A double-door flexible multifunctional vacuum coating equipment

Abstract

A double-door flexible multifunctional vacuum coating equipment solves the problem that the existing vacuum coating system equipment can only realize a single type of hard coating method, has poor flexibility in use, and cannot adapt to the requirements of industrial production and experimental use of scientific research institutes at the same time. It includes a double-door vacuum furnace body, the bottom of the inner side of the double-door vacuum furnace body is provided with a central water-cooled anode and a side-mounted water-cooled anode, and the top of the inner side of the double-door vacuum furnace body is provided with a central plasma generator and a side-mounted plasma generator; the driven gear provided at one end of the magnetic fluid main shaft is meshed with the driving gear connected to the driving motor; the control box behind the double-door vacuum furnace body is also provided with an exhaust unit, a main control cabinet, a water control cabinet and a power supply cabinet. It has a reasonable design and a compact structure. It adopts a double-door flexible configuration, can convert the hard coating method, is flexible to use, and can realize the preparation of multifunctional, multi-element, multi-layer composite hard coatings, decorative coatings and DLC coatings.

Description

Technical Field

[0001] The present invention belongs to the technical field of vacuum coating, and specifically relates to a method of preparing a convertible coating using a double-door flexible configuration. The method is flexible to use and can realize the preparation of multifunctional, multi-element, multi-layer composite hard coatings, decorative coatings and DLC coatings. The double-door flexible multifunctional vacuum coating equipment is suitable for both industrial production and experimental use in scientific research institutes. Background Art

[0002] The market for hard coatings is expanding with the higher requirements of processing technology, and it also has an increasingly large application market in China. Hard coating technologies mainly include multi-arc ion plating technology and magnetron sputtering technology. The main differences between arc technology and magnetron sputtering technology are: arc technology can obtain an ionization rate of nearly 90% and a faster deposition rate, but there is a problem of droplets; although magnetron sputtering technology can obtain a flat surface, the ionization rate and deposition rate are relatively low.

[0003] At present, both technologies are constantly moving forward. Multi-arc ion plating technology improves the cooling efficiency by increasing the diameter of the arc target, making the droplet size smaller than that of the traditional arc structure; in addition, there are new technologies that use rectangular arcs or columnar arcs to increase the cooling efficiency of the target material by increasing the area and lengthening the arc motion trajectory, further reducing the droplet size. After continuous development, magnetron sputtering technology can greatly improve the ionization rate by adopting closed magnetic field unbalanced magnetron sputtering technology, which has become the key to improving the quality of magnetron sputtering film layers. In addition, with the combination of medium frequency twin magnetron technology and unbalanced magnetron sputtering technology, the existing magnetron sputtering technology has been able to obtain high-quality film layers comparable to arc technology. However, the existing vacuum coating system equipment can only realize a single type of hard coating method, with poor flexibility in use, and cannot simultaneously adapt to the use requirements of industrial production and scientific research institutes. Therefore, it is necessary to improve the vacuum coating system equipment of the prior art. Summary of the invention

[0004] The present invention is aimed at the above-mentioned problems and provides a method for preparing a convertible coating using a double-door flexible configuration. The device is flexible to use and can realize the preparation of multifunctional, multi-element, multi-layer composite hard coatings, decorative coatings and DLC coatings. The device is a double-door flexible multifunctional vacuum coating device that is suitable for both industrial production and experimental use in scientific research institutes.

[0005] The technical solution adopted by the present invention is: the double-door flexible multifunctional vacuum coating equipment includes a furnace body support, characterized in that: a double-door vacuum furnace body is arranged on the furnace body support, a workpiece rotating rack is arranged inside the double-door vacuum furnace body, and the driving part of the workpiece rotating rack is connected to the magnetic fluid main shaft arranged at the bottom of the vacuum furnace body through a transmission mechanism; a central water-cooled anode and a side-mounted water-cooled anode are arranged at the bottom of the inner side of the double-door vacuum furnace body, a lower central coil is arranged at the lower part of the central water-cooled anode, and a side-mounted lower coil is arranged at the lower part of the side-mounted water-cooled anode; a central plasma generator and a side-mounted plasma generator are arranged at the top of the inner side of the double-door vacuum furnace body, an upper central coil is arranged at the upper part of the central plasma generator, and an upper central coil is arranged at the upper part of the side-mounted plasma generator. A side-mounted upper coil is provided; and a driven gear is provided on one end of the magnetic fluid main shaft, which is located on the outer side of the bottom of the vacuum furnace body, and the driven gear is meshed with the driving gear. The gear shaft of the driving gear is connected to the output end of the reducer through a coupling, and the input end of the reducer is connected to the output end of the drive motor; an exhaust port is provided on the rear side of the double-door vacuum furnace body, and the exhaust port is connected to the air intake port of the molecular pump; an exhaust unit, a main control cabinet, a water control cabinet and a power supply cabinet are also provided in the control box arranged at the rear of the double-door vacuum furnace body, and the exhaust unit is connected to the molecular pump, and the water supply pipeline of the water control cabinet is respectively connected to the inlet and return water ends of the central water-cooled anode and the side-mounted water-cooled anode; a control screen is also provided on the front side of the double-door vacuum furnace body.

[0006] The double-door vacuum furnace body includes a vacuum furnace body with openings on both sides, and the exhaust port is arranged at the rear end of the vacuum furnace body; the openings on both sides of the vacuum furnace body are respectively movably provided with a vertical furnace door I and a vertical furnace door II, and the ends of the vertical furnace door I and the vertical furnace door II are respectively hinged to the vacuum furnace body through furnace door hinges. The double-door structure of the vacuum furnace body is used to facilitate the loading and unloading of the coating workpiece.

