Anti-rod-falling protection device and system and single crystal furnace

Abstract

The present invention relates to the technical field of single crystal furnaces, and provides an anti-rod-falling protection device and system, and a single crystal furnace, the device comprises: a clamping mechanism suitable for being arranged on an isolation valve in the single crystal furnace, the isolation valve is provided with a through hole for a crystal rod to pass through; the clamping mechanism is provided with at least two clamping parts distributed on the two opposite sides of the through hole, and at least one clamping part can move close to the through hole. Through the arrangement, the original structure of the single crystal furnace is slightly changed, and the sealing difficulty is not increased; the influence on the strength, rigidity and other properties of the single crystal furnace is effectively avoided; and the actuating mechanism is arranged outside the single crystal furnace, so that the sealing difficulty is not additionally increased, the influence of high temperature in the furnace in the working process is avoided, and the operation reliability is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal furnaces, and in particular to a rod-dropping prevention protection device, a system and a single crystal furnace. Background Art

[0002] As the basic material of the modern electronic industry, single crystal silicon plays a vital role in integrated circuits, solar panels and many other high-tech products. The Czochralski single crystal furnace is a device for preparing single crystal ingots. Under the rotation and pulling action of the pulling head, the seed crystal gradually grows into a single crystal ingot of the required size. As the size of the single crystal ingot increases, the stress at the seed crystal necking will also increase, and there is a certain probability that this part will break. Once the crystal ingot falls, it will hit the crucible and other equipment in the furnace, causing serious equipment damage and even safety accidents.

[0003] In the related technology, the conventional practice is to open a mounting hole on the push-pull sub-chamber, and use flanges and other connecting parts to install the locking mechanism into the cavity of the pulling sub-chamber through the mounting hole. When working, an electric push rod is used to push the locking mechanism to move to hold the crystal rod tightly to prevent the broken crystal rod from hitting the equipment in the single crystal furnace.

[0004] However, in the above-mentioned related technologies, the installation of the locking mechanism will greatly increase the sealing requirements of the auxiliary chamber, increase the sealing difficulty, and have an adverse effect on the strength and rigidity of the auxiliary chamber. Summary of the invention

[0005] The present invention provides a rod-dropping prevention protection device, system and single crystal furnace, which are used to solve the defect that the locking mechanism in the prior art will change the original structure of the single crystal furnace and have an adverse effect on the sealing and performance of the single crystal furnace. The device has the advantages of not changing the original structure of the single crystal furnace during installation, having little effect on the sealing and performance of the single crystal furnace, and having high operating reliability.

[0006] The present invention provides a rod-dropping prevention protection device, comprising: The clamping mechanism is suitable for being arranged on an isolation valve in a single crystal furnace, and the isolation valve is provided with a through hole for allowing a crystal rod to pass through; the clamping mechanism is provided with at least two clamping parts distributed on opposite sides of the through hole, and at least one of the clamping parts can move close to the through hole.

[0007] According to the present invention, a rod-dropping protection device further includes an actuator, which is arranged outside the single crystal furnace and can apply magnetic force to the clamping part, so as to control the clamping part to move close to the through hole according to a control instruction.

[0008] According to a rod-dropping prevention protection device provided by the present invention, the clamping mechanism comprises a first clamping mechanism and a second clamping mechanism; The clamping portion includes a first clamping portion provided on the first clamping mechanism, and a second clamping portion provided on the second clamping mechanism; the second clamping portion can move close to the through hole.

[0009] According to a rod-dropping prevention protection device provided by the present invention, a surface of the first clamping portion facing the through hole is configured as an arc-shaped first clamping surface for fitting the outer peripheral surface of the crystal rod.

[0010] According to the rod-dropping prevention protection device provided by the present invention, anti-slip teeth are arranged on the first clamping surface.

[0011] According to a rod-dropping protection device provided by the present invention, the second clamping mechanism further includes a base, a bracket is connected to the base, the second clamping portion is hinged to the bracket, and the hinge axis deviates from the center of the second clamping portion.

[0012] According to the rod-dropping prevention protection device provided by the present invention, an arc-shaped second clamping surface is provided on the outer periphery of the second clamping portion for fitting with the outer peripheral surface of the crystal rod.

[0013] According to a rod-dropping prevention protection device provided by the present invention, the actuator includes an electromagnet, and the second clamping portion is provided with a magnetic member capable of attracting or repelling the electromagnet.

