Chemical conveying control system

Abstract

The invention discloses a chemical conveying control system, and relates to the technical field of special gas and chemical conveying, the system comprises the following components: a gas source: a high-pressure steel cylinder and a liquid storage tank are used as the gas source, the storage mode is selected according to the property of special gas chemicals, the high-pressure steel cylinder is made of seamless steel tubes, the sealing performance is good, the corrosion resistance is good, and the liquid storage tank is used for storing the special gas chemicals; the liquid storage tank can stably store liquid special gas chemicals for a long time and guarantee continuity of gas supply, the gas delivery control system adopts the high-pressure steel cylinder and the liquid storage tank as gas sources, and is combined with the high-strength corrosion-resistant pipeline and the valve control module (VMB), so that pollution and leakage of gas in the delivery process are reduced, and the gas delivery efficiency is improved. The high degree of finish of the inner surface of the pipeline and the specially designed joint ensure the purity of gas delivery, and the high requirements of the modern industry on special gas chemicals are met through accurate control of the PLC and real-time monitoring and adjustment of key parameters such as gas flow, pressure and temperature.

Description

Technical Field

[0001] The present invention relates to the technical field of special gas and chemical delivery, and in particular to a chemical delivery control system. Background Art

[0002] In today's highly developed industrial fields, especially in the high-tech industries of semiconductors, electronics, liquid crystals, photovoltaics and solar cells, specialty gas chemicals play a vital role. Specialty gas chemicals refer to gases with special chemical properties, high purity requirements and strict usage conditions, such as argon, nitrogen, hydrogen, oxygen and some special mixed gases. These gases not only directly affect the quality and performance of the products in the production process, but also are related to the safety and stable operation of the entire production line.

[0003] Traditional gas delivery systems often expose many shortcomings when facing specialty gas chemicals. Due to the extremely high purity requirements of specialty gas chemicals, traditional systems are prone to introduce impurities during the transportation process, resulting in a decrease in gas purity, which in turn affects product quality. Secondly, specialty gas chemicals often have certain dangers, such as being flammable, explosive, and toxic. Traditional systems have many hidden dangers in terms of safety. Once a leak or accident occurs, the consequences are disastrous. The control accuracy of traditional systems is low and cannot meet the needs of modern industry for precise control, resulting in waste of resources and rising costs.

[0004] However, with the improvement of industrial automation, the requirements for automated control of gas delivery systems are becoming increasingly higher. Traditional gas delivery systems often lack automated control functions and technical limitations, and are unable to achieve real-time monitoring and precise control of key parameters such as gas flow, pressure, and temperature, and are unable to provide sufficient gas purity, which affects the quality of the final product. This not only affects production efficiency, but also increases the risks brought by human operation, bringing potential safety hazards to the production process. Summary of the invention

[0005] The purpose of the present invention is to make up for the shortcomings of the prior art and to provide a chemical delivery control system, which can realize the automated and precise control of the delivery of special gas chemicals by adopting gas sources from high-pressure steel cylinders and liquid storage tanks, combined with a programmable controller (PLC) control cabinet, high-strength corrosion-resistant pipelines and a valve control module (VMB), thereby improving the purity and safety of gas delivery, and has an emergency shut-off function to ensure that the gas supply can be quickly cut off under abnormal circumstances, thereby effectively protecting the safety of personnel and equipment.

[0006] In order to solve the above technical problems, the present invention provides the following technical solutions: a chemical delivery control system, characterized in that the system comprises the following components:

[0007] Gas source: high-pressure steel cylinders and liquid storage tanks are used as gas sources. The storage method is selected according to the properties of special gas chemicals. The high-pressure steel cylinders are made of seamless steel pipes with good sealing performance and corrosion resistance. The liquid storage tanks can store liquid special gas chemicals stably for a long time to ensure the continuity of gas supply;

[0008] Control cabinet: The cabinet integrates a programmable controller (PLC) to realize automatic control of the entire system. The PLC receives sensor signals to monitor the gas flow, pressure and temperature parameters in real time and adjusts the system according to the control strategy. At the same time, the control cabinet is equipped with a touch screen to facilitate users to set parameters and monitor status, thereby improving the convenience of system operation and maintainability.

