Primary pure phosphine rectification device with dredging function

Abstract

The invention relates to the technical field of phosphorane preparation, in particular to a primary pure phosphorane rectification device with a dredging function, which comprises a first heavy component removal tower, a light component removal tower and a second heavy component removal tower which are connected in series, the internal structure of each of the first heavy component removal tower, the light component removal tower and the second heavy component removal tower consists of a tower body, a condenser, a flow uniformizing device and a reboiler; the condenser is arranged at the top of the tower body and is used for condensing phosphine gas; the reboiler is arranged at the bottom of the tower body and is used for heating the liquid phosphine; and the flow uniformizing device is arranged between the condenser and the reboiler. According to the invention, the purification quality and the purification efficiency can be effectively improved.

Description

Technical Field

[0001] The invention relates to the technical field of phosphine preparation, in particular to a primary pure phosphine distillation device with a dredging function. Background Art

[0002] Phosphine is a colorless, highly toxic and flammable gas, so its purification process needs to be carried out under strict safety and operating conditions. The main purpose of the primary pure phosphine distillation unit is to separate the impurities in phosphine through the distillation process to improve the purity of phosphine.

[0003] Chinese patent number CN215026922U discloses a gas-liquid separation device for a n-butanol distillation system, comprising a tank body, a gas-liquid inlet is provided at the lower end of the side wall of the tank body, a liquid outlet is provided at the bottom, and a gas outlet is provided at the top; a wire mesh separator is provided in the inner cavity of the tank body above the gas-liquid inlet; a liquid removal component is provided below the wire mesh separator, and the liquid removal component comprises a horizontally arranged support rod, a scraper provided on the support rod, and a soft scraper head provided on the scraper, and the top of the soft scraper head is in contact with the bottom of the wire mesh separator; a rotary drive device for driving the liquid removal component to rotate is provided below the liquid removal component. The gas-liquid separation device for a n-butanol distillation system described in the device can remove the liquid that is collected at the bottom of the wire mesh separator and cannot drip smoothly due to excessive gas flow rate and blocks the mesh by setting the liquid removal component, effectively improving the separation load range, and still ensuring a good gas-liquid separation effect at a higher flow rate.

[0004] Although the above-mentioned device can remove the condensate collected at the bottom of the wire mesh separator through the liquid removal component, the wire mesh separator is composed of multiple layers of wire mesh. When the condensate on the upper wire mesh falls to the lower wire mesh, it will still block the mesh holes, thereby affecting the rising efficiency and uniformity of the airflow. At the same time, after the wire mesh separator is used for a long time, impurities will adhere to the mesh holes, requiring regular cleaning and maintenance. However, the existing device can only be maintained by disassembling the wire mesh separator, which not only causes a waste of manpower, but also cumbersome operation. In addition, the existing distillation devices are all single-item purification and purification, resulting in general purification effects, and it is difficult to obtain ideal purification effects. Summary of the invention

[0005] In view of the above problems, a primary pure phosphine distillation device with a dredging function is provided, which can effectively improve the purification quality and efficiency through a flow homogenizing device.

[0006] In order to solve the problems in the prior art, the present invention provides a primary pure phosphine distillation device with a dredging function, comprising a first de-weighting tower, a light de-weighting tower and a second de-weighting tower connected in series, wherein the internal structures of the first de-weighting tower, the light de-weighting tower and the second de-weighting tower are all composed of a tower body, a condenser, a flow homogenizing device and a reboiler; the condenser is arranged at the top of the tower body, and the condenser is used to condense phosphine gas; the reboiler is arranged at the bottom of the tower body, and the reboiler is used to heat liquid phosphine; the flow homogenizing device is arranged between the condenser and the reboiler; the flow homogenizing device comprises a liquid guiding base, a flow homogenizing screen, a floating connector, a rotating drive shaft, a dripping prevention mechanism and a screen cleaning device; a plurality of liquid guiding bases are provided, and the liquid guiding bases are arranged at equal intervals. The tower body is arranged inside the tower body; there are multiple flow-uniform screens, which are evenly installed on the liquid guide base, and the flow-uniform screen is used to refine the rising airflow; there are multiple floating connectors, which are evenly arranged inside the tower body, and the movable ends of the floating connectors are connected to the flow-uniform screen; the rotating drive shaft is installed at the axial position of the tower body, and the outer side of the rotating drive shaft is provided with a limit mounting groove, and the limit mounting groove is limit-engaged with the flow-uniform screen; the drip-proof mechanism is arranged above the flow-uniform screen, and the drip-proof mechanism is used to collect condensate falling from the condenser; the screen cleaning device is installed on the side of the tower body, and the screen cleaning device is provided with multiple cleaning ends, and the screen cleaning device is used to synchronously dredge and clean multiple flow-uniform screens.

[0007] Preferably, a liquid conducting groove is provided on the liquid conducting base, a first liquid drain pipe is provided at the bottom of the liquid conducting base, the first liquid drain pipe is connected to the liquid conducting groove, one end of the first liquid drain pipe away from the liquid conducting base is connected to the reboiler, a rotating hanging ring is provided inside the liquid conducting groove, and the inner ring of the rotating hanging ring is connected to the uniform flow screen in a limiting manner.

[0008] Preferably, the rotating hanging ring is installed on the liquid guiding base, the inner ring of the rotating hanging ring is provided with a movable block slidably connected to the uniform flow screen, and the outer ring of the rotating hanging ring is provided with a plurality of dredging scrapers.

[0009] Preferably, the uniform flow screen is in an upward cone shape, a sliding limit block is provided at the axial position of the uniform flow screen, a limit guide frame is provided at the bottom of the uniform flow screen, a limit slide groove is provided on the outer side of the limit guide frame, and the limit slide groove is slidably connected to the movable block.

