic channel next to the Lamb wave resonator to realize the on-chip particle trap function when the Lamb wave is generated.

[0009] In a fourth aspect, the present application provides an on-chip fluid manipulation module, comprising a microfluidic channel, the microfluidic channel comprising a bending portion, a Lamb wave resonator located at the base of the bending portion of the microfluidic channel, the Lamb wave resonator comprising parallel forked-finger electrodes, the electrode direction being parallel to the fluid inlet direction of the bending portion of the microfluidic channel and perpendicular to the fluid outlet direction of the bending portion of the microfluidic channel, so as to realize the on-chip fluid driver function when generating Lamb waves.

[0010] As a possible implementation manner of any one of the first to fourth aspects, the vertical includes a certain positive and negative angle margin, or the horizontal includes a certain positive and negative angle margin, and the angle margin is less than 45 degrees.

[0011] A fifth aspect of the present application provides an on-chip fluid manipulation module, comprising a combination of at least two of the on-chip fluid manipulation modules described in any one of the first to fourth aspects.

[0012] As a possible implementation manner of the fifth aspect, the combination of at least two includes: a combination of at least two on-chip fluid manipulation modules of the same type, or a combination of at least two on-chip fluid manipulation modules of different types.

[0013] As a possible implementation of the fifth aspect, the combination of at least two includes: at least two on-chip fluid manipulation modules described in the first aspect, whose outlets are connected to an on-chip fluid manipulation module described in the third aspect, and then connected to an inlet of an on-chip fluid manipulation module described in the fourth aspect.

[0014] A sixth aspect of the present application provides an acoustic fluidic chip, comprising a substrate having a microfluidic channel thereon, wherein the microfluidic channel is provided with an on-chip fluid manipulation module as described in any one of the first to fifth aspects.

[0015] The seventh aspect of the present application provides an analysis device, comprising the acoustic fluid chip described in the sixth aspect, a driving device for driving the Lamb wave resonator on the acoustic fluid chip, and an optical sensor facing the acoustic fluid chip.

[0016] From the above, the on-chip fluid manipulation module, acoustofluidic chip, and analysis device of the present application adopt a Lamb wave resonator. Since the Lamb wave resonator can generate horizontal Lamb waves, and the acoustofluidic effect of the Lamb wave resonator is stable, it is used to drive the on-chip fluid to achieve high driving efficiency, that is, high energy conversion rate, and can reduce problems such as bubble oscillation. And the structures of the first to fourth aspects of the present application can realize the manipulation of different functions, and through the fifth aspect, a combination of multiple functions can be realized to form a composite function. The acoustofluidic chip and analysis device that adopt the on-chip fluid manipulation module of the first to fifth aspects also have the above-mentioned technical effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Schematic diagram of Lamb wave resonator generating Lamb waves;

[0018] Figure 2 A schematic diagram of an acoustic fluidic chip provided in an embodiment of the present application;

[0019] Figure 3a1 An embodiment of the on-chip fluid manipulation module provided in the embodiment of the present application as a flow resistor;

[0020] Figure 3a2 A specific implementation of the on-chip fluid manipulation module provided in the embodiment of the present application as a flow resistor;

[0021] Figure 3b1 An embodiment of the on-chip fluid manipulation module provided in the embodiment of the present application as a stirrer;

[0022] Figure 3b2 A specific implementation of the on-chip fluid manipulation module provided in the embodiment of the present application as a stirrer;

[0023] Figure 3c1 An embodiment of the on-chip fluid manipulation module provided in the embodiment of the present application is used as a fluid driver;

[0024] Figure 3c2 The on-chip fluid manipulation module provided in the embodiment of the present application is a specific implementation of a fluid driver;

[0025] Figure 4 A schematic diagram of the structure of an analysis device provided in an embodiment of the present application.

