Chip cleaning detection equipment and detection method

Abstract

The invention relates to the technical field of chip defect detection equipment, in particular to chip cleaning detection equipment and a detection method. The equipment comprises a rack, a feeding mechanism, a front high-power detector, a first material taking mechanism, a cleaning mechanism, a transfer table, an HR end face detector, an AR end face detector, a front low-power detector, a second material taking mechanism, a back detector and a discharging mechanism. The front high-power detector, the first material taking mechanism, the front low-power detector and the second material taking mechanism are all erected on the rack; the feeding mechanism, the cleaning mechanism, the transfer table, the back face detector and the discharging mechanism are sequentially arranged on the rack in the transverse direction. The front high-power detector is arranged above the feeding mechanism; the cleaning mechanism, the HR end face detector, the AR end face detector and the back face detector are arranged around the transfer table, and the front face low-power detector is arranged above the transfer table; the first material taking mechanism can move between the feeding mechanism and the transfer table. The second material taking mechanism can move between the transfer table and the discharging mechanism.

Description

Technical Field

[0001] The present invention relates to the technical field of chip defect detection equipment, and in particular to a chip cleaning detection equipment and a detection method. Background Art

[0002] The appearance defect detection range of the chip includes the front, back and two side cavity surfaces. Due to the characteristics of its production process, there may be dirt on the two side cavity surfaces of the chip, and the dirt will affect the appearance defect detection of the chip, so the dirt needs to be cleaned.

[0003] At present, chip appearance defect detection mainly relies on manual inspection under a microscope, and chip cleaning relies on manual wiping with a cotton swab, but manual inspection accuracy is low and manual cleaning efficiency is low. Chip appearance defect detection can also be automated through chip inspection equipment, which detects appearance defects through visual inspection, with high detection accuracy and efficiency, but most of the existing chip inspection equipment and chip cleaning equipment are independently set up. Even if the two are integrated together, they are simply listed together, resulting in a large footprint of the equipment and limited usage scenarios. Summary of the invention

[0004] 1. Technical issues to be resolved

[0005] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a chip cleaning and testing device and a testing method, which solve the technical problem that the existing chip cleaning and testing equipment occupies a large space.

[0006] (II) Technical solution

[0007] In order to achieve the above-mentioned object, the chip cleaning and testing equipment of the present invention comprises a rack, a loading mechanism, a front high-magnification detector, a first material taking mechanism, a cleaning mechanism, a transfer table, an HR end face detector, an AR end face detector, a front low-magnification detector, a second material taking mechanism, a back detector and a material unloading mechanism;

[0008] The front high-magnification detector, the first material-retrieving mechanism, the front low-magnification detector and the second material-retrieving mechanism are all mounted on the frame, and are all capable of sliding laterally on the frame; the loading mechanism, the cleaning mechanism, the transfer table, the back detector and the unloading mechanism are sequentially arranged on the frame in the laterally direction;

[0009] The front high-magnification detector is arranged above the feeding mechanism; the cleaning mechanism, the HR end face detector, the AR end face detector and the back face detector are arranged around the transfer table, and the front low-magnification detector is arranged above the transfer table;

[0010] The transfer table can slide in the transverse direction; the first material-retrieving mechanism can move between the loading mechanism and the transfer table; the second material-retrieving mechanism can move between the transfer table and the unloading mechanism.

[0011] Optionally, the feeding mechanism includes a pre-sweep feeding module and an ejector mechanism;

[0012] The pre-scanning and feeding module is provided with a material tray that slides in the longitudinal direction; a through hole is opened in the center of the material tray;

[0013] The ejector mechanism is arranged below the through hole; the ejector mechanism is provided with an ejector which can be lifted and lowered vertically and penetrates the through hole.

[0014] Optionally, the pre-sweeping and feeding module comprises a first longitudinal sliding module, and a motor, a belt and a pre-sweeper arranged on the first longitudinal sliding module;

[0015] The first longitudinal sliding module is arranged on the frame; the first longitudinal sliding module can synchronously drive the motor, the belt, the material tray and the pre-sweeper to move longitudinally;

[0016] The belt is wound around the material tray and the motor; the motor can drive the material tray to rotate in a horizontal plane;

[0017] The pre-sweeper is provided with a clamping plate which is telescopic along the radial direction of the material tray.