[0007] The vertical furnace door I and the vertical furnace door II have the same structure, both of which include a furnace door frame, on which a plurality of furnace door flange plates are arranged, and the furnace door flange plates enclose the side facade of the furnace door, and each furnace door flange plate is also respectively provided with a door panel mounting hole for flexibly configuring a multifunctional door panel, and a reserved door panel mounting opening is provided on the front end of the vacuum furnace body; a concealed frame cooling water channel is provided on the furnace door frame, a concealed flange plate cooling water channel is provided on the furnace door flange plate, and flange plate inlet and return water holes are provided at the end of the flange plate cooling water channel; a furnace door upper cover and a furnace door lower cover are respectively provided at the upper end and the lower end of the enclosed furnace door flange plate. Different functions are realized by utilizing the flexibly configured and replaceable multifunctional door panels on the door panel mounting holes of each furnace door flange panel of vertical furnace door I and vertical furnace door II. According to specific use needs, hard coating, decorative coating and DLC coating can be prepared, and one machine can be used for multiple purposes. Moreover, during the operation of the equipment, the furnace door frame and the furnace door flange panel are cooled by circulating cooling water in the frame cooling water channel and the flange panel cooling water channel.

[0008] The upper side of the furnace door upper cover is provided with a door upper cover water jacket, and the lower side of the furnace door lower cover is provided with a door lower cover water jacket; the door upper cover water jacket and the door lower cover water jacket are respectively provided with water jacket inlet and return holes, and the inner parts of the door upper cover water jacket and the door lower cover water jacket are also respectively provided with water retaining strips for slowing down the flow rate of water flow. The furnace door upper cover and the furnace door lower cover of the vertical furnace door I and the vertical furnace door II can be effectively cooled by circulating cooling water in the upper cover water jacket and the lower cover water jacket.

[0009] The number of furnace door flange plates arranged on the vertical furnace door I and the vertical furnace door II are three groups respectively, and the vacuum furnace body and the vertical furnace doors I and II on both sides enclose a cavity structure with an octagonal transverse section; the door panel mounting holes on the three groups of furnace door flange plates of the vertical furnace door I are the first door panel mounting opening, the second door panel mounting opening and the third door panel mounting opening in the counterclockwise direction; the door panel mounting holes on the three groups of furnace door flange plates of the vertical furnace door II are the fourth door panel mounting opening, the fifth door panel mounting opening and the sixth door panel mounting opening in the counterclockwise direction. The furnace body structure with an octagonal transverse section and natural geometric symmetry formed by the vacuum furnace body and the vertical furnace doors I and II on both sides can effectively improve the uniformity of the atmosphere, plasma, and electromagnetic field arrangement generated by the coil in the furnace, so that the surface film layer of the workpiece is more uniform.

[0010] The second door panel installation opening of the vertical furnace door I and the fifth door panel installation opening of the vertical furnace door II are both provided with heater installation door panels, and the first door panel installation opening and the third door panel installation opening of the vertical furnace door I, as well as the fourth door panel installation opening and the sixth door panel installation opening of the vertical furnace door II are both provided with plane cathode installation door panels, and the outer side of the plane cathode installation door panels are both provided with excitation coils; the reserved door panel installation opening of the vacuum furnace body is provided with a blind plate. Magnetron sputtering coating, DLC (diamond-like carbon) coating or decorative coating coating and other processes are implemented in the vacuum furnace body.

[0011] The second door panel installation opening of the vertical furnace door I and the fifth door panel installation opening of the vertical furnace door II are both provided with heater installation door panels, and the first door panel installation opening and the third door panel installation opening of the vertical furnace door I, as well as the fourth door panel installation opening and the sixth door panel installation opening of the vertical furnace door II are both provided with evaporation source installation door panels; the reserved door panel installation opening of the vacuum furnace body is provided with an ion etching device installation door panel, so as to implement the multi-arc ion plating process in the vacuum furnace body.

[0012] The heater installation door panel includes a door panel body, the periphery of the door panel body is provided with installation circular holes, and a door panel sealing strip is provided on the side of the door panel body facing the inside of the vacuum furnace body; a plurality of groups of heater installation flange holes arranged vertically are provided in the middle of the door panel body, and a round heater is provided on the heater installation flange holes, and a heater protection cover is also provided at one end of the round heater located outside the vacuum furnace body; a peripheral cooling copper tube is also provided on the outside of the door panel body, and a middle cooling copper tube is also provided at the inner circle of the peripheral cooling copper tube and the position of the heater installation flange hole, and cooling pipe inlet and return holes are respectively provided at the ends of the middle cooling copper tube and the peripheral cooling copper tube. The heating power is effectively improved by the serpentine structure of the round heater arranged reasonably on the heater installation door panel, so that the heating inside the vacuum furnace body is more uniform; and the door panel body of the heater installation door panel is cooled by the circulating cooling water in the peripheral cooling copper tube and the middle cooling copper tube.

[0013] The planar cathode installation door plate includes a door plate body, the periphery of which is provided with installation circular holes, and a door plate sealing strip is provided on the side of the door plate body facing the inside of the vacuum furnace body; and a planar target installation part is provided in the middle of the door plate body, and a planar cathode target is provided on the planar target installation part; the outer cover of the planar cathode target is provided with a rotating shielding cover, and the driving mechanism on the upper part of the rotating shielding cover is connected to the telescopic end of the rotating shielding cylinder, and the rotating shielding cylinder is provided at the shielding cylinder installation hole at the upper end of the door plate body. The planar cathode target provided on the planar cathode installation door plate is used to realize the processes such as magnetron sputtering coating, DLC (diamond-like carbon) coating and decorative coating coating in the vacuum furnace body; and the rotating shielding cover is driven by the rotating shielding cylinder to shield and block the planar cathode target according to the production process.

[0014] The evaporation source installation door panel includes a door panel body, the periphery of the door panel body is provided with installation circular holes, and a door panel sealing strip is provided on the side of the door panel body facing the inside of the vacuum furnace body; a plurality of groups of evaporation source installation flange holes and heater installation flange holes are arranged alternately and spaced vertically in the middle of the door panel body, arc evaporation sources are respectively arranged on the evaporation source installation flange holes, and circular heaters are respectively arranged on the heater installation flange holes, and a curved surrounding cooling copper tube I or a curved surrounding cooling copper tube II is also arranged on the outer side of the door panel body, and cooling pipe inlet and return holes are respectively arranged at the ends of the curved surrounding cooling copper tube; the ion etching device installation door panel also includes a door panel body, a plurality of groups of evaporation source installation flange holes are arranged continuously along the vertical direction in the middle of the door panel body, arc evaporation sources are respectively arranged on the evaporation source installation flange holes, and a curved surrounding cooling copper tube III is arranged on the outer side of the door panel body. The multi-arc ion plating process in the vacuum furnace body is realized by arc evaporation sources and spiral heaters arranged alternately on the evaporation source installation door panel, and arc evaporation sources set on the ion etching device installation door panel; and the circulating cooling water in each curved surrounding cooling copper tube is used to cool the door panel bodies of the evaporation source installation door panel and the ion etching device installation door panel respectively.