[0026] Explanation of the accompanying drawings: first Lamb wave resonator 11, second Lamb wave resonator 12, third Lamb wave resonator 13, fourth Lamb wave resonator 14, magnet 15, microchannel 16, substrate 17, board-level RF power amplifier 21, acoustofluidic chip 22, optical sensor 23, circuit board 24, first micro-vortex 31, second micro-vortex 32, third micro-vortex 33, fourth micro-vortex 34.

[0027] It should be understood that the size and shape of each block diagram in the above structural diagram are for reference only and should not constitute an exclusive interpretation of the embodiments of the present application. The relative positions and inclusion relationships between the blocks presented in the structural diagram are only schematic representations of the structural associations between the blocks, and do not limit the physical connection methods of the embodiments of the present application. DETAILED DESCRIPTION

[0028] The technical solution provided by the present application is further described below in conjunction with the accompanying drawings and examples. It should be understood that the device structure and business scenarios provided in the examples of the present application are mainly to illustrate the possible implementation methods of the technical solution of the present application and should not be interpreted as the sole limitation of the technical solution of the present application. It is known to those of ordinary skill in the art that with the evolution of the structure of the device and the emergence of new business scenarios, the technical solution provided by the present application is also applicable to similar technical problems.

[0029] It should be understood that the on-chip fluid manipulation solutions provided in the embodiments of the present application include on-chip fluid manipulation modules and manipulation methods, acoustic fluid chips, on-chip fluid analysis devices and analysis methods, etc. Since these technical solutions solve the problems in the same or similar principles, some repetitions may not be repeated in the introduction of the following specific embodiments, but these specific embodiments should be regarded as having been referenced to each other and can be combined with each other.

[0030] Before further describing the specific embodiments of the present invention, the nouns and terms involved in the embodiments of the present invention, as well as their corresponding uses, effects, functions, etc. in the present invention are described. The nouns and terms involved in the embodiments of the present invention are subject to the following interpretations:

[0031] 1) Lamb wave resonator: a resonator used to generate Lamb waves, such as Figure 1 A Lamb wave resonator is shown, which adopts an interdigitated electrode structure. When the Lamb wave resonator acts on the liquid in the microchannel, Figure 1 As shown, four basically symmetrical micro-vortices are generated. From the perspective of three-dimensional space, four micro-vortex shapes are formed that diverge from the center of the Lamb wave resonator (with the Lamb wave resonator as a reference surface). Lamb wave originally refers to a special sound wave that is only transmitted in the horizontal direction. In this application, since most of the micro-vortices correspond to the horizontal component force, the resonator is also called a Lamb wave resonator.

[0032] Since the forces of the four vortices are basically symmetrical, the flow velocity at the center of the Lamb wave resonator is lower. Based on this characteristic, one application of the Lamb wave resonator is to use micro-vortices to capture particles (such as nanoparticles) in the liquid and gather them in the middle of the four micro-vortices. Figure 1The aggregated particles are schematically shown in the middle of four micro-vortices. The present invention further provides other application modes of Lamb wave resonators, which will be described in the subsequent embodiments.

[0033] 2) Acoustofluid effect: refers to the effect of driving a resonator (such as the Lamb wave resonator in the embodiment of the present application) to generate high-frequency sound waves, which are coupled into the liquid to generate a huge volume force to drive the fluid movement.

[0034] 3) Micro-Electro-Mechanical System (MEMS): also known as micro-electromechanical system, microsystem, micromachine, etc., refers to high-tech devices with a size of several millimeters or even smaller, and its internal structure can generally reach the micron or even nanometer level.

[0035] 4) On-chip fluid: refers to the fluid in the microfluidic channel on the chip, such as the fluid in the microfluidic channel on the acoustofluidic chip.

