A walking robot for moving a substrate transfer robot in a vacuum chamber

Abstract

The present invention relates to a walking robot for making a substrate conveying robot walk in a vacuum chamber, comprising: a lifting part, which is located in the outer lower area of ​​a shell that seals the inside of the vacuum chamber, and the upper end is sealed and connected to the vacuum chamber through hole formed in the lower area of ​​the shell, so that a hollow lifting drive shaft is formed to move up and down in the vacuum chamber through hole; a walking arm platform, which comprises a 1_1 combination hole, a 1_2 combination hole and a 1_3 combination hole; the first walking arm part comprises a 1_1 walking link arm and a 1_2 walking link arm; the second walking arm part comprises a 2_1 walking link arm and a 2_2 walking link arm; a conveying robot coupling part, whose second front end area is rotatably coupled to the 1_2 other front end area of ​​the 1_2 walking link arm, and the second other front end area is rotatably coupled to the 2_2 other front end area of ​​the 2_2 walking link arm, and a hollow rotating drive shaft is formed in the second central area and is sealed and coupled to a rotating drive motor of the substrate conveying robot for conveying substrates.

Description

Technical Field

[0001] The present invention relates to a walking robot, and more particularly, to a walking robot for making a substrate transfer robot walk in a vacuum chamber, wherein the substrate transfer robot transfers a substrate in a vacuum chamber in a substrate processing device. Background Art

[0002] Generally, a substrate such as a semiconductor device wafer, a display device glass substrate, or a thin film solar cell glass substrate is prepared by subjecting the substrate to various processes, and the substrate is loaded in a substrate processing apparatus that provides optimal conditions for each process for processing.

[0003] Currently, in order to improve productivity, a cluster type substrate processing apparatus that can collectively process substrates has been developed and used.

[0004] The cluster type substrate processing apparatus includes a load lock chamber storing a substrate, a transfer chamber for transferring the substrate, and a plurality of process chambers for performing each process.

[0005] In addition, a substrate transfer robot for transferring a substrate is provided in a transfer chamber in a vacuum state, and can transfer a substrate from a load lock chamber to a transfer chamber, transfer a substrate from a transfer chamber to a load lock chamber, transfer a substrate between transfer chambers, or transfer a substrate to introduce and lead it into and out of the transfer chamber.

[0006] Recently, in order to cope with the increase in the size of substrates and improve substrate processing capabilities, research is being conducted to change the structure in which two substrates can be processed in one process chamber or the octagonal structure in which four process chambers are arranged at equal intervals in a transfer chamber to a quadrilateral structure in which process chambers are arranged on both sides of the substrate transfer path of the transfer chamber.

[0007] In particular, when two substrates are disposed in one process chamber, the position shift relative to each substrate may inevitably be accompanied by a position shift relative to the substrate transfer robot in order to correspond to the installation position of each process chamber in the quadrilateral structure.

[0008] For this purpose, a method has been proposed in which a transfer path such as a track is provided in a transfer room and a transfer robot walks on the transfer path.

[0009] However, when a conveying path such as a track is set up in the conveying chamber, it is necessary to set up a structure for forming the conveying path in the conveying chamber, and then set up a substrate conveying robot on the upper part of the structure. Therefore, it is not only difficult to set up the substrate conveying robot, but also difficult to maintain the substrate conveying robot afterwards.

[0010] Prior art literature

[0011] (Patent Document 1) KR10-2019-0072373A

[0012] (Patent Document 2) KR10-2012-0024021A Summary of the invention

[0013] The present invention aims to solve all the above problems.

[0014] Another object of the present invention is to provide a walking robot for making a substrate transfer robot walk in a vacuum chamber.

[0015] Another object of the present invention is to easily provide a walking robot for allowing a substrate transfer robot to walk in a vacuum chamber.

[0016] Another object of the present invention is to facilitate maintenance of a walking robot for making a substrate transfer robot disposed in a vacuum chamber walk.

[0017] Another object of the present invention is to provide a walking robot that can allow a substrate transfer robot to walk while maintaining a vacuum state of a vacuum chamber.

[0018] In order to achieve the above-mentioned object of the present invention and realize the characteristic effects of the present invention described below, the characteristic structure of the present invention is as follows.

[0019] According to one embodiment of the present invention, there is provided a walking robot for making a substrate transfer robot walk inside a vacuum chamber, characterized in that it comprises: a lifting portion, which is located in the lower area of ​​the outer side of a shell inside the sealed vacuum chamber, and the upper end is sealed and combined with the vacuum chamber through hole formed in the lower area of ​​the shell, so that a lifting drive shaft formed with a hollow can move up and down in the vacuum chamber through hole; a walking arm platform, which comprises: a 1_1 combining hole, a 1_1 clamping piece having a 1_1 through hole corresponding to the hollowness of the lifting drive shaft formed in the 1st central area, which is divided into a 1_1 upper space and a 1_1 lower space, and the 1_1 upper space is sealed by the 1_1 cover; a 1_2 combining hole, which is formed in the 1st front end area The 1_2 retaining piece having the 1_2 through hole is divided into the 1_2 upper space and the 1_2 lower space, and the 1_2 lower space is sealed by the 1_2 cover; and the 1_3 combining hole, which is divided into the 1_3 upper space and the 1_3 lower space by the 1_3 retaining piece having the 1_3 through hole in the other front end area of ​​the 1_3, and the 1_3 lower space is sealed by the 1_3 cover, and the lifting drive shaft introduced into the 1_1 lower space is fixedly coupled to the 1_1 retaining piece; the 1st walking arm part, which comprises: the 1_1 walking connecting rod arm, which is provided with the 1st walking driving motor and the 1st speed reducer which is linked with the 1st walking driving motor to reduce the speed to 1 / 2 in the sealed internal space, and is connected with the 1 The 1_1st driving shaft having a hollow structure and the 1_1st output shaft having a linkage with the 1_1 driving shaft are sealed and arranged at the 1_1st front end area, the 1_2nd driving shaft having a hollow structure and the 1_2nd output shaft having a linkage with the 1_2 driving shaft are sealed and arranged at the 1_1st other front end area, the 1_1st output shaft is fixedly connected to the 1_1st connecting piece, the 1_1st connecting piece is introduced into the 1_2 upper space of the walking arm platform and fixedly connected to the 1_2 retaining piece; and the 1_2nd walking link arm, the 1_2nd front end area of ​​which is fixedly connected to the 1_2 output shaft of the 1_1st walking link arm; the second walking arm part, which comprises: the 2_2nd _1 walking link arm, which is provided with a second walking drive motor and a second reducer linked with the second walking drive motor to reduce the rotation speed to 1 / 2 in a sealed internal space, a 2_1 driving shaft linked with the second reducer and a 2_1 output shaft linked with the 2_1 driving shaft are sealed and arranged at a front end area of ​​the 2_1, a 2_2 driving shaft linked with the second walking drive motor and a 2_2 output shaft linked with the 2_2 driving shaft are sealed and arranged at another front end area of ​​the 2_1, the 2_1 output shaft is fixedly combined with the 1_2 connecting piece, the 1_2 connecting piece is introduced into the 1_3 upper space of the walking arm platform and fixedly combined with the 1_3 locking piece;and a 2_2nd walking link arm, whose 2_2nd front end region is fixedly coupled to the 2_2nd output shaft of the 2_1st walking link arm; and a transfer robot coupling part, whose 2nd front end region is rotatably coupled to the 1_2nd other front end region of the 1_2nd walking link arm, and the 2nd other front end region is rotatably coupled to the 2_2nd other front end region of the 2_2nd walking link arm, and a hollow rotary drive shaft is formed in the 2nd central region and is sealed and coupled to the rotary drive motor of the substrate transfer robot for transferring the substrate. ;

[0020] The conveying robot coupling part may further include a flexible member, which, in response to an external force, changes the position at which the 1_2 other front end region of the 1_2 walking link arm is rotatably coupled to any one of the positions at which the 2_2 other front end region of the 2_2 walking link arm is rotatably coupled within the conveying robot coupling part.

[0021] The compliant member may include: a sliding member, which slides along the longitudinal direction of the conveying robot coupling portion inside any one of the front end regions from the 2nd front end region to the 2nd other front end region, and is rotatably coupled to any one of the 1st_2nd other front end region of the 1_2 walking link arm to the 2_2nd other front end region of the 2_2 walking link arm; and an elastic member, which is respectively formed on the sliding paths on both sides of the sliding member inside the front end region of any one of the 2nd front end region to the 2nd other front end region.

[0022] The walking arm platform may further include: a first wiring hole connecting the 1_1st upper space and the 1_2nd lower space; and a second wiring hole connecting the 1_1st upper space and the 1_3rd lower space.

[0023] The walking arm platform may also include: a 1_1 wiring hole and a 1_2 wiring hole, which are respectively connected to the 1_1 upper space on one side of the main body of the walking arm platform; a 2_1 wiring hole, which is connected to the 1_2 lower space on one side of the main body of the walking arm platform; a 2_2 wiring hole, which is connected to the 1_3 lower space on one side of the main body of the walking arm platform; a 1st sealing cover, which seals the 1_1 wiring hole and the 2_1 wiring hole on one side of the main body of the walking arm platform; and a 2nd sealing cover, which seals the 1_2 wiring hole and the 2_2 wiring hole on one side of the main body of the walking arm platform.

[0024] The lifting unit may not only make the lifting drive shaft move up and down, but also make the lifting drive shaft rotate.

[0025] The walking robot may further include a first wiring for operating the first walking drive motor and a second wiring for operating the second walking drive motor, wherein the first wiring is introduced into the first walking drive motor through the hollow of the lifting drive shaft and the 1_1 drive shaft to be sealed in the internal space of the vacuum chamber, and the second wiring is introduced into the second walking drive motor through the hollow of the lifting drive shaft and the 2_1 drive shaft to be sealed in the internal space of the vacuum chamber.