[0014] According to the present invention, a rod-dropping prevention protection device further comprises an elastic member, wherein the elastic force direction of the elastic member is opposite to the magnetic force direction between the actuator and the second clamping portion.

[0015] According to the rod-dropping prevention protection device provided by the present invention, the second clamping mechanism further includes a limiting portion for limiting the angle at which the second clamping portion rotates toward the base.

[0016] According to the rod-dropping prevention protection device provided by the present invention, the limiting portion is fixedly connected to the base and is located on the rotation path of the second clamping portion.

[0017] According to the rod-dropping prevention protection device provided by the present invention, the second clamping portion includes a cam.

[0018] According to the rod-dropping prevention protection device provided by the present invention, the elastic member comprises a torsion spring, the torsion spring is sleeved on the hinge shaft and the two ends of the torsion spring are respectively connected to the base and the second clamping part.

[0019] According to a rod-dropping protection device provided by the present invention, the second clamping mechanism further comprises a lever, the second clamping portion is fixedly connected to the hinge shaft, one end of the lever is connected to the hinge shaft, and a first connection point is provided near the other end; a second connection point is provided on the bracket, and the hinge shaft is located between the first connection point and the second connection point; The elastic member is a tension spring, and two ends of the tension spring are respectively connected to the first connection point and the second connection point; The actuator also includes a seat body and a swing arm, wherein the swing arm is hinged to the seat body; the magnetic member is connected to the first end of the swing arm, and a trigger rod is provided at the second end of the swing arm, wherein the trigger rod is located on the side of the shifting rod.

[0020] The present invention also provides a rod-dropping prevention protection system, comprising a sensing component, a controller, and any one of the rod-dropping prevention protection devices described above; The sensing component is used to detect whether the crystal rod is broken; The controller is in communication connection with the sensing component and the actuator of the anti-dropping rod protection device. When the crystal rod breaks, the controller sends a control instruction to the actuator to control the clamping part to move close to the through hole.

[0021] According to a rod-dropping protection system provided by the present invention, the induction component adopts a liquid contact circuit formed by a crystal rod, silicon liquid and an external circuit.

[0022] The present invention also provides a single crystal furnace, comprising any one of the above-mentioned rod-dropping protection devices or any one of the above-mentioned rod-dropping protection systems.

[0023] In the rod-dropping protection device, system and single crystal furnace provided by the present invention, the seed crystal gradually passes through the through hole on the isolation valve and enters the pulling sub-chamber under the rotation and pulling action of the pulling head. As the crystal rod grows, the stress at the neck of the seed crystal gradually increases. When a breakage problem occurs, the actuator controls the clamping part to move close to the through hole, and locks the crystal rod under the joint clamping of multiple clamping parts to prevent the crystal rod from falling and hitting the equipment in the single crystal furnace, effectively avoiding equipment loss and safety accidents. Compared with the related art, the clamping mechanism uses the isolation valve as the installation basis, and the clamping part is controlled by magnetic force cooperation with the actuator outside the single crystal furnace. During installation, the existing structure is fully utilized for installation, and the original structure is changed very little, which will not increase the difficulty of sealing and effectively avoid the influence on the performance of the single crystal furnace such as strength and rigidity; in addition, the actuator is arranged outside the single crystal furnace, and the wiring harness does not need to be inserted into the single crystal furnace cavity, which will not increase the difficulty of sealing, and the actuator will not be affected by the high temperature in the furnace during operation, ensuring the reliability of operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 It is a schematic diagram of the structure of a single crystal furnace provided in an embodiment of the present invention.

[0026] Figure 2 It is a structural schematic diagram of the cooperation between the rod-dropping prevention protection device and the isolation valve provided in an embodiment of the present invention.

[0027] Figure 3 It is a structural schematic diagram of a first clamping mechanism provided by an embodiment of the present invention.

[0028] Figure 4 It is a structural schematic diagram of a first clamping mechanism provided in another embodiment of the present invention.

[0029] Figure 5 This is one of the structural schematic diagrams of the second clamping mechanism provided by an embodiment of the present invention.

[0030] Figure 6 This is the second structural schematic diagram of the second clamping mechanism provided by an embodiment of the present invention.

[0031] Figure 7 It is a structural schematic diagram of a second clamping mechanism provided in another embodiment of the present invention.

