Automatic liquid supplementing device for texturing of crystalline silicon battery piece

By designing an automatic liquid replenishment device for the production of polycrystalline silicon wafers, the problems of uneven diffusion of acidic solutions and difficulty in adjusting supplementary doses are solved, and the pickling effect is improved and the process is automated.

CN119421524AInactive Publication Date: 2025-02-11JIANGSU RUNDA NEW ENERGY TECH CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202410836884.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-06-26
Publication Date
2025-02-11
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

During the velvet production process of polycrystalline silicon wafers, the acid solution cannot diffuse quickly and uniformly in the acid tank, resulting in different pickling effects. The dose of acid solution required for different specifications of polycrystalline silicon wafers is different, making it difficult to achieve uniform replenishment. .

Method used

An automatic liquid replenishing device for making and making a crystal silicon cell is designed, including an acid tank, a solution tank, a reciprocating reciprocating pushing mechanism, a one-way liquid replenishing mechanism, a reciprocating swing mechanism and an adjustment component. Through the synergistic work of these components, rapid and uniform diffusion and quantitative supplementation of acid solutions are achieved.

Benefits of technology

Through the automatic liquid replenishment device, the acid solution can diffuse quickly and evenly in the acid tank, ensuring the uniform effect of the polycrystalline silicon wafer during the pickling process. By adjusting the component adjustment, the supplementary dose of the acid solution can be adjusted according to the silicon wafer of different specifications. , improve the pickling effect.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119421524A_ABST
    Figure CN119421524A_ABST
Patent Text Reader

Abstract

The invention discloses an automatic liquid supplementing device for texturing of a crystalline silicon battery piece, and relates to the technical field of battery production. The device comprises an acid tank, a solution box is fixedly installed on one side of the outer wall of the acid tank, a top frame is fixedly installed at the top end of the solution box, a liquid supplementing reciprocating pushing mechanism is arranged in the top frame, a one-way liquid supplementing mechanism is arranged on the liquid supplementing reciprocating pushing mechanism, and a fixed supporting frame is arranged on the side, close to the solution box, of the top end of the acid tank. A reciprocating swing mechanism is arranged on the fixed supporting frame, a solution flow divider is fixedly installed at the top end of the fixed supporting frame, and adjusting assemblies are arranged on one side of the liquid supplementing reciprocating pushing mechanism and one side of the reciprocating swing mechanism. The reciprocating swing mechanism is arranged, the oscillating plate is driven by the reciprocating swing mechanism to swing in a reciprocating mode, the oscillating plate swings in an acid solution in a reciprocating mode so that the acid solution in the acid tank can be promoted to flow, and the liquid supplementing reciprocating pushing mechanism and the one-way liquid supplementing mechanism are arranged.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The invention relates to the technical field of battery production, and in particular to an automatic liquid replenishing device for texturing a crystalline silicon battery sheet. Background Art

[0002] Polycrystalline silicon wafers are a common solar cell material, composed of polycrystalline silicon grains. Compared with single-crystal silicon wafers, polycrystalline silicon wafers have lower production costs but slightly lower efficiency. Polycrystalline silicon wafers are widely used in the field of solar cells and can convert sunlight into electrical energy. In addition, polycrystalline silicon wafers can also be used to manufacture integrated circuits, photovoltaic modules, solar photovoltaic cells and other fields. The texturing production process of polycrystalline silicon wafers mainly includes the following steps: 1. Cleaning; 2. Etching; 3. Coating photoresist; 4. Exposure; 5. Development; 6. Dry etching; 7. Removal of photoresist; 8. Texturing treatment; 9. Cleaning and quality inspection;

