Holosymmetric four-mass gyroscope structure

Abstract

The invention provides a holosymmetric four-mass gyroscope structure which comprises a substrate, a plurality of coupling mechanisms, a plurality of reverse connecting rod mechanisms and four substructures of the same structure, the four substructures are symmetrically arranged in pairs, and every two adjacent substructures are connected through the corresponding coupling mechanism and the corresponding reverse connecting rod mechanism; each substructure comprises a sensitive mass block and a plurality of capacitor assemblies, the plurality of capacitor assemblies are symmetrically distributed in the driving direction and the detection direction of the sensitive mass block, a vibration decoupling mechanism is arranged between the adjacent capacitor assemblies, and the vibration decoupling mechanisms are connected with the sensitive mass block. Adjacent substructures are connected through a coupling mechanism and a reverse connecting rod mechanism, so that a driving interference mode is far away from a working mode, and the environmental adaptability of the gyroscope is improved; and meanwhile, the detection work is in a reverse mode, so that the interference of the detection of a same-direction mode is avoided, a common-mode error signal is also eliminated by a differential working mode, and the performance of the gyroscope is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of inertial sensors, and in particular relates to a fully symmetrical four-mass gyroscope structure. Background Art

[0002] Inertial sensors include accelerometers, gyroscopes, and their single-, dual-, and three-axis combinations. Accelerometers are used to detect the acceleration signals of objects in the three independent axes of the carrier coordinate system, and gyroscopes are used to detect the angular velocity signals of the carrier relative to the navigation coordinate system. By measuring the angular velocity and acceleration of objects in three-dimensional space, they can accurately characterize the posture of the object and have very important application value in navigation.

[0003] In the existing four-mass gyroscope structure, the coupling method between different mass blocks is generally elastic beam connection, so that the movement between the mass blocks is linked. However, this coupling method between different mass blocks makes the same-direction interference mode appear before the reverse working mode. The existence of the same-direction interference mode is not conducive to improving the environmental adaptability of the gyroscope. Summary of the invention

[0004] The purpose of the present invention is to provide a fully symmetrical four-mass gyroscope structure, which can at least solve some of the defects existing in the prior art.

[0005] To achieve the above object, the present invention adopts the following technical solution:

[0006] A fully symmetrical four-mass gyroscope structure comprises a base, a plurality of coupling mechanisms, a plurality of reverse link mechanisms and four substructures with the same structure, wherein the four substructures are arranged symmetrically in pairs, and two adjacent substructures are connected by coupling mechanisms and reverse link mechanisms;

[0007] The substructure includes a sensitive mass block and a plurality of capacitor components, wherein the plurality of capacitor components are symmetrically distributed in a driving direction and a detection direction of the sensitive mass block, a vibration decoupling mechanism is provided between adjacent capacitor components, and the vibration decoupling mechanism is connected to the sensitive mass block.

[0008] Furthermore, the vibration decoupling mechanism includes a plurality of vibration elastic members, and the plurality of vibration elastic members are respectively connected to two adjacent capacitor components and the sensitive mass block.

[0009] Furthermore, the plurality of vibrating elastic members form a regular quadrilateral structure.

[0010] Furthermore, the vibration decoupling mechanism also includes an anchor point, and part of the vibration elastic member is fixed to the base through the anchor point.

[0011] Furthermore, the sensitive mass block is a regular quadrilateral structure, and the ends of two adjacent capacitor components are respectively connected to the four corners of the sensitive mass block.

[0012] Furthermore, both ends of the reverse linkage mechanism are connected to the corresponding substructures through linkage connecting springs.

[0013] Furthermore, the coupling mechanism includes a coupling straight beam and a plurality of coupling oblique beams, one end of the plurality of coupling oblique beams is connected to the coupling straight beam, and the other end is connected to the substructure.

[0014] Furthermore, the substructure is a central rotationally fully symmetrical structure.

[0015] Furthermore, the capacitor assembly includes a frame and at least one group of movable comb teeth and at least one group of fixed comb teeth arranged in the frame; the movable comb teeth and the fixed comb teeth correspond one to one, the fixed comb teeth are anchored on the base, the movable comb teeth are connected to the frame, and the frame is connected to the sensitive mass block through a vibration decoupling mechanism.