[0026] In the walking robot, the position where the longitudinal center line of the walking arm platform intersects with the longitudinal center line of the 1_1 walking link arm is called the 1_1 contact point, the position where the longitudinal center line of the walking arm platform intersects with the longitudinal center line of the 2_1 walking link arm is called the 1_2 contact point, the position where the longitudinal center line of the 1_1 walking link arm intersects with the longitudinal center line of the 1_2 walking link arm is called the 2_1 contact point, and the position where the longitudinal center line of the 2_1 walking link arm intersects with the longitudinal center line of the 2_1 walking link arm is called the 2_2 contact point. The position where the longitudinal center lines of the 1_2 walking link arms intersect with the longitudinal center line of the conveying robot joint is called the 2_2 contact point, the position where the longitudinal center line of the 1_2 walking link arms intersects with the longitudinal center line of the conveying robot joint is called the 3_1 contact point, and the position where the longitudinal center line of the 2_2 walking link arms intersects with the longitudinal center line of the conveying robot joint is called the 3_2 contact point, so that the distance between the 1_1 contact point and the 1_2 contact point and the distance between the 3_1 contact point and the 3_2 contact point are equal to or greater than the distance between the 3_1 contact point and the 3_2 contact point. equal, so that the distance between the 1_1 contact point and the 2_1 contact point, the distance between the 2_1 contact point and the 3_1 contact point, the distance between the 1_2 contact point and the 2_2 contact point, and the distance between the 2_2 contact point and the 3_2 contact point are equal, so that the angle between the walking arm platform and the 1_1 walking link arm at the 1_1 contact point and the angle formed by the walking arm platform and the 2_1 walking link arm at the 1_2 contact point are equal. The absolute values ​​of are equal, so that the absolute values ​​of the angle formed by the 1_1st walking link arm and the 1_2nd walking link arm at the 2_1st contact point and the absolute values ​​of the angle between the 2_1st walking link arm and the 2_2nd walking link arm at the 2_2nd contact point are equal, and the absolute values ​​of the angle formed by the 1_2nd walking link arm and the connecting part of the conveying robot at the 3_1 contact point and the absolute values ​​of the angle formed by the 2_2nd walking link arm and the connecting part of the conveying robot at the 3_2 contact point are equal.

[0027] The first travel drive motor and the second travel drive motor may operate in the same manner, but in opposite directions of rotation.

[0028] The substrate conveying robot may include: a conveying arm platform, which is formed with: a 2_1 combining hole, which is formed in the 2nd central area with a 2_1 through hole corresponding to the hollow of the rotating drive shaft of the rotating drive motor of the conveying robot coupling part, and is divided into a 2_1 upper space and a 2_1 lower space by a 2_1 fixing piece, and the 2_1 upper space is sealed by a 2_1 cover; a 2_2 combining hole, which is formed in the 3rd front end area with a 2_2 through hole, and is divided into a 2_2 upper space and a 2_2 lower space by a 2_2 fixing piece, and the 2_2 lower space is sealed by the 2_2 cover; and a 2_3 combining hole, which is formed in the 3rd other front end area with a 2_4 through hole The 2_3 clamping piece of the 2_3 through hole is divided into a 2_3 upper space and a 2_3 lower space, and the 2_3 lower space is sealed by the 2_3 cover, and a connecting rod connecting piece including the 1_1 blade and the 1_2 blade for connecting rod connection is fixedly connected to the front area, and the front is the direction of the process chamber when the substrate transfer robot is configured in order to transfer the substrate to the process chamber combined with the vacuum chamber, and the rotating drive shaft of the rotating drive motor introduced into the 2_1 lower space is fixedly connected to the 2_1 clamping piece; the 1st transfer arm part, which includes: the 1_1 transfer connecting rod arm, which is provided with the 1st transfer drive motor and the connecting rod connected to the 1_2 blade in the sealed internal space. The first transmission drive motor is linked to the third reducer that reduces the rotation speed to 1 / 2, the 3_1st drive shaft that is linked to the third reducer and the 3_1st output shaft that is linked to the 3_1st drive shaft are sealed and arranged at the front end area of ​​the 3_1st, the 3_2nd drive shaft that is linked to the first transmission drive motor and the 3_2nd output shaft that is linked to the 3_2nd drive shaft are sealed and arranged at the other front end area of ​​the 3_1st, the 3_1st output shaft is fixedly combined with the 2_1st connecting piece, the 2_1st connecting piece is introduced into the 2_2 upper space of the transmission arm platform and fixedly combined with the 2_2 clamping piece; the 1_2 transmission link arm, the 3_2nd front end of which is The first common link arm, the 4th central region of which is rotatably coupled to the first fixed coupling shaft; the first auxiliary link arm, which is parallel to the 1_1 transmission link arm, the 3_4th front end region of which is rotatably coupled to the 1_1 blade of the link connector of the transmission arm platform, and the 3_4th other front end region of which is rotatably coupled to the 3_3th front end region of the 1st common link arm; the first auxiliary link arm, which is parallel to the 1_2 transmission link arm, and the 3_5th front end region of which is rotatably coupled to the 3_3th other front end region of the 1st common link arm;The 1_3 auxiliary link arm is parallel to the 1st common link arm, the 3_6th front end region is rotatably coupled to the 3_5th other front end region of the 1_2 auxiliary link arm, and the 3_6th other front end region is rotatably coupled to the 3_2th other front end region of the 1_2 transmission link arm; and the 1st end effector is fixed to the 3_6th other front end region of the 1_3 auxiliary link arm to support the substrate; and the 2nd transmission arm part, which includes: the 2_1 transmission link arm, which is provided with a 2nd transmission drive motor and a transmission drive motor in a sealed internal space; The 4th speed reducer that reduces the rotation speed to 1 / 2, the 4th speed reducer that is linked to form a hollow 4_1 drive shaft and the 4_1 output shaft that is linked to the 4_1 drive shaft are sealed and arranged in a front end area of ​​the 4_1, the 4_2 drive shaft that is linked to the second transmission drive motor is hollow and the 4_2 output shaft that is linked to the 4_2 drive shaft is sealed and arranged in another front end area of ​​the 4_1, the 4_1 output shaft is fixedly combined with the 2_2 connecting piece, and the 2_2 connecting piece is introduced into the 2_3 upper space of the transmission arm platform and fixedly combined with the 2_3 The locking member; the 2_2 transmission link arm, whose 4_2 front end area is fixedly coupled to the 4_2 output shaft of the 2_1 transmission link arm through the 2nd fixed coupling shaft; the 2nd common link arm, whose 5th central area is rotatably coupled to the 2nd fixed coupling shaft; the 2_1 auxiliary link arm, which is parallel to the 2_1 transmission link arm, whose 4_4 front end area is rotatably coupled to the 1_2 blade of the link connecting member of the transmission arm platform, and whose 4_4 other front end area is rotatably coupled to the 4_3 front end area of ​​the 2nd common link arm; the 2_2 auxiliary A link arm parallel to the 2_2 transport link arm, a 4_5th front end region rotatably coupled to the 4_3th other front end region of the 2_2 common link arm; a 2_3rd auxiliary link arm parallel to the 2_2 common link arm, a 4_6th front end region rotatably coupled to the 4_5th other front end region of the 2_2 auxiliary link arm, a 4_6th other front end region rotatably coupled to the 4_2th other front end region of the 2_2 transport link arm; and a second end effector fixed to the 4_6th other front end region of the 2_3 auxiliary link arm to support the substrate. ;

[0029] The 3_1st other front end region of the 1_1st conveying link arm of the 1st conveying arm portion may be located in the front region of the conveying arm platform, and the 4_1st other front end region of the 2_1st conveying link arm of the 2nd conveying arm portion may be located in the rear region of the conveying arm platform.

[0030] The height of the second fixed coupling shaft may be higher than the height of the first fixed coupling shaft, so that the first end effector and the second end effector are located at different heights on the same path.

[0031] The second common connecting rod arm may include a hollow tube corresponding to the height of the second fixed coupling axis and formed with a hollow for introducing the second fixed coupling axis, the 2_1 blade including the 4_3 first front end area is fixedly coupled to the lower area of ​​the hollow tube, the 2_2 blade including the 4_3 other front end area is fixedly coupled to the upper area of ​​the hollow tube, and the 4_3 first front end area and the 4_3 other front end area are symmetrical with respect to the central axis of the hollow tube.

[0032] The transfer arm platform may further include: a 3rd wiring hole connecting the 2_1st upper space and the 2_2nd lower space; and a 4th wiring hole connecting the 2_1st upper space and the 2_3rd lower space.

[0033] The conveying arm platform may also include: a 3_1 wiring hole and a 3_2 wiring hole, which are respectively connected to the 2_1 upper space on one side of the main body of the conveying arm platform; a 4_1 wiring hole, which is connected to the 2_2 lower space on one side of the main body of the conveying arm platform; a 4_2 wiring hole, which is connected to the 2_3 lower space on one side of the main body of the conveying arm platform; a 3rd sealing cover, which seals the 3_1 wiring hole and the 4_1 wiring hole on one side of the main body of the conveying arm platform; and a 4th sealing cover, which seals the 3_2 wiring hole and the 4_2 wiring hole on one side of the main body of the conveying arm platform.

[0034] It may also include a third wiring for the operation of the first transmission drive motor and a fourth wiring for the operation of the second transmission drive motor, the third wiring being introduced into the first transmission drive motor through the hollows of the lifting drive shaft, the 1_1 drive shaft, the 1_2 drive shaft, the rotation drive shaft and the 3_1 drive shaft, respectively, so as to be sealed in the internal space of the vacuum chamber, and the fourth wiring being introduced into the second transmission drive motor through the hollows of the lifting drive shaft, the 2_1 drive shaft, the 2_2 drive shaft, the rotation drive shaft and the 4_1 drive shaft, respectively, so as to be sealed in the internal space of the vacuum chamber.

[0035] The present invention can enable a substrate conveying robot for conveying substrates in the vacuum chamber to walk by arranging the walking robot in the vacuum chamber.

[0036] In addition, in the present invention, the walking robot is formed into a link arm structure, and the walking robot can be easily disposed in the vacuum chamber without providing a separate structure for generating a transfer path.

[0037] In addition, in the present invention, since the walking robot formed as a link arm structure is installed without installing a separate structure for generating a conveying path, maintenance of the walking robot is easy.

