Dynamic ion beam distribution measuring system and measuring method in vacuum system

Abstract

The invention provides a dynamic ion beam distribution measuring system and measuring method in a vacuum system, and the system comprises a plurality of Faraday ion receivers which are installed in any Faraday cylinder; the signal acquisition device is arranged on the back side of the umbrella sheet and is used for receiving a sampling signal acquired by the Faraday ion receiver in real time; the signal transparent transmission device comprises a signal receiving and transmitting module and a signal interface module, the signal receiving and transmitting module and the signal interface module penetrate through the vacuum cavity to keep communication connection, the signal interface module is used for communication connection of an external host, and the signal receiving and transmitting module keeps wireless communication connection with the signal acquisition device; a sampling signal sent by the signal acquisition device through wireless communication is received and transmitted to the signal interface module, and the signal interface module forwards the sampling signal to an external host, so that real-time dynamic ion beam distribution measurement is realized. Through an ingenious wireless communication transmission scheme, vacuum obstacle avoidance is overcome, and dynamic measurement of ion beam distribution in a vacuum system can be realized in real time.

Description

Technical Field

[0001] The present application relates to the field of radio frequency ion beam measurement technology, and in particular to a dynamic ion beam distribution measurement system and measurement method in a vacuum system. Background Art

[0002] Currently, RF ion beam measurements in vacuum systems are primarily performed using wired connections, which are connected to the outside of the vacuum chamber via vacuum flanges. However, this wired connection approach has significant limitations. When dynamic, real-time measurements of the RF ion beam are required, the wires become a limiting factor, rendering the measurement impossible, and thus, making dynamic measurements impossible. Summary of the Invention

[0003] The purpose of the embodiments of the present application is to provide a dynamic ion beam distribution measurement system and measurement method in a vacuum system, so as to overcome vacuum obstacles through a clever wireless communication transmission scheme and realize the dynamic measurement of ion beam distribution in a vacuum system in real time.

[0004] In order to achieve the above objectives, the embodiments of the present application are implemented in the following manner:

[0005] In a first aspect, embodiments of the present application provide a dynamic ion beam distribution measurement system in a vacuum system. The vacuum system includes a vacuum chamber, an emission end of an ion generator extending through and sealed on a first sidewall of the vacuum chamber, a rotating shaft provided on a second sidewall of the vacuum chamber, a back side of an umbrella blade drivingly connected to the rotating shaft, a front side of the umbrella blade facing the emission end of the ion generator, and a plurality of Faraday cages arranged on the back side of the umbrella blade. The dynamic ion beam distribution measurement system includes: a plurality of Faraday ion receivers installed in any of the Faraday cages; a signal acquisition device installed on the back side of the umbrella blade and communicatively connected to each Faraday ion receiver for receiving a sampling signal collected in real time by the Faraday ion receiver; and a signal transmission device including a signal transceiver module and a signal interface module. The signal transceiver module and the signal interface module penetrate the vacuum chamber to maintain a communication connection and maintain the vacuum chamber seal. The signal interface module is used for communication with an external host. The signal transceiver module maintains a wireless communication connection with the signal acquisition device, receives a sampling signal sent by the signal acquisition device via wireless communication, and transmits it to the signal interface module. The signal interface module is used to forward the sampling signal to the external host, thereby achieving real-time dynamic ion beam distribution measurement.

[0006] In combination with the first aspect, in a first possible implementation of the first aspect, the signal acquisition device includes an acquisition device shell, a mounting foot, and an integrated circuit board, the acquisition device shell having an internal cavity; the mounting foot is arranged at the bottom of the acquisition device shell; the integrated circuit board is arranged in the internal cavity of the acquisition device shell, and is integrated with a sampling and analysis module, a data storage module, a wireless communication module and a power supply module, wherein the sampling and analysis module is communicatively connected to each Faraday ion receiver to receive the sampling signal collected by the Faraday ion receiver in real time, the data storage module stores the received sampling signal, the wireless communication module is wirelessly connected to the signal transceiver module of the signal transmission device to wirelessly transmit the sampling signal to the signal transceiver module, and the power supply module supplies power to the sampling and analysis module, the data storage module, the wireless communication module and each Faraday ion receiver.

