A remote plasma generator

Abstract

The invention discloses a remote plasma generator, comprising: an ionization cavity, each of which is provided with an air cavity and two cooling water channels, and each of the two cooling water channels is provided with a water inlet and a water outlet; a heat dissipation device, comprising a heat sink, a water inlet pipe, a first water outlet pipe, a second water outlet pipe and a water return pipe, a water sink flow channel, a water inlet and a water outlet are provided in the heat sink, and the heat sink is provided with two heat sinks, namely, a first heat sink and a second heat sink, the water inlet pipe is connected to the water inlet of the heat sink, the first water outlet pipe is connected to the water outlet of the first heat sink and the water inlet of one cooling water channel; the second water outlet pipe is connected to the water outlet of the second heat sink and the water inlet of another cooling water channel; the water return pipe is connected to the water outlet of the two cooling water channels. The remote plasma generator uses an external heat dissipation device to cooperate with the cooling water channel in the ionization cavity, and the heat is exchanged synchronously inside and outside, thereby improving the heat dissipation efficiency, and at the same time extending the service life of the cavity and the sealing component, thereby improving the production efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of plasma generators, and in particular to a remote plasma generator. Background Art

[0002] In the current semiconductor production field, remote plasma generators use plasma sources to synthesize plasma outside the reaction zone, and introduce plasma into the reaction zone under the action of airflow, electric field, magnetic field, etc., which are often used for surface modification, chamber cleaning, thin film etching and plasma-assisted deposition. Specifically, it is a remote plasma source dissociation chamber composed of a chamber, an air inlet, an air outlet, a magnetic core, and an ignition port. The function of a remote plasma generator is to clean the process chamber of a pan-semiconductor device at the atomic level. Fluorine-containing compounds are used as raw material gases of fluorine to enter the chamber, and under the action of alternating electric and magnetic fields, the raw material gases will be dissociated and release fluorine free radicals. Active ions F- enter the process chamber and react with polluted materials in the process chamber, such as silicon oxide, silicon nitride, etc., and the generated gasified new substances are pumped out of the process chamber by a vacuum pump, thereby ensuring the cleanliness of the process chamber.

[0003] When the remote plasma generator ionizes the gas, it will continuously generate high temperature, which needs to be dissipated in real time. However, the existing cooling devices are mostly external cooling modules, but the heat dissipation efficiency is not high. The cavity and magnetic core components are prone to overheating, which seriously reduces the service life of the cavity and seals, and reduces production efficiency. Summary of the invention

[0004] The present application solves the problems of low heat dissipation efficiency and insufficient heat dissipation in the prior art by providing a remote plasma generator, thereby improving heat dissipation efficiency and production efficiency.

[0005] The present application embodiment provides a remote plasma generator, comprising:

[0006] An ionization chamber, wherein the ionization chamber is provided with an air cavity and two cooling water channels, the two cooling water channels are respectively arranged on both sides of the air cavity, and the two cooling water channels are both provided with a water inlet end and a water outlet end;

[0007] A magnetic core assembly, wherein the magnetic core assembly is mounted in the ionization chamber;

[0008] The heat dissipation device comprises a heat dissipation disk, a water inlet pipe, a first water outlet pipe, a second water outlet pipe and a return pipe, a water disk flow channel is opened in the heat dissipation disk, the heat dissipation disk is also provided with a water inlet and a water outlet, the water disk flow channel connects the water inlet and the water outlet, the heat dissipation disk is provided with two, namely the first heat dissipation disk and the second heat dissipation disk, the first heat dissipation disk and the second heat dissipation disk are respectively arranged on both sides of the ionization chamber, one end of the water inlet pipe is connected to the water inlet of the first heat dissipation disk and the second heat dissipation disk, and the other end is used to connect the water outlet port of the cooling water pump, one end of the first water outlet pipe is connected to the water outlet of the first heat dissipation disk, and the other end is connected to the water inlet end of one of the cooling water channels; one end of the second water outlet pipe is connected to the water outlet of the second heat dissipation disk, and the other end is connected to the water inlet end of another cooling water channel; one end of the return pipe is used to connect the water outlet ends of the two cooling water channels, and the other end is used to connect the return port of the cooling water pump.