[0016] Furthermore, when the above-mentioned fully symmetrical four-mass gyroscope structure vibrates along the driving direction, the four substructures all vibrate along the driving direction and the vibration directions of two adjacent substructures are opposite; when the above-mentioned fully symmetrical four-mass gyroscope structure vibrates along the detection direction, the four substructures all vibrate along the detection direction and the vibration directions of two adjacent substructures are opposite.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] (1) The fully symmetrical four-mass gyroscope structure provided by the present invention adopts a design in which two adjacent substructures are connected by a coupling mechanism and a reverse connecting rod mechanism, so that in the driving direction, the driving interference mode is far away from the working mode, thereby improving the environmental adaptability of the gyroscope; at the same time, in the detection direction, the detection works in the reverse mode, avoiding the interference of the detection mode in the same direction, and at the same time, the differential working mode also eliminates the common-mode error signal, thereby improving the performance of the gyroscope.

[0019] (2) The fully symmetrical four-mass gyroscope structure provided by the present invention adopts a vibration decoupling mechanism of a regular quadrilateral structure, which serves as a vibration spring and provides a decoupling function during vibration. The structure is compact, which is conducive to the miniaturization design of the device.

[0020] (3) The fully symmetrical four-mass gyroscope structure provided by the present invention adopts a regular quadrilateral structure as a whole, has a higher modal matching degree, can effectively improve the signal-to-noise ratio of the gyroscope structure, and further enhance the mechanical sensitivity and zero-bias stability of the structure.

[0021] (4) The fully symmetrical four-mass gyroscope structure provided by the present invention adopts a plurality of comb teeth to double the differential capacitance formed during its vibration, thereby increasing the capacitance detection signal and improving the capacitance signal detection sensitivity.

[0022] The present invention will be further described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the structure of the fully symmetrical four-mass gyroscope of the present invention;

[0024] Figure 2 is a schematic diagram of a single substructure in the fully symmetrical four-mass gyroscope structure of the present invention;

[0025] Figure 3 It is a schematic diagram of the vibration of the sensitive mass block of the fully symmetrical four-mass gyroscope structure of the present invention along the driving direction;

[0026] Figure 4 It is a schematic diagram of the vibration of the sensitive mass block of the fully symmetrical four-mass gyroscope structure of the present invention along the detection direction.

[0027] Explanation of the accompanying drawings: 1. substructure; 2. detection reverse connecting rod mechanism; 3. drive coupling mechanism; 4. detection coupling mechanism; 5. drive reverse connecting rod mechanism; 6. sensitive mass block; 7. drive frame; 8. drive connecting rod connecting spring; 9. first movable comb tooth; 10. first fixed comb tooth; 11. first drive vibration elastic member; 12. first detection vibration elastic member; 13. second detection vibration elastic member; 14. second drive vibration elastic member; 15. detection frame; 16. second movable comb tooth; 17. second fixed comb tooth; 18. detection connecting rod connecting spring; 19. drive coupling oblique beam; 20. drive coupling straight beam; 21. detection coupling oblique beam; 22. detection coupling straight beam; 23. quadrant block. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection or an integral connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features; in the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0032] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, this embodiment provides a fully symmetrical four-mass gyro structure, including a substrate, multiple coupling mechanisms, multiple reverse linkage mechanisms, and four substructures 1 with the same structure, the four substructures 1 are symmetrically arranged in pairs, and two adjacent substructures 1 are connected by coupling mechanisms and reverse linkage mechanisms; for a single substructure 1, the substructure 1 includes a sensitive mass block 6 and multiple capacitor components, the multiple capacitor components are symmetrically distributed in the driving direction and the detection direction of the sensitive mass block 6, and a vibration decoupling mechanism is provided between adjacent capacitor components, the vibration decoupling mechanism is anchored on the substrate (not shown in the figure), and the vibration decoupling mechanism is connected to the sensitive mass block 6. For the convenience of description and understanding, in this embodiment, the capacitor components at both ends of the sensitive mass block 6 along the driving direction are recorded as driving components, and the capacitor components at both ends of the sensitive mass block 6 along the detection direction are recorded as detection components.