[0010] Preferably, the floating connection member includes a limit mounting frame fixedly mounted inside the tower body, a floating guide sleeve is mounted on the limit mounting frame, a circulation guide groove is provided on the outer wall of the floating guide sleeve, the floating connection member also includes a rotating circulation sleeve mounted on the outside of the floating guide sleeve, a sliding ball is provided on the inner wall of the rotating circulation sleeve, the sliding ball is slidably connected to the circulation guide groove, and the bottom of the rotating circulation sleeve is connected to the uniform flow screen.

[0011] Preferably, the anti-drip mechanism includes a liquid receiving bucket installed below the condenser, the liquid receiving bucket is in a lower bucket shape, and a guide vane is provided at the bottom of the liquid receiving bucket. A transmission connecting shaft is provided at the bottom of the liquid receiving bucket, and the transmission connecting shaft is connected to the rotating drive shaft. There is a liquid outlet hole on the transmission connecting shaft, and a second liquid discharge pipe is installed on the outer side of the transmission connecting shaft, and the end of the second liquid discharge pipe away from the transmission connecting shaft is connected to the reboiler.

[0012] Preferably, the screen cleaning device includes a floating clamping mechanism installed on the tower body, and the floating clamping mechanism is provided with multiple ones and evenly distributed on the sides of the liquid guiding base, and the clamping ends of the floating clamping mechanism are symmetrically installed with a liquid spray cleaning device and an adsorption dredging device.

[0013] Preferably, the floating clamping mechanism includes a plurality of limit guide columns evenly distributed on the liquid conducting base, a sliding mounting plate is installed on the limit guide columns, a guide push port is provided on the side of the sliding mounting plate, a reset spring is installed between the sliding mounting plate and the liquid conducting base, and the floating clamping mechanism also includes a synchronous pushing frame installed on the side of the tower body, a plurality of limit push frames are installed on the synchronous pushing frame, a movable push frame is installed inside the limit push frame, and two inclined push rods are symmetrically provided on the side of the movable push frame, which are butted and abutted against the guide push port of the sliding mounting plate.

[0014] Preferably, the liquid spray cleaning device comprises a clamping nozzle mounted on the side of the sliding mounting plate, a plurality of first cleaning brushes are provided on the abutting surface of the clamping nozzle, and the clamping nozzle is connected to the infusion device via a connecting tube.

[0015] Preferably, the adsorption and dredging device includes an adsorption head installed on the side of the sliding mounting plate, the contact surface of the adsorption head is provided with a plurality of second cleaning brushes, and the adsorption head is connected to the suction equipment through a connecting pipe.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention realizes multi-stage purification of phosphine gas by connecting the first de-heavy tower, the light de-heavy tower and the second de-heavy tower in series. Each stage of the tower works together through the internal flow homogenizer, condenser and reboiler to effectively remove impurities and improve the purity of phosphine gas. Compared with the traditional single-item purification and purification, this multi-stage purification method can significantly improve the purification effect and ensure that the high-purity phosphine gas finally obtained meets high standards.

[0017] 2. The flow-uniform device of the present invention drives the flow-uniform screen and the anti-drip mechanism to rotate synchronously by rotating the driving shaft, and can also move up and down reciprocatingly while realizing the rotation under the action of the floating connector. The dynamic design of the up and down reciprocating movement can not only effectively and evenly guide the phosphine gas to make it rise and purify evenly, but also prevent the condensate from dripping directly on the screen to affect the uniformity of the gas flow. At the same time, the anti-drip mechanism can also receive the condensate and guide it to the reboiler, further improving the purification efficiency and the uniformity of the gas flow.

[0018] 3. The present invention is also equipped with a screen cleaning device, which can automatically clear and clean the uniform flow screen during daily maintenance to prevent the screen from being blocked and affecting the purification effect. This design not only reduces the tediousness and cost of manual maintenance, but also improves the stability and reliability of the equipment. At the same time, the liquid level sensor arranged inside the reboiler can monitor the liquid level changes in real time to ensure the quantitative discharge of liquid phosphine, further ensuring the stability and accuracy of the purification process. In summary, the present invention shows significant advantages in purification effect, gas flow uniformity and equipment stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a three-dimensional schematic diagram of a primary pure phosphine distillation device with a dredging function.

[0020] Figure 2 The present invention is an airflow diagram of a primary pure phosphine distillation device with a dredging function.

[0021] Figure 3 The present invention is a plan cross-sectional view of a primary pure phosphine distillation device with a dredging function.

[0022] Figure 4 yes Figure 3 A partial enlarged view of point A in the middle.

[0023] Figure 5 yes Figure 3 A partial enlarged view of point B in the middle.

[0024] Figure 6 The present invention is a plan view and a three-dimensional view of a primary pure phosphine distillation device with a dredging function.

[0025] Figure 7 yes Figure 6 A partial enlarged view of point C in the middle.

[0026] Figure 8 The present invention is an exploded schematic diagram of a liquid guiding base and a uniform flow screen in a primary pure phosphine distillation device with a dredging function.

[0027] Fig. 9 The present invention is an exploded schematic diagram of a floating guide sleeve and a rotating circulation sleeve in a primary pure phosphine distillation device with a dredging function.

[0028] Fig.10 The present invention is a three-dimensional schematic diagram of an adsorption dredging device and a liquid spray cleaning device in a primary pure phosphine distillation device with a dredging function.