[0003] In the production of polycrystalline silicon wafers, the cleaning process is divided into water washing and acid washing. Water washing uses deionized water to rinse the impurities and residual alkali liquid that have been desorbed on the surface. Acid washing uses an acidic solution to neutralize the residual alkali liquid remaining on the surface of the silicon wafer; hydrochloric acid removes metal ions, HF can remove the surface silica layer on the surface, and form Si-H passivation bonds with the silicon dangling bonds on the surface of the silicon wafer to increase the hydrophobicity of the silicon wafer. The acidic solution neutralizes the residual alkali liquid on the surface of the silicon wafer, which will reduce the acidity of the acidic solution. The acidity reduction requires timely acid replenishment to ensure the acidity level and ensure the pickling effect. The system replenishment acid is directly poured into the acid tank into the acid solution that needs to be replenished. The acid solution is directly poured into the acid tank for replenishment. The acid solution cannot diffuse in time, which will cause differences in acidity at different positions in the acid tank. The acidity difference will cause different pickling effects at different positions of the polycrystalline silicon wafer. Secondly, the dosage of acid solution required for the pickling process of polycrystalline silicon wafers of different specifications is different. The acid solution acidity that is too low or too high will directly affect the pickling effect of the polycrystalline silicon wafer. In view of the above problems, the inventor proposes an automatic liquid replenishment device for crystalline silicon cell texturing to solve the above problems. Summary of the invention

[0004] In order to solve the problem of rapid and uniform diffusion of the acid solution in the acid tank and regulation of the supplementary dosage of the acid solution; the purpose of the present invention is to provide an automatic liquid replenishing device for texturing crystalline silicon cell sheets.

[0005] In order to solve the above technical problems, the present invention adopts the following technical scheme: an automatic liquid replenishing device for texturing crystalline silicon cell sheets, comprising an acid tank, a solution box is fixedly installed on one side of the outer wall of the acid tank, a top frame is fixedly installed on the top of the solution box, a liquid replenishing reciprocating driving mechanism is provided in the top frame, a one-way liquid replenishing mechanism is provided on the liquid replenishing reciprocating driving mechanism, a fixed support frame is provided on the top of the acid tank close to the solution tank, a reciprocating swinging mechanism is provided on the fixed support frame, a solution diverter is fixedly installed on the top of the fixed support frame, and adjustment components are provided on one side of the liquid replenishing reciprocating driving mechanism and the reciprocating swinging mechanism.

[0006] Preferably, the fluid infusion reciprocating driving mechanism includes two symmetrically distributed fixed sliding frames, the fixed sliding frames are fixedly installed on the top of the solution tank, a No. 1 rotating shaft is rotatably installed on the fixed sliding frames, a guide plate is rotatably installed on one side of the outer wall of the No. 1 rotating shaft, a No. 1 movable plate is slidably provided on the other side of the outer wall of the No. 1 rotating shaft, a connecting rod is rotatably installed on the outer wall of the No. 1 movable plate close to the guide plate, the other end of the connecting rod is rotatably connected to the guide plate, a No. 1 motor is fixedly installed on one side of the top of the solution tank, and the driving end of the No. 1 motor and the No. 1 rotating shaft are connected through a pulley transmission group.

[0007] Preferably, the one-way fluid replenishment mechanism includes a round frame fixing frame, which is fixedly installed on one side of the top of the solution tank, an empty barrel is fixedly installed on the round frame fixing frame, a piston plate is slidably provided in the empty barrel, a water inlet pipe is installed through one end of the bottom of the empty barrel, a No. 1 rotating plate used in conjunction with the water inlet pipe is rotatably installed on the inner wall of the empty barrel, a drainage bin is installed through the upper part of the empty barrel, a baffle is fixedly installed on the inner wall of the drainage bin, a No. 2 rotating plate is rotatably installed on the top of the baffle, a water outlet pipe is installed through the top of the drainage bin, and the other end of the water outlet pipe is connected to the solution diverter.

[0008] Preferably, the reciprocating swing mechanism includes a supporting fixed frame, the supporting fixed frame is fixedly mounted on the top of the fixed supporting frame, a No. 2 rotating shaft is rotatably mounted on the supporting fixed frame, an arc frame is fixedly mounted on one end of the No. 2 rotating shaft, a No. 2 movable disk is slidably sleeved on the outer wall of the No. 2 rotating shaft, a No. 1 fixing bolt is fixedly mounted on the No. 2 movable disk, a symmetrically distributed rotating guide frame is rotatably mounted on the arc frame, a sliding frame is slidably mounted on the arc frame, a No. 2 fixing bolt is fixedly mounted on the arc frame, both sides of the sliding frame are fixedly mounted with No. 2 fixing bolts, and the No. 2 fixing bolt and the No. 1 fixing bolt are slidably connected to the rotating guide frame, a fixing column is fixedly mounted on the side of the sliding frame away from the No. 2 rotating shaft, and a swing frame is rotatably mounted on the other end of the fixed column.