[0018] Optionally, the ejector mechanism further includes a vertical lifting module and a propeller;

[0019] The vertical lifting module is arranged on the frame;

[0020] The rotating shaft of the propeller is connected with a rotating disk, and the top surface of the rotating disk is an arc surface; the bottom end of the ejector is rotatably connected with a rotating rod, and the rotating rod can roll on the arc surface.

[0021] Optionally, the first material taking mechanism and the second material taking mechanism both include a lateral sliding module, a lifting sliding module, a compensating regulator and a suction nozzle;

[0022] The lateral sliding module is connected to the frame in a lateral sliding manner;

[0023] The lifting and sliding module is vertically slidably arranged on the lateral sliding module;

[0024] The compensating adjuster is arranged on the lifting and sliding module; the suction nozzle is connected with the compensating adjuster, and the compensating adjuster can drive the suction nozzle to rotate vertically.

[0025] Optionally, the front high-magnification detector is arranged on the first material picking mechanism.

[0026] Optionally, the cleaning mechanism is a snowflake cleaning machine.

[0027] Optionally, the transfer table includes a second longitudinal sliding module, a motor, a connecting plate and a rotary suction head;

[0028] The second longitudinal sliding module is arranged on the frame;

[0029] The motor is disposed on the second longitudinal sliding module; the second longitudinal sliding module is connected to the first end of the connecting plate and is capable of driving the connecting plate to move in the transverse direction;

[0030] The second end of the connecting plate is provided with the rotary suction head;

[0031] The rotary suction head is connected to the rotating shaft of the motor.

[0032] Furthermore, the present invention also provides a detection method for a chip cleaning detection device, the detection method for the chip cleaning detection device is implemented based on the chip cleaning detection device as described above, and the detection method comprises:

[0033] The loading mechanism loads the workpiece; the front high-power detector performs high-power front detection on the workpiece; the first picking mechanism picks up the workpiece from the loading mechanism and unloads the workpiece onto the transfer table;

[0034] The turntable moves horizontally to the turntable inspection station, and the HR end face detector, the AR end face detector and the front low-magnification detector respectively perform HR end face inspection, AR end face inspection and low-magnification front face inspection on the workpiece;

[0035] If the HR end face detection and the AR end face detection of the workpiece are both OK, the turntable moves horizontally to the turntable unloading station; otherwise, the workpiece is cleaned by the cleaning mechanism, and after cleaning, the HR end face detector, the AR end face detector and the front low-magnification detector re-inspect the workpiece, and after the re-inspection is OK, the turntable moves to the turntable unloading station;

[0036] The second material-picking mechanism picks up the material on the transfer table and moves the workpiece to above the back detector; the back detector performs back detection on the workpiece;

[0037] The second material taking mechanism unloads the workpiece to the material unloading mechanism;

[0038] The unloading mechanism unloads the material.

[0039] Optionally, the cleaning mechanism cleans the workpiece at the turntable detection station.

[0040] (III) Beneficial effects

[0041] The beneficial effects of the present invention are:

[0042] The front high-magnification detector and the front low-magnification detector perform high-magnification and low-magnification inspections on the workpiece respectively, and perform high-precision inspections on the workpiece from high-magnification and low-magnification perspectives, thereby improving the equipment's inspection accuracy and quality for the workpiece.

[0043] The front high-magnification detector, the first material-retrieving mechanism, the front low-magnification detector, and the second material-retrieving mechanism are all mounted on the frame, that is, suspended, so that the mounting components can move above the components installed on the top surface of the frame, thereby reducing the space occupied by the equipment. The cleaning mechanism, HR end face detector, AR end face detector, and back face detector are arranged around the turntable, and the front low-magnification detector is arranged above the turntable, which improves the integration of the equipment. The HR end face detector, AR end face detector, and front low-magnification detector can simultaneously perform appearance defect detection on the workpiece, improving the detection efficiency of the chip cleaning and detection equipment.

[0044] The transfer table can slide horizontally, which improves its flexibility and effectively avoids the first or second material-picking mechanism from interfering with the front low-magnification detector. In addition, the first and second material-picking mechanisms operate independently. After the second material-picking mechanism picks up materials from the transfer table, the first material-picking mechanism can immediately unload materials from the transfer table, which improves production efficiency.