[0029] The numbers in the figure are: 11. First de-weighting tower; 12. De-weighting tower; 13. Second de-weighting tower; 14. Reboiler; 15. Condenser; 2. Tower body; 3. Flow-uniform device; 4. Liquid guide base; 42. Liquid guide groove; 43. First liquid discharge pipe; 44. Rotating hanging ring; 441. Dredging strip; 442. Movable block; 5. Flow-uniform screen; 51. Position-limiting guide frame; 52. Position-limiting slide groove; 53. Sliding position-limiting block; 6. Floating connector; 61. Position-limiting mounting frame; 62. Floating guide sleeve; 621. Circulation guide groove; 63. Rotating circulation sleeve; 631. Guide ball; 7. Rotating drive shaft; 71. Position-limiting 1. The second liquid discharge pipe; 2. The second liquid discharge pipe; 3. The second liquid discharge pipe; 4. The second liquid discharge pipe; 5. The second liquid discharge pipe; 6. The second liquid discharge pipe; 7. The second liquid discharge pipe; 8. The second liquid discharge pipe; 9. The second liquid discharge pipe; 10. The second liquid discharge pipe; 11. The second liquid discharge pipe; 12. The second liquid discharge pipe; 13. The second liquid discharge pipe; 14. The second liquid discharge pipe; 15. The second liquid discharge pipe; 16. The second liquid discharge pipe; 17. The second liquid discharge pipe; 18. The second liquid discharge pipe; 19. The second liquid discharge pipe; 20. The second liquid discharge pipe; 21. The second liquid discharge pipe; 22. The second liquid discharge pipe; 23. The second liquid discharge pipe; 24. The second liquid discharge pipe; 25. The second liquid discharge pipe; 26. The second liquid discharge pipe; 27. The second liquid discharge pipe; 28. The second liquid discharge pipe; 29. ​​The second liquid discharge pipe; 30. The second liquid discharge pipe; 31. The second liquid discharge pipe; 32. The second liquid discharge pipe; 33. The second liquid discharge pipe; 34. The second liquid discharge pipe; 35. The second liquid discharge pipe; 36. The second liquid discharge pipe; 37. The second liquid discharge pipe; 38. The second liquid discharge pipe; 39. The second liquid discharge pipe; 40. The second liquid discharge pipe; 41. The second liquid discharge pipe; 42. The second liquid discharge pipe; 43. The second liquid discharge pipe; 44. The second liquid discharge pipe; 45. The second liquid discharge pipe; 46. The second liquid discharge pipe; 47. The second liquid discharge pipe; 48. The second liquid discharge pipe; 49. The second liquid discharge pipe; 50. The second liquid discharge pipe; 51. The second liquid discharge pipe; 52. The second liquid discharge pipe; DETAILED DESCRIPTION

[0030] In order to further understand the features, technical means, specific objectives and functions of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0031] See also Figures 1 to 10 As shown, a primary pure phosphine distillation device with a dredging function comprises a first de-weighting tower 11, a light de-weighting tower 12 and a second de-weighting tower 13 which are connected in series. The internal structures of the first de-weighting tower 11, the light de-weighting tower 12 and the second de-weighting tower 13 are composed of a tower body 2, a condenser 15, a flow homogenizing device 3 and a reboiler 14; the condenser 15 is arranged at the top of the tower body 2; the reboiler 14 is arranged at the bottom of the tower body 2; the flow homogenizing device 3 is arranged between the condenser 15 and the reboiler 14; the flow homogenizing device 3 comprises a liquid guide base 4, a flow homogenizing screen 5, a floating connector 6, a rotating drive shaft 7, a dripping prevention mechanism 8 and a screen cleaning device 9; there are multiple liquid-conducting bases 4, which are evenly spaced and arranged inside the tower body 2; there are multiple flow-uniform screens 5, which are evenly installed on the liquid-conducting bases 4; there are multiple floating connectors 6, which are evenly spaced and arranged inside the tower body 2, and the movable ends of the floating connectors 6 are connected to the flow-uniform screens 5; the rotating drive shaft 7 is installed at the axial position of the tower body 2, and a limit mounting groove 71 is provided on the outer side of the rotating drive shaft 7, and the limit mounting groove 71 is limit-engaged with the flow-uniform screen 5; the anti-drip mechanism 8 is arranged above the flow-uniform screen 5; the screen cleaning device 9 is installed on the side of the tower body 2, and the screen cleaning device 9 is provided with multiple cleaning ends.

[0032] Purification process: The first de-weighting tower 11, the light-removing tower 12 and the second de-weighting tower 13 are connected in series. The phosphine gas to be purified enters the uniform flow device 3 through the middle of the first de-weighting tower 11. The phosphine gas passes through the uniform flow device 3 and rises to contact the condenser 15. The condenser 15 condenses and liquefies the phosphine gas. The liquid phosphine will be guided to the reboiler 14. The reboiler 14 heats and vaporizes the liquid phosphine. The vaporized phosphine will rise again and contact the condenser 15. This cycle will de-weight the phosphine gas once. An exhaust port is provided at the top of the first de-weighting tower 11. The condensed gas will pass through the top of the first de-weighting tower 11 and be discharged. The de-weighted phosphine gas enters the light-removing tower 12. The first de-weighted phosphine gas enters the uniform flow device 3 from the middle of the light-removing tower 12, and the first de-weighted phosphine gas will pass through the uniform flow device 3 and rise to contact the condenser 15. The condenser 15 condenses and liquefies the phosphine gas, and the liquid phosphine will be guided to the reboiler 14. The reboiler 14 heats and vaporizes the liquid phosphine. The vaporized phosphine will rise again and contact the condenser 15. This cycle will de-weight the phosphine gas. An exhaust port is provided on the side of the light-removing tower 12, and the de-weighted phosphine gas on the light-removing tower 12 will be transported to the second heavy-removing tower 13. The de-weighted phosphine gas enters the uniform flow device 3 from the middle of the second de-weighting tower 13, and the de-weighted phosphine gas rises through the uniform flow device 3 and contacts the condenser 15. The condenser 15 condenses and liquefies the phosphine gas, and the liquid phosphine is guided to the reboiler 14. The reboiler 14 heats and vaporizes the liquid phosphine, and the vaporized phosphine rises again and contacts the condenser 15. This cycle process de-weights the phosphine gas twice. An exhaust port is provided at the top of the second de-weighting tower 13, and the condensed gas is discharged through the top of the second de-weighting tower 13. The high-purity phosphine gas de-weighted for the second time is discharged from the top of the second de-weighting tower 13 and enters the filling system.