[0009] Pipeline transmission: high-strength, corrosion-resistant pipeline materials are used. The inner surface of the pipeline has a very high finish and is easy to clean, which reduces gas residue and pollution in the pipeline. The pipeline joints are specially designed to ensure a firm connection without leakage, thereby improving the safety of the system.

[0010] VMB (valve control module): VMB is responsible for controlling the flow, pressure and direction of gas. It uses high-precision valves and sensors to achieve precise control of gas. At the same time, VMB also has an emergency cut-off function, which can quickly cut off the gas supply in abnormal situations to avoid the expansion of accidents.

[0011] Gas consumption point: The gas consumption point is the final destination of gas transportation. Multiple gas consumption points are set up in different locations according to specific needs. Each gas consumption point is equipped with corresponding safety protection measures, such as emergency shut-off valves and gas leak detectors, to ensure the safety of gas during use.

[0012] Furthermore, the gas source selects a storage method based on the properties of the specialty gas chemicals, safely storing inert gases in the form of high-pressure gases. Nitrogen, argon, non-corrosive gases and easily liquefied gases are suitable for high-pressure cylinders, and liquid storage tanks are used to store chemicals that are stored in liquid form under low-temperature conditions, and chemicals that require large-scale storage for long-term and continuous supply.

[0013] Furthermore, the specific steps of the control cabinet are:

[0014] System initialization: When the system starts, the PLC in the control cabinet will initialize the system, check the working status of each sensor and valve equipment, and ensure the normal operation of the system;

[0015] Parameter setting: Parameter setting is performed through the touch screen in the control cabinet, including the set values ​​of gas flow, pressure and temperature parameters;

[0016] Real-time monitoring: PLC receives signals from sensors in real time and monitors gas flow, pressure and temperature parameters in real time;

[0017] Control strategy execution: According to the control strategy, PLC determines the operating status of the system and adjusts the control elements of the valves as needed to achieve automated and precise control of the delivery of specialty gas chemicals;

[0018] Abnormal handling: If the system has gas leakage or abnormal pressure, the PLC will immediately execute the emergency cut-off function to cut off the gas supply, and display an alarm message through the touch screen to remind the user to handle it.

[0019] Furthermore, the programmable controller integrated in the control cabinet accurately controls the gas flow and pressure parameters, compares the current value with the set value, calculates the error e(t), calculates the control signal u(t) according to the PID control algorithm formula, and adjusts the gas flow and pressure through the actuator (valve) in the control cabinet. The algorithm formula is: u(t) is the control signal output by the controller at time t, i.e., the output of the controller. K p The proportional coefficient adjusts the current error size to reflect the deviation, K i K is the integral coefficient to adjust the error accumulation to eliminate the static error of the system. d It is the rate of change of the differential coefficient adjustment error, which controls the dynamic response of the system and improves the stability of the system. By setting the proportional parameters, it can achieve precise control of the gas flow and pressure parameters and improve the automation level and control accuracy of the system.

[0020] Furthermore, during the gas transmission process, the system will continuously check the safety status of the pipeline and use the flow calculation formula in the pipeline design algorithm: Q = A × V, where Q is the gas transmission capacity of the pipeline in m 3 / s, A represents the cross-sectional area of ​​the pipe, the unit is m 2 , V represents the flow rate of gas in the pipeline, the unit is m / s. When gas leakage and abnormal pressure are detected, the system will immediately trigger the emergency processing mechanism and alarm to ensure efficient, safe and reliable pipeline transmission.