[0036] The on-chip fluid control scheme provided by the embodiment of the present application is in the field of micro-electromechanical system technology. Through different combinations of Lamb wave resonators and microchannels, modules with different control functions can be realized. For example, when the Lamb wave resonator is coupled to the liquid in the microchannel, when the formed micro-vortex blocks the flow of the liquid in the microchannel, the function of the flow resistor is realized; when the formed micro-vortex drives the flow of the liquid in the microchannel, the function of the micropump is realized; when the formed micro-vortex drives the mixing of multiple liquids in the microchannel, the function of the mixer is realized; when used as a mixer and combined with a magnet, the function of the particle catcher can be realized. The realization of the above-mentioned various control functions can also be arbitrarily combined to realize richer control functions. In addition, it can also be further combined with optical sensors, electrical sensors, or changes in the resonant frequency of the Lamb wave resonator itself to realize the detection of captured particles. Below, the present application will be further described in detail with reference to the various accompanying drawings.

[0037] Figure 2 An embodiment of an acoustic fluidic chip is shown. Figure 2 The embodiment shown is composed of a plurality of on-chip fluid manipulation modules, and the on-chip fluid manipulation modules included can also be used alone or in any combination. For the convenience of description, when each on-chip fluid manipulation module is introduced separately, it can also be referred to. Figure 2 The on-chip fluid manipulation module provided by the present application is first introduced below.

[0038] The first on-chip fluid manipulation module provided in the present application includes a microfluidic channel 16 and a third Lamb wave resonator 13 located on the substrate of the microfluidic channel. The third Lamb wave resonator 13 includes parallel forked-finger electrodes, and the direction of the electrodes is perpendicular to the extension direction of the microfluidic channel, so as to realize the function of a flow resistor when generating Lamb waves.

[0039] Combine the following Figure 3a1 The principle is explained in one embodiment shown in FIG. Figure 3a1 The upper, lower, left and right directions of the electrode are used as references. The first micro-vortex 31 and the second micro-vortex 32 at the upper part include the part starting from the electrode upward, and the third micro-vortex 33 and the fourth micro-vortex 34 at the lower part include the part starting from the electrode downward. Figure 3a1 The two vertical black lines on the left and right represent the extension direction of the microchannel sidewall), or when the electrode direction is perpendicular to the microchannel sidewall, that is, when the electrode direction is 90 degrees perpendicular to the channel boundary, and when the fluid in the microchannel flows to the first microvortex 31 and the second microvortex 32 corresponding to the electrode, the force of the first microvortex 31 and the second microvortex 32 starting from the electrode hinders the flow of liquid in the microchannel, thereby realizing the function of the flow resistor. Among them, there can be a certain positive and negative angle margin between the above-mentioned electrode direction and the verticality (or 90 degrees) of the microchannel sidewall, and the maximum value of the angle margin is less than 45 degrees, for example, it can be 10 degrees, 5 degrees, etc.

[0040] For the first on-chip fluid manipulation module, in some embodiments, by controlling the power of the third Lamb wave resonator 13 to control the intensity of the Lamb wave, the flow resistor can completely block the liquid in the flow channel or block it to a certain degree.

[0041] like Figure 3a2 A specific implementation of the on-chip fluid manipulation module provided in the embodiment of the present application as a flow resistor is shown, wherein in this implementation, the size of the Lamb wave resonator is about 150×200 microns 2 , where the electrode direction is the length direction, the height of the microchannel can be 50 microns, and the width of the microchannel can be 200 microns. The above dimensions are only a specific implementation and are not limited to the dimensions of the present application. For example, the height of the microchannel can also be 40 to 60 microns, the width can also be 50 to 100 microns, or other dimensions. The Lamb wave resonator size can also be 50×100 to 200×600 microns. 2 , or other sizes.

[0042] In some embodiments, the length of the Lamb wave resonator may be close to the width of the microchannel, so that the generated micro-vortex is basically matched with the width of the microchannel to achieve a better flow resistance effect.

[0043] The second on-chip fluid manipulation module provided in the present application includes a microfluidic channel 16 and a second Lamb wave resonator 12 located on the substrate of the microfluidic channel. The second Lamb wave resonator 12 includes parallel forked electrodes, and the direction of the electrodes is parallel to the extension direction of the microfluidic channel, that is, the direction of the electrodes is 180 degrees to the boundary of the microfluidic channel, so as to realize the on-chip liquid stirring function when generating Lamb waves.