[0045] The cleaning mechanism is set close to the turntable, which reduces the turnover time of the workpiece between the turntable cleaning station and the turntable inspection station. When the turntable cleaning station and the turntable inspection station are the same station, there is no turnover time, which greatly improves the operation efficiency. It also enables the HR end face detector, AR end face detector and front low-magnification detector to directly re-inspect the workpiece after cleaning, further reducing the inspection time of the workpiece and improving production efficiency.

[0046] The chip cleaning and testing equipment integrates the cleaning mechanism into the side of the turntable, and uses the turntable as the cleaning table of the cleaning mechanism, so that the cleaning mechanism can directly clean the dirty workpiece on the turntable. The cleaning mechanism and the turntable are highly integrated, which reduces the equipment components of the cleaning mechanism, thereby reducing the space occupied by the equipment and improving the use scenarios of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 It is a structural schematic diagram of the chip cleaning and testing equipment of the present invention;

[0048] Figure 2A top view of the chip cleaning and testing device of the present invention;

[0049] Figure 3 It is a structural schematic diagram of the pre-scanning and feeding module of the present invention;

[0050] Figure 4 It is a structural schematic diagram of the ejector mechanism of the present invention;

[0051] Figure 5 It is a structural schematic diagram of the first material taking mechanism of the present invention;

[0052] Figure 6 It is a structural schematic diagram of the transfer station of the present invention;

[0053] Figure 7 It is a structural schematic diagram of the AR end face detector of the present invention;

[0054] Figure 8 It is a structural schematic diagram of the HR end face detector of the present invention;

[0055] Fig. 9 It is a structural schematic diagram of the front low-magnification detector of the present invention;

[0056] Fig.10 It is a structural schematic diagram of the second material taking mechanism of the present invention;

[0057] Fig.11 is a schematic structural diagram of a backside detector of the present invention;

[0058] Fig.12 It is a structural schematic diagram of the material unloading mechanism of the present invention;

[0059] Fig.13 It is a structural schematic diagram of the cleaning mechanism of the present invention.

[0060] [Description of Reference Numerals]

[0061] 1: rack;

[0062] 2: feeding mechanism; 21: pre-sweeping feeding module; 211: material tray; 212: first longitudinal sliding module; 213: motor; 214: belt; 215: pre-sweeper; 2151: card plate; 22: ejector mechanism; 221: ejector; 222: vertical lifting module; 223: propeller; 224: turntable;

[0063] 3: Positive high-power detector;

[0064] 4: first material taking mechanism; 41: lateral sliding module; 42: lifting sliding module; 43: compensation regulator; 44: suction nozzle;

[0065] 5: Cleaning mechanism;

[0066] 6: transfer table; 61: second longitudinal sliding module; 62: motor; 63: rotary suction head; 64: connecting plate;

[0067] 7: HR end face detector;

[0068] 8: AR end face detector;

[0069] 9: Frontal low magnification detector;

[0070] 10: The second material taking mechanism;

[0071] 11: back detector;

[0072] 12: Unloading mechanism. DETAILED DESCRIPTION

[0073] In order to better explain the present invention and facilitate understanding, the present invention is described in detail below through specific implementation modes in conjunction with the accompanying drawings.

[0074] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0075] In addition, in the present invention, descriptions such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0076] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; "connection" can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0077] See also Figure 1 , Figure 2 as well as Figures 7 to 13The present invention provides a chip cleaning and testing device, which includes a frame 1, a feeding mechanism 2, a front high-magnification detector 3, a first material picking mechanism 4, a cleaning mechanism 5, a transfer table 6, an HR end face detector 7, an AR end face detector 8, a front low-magnification detector 9, a second material picking mechanism 10, a back detector 11 and a feeding mechanism 12; the front high-magnification detector 3, the first material picking mechanism 4, the front low-magnification detector 9 and the second material picking mechanism 10 are all mounted on the frame 1, and the mounting components can slide laterally on the frame 1; the feeding mechanism 2 , cleaning mechanism 5, transfer table 6, back detector 11 and unloading mechanism 12 are arranged on the frame 1 in sequence along the horizontal direction; the front high-power detector 3 is arranged above the loading mechanism 2; the cleaning mechanism 5, HR end face detector 7, AR end face detector 8 and back detector 11 are arranged around the transfer table 6, and the front low-power detector 9 is arranged above the transfer table 6; the transfer table 6 can slide along the horizontal direction; the first material taking mechanism 4 can move between the loading mechanism 2 and the transfer table 6; the second material taking mechanism 10 can move between the transfer table 6 and the unloading mechanism 12. The chip cleaning and testing equipment of the present invention can detect and clean chips such as COC, CHIP, Bar and COS.