[0021] Furthermore, the specific steps of the VMB (valve control module) are:

[0022] Initialization: Start the system, VMB will initialize, check the working status of valves and sensor equipment, and ensure that they can respond to control signals normally;

[0023] Parameter reception: VMB receives control signals from the PLC control cabinet, including set values ​​for gas flow, pressure and direction;

[0024] Real-time monitoring: The sensors in the VMB monitor the actual flow, pressure and direction of the gas in real time and feed this information back to the PLC control cabinet;

[0025] Control execution: According to the control signal sent by the PLC control cabinet and the gas parameters monitored in real time, VMB controls the flow, pressure and direction of the gas by adjusting the high-precision valve to ensure that the gas is transported according to the preset parameters;

[0026] Emergency cut-off: If there is gas leakage or abnormal pressure in the system, VMB will immediately execute the emergency cut-off function, quickly close the valve, cut off the gas supply, and send out an alarm signal through the PLC control cabinet.

[0027] Furthermore, the VMB (valve control module) includes high-precision valves and sensors for controlling the flow, pressure and direction of special gas chemicals. The high-precision valves receive control signals from a programmable controller (PLC) to achieve precise regulation of the gas flow to meet the needs of different gas usage points. The sensors are used to monitor the gas flow, pressure and temperature in real time, and feed this information back to the PLC for real-time control. In addition, the VMB cooperates with other components of the gas delivery control system (high-pressure cylinders, liquid storage tanks, pipelines) to jointly achieve automated and precisely controlled delivery of special gas chemicals.

[0028] Furthermore, the specific steps of the gas point are:

[0029] Gas distribution: According to system design and process requirements, VMB (valve control module) controls the flow, pressure and direction of gas through high-precision valves and sensors to distribute special gas chemicals from the gas source to various gas use points;

[0030] Real-time monitoring: Equipped with sensors to monitor gas flow, pressure and purity parameters in real time to ensure the accuracy and safety of gas use;

[0031] Safety protection: Each gas point is equipped with corresponding safety protection measures, such as emergency shut-off valves and gas leak detectors. When an abnormality is detected, the system automatically triggers the emergency shut-off valve to cut off the gas supply to prevent the accident from expanding;

[0032] Gas usage and monitoring: Gas usage points use special gas chemicals according to process requirements, and use sensors to monitor gas flow, pressure and temperature parameters in real time. These parameters are fed back to the PLC control cabinet for real-time control and adjustment.

[0033] Furthermore, the system also includes remote monitoring and fault diagnosis functions. Users access the system through a remote terminal, monitor the system's operating status and parameters in real time, and perform fault diagnosis and troubleshooting, thereby improving the system's maintainability and ease of operation.

[0034] Furthermore, the working principle of the system is:

[0035] Gas source supply: The system uses high-pressure steel cylinders and liquid storage tanks as gas sources. The high-pressure steel cylinders are made of seamless steel pipes to ensure the safety and purity of the gas. The liquid storage tanks are used to store liquid specialty gas chemicals stably for a long time to ensure the continuity and stability of the gas supply.

[0036] Automatic control: The control cabinet is equipped with a programmable logic controller (PLC), which is responsible for the automatic control of the entire system. The PLC receives sensor signals and monitors the key parameters of gas flow, pressure and temperature in real time. According to the preset control strategy, the PLC adjusts the system in real time to ensure the stability and accuracy of gas delivery.

[0037] Pipeline transmission: Use high-strength, corrosion-resistant pipeline materials, the inner surface of the pipeline is smooth and easy to clean, reducing gas residue and pollution. The pipeline joints are specially designed to ensure a firm connection without leakage, improving the safety and reliability of the system;

[0038] Precise control: The valve control module (VMB) is responsible for controlling the flow, pressure and direction of the gas. It uses high-precision valves and sensors to precisely control the gas and ensure that the gas is delivered according to the preset parameters.

[0039] Safety protection: The system is equipped with emergency shut-off valves and gas leak detectors at gas usage points. When gas leaks and other abnormal conditions are detected, the emergency shut-off valves will quickly cut off the gas supply to prevent accidents from expanding. The gas leak detectors monitor the safety status of gas usage points in real time to ensure the safety of gas during use.

[0040] Operational convenience and maintainability: The control cabinet is equipped with a touch screen to facilitate users to set parameters and monitor status, thereby improving the system's operational convenience. The system design takes maintainability into consideration, making it easy to carry out daily maintenance and troubleshooting.