[0033] When the sensitive mass block 6 moves along the driving direction, the vibration decoupling mechanism drives the driving components on both sides of the sensitive mass block 6 to move synchronously. During this process, the vibration decoupling mechanism can also separate the vibration between the sensitive mass block 6 and the two detection components. When the sensitive mass block 6 moves in the driving direction, the driving components on both sides of the sensitive mass block 6 can form a differential driving capacitance; When the sensitive mass block 6 moves in the detection direction, the vibration decoupling mechanism drives the two detection components on both sides of the sensitive mass block 6 to move synchronously. During this process, the vibration decoupling mechanism can also separate the vibration between the sensitive mass block 6 and the two driving components. When the sensitive mass block 6 moves in the detection direction, the detection components on both sides of the sensitive mass block 6 can form a differential detection capacitance. In this embodiment, the driving direction is the moving direction of the sensitive mass block 6 in the driving state, that is, Figure 1 The detection direction is the moving direction of the sensitive mass block 6 in the detection state, that is, Figure 1 Middle up and down direction.

[0034] As a specific implementation, the vibration decoupling mechanism includes a plurality of vibration elastic members, and the plurality of vibration elastic members are respectively connected to two adjacent capacitor components and the sensitive mass block 6; the vibration decoupling mechanism also includes an anchor point, and some of the vibration elastic members are fixed to the substrate through the anchor point. Specifically, the ends of the two adjacent capacitor components away from the sensitive mass block 6 are anchored to the same anchor point of the substrate through the vibration elastic member, and the ends of the two adjacent capacitor components close to the sensitive mass block 6 are connected to the sensitive mass block 6 through the vibration elastic member. For ease of understanding, the vibration elastic parts connected to the base on the adjacent driving component and the detection component are respectively recorded as the first driving vibration elastic part 11 and the first detection vibration elastic part 12, and the vibration elastic parts connected to the sensitive mass block 6 on the adjacent driving component and the detection component are respectively recorded as the second detection vibration elastic part 13 and the second driving vibration elastic part 14; wherein, the first driving vibration elastic part 11 and the second driving vibration elastic part 14 can be extended and retracted along the driving direction, and the first detection vibration elastic part 12 and the second detection vibration elastic part 13 can be extended and retracted along the detection direction. The above-mentioned first detection vibration elastic part 12, the second detection vibration elastic part 13, the first driving vibration elastic part 11 and the second driving vibration elastic part 14 can all adopt but are not limited to vibration springs, retractable and bendable U-shaped beams, etc. When the sensitive mass block 6 moves along the driving direction, the first driving vibration elastic member 11 and the second driving vibration elastic member 14 act as vibration springs to drive the driving component to vibrate along the driving direction. At the same time, the driving component is anchored to the substrate through the first driving vibration elastic member 11, thereby ensuring the stability of the movement of the driving component. During this process, the first detection vibration elastic member 12 and the second detection vibration elastic member 13 play a decoupling function, thereby separating the vibration between the sensitive mass block 6 and the detection component. When the sensitive mass block 6 moves along the detection direction, the first detection vibration elastic member 12 and the second detection vibration elastic member 13 act as vibration springs to drive the detection component to vibrate along the detection direction. At the same time, the detection component is anchored to the substrate through the first detection vibration elastic member 12, thereby ensuring the stability of the movement of the detection component. During this process, the first driving vibration elastic member 11 and the second driving vibration elastic member 14 play a decoupling function, thereby separating the vibration between the sensitive mass block 6 and the driving component.

[0035] Preferably, the first detection vibration elastic member 12, the second detection vibration elastic member 13, the first drive vibration elastic member 11 and the second drive vibration elastic member 14 are designed to form a regular quadrilateral structure. Specifically, the first detection vibration elastic member 12 and the first drive vibration elastic member 11 are anchored to the same anchor point of the substrate, and the second detection vibration elastic member 13 and the second drive vibration elastic member 14 are connected to the same vertex angle of the sensitive mass block 6. The vibration coupling mechanism of this structural form acts as a vibration spring and also provides a decoupling function during vibration. It has a compact structure and is conducive to miniaturized design of the device.