[0009] Preferably, the adjusting component includes two adjusting fixed frames and a threaded guide frame, the two adjusting fixed frames are respectively fixedly mounted on the solution tank and the supporting fixed frame, the two threaded guide frames are respectively fixedly mounted on the fixed sliding frame and the supporting fixed frame, a rotating rod is slidably mounted on the adjusting fixed frame, a worm gear is slidably sleeved on the outer wall of the rotating rod, and the worm gear and the adjusting fixed frame are rotatably connected, a threaded groove for use with the threaded guide frame is opened on the outer wall of the rotating rod, and the rotating rod and the threaded guide frame are threadedly connected, an adjusting disk is rotatably mounted on one end of the rotating rod close to the threaded guide frame, a worm gear is rotatably mounted on the adjusting fixed frame, and the worm gear and the worm gear are meshingly connected, a No. 2 motor is fixedly mounted on the outer side of the adjusting fixed frame, and the driving end of the No. 2 motor is fixedly connected to the worm gear.

[0010] Preferably, a reciprocating slide rod is slidably mounted on the fixed slide frame, a guide rod is rotatably mounted on the reciprocating slide rod, and the guide rod is slidably connected to the guide plate.

[0011] Preferably, a piston shaft is fixedly mounted on one side of the piston plate close to the reciprocating slide rod, and the other end of the piston shaft is fixedly connected to the reciprocating slide rod.

[0012] Preferably, three evenly distributed reciprocating shafts are rotatably mounted on the fixed support frame, the three reciprocating shafts are connected via a synchronous wheel transmission group, the middle reciprocating shaft is rotatably connected to the swing frame, and an oscillation plate is fixedly mounted on the outer wall of the reciprocating shaft.

[0013] Preferably, a No. 3 motor is fixedly mounted on the supporting fixed frame, a No. 1 bevel gear is fixedly mounted on the driving end of the No. 3 motor, a No. 2 bevel gear is fixedly mounted on one end of the No. 2 rotating shaft close to the No. 3 motor, and the No. 1 bevel gear and the No. 2 bevel gear are meshingly connected.

[0014] Preferably, a slide groove is provided on the No. 1 rotating shaft, a pulley is rotatably mounted on the No. 1 moving plate, and the pulley and the slide groove are slidably connected.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. The present invention provides a reciprocating swing mechanism, which drives the oscillating plate to swing back and forth. The reciprocating swing of the oscillating plate in the acidic solution can promote the flow of the acidic solution in the acid tank. The reciprocating driving mechanism for replenishing liquid and the one-way replenishing mechanism are provided, and the one-way replenishing mechanism is driven by the reciprocating driving mechanism for replenishing liquid to quantitatively extract the acidic solution in the solution tank and transport it to the acid tank. The regulating components are provided, so that the two regulating components respectively adjust the swing amplitude of the reciprocating swing mechanism and the extraction dosage of the one-way replenishing mechanism. The above operations realize the rapid diffusion of the acidic solution in water and the adjustment of the extraction dosage of the acidic solution;

[0017] 2. The present invention provides a reciprocating swing mechanism and an adjusting component, so that the adjusting component adjusts the swing amplitude of the reciprocating swing mechanism, and changes the flow rate of the acid solution in the acid tank by adjusting the swing amplitude of the oscillating plate, thereby promoting the diffusion of the supplemented acid solution in the acid tank, maintaining the uniform distribution of the acidic substances in the solution, and increasing the flow rate of the acid solution. It can also increase the contact frequency between the solution and the surface of the silicon wafer, accelerate the erosion of the acid solution on the surface of the silicon wafer, and thus improve the pickling effect;

[0018] 3. The present invention provides a reciprocating fluid replenishment mechanism, an adjusting component and a one-way fluid replenishment mechanism, so that the adjusting component can adjust the reciprocating movement spacing of the reciprocating slide rod in the reciprocating fluid replenishment mechanism, and the dosage extracted by the one-way fluid replenishment mechanism can be adjusted by adjusting the movement distance of the reciprocating slide rod, thereby changing the fluid replenishment dosage and ensuring the stability of the constant value of the acid concentration in the acid tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0021] Figure 2 This is a schematic diagram of the overall front cross-sectional structure of the present invention.