[0009] The beneficial effect of the above embodiment is that the remote plasma generator uses an external heat dissipation device to cooperate with the cooling water channel in the ionization chamber to achieve synchronous heat exchange inside and outside, thereby improving the heat dissipation efficiency, extending the service life of the chamber and the seal, and improving production efficiency.

[0010] Based on the above embodiments, the present application can be further improved as follows:

[0011] In one embodiment of the present application, the ionization chamber comprises:

[0012] An air inlet, an air inlet seat is provided above the air inlet;

[0013] An air inlet end long cavity, the upper end of which is connected to the lower end of the air inlet;

[0014] The upper ends of the two short cavities are connected to the long cavity at the air inlet end through ceramic rings respectively;

[0015] A long cavity at the gas outlet end, the upper end of which is connected to the lower ends of the two short cavities through the ceramic rings;

[0016] An air outlet, the upper end of which is connected to the long cavity at the air outlet end;

[0017] The air inlet, the long cavity at the air inlet end, the short cavity, the long cavity at the air outlet end, and the air outlet are combined into a complete cavity, and the air cavity and the cooling water channel are respectively opened inside the complete cavity. The gas circulation channel and the cooling water channel of the cavity structure are both on the cavity, and the cooling water channel is distributed on the outside of the air cavity, which has higher heat conduction efficiency, thereby extending the service life of the cavity and the seal, and improving production efficiency. At the same time, the external additional heat dissipation device further improves the heat dissipation efficiency.

[0018] In one embodiment of the present application, two connecting pieces are further included, the upper ends of the two connecting pieces are respectively connected to the two side walls of the long cavity at the air inlet end, and the lower ends are respectively connected to the two side walls of the long cavity at the air outlet end. The long cavity at the air inlet end and the long cavity at the air outlet end are fastened together by the connecting pieces to ensure structural stability.

[0019] In one embodiment of the present application, the air cavity includes a first air cavity section located at the air inlet, a second air cavity section located at the long cavity at the air inlet end, a third air cavity section located at the short cavity, a fourth air cavity section located at the long cavity at the air outlet end, and a fifth air cavity section located at the air outlet, the first to fifth air cavity sections are connected in sequence, and the first air cavity section is also connected to the air inlet port of the air inlet seat.

[0020] In one embodiment of the present application, the cooling water channel includes a first water channel section located at the air inlet, a second water channel section located at the long cavity at the air inlet end, a third water channel section located at the short cavity, a fourth water channel section located at the long cavity at the air outlet end, and a fifth water channel section located at the air outlet, and the first to fifth water channel sections are connected in sequence, wherein the first water channel section is connected to the water outlet end, and the fifth water channel section is connected to the water inlet end. The temperature is highest during the ionization process at the air outlet, and the cooling water enters the air outlet cavity first. The gas passes through the cavity from top to bottom as a whole, and the cooling water passes through the cavity from bottom to top, thereby improving the heat exchange efficiency.

[0021] In one embodiment of the present application, two cooling water channels are provided, which are respectively provided on both sides of the air cavity. The cooling water channels on both sides exchange heat synchronously, further improving the heat exchange efficiency.

[0022] In one embodiment of the present application, the first and fifth water channel sections are each provided with two interconnected horizontal parallel sections; the second, third and fourth water channel sections are each provided with two channels, the second, third and fourth water channel sections on the same side are interconnected, and the third water channel section is provided with two vertical parallel sections. The cooling water channels are dispersed on the side wall of the cavity to expand the heat exchange area and improve the heat exchange efficiency.