[0036] Further preferably, the sensitive mass block 6 is designed to be a regular quadrilateral structure, and the ends of the detection component and the drive component are connected to the four corners of the sensitive mass block 6; and the substructure 1 is designed to be a central rotationally fully symmetrical structure, that is, the sensitive mass block 6 and the comb teeth of the vibration decoupling mechanism, the drive component and the detection component around it are centrally rotationally fully symmetrical, and are a regular quadrilateral structure; on the basis of this structure, four substructures 1 with the same structure are arranged fully symmetrically, so that the gyro structure as a whole presents a fully symmetrical structure form of a regular quadrilateral, and the gyro structure has a higher modal matching degree, which can effectively improve the signal-to-noise ratio of the gyro structure, thereby improving the mechanical sensitivity and zero-bias stability of the structure.

[0037] In an optional implementation manner, in this embodiment, the coupling mechanism is divided into a driving coupling mechanism 3 and a detection coupling mechanism 4 according to different distribution positions; specifically, Figure 1 As shown, in the driving direction, the driving components inside two adjacent substructures 1 are connected via the driving coupling mechanism 3, and in the detection direction, the detection components inside two adjacent substructures 1 are connected via the detection coupling mechanism 4.

[0038] As a specific implementation, the coupling mechanism includes a coupling straight beam and a plurality of coupling oblique beams, wherein one end of the plurality of coupling oblique beams is connected to the coupling straight beam, and the other end is connected to the substructure 1. Specifically, the plurality of coupling oblique beams are symmetrically distributed on both sides of the axis of the coupling straight beam, and the coupling oblique beams on the same side of the coupling straight beam are symmetrically arranged about the perpendicular midline of the coupling straight beam. Specifically, for the driving coupling mechanism 3, it specifically includes a driving coupling straight beam 20 and four driving coupling oblique beams 19, wherein the four driving coupling oblique beams 19 are arranged in groups of two, and are symmetrically distributed on both sides of the driving coupling straight beam 20, and each group of two driving coupling oblique beams 19 forms a V-shape, and the intersection thereof is connected to the driving coupling straight beam 20, and the end of the driving coupling oblique beam 19 away from the driving coupling straight beam 20 is connected to the driving assembly through a quadrant block 23. Wherein, the driving coupling straight beam 20 and the driving coupling oblique beam 19 can bend and deform when subjected to a force. In this embodiment, two adjacent substructures 1 in the driving direction are connected to the driving coupling inclined beam 19 of the driving coupling mechanism 3. When the substructures 1 connected at the left and right ends of the driving coupling mechanism 3 move in the same direction along the driving direction, the common point where the driving coupling straight beam 20 and the driving coupling inclined beam 19 intersect is simultaneously subjected to pressure and tension from the driving coupling inclined beam 19. Since the structures at the left and right ends are symmetrical, the pressure and tension are equal in magnitude and opposite in direction, and the resultant external force at the common point is zero, and the substructures 1 are in a static state, that is, the state of moving in the same direction is suppressed. When the substructures 1 connected at the left and right ends of the driving coupling mechanism 3 move in the same direction, the driving coupling straight beam 20 and the driving coupling inclined beam 19 intersect is subjected to pressure and tension from the driving coupling inclined beam 19. Since the structures at the left and right ends are symmetrical, the pressure and tension are equal in magnitude and opposite in direction, and the resultant external force at the common point is zero, and the substructures 1 are in a static state, that is, the state of moving in the same direction is suppressed. When the substructure 1 moves in the reverse direction along the driving direction, the common point where the driving coupling straight beam 20 and the driving coupling inclined beam 19 intersect is subjected to the pulling force exerted by the driving coupling inclined beam 19, and the resultant external force at the common point is not zero, and is in a movable state, that is, the reverse movement can be carried out; therefore, the two adjacent substructures 1 in the driving direction are designed to be connected by the driving coupling mechanism 3, so that the driving co-directional interference mode can be effectively suppressed, and the co-directional interference vibration frequency is much higher than the reverse working frequency, so that the driving interference mode of the fully symmetrical four-mass gyroscope structure is far away from the working mode, thereby improving the environmental adaptability of the gyroscope.