[0032] Reference numerals: 1. Single crystal furnace; 10. Main furnace chamber; 11. Lifting sub-chamber; 12. Isolation valve; 13. Crystal rod; 2. First clamping mechanism; 20. First clamping part; 200. First clamping surface; 201. Anti-slip teeth; 21. Fixed seat; 22. Reinforcement plate; 3. Second clamping mechanism; 30. Second clamping part; 300. Second clamping surface; 301. Magnetic part; 31. Base; 32. Bracket; 33. Articulated shaft; 34. Limiting part; 35. Elastic part; 36. Lever; 4. Actuator; 40. Swing arm; 400. Trigger rod; 41. Seat; 42. Pin shaft. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] In order to facilitate understanding of the anti-rod drop protection device, system and single crystal furnace provided by the present invention, their application background is first introduced. When a single crystal rod is prepared by a Czochralski single crystal furnace, as the size of the single crystal rod increases, the stress at the seed crystal necking point will also increase, and there is a certain probability of fracture at this position. Once the crystal rod falls, it will hit the crucible and other equipment in the furnace, causing serious equipment damage and even safety accidents.

[0035] In the related technology, the conventional practice is to open a mounting hole on the push-pull sub-chamber, and use flanges and other connecting parts to install the locking mechanism into the cavity of the pulling sub-chamber through the mounting hole. When working, an electric push rod is used to drive the locking mechanism to move to hold the crystal rod tightly to prevent the broken crystal rod from hitting the equipment in the single crystal furnace.

[0036] However, in the above-mentioned related technologies, the installation of the locking mechanism changes the original structure of the single crystal furnace, and in order to ensure the stable operation of the locking mechanism, the wiring harness of the electric push rod must be inserted into the cavity to power the electric push rod, which will greatly increase the sealing requirements of the sub-chamber and increase the difficulty of sealing; and the electric push rod placed in the sub-chamber cavity must withstand a higher temperature, and its reliability is difficult to guarantee; in addition, the change of the original structure of the sub-chamber will have an adverse effect on the strength and rigidity of the sub-chamber.

[0037] In response to the above problems, the present invention provides a rod-dropping prevention protection device, system and single crystal furnace, which have the advantages of not changing the original structure of the single crystal furnace during installation, having little impact on the sealing and performance of the single crystal furnace, and having high operating reliability.

[0038] Combine the following Figure 1-Figure 7 The invention describes a rod-dropping prevention protection device, system and single crystal furnace.

[0039] Reference Figure 1 and Figure 2 A rod-dropping protection device is provided, which is suitable for cooperating with a single crystal furnace 1; the single crystal furnace 1 comprises a main furnace chamber 10 and a pulling sub-chamber 11, an opening and closing isolation valve 12 is arranged between the main furnace chamber 10 and the pulling sub-chamber 11, and a through hole is arranged on the isolation valve 12 for supplying a crystal rod 13 to enter the pulling sub-chamber 11.

[0040] Reference Figure 2The rod-dropping protection device includes a clamping mechanism and an actuator 4; wherein the clamping mechanism is suitable for being arranged in the single crystal furnace 1 and connected to the isolation valve 12 between the main furnace chamber 10 and the pulling sub-chamber 11, and the clamping mechanism is provided with a clamping portion facing the through hole, and the clamping portion has at least two and multiple clamping portions are at least distributed on two opposite sides of the through hole, and at least one of the clamping portions of the clamping mechanism can move close to the through hole; the actuator 4 is arranged outside the single crystal furnace 1 and can apply a magnetic force to the clamping portion outside the single crystal furnace 1, so as to control the clamping portion to move close to the through hole according to a control instruction.

[0041] In actual work, the clamping mechanism is arranged on the isolation valve 12. Under the rotation and pulling action of the pulling head, the seed crystal gradually passes through the through hole on the isolation valve 12 and enters the pulling sub-chamber 11. As the crystal rod 13 grows, the stress at the necking point of the seed crystal gradually increases. When a fracture problem occurs, the actuator 4 controls the clamping part to move close to the through hole, and locks the crystal rod 13 under the joint clamping of the clamping parts on multiple clamping mechanisms, preventing the crystal rod 13 from falling and hitting the equipment in the single crystal furnace 1, thereby effectively avoiding equipment losses and safety accidents.