[0023] In one embodiment of the present application, the heat dissipation device further includes an inlet and outlet water joint, and the inlet pipe and the return pipe are connected to the cooling water pump through the inlet and outlet water joint, which facilitates the adjustment of the pipeline direction, saves space, and makes the connection more stable.

[0024] In one embodiment of the present application, the heat sink is screwed to the core assembly housing. The core assembly is installed outside the ionization chamber and is a high-temperature component. The heat sink is directly installed close to the core assembly to facilitate heat dissipation.

[0025] In one of the embodiments of the present application, the heat sink includes a cover plate, a flow channel water sink and a sealing ring. The flow channel water sink is provided with the water sink flow channel, and the sealing ring is arranged along the inner wall of the water sink flow channel.

[0026] In one embodiment of the present application, the water pan flow channel includes a main flow channel and a plurality of auxiliary flow channels, the cross-sectional area of ​​the main flow channel is larger than the cross-sectional area of ​​the auxiliary flow channel, the main flow channel is S-shaped to connect the water inlet and the water outlet, the two ends of the auxiliary flow channel are respectively connected to the main flow channel, and the auxiliary flow channel does not overlap with the main flow channel. The main flow channel cooperates with the auxiliary flow channel to expand the heat exchange area as much as possible and improve the heat dissipation efficiency.

[0027] One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:

[0028] 1. The remote plasma generator uses an external heat dissipation device to cooperate with the cooling water channel in the ionization chamber, and the heat is exchanged synchronously inside and outside, which improves the heat dissipation efficiency, prolongs the service life of the chamber and seals, and improves production efficiency.

[0029] 2. The cooling water channels of the remote plasma generator are distributed on the outside of the air cavity, which has higher heat conduction efficiency, thereby improving production efficiency and service life;

[0030] 3. The cooling water channels of the remote plasma generator are dispersed on the side walls of the cavity, which expands the heat exchange area and improves the heat exchange efficiency.

[0031] 4. The main flow channel of the heat sink of the remote plasma generator cooperates with the auxiliary flow channel to expand the heat exchange area as much as possible and improve the heat dissipation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for the specific embodiments or the description of the prior art. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn according to the actual scale.

[0033] Figure 1 It is a schematic diagram of the structure of a remote plasma generator;

[0034] Figure 2 A schematic diagram of the explosion of a remote plasma generator;

[0035] Figure 3 is a schematic diagram of the three-dimensional structure of the ionization chamber;

[0036] Figure 4 It is a schematic diagram of the explosion structure of the ionization chamber;

[0037] Figure 5 It is a schematic diagram of the top view of the ionization chamber;

[0038] Figure 6 for Figure 5 A cross-sectional view along AA;

[0039] Figure 7 for Figure 5 Cross-sectional view along BB.

[0040] Figure 8 It is a schematic diagram of the exploded structure of the heat dissipation device;

[0041] Fig. 9 is a schematic diagram of the structure of the heat sink;

[0042] Fig.10 The structure of the water pan flow channel is shown in Figure 1. Figure 1 ;

[0043] Fig.11 The structure of the water pan flow channel is shown in Figure 1. Figure 2 .

[0044] Among them, 1. ionization chamber, 100. air inlet seat, 101. air inlet, 102. long cavity at the air inlet end, 103. short cavity, 104. long cavity at the air outlet end, 105. air outlet, 106. connector, 107. ceramic ring, 108. sealing ring, 109. water channel sealing member, 110. water outlet, 111. water inlet, 112. first air cavity section, 113. second air cavity section, 114. third air cavity section, 115. fourth air cavity section, 116. fifth air cavity section, 117. first water channel Section, 118. second water channel section, 119. third water channel section, 120. fourth water channel section, 121. fifth water channel section, 2. heat dissipation device, 201. heat dissipation plate, 2011. cover plate, 2012. flow channel water tray, 2013. sealing ring, 2014. water inlet, 2015. water outlet, 2016. main flow channel, 2017. auxiliary flow channel, 202. water inlet pipe, 203. first water outlet pipe, 204. second water outlet pipe, 205. return pipe, 206. inlet and outlet water joints, 3. magnetic core assembly. DETAILED DESCRIPTION

[0045] The present invention is further explained below in conjunction with specific implementation methods. It should be understood that these implementation methods are only used to illustrate the present invention and are not used to limit the scope of the present invention. After reading the present invention, various equivalent forms of modifications to the present invention by those skilled in the art all fall within the scope defined by the claims attached to this application.