[0038] Furthermore, in the present invention, by forming the driving part of the walking robot into a sealed structure and forming wiring for operating the driving part inside the walking robot, it is possible to prevent a contamination source in advance and maintain the vacuum state of the vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The following drawings used to describe embodiments of the present invention are only part of the embodiments of the present invention, and ordinary technicians in the field to which the present invention belongs (hereinafter referred to as "ordinary technicians") can obtain other drawings based on these drawings without performing any creative work.

[0040] Figure 1 FIG. 4 is a schematic diagram of an example of a cluster-type substrate processing apparatus provided with a walking robot according to an embodiment of the present invention.

[0041] Figure 2 FIG. 4 is a schematic diagram of another example of a cluster-type substrate processing apparatus provided with a walking robot according to an embodiment of the present invention.

[0042] Figure 3a and Figure 3b FIG. 4 is a schematic diagram of a walking robot according to an embodiment of the present invention.

[0043] Figures 4a to 4c Schematic diagram of a walking arm platform of a walking robot according to an embodiment of the present invention.

[0044] Figure 5 Schematic diagram of the 1_1st walking link arm of the walking robot according to an embodiment of the present invention.

[0045] Figure 6 FIG. 4 is a schematic diagram of a compliant component of a walking robot according to an embodiment of the present invention.

[0046] Figure 7 Schematic diagram of a link arm of a walking robot according to an embodiment of the present invention.

[0047] Figure 8a and Figure 8b FIG. 4 is a schematic diagram of a substrate transfer robot combined with a walking robot according to an embodiment of the present invention.

[0048] Figure 9a and Figure 9bFIG. 4 is a schematic diagram of a transfer arm platform of a substrate transfer robot combined with a walking robot according to an embodiment of the present invention.

[0049] Fig.10 FIG. 3 is a schematic diagram of a 3_1st transfer link arm of a substrate transfer robot combined with a walking robot according to an embodiment of the present invention.

[0050] Fig.11 FIG. 1 is a schematic diagram of a connection portion between a 3_1st transfer link arm and a 3_2nd transfer link arm of a substrate transfer robot combined with a walking robot according to an embodiment of the present invention.

[0051] Description of Reference Numerals

[0052] 1000: Walking robot 100: Lifting unit

[0053] 210: Walking arm platform 220: First walking arm part

[0054] 230: 1st_1st travel link arm 240: 1st_2nd travel link arm

[0055] 250: 2nd traveling arm 260: 2nd_1st traveling link arm

[0056] 270: 2_2 walking link arm 280: conveying robot connection part. DETAILED DESCRIPTION

[0057] The following detailed description of the present invention refers to the accompanying drawings, which show specific embodiments that can implement the present invention in an illustrative manner to illustrate the purpose, technical solutions and advantages of the present invention. These embodiments are described in sufficient detail to enable those skilled in the art to implement the present invention.

[0058] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings showing specific embodiments in which the present invention can be implemented as examples. These embodiments are described in sufficient detail to enable those skilled in the art to implement the present invention. It should be understood that the various embodiments of the present invention, although different, do not necessarily exclude each other. For example, the specific shapes, structures and characteristics described herein can be implemented by other embodiments in one embodiment without exceeding the spirit and scope of the present invention. And, it should be understood that the position or configuration of each component in each disclosed embodiment can be changed without exceeding the spirit and scope of the present invention. Therefore, the detailed description described below is not intended to limit the present invention, and as long as it can be properly described, the scope of the present invention should be limited according to all scopes equivalent to the scope of its claims and the scope of the attached claims. Similar figure marks in the drawings indicate the same or similar functions in many aspects.

[0059] In order to enable those skilled in the art to easily implement the present invention, preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0060] Figure 1 and Figure 2 FIG. 4 is a schematic diagram of a cluster-type substrate processing apparatus provided with a walking robot according to an embodiment of the present invention.

[0061] Figure 1 A substrate processing device is provided, in which four process chambers PC1, PC2, PC3, PC4 are arranged in a vacuum chamber VC as a transfer chamber of an octagonal structure, two substrates S1, S2 can be arranged in each process chamber, and a walking robot 1000 is fixedly arranged at a specific position P1 in the vacuum chamber VC, so as to correspond to the offset of the positions of the two substrates in each process chamber, so that the substrate transfer robot for transferring the substrate can walk.

[0062] As an example, in order to correspond to the first substrate S1 position in a specific process chamber PC1, the walking robot 1000 makes the substrate conveying robot walk to place it at the first position P2, and then rotates the substrate conveying robot to face the first substrate S1 position, thereby enabling the substrate conveying robot to load the substrate at the first substrate position or unload the substrate from the first substrate position.

[0063] In addition, the walking robot 1000 makes the substrate conveying robot walk to place it at the second position P3 in order to correspond to the second substrate S2 position in the specific process chamber PC1, and rotates the substrate conveying robot to face the second substrate S2 position, thereby allowing the substrate conveying robot to load the substrate at the second substrate position or unload the substrate from the second substrate position.

[0064] also, Figure 2 A substrate processing device is disclosed, wherein two process chambers PC1, PC2, PC3, and PC4 are respectively provided on both sides of a vacuum chamber VC which is a transfer chamber of a quadrilateral structure. Two substrates can be provided in each process chamber. A walking robot 1000 is fixedly provided at a specific position P1 in the vacuum chamber VC so that the substrate transfer robot walks to correspond to the position of each process chamber and the positions of the two substrates in each process chamber.

[0065] As an example, in order to correspond to the first substrate S1 position in the first process chamber VC1, the walking robot 1000 makes the substrate conveying robot walk to place it at the first position P2, and then rotates the substrate conveying robot to face the first substrate position, thereby allowing the substrate conveying robot to load the substrate at the first substrate position or unload the substrate from the first substrate position.

[0066] In addition, the walking robot 1000 makes the substrate conveying robot walk to place the substrate at the second position P5 in order to correspond to the second substrate S2 position in the second process chamber PC2, and rotates the substrate conveying robot to face the second substrate position, thereby enabling the substrate conveying robot to load the substrate at the second substrate position or unload the substrate from the second substrate position.

[0067] Said Figure 1 and Figure 2 The substrate processing apparatuses of octagonal structure and quadrilateral structure are described as examples, but the present invention is not limited thereto. When the walking robot 1000 according to an embodiment of the present invention is fixed and set at a specific position in a vacuum chamber of various structures, the substrate transfer robot can be made to walk in various set paths. In addition, the walking robot 1000 according to an embodiment of the present invention can be rotated at the set position, and various walking paths can be set for the substrate transfer robot in combination with the rotation angle of the walking robot 1000, the walking position of the substrate transfer robot, and the rotation angle of the substrate transfer robot.

[0068] Figure 3a and Figure 3b FIG. 1 is a schematic diagram of a walking robot 1000 according to an embodiment of the present invention.

[0069] See also Figure 3a and Figure 3b The walking robot 1000 may include a lifting part 100 and a robot body 200 , and the robot body 200 is coupled to the upper portion of the lifting part 100 and is coupled to the substrate transfer robot.

[0070] First, the lifting part 100 can be located in the lower area outside the housing VC inside the sealed vacuum chamber, and the upper end is sealed and connected to the vacuum chamber through hole formed in the lower area of ​​the housing VC, and the hollow lifting drive shaft 101 is moved up and down in the vacuum chamber through hole. Thus, the walking robot 1000 can adjust the up and down position of the substrate transfer robot 2000 to position the substrate transfer robot 2000 at an appropriate height to load or unload the substrate in the process chamber, etc.

[0071] In addition, in addition to moving the lifting drive shaft 101 up and down, the lifting unit 100 can also perform an operation of rotating the lifting drive shaft 101. Thus, the walking robot 1000 can make the substrate transfer robot 2000 walk in various directions according to the rotation angle of the lifting unit 100.

[0072] Next, the robot body 200 may include: a walking arm platform 210 combined with the lifting part 100; a first walking arm part 220 and a second walking arm part 250 symmetrically combined with the walking arm platform 210; and a transfer robot coupling part 280 combined with the first walking arm part 220 and the second walking arm part 250 and supporting a substrate transfer robot 2000 for transferring a substrate. By operating the first walking arm part 220 and the second walking arm part 250, the transfer robot coupling part 280 is moved back and forth, so that the substrate transfer robot 2000 can walk in the vacuum chamber.

[0073] Thus, when the walking robot 1000 is fixed at a specific position in the vacuum chamber, the transfer robot coupling part 280 is moved forward and backward by operating the first walking arm 220 and the second walking arm 250, so that the substrate transfer robot 2000 coupled to the transfer robot coupling part 280 can walk to position the substrate transfer robot 200 at a set position, i.e., a process chamber for loading or unloading substrates, etc., and the position of the substrate transfer robot 2000 in the height direction is adjusted by the up and down movement of the lifting part 100, so that the substrate transfer robot 2000 can load or unload substrates in the process chamber, etc.

[0074] The walking robot 1000 according to an embodiment of the present invention will be described in more detail below.

[0075] First, the traveling arm platform 210 may be coupled to the lifting unit 100 .

[0076] At this time, see Figure 4a to Figure 4b The walking arm platform 210 may include a 1_1st combining hole 211 formed in a 1st central region, a 1_2nd combining hole 212 formed in a 1st front end region, and a 1_3rd combining hole 213 formed in a 1st other front end region.

[0077] The 1_1 combining hole 211 can be divided into a 1_1 upper space 211_1 and a 1_1 lower space 211-2 by a 1_1 locking member having a 1_1 through hole corresponding to the hollowness of the lifting drive shaft 101 of the lifting part 100 formed in the 1_1 central area, and the 1_1 upper space 211_1 is sealed by the 1_1 cover 214.

[0078] Furthermore, the 1_2 coupling hole 212 may be divided into a 1_2 upper space 212_1 and a 1_2 lower space 212_2 by a 1_2 locking member having a 1_2 through hole formed in the 1_2 front end region, and the 1_2 lower space 212_2 may be sealed by a 1_2 cover 215 .

[0079] In addition, the 1_3rd combining hole 213 may be divided into a 1_3rd upper space 213_1 and a 1_3rd lower space 213_2 by a 1_3rd locking member having a 1_3rd through hole formed in the 1st other front end region, and the 1_3rd lower space 213_3 may be sealed by a 1_3rd cover 216 .