[0022] Figure 3 It is a schematic diagram of the structure of the fixed support frame and the oscillation plate in the present invention.

[0023] Figure 4 It is a structural schematic diagram of the one-way fluid replenishing mechanism in the present invention.

[0024] Figure 5 It is a structural schematic diagram of the reciprocating swing mechanism in the present invention.

[0025] Figure 6 It is a structural schematic diagram of the fluid replenishing reciprocating driving mechanism in the present invention.

[0026] Figure 7 It is a structural schematic diagram of a fixed sliding frame in the present invention.

[0027] Figure 8 It is a schematic diagram of the structure of the regulating component in the present invention.

[0028] Fig. 9 for Figure 3 A schematic diagram of the enlarged structure at point A in the middle.

[0029] Fig.10 for Figure 4 A magnified schematic diagram of the structure at point B in the middle.

[0030] Fig.11 for Figure 5 Enlarged schematic diagram of the structure at C in the middle.

[0031] In the figure: 1, acid tank; 2, solution tank; 3, top frame; 4, fixed support frame; 5, reciprocating mechanism for replenishing liquid; 501, fixed sliding frame; 502, No. 1 rotating shaft; 503, guide plate; 504, No. 1 moving plate; 505, connecting rod; 506, No. 1 motor; 507, reciprocating sliding rod; 508, guide rod; 509, slide groove; 510, pulley; 6, adjustment assembly; 601, adjustment fixed frame; 602, rotating rod; 603, threaded guide frame; 604, threaded groove; 605, adjustment plate; 606, worm; 607, worm wheel; 608, No. 2 motor; 7, one-way replenishing mechanism; 701, round frame fixing frame; 702, empty barrel; 7 03. Piston plate; 704. Piston shaft; 705. Water inlet pipe; 706. Liquid discharge bin; 707. No. 1 rotating plate; 708. Baffle; 709. No. 2 rotating plate; 710. Water outlet pipe; 8. Reciprocating swing mechanism; 801. Support fixed frame; 802. No. 2 rotating shaft; 803. Arc frame; 804. No. 2 moving disk; 805. No. 1 fixing bolt; 806. Rotating guide frame; 807. Sliding frame; 808. No. 2 fixing bolt; 809. Fixed column; 810. Swing frame; 811. Reciprocating rotating shaft; 812. Oscillation plate; 813. No. 3 motor; 814. No. 1 bevel gear; 815. No. 2 bevel gear; 9. Solution diverter. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] Example: Figure 1-11 As shown, the present invention provides a technical solution: an automatic liquid replenishing device for texturing crystalline silicon cell sheets, comprising an acid tank 1, a solution box 2 is fixedly installed on one side of the outer wall of the acid tank 1, a top frame 3 is fixedly installed on the top of the solution box 2, a liquid replenishing reciprocating driving mechanism 5 is provided in the top frame 3, a one-way liquid replenishing mechanism 7 is provided on the liquid replenishing reciprocating driving mechanism 5, a fixed support frame 4 is provided on the top of the acid tank 1 close to the solution box 2, a reciprocating swinging mechanism 8 is provided on the fixed support frame 4, a solution diverter 9 is fixedly installed on the top of the fixed support frame 4, and an adjusting component 6 is provided on one side of the liquid replenishing reciprocating driving mechanism 5 and the reciprocating swinging mechanism 8.

[0034] The reciprocating driving mechanism 5 for replenishing liquid includes two symmetrically distributed fixed slide frames 501, the fixed slide frames 501 are fixedly installed on the top of the solution tank 2, a rotating shaft 502 is rotatably installed on the fixed slide frame 501, a guide plate 503 is rotatably installed on one side of the outer wall of the rotating shaft 502, a movable plate 504 is slidably provided on the other side of the outer wall of the rotating shaft 502, a connecting rod 505 is rotatably installed on the outer wall of the movable plate 504 close to the guide plate 503, the other end of the connecting rod 505 is rotatably connected to the guide plate 503, a motor 506 is fixedly installed on one side of the top of the solution tank 2, and the driving end of the motor 506 and the rotating shaft 502 are connected through a pulley transmission group.

[0035] By adopting the above technical solution, the first motor 506 drives the first rotating shaft 502 to rotate through the pulley transmission group.