[0015] The beneficial effects of the present invention are as follows: since the present invention adopts a double-door vacuum furnace body with a workpiece rotating rack arranged inside, the driving part of the workpiece rotating rack is connected to the magnetic fluid main shaft arranged at the bottom of the vacuum furnace body through a transmission mechanism; a central water-cooled anode and a side-mounted water-cooled anode are arranged at the bottom of the inner side of the double-door vacuum furnace body, and a central plasma generator and a side-mounted plasma generator are arranged at the top of the inner side of the double-door vacuum furnace body; a driven gear is arranged at one end of the magnetic fluid main shaft, and the gear shaft of the driving gear is connected to the driving motor through a reducer; an exhaust port arranged at the rear side of the double-door vacuum furnace body is connected to a molecular pump; the double-door vacuum furnace body The control box at the rear is also equipped with an exhaust unit, a main control cabinet, a water control cabinet and a power cabinet. The exhaust unit is connected to the molecular pump. The water supply pipeline of the water control cabinet is respectively connected to the inlet and return water ends of the central water-cooled anode and the side-mounted water-cooled anode. Therefore, its design is reasonable and the structure is compact. It adopts a double-door flexible configuration and a convertible hard coating method. It is flexible to use and can realize the preparation of multifunctional, multi-element, multi-layer composite hard coatings, decorative coatings and DLC coatings. The workpiece can be flexibly placed and taken, the surface film uniformity is good, and the coating efficiency is high. It is suitable for both industrial production and experiments in scientific research institutes. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the present invention.

[0017] Figure 2 yes Figure 1 Top view of the .

[0018] Figure 3 yes Figure 2 A structural schematic diagram of a double-door vacuum furnace body.

[0019] Figure 4 yes Figure 3 A structural schematic diagram of the vertical furnace door I (or vertical furnace door II) in FIG.

[0020] Figure 5 yes Figure 4 Cross-sectional view of the internal structure along line AA.

[0021] Figure 6 yes Figure 4 A schematic diagram of the expanded structure of three enclosed furnace door flange plates.

[0022] Figure 7 yes Figure 3 A schematic diagram of an implementation method of a double-door vacuum furnace body in implementing processes such as magnetron sputtering coating, DLC (diamond-like carbon) coating or decorative coating coating.

[0023] Figure 8 yes Figure 7 An expanded structural diagram of the internal structure.

[0024] Fig. 9 yes Figure 3 A schematic diagram of an implementation method of a double-door vacuum furnace body in implementing a multi-arc ion plating process.

[0025] Fig.10 yes Fig. 9 An expanded structural diagram of the internal structure.

[0026] Fig.11 yes Figure 7 and Fig. 9 A structural schematic diagram of a heater installation door panel.

[0027] Fig.12 yes Fig.11 Right side view.

[0028] Fig.13 yes Fig.11 A rear side view of a door panel body of a heater-mounted door panel.

[0029] Fig.14 yes Figure 7 A structural schematic diagram of a flat cathode mounted door panel.

[0030] Fig.15 yes Fig.14 Left side view.

[0031] Fig.16 yes Fig. 9 A structural schematic diagram of an evaporation source installation door panel.

[0032] Fig.17 yes Fig.16 A rear side view of a door panel body in which an evaporation source is installed.

[0033] Fig.18 It is a structural schematic diagram of a door panel body of an evaporation source installation door panel in another arrangement form.

[0034] Fig.19 yes Fig. 9 A structural schematic diagram of installing a door panel in an ion etching device.

[0035] Fig. 20 yes Fig.19 A rear side view of a door panel body with the door panel installed in the ion etching device.

[0036] Explanation of the numbers in the figure: 1 furnace support, 2 double-door vacuum furnace, 3 workpiece rotating rack, 4 magnetic fluid spindle, 5 driven gear, 6 driving gear, 7 reducer, 8 drive motor, 9 central water-cooled anode, 10 lower central coil, 11 side-mounted water-cooled anode, 12 side-mounted lower coil, 13 central plasma generator, 14 upper central coil, 15 side-mounted plasma generator, 16 side-mounted upper coil, 17 exhaust port, 18 molecular pump, 19 main control cabinet , 20 water control cabinet, 21 power cabinet, 22 exhaust unit, 23 control screen, 24 vacuum furnace body, 25 vertical furnace door I, 26 vertical furnace door II, 27 furnace door hinge, 28 first door panel installation port, 29 second door panel installation port, 30 third door panel installation port, 31 fourth door panel installation port, 32 fifth door panel installation port, 33 sixth door panel installation port, 34 reserved door panel installation port, 35 furnace door frame, 36 frame cooling water channel, 37 furnace door flange plate , 38 door panel mounting hole, 39 furnace door upper cover, 40 door upper cover water jacket, 41 water jacket inlet and return holes, 42 water retaining strip, 43 furnace door lower cover, 44 door lower cover water jacket, 45 flange plate cooling water channel, 46 flange plate inlet and return holes, 47 flat cathode mounting door panel, 48 heater mounting door panel, 49 blind plate, 50 excitation coil, 51 evaporation source mounting door panel, 52 ion etching device mounting door panel, 53 door panel body, 54 mounting round hole, 55 door panel sealing strip, 5 6. Loop heater, 57. Heater protection cover, 58. Peripheral cooling copper tube, 59. Middle cooling copper tube, 60. Cooling tube water inlet and return hole, 61. Heater mounting flange hole, 62. Plane target mounting part, 63. Shielding cylinder mounting hole, 64. Plane cathode target, 65. Rotating shielding cover, 66. Rotating shielding cylinder, 67. Arc evaporation source, 68. Evaporation source mounting flange hole, 69. Bent surrounding cooling copper tube I, 70. Bent surrounding cooling copper tube II, 71. Bent surrounding cooling copper tube III. DETAILED DESCRIPTION