[0078] A vertical lifting mechanism can be set on the front high-magnification detector 3, the first material-picking mechanism 4, the front low-magnification detector 9 and the second material-picking mechanism 10, and the lifting module is set on the I-beam of the frame along the horizontal sliding. Each component set on the top surface of the frame 1 can be provided with a longitudinal sliding mechanism, and through the effective cooperation of each component, the three-dimensional movement of the workpiece on the chip cleaning and testing equipment is realized. Each sliding module can be driven by a cylinder, a hydraulic cylinder or an electric push rod. The front high-magnification detector 3, the HR end face detector 7, the AR end face detector 8, the front low-magnification detector 9 and the back detector 11 are all detection cameras.

[0079] The front high-magnification detector 3 and the front low-magnification detector 9 perform high-magnification detection and low-magnification detection on the workpiece respectively, and perform high-precision detection on the workpiece from high-magnification and low-magnification viewing angles, thereby improving the detection accuracy and quality of the equipment on the workpiece.

[0080] The front high-magnification detector 3, the first material-picking mechanism 4, the front low-magnification detector 9 and the second material-picking mechanism 10 are all mounted on the frame 1, that is, they are suspended so that the mounting components can move above the components installed on the top surface of the frame 1, thereby reducing the space occupied by the equipment. The cleaning mechanism 5, the HR end face detector 7, the AR end face detector 8 and the back detector 11 are arranged around the turntable 6. In this embodiment, the cleaning mechanism 5, the HR end face detector 7, the AR end face detector 8 and the back detector 11 are correspondingly arranged in the front, back, left and right directions of the turntable 6, and the front low-magnification detector 9 is arranged above the turntable 6, which improves the integration of the equipment. The HR end face detector 7, the AR end face detector 8 and the front low-magnification detector 9 can simultaneously perform appearance defect detection on the workpiece, thereby improving the detection efficiency of the chip cleaning and detection equipment.

[0081] The transfer table 6 can slide in the lateral direction. In this embodiment, the transfer table 6 includes a transfer table loading station, a transfer table inspection station and a transfer table unloading station. At the transfer table loading station, the transfer table 6 docks with the first material picking mechanism 4 to pick up materials. The transfer table inspection station, that is, the transfer table cleaning station, is responsible for defect detection and cleaning of the workpiece. At the transfer table unloading station, the transfer table 6 docks with the second material picking mechanism 10 to unload materials. The transfer table 6 can slide in the lateral direction, which improves the flexibility of the transfer table 6 and can effectively avoid the situation where the first material picking mechanism 4 or the second material picking mechanism 10 interferes with the front low-magnification detector 9. In addition, the first material picking mechanism 4 and the second material picking mechanism 10 operate independently. After the second material picking mechanism 10 picks up materials from the transfer table 6, the first material picking mechanism 4 can immediately unload materials from the transfer table 6, thereby improving production efficiency.

[0082] The cleaning mechanism 5 is arranged close to the turntable 6, which reduces the turnover time of the workpiece between the turntable cleaning station and the turntable inspection station. When the turntable cleaning station and the turntable inspection station are the same station, there is no turnover time, which greatly improves the working efficiency. It also enables the HR end face detector 7, AR end face detector 8 and front low-magnification detector 9 to directly re-inspect the workpiece after cleaning, further reducing the inspection time of the workpiece and improving production efficiency.

[0083] The chip cleaning and testing equipment integrates the cleaning mechanism 5 into the side of the transfer table 6, and uses the transfer table 6 as a cleaning table for the cleaning mechanism 5, so that the cleaning mechanism 5 can directly clean the dirty workpiece on the transfer table 6. The cleaning mechanism 5 and the transfer table 6 are highly integrated, which reduces the equipment components of the cleaning mechanism 5, thereby reducing the space occupied by the equipment and improving the use scenarios of the equipment.