[0042] Compared with the related art, the clamping mechanism uses the isolation valve 12 as the installation basis, and the clamping part is controlled by magnetic cooperation with the actuator 4 outside the single crystal furnace 1. During installation, the existing structure is fully utilized for installation, and the change to the original structure is very small, which will not increase the sealing difficulty and effectively avoid the impact on the strength and rigidity of the single crystal furnace 1. In addition, the actuator 4 is arranged outside the single crystal furnace 1, and the wiring harness does not need to be inserted into the cavity of the single crystal furnace 1, which will not increase the sealing difficulty. The actuator 4 will not be affected by the high temperature in the furnace during operation, thereby ensuring the reliability of operation.

[0043] Specifically, at least two clamping mechanisms are evenly arranged around the through hole, and a clamping portion is provided on a side of each clamping mechanism facing the through hole.

[0044] Specifically, the actuator 4 is an electromagnetic actuator, so that the actuator 4 cooperates with the clamping part magnetically.

[0045] In one embodiment of the present invention, the clamping mechanism includes a first clamping mechanism 2 and a second clamping mechanism 3, and the clamping part includes a first clamping part 20 and a second clamping part 30; wherein the first clamping part 20 is arranged on the first clamping mechanism 2, the second clamping part 30 is arranged on the second clamping mechanism 3, and the second clamping part 30 can move close to the through hole under the action of the actuator 4.

[0046] It is understandable that the above-mentioned multiple clamping mechanisms can all be set as the second clamping mechanism 3, that is, the clamping part of each clamping mechanism can move close to the through hole, and when the crystal rod 13 breaks, the second clamping parts 30 of the multiple second clamping mechanisms 3 simultaneously move close to the through hole to lock the crystal rod 13. The above-mentioned multiple clamping mechanisms can be partially set as the first clamping mechanism 2, and the other part can be set as the second clamping mechanism 3. When the crystal rod 13 breaks, the second clamping part 30 of the second clamping mechanism 3 moves close to the through hole to push the crystal rod 13 to the first clamping part 20 of the first clamping mechanism 2, and the first clamping part 20 and the second clamping part 30 jointly lock the crystal rod 13.

[0047] The above two arrangements of the clamping mechanism can be selected according to actual needs, but it is necessary to ensure that at least one clamping mechanism adopts the second clamping mechanism 3. In addition, according to different needs, the clamping mechanism can be integral or split. When the clamping mechanism is an integral structure, multiple clamping parts are connected as a whole, and the clamping of the crystal rod is achieved by cooperating with the clamping parts at different positions. When the clamping mechanism is a split structure, two, three or more clamping mechanisms can be evenly arranged around the through hole. Since multiple clamping mechanisms are evenly arranged around the through hole, the crystal rod 13 is located at the center of multiple clamping mechanisms. During the locking process, the crystal rod 13 is evenly stressed, which effectively avoids the problem of excessive local stress on the crystal rod 13 and fracture.

[0048] In this embodiment, two clamping mechanisms are arranged, namely a first clamping mechanism 2 and a second clamping mechanism 3. When the crystal rod 13 breaks, the second clamping portion 30 of the second clamping mechanism 3 moves close to the through hole to push the crystal rod 13 toward the first clamping mechanism 2 on the opposite side. The first clamping portion 20 and the second clamping portion 30 jointly lock the crystal rod 13.

[0049] In one embodiment of the present invention, referring to Figure 3 , the first clamping part 20 has a side facing the through hole set to an arc-shaped first clamping surface 200. In actual operation, when the crystal rod 13 breaks, the crystal rod 13 moves toward the first clamping part 20 and fits with the first clamping surface 200 under the push of the second clamping part 30. The arc-shaped first clamping surface 200 can support the crystal rod 13 to prevent the crystal rod 13 from falling toward the inner wall of the lifting sub-chamber 11 and causing secondary damage.

[0050] In another embodiment of the present invention, referring to Figure 4 The first clamping surface 200 is provided with anti-skid teeth 201. The anti-skid teeth 201 can increase the roughness of the first clamping surface 200, thereby increasing the friction between the first clamping surface 200 and the crystal rod 13, and improving the stability of clamping the crystal rod 13.