[0044] Combine the following Figure 3b1 The principle is explained as follows: Figure 3b1 As shown in Figure 3b1 The two parallel black lines above and below represent the side walls of the microchannel) when the fluid in the microchannel is parallel to the electrode, the first microvortex 31 and the second microvortex 32 act on the liquid flowing through, and the liquid is stirred by the microvortex to achieve the on-chip liquid stirring function. In addition, the third microvortex 33 and the fourth microvortex 34 will also act on the liquid flowing through, and the liquid is stirred by the microvortex to achieve the on-chip liquid stirring function. Among them, there can be a certain positive and negative angle margin between the above-mentioned electrode direction and the parallelism (or 180 degrees) of the microchannel side wall, wherein the maximum value of the angle margin is less than 45 degrees, for example, it can be 10 degrees, 5 degrees, etc.

[0045] For the second on-chip fluid manipulation module, in some embodiments, the intensity of the Lamb wave is controlled by controlling the power of the second Lamb wave resonator 12, thereby controlling the intensity of the stirring.

[0046] Figure 3b2 A specific implementation of the on-chip fluid manipulation module provided in the embodiment of the present application as a stirrer is shown, wherein in this implementation, the size of the Lamb wave resonator is about 150×200 microns 2 , where the electrode direction is the length direction, the height of the microchannel can be 50 microns, and the width of the microchannel can be 600 microns. The above dimensions are only a specific implementation and are not limited to the dimensions of the present application. For example, the height of the microchannel can also be 40 to 60 microns, the width can also be 50 to 100 microns, or other dimensions. The Lamb wave resonator size can also be 50×100 to 200×600 microns. 2 , or other sizes.

[0047] In some embodiments, the width of the Lamb wave resonator size can be smaller than the width of the microchannel. For example, the ratio of the width of the Lamb wave resonator size to the width of the microchannel can be 0.2 to 0.5, so that the generated micro-vortices have enough space to disturb the fluid in the microchannel to achieve better liquid stirring function.

[0048] The third on-chip fluid manipulation module provided in the present application includes a microfluidic channel 16 and a second Lamb wave resonator 12 located on the microfluidic channel substrate. The second Lamb wave resonator 12 includes parallel forked electrodes, and the direction of the electrodes is parallel to the extension direction of the microfluidic channel, that is, the direction of the electrodes is 180 degrees to the boundary of the microfluidic channel. A magnet 15 is arranged on the side wall of the microfluidic channel next to the second Lamb wave resonator 12 to attract biological particles in the captured fluid through magnetic adsorption when generating Lamb waves, thereby realizing the function of an on-chip particle trap.

[0049] Combine the following Figure 1 The principle is explained as follows: Figure 1 As shown in , when the fluid in the microchannel is parallel to the electrode, the first microvortex 31 and the second microvortex 32 act on the liquid flowing through, and the liquid is stirred by the microvortex. At the same time, the microvortex also has a capture effect on the particles in the liquid. The particles captured by the microvortex are concentrated next to the magnet 15 through the magnetic adsorption effect of the magnet 15, realizing the function of the on-chip particle capturer. Among them, there can be a certain positive and negative angle margin between the above-mentioned electrode direction and the parallelism (or 180 degrees) of the microchannel side wall, wherein the maximum value of the angle margin is less than 45 degrees, for example, it can be 10 degrees, 5 degrees, etc.

[0050] For the third on-chip fluid manipulation module, in some embodiments, the intensity of the Lamb wave is controlled by controlling the power of the second Lamb wave resonator 12, so that the intensity of the micro-vortex can be controlled, thereby achieving the capture of different particles (such as different diameters or different masses).