[0037] according to Figures 1 to 20 The specific structure of the present invention is described in detail. The double-door flexible multifunctional vacuum coating equipment includes a furnace body support 1, on which a double-door vacuum furnace body 2 is arranged. The double-door vacuum furnace body 2 includes a vacuum furnace body 24 with openings on both sides, and an exhaust port 17 is arranged at the rear end of the vacuum furnace body 24. Vertical furnace doors Ⅰ25 and vertical furnace doors Ⅱ26 are movably arranged at the openings on both sides of the vacuum furnace body 24, and the ends of the vertical furnace doors Ⅰ25 and the vertical furnace doors Ⅱ26 are respectively hinged to the vacuum furnace body 24 through furnace door hinges 27; and then the double-sided door structure of the vacuum furnace body is used to facilitate the loading and unloading of the coating workpiece. A workpiece rotating rack 3 for arranging the coating workpiece is also arranged inside the double-door vacuum furnace body 2, and the driving part of the workpiece rotating rack 3 is connected to the magnetic fluid main shaft 4 arranged at the bottom of the vacuum furnace body through a transmission mechanism.

[0038] The vertical furnace door I25 and the vertical furnace door II26 of the double-door vacuum furnace body 2 have the same structure. Both the vertical furnace door I25 and the vertical furnace door II26 include a furnace door frame 35, on which are arranged a plurality of furnace door flange plates 37, and the furnace door flange plates 37 enclose the side facade of the furnace door. Each furnace door flange plate 37 is also provided with a door panel mounting hole 38 for flexibly configuring a multifunctional door panel; the front end of the vacuum furnace body 24 is provided with a reserved door panel mounting opening 34 (when not in use, a blind plate 49 "with nothing arranged on it" is provided at the reserved door panel mounting opening 34). A concealed frame cooling water channel 36 is provided on the furnace door frame 35, a concealed flange plate cooling water channel 45 is provided on the furnace door flange plate 37, and a flange plate inlet and return water hole 46 is provided at the end of the flange plate cooling water channel 45. Therefore, the door panel mounting holes 38 of each door flange plate 37 of the vertical furnace door Ⅰ 25 and the vertical furnace door Ⅱ 26 are flexibly configured and replaceable multifunctional door panels to realize different functions, so that hard coatings, decorative coatings and DLC coatings can be prepared according to specific use needs, and one machine can be used for multiple purposes. In addition, during the operation of the equipment, the furnace door frame 35 and the furnace door flange plate 37 are cooled by circulating cooling water in the frame cooling water channel 36 and the flange plate cooling water channel 45.

[0039] The upper and lower ends of the furnace door flange plates 37 arranged in the enclosed arrangement on the vertical furnace door Ⅰ25 and the vertical furnace door Ⅱ26 are also provided with furnace door upper covers 39 and furnace door lower covers 43, respectively. The upper side of the furnace door upper cover 39 is provided with a door upper cover water jacket 40, and the lower side of the furnace door lower cover 43 is provided with a door lower cover water jacket 44. The upper door cover water jacket 40 and the lower door cover water jacket 44 are respectively provided with water jacket inlet and return holes 41, and the upper door cover water jacket 40 and the lower door cover water jacket 44 are also respectively provided with water retaining strips 42 for slowing down the flow rate of water flow. Then, the furnace door upper covers 39 and the furnace door lower covers 43 of the vertical furnace door Ⅰ25 and the vertical furnace door Ⅱ26 are effectively cooled by circulating cooling water in the upper cover water jacket and the lower cover water jacket.

[0040] The number of furnace door flange plates 37 provided on the furnace door frame 35 of the vertical furnace door I 25 and the vertical furnace door II 26 can be three groups (e.g. Figure 3 and Figure 4 As shown in FIG. 2 , the vacuum furnace body 24 and the vertical furnace doors Ⅰ25 and Ⅱ26 on both sides together enclose a cavity structure with an octagonal (or regular octagonal) transverse cross section. The door panel mounting holes 38 on the three groups of furnace door flange plates 37 of the vertical furnace door Ⅰ25 are the first door panel mounting opening 28, the second door panel mounting opening 29 and the third door panel mounting opening 30 in the counterclockwise direction (looking at the transverse cross section of the double-door vacuum furnace body 2 from top to bottom). The door panel mounting holes 38 on the three groups of furnace door flange plates 37 of the vertical furnace door Ⅱ26 are the fourth door panel mounting opening 31, the fifth door panel mounting opening 32 and the sixth door panel mounting opening 33 in the counterclockwise direction. Therefore, the vacuum furnace main body 24 and the vertical furnace doors Ⅰ25 and Ⅱ26 on both sides together form a furnace body structure with an octagonal transverse cross-section and natural geometric symmetry, which can effectively improve the uniformity of the atmosphere, plasma, and electromagnetic field generated by the coil in the furnace, making the surface film layer of the workpiece more uniform.

[0041] In order to implement processes such as magnetron sputtering coating, DLC (diamond-like carbon) coating or decorative coating coating in the vacuum furnace body, the second door panel mounting opening 29 of the vertical furnace door I 25 and the fifth door panel mounting opening 32 of the vertical furnace door II 26 can be provided with a heater mounting door panel 48, and the first door panel mounting opening 28 and the third door panel mounting opening 30 of the vertical furnace door I 25, and the fourth door panel mounting opening 31 and the sixth door panel mounting opening 33 of the vertical furnace door II 26 can be provided with a plane cathode mounting door panel 47; at the same time, the outer side of the plane cathode mounting door panel 47 is provided with an excitation coil 50. In addition, a blind plate 49 with nothing arranged on it is provided on the reserved door panel mounting opening 34 of the vacuum furnace body 24.