[0080] In addition, the walking arm platform 210 can be combined with the lifting part 100. Specifically, the lifting drive shaft 101 of the lifting part 100 can be inserted into the 1_1 lower space 211_2 of the 1_1 coupling hole 211, so that the lifting drive shaft 101 is fixedly coupled to the 1_1 clamping piece. At this time, when the lifting drive shaft 101 is fixedly coupled to the 1_1 clamping piece, the sealing performance of the fixed coupling area can be improved by adding a sealing member such as an O-ring or a gasket. The structure of adding a sealing member such as an O-ring or a gasket can also be applied to other coupling parts described later, so it will not be repeated in the following description.

[0081] Thus, the hollow external environment of the lifting drive shaft 101 can be sealed from the vacuum environment inside the vacuum chamber at the 1_1st combining hole 211.

[0082] On the other hand, a wiring hole for introducing the wiring introduced through the hollow of the lifting drive shaft 101 of the lifting part 100 into the first and second traveling arm parts 220 and 250 may be formed in the traveling arm platform 210 .

[0083] That is, the 1_1 wiring hole h11 and the 1_2 wiring hole h12 can be formed, which are respectively connected to the 1_1 upper space 211_1 on one side of the walking arm platform 210 body, and the 2_1 wiring hole h21 and the 2_2 wiring hole h22 can be formed, the 2_1 wiring hole h21 is connected to the 1_2 lower space 212_2 on one side of the walking arm platform 210 body, and the 2_2 wiring hole h22 is connected to the 1_3 lower space 213_2 on one side of the walking arm platform 210 body.

[0084] In addition, in order to seal the wiring holes, a first sealing cover 217 and a second sealing cover 218 can be provided. The first sealing cover 217 seals the 1_1 wiring hole h11 and the 2_1 wiring hole h21 on one side of the walking arm platform 210 body, and the second sealing cover 218 seals the 1_2 wiring hole h12 and the 2_2 wiring hole h22 on one side of the walking arm platform 210 body.

[0085] In addition, see Figure 4c A wiring hole may be formed inside the traveling arm platform 210 , and the wiring hole is used to introduce the wiring introduced through the lifting drive shaft 101 of the lifting part 100 into the first traveling arm part 220 and the second traveling arm part 250 .

[0086] That is, by forming the first wiring hole h3 connecting the 1_1st upper space 211_1 with the 1_2nd lower space 212_2 and the second wiring hole h4 connecting the 1_1st upper space 211_1 with the 1_3rd lower space 213_2 inside the body of the traveling arm platform 210, the interior of the traveling arm platform 210 can be sealed without a separate seal.

[0087] Next, the 1_1st traveling link arm 230 of the 1st traveling arm unit 220 may be coupled to the 1_2nd coupling hole 212 of the traveling arm platform 210 , and the 2_1st traveling link arm 260 of the 2nd traveling arm unit 250 may be coupled to the 1_3rd coupling hole 213 of the traveling arm platform 210 .

[0088] At this time, see Figure 5 The 1_1 walking link arm 230 of the first walking arm portion 220 has a sealed internal space, in which a first walking drive motor 231 and a first reducer 232 that works in conjunction with the first walking drive motor 231 to reduce the rotation speed to 1 / 2 can be provided.

[0089] In addition, the 1_1st driving shaft 233 and the 1_1st output shaft 234 which are linked to the 1_1st driving shaft 233 and are formed in a hollow manner can be sealed and arranged at the 1_1st front end region of the 1_1st walking link arm 230, and the 1_2nd driving shaft 236 and the 1_2nd output shaft 237 which are linked to the 1_2nd driving shaft 236 and are formed in a hollow manner can be sealed and arranged at the 1_1st other front end region of the 1_1st walking link arm 230. At this time, the linkage between the 1st walking drive motor 231 and the 1st reducing gear 232, the linkage between the 1st reducing gear 232 and the 1_1st driving shaft 233, and the linkage between the 1st walking drive motor 231 and the 1_2nd driving shaft 236 can be respectively performed by a pulley method, but the present invention is not limited thereto, and various methods for transmitting rotational force, such as a gear method, can be used. In addition, the 1_1st driving shaft 233 and the 1_1st output shaft 234, the 1_2nd driving shaft 236 and the 1_2nd output shaft 237 may also be respectively formed as reducers having the same reduction ratio. In addition, the rotation directions of the 1_1st output shaft 234 and the 1_2nd output shaft 237 may be opposite to each other. Furthermore, the 1_1st output shaft 234 provided in the 1_1st front end region of the 1_1st walking link arm 230 of the 1_1st walking arm portion 220 may be introduced into the 1_2nd upper space 212_1 of the 1_2nd coupling hole 212 of the walking arm platform 210 and fixedly coupled to the 1_2nd locking member.

[0090] At this time, the 1_1 connecting member 235 can be used to combine the 1_1 output shaft 234 and the 1_2 stopping member. The 1_1 connecting member 235 is a tubular shaft, and its length extends the distance between the 1_1 output shaft 234 and the 1_2 stopping member at the combining position of the walking arm platform 210 and the 1_1 walking link arm 230. The two ends of the 1_1 connecting member 235 can be fixedly combined to the 1_1 output shaft 234 and the 1_2 stopping member respectively.

[0091] Furthermore, the 2_2nd walking link arm 270 of the 2nd walking arm unit 250 can be connected with the reference Figure 5 The 1_1st traveling link arm 230 of the 1st traveling arm portion 220 described above is constructed similarly.

[0092] That is, the 2_1st travel link arm 260 of the second travel arm unit 250 has a sealed internal space, and the second travel drive motor and the second reducer that works in conjunction with the second travel drive motor to reduce the rotation speed to 1 / 2 may be provided in the sealed internal space.

[0093] In addition, the 2_1st driving shaft with a hollow structure linked to the 2nd speed reducer and the 2_1st output shaft linked to the 2_1st driving shaft can be sealed and arranged at the 2_1st front end area of ​​the 2_1st walking link arm 260, and the 2_2nd driving shaft with a hollow structure linked to the 2nd walking drive motor and the 2_2nd output shaft linked to the 2_2nd driving shaft can be sealed and arranged at the 2_1st other front end area of ​​the 2_1st walking link arm 260. At this time, the linkage between the 2nd walking drive motor and the 2nd speed reducer, the linkage between the 2nd speed reducer and the 2_1st driving shaft, and the linkage between the 2nd walking drive motor and the 2_2nd driving shaft can be respectively performed by pulley methods, but the present invention is not limited thereto, and various methods for transmitting rotational force, such as a gear method, etc. can be adopted. In addition, the 2_1st driving shaft and the 2_1st output shaft, the 2_2nd driving shaft and the 2_2nd output shaft can also be respectively formed as speed reducers with the same reduction ratio. In addition, the rotation directions of the 2_1st output shaft and the 2_2nd output shaft may be opposite to each other.

[0094] Furthermore, the 2_1st output shaft provided in the 2_1st front end region of the 2_1st traveling link arm 260 of the 2nd traveling arm portion 250 may be introduced into the 1_3rd upper space of the 1_3rd coupling hole 213 of the traveling arm platform 210 and fixedly coupled to the 1_3rd locking member.

[0095] At this time, the 1_2 connecting member can be used to combine the 1_2 output shaft 237 and the 1_3 stopping member. The 1_2 connecting member is a tubular shaft, and its length extends the distance between the 2_1 output shaft and the 1_3 stopping member at the connecting position of the walking arm platform 210 and the 2_1 walking link arm 260. The two ends of the 1_2 connecting member can be fixedly combined to the 2_1 output shaft and the 1_3 stopping member respectively.

[0096] Next, the 1_2 front end region of the 1_2 walking link arm 240 can be fixedly coupled to the 1_2 output shaft 237 of the 1_1 walking link arm 230 of the 1st walking arm portion 220, and the 2_2 front end region of the 2_2 walking link arm 270 can be fixedly coupled to the 2_2 output shaft 237 of the 2_1 walking link arm 260 of the 2nd walking arm portion 250.

[0097] At this time, the connecting member can be used for the combination of the 1_2 output shaft 237 and the 1_2 front end region, and the connecting member 238 is a tubular shaft, whose length extends the distance between the 1_2 output shaft 237 and the combination area of ​​the 1_2 front end region at the combination position of the 1_1 travel link arm 230 and the 1_2 travel link arm 240, and the two ends of the connecting member 238 can be fixedly connected to the combination area of ​​the 1_2 output shaft 237 and the 1_2 front end region. In addition, the connecting member can be used for the combination of the 2_2 output shaft 237 and the 2_2 front end region, and the connecting member is a tubular shaft, whose length extends the distance between the 2_2 output shaft and the combination area of ​​the 2_2 front end region at the combination position of the 2_1 travel link arm 260 and the 2_2 travel link arm 270, and the two ends of the connecting member can be fixedly connected to the 2_2 output shaft and the combination area of ​​the 2_2 front end region.

[0098] Next, the transfer robot coupling part 280 may be coupled to the 1_2 th traveling link arm 240 and the 2_2 th traveling link arm 270 .

[0099] That is, the 2nd front end region of the transfer robot coupling part 280 is rotatably coupled to the 1_2nd other front end region of the 1_2nd walking link arm 240 , and the 2nd other front end region of the transfer robot coupling part 280 is rotatably coupled to the 2_2nd other front end region of the 2_2nd walking link arm 270 .

[0100] In addition, a rotation driving motor including a hollow rotation driving shaft 281 may be formed to be sealed to the second central region of the transfer robot coupling portion 280 , and the substrate transfer robot 2000 for transferring substrates may be sealed to the hollow rotation driving shaft 281 .

[0101] In addition, a flexible member 282 can be formed in any one of the front ends from the 2nd front end to the 2nd other front end of the conveying robot coupling 280, which changes the position in which the 1_2nd other front end region of the 1_2nd walking link arm 240 is rotatably coupled to any one of the positions in which the 2_2nd other front end region of the 2_2nd walking link arm 270 is rotatably coupled in the conveying robot coupling 280 in response to an external force.