[0051] The fourth on-chip fluid manipulation module provided in the present application includes a microfluidic channel 16, which includes a bending portion, and a first Lamb wave resonator 11 located at the base of the microfluidic channel bending portion. The first Lamb wave resonator 11 includes parallel forked electrodes, and the electrode direction is parallel to the fluid inlet direction of the microfluidic channel bending portion, and the electrode direction is perpendicular to the fluid outlet direction of the microfluidic channel bending portion, that is, the electrode direction is 180 degrees to the boundary of the microfluidic channel inlet and 90 degrees to the boundary of the microfluidic channel outlet, so as to realize the on-chip fluid driver function when generating Lamb waves.

[0052] Combine the following Figure 3c1 The principle is explained as follows: Figure 3c1 As shown in FIG. , when the Lamb wave resonator 11 is located in the microchannel ( Figure 3c1When the two black L-shaped lines in the figure represent the bending part of the microchannel side wall, for example, the second micro-vortex 32 and the fourth micro-vortex 34 correspond to the fluid inlet, the force of the micro-vortex generated by the second micro-vortex 32 and the fourth micro-vortex 34 will drive the fluid to flow toward the Lamb wave resonator 11, and at the same time, the force of the third micro-vortex 33 and the fourth micro-vortex 34 will drive the fluid flowing through the Lamb wave resonator 11 to flow toward the outlet, thereby realizing the on-chip fluid driver function. Among them, there can be a certain positive and negative angle margin between the above-mentioned electrode direction and the parallelism (or 180 degrees) of the microchannel inlet side wall, wherein the maximum value of the angle margin is less than 45 degrees. Similarly, there can be a certain positive and negative angle margin between the above-mentioned electrode direction and the outlet (or 90 degrees) of the microchannel outlet side wall, wherein the maximum value of the angle margin is less than 45 degrees, for example, it can be 10 degrees, 5 degrees, etc.

[0053] For the fourth on-chip fluid manipulation module, in some embodiments, the intensity of the Lamb wave is controlled by controlling the power of the first Lamb wave resonator 11, thereby achieving control over the driving force of the driver.

[0054] Figure 3c2 The on-chip fluid manipulation module provided in the embodiment of the present application is shown as a specific implementation of a fluid driver, wherein in this implementation, the size of the Lamb wave resonator is about 150×200 microns 2 , wherein the electrode direction is the length direction, the height of the microchannel can be 50 microns, the width of the microchannel in the fluid inlet direction can be 240 microns, and the width of the microchannel in the fluid outlet direction is less than 200 microns, for example, it can be 50 microns, 100 microns, 200 microns, etc. Among them, the above dimensions are only a specific implementation method and are not limited to the dimensions of the present application. For example, the height of the microchannel can also be 40 to 60 microns, the width can also be 50 to 100 microns, etc., or other dimensions, and the Lamb wave resonator size can also be 50×100 to 200×600 microns. 2 , or other sizes.

[0055] In some embodiments, the width of the microchannel in the fluid outlet direction of the Lamb wave resonator may be smaller than the width of the microchannel in the inlet direction, and the width of the microchannel in the fluid outlet direction may be smaller than the width of the Lamb wave resonator size, so that the micro-vortex generated in the fluid outlet direction of the Lamb wave resonator has more force toward the outlet, so as to achieve a better fluid driving effect.

[0056] In some embodiments, at least two of the first to fourth on-chip fluid manipulation modules may be combined to form a composite on-chip fluid manipulation module. The combination includes at least two identical on-chip fluid manipulation modules or at least two different on-chip fluid manipulation modules. The following examples are provided:

[0057] In some embodiments, there may be multiple first on-chip fluid manipulation modules (eg Figure 2 Two first-type on-chip fluid manipulation modules are shown in the figure) arranged in parallel, and the outlets are connected to form a multi-input and one-output fluid selection switch structure; or multiple first-type on-chip fluid manipulation modules are arranged in parallel, and the inlets are connected to form a one-input and multiple-output fluid selection switch structure; or the multi-input and one-output structure is connected to a one-input and multiple-output fluid selection switch structure to form a multi-input and multiple-output fluid selection switch structure with optional outlets.