[0042] The heater installation door panel 48 is composed of a door panel body 53, and the periphery of the door panel body 53 is provided with installation circular holes 54, and a door panel sealing strip 55 is provided on the side of the door panel body 53 facing the inside of the vacuum furnace body. A plurality of groups of heater installation flange holes 61 arranged vertically are provided in the middle of the door panel body 53 of the heater installation door panel 48, and a round heater 56 is provided on each of the heater installation flange holes 61; and the round heater 56 is located at one end of the outer side of the vacuum furnace body, and a heater protection cover 57 is also provided. A peripheral cooling copper tube 58 is also provided on the outer side of the door panel body 53 of the heater installation door panel 48, and a middle cooling copper tube 59 is provided at the inner circle of the peripheral cooling copper tube 58 and the position of the heater installation flange hole 61, and cooling tube water inlet and return holes 60 are provided at the ends of the middle cooling copper tube 59 and the peripheral cooling copper tube 58. The serpentine structure of the circular heater 56 which is reasonably arranged on the heater installation door panel 48 is used to effectively improve the heating power, so that the heating inside the vacuum furnace body is more uniform; and the circulating cooling water in the peripheral cooling copper tube 58 and the middle cooling copper tube 59 is used to cool the door panel body 53 of the heater installation door panel 48.

[0043] The plane cathode installation door plate 47 is also composed of a door plate body 53, and a mounting circular hole 54 is arranged around the door plate body 53, and a door plate sealing strip 55 is arranged on the side of the door plate body 53 facing the inside of the vacuum furnace body. In addition, a plane target mounting part 62 is arranged in the middle of the door plate body 53 of the plane cathode installation door plate 47, and a plane cathode target 64 is arranged on the plane target mounting part 62. At the same time, a rotating shielding cover 65 is arranged on the outer cover of the plane cathode target 64, and the driving mechanism on the upper part of the rotating shielding cover 65 is connected to the telescopic end of the rotating shielding cylinder 66, and the rotating shielding cylinder 66 is arranged at the shielding cylinder mounting hole 63 at the upper end of the door plate body 53. Then, the plane cathode target 64 arranged on the plane cathode installation door plate 47 is used to realize the processes such as magnetron sputtering coating, DLC (diamond-like carbon) coating and decorative coating coating in the vacuum furnace body; and the rotating shielding cover 65 is driven by the rotating shielding cylinder 66 to shield and block the plane cathode target 64 according to the production process.

[0044] In addition, in order to implement the multi-arc ion plating process in the vacuum furnace body, the second door panel installation port 29 of the vertical furnace door I 25 and the fifth door panel installation port 32 of the vertical furnace door II 26 can be provided with a heater installation door panel 48; and the first door panel installation port 28 and the third door panel installation port 30 of the vertical furnace door I 25, and the fourth door panel installation port 31 and the sixth door panel installation port 33 of the vertical furnace door II 26 can be provided with an evaporation source installation door panel 51. The reserved door panel installation port 34 of the vacuum furnace body 24 is provided with an ion etching device installation door panel 52; the ion etching device installation door panel 52 is used as a tool plating, and two sets of arc evaporation sources 67 are installed on the door panel to form a bombardment source in combination with an anode and a shield, which is used for gas ion etching and cleaning of the workpiece surface. The evaporation source installation door panel 51 is composed of a door panel body 53, and a mounting circular hole 54 is provided on the periphery of the door panel body 53, and a door panel sealing strip 55 is provided on the side of the door panel body 53 facing the inside of the vacuum furnace body. The middle part of the door panel body 53 of the evaporation source installation door panel 51 is provided with a plurality of groups of evaporation source installation flange holes 68 and heater installation flange holes 61 arranged alternately in the vertical direction. The evaporation source installation flange holes 68 are respectively provided with arc evaporation sources 67, and the heater installation flange holes 61 are respectively provided with round-shaped heaters 56. Moreover, according to the specific arrangement of the arc evaporation sources 67 and the round-shaped heaters 56, the outer side of the door panel body 53 of the evaporation source installation door panel 51 is also provided with a curved surrounding cooling copper tube I 69 (such as Fig.17 ) or bend around the cooling copper tube Ⅱ 70 (as shown in the arrangement form in Fig.18 As shown in the arrangement form in FIG, cooling pipe water inlet and return holes 60 are respectively provided at the ends of the bent and surrounding cooling copper pipes.

[0045] At the same time, the ion etching device installation door panel 52 is also composed of a door panel body 53, and a plurality of groups of evaporation source installation flange holes 68 arranged vertically and continuously are arranged in the middle of the door panel body 53, arc evaporation sources 67 are respectively arranged on the evaporation source installation flange holes 68, and a curved surrounding cooling copper tube III 71 is arranged on the outer side of the door panel body 53 of the ion etching device installation door panel 52. Thus, the multi-arc ion plating process in the vacuum furnace body is realized by the arc evaporation sources 67 and the circular heater 56 arranged alternately and spaced on the evaporation source installation door panel 51, and the arc evaporation source 67 arranged on the ion etching device installation door panel 52; and the circulating cooling water in each curved surrounding cooling copper tube is used to cool the door panel body 53 of the evaporation source installation door panel 51 and the ion etching device installation door panel 52 respectively. The arc evaporation sources 67 and the circular heater 56 on the two adjacent groups of evaporation source installation door panels 51 adopt different position arrangement forms (such as Fig.10 As shown in the figure, the purpose is to increase the effective space for coating in height by using a staggered arrangement.

[0046] In addition, a central water-cooled anode 9 and a side-mounted water-cooled anode 11 are also provided at the bottom of the inner side of the double-door vacuum furnace body 2, a lower central coil 10 is provided at the lower part of the central water-cooled anode 9, and a side-mounted lower coil 12 is provided at the lower part of the side-mounted water-cooled anode 11. A central plasma generator 13 and a side-mounted plasma generator 15 are provided at the top of the inner side of the double-door vacuum furnace body 2, an upper central coil 14 is provided at the upper part of the central plasma generator 13, and a side-mounted upper coil 16 is provided at the upper part of the side-mounted plasma generator 15. In addition, a driven gear 5 is provided at one end of the magnetic fluid main shaft 4, which is located outside the bottom of the vacuum furnace body, and the driven gear 5 is meshed with the driving gear 6. The gear shaft of the driving gear 6 is connected to the output end of the reducer 7 through a coupling, and the input end of the reducer 7 is connected to the output end of the drive motor 8. The air extraction port 17 provided at the rear side of the double-door vacuum furnace body 2 is connected to the air intake port of the molecular pump 18. The control box disposed at the rear of the double-door vacuum furnace body 2 is also provided with an exhaust unit 22, a main control cabinet 19, a water circuit control cabinet 20 and a power supply cabinet 21. The exhaust unit 22 is connected to the molecular pump 18, and the water supply pipeline of the water circuit control cabinet 20 is respectively connected to the water inlet and return ends of the central water-cooled anode 9 and the side-mounted water-cooled anode 11. A control screen 23 is also provided at the front side of the double-door vacuum furnace body 2.