[0102] At this time, see Figure 6 , the compliant member 282 may include: a sliding member 283, which slides along the longitudinal direction of the conveying robot coupling part 280 inside any one of the front end regions from the 2nd front end region to the 2nd other front end region, and is rotatably coupled to any one of the 1st_2nd other front end region of the 1st_2nd walking link arm 240 to the 2nd_2nd other front end region of the 2nd walking link arm 270; and an elastic member 284, which is respectively formed on the sliding paths on both sides of the sliding member 283 inside the front end of any one of the 2nd front end to the 2nd other front end. However, in addition to the structure using the elastic member, the compliant member 282 according to the present invention can also be implemented in various ways, such as using a hydraulic cylindrical shape, etc.

[0103] On the other hand, see Figure 7 The position where the longitudinal center line of the walking arm platform 210 intersects with the longitudinal center line of the 1_1 walking link arm 230 is called the 1_1 contact point C1, the position where the longitudinal center line of the walking arm platform 210 intersects with the longitudinal center line of the 2_1 walking link arm 260 is called the 1_2 contact point C2, the position where the longitudinal center line of the 1_1 walking link arm 230 intersects with the longitudinal center line of the 1_2 walking link arm 240 is called the 2_1 contact point C3, the position where the longitudinal center line of the 2_1 walking link arm 260 intersects with the longitudinal center line of the 2_2 walking link arm When the position where the longitudinal center lines of the lever arm 270 intersect is called the 2_2 contact point C4, the position where the longitudinal center line of the 1_2 walking link arm intersects with the longitudinal center line of the conveying robot joint 280 is called the 3_1 contact point C5, and the position where the longitudinal center line of the 2_2 walking link arm 270 intersects with the longitudinal center line of the conveying robot joint 280 is called the 3_2 contact point C6, the distance between the 1_1 contact point C1 and the 1_2 contact point C2 and the distance between the 3_1 contact point C5 and the 3_2 contact point C6 are made equal. In addition, the distance between the 1_1 contact point C1 and the 2_1 contact point C3, the distance between the 2_1 contact point C3 and the 3_1 contact point C5, the distance between the 1_2 contact point C2 and the 2_2 contact point C5, and the distance between the 2_2 contact point C4 and the 3_2 contact point C6 are made equal.

[0104] In addition, the absolute value of the angle between the walking arm platform 210 and the 1_1 walking link arm 230 at the 1_1 contact point C1 is equal to the absolute value of the angle between the walking arm platform 210 and the 2_1 walking link arm 260 at the 1_2 contact point C2, the absolute value of the angle between the 1_1 walking link arm 230 and the 1_2 walking link arm 240 at the 2_1 contact point C3 is equal to the absolute value of the angle between the 2_1 walking link arm 260 and the 2_2 walking link arm 270 at the 2_2 contact point C4, and the absolute value of the angle between the 1_2 walking link arm 240 and the conveying robot coupling part 280 at the 3_1 contact point C5 is equal to the absolute value of the angle between the 2_2 walking link arm 270 and the conveying robot coupling part 280 at the 3_2 contact point C6.

[0105] Thus, the walking robot 1000 can make the substrate transfer robot 2000 supported by the transfer robot coupling part 280 walk forward and backward in the straight line area.

[0106] At this time, the first travel driving motor 231 provided in the 1_1th travel link arm 230 and the second travel driving motor provided in the 2_1th travel link arm 260 may operate in the same manner but rotate in opposite directions.

[0107] In addition, a first wiring for operating the first walking drive motor 231 and a second wiring for operating the second walking drive motor may be provided in the sealed space inside the walking robot 1000 .

[0108] At this time, the first wiring may be introduced into the first travel drive motor 231 through each hollow of the elevating drive shaft 101 and the 1_1 drive shaft to be sealed from the inner space of the vacuum chamber, and the second wiring may be introduced into the second travel drive motor through each hollow of the elevating drive shaft 101 and the 2_1 drive shaft to be sealed from the inner space of the vacuum chamber. On the other hand, the first wiring and the second wiring may be branched from the elevating drive shaft 101 through the wiring hole formed in the travel arm platform 210 to the first travel arm portion 220 and the second travel arm portion 250, respectively.

[0109] Next, a substrate transfer robot 2000 corresponding to the walking robot 1000 according to an embodiment of the present invention will be described below.

[0110] See also Figure 8a and Figure 8bThe substrate transfer robot 2000 may include: a transfer arm platform 2100, which is combined with the transfer robot coupling part 280 of the walking robot 1000; and a first transfer arm 2200 and a second transfer arm 2300, which are combined with the transfer arm platform 2100. The first transfer arm 2200 and the second transfer arm 2300 may be respectively combined with a first end effector 2400 and a second end effector for supporting the substrate.

[0111] Thus, the substrate transfer robot 2000 walks in the vacuum chamber to be positioned at a specific position by operating the first walking arm 220 and the second walking arm 250 of the walking robot 1000, or is also positioned at a specific position by the rotational movement of the lifting part 100 of the walking robot 1000, and in a state where the first end effector 2400 or the second end effector 2500 is positioned at the loading or unloading position of the substrate by the up and down movement of the lifting part 100, the first end effector 2400 or the second end effector 2500 can load or unload the substrate by operating the first walking arm 220 or the second walking arm 250.

[0112] First, see Figure 9a and Figure 9b The transport arm platform 2100 may include a 2_1st coupling hole 2110 formed in the 2nd central region, a 2_2nd coupling hole 2120 formed in the 3rd front region, and a 2_3rd coupling hole 2130 formed in the 3rd other front region. The transport arm platform 2100 may have a similar structure to the walking arm platform 210 of the walking robot 1000.

[0113] The 2_1st combining hole 2110 can be divided into a 2_1st upper space and a 2_1st lower space by a 2_1st locking member having a 2_1st through hole corresponding to the hollow of the rotating driving shaft 281 of the rotating driving motor of the conveying robot combining part 280 formed in the 3rd central area, and the 2_1st upper space is sealed by the 2_1st cover.

[0114] Furthermore, the 2_2nd combining hole 2120 may be divided into a 2_2nd upper space and a 2_2nd lower space by a 2_2nd locking member having a 2_2nd through hole formed in the 3_2nd front end region, and the 2_2nd lower space may be sealed by a 2_2nd cover.

[0115] In addition, the 2_3rd combining hole 2130 may be divided into a 2_3rd upper space and a 2_3rd lower space by a 2_3rd locking member having a 2_3rd through hole formed in the 3rd other front end region, and the 2_3rd lower space may be sealed by a 2_3rd cover.

[0116] Furthermore, in the transfer arm platform 2100, the link connector 2190 including the 1_1 blade 2191 and the 2_1 blade 2192 for link coupling may be fixedly coupled to the front area. At this time, the front may be the direction in which the process chamber is located when the substrate transfer robot 2000 is positioned to transfer the substrate to the process chamber coupled to the vacuum chamber.

[0117] In addition, the transfer arm platform 2100 can be coupled to the walking robot 1000, specifically, the rotation drive shaft 281 of the rotation drive motor of the walking robot 1000 can be introduced into the 2_1 lower space of the 2_1 coupling hole 2110, so that the rotation drive shaft 281 is fixedly coupled to the 2_1 clamping piece. At this time, when the rotation drive shaft 281 is fixedly coupled to the 2_1 clamping piece, the sealing performance of the fixed coupling area can be improved by adding a sealing member such as an O-ring or a gasket. The structure of adding a sealing member such as an O-ring or a gasket can also be applied to other coupling parts described later, so it will not be repeated in the following description.

[0118] Thus, the hollow external environment of the rotation driving shaft 281 can be sealed from the vacuum environment inside the vacuum chamber at the 2_1st combining hole 2110.

[0119] On the other hand, a wiring hole for introducing the wiring introduced through the hollow of the rotation driving shaft 281 of the walking robot 1000 into the first and second conveying arm parts 2200 and 2300 may be formed in the conveying arm platform 2100 .

[0120] That is, a 3_1 wiring hole h110 and a 3_2 wiring hole h120 for connecting the 2_1 upper space respectively can be formed on one side of the conveying arm platform 2100 body, a 4_1 wiring hole h210 for connecting the 2_2 lower space can be formed on one side of the conveying arm platform 2100 body, and a 4_2 wiring hole h220 for connecting the 2_3 lower space can be formed on one side of the conveying arm platform 2100 body.

[0121] In addition, in order to seal the wiring holes, a third sealing cover 2170 and a fourth sealing cover 2180 may be provided. The third sealing cover 2170 seals the 3_1 wiring hole h110 and the 4_1 wiring hole h210 on one side of the conveying arm platform 2100 body, and the fourth sealing cover 2180 seals the 3_2 wiring hole h120 and the 4_2 wiring hole h220 on one side of the conveying arm platform 2100 body.

[0122] In addition, wiring holes may be formed inside the transport arm platform 2100 , and the wiring holes are used to guide the wiring introduced through the rotation drive shaft 281 of the walking robot 1000 into the first transport arm 2200 and the second transport arm 2300 .

[0123] That is, by forming the 3rd wiring hole connecting the 2_1st upper space with the 2_2nd lower space 212_2 and the 4th wiring hole connecting the 2_1st upper space with the 2_3rd lower space inside the transfer arm platform 2100, the inside of the transfer arm platform 2100 can be sealed without a separate seal.

[0124] Next, the 1_1st transfer link arm 2210 of the 1st transfer arm unit 2200 may be coupled to the 2_2nd coupling hole 212 of the transfer arm platform 2100 , and the 2_1st transfer link arm 2310 of the second transfer arm unit 2300 may be coupled to the 2_3rd coupling hole 2130 of the transfer arm platform 2100 .

[0125] At this time, see Fig.10 The 1_1 walking link arm 230 of the first walking arm portion 220 has a sealed internal space, in which a first walking drive motor 231 and a first reducer 232 that works in conjunction with the first walking drive motor 231 to reduce the rotation speed to 1 / 2 can be provided.