[0058] In some embodiments, the above-mentioned multi-input and one-output structure can be connected to the inlet of a fourth on-chip fluid manipulation module; or, the above-mentioned one-input and multiple-output structure can be connected to the outlet of a fourth on-chip fluid manipulation module to form a structure with a single fluid driver.

[0059] In some embodiments, each outlet of the one-input-multiple-output structure, or at least one outlet, can be connected to an inlet of a fourth on-chip fluid manipulation module, and a structure with multiple fluid drivers can be formed as needed.

[0060] In some embodiments, there may be multiple on-chip fluid manipulation modules of the fourth type, whose inlets are connected to form a one-input and multiple-output structure with multiple fluid actuators; or there may be multiple on-chip fluid manipulation modules of the fourth type, whose outlets are connected to form a multiple-input and one-output structure with multiple fluid actuators.

[0061] In some embodiments, there may be a plurality of the second type of on-chip fluid manipulation modules, which may be sequentially arranged in the flow channel to enhance the stirring effect on the liquid.

[0062] In some embodiments, there may be multiple third on-chip fluid manipulation modules, which may be sequentially arranged in the flow channel. Different third on-chip fluid manipulation modules may be driven at different frequencies to generate Lamb waves of different frequencies, thereby capturing different biological particles.

[0063] In such Figure 2 In the illustrated embodiment, two first-type on-chip fluid manipulation modules are included to form a two-input and one-output fluid selection switch structure, and then the outlet is connected to a third-type on-chip fluid manipulation module, and then connected to a fourth-type on-chip fluid manipulation module. Specifically, Figure 2As shown, the first Lamb wave resonator 11 is placed at a right angle to the "L"-shaped flow channel (i.e., at the bend of the flow channel), and the on-chip fluid pumping is achieved by matching the acoustic fluid direction through the structure of the bend of the microchannel. The first Lamb wave resonator serves as an on-chip fluid driver; the second Lamb wave resonator 12 is placed in the direct flow channel, and the electrode direction is parallel to the boundary of the flow channel. By forming an acoustic fluid vortex, mixing of multiple fluids is achieved. The second Lamb wave resonator 12 serves as an on-chip mixer and the micro-vortex it generates has a particle capture function. At the same time, the magnet 15 (whose size can be 1×1×1 mm 3 ) is placed on the opposite side of the second Lamb wave resonator 12, and attracts the captured biological particles in the fluid through magnetic adsorption, so the second Lamb wave resonator 12 and the magnet 15 act as an on-chip particle capturer; the third Lamb wave resonator 13 and the fourth Lamb wave resonator 14 are respectively placed in the direct flow channel of the branch, and the electrode direction is perpendicular to the boundary of the flow channel, and the acoustic jet effect in the acoustic fluid effect is used to hinder the fluid movement, so the third Lamb wave resonator 13 and the fourth Lamb wave resonator 14 act as flow resistors and fluid selection switches.

[0064] The embodiment of the present application also provides an acoustic fluid chip, including a substrate 17, on which a microfluidic channel and at least one Lamb wave resonator located on the microfluidic channel substrate are provided, wherein the specific positional relationship between the Lamb wave resonator and the microfluidic channel forms a combination of one or more of the above-mentioned first to fourth on-chip fluid manipulation modules, and the combination method thereof can refer to the introduction of combining at least two of the above-mentioned first to fourth on-chip fluid manipulation modules, and will not be repeated. Among them, the substrate 17 can be a silicon substrate, and the microfluidic channel and Lamb wave resonator thereon can be manufactured using a micro-electromechanical processing process.

[0065] The embodiment of the present application also provides an analysis device, including: the above-mentioned acoustic fluid chip 22; a driving device for driving the Lamb wave resonator on the acoustic fluid chip 22, which may be a board-level RF power amplifier 21, and the board-level RF power amplifier 21 applies excitation power to the Lamb wave resonator to drive the Lamb wave resonator to generate high-frequency sound waves; an optical sensor 23, which faces the acoustic fluid chip 22 and can obtain optical signals of particles captured by at least a third on-chip fluid manipulation module, and can also obtain optical signals at each on-chip fluid manipulation module on the acoustic fluid chip 22.