[0033] The reboilers 14 at the bottom of the first de-weighting tower 11, the light de-weighting tower 12 and the second de-weighting tower 13 are all provided with drain ports, and a liquid level sensor is provided inside the reboiler 14. The reboiler 14 will discharge liquid phosphine in a quantitative manner.

[0034] Working principle of flow equalization device 3: When the rotating drive shaft 7 rotates, it will drive multiple uniform flow screens 5 and the anti-drip mechanism 8 to rotate synchronously. When the uniform flow screen 5 rotates, it will be affected by the floating connection piece 6, which will cause the uniform flow screen 5 to continuously move up and down along the limit installation groove 71 of the rotating drive shaft 7 during rotation. When the phosphine gas entering the tower body 2 passes through the uniform flow screen 5 in a moving state, the uniform flow screen 5 can effectively and evenly guide the phosphine gas, so that the phosphine gas rises and is purified evenly. When the phosphine gas contacts the uniform flow screen 5, condensate will adhere to the uniform flow screen 5. The uniform flow screen 5 is constantly raised and rotated, which can effectively ensure that the condensate adheres to the uniform flow screen 5. The phosphine gas will diffuse toward the outer circle of the uniform flow screen 5, and the diffused condensate will fall into the liquid guiding base 4. The liquid guiding base 4 will guide the condensate to the reboiler 14. The phosphine gas passing through the uniform flow screen 5 will contact the anti-drip mechanism 8. The rotating anti-drip mechanism 8 can evenly guide the phosphine gas to rise to the condenser 15. The contact between the phosphine gas and the condenser 15 will produce a large amount of condensate. The anti-drip mechanism 8 will receive the condensate and transport it to the reboiler 14 to prevent the condensate from falling directly onto the uniform flow screen 5. The screen cleaning device 9 is used to automatically dredge and clean the uniform flow screen 5 during daily maintenance.

[0035] The rotary drive shaft 7 is driven by a rotary drive device, which is a prior art and will not be described in detail herein.

[0036] See also Figure 3 and Figure 8 As shown, a liquid conducting groove 42 is provided on the liquid conducting base 4, and a first liquid drain pipe 43 is provided at the bottom of the liquid conducting base 4. The first liquid drain pipe 43 is connected to the liquid conducting groove 42, and one end of the first liquid drain pipe 43 away from the liquid conducting base 4 is connected to the reboiler 14. A rotating hanging ring 44 is provided inside the liquid conducting groove 42, and the inner ring of the rotating hanging ring 44 is limitedly connected to the uniform flow screen 5.

[0037] When the phosphine gas passes through the uniform flow screen 5, part of the phosphine gas will contact the screen and condense into droplets. As the uniform flow screen 5 is continuously raised and lowered and rotated under the drive of the rotating drive shaft 7, these condensed droplets will diffuse along the surface of the screen toward the outer circle. When the condensed droplets diffuse to the edge of the screen, they will drip into the liquid guide groove 42. The condensate in the liquid guide groove 42 is transported to the reboiler 14 through the first liquid discharge pipe 43. In the reboiler 14, the condensate is heated and vaporized, forming a cycle of vaporization, rising and condensation. In this way, the condensate is not only effectively treated, but also participates in the purification cycle, thereby improving the purification efficiency. The rotating hanging ring 44 of the uniform flow screen 5 will rotate with it during the rotation process. When the rotating hanging ring 44 rotates, the working end will scrape the bottom of the liquid guide groove 42 to prevent impurities in the condensate from accumulating at the bottom of the liquid guide groove 42, so that the condensate can flow smoothly in the liquid guide groove 42.

[0038] See also Figure 8As shown, the rotating hanging ring 44 is installed on the liquid guiding base 4, the inner ring of the rotating hanging ring 44 is provided with a movable block 442 slidably connected to the uniform flow screen 5, and the outer ring of the rotating hanging ring 44 is provided with a plurality of dredging scrapers 441.

[0039] The rotating hanging ring 44 is slidably connected with the uniform flow screen 5 through the movable clamping block 442 of its inner ring, so that when the uniform flow screen 5 rotates, the rotating hanging ring 44 will be driven to rotate, and the lifting and floating of the uniform flow screen 5 will not be affected. When the uniform flow screen 5 is continuously lifted and rotated driven by the rotating drive shaft 7, the rotating hanging ring 44 will also rotate accordingly. At this time, the dredging scraper 441 on the outer ring of the rotating hanging ring 44 will continuously scrape the bottom of the liquid guide groove 42 to scrape off the condensate impurities, residues, etc. that may be accumulated there. This scraping action not only prevents the accumulation of impurities, but also ensures that the condensate can flow smoothly in the liquid guide groove 42, thereby improving the purification efficiency.

[0040] See also Figure 3 and Figure 8 As shown, the uniform flow screen 5 is in an upward cone shape, a sliding limit block 53 is provided at the axial position of the uniform flow screen 5, a limit guide frame 51 is provided at the bottom of the uniform flow screen 5, a limit slide groove 52 is provided on the outer side of the limit guide frame 51, and the limit slide groove 52 is slidably connected to the movable block 442.

[0041] The sliding limit block 53 of the uniform flow screen 5 is used to cooperate with the limit installation groove 71 on the rotating drive shaft 7 for limit installation. When the rotating drive shaft 7 rotates, it can drive the uniform flow screen 5 to rotate synchronously without affecting the lifting and floating of the uniform flow screen 5. The limit slide groove 52 of the limit guide frame 51 is used to cooperate with the movable block 442 of the rotating hanging ring 44 for installation.

[0042] When the rotary drive shaft 7 rotates, the flow-uniform screen 5 will rotate synchronously with the cooperation between the sliding stop block 53 and the stop installation groove 71. At the same time, due to the influence of the floating connector 6, the flow-uniform screen 5 will also move up and down along the stop installation groove 71 of the rotary drive shaft 7 during the rotation process. This unique movement mode not only helps to evenly guide the phosphine gas, but also ensures the effective diffusion of the condensate on the screen.