[0036] The one-way fluid replenishment mechanism 7 includes a circular frame fixing frame 701, which is fixedly installed on one side of the top of the solution tank 2. An empty barrel 702 is fixedly installed on the circular frame fixing frame 701. A piston plate 703 is slidably provided in the empty barrel 702. A water inlet pipe 705 is installed through one end of the bottom of the empty barrel 702. A No. 1 rotating plate 707 used in conjunction with the water inlet pipe 705 is rotatably installed on the inner wall of the empty barrel 702. A drainage bin 706 is installed through the upper part of the empty barrel 702. A baffle 708 is fixedly installed on the inner wall of the drainage bin 706. A No. 2 rotating plate 709 is rotatably installed on the top of the baffle 708. A water outlet pipe 710 is installed through the top of the drainage bin 706. The other end of the water outlet pipe 710 is connected to the solution diverter 9.

[0037] By adopting the above technical solution, the acid solution in the solution tank 2 is transported under the action of the empty barrel 702 and the piston plate 703 .

[0038] The reciprocating swing mechanism 8 includes a supporting fixed frame 801, which is fixedly installed on the top of the fixed supporting frame 4, a No. 2 rotating shaft 802 is rotatably installed on the supporting fixed frame 801, an arc frame 803 is fixedly installed on one end of the No. 2 rotating shaft 802, a No. 2 moving disk 804 is slidably sleeved on the outer wall of the No. 2 rotating shaft 802, a No. 1 fixing bolt 805 is fixedly installed on the No. 2 moving disk 804, a symmetrically distributed rotating guide frame 806 is rotatably installed on the arc frame 803, a sliding frame 807 is slidably installed on the arc frame 803, a No. 2 fixing bolt 808 is fixedly installed on both sides of the sliding frame 807, and the No. 2 fixing bolt 808 and the No. 1 fixing bolt 805 are both slidably connected to the rotating guide frame 806, a fixed column 809 is fixedly installed on the side of the sliding frame 807 away from the No. 2 rotating shaft 802, and a swing frame 810 is rotatably installed on the other end of the fixed column 809.

[0039] By adopting the above technical solution, the arc frame 803 drives the swing frame 810 to swing back and forth through the sliding frame 807 and the fixed column 809.

[0040] The adjustment assembly 6 includes two adjustment fixing frames 601 and a threaded guide frame 603. The two adjustment fixing frames 601 are fixedly mounted on the solution tank 2 and the support fixing frame 801 respectively. The two threaded guide frames 603 are fixedly mounted on the fixed sliding frame 501 and the support fixing frame 801 respectively. A rotating rod 602 is slidably mounted on the adjustment fixing frame 601. A worm gear 607 is slidably sleeved on the outer wall of the rotating rod 602. The worm gear 607 is rotatably connected to the adjustment fixing frame 601. The rotating rod 60 The outer wall is provided with a thread groove 604 used in conjunction with the thread guide frame 603, and the rotating rod 602 is threadedly connected with the thread guide frame 603, an adjusting disk 605 is rotatably installed at one end of the rotating rod 602 close to the thread guide frame 603, a worm 606 is rotatably installed on the adjusting fixed frame 601, and the worm 606 is meshedly connected with the worm wheel 607, and a second motor 608 is fixedly installed on the outer side of the adjusting fixed frame 601, and the driving end of the second motor 608 is fixedly connected with the worm 606.

[0041] By adopting the above technical solution, the rotating rod 602 drives the adjusting disk 605 to move.

[0042] A reciprocating slide bar 507 is slidably mounted on the fixed slide frame 501 , a guide bar 508 is rotatably mounted on the reciprocating slide bar 507 , and the guide bar 508 is slidably connected to the guide plate 503 .

[0043] By adopting the above technical solution, the guide plate 503 drives the reciprocating slide rod 507 to move back and forth through the guide rod 508.

[0044] A piston shaft 704 is fixedly mounted on one side of the piston plate 703 close to the reciprocating slide rod 507 , and the other end of the piston shaft 704 is fixedly connected to the reciprocating slide rod 507 .

[0045] By adopting the above technical solution, the reciprocating slide rod 507 drives the piston plate 703 to move through the piston shaft 704.