[0084] like Figure 3 and Figure 4As shown, the feeding mechanism 2 includes a pre-scanning feeding module 21 and an ejector mechanism 22; the pre-scanning feeding module 21 is provided with a material tray 211 that slides in the longitudinal direction; a through hole is opened in the center of the material tray 211; the ejector mechanism 22 is arranged below the through hole; the ejector mechanism 22 is provided with an ejector 221 that can be lifted and lowered vertically and penetrate the through hole. Specifically, the material tray 211 is used to place the blue film with the chip adhered, and the ejector mechanism 22 is arranged below the through hole, that is, below the blue film. The blue film is separated from the workpiece by lifting and lowering the ejector 221, so as to facilitate the first material taking mechanism 4 to take the material. The material tray 211 and the ejector mechanism 22 are arranged linearly in the vertical direction, which optimizes the occupied space of the equipment.

[0085] Further, the pre-scanning loading module 21 includes a first longitudinal sliding module 212, and a motor 213, a belt 214 and a pre-scanner 215 arranged on the first longitudinal sliding module 212; the first longitudinal sliding module 212 is arranged on the frame 1; the first longitudinal sliding module 212 can synchronously drive the motor 213, the belt 214, the material tray 211 and the pre-scanner 215 to move longitudinally; the belt 214 is wound around the material tray 211 and the motor 213; the motor 213 can drive the material tray 211 to rotate in a horizontal plane; the pre-scanner 215 is provided with a card plate 2151 that is retractable along the radial direction of the material tray 211. Specifically, the first longitudinal sliding module 212 transports the material tray 211 to the front high-magnification detector 3, the motor 213 drives the material tray 211 to rotate at a set angle, and the front high-magnification detector 3 takes a picture. The front high-power detector 3 can not only perform high-power front detection on the workpiece, but also identify the position of the workpiece on the blue film, so that the angle compensation mechanism on the first material picking mechanism 4, that is, the compensation regulator 43, can compensate and adjust the angle of picking up the workpiece to achieve high-precision material picking of the workpiece. The clamping plate 2151 presses or clamps the blue film after the material tray 211 rotates, and cooperates with the ejector mechanism 22 to separate the blue film and the workpiece. Through the effective cooperation of the front high-power detector 3, the pre-scanning loading module 21 and the first material picking mechanism 4, the first material picking mechanism 4 can obtain the angle compensation information required for the workpiece to rotate, and achieve high-precision material picking of the first material picking mechanism 4.

[0086] Secondly, the ejector mechanism 22 also includes a vertical lifting module 222 and a propeller 223; the vertical lifting module 222 is arranged on the frame 1; the propeller 223 is arranged on the vertical lifting module 222; the rotating shaft of the propeller 223 is connected with a turntable, and the top surface of the turntable is an arc-shaped surface; the bottom end of the ejector 221 is rotatably connected with a rotating rod, and the rotating rod can roll on the arc-shaped surface. Specifically, the propeller 223 is an electric motor. When the propeller 223 drives the turntable to rotate, the arc-shaped surface can squeeze the rotating rod to rotate and lift vertically, thereby realizing the vertical lifting of the ejector 221. The ejector pin 221 is driven in two stages by the vertical lifting module 222 and the pusher 223. The vertical lifting module 222 can quickly drive the ejector pin 221 to move below the blue film. The curved surface of the turntable can limit the vertical lifting stroke of the ejector pin 221. The driving method of the pusher 223 is softer than that of the vertical lifting module 222, which can effectively protect the chip and prevent the ejector pin 221 from damaging the chip due to excessive lifting speed.