[0043] When the phosphine gas entering the tower body 2 passes through the uniform flow screen 5 in motion, it will be uniformly guided by the screen. Since the screen is designed to be upwardly conical, the gas will naturally disperse when passing through, thereby achieving more uniform upward purification. This uniform guidance effect helps to improve the purification efficiency.

[0044] See also Figure 3 , Figure 4 and Fig. 9As shown, the floating connection member 6 includes a limit mounting frame 61 fixedly mounted inside the tower body 2, a floating guide sleeve 62 is mounted on the limit mounting frame 61, a circulation guide groove 621 is provided on the outer wall of the floating guide sleeve 62, the floating connection member 6 also includes a rotating circulation sleeve 63 mounted on the outer side of the floating guide sleeve 62, a sliding ball is provided on the inner wall of the rotating circulation sleeve 63, the sliding ball is slidably connected to the circulation guide groove 621, and the bottom of the rotating circulation sleeve 63 is connected to the uniform flow screen 5.

[0045] The limit mounting frame 61 is fixedly mounted inside the tower body 2, serving as a support and positioning basis for the floating connector 6. The floating guide sleeve 62 is mounted on the limit mounting frame 61, and an inclined circulation guide groove 621 is provided on the outer wall. The circulation guide groove 621 provides a moving path for the sliding balls, thereby realizing the lifting and reciprocating motion of the rotating circulation sleeve 63. The rotating circulation sleeve 63 is mounted on the outer side of the floating guide sleeve 62, and a sliding ball is provided on its inner wall. These sliding balls are slidably connected with the circulation guide groove 621. When the rotating drive shaft 7 rotates, the uniform flow screen 5 will be driven to rotate synchronously, and when the uniform flow screen 5 rotates, the rotating circulation sleeve 63 will be driven to rotate together. The sliding balls move along the circulation guide groove 621, and through their rolling action, the rotational motion of the rotating circulation sleeve 63 is converted into lifting and reciprocating motion, and the uniform flow screen 5 will be lifted and reciprocated accordingly. Effectively improve the effect of uniform flow guidance.

[0046] See also Figure 3 , Figure 6 and Figure 7 As shown, the anti-drip mechanism 8 includes a liquid receiving bucket 82 installed below the condenser 15, the liquid receiving bucket 82 is in a lower bucket shape, and a guide vane 821 is provided at the bottom of the liquid receiving bucket 82. A transmission connecting shaft 822 is provided at the bottom of the liquid receiving bucket 82, and the transmission connecting shaft 822 is connected to the rotating drive shaft 7. A liquid outlet hole 823 is provided on the transmission connecting shaft 822. A second liquid discharge pipe 824 is installed on the outer side of the transmission connecting shaft 822, and the end of the second liquid discharge pipe 824 away from the transmission connecting shaft 822 is connected to the reboiler 14.

[0047] The connection between the transmission connection shaft 822 and the second liquid discharge pipe 824 is a rotation connection.

[0048] When the phosphine gas condenses into liquid in the condenser 15, the condensate will flow down along the inner wall of the condenser 15 and finally drip into the liquid receiving bucket 82. As the rotating drive shaft 7 rotates, the liquid receiving bucket 82 and the guide vane 821 will rotate accordingly. When the guide vane 821 rotates, it can accelerate the airflow and guide it to diffuse and rise evenly from the bottom of the liquid receiving bucket 82 to the condenser 15. This design not only ensures that the phosphine gas can flow smoothly, but also improves the purification efficiency of the equipment. The condensate will be discharged through the liquid outlet 823 and transported to the reboiler 14 along the second liquid discharge pipe 824.

[0049] The condensate is effectively received and processed, and it is prevented from dripping directly onto the uniform flow screen 5. This reduces the risk of clogging of the uniform flow screen 5, improves the stability and operation efficiency of the equipment, and improves the purification efficiency of the equipment.

[0050] See also Figure 3 and Fig. 9 As shown, the screen cleaning device 9 includes a floating clamping mechanism installed on the tower body 2. The floating clamping mechanism is provided with multiple ones and is evenly distributed on the sides of the liquid guiding base 4. The clamping ends of the floating clamping mechanism are symmetrically installed with a liquid spray cleaning device 92 and an adsorption dredging device 93.

[0051] The floating clamping mechanism is mounted on the tower body 2 and is designed with a plurality of clamping ends distributed on the liquid guiding base 4. These clamping ends not only firmly support the screen cleaning device 9, but also ensure its synchronous movement during operation. The design of the floating clamping mechanism enables it to be adaptively adjusted according to the movement state of the uniform flow screen 5, so as to always keep the liquid spray cleaning device 92 and the adsorption dredging device 93 in close contact with the uniform flow screen 5.

[0052] The liquid spray cleaning device 92 and the adsorption dredging device 93 are symmetrically mounted on the clamping ends of the floating clamping mechanism, respectively, and are used to abut against the upper surface and the lower surface of the uniform flow screen 5. The liquid spray cleaning device 92 wets and dissolves the impurities and condensate residues attached to the uniform flow screen 5 by spraying cleaning liquid. These cleaning liquids can penetrate into every tiny pore of the screen, thereby ensuring a comprehensive cleaning effect.

[0053] At the same time, the adsorption and dredging device 93 is responsible for sucking the cleaning liquid and impurities. It uses the negative pressure principle to suck the cleaning liquid and impurities out from the lower surface of the uniform flow screen 5 to prevent them from adhering to the screen again. This design not only improves the cleaning efficiency, but also ensures the long-term stable operation of the screen.

[0054] During the maintenance process, the uniform flow screen 5 will keep rotating. The rotation allows the surface of the screen to be evenly contacted with the liquid spray cleaning device 92 and the adsorption dredging device 93, thereby achieving comprehensive automatic cleaning.