[0041] Compared with the prior art, this chemical delivery control system has the following beneficial effects:

[0042] 1. The gas delivery control system of the present invention adopts high-pressure steel cylinders and liquid storage tanks as gas sources, combined with high-strength corrosion-resistant pipelines and valve control modules (VMB), which can reduce gas pollution and leakage during the delivery process. The high finish of the inner surface of the pipeline and the specially designed joints ensure the purity of gas delivery and the safety of the system. Through the precise control of the programmable controller (PLC), the key parameters of gas flow, pressure and temperature can be monitored and adjusted in real time, further improving the purity of gas delivery and meeting the high requirements of modern industry for special gas chemicals.

[0043] 2. This system realizes the automated and precise control and delivery of special gas chemicals by integrating a programmable controller (PLC) control cabinet. By receiving sensor signals, the PLC can monitor the status of gas delivery in real time and automatically adjust the system according to preset control strategies. At the same time, the touch screen in the control cabinet provides users with convenient parameter setting and status monitoring functions, further improving the system's operational convenience and maintainability. This automated and precise control method not only improves production efficiency, but also reduces the risks brought by human operation.

[0044] 3. The gas delivery control system of the present invention also has an emergency cut-off function, which can quickly cut off the gas supply under abnormal circumstances and effectively avoid the expansion of accidents. The high-precision valves and sensors in the valve control module (VMB) can monitor the status of gas delivery in real time. Once an abnormal situation is found, such as gas leakage or abnormal pressure, the VMB will immediately activate the emergency cut-off function to cut off the gas supply. This timely and effective emergency response measure can maximize the protection of personnel and equipment safety and reduce potential safety risks.

[0045] Other advantages, objectives and features of the present invention will be set forth in part in the following description and, in part, will be apparent to those skilled in the art based on an examination of the following or may be taught from the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0047] Figure 1 The following is an operation flow chart of a chemical delivery control system.

[0048] Figure 2 The figure is a flow chart of a chemical delivery control system. DETAILED DESCRIPTION

[0049] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] A chemical delivery control system, the system comprising the following components:

[0051] Gas source: high-pressure steel cylinders and liquid storage tanks are used as gas sources. The storage method is selected according to the properties of special gas chemicals. The high-pressure steel cylinders are made of seamless steel pipes with good sealing performance and corrosion resistance. The liquid storage tanks can store liquid special gas chemicals stably for a long time to ensure the continuity of gas supply;

[0052] Control cabinet: The cabinet integrates a programmable controller (PLC) to realize automatic control of the entire system. The PLC receives sensor signals to monitor the gas flow, pressure and temperature parameters in real time and adjusts the system according to the control strategy. At the same time, the control cabinet is equipped with a touch screen to facilitate users to set parameters and monitor status, thereby improving the convenience of system operation and maintainability.

[0053] Pipeline transmission: high-strength, corrosion-resistant pipeline materials are used. The inner surface of the pipeline has a very high finish and is easy to clean, which reduces gas residue and pollution in the pipeline. The pipeline joints are specially designed to ensure a firm connection without leakage, thereby improving the safety of the system.

[0054] VMB (valve control module): VMB is responsible for controlling the flow, pressure and direction of gas. It uses high-precision valves and sensors to achieve precise control of gas. At the same time, VMB also has an emergency cut-off function, which can quickly cut off the gas supply in abnormal situations to avoid the expansion of accidents.

[0055] Gas consumption point: The gas consumption point is the final destination of gas transportation. Multiple gas consumption points are set up in different locations according to specific needs. Each gas consumption point is equipped with corresponding safety protection measures, such as emergency shut-off valves and gas leak detectors, to ensure the safety of gas during use.

[0056] Embodiment 1

[0057] The present embodiment provides a chemical transportation control system. The present control system adopts high-pressure steel cylinders and liquid storage tanks as gas sources, combined with high-strength corrosion-resistant pipelines, which effectively reduces the risk of gas contamination and leakage during the transportation process. Through the precise control of the programmable controller (PLC), the system can monitor and adjust the gas flow, pressure and temperature parameters in real time to ensure that the special gas chemicals maintain high purity during the transportation process, meet the strict requirements of the high-precision industries of semiconductors and electronics for gas purity, and greatly improve the safety of the entire gas transportation process.