[0087] See also Figure 5 The first material picking mechanism 4 and the second material picking mechanism 10 both include a lateral sliding module 41, a lifting sliding module 42, a compensating regulator 43 and a suction nozzle 44; the lateral sliding module 41 is connected to the frame 1 in a lateral sliding manner; the lifting sliding module 42 is arranged on the lateral sliding module 41 in a vertical sliding manner; the compensating regulator 43 is arranged on the lifting sliding module 42; the suction nozzle 44 is connected to the compensating regulator 43, and the compensating regulator 43 can drive the suction nozzle 44 to rotate vertically. Specifically, the compensating regulator 43 is an electric motor or a motor, and the suction nozzle 44 is a vacuum suction nozzle connected to an external air pipe. The compensating regulator 43 drives the suction nozzle 44 to compensate and rotate the corresponding angle according to the workpiece position information obtained by the front high-power detector 3 on the feeding mechanism 2, so as to realize high-precision unloading of the first material picking mechanism 4 on the transfer table 6, thereby improving the detection accuracy or cleaning accuracy of subsequent components.

[0088] Furthermore, the front high-power detector 3 is arranged on the first material-retrieving mechanism 4. On the one hand, the front high-power detector 3 is integrated into the first material-retrieving mechanism 4, which reduces the lateral sliding components on the frame 1 and reduces the risk of interference between components. On the other hand, after the first material-retrieving mechanism 4 completes unloading on the transfer table 6, the front high-power detector 3 can take a picture of the placement position of the workpiece on the transfer table 6, so that the system can obtain the placement position information of the workpiece on the transfer table 6, so that the subsequent components can compensate and adjust the placement position of the workpiece, thereby improving the detection accuracy and cleaning accuracy.

[0089] In addition, the cleaning mechanism 5 is a snowflake cleaning machine, which uses environmentally friendly carbon dioxide snowflake cleaning technology to efficiently clean the end face of the workpiece. The cleaning is gentle and not easy to damage the workpiece, which improves the reliability of the workpiece being directly cleaned at the turntable inspection station. After the cleaning mechanism 5 cleans the workpiece, the HR end face detector 7, AR end face detector 8 and front low-magnification detector 9 will re-inspect it. After the workpiece is OK, the turntable 6 will move the workpiece to the turntable unloading station.

[0090] like Figure 6 As shown, the turntable 6 includes a second longitudinal sliding module 61, a motor 62, a connecting plate 64 and a rotary suction head 63; the second longitudinal sliding module 61 is arranged on the frame 1; the motor 62 is arranged on the second longitudinal sliding module 61; the second longitudinal sliding module 61 is connected to the first end of the connecting plate 64, and can drive the connecting plate 64 to move horizontally; the second end of the connecting plate 64 is provided with a rotary suction head 63; the rotary suction head 63 is connected to the rotating shaft of the motor 62. Specifically, the movement of the rotary suction head 63 in the horizontal plane is realized by the cooperative driving of the second longitudinal sliding module 61 and the motor 62. The rotary suction head 63 includes a suction head and a rotary motor to realize the compensation adjustment of the adsorbed workpiece, thereby improving the detection accuracy and cleaning accuracy of the workpiece.

[0091] In addition, the present invention also provides a detection method of a chip cleaning detection device. The detection method of the chip cleaning detection device is implemented based on the above chip cleaning detection device, and the detection method includes:

[0092] The loading mechanism 2 loads the workpiece; the front high-power detector 3 performs high-power front detection on the workpiece; the first material-retrieving mechanism 4 retrieves the workpiece from the loading mechanism 2 and unloads the workpiece onto the transfer table 6;

[0093] The turntable 6 moves horizontally to the turntable inspection station, and the HR end face detector 7, the AR end face detector 8 and the front low-magnification detector 9 respectively perform HR end face inspection, AR end face inspection and low-magnification front face inspection on the workpiece;

[0094] If the HR end face detection and AR end face detection of the workpiece are both OK, the transfer table 6 moves horizontally to the turntable unloading station; otherwise, the workpiece is cleaned by the cleaning mechanism 5, and after cleaning, the HR end face detector 7, AR end face detector 8 and front low-magnification detector 9 re-inspect the workpiece. After the re-inspection is OK, the transfer table 6 moves to the turntable unloading station; if the re-inspection is NG, the equipment alarms, and the operator eliminates the equipment error, or unloads the NG workpiece to the defective product storage area;

[0095] The second material taking mechanism 10 takes the material from the transfer table 6 and moves the workpiece to above the back detector 11; the back detector 11 performs back detection on the workpiece;

[0096] The second material taking mechanism 10 unloads the workpiece to the material unloading mechanism 12;

[0097] The unloading mechanism 12 unloads the material.