[0051] In order to facilitate the connection of the first clamping mechanism 2 to the isolation valve 12, the first clamping mechanism 2 also includes a fixed seat 21, and the first clamping portion 20 is an arc-shaped plate structure and is fixedly connected to the fixed seat 21; the shape of the fixed seat 21 is adapted to the shape of the isolation valve 12, and both are arc-shaped, so that when the first clamping mechanism 2 is installed, the fixed seat 21 can fit the isolation valve 12, and a fixing hole is provided on the fixed seat 21, and a connecting hole can be provided at a corresponding position on the isolation valve 12, so that the fixed seat 21 and the isolation valve 12 can be connected by connecting components such as bolts.

[0052] The first clamping part 20 and the fixing seat 21 can be fixed by welding or integrally formed, and the specific method can be selected according to actual needs. In this embodiment, in order to improve the structural strength of the first clamping mechanism 2, the first clamping part 20 and the fixing seat 21 are integrally formed.

[0053] In addition, in order to further improve the structural strength of the first clamping part 20, a reinforcing plate 22 may be provided between the first clamping part 20 and the fixing seat 21, one side of the reinforcing plate 22 being fixedly connected to the fixing seat 21, and the other side being fixedly connected to the other side of the first clamping part 20 relative to the first clamping surface 200. The reinforcing plate 22 may improve the stability of the connection of the first clamping part 20 to the fixing seat 21, avoid the problem of the first clamping part 20 being deformed by the radial force, and ensure that the first clamping part 20 can cooperate with the second clamping part 30 to stably lock the crystal rod 13.

[0054] In one embodiment of the present invention, referring to Figure 5 and Figure 6 The second clamping mechanism 3 also includes a base 31, to which a bracket 32 ​​is fixedly connected. The second clamping portion 30 is hinged to the bracket 32, and the hinge axis 33 deviates from the center of the second clamping portion 30, so that when the second clamping portion 30 rotates around the hinge axis 33, its periphery can move closer to or away from the through hole.

[0055] Specifically, the shape of the base 31 is adapted to the shape of the isolation valve 12, and both are arc-shaped, so that when the second clamping mechanism 3 is installed, the base 31 can fit with the isolation valve 12. A mounting hole is provided on the base 31, and a connecting hole can be provided at a corresponding position on the isolation valve 12, so that the base 31 and the isolation valve 12 can be connected by connecting components such as bolts.

[0056] The bracket 32 ​​is connected to the base 31 and encloses the base 31 to form a U-shaped structure with the opening facing upward. The bracket 32 ​​and the base 31 can be fixed by welding or integrally formed. In this embodiment, in order to improve the structural strength of the second clamping mechanism 3, the bracket 32 ​​is integrally formed on the base 31.

[0057] The outer periphery of the second clamping part 30 is provided with an arc-shaped second clamping surface 300, and the second clamping surface 300 is used to fit the outer periphery of the crystal rod 13. When the crystal rod 13 breaks, the second clamping part 30 rotates around the hinge shaft 33 to make the second clamping surface move close to the through hole, and the second clamping surface 300 near the bottom of the second clamping part 30 first contacts the outer periphery of the crystal rod 13. As the crystal rod 13 falls, the second clamping part 30 is forced to continue to rotate under the action of friction, and the second clamping part 30 moves further close to the through hole, so that the second clamping surface 300 cooperates with the first clamping surface 200 to hold the crystal rod 13 tightly, preventing the crystal rod 13 from falling further.

[0058] It should be noted here that in the above technical solution, when the second clamping part 30 locks the crystal rod 13, the second clamping surface 300 initially only needs to contact the outer peripheral surface of the crystal rod 13, and utilizes the friction between the crystal rod 13 and the second clamping surface 300 when it falls to force the second clamping part 30 to continue to rotate, thereby achieving self-locking, and does not rely on the actuator 4 or other external forces to clamp the crystal rod 13.

[0059] Specifically, the second clamping portion 30 may be a cam.

[0060] In one embodiment of the present invention, the second clamping mechanism 3 further includes a limiter 34 for limiting the rotation angle of the second clamping portion 30 toward the base 31. With this arrangement, even if the crystal ingot 13 is subjected to excessive impact when falling and is broken when being locked by the second clamping portion 30, the limiter 34 will limit the maximum rotation angle of the second clamping portion 30, preventing a large section of the crystal ingot 13 from continuing to fall, thereby avoiding significant losses.