[0058] In the specific implementation, the system selects high-pressure steel cylinders and liquid storage tanks as gas sources according to the properties of special gas chemicals. For inert gases and non-corrosive gases such as nitrogen and argon, high-pressure steel cylinders are used for storage to ensure good sealing performance and corrosion resistance. For easily liquefied gases and chemicals that require long-term and continuous supply, liquid storage tanks are used for storage to ensure the continuity of gas supply.

[0059] The control cabinet integrates a programmable controller (PLC), which is responsible for the automatic control of the entire system. When the system starts, the PLC will be initialized and check the working status of each sensor and valve equipment. The user can set parameters through the touch screen in the control cabinet, including the set values ​​of gas flow, pressure, and temperature parameters. The PLC receives signals from the sensor in real time, monitors the gas flow, pressure and temperature parameters in real time, and adjusts the system according to the control strategy. In abnormal situations, such as gas leakage and abnormal pressure, the PLC will immediately execute the emergency cut-off function, cut off the gas supply, and display the alarm information through the touch screen to remind the user to handle it.

[0060] The system uses high-strength, corrosion-resistant pipeline materials for gas transmission. The inner surface of the pipeline has an extremely high finish and is easy to clean, reducing gas residue and contamination in the pipeline. The pipeline joints are specially designed to ensure a firm connection without leakage, improving the safety of the system. During the gas transmission process, the system will continuously check the safety status of the pipeline and use the flow calculation formula to calculate the pipeline gas transmission capacity to ensure the stability and efficiency of gas transmission.

[0061] VMB is responsible for controlling the flow, pressure and direction of gas, and uses high-precision valves and sensors to achieve precise control of gas. At the same time, VMB also has an emergency cut-off function, which can quickly cut off the gas supply under abnormal circumstances to avoid the expansion of accidents.

[0062] In addition, multiple gas consumption points are set up in different locations, and each gas consumption point is equipped with corresponding safety protection measures, such as emergency shut-off valves and gas leak detectors, to ensure the safety of gas during use.

[0063] Embodiment 2

[0064] The chemical transportation control system in this embodiment places special emphasis on the control algorithm to accurately control the gas flow and pressure. The control cabinet is integrated with a programmable controller (PLC) to achieve automated control of the entire system. Pipeline transmission uses high-strength, corrosion-resistant pipeline materials to ensure the purity and safety of gas transportation. VMB is responsible for controlling the gas flow, pressure and direction to achieve precise control of the gas. The gas use point is the final destination of gas transportation and is equipped with corresponding safety protection measures.

[0065] First, according to the properties of special gas chemicals, high-pressure steel cylinders and liquid storage tanks are selected as gas sources. For inert gases, non-corrosive gases and easily liquefied gases, high-pressure steel cylinders are used for storage to ensure the safety of the gas under high pressure. For chemicals that need to be stored in liquid form under low temperature conditions and chemicals that need to be stored in large quantities for long-term and continuous supply, liquid storage tanks are used for storage.

[0066] Subsequently, the programmable controller (PLC) integrated in the control cabinet accurately controls the gas flow and pressure parameters, compares the current value with the set value, calculates the error e(t), calculates the control signal u(t) according to the PID control algorithm formula, and adjusts the gas flow and pressure through the actuator (valve) in the control cabinet. The algorithm formula is: u(t) is the control signal output by the controller at time t, i.e., the output of the controller. K p The proportional coefficient adjusts the current error size to reflect the deviation, K i K is the integral coefficient to adjust the error accumulation to eliminate the static error of the system. d It is the rate of change of the differential coefficient adjustment error, the dynamic response of the control system, and the stability of the system. By setting the proportional parameters, the precise control of the gas flow and pressure parameters can be achieved, and the automation level and control accuracy of the system can be improved. The parameters are set and the status is monitored through the touch screen. When the system starts, the PLC will initialize and check the working status of each sensor and valve equipment. The user can set the gas flow, pressure, temperature and other parameters through the touch screen. The PLC receives the signal from the sensor in real time, monitors the gas flow, pressure and temperature in real time, and adjusts the system according to the control strategy. Under abnormal circumstances, the PLC will immediately execute the emergency cut-off function, cut off the gas supply, and display the alarm information through the touch screen.