[0007] In combination with the first possible implementation of the first aspect, in a second possible implementation of the first aspect, the shell of the collection device is annular, and the hollow portion inside the ring is larger than the portion where the back side of the parasol is connected to the rotating shaft.

[0008] In combination with the second possible implementation of the first aspect, in a third possible implementation of the first aspect, the mounting feet are distributed around the bottom surface of the acquisition device shell, and each mounting foot has an arc that matches the back side of the umbrella piece. A mounting groove is provided in the mounting foot for fixing the mounting foot on the back side of the umbrella piece to fix the signal acquisition device.

[0009] In combination with the second possible implementation manner of the first aspect, in a fourth possible implementation manner of the first aspect, a positioning signal sending module is further integrated on the integrated circuit board, and the signal transceiver module includes a wireless signal transceiver unit and a positioning signal receiving unit. The positioning signal sending module transmits a positioning signal outward, and the positioning signal receiving unit is used to receive the positioning signal. The positioning signal sending module rotates with the parachute, and the positioning signal receiving unit receives a positioning signal once for each rotation.

[0010] In combination with the first possible implementation manner of the first aspect, in a fifth possible implementation manner of the first aspect, the collection device housing is installed at any position on the back side of the parasol through mounting feet.

[0011] In combination with the first aspect, in a sixth possible implementation of the first aspect, the signal interface module is a line interface or a wireless communication module.

[0012] In combination with the sixth possible implementation manner of the first aspect, in a seventh possible implementation manner of the first aspect, the signal interface module and the signal transceiver module are connected through a vacuum flange harness or a vacuum conductive flange.

[0013] In a second aspect, an embodiment of the present application provides a dynamic ion beam distribution measurement method in a vacuum system, which is applied to the dynamic ion beam distribution measurement system in the vacuum system described in the first aspect, and the method includes: determining measurement points from multiple Faraday cages arranged on the back side of the umbrella piece, and installing a Faraday ion receiver in the Faraday cage corresponding to each point, and communicating with each Faraday ion receiver by connecting a signal acquisition device; connecting an external host to a signal interface module; starting the vacuum system to make the vacuum system reach a set vacuum degree; starting the ion generator to generate an ion beam, adjusting the parameters of the ion beam and the rotation speed of the umbrella piece to meet the measurement requirements; collecting sampling signals in real time through the Faraday ion receiver, and wirelessly transmitting the sampling signals to the signal transceiver module through the signal acquisition device; after the signal transceiver module transmits the sampling signals to the signal interface module, the sampling signals are transmitted to the external host through the signal interface module to realize real-time dynamic ion beam distribution measurement.

[0014] In combination with the second aspect, in a first possible implementation of the first aspect, the signal acquisition device includes an acquisition device housing, a mounting foot, and an integrated circuit board, the integrated circuit board integrating a sampling and analysis module, a data storage module, a wireless communication module, a power supply module, and a positioning signal sending module, and when the signal transceiver module includes a wireless signal transceiver unit and a positioning signal receiving unit, before real-time acquisition of the sampling signal by the Faraday ion receiver, the method further includes: transmitting a positioning signal externally through the positioning signal sending module, and recording positioning signal reception data after the positioning signal receiving unit receives the positioning signal, wherein the positioning signal sending module rotates with the parasol, and the positioning signal receiving unit can receive a positioning signal once per rotation; and the external host determines the transmission timing and transmission frequency of the sampling signal based on the positioning signal reception data and the rotational speed of the parasol, so that the wireless communication module integrated on the integrated circuit board in the signal acquisition device transmits the sampling signal collected in real time by the Faraday ion receiver to the signal transceiver module according to the transmission timing and transmission frequency.