[0126] In addition, the 3_1st driving shaft 2213 with a hollow formed in linkage with the 3_1st speed reducer 2212 and the 3_1st output shaft 2214 with linkage with the 3_1st driving shaft 2213 can be sealed and arranged at the 3_1st front end region of the 1_1st transmission link arm 2210, and the 3_2nd driving shaft 2216 with a hollow formed in linkage with the 1st transmission drive motor 2211 and the 3_2nd output shaft 2217 with linkage with the 3_2nd driving shaft 2216 can be sealed and arranged at the 3_1st other front end region of the 1_1st transmission link arm 2210. At this time, the linkage between the 1st transmission drive motor 2211 and the 3_1st speed reducer 2212, the linkage between the 3_1st speed reducer 2212 and the 3_1st driving shaft 2213, and the linkage between the 1st transmission drive motor 2211 and the 3_2nd driving shaft 2216 can be respectively performed by pulley methods, but the present invention is not limited thereto, and various methods for transmitting rotational force, such as a gear method, etc., can be adopted. In addition, the 3_1st drive shaft 2213 and the 3_1st output shaft 2214, the 3_2nd drive shaft 2216 and the 3_2nd output shaft 2217 may also be respectively formed as reducers having the same reduction ratio. In addition, the 3_1st output shaft 2214 and the 3_2nd output shaft 2217 may rotate in opposite directions.

[0127] Furthermore, the 3_1st output shaft 2214 disposed in the 3_1st front end region of the 1_1st traveling link arm 230 of the 1st conveying arm portion 2200 may be introduced into the 2_2nd upper space of the 2_2nd coupling hole 2120 of the conveying arm platform 2100 and fixedly coupled to the 2_2nd locking piece.

[0128] At this time, the 2_1st connecting member 2215 can be used to combine the 3_1st output shaft 2214 and the 2_2nd fixing member. The 2_1st connecting member 2215 is a tubular shaft, and its length extends the distance between the 3_1st output shaft 2214 and the 2_2nd fixing member at the combining position of the conveying arm platform 2100 and the 1_1st conveying link arm 2210. The two ends of the 2_1st connecting member 2215 can be fixedly combined to the 3_1st output shaft 2214 and the 2_2nd fixing member respectively.

[0129] Furthermore, the 3_2 th front end region of the 1_2 th conveying link arm 2220 may be fixedly coupled to the 3_2 th output shaft 2217 of the 1_1 th conveying link arm 2210 of the first conveying arm portion 2200 .

[0130] At this time, the first fixed coupling shaft 2218 can be used for coupling the 3_2 output shaft 2217 and the 3_2 front end area. The first fixed coupling shaft 2218 is a tubular shaft, and its length extends the distance between the coupling area of ​​the 3_2 output shaft 2217 and the 3_2 front end area at the coupling position of the 1_1 transmission link arm 2210 and the 1_2 transmission link arm 2220. The two ends of the first fixed coupling shaft 2218 can be fixedly coupled to the coupling area of ​​the 3_2 output shaft 2217 and the 3_2 front end area, respectively.

[0131] In addition, the first common link arm 2230 can be disposed at a junction area between the 3_2 output shaft 2217 and the 3_2 front end area.

[0132] That is, see Fig.11 The 4th central area of ​​the 1st common link arm 2230 is rotatably coupled to the 1st fixed coupling shaft 2218 coupling the 3_2nd output shaft 2217 with the 3_2nd front end area.

[0133] Furthermore, the first conveying arm portion 2200 may include a 1_1 auxiliary link arm 2240, the 1_1 auxiliary link arm 2240 is parallel to the 1_1 conveying link arm 2210, a 3_4 front end region rotatably coupled to the 1_1 blade 2191 of the link connector 2190 of the conveying arm platform 2100, and a 3_4 another front end region rotatably coupled to the 3_3 front end region of the first common link arm 2230.

[0134] In addition, the first conveying arm portion 2200 may include a 1_2nd auxiliary link arm 2250 parallel to the 1_2nd conveying link arm 2220 , and a 3_5th front end region rotatably coupled to a 3_3rd front end region of the first common link arm 2230 .

[0135] In addition, the first conveying arm portion 2200 may include a 1_3rd auxiliary link arm 2260, the 1_3rd auxiliary link arm 2260 is parallel to the first common link arm 2230, the 3_6th front end region is rotatably coupled to the 3_5th other front end region of the 1_2nd auxiliary link arm 2250, and the 3_6th other front end region is rotatably coupled to the 3_2nd other front end region of the 1_2 conveying link arm 2220.

[0136] In addition, the first transfer arm 2200 may include a first end effector 2400 fixed to the 3_6th other front end region of the 1_3th auxiliary link arm 2260 to support the substrate.

[0137] The first transfer arm unit 2200 constructed as described above enables the first end effector 2400 to move forward and backward in a straight line through each transfer arm and the auxiliary arm according to the operation of the first transfer driving motor 2211 , thereby loading or unloading a substrate at a position set by the first end effector 2400 .

[0138] On the other hand, the second transfer arm 2300 may be configured similarly to the first transfer arm 2200 , and may be disposed on the transfer arm platform 2100 to be symmetrical with each other around a central area of ​​the transfer arm platform 2100 .

[0139] That is, the 2_1st conveying link arm 2310 of the second conveying arm unit 2300 has a sealed internal space, and the second conveying driving motor and the fourth speed reducer which works in conjunction with the second conveying driving motor to reduce the rotation speed to 1 / 2 may be provided in the sealed internal space.

[0140] In addition, the 4_1st driving shaft with a hollow structure linked to the 4th speed reducer and the 4_1st output shaft linked to the 4_1st driving shaft can be sealed and arranged at the 4_1st front end area of ​​the 2_1st transmission link arm 2310, and the 4_2nd driving shaft with a hollow structure linked to the 2nd transmission drive motor and the 4_2nd output shaft linked to the 4_2nd driving shaft can be sealed and arranged at the 4_1st other front end area of ​​the 2_1st transmission link arm 2310. At this time, the linkage between the 2nd transmission drive motor and the 4th speed reducer, the linkage between the 4th speed reducer and the 4_1st driving shaft, and the linkage between the 2nd transmission drive motor and the 4_2nd driving shaft can be respectively performed by pulley methods, but the present invention is not limited thereto, and various methods for transmitting rotational force, such as a gear method, etc. can be adopted. In addition, the 4_1st driving shaft and the 4_1st output shaft, the 4_2nd driving shaft and the 4_2nd output shaft can also be respectively formed as speed reducers with the same reduction ratio. In addition, the rotation directions of the 4_1st output shaft and the 4_2nd output shaft may be opposite to each other.

[0141] Furthermore, the 4_1st output shaft provided in the 4_1st front end region of the 2_1st transfer link arm 2310 of the 2nd transfer arm portion 2300 may be introduced into the 2_3rd upper space of the 2_3rd coupling hole 2130 of the transfer arm platform 2100 and fixedly coupled to the 2_3rd locking piece.

[0142] At this time, the 2_2 connecting member can be used to combine the 4_1 output shaft and the 2_3 stopping member. The 2_2 connecting member is a tubular shaft, and its length extends the distance between the 4_1 output shaft and the 2_3 stopping member at the combining position of the conveying arm platform 2100 and the 2_1 conveying link arm 2310. The two ends of the 2_2 connecting member can be fixedly combined to the 4_1 output shaft and the 2_3 stopping member respectively.

[0143] Also, the 4_2 th front end region of the 2_2 th conveying link arm 2320 may be fixedly coupled to the 4_2 th output shaft of the 2_1 th conveying link arm 2310 of the second conveying arm portion 2300 .

[0144] In addition, the second fixed coupling shaft can be used for coupling the 4_2 output shaft and the 4_2 front end region. The second fixed coupling shaft is a tubular shaft, and its length extends the distance between the coupling area of ​​the 4_2 output shaft and the 4_2 front end region at the coupling position of the 2_1 transmission link arm 2310 and the 2_2 transmission link arm 2320. The two ends of the second fixed coupling shaft can be fixedly coupled to the coupling area of ​​the 4_2 output shaft and the 4_2 front end region, respectively.

[0145] In addition, the second common link arm 2330 may be disposed at a junction area between the 4_2nd output shaft and the 4_2nd front end area.

[0146] That is, the fifth central region of the second common link arm 2330 is rotatably coupled to the second fixed coupling shaft coupling the 4_2nd output shaft and the 4_2nd front end region.

[0147] Furthermore, the second conveying arm portion 2300 may include a 2_1st auxiliary link arm 2340, the 2_1st auxiliary link arm 2340 is parallel to the 2_1st conveying link arm 2310, a 4_4th front end region is rotatably coupled to the 1_2 blade 2192 of the link connector 2190 of the conveying arm platform 2100, and a 4_4th other front end region is rotatably coupled to the 4_3rd front end region of the second common link arm 2330.

[0148] In addition, the second conveying arm portion 2300 may include a 2_2nd auxiliary link arm 2350 parallel to the 2_2nd conveying link arm 2320 , and the 4_5th front end region is rotatably coupled to the 4_3rd front end region of the second common link arm 2330 .

[0149] In addition, the second conveying arm portion 2300 may include a 2_3rd auxiliary link arm 2360, the 2_3rd auxiliary link arm 2360 is parallel to the second common link arm 2330, the 4_6th front end region is rotatably coupled to the 4_5th other front end region of the 2_2nd auxiliary link arm 2350, and the 4_6th other front end region is rotatably coupled to the 4_2nd other front end region of the 2_2nd conveying link arm 2320.

[0150] In addition, the 2nd transfer arm 2300 may include a 2nd end effector 2500 fixed to the 4th_6th other front end region of the 2nd_3rd auxiliary link arm 2360 to support the substrate.

[0151] The second transfer arm unit 2300 constructed as described above enables the second end effector 2500 to move forward and backward in a straight line through each transfer arm and the auxiliary arm according to the operation of the second transfer driving motor, and thus can load or unload a substrate at a position set by the second end effector 2500 .

[0152] At this time, the 3_1st other front end region of the 1_1st transfer link arm 2210 of the 1st transfer arm unit 2200 and the 4_1st other front end region of the 2_1st transfer link arm 2310 of the second transfer arm unit 2300 may be positioned identically in the front region or rear region of the transfer arm platform 2100 .