[0039] Preferably, the driving coupling straight beam 20 is designed as a frame structure, the frame structure includes an upper horizontal section and a lower horizontal section, the ends of the four driving coupling oblique beams 19 are respectively connected to the centers of the upper and lower horizontal sections of the frame structure, and the frame structure also includes an intermediate horizontal section, the center of the intermediate horizontal section is anchored on the substrate through an anchor point; specifically, one end of the upper two driving coupling oblique beams 19 of the driving coupling mechanism 3 is connected to the center of the upper horizontal section of the driving coupling straight beam 20, and the other ends of the upper two driving coupling oblique beams 19 are respectively connected to the upper parts of two adjacent substructures 1, so that when the two substructures 1 move in the opposite direction along the driving direction , the center of the upper horizontal section of the driving coupling straight beam 20 is subjected to the upward pulling force of the two upper driving coupling inclined beams 19, so that the upper horizontal section of the driving coupling straight beam 20 is bent and deformed upward; and when the two substructures 1 move in the same direction along the driving direction, the center of the upper horizontal section of the driving coupling straight beam 20 is subjected to the downward pressure of one of the driving coupling inclined beams 19 and the upward pulling force of the other driving coupling inclined beam 19, the pressure and pulling force are equal in magnitude and opposite in direction, the resultant external force at the center of the upper horizontal section of the driving coupling straight beam 20 is zero, so the upper horizontal section of the driving coupling straight beam 20 is in a static state, that is, the state of moving in the same direction is suppressed. Similarly, one end of the two lower driving coupling inclined beams 19 of the driving coupling mechanism 3 is connected to the center of the lower horizontal section of the driving coupling straight beam 20, and the other ends of the two lower driving coupling inclined beams 19 are respectively connected to the lower parts of the two substructures 1, and when the two substructures 1 vibrate in the driving direction, the state of moving in the same direction of the lower horizontal section of the driving coupling straight beam 20 will be suppressed.

[0040] Similarly, the structure of the detection coupling mechanism 4 is consistent with the structure of the above-mentioned driving coupling mechanism 3. Specifically, the detection coupling mechanism 4 includes a detection coupling straight beam 22 and four detection coupling oblique beams 21. The four detection coupling oblique beams 21 are arranged in groups of two and are symmetrically distributed on both sides of the detection coupling straight beam 22. Each group of two detection coupling oblique beams 21 forms a V shape, and the intersection thereof is connected to the detection coupling straight beam 22. The end of the detection coupling oblique beam 21 away from the detection coupling straight beam 22 is connected to the detection component through a quadrant block 23. Among them, the detection coupling straight beam 22 and the detection coupling oblique beam 21 can be stretched, bent and deformed when subjected to a force. The two adjacent substructures 1 in the detection direction are connected by the detection coupling mechanism 4 of this structural design, so that the two substructures 1 connected by them can move in the opposite direction in the detection direction. The same-direction interference vibration frequency is much higher than the reverse working frequency, which effectively isolates the working mode and the interference mode, so that the detection works in the reverse mode, avoiding the interference of the detection of the same-direction mode. At the same time, the differential working mode also eliminates the common-mode error signal.