[0098] The first material-picking mechanism 4 is responsible for loading and unloading the workpieces between the loading mechanism 2 and the transfer table 6, and the second material-picking mechanism 10 is responsible for loading and unloading the workpieces between the transfer table 6 and the unloading mechanism 12. The division of labor is clear, and the first material-picking mechanism 4 and the second material-picking mechanism 10 can work independently, reducing the waiting time for loading the next workpiece, thereby improving the detection efficiency of the equipment. In addition, the first material-picking mechanism 4 and the second material-picking mechanism 10 are set on the I-beam of the frame 1, so that the first material-picking mechanism 4 and the second material-picking mechanism 10 can work above the top surface of the frame 1. The spatial layout of each component is reasonable, which effectively reduces the space occupied by the equipment. The transfer table 6 includes a transfer table loading station, a transfer table detection station and a transfer table unloading station, which improves the interactivity of the transfer table 6 corresponding to the first material-picking mechanism 4, the cleaning mechanism 5 and the second material-picking mechanism 10, improves the detection accuracy and cleaning accuracy of the workpiece, and can also effectively avoid the first material-picking mechanism 4 and the second material-picking mechanism 10 corresponding to the front low-magnification detector 9. Cleaning, improve the reliability of the equipment.

[0099] Furthermore, the cleaning mechanism 5 cleans the workpiece at the turntable inspection station, so that the turntable cleaning station and the turntable inspection station overlap, that is, the workpiece does not need to be moved after the appearance defect is detected, and the cleaning mechanism 5 directly cleans the workpiece, which reduces the work time of the workpiece turnover between the turntable cleaning station and the turntable inspection station. The same is true for re-inspection, which improves the inspection efficiency of the equipment. Of course, when cleaning the workpiece, the HR end face detector 7, the AR end face detector 8 and the front low-magnification detector 9 can be driven by their respective corresponding drive modules away from the workpiece, so that the cleaning mechanism 5 can perform the cleaning work.

[0100] It should be understood that the above description of the specific embodiments of the present invention is only for illustrating the technical route and features of the present invention, and its purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly, but the present invention is not limited to the above specific implementation methods. Any changes or modifications made within the scope of the claims of the present invention should be included in the protection scope of the present invention.

Claims

1. A chip cleaning and testing device, characterized in that: The chip cleaning and testing equipment comprises a frame (1), a loading mechanism (2), a front high-magnification detector (3), a first material taking mechanism (4), a cleaning mechanism (5), a transfer table (6), an HR end face detector (7), an AR end face detector (8), a front low-magnification detector (9), a second material taking mechanism (10), a back face detector (11) and a material unloading mechanism (12); The front high-magnification detector (3), the first material-retrieving mechanism (4), the front low-magnification detector (9) and the second material-retrieving mechanism (10) are all mounted on the frame (1), and are all capable of sliding laterally on the frame (1); the loading mechanism (2), the cleaning mechanism (5), the transfer table (6), the back detector (11) and the unloading mechanism (12) are sequentially arranged on the frame (1) in the laterally direction; The front high-magnification detector (3) is arranged above the feeding mechanism (2); the cleaning mechanism (5), the HR end face detector (7), the AR end face detector (8) and the back face detector (11) are arranged around the transfer table (6), and the front low-magnification detector (9) is arranged above the transfer table (6); The transfer table (6) is capable of sliding in the transverse direction; the first material taking mechanism (4) is capable of moving between the loading mechanism (2) and the transfer table (6); and the second material taking mechanism (10) is capable of moving between the transfer table (6) and the unloading mechanism (12).

2. The chip cleaning and testing equipment according to claim 1, characterized in that: The feeding mechanism (2) comprises a pre-scanning feeding module (21) and an ejector mechanism (22); The pre-scanning and feeding module (21) is provided with a material tray (211) that slides in the longitudinal direction; a through hole is provided at the center of the material tray (211); The ejector mechanism (22) is arranged below the through hole; the ejector mechanism (22) is provided with an ejector (221) which can be lifted and lowered vertically and penetrates the through hole.