[0046] Three evenly distributed reciprocating shafts 811 are rotatably mounted on the fixed support frame 4 . The three reciprocating shafts 811 are connected by a synchronous wheel transmission group. The middle reciprocating shaft 811 is rotatably connected to the swing frame 810 . An oscillating plate 812 is fixedly mounted on the outer wall of the reciprocating shaft 811 .

[0047] By adopting the above technical solution, the three reciprocating rotating shafts 811 are made to rotate synchronously through the synchronous wheel transmission group.

[0048] A No. 3 motor 813 is fixedly mounted on the support fixing frame 801, a No. 1 bevel gear 814 is fixedly mounted on the driving end of the No. 3 motor 813, a No. 2 bevel gear 815 is fixedly mounted on one end of the No. 2 rotating shaft 802 close to the No. 3 motor 813, and the No. 1 bevel gear 814 and the No. 2 bevel gear 815 are meshingly connected.

[0049] By adopting the above technical solution, the third motor 813 drives the second rotating shaft 802 to rotate.

[0050] A slide groove 509 is provided on the first rotating shaft 502 , and a pulley 510 is rotatably mounted on the first moving plate 504 , and the pulley 510 and the slide groove 509 are slidably connected.

[0051] By adopting the above technical solution, the first moving plate 504 is made to slide on the first rotating shaft 502 .

[0052] Working principle: First, the silicon crystal cell group to be pickled is transported to the acid tank 1 through the mechanical arm, so that the acid solution covers the silicon crystal cell group, and at the same time, the No. 3 motor 813 is controlled to be turned on. The driving end of the No. 3 motor 813 rotates through the No. 1 bevel gear 814 and the No. 2 bevel gear 815 to drive the No. 2 rotating shaft 802 to rotate. The No. 2 rotating shaft 802 rotates synchronously through the arc frame 803 and the sliding frame 807. The sliding frame 807 rotates through the fixed column 809 to drive the swing frame 810 to swing back and forth. The swing of the swing frame 810 drives the middle reciprocating rotating shaft 811 to reciprocate. The middle reciprocating rotating shaft 811 drives the other two reciprocating rotating shafts 811 to rotate synchronously through the synchronous wheel transmission group. The reciprocating rotating shaft 811 rotates and drives the oscillating plate 812 to swing back and forth. When the oscillating plate 812 swings in the water, a series of rotating vortices will be generated. These vortices will drive the surrounding water to move together, forming a larger range of flow;

[0053] When the swing amplitude of the oscillation plate 812 needs to be adjusted, the second motor 608 on the same side is controlled to be turned on, the driving end of the second motor 608 rotates to drive the worm 606 to rotate, the worm 606 rotates to drive the meshing worm wheel 607 to rotate, the worm wheel 607 rotates to drive the rotating rod 602 to rotate, the rotating rod 602 rotates on the thread guide frame 603 through the thread groove 604, and the rotating rod 602 is driven to move synchronously through the thread guide frame 603, the rotating rod 602 moves through the adjustment disk 605 to drive the corresponding second moving disk 804 to move, the second moving disk 804 moves through the rotating guide frame 806 to drive the sliding frame 807 to slide on the arc frame 803, the swing amplitude of the swing frame 810 is changed by the sliding of the sliding frame 807, and the swing amplitude of the oscillation plate 812 is changed by changing the swing frame 810;

[0054] The acid solution in the acid tank 1 neutralizes the residual alkali solution remaining on the surface of the silicon wafer to reduce the acidity. When acid replenishment is required, the control is turned on the No. 1 motor 506. The driving end of the No. 1 motor 506 drives the No. 1 rotating shaft 502 to rotate through the pulley transmission group. The rotation of the No. 1 rotating shaft 502 drives the guide plate 503 to rotate. The guide plate 503 rotates obliquely and drives the reciprocating slide bar 507 to slide back and forth on the fixed slide frame 501 through the guide rod 508. The reciprocating slide bar 507 reciprocates through the piston shaft 704 to drive the piston plate 703 to move back and forth in the empty barrel 702. When the piston plate 703 moves to the right, negative pressure is formed in the empty barrel 702. Under the action of the negative pressure, the two The first rotating plate 709 is pressed against the baffle plate 708 to close the drainage bin 706, and the second rotating plate 707 is opened under the action of negative pressure, and the acidic solution in the solution tank 2 enters the empty barrel 702 through the water inlet pipe 705. When the piston plate 703 moves to the left side of the box, the piston plate 703 squeezes the acidic solution in the empty barrel 702. Under the action of pressure, the first rotating plate 707 is pressed against the water inlet pipe 705 to close the water inlet pipe 705. The acidic solution is discharged from the drainage bin 706 under the action of pressure, and the acidic solution in the drainage bin 706 is transported to the solution diverter 9 through the outlet pipe 710, and discharged to the acid tank 1 through the solution diverter pipe, so as to realize the reciprocating liquid replenishment;