[0061] Specifically, the limiter 34 is fixedly connected to the base 31 and is located on the rotation path of the second clamping part 30. When the crystal ingot 13 falls with too much impact, the second clamping part 30 will stop rotating when it hits the limiter 34, thereby playing a protective role and preventing the crystal ingot 13 above from continuing to fall.

[0062] In one embodiment of the present invention, the second clamping surface 300 is arranged to be arc-shaped in a direction parallel to the hinge axis 33. In actual operation, when the crystal rod 13 breaks, the second clamping portion 30 moves close to the through hole. Since the second clamping surface 300 is arranged to be arc-shaped in the axial direction of the hinge axis 33, the second clamping surface 300 can fit with the outer peripheral surface of the crystal rod 13. The second clamping surface 300 can support the crystal rod 13 while pushing the crystal rod 13, thereby preventing the crystal rod 13 from falling toward the inner wall of the pulling sub-chamber 11 and causing secondary damage.

[0063] In one embodiment of the present invention, the actuator 4 includes an electromagnet, and a magnetic member 301 capable of attracting or repelling the electromagnet is provided on the second clamping portion 30. The second clamping portion 30 can be switched between the working state and the non-working state through the mutual attraction or repulsion between the electromagnet and the magnetic member 301.

[0064] In a specific embodiment of the present invention, when the electromagnet and the magnetic member 301 are configured to attract each other, the electromagnet attracts the magnetic member 301 when it is powered on, so that the second clamping part 30 is kept at a predetermined position, and the second clamping part 30 is in a non-working state. When the electromagnet is powered off, the magnetic force between the electromagnet and the magnetic member 301 disappears, and the second clamping part 30 can rotate around the hinge shaft 33 under the action of elastic force, gravity, etc. and move close to the through hole to lock the crystal rod 13. In this embodiment, the magnetic member 301 can be a permanent magnet or a magnetic metal.

[0065] When the electromagnet and the magnetic member 301 are configured to repel each other, the second clamping part 30 is in a non-working state when the electromagnet is powered off, and the second clamping part 30 can be kept in a certain position under the action of gravity, elastic force, etc. When the electromagnet is powered on, a repulsive force is generated between the electromagnet and the magnetic member 301, pushing the second clamping part 30 to rotate around the hinge shaft 33 and move close to the through hole to lock the crystal rod 13. In this embodiment, the magnetic member 301 can be a permanent magnet.

[0066] In order to ensure that the second clamping part 30 can respond quickly and operate stably and reliably, in one embodiment of the present invention, the anti-drop rod protection device also includes an elastic member 35, and the elastic force direction of the elastic member 35 is opposite to the magnetic force direction of the actuator 4 and the second clamping part 30.

[0067] In a specific application scenario, the electromagnet and the magnetic part 301 are configured to attract each other. The electromagnet attracts the magnetic part 301 when it is energized, and the second clamping part 30 remains in a non-working state. When the electromagnet is powered off, the magnetic force between the electromagnet and the magnetic part 301 disappears. Under the elastic force of the elastic part 35, the second clamping part 30 quickly rotates around the hinge shaft 33 and moves close to the through hole to lock the crystal rod 13.

[0068] In another specific application scenario, the electromagnet and the magnetic part 301 are configured to repel each other. When the electromagnet is powered off, the magnetic force between the electromagnet and the magnetic part 301 disappears. Under the elastic force of the elastic part 35, the second clamping part 30 is in a non-working state. When the electromagnet is energized, it pushes the second clamping part 30 to rotate around the hinge shaft 33 and move close to the through hole to lock the crystal rod 13.

[0069] Specifically, the specific structure and type of the elastic member 35 can be selected according to actual needs. In this embodiment, the elastic member 35 is a torsion spring, which is sleeved on the hinge shaft 33 and has two ends respectively connected to the bracket 32 ​​and the second clamping portion 30.

[0070] It can be understood that the actuator 4 and the second clamping part 30 include but are not limited to the cooperation methods listed above. In other embodiments, a transmission mechanism, such as a connecting rod transmission mechanism, can be provided on the second clamping mechanism 3, and the magnetic part 301 can be connected to the transmission mechanism. The transmission mechanism is driven to move by the actuator 4, thereby indirectly driving the second clamping part 30 to move.