[0046] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0047] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "vertical", "peripheral surface", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the invented product is usually placed when in use, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0048] In addition, the term "vertical" does not mean that the component is absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0049] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] In the description of the present invention, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in the present invention and the features of different embodiments or examples without contradiction.

[0051] The embodiment of the present application solves the problems of low heat dissipation efficiency and insufficient heat dissipation in the prior art by providing a remote plasma generator, thereby improving heat dissipation efficiency and production efficiency.

[0052] The technical solution in the embodiment of the present application is to solve the above problems, and the overall idea is as follows:

[0053] Example:

[0054] like Figure 1-2 As shown, a remote plasma generator includes: an ionization chamber 1, a heat dissipation device 2 and a magnetic core assembly 3.

[0055] like Figure 3-4As shown, the ionization chamber 1 includes: an air inlet 101 , a long cavity 102 at the air inlet end, two short cavities 103 , a long cavity 104 at the air outlet end, an air outlet 105 and two connecting pieces 106 .

[0056] An air inlet seat 100 is also bolted above the air inlet 101; the upper end of the long cavity 102 at the air inlet end is bolted to the lower end of the air inlet 101; the upper ends of the two short cavities 103 are connected to the long cavity 102 at the air inlet end through ceramic rings 107, and the outer circumferential surfaces of the two short cavities 103 are used to install the magnetic core assembly 3; the upper end of the long cavity 104 at the air outlet end is connected to the lower ends of the two short cavities 103 through ceramic rings 107; the upper end of the air outlet 105 is bolted to the long cavity 104 at the air outlet end; the upper ends of the two connecting parts 106 are bolted to the two side walls of the long cavity 102 at the air inlet end, and the lower ends are bolted to the two side walls of the long cavity 104 at the air outlet end.

[0057] The air inlet 101, the long cavity 102 at the air inlet end, the short cavity 103, the long cavity 104 at the air outlet end, and the air outlet 105 are combined into a complete cavity, and an air cavity and a cooling water channel are respectively opened inside the complete cavity.

[0058] like Figure 5-7 As shown, the air cavity is located in the middle of the cavity, and the air cavity includes a first air cavity section 112 located at the air inlet 101, a second air cavity section 113 located at the long cavity 102 at the air inlet end, a third air cavity section 114 located at the short cavity 103, a fourth air cavity section 115 located at the long cavity 104 at the air outlet end, and a fifth air cavity section 116 located at the air outlet 105. The first to fifth air cavity sections are connected in sequence, and adjacent air cavity sections are sealed by sealing rings 108. The first air cavity section 112 is also connected to the air inlet port of the air inlet seat 100.

[0059] There are two cooling water channels, which are respectively arranged on both sides of the air cavity. The cooling water channel includes a first water channel section 117 located at the air inlet 101, a second water channel section 118 located at the long cavity 102 at the air inlet end, a third water channel section 119 located at the short cavity 103, a fourth water channel section 120 located at the long cavity 104 at the air outlet end, and a fifth water channel section 121 located at the air outlet 105. The first to fifth water channel sections are connected in sequence, and the adjacent water channel sections are sealed by a water channel seal 109. Among them, the first water channel section 117 is connected to the water outlet 110, and the fifth water channel section 121 is connected to the water inlet 111. The two cooling water channels share one water outlet 110. Among them, the first and fifth water channel sections are each provided with two mutually connected horizontal parallel sections; the second, third, and fourth water channel sections are each provided with two channels, and the second, third, and fourth water channel sections on the same short cavity side are mutually connected, and the third water channel section is provided with two vertical parallel sections.