[0055] See also Figure 5As shown, the floating clamping mechanism includes a plurality of limit guide columns 911 evenly distributed on the liquid conducting base 4, and a sliding mounting plate 912 is installed on each of the limit guide columns 911. A guide push port 9121 is provided on the side of the sliding mounting plate 912, and a reset spring 913 is installed between the sliding mounting plate 912 and the liquid conducting base 4. The floating clamping mechanism also includes a synchronous pushing frame 916 installed on the side of the tower body 2, and a plurality of limit push frames 915 are installed on the synchronous pushing frame 916. A movable push frame 914 is installed inside the limit push frame 915. Two inclined push rods 9141 are symmetrically provided on the side of the movable push frame 914, and the inclined push rods 9141 are docked and abutted against the guide push port 9121 of the sliding mounting plate 912.

[0056] The floating clamping mechanism ensures that the liquid spray cleaning device 92 and the adsorption dredging device 93 can be closely and flexibly contacted with the uniform flow screen 5, so as to achieve comprehensive cleaning of the screen. The mechanism includes a plurality of limit guide posts 911 evenly distributed on the liquid guide base 4. The limit guide posts 911 not only provide stable support for the sliding mounting plate 912, but also limit the direction of its movement, ensuring that the cleaning device can accurately align with the uniform flow screen 5. The sliding mounting plate 912 is a key component of the floating clamping mechanism, which is installed on the limit guide posts 911 and can slide freely on the guide posts. The side of the sliding mounting plate 912 is provided with a guide push port 9121, which is a key part for docking with the inclined push rod 9141 on the movable push frame 914. At the same time, a reset spring 913 is installed between the sliding mounting plate 912 and the liquid guide base 4, which enables the sliding mounting plate 912 to quickly return to its initial position after being acted upon by an external force.

[0057] The synchronous pushing frame 916 is another important component of the floating clamping mechanism, which is installed on the side of the tower body 2 and is pushed and moved by the linear drive 917. A plurality of limit push frames 915 are installed on the synchronous pushing frame 916, and a movable push frame 914 is movably installed inside each limit push frame 915. Two inclined push rods 9141 are symmetrically arranged on the side of the movable push frame 914, and these inclined push rods 9141 are butted and abutted against the guide push opening 9121 of the sliding mounting plate 912, thereby pushing the sliding mounting plate 912.

[0058] When it is necessary to push the liquid spray cleaning device 92 and the adsorption dredging device 93 to clamp the uniform flow screen 5, the linear drive 917 is started to push the synchronous pushing frame 916 to perform synchronous pushing movement. The movement of the synchronous pushing frame 916 drives the movement of multiple limit push frames 915, and then moves the movable push frame 914, and the inclined push rod 9141 on the side thereof contacts the guide push port 9121 on the side of the sliding mounting plate 912, pushing the sliding mounting plate 912 to approach the liquid guide base 4. The movement of the sliding mounting plate 912 compresses the reset spring 913, and at the same time drives the synchronous movement of the liquid spray cleaning device 92 and the adsorption dredging device 93, so that they are in close contact with the upper and lower surfaces of the uniform flow screen 5.

[0059] Since the uniform flow screen 5 floats up and down during the rotation process, the clamping of the floating clamping mechanism also floats accordingly. This is due to the elasticity of the return spring 913 and the upward and downward movable adjustment capability of the movable push frame 914, which together ensure that the liquid spray cleaning device 92 and the adsorption dredging device 93 can always maintain close contact with the uniform flow screen 5, thereby achieving comprehensive and effective cleaning of the screen.

[0060] See also Figure 5 and Fig.10 As shown, the liquid spray cleaning device 92 includes a clamping nozzle 921 installed on the side of the sliding mounting plate 912, and the contact surface of the clamping nozzle 921 is provided with a plurality of first cleaning brushes 922. The clamping nozzle 921 is connected to the infusion device through a connecting tube.

[0061] When it is necessary to push the liquid spray cleaning device 92 and the adsorption dredging device 93 to clamp the uniform flow screen 5, the linear drive 917 is started to push the synchronous pushing frame 916 to perform synchronous pushing movement.

[0062] The movement of the synchronous pushing frame 916 drives the movement of the plurality of limiting pushing frames 915, thereby moving the movable pushing frame 914. The inclined push rod 9141 on the side of the movable pushing frame 914 contacts the guide push opening 9121 on the side of the sliding mounting plate 912, pushing the sliding mounting plate 912 closer to the liquid guide base 4. The movement of the sliding mounting plate 912 compresses the return spring 913, and at the same time drives the synchronous movement of the liquid spray cleaning device 92 and the adsorption dredging device 93.

[0063] The liquid spray cleaning device 92 includes a clamping nozzle 921 installed on the side of the sliding mounting plate 912. The contact surface of the clamping nozzle 921 matches the shape of the upper surface of the uniform flow screen 5, and is provided with a plurality of first cleaning brushes 922 to enhance the cleaning effect. The clamping nozzle 921 is connected to the infusion device through a connecting tube. When the sliding mounting plate 912 moves to a predetermined position, the clamping nozzle 921 is in close contact with the upper surface of the uniform flow screen 5 and starts to spray the cleaning liquid. Under the action of the cleaning liquid, the first cleaning brush 922 brushes the upper surface of the uniform flow screen 5 to ensure the cleaning effect.

[0064] See also Figure 5 and Fig.10 As shown, the adsorption and dredging device 93 includes an adsorption head 931 installed on the side of the sliding mounting plate 912, and the contact surface of the adsorption head 931 is provided with a plurality of second cleaning brushes. The adsorption head 931 is connected to the suction equipment through a connecting pipe.