[0015] Beneficial effects:

[0016] 1. A signal acquisition device is mounted on the back side of the parasol, communicating with each Faraday ion receiver to receive the sampling signals collected in real time by the Faraday ion receiver. A signal transmission device is designed, comprising a signal transceiver module and a signal interface module. The signal transceiver module and the signal interface module penetrate the vacuum chamber to maintain a communication connection and maintain the vacuum chamber seal. The signal interface module is used to communicate with an external host. The signal transceiver module maintains a wireless communication connection with the signal acquisition device through the signal transceiver module, thereby receiving the sampling signals sent by the signal acquisition device via wireless communication and transmitting them to the signal interface module. The signal interface module is used to forward the sampling signals to the external host. This method allows the signal acquisition device to rotate with the rotation of the parasol, realizing dynamic measurement of the ion beam distribution. The designed signal transmission device includes a signal transceiver module installed inside the vacuum cavity and a signal interface module installed outside the vacuum cavity. The two modules penetrate the vacuum cavity and maintain the sealing of the communication and vacuum cavity, thereby completing the separation of signal transmission inside the vacuum cavity after signal acquisition and signal transmission across the vacuum cavity: inside the vacuum cavity, the sampling signal is dynamically collected by the signal acquisition device on the umbrella piece (connected Faraday ion receiver) and transmitted to the signal transceiver module inside the vacuum cavity through wireless communication, thereby realizing the transmission of the sampling signal within the vacuum cavity; then, through the wired connection between the signal transceiver module inside the vacuum cavity and the signal interface module outside the vacuum cavity (realized by penetrating the vacuum cavity and combining a vacuum flange-type wiring harness or a vacuum conductive flange), the sampling signal is transmitted from the vacuum side to the atmosphere side, and further transmitted to the external host, thereby realizing real-time and dynamic ion beam distribution measurement.

[0017] 2. For applications where the parasol rotates at low speeds (e.g., below 60 revolutions per minute), the signal acquisition device installed on the back of the parasol does not require special installation location requirements due to the low rotation speed. This does not affect the balance of the parasol's rotation and causes almost no damage to the parasol and the vacuum system. However, for applications where the parasol rotates at relatively high speeds (e.g., above 60 revolutions per minute, or even above 300 revolutions per minute), the shape design and installation location of the signal acquisition device on the back of the parasol need to be considered. Therefore, an annular acquisition device housing is designed, with the hollow portion inside the ring larger than the portion of the parasol's back connected to the rotating shaft. This allows the annular acquisition device housing to be installed on the back of the parasol, centered on the connection to the rotating shaft, more evenly distributing the mass of the signal acquisition device and reducing the impact of the signal acquisition device on the parasol as it rotates with the parasol. In addition, the mounting feet are designed to be distributed around the bottom surface of the collection device shell, and each mounting foot has an arc that matches the back side of the umbrella piece. A mounting groove is provided in the mounting foot for fixing the mounting foot on the back side of the umbrella piece to fix the signal collection device. This not only allows the signal collection device to be more stably installed on the back side of the umbrella piece, but also allows the specific fixed position to be adjusted through the mounting groove in the mounting foot according to different umbrella piece specifications, thereby better adapting to umbrella pieces of different specifications, and has greater prospects for the transformation of existing equipment.

[0018] 3. A set of mutually cooperating positioning devices is arranged on the umbrella pieces and the side walls of the cavity (in order not to affect the operation, the first and second side walls are usually not selected for this cavity, but other side walls are selected). One part is a positioning signal sending module, which is integrated on the integrated circuit board of the signal acquisition device. It can transmit positioning signals outward and can also rotate periodically with the rotation of the umbrella pieces; the other part is a positioning signal receiving unit of the signal transceiver module, which is fixedly arranged on the side wall of the vacuum cavity and can periodically receive the positioning signals emitted outward by the positioning signal sending module (the positioning signal receiving unit receives a positioning signal once for each rotation). Thus, according to the reception of the positioning signal , judging the rotational position of the parasol, thereby determining the position of the wireless communication module in the signal acquisition device (located in the ring-shaped signal acquisition device and fixed relative to the positioning signal transmission module), so that the external host can determine the transmission timing and frequency of the sampling signal based on the positioning signal reception data and the rotational speed of the parasol, so that the wireless communication module integrated on the integrated circuit board in the signal acquisition device transmits the sampling signal collected in real time by the Faraday ion receiver to the signal transceiver module according to the transmission timing and transmission frequency. In this way, the transmission quality problem that may be caused by the wireless communication module transmitting data (sampling signal) to the fixed-position wireless signal transceiver unit during high-speed rotation can be minimized, thereby improving the transmission quality.