[0153] In addition, differently from this, the 3_1 another front end area of ​​the 1_1 transfer link arm 2210 of the 1st transfer arm unit 2200 can be positioned in the front area of ​​the transfer arm platform 2100, and the 4_1 another front end area of ​​the 2_1 transfer link arm 2310 of the second transfer arm unit 2300 can be positioned in the rear area of ​​the transfer arm platform 2100.

[0154] Furthermore, the height of the second fixed coupling axis connecting the 2_1 transmission link arm 2310 and the 2_2 transmission link arm 2320 of the second transmission arm 2300 can be higher than the height of the first fixed coupling axis 2218 connecting the 1_1 transmission link arm 2210 and the 1_2 transmission link arm 2220 of the first transmission arm 2200, so that the first end effector 2400 of the first transmission arm 2200 and the second end effector 2500 of the second transmission arm 2300 are located at different heights on the same path.

[0155] In addition, the second common link arm 2330, which is rotatably coupled to the second fixed coupling shaft connecting the 2_1 transmission link arm 2310 of the first transmission arm portion 2200 with the 2_2 transmission link arm 2320, includes a hollow tube corresponding to the height of the second fixed coupling shaft and formed with a hollow for introducing the second fixed coupling shaft, the 2_1 blade including the 4_3 front end area is fixedly coupled to the lower area of ​​the hollow tube, the 2_2 blade including the 4_3 other front end area is fixedly coupled to the upper area of ​​the hollow tube, and the 4_3 front end area and the 4_3 other front end area can be formed to be symmetrical with respect to the central axis of the hollow tube.

[0156] In addition, a third wiring for operating the first transport driving motor 2211 and a fourth wiring for operating the second transport driving motor may be provided in the sealed space inside the substrate transport robot 2000 .

[0157] At this time, the third wiring can be introduced into the first walking driving motor 231 through the hollow of each of the lifting driving shaft 101 of the lifting part 100, the 1_1 driving shaft 233 of the walking robot 1000, the 1_2 driving shaft 236, the rotating driving shaft 281, and the 3_1 driving shaft 2213 of the substrate conveying robot 2000 to be sealed with the internal space of the vacuum chamber, and the second wiring can be introduced into the second walking driving motor through the hollow of each of the lifting driving shaft 101 of the lifting part 100, the 2_1 driving shaft of the walking robot 1000, the 2_2 driving shaft, the rotating driving shaft 281, and the 4_1 driving shaft of the substrate conveying robot 2000 to be sealed with the internal space of the vacuum chamber. On the other hand, the third wiring and the fourth wiring can be branched from the rotating driving shaft 281 to the first conveying arm 2200 and the second conveying arm 2300 through the wiring hole formed in the conveying arm platform 2100.

[0158] On the other hand, although the characteristic configuration of the substrate transfer robot supported by the walking robot 1000 has been described above, the present invention is not limited to the above-mentioned substrate transfer robot, and any type of substrate transfer robot that can transfer substrates within a vacuum chamber can be combined with the walking robot to perform walking of the substrate transfer robot within the vacuum chamber and transfer of substrates by the substrate transfer robot within the vacuum chamber.

[0159] Furthermore, although the transfer of a substrate has been described above, the same may be applied to the transfer of a mask required for performing a process on the substrate.

[0160] In the above, the present invention has been described with reference to specific matters such as specific components and limited embodiments and drawings, but this only helps to more comprehensively understand the present invention, and the present invention is not limited to the above embodiments. Ordinary technicians in the field to which the present invention belongs can design various modifications and changes based on these descriptions.

[0161] Therefore, the spirit of the present invention should not be limited to the above embodiments. Except for the following claims, all modifications equivalent or equivalent to these claims should be included in the spirit of the present invention.

Claims

1. A walking robot for making a substrate transfer robot walk inside a vacuum chamber, characterized in that: include: A lifting part, which is located in the lower area of ​​the outer side of the shell that seals the inside of the vacuum chamber, and the upper end is sealed and combined with the vacuum chamber through hole formed in the lower area of ​​the shell, so that the lifting drive shaft formed with a hollow part moves up and down in the vacuum chamber through hole; A walking arm platform, comprising: a 1_1 combining hole, a 1_1 fixing piece having a 1_1 through hole corresponding to the hollow of the lifting drive shaft formed in the 1_1 central region, which is divided into a 1_1 upper space and a 1_1 lower space, and the 1_1 upper space is sealed by a 1_1 cover; a 1_2 combining hole, a 1_2 fixing piece having a 1_2 through hole formed in the 1_1 front end region, which is divided into a 1_2 upper space and a 1_2 lower space, and the 1_2 lower space is sealed by the 1_2 cover; and a 1_3 combining hole, a 1_3 fixing piece having a 1_3 through hole formed in the 1_2 other front end region, which is divided into a 1_3 upper space and a 1_3 lower space, and the 1_3 lower space is sealed by the 1_3 cover, and the lifting drive shaft introduced into the 1_1 lower space is fixedly combined to the 1_1 fixing piece; The first walking arm part comprises: a 1_1 walking link arm, which is provided with a 1_1 walking drive motor and a 1_1 reducer which is linked with the 1_1 walking drive motor to reduce the rotation speed to 1 / 2 in a sealed internal space, a 1_1 driving shaft which is linked with the 1_1 reducer and is formed with a hollow part, and a 1_1 output shaft which is linked with the 1_1 driving shaft is sealed and arranged at a 1_1 front end area, a 1_2 driving shaft which is linked with the 1_1 walking drive motor and is formed with a hollow part, and a 1_2 output shaft which is linked with the 1_2 driving shaft is sealed and arranged at another front end area of ​​the 1_1, the 1_1 output shaft is fixedly combined with the 1_1 connecting piece, the 1_1 connecting piece is introduced into the 1_2 upper space of the walking arm platform and is fixedly combined with the 1_2 locking piece; and a 1_2 walking link arm, whose 1_2 front end area is fixedly combined with the 1_2 output shaft of the 1_1 walking link arm; The second walking arm part comprises: a 2_1 walking link arm, which is provided with a second walking drive motor and a second reducer linked with the second walking drive motor to reduce the rotation speed to 1 / 2 in a sealed internal space, a 2_1 driving shaft linked with the second reducer and having a hollow structure, and a 2_1 output shaft linked with the 2_1 driving shaft are sealed and arranged at a front end area of ​​the 2_1, a 2_2 driving shaft linked with the second walking drive motor and having a hollow structure, and a 2_2 output shaft linked with the 2_2 driving shaft are sealed and arranged at another front end area of ​​the 2_1, the 2_1 output shaft is fixedly coupled to the 1_2 connecting piece, the 1_2 connecting piece is introduced into the 1_3 upper space of the walking arm platform and fixedly coupled to the 1_3 locking piece; and a 2_2 walking link arm, whose 2_2 front end area is fixedly coupled to the 2_2 output shaft of the 2_1 walking link arm; and The conveying robot coupling part has a 2nd front end region rotatably coupled to the 1st_2nd other front end region of the 1st_2 walking link arm, and a 2nd other front end region rotatably coupled to the 2nd_2nd other front end region of the 2nd_2 walking link arm, and a hollow rotating drive shaft seal is formed in the 2nd central region to be coupled to a rotating drive motor of a substrate conveying robot for conveying substrates.

2. The walking robot according to claim 1, characterized in that: The transfer robot combination also includes: A flexible member, in any one of the front end regions from the 2nd front end region to the 2nd other front end region, changes the position at which the 1_2th other front end region of the 1_2th walking link arm is rotatably coupled to any one of the positions at which the 2_2th other front end region of the 2_2nd walking link arm is rotatably coupled within the conveying robot coupling portion in response to an external force.

3. The walking robot according to claim 2, characterized in that: The compliant member comprises: a sliding member that slides in the longitudinal direction of the conveying robot coupling portion within any one of the 2nd front end region to the 2nd other front end region, and is rotatably coupled to any one of the 1st_2nd other front end region of the 1_2nd walking link arm to the 2_2nd other front end region of the 2_2nd walking link arm; and The elastic members are respectively formed on the sliding paths on both sides of the sliding member inside any one of the front end regions from the second first front end region to the second other front end region.

4. The walking robot according to claim 1, characterized in that: The walking arm platform also includes: a first wiring hole connecting the 1_1st upper space and the 1_2nd lower space; and The second wiring hole connects the 1_1st upper space and the 1_3rd lower space.

5. The walking robot according to claim 1, characterized in that: The walking arm platform also includes: The 1_1 wiring hole and the 1_2 wiring hole are respectively connected to the 1_1 upper space on one side of the main body of the walking arm platform; The 2_1 wiring hole is connected to the 1_2 lower space on one side of the main body of the walking arm platform; A 2_2 wiring hole connected to the 1_3 lower space on one side of the main body of the walking arm platform; a first sealing cover, which seals the first wiring hole and the second wiring hole on one side of the main body of the walking arm platform; and The second sealing cover seals the 1_2 wiring hole and the 2_2 wiring hole on one side of the main body of the walking arm platform.

6. The walking robot according to claim 1, characterized in that: The lifting unit performs an operation of rotating the lifting drive shaft in addition to moving the lifting drive shaft up and down.

7. The walking robot according to claim 1, characterized in that: It also includes a first wiring for operating the first travel drive motor and a second wiring for operating the second travel drive motor. The first wiring is introduced into the first travel drive motor through the hollow of the lifting drive shaft and the 1_1 drive shaft to be sealed in the internal space of the vacuum chamber. The second wiring is introduced into the second travel drive motor through the hollows of the lifting drive shaft and the 2_1 drive shaft, respectively, so as to be sealed in the internal space of the vacuum chamber.