[0047] Example 1 (Preparation of hard coating):

[0048] Arc evaporation sources, square coil-shaped heating devices, arc starting devices, gas charging devices and shielding plates are installed on the six door flanges of the vertical furnace door Ⅰ and the vertical furnace door Ⅱ of the double-door vacuum furnace body, respectively, so that they can be combined into six-arc machines, eight-arc machines, nine-arc machines and twelve-arc machines. The furnace body is equipped with two sets of plasma generators to perform ion cleaning on the workpiece. The bias power supply is connected to the main shaft of the rotating frame to realize the preparation of hard coatings. The main coatings prepared are TiN, CrN, TiAlN, CrAlN, TiAlSiN, etc. The coating preparation process is as follows:

[0049] (1) Vacuuming: After the workpiece is loaded into the furnace, the door is closed and the vacuum degree in the furnace is drawn to 8×10 -3 Pa or above, the working vacuum requirement is met, heating begins, and the temperature in the vacuum chamber is heated to the required working temperature.

[0050] (2) Gas ion cleaning of workpiece surface: The working gas argon is filled into the vacuum chamber to the working pressure, the turntable (the workpiece is mounted on the turntable) is connected to a negative bias voltage, and the plasma generator on the furnace body works to produce arc discharge. The electron stream collides with the argon gas and ionizes it during the process of shooting toward the anode, generating argon ions. The argon ions fly to the surface of the workpiece and bombard the workpiece to achieve the purpose of cleaning.

[0051] (3) Primer: After cleaning, coating begins. In order to improve the bonding strength between the film layer and the workpiece surface, a layer of metal (such as titanium, chromium, etc.) is first plated on the workpiece surface. At this time, the working gas is filled into the vacuum chamber to the required working pressure, and a set of arc evaporation sources equipped with metal targets are turned on to coat the workpiece surface with a layer of metal film to the required thickness.

[0052] (4) Compound layer: After the base layer is completed, a layer of compound (such as TiN, CrN, etc.) is plated on the surface of the workpiece. Nitrogen is filled into the vacuum chamber. After reaching the working pressure, a set of arc evaporation sources equipped with metal targets are turned on to start preparing the compound coating until the required thickness is reached.

[0053] (5) Transition coating: Nitrogen is filled into the vacuum chamber. After reaching the working pressure, two sets of arc evaporation sources, the metal target arc source and the alloy target arc source, begin to coat the film until the required thickness is reached.

[0054] (6) Hybrid ceramic coating: Nitrogen is filled into the vacuum chamber. After reaching the working pressure, two sets of arc evaporation sources with different alloy compositions are turned on to perform coating until the required thickness is achieved.

[0055] (7) Ceramic coating: Nitrogen is filled into the vacuum chamber. After the working pressure is reached, a set of arc evaporation sources of the required alloy targets are turned on to start coating until the required thickness is reached.

[0056] (8) Cooling: After coating, turn off the arc evaporation source and arc power supply, stop heating, turn off the working gas, and cool down.

[0057] (9) Open the door and take out the workpiece: After the coating is completed, turn off the arc evaporation source and power supply, turn off the working gas, let the atmosphere into the vacuum chamber, open the door and take out the workpiece. If continuous work is required, load the workpiece to be plated and repeat the process from (1) to (9).

[0058] Example 2 (Preparation of decorative coating):

[0059] Plane targets, rectangular coil-shaped heating devices, flip shields, electromagnetic coils, gas charging devices, shielding plates, etc. are installed on the six door flanges of the vertical furnace door Ⅰ and the vertical furnace door Ⅱ of the double-door vacuum furnace body, respectively, which can be combined into a magnetron sputtering coating device. Two sets of plasma generators are installed on the furnace body to perform ion cleaning on the workpiece. The bias power supply is connected to the main shaft of the rotating frame. The plane target can be equipped with a DC power supply or an intermediate frequency power supply, so that the preparation of decorative coatings can be realized. The main coatings prepared are TiN, CrN, etc. The coating preparation process is as follows:

[0060] (1) Vacuuming: After the workpiece is loaded into the furnace, the door is closed and the vacuum degree in the furnace is drawn to 8×10 -3Pa or above, the working vacuum requirement is met, heating begins, and the temperature in the vacuum chamber is heated to the required working temperature.

[0061] (2) Gas ion cleaning of workpiece surface: The working gas argon is filled into the vacuum chamber to the working pressure, the turntable (the workpiece is mounted on the turntable) is connected to a negative bias voltage, and the plasma generator on the furnace body works to produce arc discharge. The electron stream collides with the argon gas and ionizes it during the process of shooting toward the anode, generating argon ions. The argon ions fly to the surface of the workpiece and bombard the workpiece to achieve the purpose of cleaning.

[0062] (3) Primer: After cleaning, coating begins. In order to improve the bonding strength between the film layer and the workpiece surface, a layer of metal (such as titanium, chromium, etc.) is first plated on the workpiece surface. At this time, the working gas is filled into the vacuum chamber to the required working pressure, and the flat target is turned on for magnetron sputtering to coat the workpiece surface with a layer of metal film to the required thickness.

[0063] (4) Compound layer: After the base layer is completed, a layer of compound (such as TiN, CrN, TiCN, etc.) is plated on the surface of the workpiece. The working gas and reaction gas are filled into the vacuum chamber. After reaching the working pressure, the flat target is turned on to plate the compound film until the required thickness is reached.

[0064] (5) Cooling: After coating, turn off the arc evaporation source and arc power supply, stop heating, turn off the working gas, and cool down.