[0041] As a specific implementation, in addition to being connected through the above-mentioned driving coupling mechanism 3 and detection coupling mechanism 4, the four substructures 1 are also designed to be connected through a reverse link mechanism between adjacent substructures 1. In this embodiment, the reverse link mechanism is divided into a driving reverse link mechanism 5 and a detection reverse link mechanism 2 according to different distribution positions; specifically, the detection components on the outer sides of two adjacent substructures 1 in the driving direction are designed to be connected through a detection reverse link mechanism 2, and the driving components on the outer sides of two adjacent substructures 1 in the detection direction are connected through a driving reverse link mechanism 5. Among them, the driving reverse link mechanism 5 and the detection reverse link mechanism 2 can both adopt the existing connecting rod reverse transmission mechanism, and their specific structure and working principle are not repeated here; the middle parts of the driving reverse link mechanism 5 and the detection reverse link mechanism 2 are anchored on the base (not shown in the figure), and the two ends of the driving reverse link mechanism 5 and the detection reverse link mechanism 2 are connected to the corresponding substructure 1. By setting the driving reverse link mechanism 5 and the detection reverse link mechanism 2, when the fully symmetrical four-mass gyroscope structure of this embodiment vibrates along the driving direction, as shown in FIG. Figure 3 As shown, the two substructures 1 connected by the same detection coupling mechanism 4 also move in opposite directions; similarly, when the fully symmetrical four-mass gyro structure vibrates along the detection direction, as shown in FIG. Figure 4 As shown, the two substructures 1 connected by the same drive coupling mechanism 3 also move in opposite directions, wherein: Figure 3 and Figure 4 The direction indicated by the middle arrow is the movement direction of the corresponding sensitive mass block 6; that is, through the coordinated arrangement of the driving coupling mechanism 3, the detecting coupling mechanism 4, the driving reverse link mechanism 5 and the detecting reverse link mechanism 2, the movement direction of any substructure 1 can be opposite to the movement direction of the adjacent substructure 1, thereby further improving the environmental adaptability of the gyroscope and the accuracy of capacitance detection.

[0042] Optionally, both ends of the driving reverse link mechanism 5 are connected to the corresponding driving assembly via a driving link connecting spring 8, and both ends of the detecting reverse link mechanism 2 are connected to the corresponding detecting assembly via a detecting link connecting spring 18. The driving link connecting spring 8 can be extended and retracted along the driving direction, and the detecting link connecting spring 18 can be extended and retracted along the detecting direction.

[0043] In some embodiments, the capacitor assembly includes a frame and at least one group of movable comb teeth and at least one group of fixed comb teeth disposed in the frame; the movable comb teeth and the fixed comb teeth correspond one-to-one, the fixed comb teeth are anchored on the substrate, the movable comb teeth are connected to the frame, and the frame is connected to the sensitive mass block 6 through a vibration decoupling mechanism. Specifically, for the driving assembly, the driving assembly includes a driving frame 7 and at least one group of first movable comb teeth 9 and at least one group of first fixed comb teeth 10 disposed in the driving frame 7; the first movable comb teeth 9 and the first fixed comb teeth 10 correspond one-to-one, the first fixed comb teeth 10 are anchored on the substrate, and the first movable comb teeth 9 are connected to the driving frame 7. When adjacent sensitive mass blocks 6 in the fully symmetrical four-mass gyroscope structure move in opposite directions along the driving direction, as shown in FIG. Figure 2 and Figure 3 As shown, for a substructure 1, a variable capacitor is formed between its first movable comb teeth 9 and the first fixed comb teeth 10. Since the first movable comb teeth 9 and the first fixed comb teeth 10 of the two driving components at the left and right ends of the sensitive mass block 6 are symmetrically distributed about the sensitive mass block 6, the capacitance values ​​at the left and right ends of the sensitive mass block 6 increase and decrease respectively, and the capacitances at the two ends are differentiated to form a differential capacitance, which increases the driving capacitance and thus increases the driving capability. The comb tooth arrays on the four sensitive mass blocks 6 further increase the driving capability and improve the subsequent capacitance detection sensitivity.