[0066] In some embodiments, the optical sensor 23 may be located on the upper side of the acoustic fluid chip 22, and the signal measured by the optical sensor 23 may be transmitted to the analysis device, thereby completing the entire analysis process. The analysis device may be a computer, a mobile phone, a PAD, etc. The optical sensor 23 may be a visible light sensor, an infrared sensor, a camera, etc.

[0067] In such Figure 4In one embodiment of the analysis device shown, a board-level RF power amplifier 21 is placed at the lower part of the analysis device, an acoustic fluid chip 22 is placed at the upper right part of the analysis device, an optical sensor 23 is placed on the upper side of the acoustic fluid chip 22, and a signal processing circuit board 24 connected to the optical sensor 23 is located on the upper left side.

[0068] In other embodiments, electrical sensors may be used instead of the optical sensor 23. For example, inductors or electromagnetic sensors may be provided to detect captured particles by detecting changes in inductance or magnetic field caused by the capture of particles by the third on-chip fluid manipulation module.

[0069] In other embodiments, the captured particles may also be detected based on the change in the resonance frequency of the third on-chip fluid manipulation module caused by capturing the particles.

[0070] Among them, the words "first, second, third, etc." or module A, module B, module C and other similar terms in the specification and claims are only used to distinguish similar objects and do not represent a specific ordering of the objects. It can be understood that the specific order or sequence can be interchanged where permitted so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0071] In the above description, the numbers representing the steps, such as S110, S120, etc., do not necessarily mean that the steps will be executed accordingly. If permitted, the order of the steps can be interchanged or they can be executed simultaneously.

[0072] The term "comprising" as used in the description and claims should not be interpreted as being limited to what is listed thereafter; it does not exclude other elements or steps. Therefore, it should be interpreted as specifying the presence of the features, integers, steps or components mentioned, but does not exclude the presence or addition of one or more other features, integers, steps or components and groups thereof. Therefore, the expression "a device comprising means A and B" should not be limited to a device consisting of components A and B only.

[0073] References to "one embodiment" or "an embodiment" in this specification mean that a particular feature, structure, or characteristic described in conjunction with the embodiment is included in at least one embodiment of the present application. Therefore, the phrases "in one embodiment" or "in an embodiment" appearing in various places in this specification do not necessarily refer to the same embodiment, but may refer to the same embodiment. In addition, in one or more embodiments, the particular features, structures, or characteristics can be combined in any appropriate manner, as would be apparent to one of ordinary skill in the art from this disclosure.

[0074] Note that the above are only preferred embodiments of the present application and the technical principles used. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made to those skilled in the art without departing from the scope of protection of the present application. For example, although the above embodiments describe that the electrodes are parallel or perpendicular to the microchannels, or describe that the electrodes are parallel or perpendicular to the inlet direction of the microchannels, it is not difficult to understand that the corresponding functions can be achieved even if they are not completely parallel or perpendicular. Therefore, although the present application is described in more detail through the above embodiments, the present application is not limited to the above embodiments, and may also include more other equivalent embodiments without departing from the concept of the present application, all of which belong to the scope of protection of the present application.

Claims

1. An on-chip fluid manipulation module, characterized in that: The invention comprises a microfluidic channel and a Lamb wave resonator located at a base of the microfluidic channel, wherein the Lamb wave resonator comprises parallel interdigitated electrodes, wherein the electrodes are perpendicular to the extension direction of the microfluidic channel, so as to realize a flow resistor function when generating Lamb waves; Among them, the length of the Lamb wave resonator is close to the width of the microchannel, so that the generated micro-vortex matches the width of the microchannel to achieve the flow resistance effect, and the intensity of the Lamb wave is controlled by controlling the power of the Lamb wave resonator to achieve full blocking of the liquid in the microchannel or blocking of a certain opening.