[0055] When the fluid replenishment metering needs to be adjusted, the corresponding motor No. 2 608 is controlled to start, and the adjustment disk 605 is driven to move according to the same steps as above, and the movable disk No. 1 504 is driven to move through the adjustment disk 605. The movable disk No. 1 504 moves and drives the guide disk 503 to rotate on the fixed slide frame 501 through the connecting rod 505. By changing the inclination angle of the guide disk 503, the reciprocating movement spacing of the reciprocating slide rod 507 is changed, and then the moving distance of the piston plate 703 is changed. By changing the moving distance of the piston plate 703, the fluid replenishment dosage is changed.

[0056] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. An automatic liquid replenishing device for texturing a crystalline silicon cell, comprising an acid tank (1), characterized in that: A solution box (2) is fixedly mounted on one side of the outer wall of the acid tank (1); a top frame (3) is fixedly mounted on the top of the solution box (2); a reciprocating fluid replenishment driving mechanism (5) is arranged in the top frame (3); a one-way fluid replenishment mechanism (7) is arranged on the reciprocating fluid replenishment driving mechanism (5); a fixed support frame (4) is arranged on the top of the acid tank (1) near the solution tank (2); a reciprocating swing mechanism (8) is arranged on the fixed support frame (4); a solution diverter (9) is fixedly mounted on the top of the fixed support frame (4); and an adjustment component (6) is arranged on one side of the reciprocating fluid replenishment driving mechanism (5) and the reciprocating swing mechanism (8).

2. The automatic liquid replenishing device for texturing a crystalline silicon cell according to claim 1, characterized in that: The reciprocating driving mechanism (5) for replenishing liquid comprises two symmetrically distributed fixed sliding frames (501), wherein the fixed sliding frames (501) are fixedly mounted on the top of the solution tank (2), a first rotating shaft (502) is rotatably mounted on the fixed sliding frame (501), a guide plate (503) is rotatably mounted on one side of the outer wall of the first rotating shaft (502), a first moving plate (504) is slidably mounted on the other side of the outer wall of the first rotating shaft (502), a connecting rod (505) is rotatably mounted on the outer wall of the first moving plate (504) on one side close to the guide plate (503), the other end of the connecting rod (505) is rotatably connected to the guide plate (503), a first motor (506) is fixedly mounted on one side of the top of the solution tank (2), and the driving end of the first motor (506) and the first rotating shaft (502) are transmission-connected via a pulley transmission group.

3. The automatic liquid replenishing device for texturing a crystalline silicon cell according to claim 1, characterized in that: The one-way liquid replenishing mechanism (7) comprises a round frame fixing frame (701), the round frame fixing frame (701) is fixedly mounted on one side of the top of the solution tank (2), an empty barrel (702) is fixedly mounted on the round frame fixing frame (701), a piston plate (703) is slidably mounted in the empty barrel (702), a water inlet pipe (705) is installed through one end of the bottom of the empty barrel (702), and a water inlet pipe (705) is rotatably mounted on the inner wall of the empty barrel (702) and is connected to the water inlet pipe (705). 05) is used in conjunction with a No. 1 rotating plate (707), a drainage bin (706) is installed through the upper part of the empty barrel (702), a baffle (708) is fixedly installed on the inner wall of the drainage bin (706), a No. 2 rotating plate (709) is rotatably installed on the top of the baffle (708), a water outlet pipe (710) is installed through the top of the drainage bin (706), and the other end of the water outlet pipe (710) is connected to the solution diverter (9).