[0071] For example, refer to Figure 7 In another embodiment of the present invention, the second clamping mechanism 3 also includes a lever 36; the second clamping portion 30 is fixedly connected to the hinge shaft 33, the lever 36 is located on the outside of the bracket 32, and one end of the lever 36 is fixedly connected to the end of the hinge shaft 33 passing through the outside of the bracket 32, a first connection point is provided on the lever 36 near the other end, and a second connection point is provided on the bracket 32, and the second connection point is located below the hinge shaft 33.

[0072] The elastic member 35 is a tension spring, and the two ends of the tension spring are fixedly connected to the first connection point and the second connection point respectively. When the first connection point, the hinge shaft 33 and the second connection point are on the same straight line, the tension spring reaches the maximum stretching state, and the direction of the elastic force of the tension spring is colinear with the line connecting the first connection point, the hinge shaft 33 and the second connection point. Since there is no radial force component, the lever 36 is at a structural dead point at this time, and the second clamping part 30 is stable in a non-working state.

[0073] In addition to the electromagnet, the actuator 4 also includes a swing arm 40 and a seat body 41; wherein the seat body 41 can be fixedly connected to the furnace wall of the single crystal furnace 1; the swing arm 40 is hinged to the seat body 41 through a pin shaft 42, and the axis of the pin shaft 42 is parallel to the axis of the hinge shaft 33. The swing arm 40 is perpendicular to the pin shaft 42, one end of which is relatively far away from the second clamping mechanism 3 to form a first end, and the other end is relatively close to the second clamping mechanism 3 to form a second end. When the swing arm 40 swings around the pin shaft 42, the second end can move toward or away from the lever 36.

[0074] The magnetic member 301 is fixedly connected to the first end of the swing arm 40. The second end of the swing arm 40 is provided with a trigger rod 400. The trigger rod 400 extends along the axial direction of the pin shaft 42 and is located on the radial side of the lever 36 along the hinge axis 33. When the swing arm 40 swings around the pin shaft 42 to make the second end move toward the lever 36, it can drive the trigger rod 400 to move close to the lever 36 and push the lever 36 away from the structural dead point. At this time, the first connection point, the hinge axis 33 and the second connection point are not colinear. Under the action of the elastic force of the tension spring, the lever 36 is pulled to rotate, and the lever 36 drives the second clamping part 30 to rotate around the hinge axis 33 to move close to the through hole, thereby locking the crystal rod 13.

[0075] Through the above technical solution, the trigger stroke of the second clamping mechanism 3 can be effectively reduced, and the electromagnet and the magnetic member 301 can be made smaller, thereby reducing the cost. It is understandable that, in the absence of contradiction, those skilled in the art can combine and combine the different embodiments or examples and the features of the different embodiments or examples described in this specification.

[0076] The rod-dropping prevention protection system provided by the present invention is described below. The rod-dropping prevention protection system described below and the rod-dropping prevention protection device described above can be referred to each other.

[0077] A rod-dropping protection system includes a sensing component, a controller, and a rod-dropping protection device provided by any of the above embodiments; wherein the sensing component is used to detect whether a crystal rod 13 is broken; the controller is communicatively connected with the sensing component and an actuator 4 of the rod-dropping protection device, and when the crystal rod 13 is broken, the controller sends a control instruction to the actuator 4 to control the clamping part to move closer to the through hole.

[0078] In one embodiment of the present invention, the sensing component uses a liquid contact circuit formed by the crystal rod 13, silicon liquid and an external circuit. When the crystal rod 13 breaks, the liquid contact circuit is disconnected, and the controller sends a control instruction to the actuator 4 to control the clamping part to move close to the through hole to clamp the crystal rod 13. The liquid contact circuit can improve the response speed and lock the crystal rod 13 in time.

[0079] The single crystal furnace 1 system provided by the present invention is described below. The single crystal furnace 1 described below and the anti-rod drop protection device and anti-rod drop protection system described above can correspond to each other.

[0080] Reference Figure 1 and Figure 2 , a single crystal furnace, comprising the rod-dropping protection device provided by any of the above embodiments or the rod-dropping protection system provided by any of the above embodiments.