2. An on-chip fluid manipulation module, characterized in that: The device comprises a microfluidic channel and a Lamb wave resonator located at a base of the microfluidic channel, wherein the Lamb wave resonator comprises parallel interdigitated electrodes, wherein the electrodes are parallel to the extension direction of the microfluidic channel, so as to realize an on-chip liquid stirring function when generating Lamb waves; The width of the Lamb wave resonator is smaller than the width of the microchannel, and the ratio of the width of the Lamb wave resonator to the width of the microchannel is 0.2 to 0.5, so that the generated micro-vortex has enough space to disturb the fluid in the microchannel to achieve the liquid stirring function.

3. An on-chip fluid manipulation module, characterized in that: The invention comprises a microfluidic channel, wherein the microfluidic channel comprises a bending portion, and a Lamb wave resonator located at the base of the bending portion of the microfluidic channel, wherein the Lamb wave resonator comprises parallel interdigitated electrodes, wherein the direction of the electrodes is parallel to the fluid inlet direction of the bending portion of the microfluidic channel and perpendicular to the fluid outlet direction of the bending portion of the microfluidic channel, so as to realize an on-chip fluid driver function when generating Lamb waves, and to drive the fluid from the fluid inlet of the bending portion of the microfluidic channel to the fluid outlet of the bending portion of the microfluidic channel.

4. The on-chip fluid manipulation module according to any one of claims 1 to 3, characterized in that: The verticality includes a certain positive and negative angle margin, and the angle margin is less than 45 degrees.

5. An on-chip fluid manipulation module, characterized in that: A combination comprising at least two of the on-chip fluid manipulation modules described in any one of claims 1-4.

6. The on-chip fluid manipulation module according to claim 5, characterized in that: The combination of at least two includes: a combination of at least two on-chip fluid manipulation modules of the same type, or a combination of at least two on-chip fluid manipulation modules of different types.

7. The on-chip fluid manipulation module according to claim 6, characterized in that: The combination of at least two comprises: At least two first on-chip fluid manipulation modules, wherein the outlets of the two first on-chip fluid manipulation modules are connected to a second on-chip fluid manipulation module, and then connected to an inlet of a third on-chip fluid manipulation module; The first on-chip fluid manipulation module includes: a microfluidic channel, a Lamb wave resonator located at a base of the microfluidic channel, the Lamb wave resonator including parallel interdigitated electrodes, the direction of the electrodes being perpendicular to an extension direction of the microfluidic channel, so as to realize a flow resistor function when generating Lamb waves; The second on-chip fluid manipulation module includes: a microfluidic channel, a Lamb wave resonator located at a base of the microfluidic channel, the Lamb wave resonator includes parallel interdigitated electrodes, the direction of the electrodes is parallel to the extension direction of the microfluidic channel, and a magnet is provided at a side wall of the microfluidic channel next to the Lamb wave resonator, so as to realize the on-chip particle trap function when the Lamb wave is generated; The third on-chip fluid manipulation module includes: a microfluidic channel, the microfluidic channel includes a bending portion, a Lamb wave resonator located at the base of the bending portion of the microfluidic channel, the Lamb wave resonator includes parallel forked electrodes, the electrode direction is parallel to the fluid inlet direction of the bending portion of the microfluidic channel, and is perpendicular to the fluid outlet direction of the bending portion of the microfluidic channel, so as to realize the on-chip fluid driver function when generating Lamb waves, and is used to drive the fluid from the fluid inlet of the bending portion of the microfluidic channel to the fluid outlet of the bending portion of the microfluidic channel.

8. An acoustic fluid chip, characterized in that: It comprises a substrate having a microfluidic channel, and the microfluidic channel is provided with an on-chip fluid manipulation module as described in any one of claims 1-7.

9. An analysis device, characterized in that: It comprises the acoustofluidic chip as claimed in claim 8, a driving device for driving the Lamb wave resonator on the acoustofluidic chip, and an optical sensor facing the acoustofluidic chip.

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