[0060] like Figure 2 , 8-9, the heat dissipation device includes: a heat dissipation plate 201, a water inlet pipe 202, a first water outlet pipe 203, a second water outlet pipe 204, a return water pipe 205, and a water inlet and outlet joint 206.

[0061] The heat sink 201 includes a cover plate 2011, a flow channel water sink 2012, a sealing ring 2013, a water inlet 2014 and a water outlet 2015. A water sink flow channel is provided in the flow channel water sink 2012. The sealing ring 2013 is arranged along the inner wall of the water sink flow channel. The water sink flow channel connects the water inlet 2014 and the water outlet 2015. Two heat sinks 201 are provided, namely a first heat sink 201 and a second heat sink 201. The first heat sink 201 and the second heat sink 201 are used to be arranged on both sides of the ionization chamber 1 respectively.

[0062] One end of the water inlet pipe 202 is connected to the water inlet 2014 of the first radiator 201 and the second radiator 201 through a connecting pipe, and the other end is used to connect to the water outlet port of the cooling water pump through the water inlet and outlet joint 206; one end of the first water outlet pipe 203 is connected to the water outlet 2015 of the first radiator 201, and the other end is used to connect to the water inlet end 111 of a cooling water channel; one end of the second water outlet pipe 204 is connected to the water outlet 2015 of the second radiator 201, and the other end is used to connect to the water inlet end 111 of another cooling water channel; one end of the return water pipe 205 is used to connect to the water outlet end 110 of the cooling water channel, and the other end is used to connect to the return water port of the cooling water pump through the water inlet and outlet joint 206.

[0063] Optionally, the heat sink 201 is screwed to the housing of the magnetic core assembly 3. The magnetic core assembly 3 is installed in the ionization chamber 1.

[0064] Further, such as Figure 10-11 As shown, the water pan flow channel includes a main flow channel 2016 and a plurality of auxiliary flow channels 2017. The cross-sectional area of ​​the main flow channel 2016 is larger than that of the auxiliary flow channel 2017. The main flow channel 2016 is S-shaped to connect the water inlet and the water outlet. Both ends of the auxiliary flow channel 2017 are respectively connected to the main flow channel 2016, and the auxiliary flow channel 2017 does not overlap with the main flow channel 2016. The main flow channel 2016 cooperates with the auxiliary flow channel 2017 to expand the heat exchange area as much as possible and improve the heat dissipation efficiency.

[0065] The technical solutions in the above embodiments of the present application have at least the following technical effects or advantages:

[0066] 1. The remote plasma generator uses an external heat dissipation device to cooperate with the cooling water channel in the ionization chamber, and the heat is exchanged synchronously inside and outside, which improves the heat dissipation efficiency, prolongs the service life of the chamber and seals, and improves production efficiency.

[0067] 2. The cooling water channels of the remote plasma generator are distributed on the outside of the air cavity, which has higher heat conduction efficiency, thereby improving production efficiency and service life;

[0068] 3. The cooling water channels of the remote plasma generator are dispersed on the side walls of the cavity, which expands the heat exchange area and improves the heat exchange efficiency.

[0069] 4. The main flow channel of the heat sink of the remote plasma generator cooperates with the auxiliary flow channel to expand the heat exchange area as much as possible and improve the heat dissipation efficiency.