[0065] (6) Open the door and take out the workpiece: After the coating is completed, turn off the arc evaporation source and power supply, turn off the working gas, let the atmosphere into the vacuum chamber, open the door to take out the workpiece, and if continuous work is required, load the workpiece to be plated and repeat the process of (1) to (6).

[0066] Example 3 (Preparation of DLC coating using PECVD technology):

[0067] Plane targets, rectangular coil-shaped heating devices, flip shields, electromagnetic coils, gas charging devices and shielding plates are installed on the six door flanges of the vertical furnace door Ⅰ and the vertical furnace door Ⅱ of the double-door vacuum furnace body, respectively, which can be combined into a magnetron sputtering coating device. Two sets of plasma generators are installed on the furnace body to perform ion cleaning on the workpiece. The bias power supply is connected to the main shaft of the rotating frame. The plane target can be equipped with a DC power supply or an intermediate frequency power supply. Magnetron sputtering is used to lay the base layer and transition layer. Finally, the plasma generator is used to generate arc discharge. At the same time, acetylene gas is filled to realize the preparation of DLC coating by PECVD technology. The coating preparation process is as follows:

[0068] (1) Vacuuming: After the workpiece is loaded into the furnace, the door is closed and the vacuum degree in the furnace is drawn to 8×10 -3 Pa or above, the working vacuum requirement is met, heating begins, and the temperature in the vacuum chamber is heated to the required working temperature.

[0069] (2) Gas ion cleaning of workpiece surface: The working gas argon is filled into the vacuum chamber to the working pressure, the turntable (the workpiece is mounted on the turntable) is connected to a negative bias voltage, and the plasma generator on the furnace body works to produce arc discharge. The electron stream collides with the argon gas and ionizes it during the process of shooting toward the anode, generating argon ions. The argon ions fly to the surface of the workpiece and bombard the workpiece to achieve the purpose of cleaning.

[0070] (3) Primer: After cleaning, coating begins. In order to improve the bonding strength between the film layer and the workpiece surface, a layer of metal (such as titanium, chromium, etc.) is first plated on the workpiece surface. At this time, the working gas is filled into the vacuum chamber to the required working pressure, and the flat target is turned on for magnetron sputtering to coat the workpiece surface with a layer of metal film to the required thickness.

[0071] (4) Transition layer: After the base layer is completed, a layer of compound (such as TiN, CrN, etc.) is plated on the surface of the workpiece. Nitrogen is filled into the vacuum chamber. After reaching the working pressure, the flat target is turned on to plate the compound film until the required thickness is reached.

[0072] (5) DLC coating: Using arc PECVD technology, the plasma generator is started to generate arc plasma discharge, and acetylene gas is filled at the same time. The arc electron flow ionizes the acetylene gas to generate carbon ions that are deposited on the surface of the workpiece to form a DLC coating.

[0073] (6) Cooling: After coating, turn off the arc evaporation source and arc power supply, stop heating, turn off the working gas, and cool down.

[0074] (7) Open the door and take out the workpiece: After the coating is completed, turn off the arc evaporation source and power supply, turn off the working gas, let the atmosphere into the vacuum chamber, open the door to take out the workpiece, and if continuous work is required, load the workpiece to be plated and repeat the process from (1) to (7).

Claims

1. A double-door flexible multifunctional vacuum coating device, comprising a furnace support (1), characterized in that: A double-door vacuum furnace body (2) is arranged on the furnace body support (1), a workpiece rotating rack (3) is arranged inside the double-door vacuum furnace body (2), and a driving part of the workpiece rotating rack (3) is connected to a magnetic fluid main shaft (4) arranged at the bottom of the vacuum furnace body through a transmission mechanism; a central water-cooled anode (9) and a side-mounted water-cooled anode (11) are arranged at the bottom of the inner side of the double-door vacuum furnace body (2), a lower central coil (10) is arranged at the lower part of the central water-cooled anode (9), and a side-mounted lower coil (12) is arranged at the lower part of the side-mounted water-cooled anode (11); a central plasma generator (13) and a side-mounted plasma generator (15) are arranged at the top of the inner side of the double-door vacuum furnace body (2), An upper central coil (14) is arranged on the upper part of the central plasma generator (13), and a side-mounted upper coil (16) is arranged on the upper part of the side-mounted plasma generator (15); and a driven gear (5) is arranged on one end of the magnetic fluid main shaft (4) located on the outer side of the bottom of the vacuum furnace body, the driven gear (5) is meshed with the driving gear (6), the gear shaft of the driving gear (6) is connected to the output end of the reducer (7) through a coupling, and the input end of the reducer (7) is connected to the output end of the drive motor (8); an exhaust port (17) is arranged on the rear side of the double-door vacuum furnace body (2), and the exhaust port (17) is connected to the air intake port of the molecular pump (18); the double-door vacuum furnace body (2) is provided with an exhaust port (17) and the exhaust port (17) is connected to the air intake port of the molecular pump (18); A control box disposed at the rear of the furnace body (2) is also provided with an exhaust unit (22), a main control cabinet (19), a water circuit control cabinet (20) and a power supply cabinet (21). The exhaust unit (22) is connected to a molecular pump (18). The water supply pipeline of the water circuit control cabinet (20) is respectively connected to the water inlet and return ends of the central water-cooled anode (9) and the side-mounted water-cooled anode (11). A control screen (23) is also disposed at the front side of the double-door vacuum furnace body (2). The double-door vacuum furnace body (2) comprises a vacuum furnace body (24) with openings on both sides. The exhaust port (17) is disposed at the rear end of the vacuum furnace body (24). The openings on both sides of the vacuum furnace body (24) are respectively provided with movably disposed A vertical furnace door I (25) and a vertical furnace door II (26) are provided, and the ends of the vertical furnace door I (25) and the vertical furnace door II (26) are respectively hinged to the vacuum furnace body (24) through furnace door hinges (27); the vertical furnace door I (25) and the vertical furnace door II (26) have the same structure, and both include a furnace door frame (35), and the furnace door frame (35) is provided with a plurality of groups of furnace door flange plates (37), and the furnace door flange plates (37) are enclosed to form the side surface body of the furnace door, and the furnace door flange plates (37) are also respectively provided with door panel mounting holes (38) for flexibly configuring multifunctional door panels, and the front end of the vacuum furnace body (24) is provided with a reserved door panel mounting opening (34);The furnace door frame (35) is provided with a concealed frame cooling water channel (36), the furnace door flange plate (37) is provided with a concealed flange plate cooling water channel (45), and the end of the flange plate cooling water channel (45) is provided with a flange plate water inlet and return hole (46); the upper end and the lower end of the enclosed furnace door flange plate (37) are respectively provided with a furnace door upper cover (39) and a furnace door lower cover (43); the upper side of the furnace door upper cover (39) is provided with a door upper cover water jacket (40), and the lower side of the furnace door lower cover (43) is provided with a door lower cover water jacket (44); the door upper cover water jacket (40) and the door lower cover water jacket (44) are respectively provided with water jacket water inlet and return holes (41), and the interiors of the door upper cover water jacket (40) and the door lower cover water jacket (44) are also respectively provided with a water jacket for slowing down the flow rate of water. Water retaining strips (42); the number of furnace door flange plates (37) provided on the vertical furnace door I (25) and the vertical furnace door II (26) is three groups respectively, and the vacuum furnace body (24) and the vertical furnace door I (25) and the vertical furnace door II (26) on both sides enclose a cavity structure with an octagonal transverse cross-section; the door panel mounting holes (38) on the three groups of furnace door flange plates (37) of the vertical furnace door I (25) are, in a counterclockwise direction, the first door panel mounting opening (28), the second door panel mounting opening (29) and the third door panel mounting opening (30); the door panel mounting holes (38) on the three groups of furnace door flange plates (37) of the vertical furnace door II (26) are, in a counterclockwise direction, the fourth door panel mounting opening (31), the fifth door panel mounting opening (32) and the sixth door panel mounting opening (33). ; 2. The double-door flexible multifunctional vacuum coating equipment according to claim 1 is characterized in that: The second door panel mounting opening (29) of the vertical furnace door I (25) and the fifth door panel mounting opening (32) of the vertical furnace door II (26) are both provided with heater mounting door panels (48), and the first door panel mounting opening (28) and the third door panel mounting opening (30) of the vertical furnace door I (25) and the fourth door panel mounting opening (31) and the sixth door panel mounting opening (33) of the vertical furnace door II (26) are both provided with planar cathode mounting door panels (47), and the outer sides of the planar cathode mounting door panels (47) are both provided with excitation coils (50); and a blind plate (49) is provided on the reserved door panel mounting opening (34) of the vacuum furnace body (24).