[0067] Then, high-strength, corrosion-resistant pipeline materials are used to ensure that the inner surface of the pipeline has an extremely high finish and is easy to clean. The pipeline joints are specially designed to ensure that the connection is firm and leak-free. During the gas transmission process, the system will continuously check the safety status of the pipeline and use the flow calculation formula in the pipeline design algorithm: Q = A × V, where Q is the gas transmission capacity of the pipeline in m 3 / s, A represents the cross-sectional area of ​​the pipe, the unit is m 2 , V represents the flow rate of gas in the pipeline, the unit is m / s. When gas leakage and abnormal pressure are detected, the system will immediately trigger the emergency processing mechanism and alarm to ensure the efficiency, safety and reliability of pipeline transmission, and monitor the gas transmission capacity of the pipeline in real time. VMB is responsible for controlling the flow, pressure and direction of gas. High-precision valves and sensors are used to achieve precise control of gas. VMB also has an emergency cut-off function, which can quickly cut off the gas supply in abnormal situations to avoid the expansion of accidents.

[0068] In addition, the system sets up multiple gas consumption points at different locations according to specific needs. Each gas consumption point is equipped with corresponding safety protection measures, such as emergency shut-off valves and gas leak detectors, to ensure the safety of gas during use.

[0069] Embodiment 3:

[0070] The steps of the system based on Example 1 and Example 2 are as follows:

[0071] (1) System startup and initialization: Turn on the gas delivery control system. After the system is started, the programmable controller (PLC) in the control cabinet will perform the initialization process, check the working status of all sensors and valve equipment in the system, ensure that all equipment is in normal working condition, and prepare for gas delivery operation;

[0072] (2) Parameter setting: Parameter setting is performed through the touch screen in the control cabinet. Users can set the set values ​​of gas flow, pressure, and temperature parameters according to actual needs;

[0073] (3) Real-time monitoring and control: The PLC receives signals from sensors in real time, monitors gas flow, pressure, and temperature parameters in real time, determines the operating status of the system based on the control strategy, and realizes automated and precise control of the delivery of specialty gas chemicals by adjusting the valve control elements in the valve control module (VMB);

[0074] (4) Abnormal handling: If the system detects abnormal conditions such as gas leakage or abnormal pressure, the PLC will immediately execute the emergency cut-off function to cut off the gas supply and display an alarm message on the touch screen to remind the user to handle it;

[0075] (5) Gas transportation and gas point management: Gas is transported through high-strength, corrosion-resistant pipelines. During the gas transmission process, the system continuously checks the safety status of the pipeline to ensure that the gas is transported to each gas point. Each gas point is equipped with corresponding safety protection measures;

[0076] (6) System maintenance and care: Regularly perform system maintenance and care, including checking the operating status of pipelines, valves, and sensor equipment, and cleaning any residues that may exist in the pipelines to ensure long-term and stable operation of the system.