3. The chip cleaning and testing equipment according to claim 2, characterized in that: The pre-sweeping and feeding module (21) comprises a first longitudinal sliding module (212), and a motor (213), a belt (214) and a pre-sweeper (215) arranged on the first longitudinal sliding module (212); The first longitudinal sliding module (212) is arranged on the frame (1); the first longitudinal sliding module (212) can synchronously drive the motor (213), the belt (214), the material tray (211) and the pre-sweeper (215) to move longitudinally; The belt (214) is wound around the material tray (211) and the motor (213); the motor (213) is capable of driving the material tray (211) to rotate in a horizontal plane; The pre-sweeper (215) is provided with a clamping plate (2151) which is retractable in the radial direction of the material tray (211).

4. The chip cleaning and testing equipment according to claim 2, characterized in that: The ejector mechanism (22) further comprises a vertical lifting module (222) and a propeller (223); The vertical lifting module (222) is arranged on the frame (1); The propeller (223) is arranged on the vertical lifting module (222); The rotating shaft of the propeller (223) is connected to a rotating disk, and the top surface of the rotating disk is an arc-shaped surface; the bottom end of the ejector pin (221) is rotatably connected to a rotating rod, and the rotating rod can roll on the arc-shaped surface.

5. The chip cleaning and testing equipment according to claim 1, characterized in that: The first material taking mechanism (4) and the second material taking mechanism (10) both comprise a lateral sliding module (41), a lifting sliding module (42), a compensating regulator (43) and a suction nozzle (44); The transverse sliding module (41) is connected to the frame (1) in a transverse sliding manner; The lifting and sliding module (42) is arranged on the lateral sliding module (41) in a vertically sliding manner; The compensating adjuster (43) is arranged on the lifting and sliding module (42); the suction nozzle (44) is connected to the compensating adjuster (43), and the compensating adjuster (43) can drive the suction nozzle (44) to rotate vertically.

6. The chip cleaning and testing equipment according to claim 1, characterized in that: The front high-magnification detector (3) is arranged on the first material taking mechanism (4).

7. The chip cleaning and testing equipment according to claim 1, characterized in that: The cleaning mechanism (5) is a snowflake cleaning machine.

8. The chip cleaning and testing equipment according to claim 1, characterized in that: The transfer table (6) comprises a second longitudinal sliding module (61), a motor (62), a connecting plate (64) and a rotary suction head (63); The second longitudinal sliding module (61) is arranged on the frame (1); The motor (62) is arranged on the second longitudinal sliding module (61); the second longitudinal sliding module (61) is connected to the first end of the connecting plate (64) and is capable of driving the connecting plate (64) to move in the transverse direction; The second end of the connecting plate (64) is provided with the rotary suction head (63); The rotary suction head (63) is connected to the rotating shaft of the motor (62).

9. A detection method for chip cleaning detection equipment, characterized in that: The detection method of the chip cleaning detection device is implemented based on the chip cleaning detection device according to any one of claims 1 to 8, and the detection method includes: The loading mechanism (2) loads the workpiece; the front high-magnification detector (3) performs high-magnification front detection on the workpiece; the first picking mechanism (4) picks up the workpiece from the loading mechanism (2) and unloads the workpiece onto the transfer table (6); The turntable (6) moves laterally to the turntable detection station, and the HR end face detector (7), the AR end face detector (8) and the front low-magnification detector (9) respectively perform HR end face detection, AR end face detection and low-magnification front face detection on the workpiece; If the HR end face detection and the AR end face detection of the workpiece are both OK, the turntable (6) moves horizontally to the turntable unloading station; otherwise, the workpiece is cleaned by the cleaning mechanism (5), and after cleaning, the HR end face detector (7), the AR end face detector (8) and the front low-magnification detector (9) re-inspect the workpiece, and after the re-inspection is OK, the turntable (6) moves to the turntable unloading station; The second material taking mechanism (10) takes material from the transfer table (6) and moves the workpiece to above the back side detector (11); the back side detector (11) performs back side detection on the workpiece; The second material taking mechanism (10) unloads the workpiece to the material unloading mechanism (12); The unloading mechanism (12) unloads the material.

10. The detection method of chip cleaning detection equipment according to claim 9, characterized in that: The cleaning mechanism (5) cleans the workpiece at the turntable detection station.

Images