3. The double-door flexible multifunctional vacuum coating equipment according to claim 1 is characterized in that: The second door panel mounting opening (29) of the vertical furnace door I (25) and the fifth door panel mounting opening (32) of the vertical furnace door II (26) are both provided with heater mounting door panels (48), and the first door panel mounting opening (28) and the third door panel mounting opening (30) of the vertical furnace door I (25), and the fourth door panel mounting opening (31) and the sixth door panel mounting opening (33) of the vertical furnace door II (26) are both provided with evaporation source mounting door panels (51); and the reserved door panel mounting opening (34) of the vacuum furnace body (24) is provided with an ion etching device mounting door panel (52).

4. The double-door flexible multifunctional vacuum coating equipment according to claim 2 or 3, characterized in that: The heater installation door panel (48) comprises a door panel body (53), the periphery of which is provided with installation circular holes (54), and a door panel sealing strip (55) is provided on the side of the door panel body (53) facing the inside of the vacuum furnace body; a plurality of groups of heater installation flange holes (61) arranged vertically are provided in the middle of the door panel body (53), and a round heater (56) is provided on each of the heater installation flange holes (61); a heater protection cover (57) is also provided at one end of the round heater (56) located on the outside of the vacuum furnace body; a peripheral cooling copper tube (58) is also provided on the outside of the door panel body (53), and a middle cooling copper tube (59) is also provided on the inner ring of the peripheral cooling copper tube (58) and at the position of the heater installation flange hole (61), and cooling tube water inlet and return holes (60) are respectively provided at the ends of the middle cooling copper tube (59) and the peripheral cooling copper tube (58).

5. The double-door flexible multifunctional vacuum coating equipment according to claim 2 is characterized in that: The planar cathode mounting door plate (47) comprises a door plate body (53), a mounting circular hole (54) is arranged around the periphery of the door plate body (53), and a door plate sealing strip (55) is arranged on the side of the door plate body (53) facing the inside of the vacuum furnace body; and a planar target mounting portion (62) is arranged in the middle of the door plate body (53), and a planar cathode target (64) is arranged on the planar target mounting portion (62); a rotating shielding cover (65) is arranged on the outer cover of the planar cathode target (64), and a driving mechanism on the upper part of the rotating shielding cover (65) is connected to the telescopic end of a rotating shielding cylinder (66), and the rotating shielding cylinder (66) is arranged at the shielding cylinder mounting hole (63) at the upper end of the door plate body (53).

6. The double-door flexible multifunctional vacuum coating equipment according to claim 3 is characterized by: The evaporation source installation door plate (51) comprises a door plate body (53), the periphery of which is provided with installation circular holes (54), and a door plate sealing strip (55) is provided on the side of the door plate body (53) facing the inside of the vacuum furnace body; a plurality of groups of evaporation source installation flange holes (68) and heater installation flange holes (61) arranged alternately in the vertical direction are provided in the middle of the door plate body (53), arc evaporation sources (67) are provided on the evaporation source installation flange holes (68), and arc heaters (56) are provided on the heater installation flange holes (61); and the The outer side of the door panel body (53) is also provided with a curved surrounding cooling copper tube I (69) or a curved surrounding cooling copper tube II (70), and the ends of the curved surrounding cooling copper tubes are respectively provided with cooling tube water inlet and return holes (60); the ion etching device installation door panel (52) also includes a door panel body (53), and a plurality of groups of evaporation source installation flange holes (68) arranged vertically and continuously are provided in the middle of the door panel body (53), and arc evaporation sources (67) are respectively provided on the evaporation source installation flange holes (68), and a curved surrounding cooling copper tube III (71) is provided on the outer side of the door panel body (53).

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