[0077] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A chemical delivery control system, characterized in that: The system consists of the following components: Gas source: high-pressure steel cylinders and liquid storage tanks are used as gas sources. The storage method is selected according to the properties of special gas chemicals. The high-pressure steel cylinders are made of seamless steel pipes with good sealing performance and corrosion resistance. The liquid storage tanks can store liquid special gas chemicals stably for a long time to ensure the continuity of gas supply; Control cabinet: The cabinet integrates a programmable controller (PLC) to realize automatic control of the entire system. The PLC receives sensor signals to monitor the gas flow, pressure and temperature parameters in real time and adjusts the system according to the control strategy. At the same time, the control cabinet is equipped with a touch screen to facilitate users to set parameters and monitor status, thereby improving the convenience of system operation and maintainability. Pipeline transmission: high-strength, corrosion-resistant pipeline materials are used. The inner surface of the pipeline has a very high finish and is easy to clean, which reduces gas residue and pollution in the pipeline. The pipeline joints are specially designed to ensure a firm connection without leakage, thereby improving the safety of the system. VMB (valve control module): VMB is responsible for controlling the flow, pressure and direction of gas. It uses high-precision valves and sensors to achieve precise control of gas. At the same time, VMB also has an emergency cut-off function, which can quickly cut off the gas supply in abnormal situations to avoid the expansion of accidents. Gas consumption point: The gas consumption point is the final destination of gas transportation. Multiple gas consumption points are set up in different locations according to specific needs. Each gas consumption point is equipped with corresponding safety protection measures, such as emergency shut-off valves and gas leak detectors, to ensure the safety of gas during use.

2. A chemical delivery control system according to claim 1, characterized in that: The gas source selects the storage method according to the properties of the special gas chemicals, and safely stores inert gases in the form of high-pressure gases. Nitrogen, argon, non-corrosive gases and easily liquefied gases are suitable for high-pressure cylinders, and liquid storage tanks are used to store chemicals stored in liquid form under low-temperature conditions, and chemicals that require large-scale storage for long-term and continuous supply.

3. A chemical delivery control system according to claim 1, characterized in that: The specific steps of the control cabinet are: System initialization: When the system starts, the PLC in the control cabinet will initialize the system, check the working status of each sensor and valve equipment, and ensure the normal operation of the system; Parameter setting: Parameter setting is performed through the touch screen in the control cabinet, including the set values ​​of gas flow, pressure and temperature parameters; Real-time monitoring: PLC receives signals from sensors in real time and monitors gas flow, pressure and temperature parameters in real time; Control strategy execution: According to the control strategy, PLC determines the operating status of the system and adjusts the control elements of the valves as needed to achieve automated and precise control of the delivery of specialty gas chemicals; Abnormal handling: If the system has gas leakage or abnormal pressure, the PLC will immediately execute the emergency cut-off function to cut off the gas supply, and display the alarm information through the touch screen to remind the user to handle it.

4. A chemical delivery control system according to claim 3, characterized in that: The programmable controller integrated in the control cabinet accurately controls the gas flow and pressure parameters, compares the current value with the set value, calculates the error e(t), calculates the control signal u(t) according to the PID control algorithm formula, and adjusts the gas flow and pressure through the actuator (valve) in the control cabinet. The algorithm formula is: u(t) is the control signal output by the controller at time t, i.e., the output of the controller. K p The proportional coefficient adjusts the current error size to reflect the deviation, K i K is the integral coefficient to adjust the error accumulation to eliminate the static error of the system. d It is the rate of change of the differential coefficient adjustment error, which controls the dynamic response of the system and improves the stability of the system. By setting the proportional parameters, it can achieve precise control of the gas flow and pressure parameters and improve the automation level and control accuracy of the system.

5. A chemical delivery control system according to claim 1, characterized in that: During the gas transmission process, the system will continuously check the safety status of the pipeline and use the flow calculation formula in the pipeline design algorithm: Q = A × V, where Q is the gas transmission capacity of the pipeline in m 3 / s, A represents the cross-sectional area of ​​the pipe, the unit is m 2 , V represents the flow rate of gas in the pipeline, the unit is m / s. When gas leakage and abnormal pressure are detected, the system will immediately trigger the emergency processing mechanism and alarm to ensure efficient, safe and reliable pipeline transmission.