8. The walking robot according to claim 1, characterized in that: When the position where the longitudinal center line of the walking arm platform intersects with the longitudinal center line of the 1_1 walking link arm is called the 1_1 contact point, the position where the longitudinal center line of the walking arm platform intersects with the longitudinal center line of the 2_1 walking link arm is called the 1_2 contact point, the position where the longitudinal center line of the 1_1 walking link arm intersects with the longitudinal center line of the 1_2 walking link arm is called the 2_1 contact point, the position where the longitudinal center line of the 2_1 walking link arm intersects with the longitudinal center line of the 2_2 walking link arm is called the 2_2 contact point, the position where the longitudinal center line of the 1_2 walking link arm intersects with the longitudinal center line of the conveying robot joint is called the 3_1 contact point, and the position where the longitudinal center line of the 2_2 walking link arm intersects with the longitudinal center line of the conveying robot joint is called the 3_2 contact point, making the distance between the 1_1st contact point and the 1_2nd contact point and the distance between the 3_1st contact point and the 3_2nd contact point equal, making the distance between the 1_1st contact point and the 2_1st contact point, the distance between the 2_1st contact point and the 3_1st contact point, the distance between the 1_2nd contact point and the 2_2nd contact point, and the distance between the 2_2nd contact point and the 3_2nd contact point equal, The absolute value of the angle between the walking arm platform and the 1_1 walking link arm at the 1_1 contact point is equal to the absolute value of the angle formed by the walking arm platform and the 2_1 walking link arm at the 1_2 contact point, the absolute value of the angle formed by the 1_1 walking link arm and the 1_2 walking link arm at the 2_1 contact point is equal to the absolute value of the angle between the 2_1 walking link arm and the 2_2 walking link arm at the 2_2 contact point, and the absolute value of the angle formed by the 1_2 walking link arm and the conveying robot connection part at the 3_1 contact point is equal to the absolute value of the angle formed by the 2_2 walking link arm and the conveying robot connection part at the 3_2 contact point.

9. The walking robot according to claim 1, characterized in that: The first travel drive motor and the second travel drive motor operate in the same manner, but rotate in opposite directions.

10. The walking robot according to claim 1, characterized in that: The substrate transfer robot comprises: The conveying arm platform is formed with: a 2_1 combining hole, which is divided into a 2_1 upper space and a 2_1 lower space by a 2_1 fixing piece having a 2_1 through hole corresponding to the hollow of the rotating drive shaft of the rotating drive motor of the conveying robot combining part in the 3rd central region, and the 2_1 upper space is sealed by a 2_1 cover; a 2_2 combining hole, which is divided into a 2_2 upper space and a 2_2 lower space by a 2_2 fixing piece having a 2_2 through hole in the 3rd front end region, and the 2_2 lower space is sealed by the 2_2 cover; and a 2_3 combining hole, The 2_3 clamping piece having the 2_3 through hole formed in the 3rd other front end area is divided into the 2_3 upper space and the 2_3 lower space, and the 2_3 lower space is sealed by the 2_3 cover, and the connecting rod connecting piece including the 1_1 blade and the 1_2 blade for connecting rod connection is fixedly connected to the front area, and the front is the direction of the process chamber when the substrate transfer robot is configured in order to transfer the substrate to the process chamber combined with the vacuum chamber, and the rotating drive shaft of the rotating drive motor introduced into the 2_1 lower space is fixedly connected to the 2_1 clamping piece; The first transmission arm part comprises: a first transmission link arm, which is provided with a first transmission drive motor and a third reducer which is linked with the first transmission drive motor to reduce the rotation speed to 1 / 2 in a sealed internal space, a third drive shaft which is linked with the third reducer and is formed with a hollow third drive shaft, and a third output shaft which is linked with the third drive shaft and is sealed and arranged in a front end area of ​​the third drive shaft, a third drive shaft which is linked with the first transmission drive motor and is formed with a hollow third drive shaft, and a third output shaft which is linked with the third drive shaft and is sealed and arranged in a front end area of ​​the third drive shaft, The 3_2 output shaft seal of the movable shaft linkage is arranged at the other front end area of ​​the 3_1, and the 3_1 output shaft is fixedly connected to the 2_1 connecting piece, and the 2_1 connecting piece is introduced into the 2_2 upper space of the transmission arm platform and fixedly connected to the 2_2 locking piece; the 1_2 transmission link arm, its 3_2 front end area is fixedly connected to the 3_2 output shaft of the 1_1 transmission link arm through the 1st fixed connection shaft; the 1st common link arm, its 4th central area The first auxiliary link arm is parallel to the first transmission link arm, and the 3_4 front end region is rotatably coupled to the 1_1 blade of the link connector of the transmission arm platform, and the 3_4 front end region is rotatably coupled to the 3_3 front end region of the first common link arm; the 1_2 auxiliary link arm is parallel to the 1_2 transmission link arm, and the 3_5 front end region is rotatably coupled to the 1_1 blade of the link connector of the transmission arm platform, and the 3_4 front end region is rotatably coupled to the 3_3 front end region of the first common link arm; a 3_3rd other front end region of the common link arm; a 1_3rd auxiliary link arm, which is parallel to the 1st common link arm, a 3_6th front end region rotatably coupled to the 3_5th other front end region of the 1_2nd auxiliary link arm, and a 3_6th other front end region rotatably coupled to the 3_2nd other front end region of the 1_2 transfer link arm; and a 1st end effector, which is fixed to the 3_6th other front end region of the 1_3rd auxiliary link arm to support the substrate; and The second transmission arm part includes: a 2_1 transmission link arm, which is provided with a 2_2 transmission drive motor and a 4_3 reducer which is linked with the 2_2 transmission drive motor to reduce the rotation speed to 1 / 2 in a sealed internal space, a 4_1 drive shaft which is linked with the 4_3 reducer and has a hollow structure, and a 4_1 output shaft which is linked with the 4_1 drive shaft and is sealed and arranged in a 4_1 front end area, a 4_2 drive shaft which is linked with the 2_2 transmission drive motor and has a hollow structure, and a 4_3 output shaft which is linked with the 4_3 drive shaft and has a hollow structure. The 4_2 output shaft seal of the moving shaft linkage is arranged at the other front end area of ​​the 4_1, the 4_1 output shaft is fixedly connected to the 2_2 connecting piece, the 2_2 connecting piece is introduced into the 2_3 upper space of the transmission arm platform and fixedly connected to the 2_3 locking piece; the 2_2 transmission link arm, its 4_2 front end area is fixedly connected to the 4_2 output shaft of the 2_1 transmission link arm through the second fixed connection shaft; the second common link arm, its 5 central area The first front region of the 4_4th is rotatably coupled to the first front region of the 4_3rd front region of the second common link arm; the second second auxiliary link arm is parallel to the second second transmission link arm, the first front region of the 4_5th is rotatably coupled to the first front region of the 4_6th front region of the 2_7th common link arm; the second second auxiliary link arm is parallel to the second second transmission link arm, the first front region of the 4_6th front region of the 2_8th common link arm is rotatably coupled to the first front region of the 4_7th front region of the 2_9th common link arm; the second second auxiliary link arm is parallel to the second second transmission link arm, the first front region of the 4_7th front region of the 2_9th common link arm is rotatably coupled to the first front region of the 4_8th front region of the 2_10th common link arm; the second second auxiliary link arm is parallel to the second second transmission link arm, the first front region of the 4_8th front region of the 4_9th front region of the 2_10th common link arm is rotatably coupled to the first front region of the 4_10th common link arm; the second second auxiliary link arm is parallel to the second second transmission link arm, the first front region of the 4_10th ... The 4_3th other front end region of the 2nd common link arm; the 2_3rd auxiliary link arm, which is parallel to the 2nd common link arm, the 4_6th front end region rotatably coupled to the 4_5th other front end region of the 2_2nd auxiliary link arm, the 4_6th other front end region rotatably coupled to the 4_2th other front end region of the 2_2nd transfer link arm; and the 2nd end effector, which is fixed to the 4_6th other front end region of the 2_3rd auxiliary link arm to support the substrate.

11. The walking robot according to claim 10, characterized in that: The 3_1st other front end area of ​​the 1_1st transport link arm of the 1st transport arm portion is located in the front area of ​​the transport arm platform, and the 4_1st other front end area of ​​the 2_1st transport link arm of the 2nd transport arm portion is located in the rear area of ​​the transport arm platform.

12. The walking robot according to claim 10, characterized in that: The height of the second fixed coupling shaft is set to be higher than the height of the first fixed coupling shaft, so that the first end effector and the second end effector are located at different heights on the same path.

13. The walking robot according to claim 10, characterized in that: The second common link arm includes a hollow tube having a height corresponding to the second fixed coupling axis and having a hollow portion for introducing the second fixed coupling axis, the 2_1 blade including the 4_3 first front end area is fixedly coupled to the lower area of ​​the hollow tube, and the 2_2 blade including the 4_3 other front end area is fixedly coupled to the upper area of ​​the hollow tube, and when viewed from the central axis of the hollow tube, the 4_3 first front end area and the 4_3 other front end area are symmetrical with respect to each side of the central axis of the hollow tube.

14. The walking robot according to claim 10, characterized in that: The transmission arm platform also includes: a third wiring hole connecting the 2_1st upper space and the 2_2nd lower space; and The fourth wiring hole connects the 2_1st upper space and the 2_3rd lower space.

15. The walking robot according to claim 10, characterized in that: The transmission arm platform also includes: The 3_1st wiring hole and the 3_2nd wiring hole are respectively connected to the 2_1st upper space on one side of the main body of the conveying arm platform; A 4_1 wiring hole connected to the 2_2 lower space at one side of the main body of the transfer arm platform; A 4_2 wiring hole connected to the 2_3 lower space at one side of the main body of the conveying arm platform; a third sealing cover, which seals the 3_1 wiring hole and the 4_1 wiring hole on one side of the main body of the transfer arm platform; and The 4th sealing cover seals the 3_2 wiring hole and the 4_2 wiring hole on one side of the main body of the transfer arm platform.

16. The walking robot according to claim 10, characterized in that: The invention also includes a third wiring for operating the first transmission drive motor and a fourth wiring for operating the second transmission drive motor. The third wiring is introduced into the first conveying driving motor through the hollows of the lifting driving shaft, the 1_1 driving shaft, the 1_2 driving shaft, the rotating driving shaft and the 3_1 driving shaft, respectively, so that the internal space of the vacuum chamber is sealed. The fourth wiring is introduced into the second conveying driving motor through the hollows of the elevating driving shaft, the 2_1 driving shaft, the 2_2 driving shaft, the rotating driving shaft, and the 4_1 driving shaft, respectively, so that the inner space of the vacuum chamber is sealed.

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