[0044] As for the detection component, the detection component includes a detection frame 15 and at least one group of second movable comb teeth 16 and at least one group of second fixed comb teeth 17 arranged in the detection frame 15; the second movable comb teeth 16 and the second fixed comb teeth 17 correspond to each other, the second fixed comb teeth 17 are anchored on the substrate, and the second movable comb teeth 16 are connected to the detection frame 15. When the adjacent sensitive mass blocks 6 in the fully symmetrical four-mass gyro structure move in opposite directions along the detection direction, as Figure 2 and Figure 4 As shown, for a substructure 1, a variable capacitor is formed between its second movable comb teeth 16 and the second fixed comb teeth 17. Since the second movable comb teeth 16 and the second fixed comb teeth 17 of the two detection components at the upper and lower ends of the sensitive mass block 6 are symmetrically distributed about the sensitive mass block 6, the capacitance values ​​at the upper and lower ends of the sensitive mass block 6 increase and decrease respectively, and the capacitances at the two ends are differentiated to form a differential capacitance, which increases the capacitance detection signal. At the same time, the common mode error signal is differentially subtracted. The comb tooth arrays on the four sensitive mass blocks 6 further increase the capacitance detection signal and improve the capacitance detection sensitivity.

[0045] It should be noted that in the present invention, Figure 3 and Figure 4 A symmetrical four-mass gyroscope vibrates along the driving direction and the detection direction respectively, and the schematic diagram of the final state of the motion of its movable parts. In order to reflect the motion effect, the movement displacement of the movable parts in the figure is exaggerated.

[0046] The above examples are merely illustrative of the present invention and do not constitute a limitation on the protection scope of the present invention. All designs that are the same or similar to the present invention fall within the protection scope of the present invention.

Claims

1. A fully symmetrical four-mass gyroscope structure, characterized in that: It comprises a base, a plurality of coupling mechanisms, a plurality of reverse link mechanisms and four substructures with the same structure, wherein the four substructures are symmetrically arranged in pairs, and two adjacent substructures are connected by the coupling mechanism and the reverse link mechanism; The substructure includes a sensitive mass block and a plurality of capacitor components, wherein the plurality of capacitor components are symmetrically distributed in a driving direction and a detection direction of the sensitive mass block, a vibration decoupling mechanism is provided between adjacent capacitor components, and the vibration decoupling mechanism is connected to the sensitive mass block.

2. The fully symmetrical four-mass gyroscope structure according to claim 1, characterized in that: The vibration decoupling mechanism includes a plurality of vibration elastic members, and the plurality of vibration elastic members are respectively connected to two adjacent capacitor components and the sensitive mass block.

3. The fully symmetrical four-mass gyroscope structure as claimed in claim 2, characterized in that: The plurality of vibrating elastic members form a regular quadrilateral structure.

4. The fully symmetrical four-mass gyroscope structure as claimed in claim 2, characterized in that: The vibration decoupling mechanism further comprises an anchor point, and part of the vibration elastic member is fixed on the base through the anchor point.

5. The fully symmetrical four-mass gyroscope structure according to claim 1, characterized in that: The sensitive mass block is a regular quadrilateral structure, and the ends of two adjacent capacitor components are respectively connected to the four corners of the sensitive mass block.

6. The fully symmetrical four-mass gyroscope structure according to claim 1, characterized in that: Both ends of the reverse link mechanism are connected to the corresponding substructures through link connection springs.

7. The fully symmetrical four-mass gyroscope structure according to claim 1, characterized in that: The coupling mechanism comprises a coupling straight beam and a plurality of coupling oblique beams, one end of the plurality of coupling oblique beams is connected to the coupling straight beam, and the other end is connected to the substructure.

8. The fully symmetrical four-mass gyroscope structure according to claim 1, characterized in that: The substructure is a central rotationally fully symmetrical structure.

9. The fully symmetrical four-mass gyroscope structure according to claim 1, characterized in that: The capacitor assembly includes a frame and at least one group of movable comb teeth and at least one group of fixed comb teeth arranged in the frame; the movable comb teeth and the fixed comb teeth correspond one to one, the fixed comb teeth are anchored on the base, the movable comb teeth are connected to the frame, and the frame is connected to the sensitive mass block through a vibration decoupling mechanism.

10. The fully symmetrical four-mass gyroscope structure according to claim 1, characterized in that: When the fully symmetrical four-mass gyro structure vibrates along the driving direction, the four substructures all vibrate along the driving direction and the vibration directions of two adjacent substructures are opposite; when the fully symmetrical four-mass gyro structure vibrates along the detection direction, the four substructures all vibrate along the detection direction and the vibration directions of two adjacent substructures are opposite.

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