6. A chemical delivery control system according to claim 1, characterized in that: The specific steps of the VMB (valve control module) are: Initialization: Start the system, VMB will initialize, check the working status of valves and sensor equipment, and ensure that they can respond to control signals normally; Parameter reception: VMB receives control signals from the PLC control cabinet, including set values ​​for gas flow, pressure and direction; Real-time monitoring: The sensors in the VMB monitor the actual flow, pressure and direction of the gas in real time and feed this information back to the PLC control cabinet; Control execution: According to the control signal sent by the PLC control cabinet and the gas parameters monitored in real time, VMB controls the flow, pressure and direction of the gas by adjusting the high-precision valve to ensure that the gas is transported according to the preset parameters; Emergency cut-off: If there is gas leakage or abnormal pressure in the system, VMB will immediately execute the emergency cut-off function, quickly close the valve, cut off the gas supply, and send out an alarm signal through the PLC control cabinet.

7. A chemical delivery control system according to claim 6, characterized in that: The VMB (valve control module) includes high-precision valves and sensors for controlling the flow, pressure and direction of special gas chemicals. The high-precision valves receive control signals from a programmable controller (PLC) to achieve precise regulation of the gas flow to meet the needs of different gas usage points. The sensors are used to monitor the gas flow, pressure and temperature in real time, and feed this information back to the PLC for real-time control. In addition, the VMB cooperates with other components of the gas delivery control system (high-pressure cylinders, liquid storage tanks, pipelines) to jointly achieve automated and precisely controlled delivery of special gas chemicals.

8. A chemical delivery control system according to claim 1, characterized in that: The specific steps of the gas point are as follows: Gas distribution: According to system design and process requirements, VMB (valve control module) controls the flow, pressure and direction of gas through high-precision valves and sensors to distribute special gas chemicals from the gas source to various gas use points; Real-time monitoring: Equipped with sensors to monitor gas flow, pressure and purity parameters in real time to ensure the accuracy and safety of gas use; Safety protection: Each gas point is equipped with corresponding safety protection measures, such as emergency shut-off valves and gas leak detectors. When an abnormality is detected, the system automatically triggers the emergency shut-off valve to cut off the gas supply to prevent the accident from expanding; Gas usage and monitoring: Gas usage points use special gas chemicals according to process requirements, and use sensors to monitor gas flow, pressure and temperature parameters in real time. These parameters are fed back to the PLC control cabinet for real-time control and adjustment.

9. A chemical delivery control system according to claim 1, characterized in that: The system also includes remote monitoring and fault diagnosis functions. Users can access the system through a remote terminal, monitor the system's operating status and parameters in real time, and perform fault diagnosis and troubleshooting to improve the system's maintainability and ease of operation.

10. A chemical delivery control system according to claim 1, characterized in that: The working principle of the system is as follows: Gas source supply: The system uses high-pressure steel cylinders and liquid storage tanks as gas sources. The high-pressure steel cylinders are made of seamless steel pipes to ensure the safety and purity of the gas. The liquid storage tanks are used to store liquid specialty gas chemicals stably for a long time to ensure the continuity and stability of the gas supply. Automatic control: The control cabinet is equipped with a programmable logic controller (PLC), which is responsible for the automatic control of the entire system. The PLC receives sensor signals and monitors the key parameters of gas flow, pressure and temperature in real time. According to the preset control strategy, the PLC adjusts the system in real time to ensure the stability and accuracy of gas delivery. Pipeline transmission: Use high-strength, corrosion-resistant pipeline materials, the inner surface of the pipeline is smooth and easy to clean, reducing gas residue and pollution. The pipeline joints are specially designed to ensure a firm connection without leakage, improving the safety and reliability of the system; Precise control: The valve control module (VMB) is responsible for controlling the flow, pressure and direction of the gas. It uses high-precision valves and sensors to precisely control the gas and ensure that the gas is delivered according to the preset parameters. Safety protection: The system is equipped with emergency shut-off valves and gas leak detectors at gas usage points. When gas leaks and other abnormal conditions are detected, the emergency shut-off valves will quickly cut off the gas supply to prevent accidents from expanding. The gas leak detectors monitor the safety status of gas usage points in real time to ensure the safety of gas during use. Operational convenience and maintainability: The control cabinet is equipped with a touch screen, which is convenient for users to set parameters and monitor status, improving the system's operational convenience. The system design takes maintainability into consideration, making it easy to carry out daily maintenance and troubleshooting.

Images