[0081] With the rod-dropping prevention protection device, system and single crystal furnace 1 provided by the embodiments of the present invention, the clamping mechanism uses the isolation valve 12 as the installation basis, and is controlled by magnetic cooperation with the actuator 4 outside the single crystal furnace 1. During installation, the existing structure is fully utilized for installation, and the change to the original structure is very small, which will not increase the sealing difficulty and effectively avoid the influence on the performance of the single crystal furnace 1, such as the strength and rigidity. In addition, the actuator 4 is arranged outside the single crystal furnace 1, and the wiring harness does not need to be inserted into the cavity of the single crystal furnace 1, which will not increase the sealing difficulty. The actuator 4 will not be affected by the high temperature in the furnace during operation, thereby ensuring the reliability of operation.

[0082] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A rod-dropping protection device, characterized in that: include: A clamping mechanism is suitable for being arranged on an isolation valve (12) in a single crystal furnace (1), wherein the isolation valve (12) is provided with a through hole for allowing a crystal rod (13) to pass through; the clamping mechanism is provided with at least two clamping parts distributed on opposite sides of the through hole, and at least one of the clamping parts is capable of moving close to the through hole.

2. The rod-dropping protection device according to claim 1, characterized in that: It also includes an actuator (4), which is arranged outside the single crystal furnace (1) and can apply a magnetic force to the clamping part, and is used to control the clamping part to move closer to the through hole according to a control instruction.

3. The rod-dropping protection device according to claim 2, characterized in that: The clamping mechanism comprises a first clamping mechanism (2) and a second clamping mechanism (3); The clamping portion comprises a first clamping portion (20) arranged on the first clamping mechanism (2), and a second clamping portion (30) arranged on the second clamping mechanism (3); the second clamping portion (30) is capable of moving close to the through hole.

4. The stick-dropping protection device according to claim 3, characterized in that: A side of the first clamping portion (20) facing the through hole is arranged as an arc-shaped first clamping surface (200) for bonding the outer peripheral surface of the crystal rod (13); Anti-slip teeth (201) are provided on the first clamping surface (200).

5. The stick-dropping protection device according to claim 3, characterized in that: The second clamping mechanism (3) further comprises a base (31), the base (31) being connected to a bracket (32), the second clamping portion (30) being hinged to the bracket (32), and the hinge axis (33) being offset from the center of the second clamping portion (30).

6. The stick-dropping protection device according to claim 5, characterized in that: The outer periphery of the second clamping portion (30) is provided with an arc-shaped second clamping surface (300) for fitting against the outer periphery of the crystal rod (13).

7. The stick-dropping protection device according to claim 5, characterized in that: The actuator (4) comprises an electromagnet, and the second clamping portion (30) is provided with a magnetic member (301) capable of attracting or repelling the electromagnet.

8. The stick-dropping protection device according to claim 7, characterized in that: The second clamping mechanism (3) further comprises an elastic member (35), wherein the elastic force direction of the elastic member (35) is opposite to the magnetic force direction between the actuator (4) and the second clamping portion (30).

9. The stick-dropping prevention protection device according to claim 8, characterized in that: The second clamping mechanism (3) further comprises a lever (36), the second clamping portion (30) is fixedly connected to the hinge shaft (33), one end of the lever (36) is connected to the hinge shaft (33), and a first connection point is arranged near the other end; a second connection point is arranged on the bracket (32), and the hinge shaft (33) is located between the first connection point and the second connection point; The elastic member (35) is a tension spring, and two ends of the tension spring are respectively connected to the first connection point and the second connection point; The actuator (4) further comprises a seat body (41) and a swing arm (40), wherein the swing arm (40) is hinged to the seat body (41); the magnetic member (301) is connected to a first end of the swing arm (40), and a trigger rod (400) is provided at a second end of the swing arm (40), wherein the trigger rod (400) is located on the side of the shifting rod (36).

10. A rod-dropping protection system, characterized in that: It comprises a sensing component, a controller, and a stick-dropping prevention protection device as claimed in any one of claims 1 to 9; The sensing component is used to detect whether the crystal rod (13) is broken; The controller is in communication connection with the sensing component and the actuator (4) of the anti-dropping rod protection device. When the crystal rod (13) breaks, the controller sends a control instruction to the actuator (4) to control the clamping part to move closer to the through hole.

11. The stick-dropping prevention protection system according to claim 10, characterized in that: The induction component adopts a liquid contact loop formed by a crystal rod (13), silicon liquid and an external circuit.

12. A single crystal furnace, characterized in that: It comprises the rod-dropping prevention protection device as described in any one of claims 1 to 9 or the rod-dropping prevention protection system as described in any one of claims 10 to 11.

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