[0070] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A remote plasma generator, characterized in that: include: An ionization chamber, wherein the ionization chamber is provided with an air cavity and two cooling water channels, the two cooling water channels are respectively arranged on both sides of the air cavity, and the two cooling water channels are both provided with a water inlet end and a water outlet end; the ionization chamber comprises: An air inlet, an air inlet seat is provided above the air inlet; An air inlet end long cavity, the upper end of which is connected to the lower end of the air inlet; The upper ends of the two short cavities are connected to the long cavity at the air inlet end through ceramic rings respectively; A long cavity at the gas outlet end, the upper end of which is connected to the lower ends of the two short cavities through the ceramic rings; An air outlet, the upper end of which is connected to the long cavity at the air outlet end; wherein the air inlet, the long cavity at the air inlet end, the short cavity, the long cavity at the air outlet end, and the air outlet are combined into a complete cavity, the air cavity and the cooling water channel are respectively opened inside the complete cavity, and the cooling water channel is distributed on the outside of the air cavity; the cooling water channel comprises a first water channel section located at the air inlet, a second water channel section located at the long cavity at the air inlet end, a third water channel section located at the short cavity, a fourth water channel section located at the long cavity at the air outlet end, and a fifth water channel section located at the air outlet, and the first to fifth water channel sections are connected in sequence, wherein the first water channel section is connected with the water outlet end, and the fifth water channel section is connected with the water inlet end; the first and fifth water channel sections are each provided with two mutually connected transverse parallel sections; the second, third, and fourth water channel sections are each provided with two channels, the second, third, and fourth water channel sections on the same side are connected with each other, and the third water channel section is provided with two vertical parallel sections; A magnetic core assembly, wherein the magnetic core assembly is mounted in the ionization chamber; The heat dissipation device comprises a heat dissipation plate, a water inlet pipe, a first water outlet pipe, a second water outlet pipe and a return pipe, the heat dissipation plate comprises a cover plate, a flow channel water pan and a sealing ring, a water pan flow channel is provided in the flow channel water pan, the sealing ring is arranged along the inner wall of the water pan flow channel, the heat dissipation plate is also provided with a water inlet and a water outlet, the water pan flow channel comprises a main flow channel and a plurality of auxiliary flow channels, the cross-sectional area of ​​the main flow channel is larger than the cross-sectional area of ​​the auxiliary flow channel, the main flow channel is S-shaped and connects the water inlet and the water outlet, the two ends of the auxiliary flow channel are respectively connected to the main flow channel, and the auxiliary flow channel does not overlap with the main flow channel; the heat dissipation plate is provided with two, namely the first A heat sink and a second heat sink, the first heat sink and the second heat sink are respectively arranged on both sides of the ionization chamber, one end of the water inlet pipe is connected to the water inlets of the first heat sink and the second heat sink, and the other end is connected to the water outlet port of the cooling water pump, one end of the first water outlet pipe is connected to the water outlet of the first heat sink, and the other end is connected to the water inlet end of one of the cooling water channels; one end of the second water outlet pipe is connected to the water outlet of the second heat sink, and the other end is connected to the water inlet end of another cooling water channel; one end of the return water pipe is used to connect the water outlet ends of the two cooling water channels, and the other end is used to connect the return water port of the cooling water pump.

2. The remote plasma generator according to claim 1, characterized in that: The ionization chamber also includes two connecting pieces, the upper ends of which are respectively connected to the two side walls of the long cavity at the air inlet end, and the lower ends of which are respectively connected to the two side walls of the long cavity at the air outlet end.

3. The remote plasma generator according to claim 1, characterized in that: The air cavity includes a first air cavity section located at the air inlet, a second air cavity section located at the long cavity at the air inlet end, a third air cavity section located at the short cavity, a fourth air cavity section located at the long cavity at the air outlet end, and a fifth air cavity section located at the air outlet. The first to fifth air cavity sections are connected in sequence, and the first air cavity section is also connected to the air inlet port of the air inlet seat.

4. The remote plasma generator according to claim 1, characterized in that: The heat dissipation device also includes an inlet and outlet water joint, and the inlet pipe and the return pipe are connected to the cooling water pump through the inlet and outlet water joint.

5. The remote plasma generator according to claim 1, characterized in that: The heat dissipation plate is screwed to the shell of the magnetic core assembly.

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