[0065] When it is necessary to start the adsorption and dredging device 93, the linear drive 917 is started to push the synchronous pushing frame 916 to move synchronously. The movement of the synchronous pushing frame 916 drives the movement of multiple limit push frames 915, thereby moving the movable push frame 914. The inclined push rod 9141 on the side of the movable push frame 914 conflicts with the guide push port 9121 on the side of the sliding mounting plate 912, pushing the sliding mounting plate 912 to approach the liquid guide base 4. The movement of the sliding mounting plate 912 compresses the reset spring 913, and at the same time drives the synchronous movement of the liquid spray cleaning device 92 and the adsorption and dredging device 93. At this time, the adsorption head 931 gradually approaches and tightly contacts the lower surface of the uniform flow screen 5. When the adsorption head 931 is in close contact with the lower surface of the uniform flow screen 5, the suction device starts to work and provides negative pressure. Under the action of negative pressure, the adsorption head 931 begins to suck impurities and residual cleaning liquid on the lower surface of the screen. The second cleaning brushes play an auxiliary role in the suction process. They brush along with the movement of the adsorption head 931 to help loosen and brush away stubborn impurities on the lower surface of the screen. The sucked impurities and cleaning liquid are sent to the suction device through the connecting pipe for processing, thereby achieving dredging and cleaning of the lower surface of the screen.

[0066] Specific working principle: The first de-weighting tower 11, the light-removing tower 12 and the second de-weighting tower 13 are connected in series. The phosphine gas to be purified enters the uniform flow device 3 through the middle of the first de-weighting tower 11. The phosphine gas passes through the uniform flow device 3 and rises to contact the condenser 15. The condenser 15 condenses and liquefies the phosphine gas. The liquid phosphine will be guided to the reboiler 14. The reboiler 14 heats and vaporizes the liquid phosphine. The vaporized phosphine will rise again and contact the condenser 15. This cycle will de-weight the phosphine gas once. An exhaust port is provided at the top of the first de-weighting tower 11. The condensed gas will pass through the top of the first de-weighting tower 11 and be discharged. The de-weighted phosphine gas enters the light-removing tower 12. The first de-weighted phosphine gas enters the uniform flow device 3 from the middle of the light-removing tower 12, and the first de-weighted phosphine gas will pass through the uniform flow device 3 and rise to contact the condenser 15. The condenser 15 condenses and liquefies the phosphine gas, and the liquid phosphine will be guided to the reboiler 14. The reboiler 14 heats and vaporizes the liquid phosphine. The vaporized phosphine will rise again and contact the condenser 15. This cycle will de-weight the phosphine gas. An exhaust port is provided on the side of the light-removing tower 12, and the de-weighted phosphine gas on the light-removing tower 12 will be transported to the second heavy-removing tower 13. The de-lightened phosphine gas enters the uniform flow device 3 from the middle of the second de-weighting tower 13, and the de-lightened phosphine gas rises through the uniform flow device 3 and contacts the condenser 15. The condenser 15 condenses and liquefies the phosphine gas, and the liquid phosphine is guided to the reboiler 14. The reboiler 14 heats and vaporizes the liquid phosphine, and the vaporized phosphine rises again and contacts the condenser 15. This cycle process performs secondary de-weighting treatment on the phosphine gas. An exhaust port is provided at the top of the second de-weighting tower 13, and the condensed gas is discharged through the top of the second de-weighting tower 13. The high-purity phosphine gas de-weighted for the second time is discharged from the top of the second de-weighting tower 13 and enters the filling system.

[0067] The reboilers 14 at the bottom of the first de-weighting tower 11, the light de-weighting tower 12 and the second de-weighting tower 13 are all provided with drain ports, and a liquid level sensor is provided inside the reboiler 14. The reboiler 14 will discharge liquid phosphine in a quantitative manner.

[0068] When the rotating drive shaft 7 rotates, it will drive multiple uniform flow screens 5 and the anti-drip mechanism 8 to rotate synchronously. When the uniform flow screen 5 rotates, it will be affected by the floating connection piece 6, which will cause the uniform flow screen 5 to continuously move up and down along the limit installation groove 71 of the rotating drive shaft 7 during rotation. When the phosphine gas entering the tower body 2 passes through the uniform flow screen 5 in a moving state, the uniform flow screen 5 can effectively and evenly guide the phosphine gas, so that the phosphine gas rises and is purified evenly. When the phosphine gas contacts the uniform flow screen 5, condensate will adhere to the uniform flow screen 5. The uniform flow screen 5 is constantly raised and rotated, which can effectively ensure that the condensate adheres to the uniform flow screen 5. The phosphine gas will diffuse toward the outer circle of the uniform flow screen 5, and the diffused condensate will fall into the liquid guiding base 4. The liquid guiding base 4 will guide the condensate to the reboiler 14. The phosphine gas passing through the uniform flow screen 5 will contact the anti-drip mechanism 8. The rotating anti-drip mechanism 8 can evenly guide the phosphine gas to rise to the condenser 15. The contact between the phosphine gas and the condenser 15 will produce a large amount of condensate. The anti-drip mechanism 8 will receive the condensate and transport it to the reboiler 14 to prevent the condensate from falling directly onto the uniform flow screen 5. The screen cleaning device 9 is used to automatically dredge and clean the uniform flow screen 5 during daily maintenance.

[0069] The above embodiments only express one or several implementation modes of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the protection scope of the present invention. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the attached claims.