4. The automatic liquid replenishing device for texturing a crystalline silicon cell according to claim 1, characterized in that: The reciprocating swing mechanism (8) comprises a supporting fixed frame (801), the supporting fixed frame (801) is fixedly mounted on the top of the fixed support frame (4), a second rotating shaft (802) is rotatably mounted on the supporting fixed frame (801), an arc frame (803) is fixedly mounted on one end of the second rotating shaft (802), a second moving disk (804) is slidably sleeved on the outer wall of the second rotating shaft (802), a first fixing bolt (805) is fixedly mounted on the second moving disk (804), and a second rotating shaft (802) is rotatably sleeved on the outer wall of the second rotating shaft (802). A first fixing bolt (805) is fixedly mounted on the second moving disk (804), and a second rotating shaft (802) is rotatably sleeved on the outer wall of the second rotating shaft (802). A symmetrically distributed rotating guide frame (806) is rotatably installed, a sliding frame (807) is slidably installed on the arc frame (803), a No. 2 fixing bolt (808) is fixedly installed on both sides of the sliding frame (807), and the No. 2 fixing bolt (808) and the No. 1 fixing bolt (805) are both slidably connected to the rotating guide frame (806), a fixed column (809) is fixedly installed on the side of the sliding frame (807) away from the No. 2 rotating shaft (802), and a swing frame (810) is rotatably installed on the other end of the fixed column (809).

5. The automatic liquid replenishing device for texturing a crystalline silicon cell according to claim 1, characterized in that: The adjustment assembly (6) comprises two adjustment fixing frames (601) and a threaded guide frame (603). The two adjustment fixing frames (601) are respectively fixedly mounted on the solution tank (2) and the support fixing frame (801). The two threaded guide frames (603) are respectively fixedly mounted on the fixed sliding frame (501) and the support fixing frame (801). A rotating rod (602) is slidably mounted on the adjustment fixing frame (601). A worm gear (607) is slidably sleeved on the outer wall of the rotating rod (602). The worm gear (607) and the adjustment fixing frame (601) are rotatably connected. The rotating rod The outer wall of (602) is provided with a thread groove (604) for use with the thread guide frame (603), and the rotating rod (602) and the thread guide frame (603) are threadedly connected. An adjusting disk (605) is rotatably installed at one end of the rotating rod (602) close to the thread guide frame (603), a worm (606) is rotatably installed on the adjusting fixed frame (601), and the worm (606) and the worm wheel (607) are meshedly connected, and a second motor (608) is fixedly installed on the outer side of the adjusting fixed frame (601), and the driving end of the second motor (608) is fixedly connected to the worm (606).

6. The automatic liquid replenishing device for texturing a crystalline silicon cell according to claim 2, characterized in that: A reciprocating slide rod (507) is slidably mounted on the fixed slide frame (501), a guide rod (508) is rotatably mounted on the reciprocating slide rod (507), and the guide rod (508) is slidably connected to the guide plate (503).

7. The automatic liquid replenishing device for texturing a crystalline silicon cell according to claim 3, characterized in that: A piston shaft (704) is fixedly mounted on one side of the piston plate (703) close to the reciprocating slide rod (507), and the other end of the piston shaft (704) is fixedly connected to the reciprocating slide rod (507).

8. The automatic liquid replenishing device for texturing a crystalline silicon cell according to claim 1, characterized in that: Three evenly distributed reciprocating rotating shafts (811) are rotatably mounted on the fixed support frame (4); the three reciprocating rotating shafts (811) are connected in transmission via a synchronous wheel transmission group; the middle reciprocating rotating shaft (811) is rotatably connected to a swing frame (810); and an oscillating plate (812) is fixedly mounted on the outer wall of the reciprocating rotating shaft (811).

9. The automatic liquid replenishing device for texturing a crystalline silicon cell according to claim 4, characterized in that: A third motor (813) is fixedly mounted on the support fixing frame (801), a first bevel gear (814) is fixedly mounted on the driving end of the third motor (813), a second bevel gear (815) is fixedly mounted on one end of the second rotating shaft (802) close to the third motor (813), and the first bevel gear (814) and the second bevel gear (815) are meshingly connected.

10. The automatic liquid replenishing device for texturing a crystalline silicon cell according to claim 2, characterized in that: The first rotating shaft (502) is provided with a slide groove (509), and the first moving plate (504) is rotatably provided with a pulley (510), and the pulley (510) and the slide groove (509) are slidably connected.