Claims

1. A primary pure phosphine distillation device with dredging function, characterized in that: It comprises a first de-weighting tower (11), a light-removing tower (12) and a second de-weighting tower (13) which are connected in series, wherein the internal structures of the first de-weighting tower (11), the light-removing tower (12) and the second de-weighting tower (13) are all composed of a tower body (2), a condenser (15), a flow-homing device (3) and a reboiler (14); The condenser (15) is arranged on the top of the tower body (2); The reboiler (14) is arranged at the bottom of the tower body (2); The flow equalizer (3) is arranged between the condenser (15) and the reboiler (14); The flow-uniform device (3) comprises a liquid-conducting base (4), a flow-uniform screen (5), a floating connection piece (6), a rotating drive shaft (7), a drip-proof mechanism (8) and a screen cleaning device (9); A plurality of liquid-conducting bases (4) are provided and are arranged at equal intervals inside the tower body (2); A plurality of uniform flow screens (5) are provided and are evenly distributed on the liquid guiding base (4); A plurality of floating connecting members (6) are provided and arranged at equal intervals inside the tower body (2), and the movable ends of the floating connecting members (6) are connected to the uniform flow screen (5); The rotating drive shaft (7) is mounted at the axis center of the tower body (2), and a limit installation groove (71) is provided on the outer side of the rotating drive shaft (7), and the limit installation groove (71) is limit-engaged with the uniform flow screen (5); The anti-drip mechanism (8) is arranged above the uniform flow screen (5); The screen cleaning device (9) is installed on the side of the tower body (2), and the screen cleaning device (9) is provided with a plurality of cleaning ends.

2. The initially pure phosphine distillation device with dredging function according to claim 1, characterized in that: A liquid guiding groove (42) is provided on the liquid guiding base (4), a first liquid drain pipe (43) is provided at the bottom of the liquid guiding base (4), the first liquid drain pipe (43) is in communication with the liquid guiding groove (42), one end of the first liquid drain pipe (43) away from the liquid guiding base (4) is in communication with the reboiler (14), a rotating hanging ring (44) is provided inside the liquid guiding groove (42), and the inner ring of the rotating hanging ring (44) is limitedly connected to the uniform flow screen (5).

3. The primary pure phosphine distillation device with dredging function according to claim 2, characterized in that: The rotating hanging ring (44) is mounted on the liquid guiding base (4); the inner ring of the rotating hanging ring (44) is provided with a movable clamping block (442) slidably connected to the uniform flow screen (5); and the outer ring of the rotating hanging ring (44) is provided with a plurality of dredging scrapers (441).

4. The primary pure phosphine distillation device with dredging function according to claim 3, characterized in that: The uniform flow screen (5) is in an upward cone shape, a sliding limit block (53) is provided at the axis position of the uniform flow screen (5), a limit guide frame (51) is provided at the bottom of the uniform flow screen (5), a limit slide groove (52) is provided on the outer side of the limit guide frame (51), and the limit slide groove (52) is slidably connected to the movable clamping block (442).

5. The primary pure phosphine distillation device with dredging function according to claim 1, characterized in that: The floating connection member (6) comprises a limit mounting frame (61) fixedly mounted inside the tower body (2), a floating guide sleeve (62) being mounted on the limit mounting frame (61), a circulation guide groove (621) being provided on the outer wall of the floating guide sleeve (62), and the floating connection member (6) further comprises a rotating circulation sleeve (63) mounted outside the floating guide sleeve (62), a sliding ball being provided on the inner wall of the rotating circulation sleeve (63), the sliding ball being slidably connected to the circulation guide groove (621), and the bottom of the rotating circulation sleeve (63) being connected to the uniform flow screen (5).

6. The primary pure phosphine distillation device with dredging function according to claim 1, characterized in that: The anti-drip mechanism (8) comprises a liquid receiving bucket (82) installed below the condenser (15), the liquid receiving bucket (82) being in a lower bucket shape, a guide vane (821) being provided at the bottom of the liquid receiving bucket (82), a transmission connecting shaft (822) being provided at the bottom of the liquid receiving bucket (82), the transmission connecting shaft (822) being connected to the rotating drive shaft (7), a liquid outlet hole (823) being provided on the transmission connecting shaft (822), a second liquid discharge pipe (824) being installed on the outer side of the transmission connecting shaft (822), and an end of the second liquid discharge pipe (824) away from the transmission connecting shaft (822) being connected to the reboiler (14).

7. The primary pure phosphine distillation device with dredging function according to claim 1, characterized in that: The screen cleaning device (9) comprises a floating clamping mechanism mounted on the tower body (2), wherein a plurality of floating clamping mechanisms are provided and evenly distributed on the sides of the liquid guiding base (4), and the clamping ends of the floating clamping mechanisms are symmetrically mounted with a liquid spray cleaning device (92) and an adsorption dredging device (93).

8. The primary pure phosphine distillation device with dredging function according to claim 7, characterized in that: The floating clamping mechanism comprises a plurality of position-limiting guide columns (911) uniformly distributed on the liquid-conducting base (4), the position-limiting guide columns (911) are all mounted with sliding mounting plates (912), the side of the sliding mounting plates (912) are provided with guide push openings (9121), and a return spring (913) is mounted between the sliding mounting plates (912) and the liquid-conducting base (4). The floating clamping mechanism also comprises a synchronous pushing frame (916) mounted on the side of the tower body (2), the synchronous pushing frame (916) is provided with a plurality of position-limiting push frames (915), the interior of the position-limiting push frames (915) are all mounted with movable push frames (914), and the side of the movable push frames (914) are symmetrically provided with two inclined push rods (9141), and the inclined push rods (9141) are butted and abutted against the guide push openings (9121) of the sliding mounting plates (912).

9. The primary pure phosphine distillation device with dredging function according to claim 8, characterized in that: The liquid spray cleaning device (92) comprises a clamping nozzle (921) mounted on the side of the sliding mounting plate (912); a plurality of first cleaning brushes (922) are provided on the abutting surface of the clamping nozzle (921); and the clamping nozzle (921) is connected to the infusion device via a connecting tube.

10. The primary pure phosphine distillation device with dredging function according to claim 8, characterized in that: The adsorption and dredging device (93) comprises an adsorption head (931) mounted on the side of the sliding mounting plate (912); a plurality of second cleaning brushes are provided on the contact surface of the adsorption head (931); and the adsorption head (931) is connected to the suction device via a connecting pipe.

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