[0019] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 Schematic diagram of the dynamic ion beam distribution measurement system in a vacuum system from the first perspective.

[0022] Figure 2 Schematic diagram of the dynamic ion beam distribution measurement system in a vacuum system from a second perspective.

[0023] Figure 3 Schematic diagram of the dynamic ion beam distribution measurement system in a vacuum system from a third perspective.

[0024] Figure 4 This is a schematic diagram of the annular signal acquisition device shell being arranged on the back side of the parasol.

[0025] Figure 5 This is a schematic diagram of the architecture for communication between the integrated circuit board set in the signal acquisition device, the signal transparent transmission device, and the external host.

[0026] Figure 6 Flowchart of a method for measuring dynamic ion beam distribution in a vacuum system.

[0027] Icons: 11-vacuum chamber; 111-first side wall; 112-second side wall; 12-emitting end of ion generator; 13-rotating axis; 14-umbrella piece; 15-Faraday cage; 21-signal acquisition device; 211-acquisition device housing; 212-mounting foot; 213-integrated circuit board; 2131-sampling and analysis module; 2132-data storage module; 2133-wireless communication module; 2134-power supply module; 22-signal transmission device; 221-signal transceiver module; 222-signal interface module; 30-external host. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application.

[0029] See also Figure 1-Figure 3 , Figure 1-Figure 3Schematic diagram of a dynamic ion beam distribution measurement system in a vacuum system provided in an embodiment of the present application from multiple perspectives.

[0030] In this embodiment, the vacuum system includes a vacuum chamber 11. An emission end 12 of an ion generator (such as a radio frequency ion source, a Hall ion source, a Kaufman ion source, or a plasma source) extends through and is sealed against a first sidewall 111 within the vacuum chamber 11. A rotating shaft 13 is provided on a second sidewall 112 within the vacuum chamber 11 (for example, by a dynamic seal structure, or by combining a vacuum flange with a sealed rotary joint and a metal gasket, which is conventional and will not be described in detail). The backs of umbrella flaps 14 are drivingly connected to the rotating shaft 13. The fronts of the umbrella flaps 14 face the emission end 12 of the ion generator, and a plurality of Faraday cages 15 are arranged on the backs of the umbrella flaps 14. This portion utilizes the existing vacuum system and is not an improvement of this embodiment, so it will not be described in detail here.

[0031] In addition, in this embodiment, the installation position of the emission end 12 of the ion generating device is described as the first side wall 111, and the installation position of the umbrella piece 14 is described as the second side wall 112. This is only for convenience. According to different vacuum system designs, the installation positions of the emission end 12 of the ion generating device and the umbrella piece 14 can have many flexible changes, as long as the two are relative, for example, one is installed on the top surface and the other is installed on the bottom surface, or they are installed at a certain inclination angle, etc. The description here should not be regarded as a limitation of this application.

[0032] A plurality of Faraday cages 15 are arranged on the back side of the umbrella piece 14 , and the arrangement position is not limited to the example given in the figure, and can be opened at any position on the back side of the umbrella piece 14 according to measurement requirements.

[0033] Furthermore, the structural design of the umbrella blades 14 may vary in different application scenarios. In practical applications, the umbrella blades 14 serve as a support mechanism for placing and positioning the Faraday cage 15 and the signal acquisition device 21 in a vacuum space. The umbrella blades 14 may be designed into other shapes as needed. The shape of the umbrella blades 14 shown in this embodiment should not be considered a limitation of this application.

[0034] The dynamic ion beam distribution measurement system includes: a plurality of Faraday ion receivers, a signal acquisition device 21 and a signal transmission device 22.

[0035] Several Faraday ion receivers (the number and installation locations of the Faraday ion receivers are determined according to measurement requirements) are installed in any Faraday cage 15 to collect ion beam distribution data in real time and obtain corresponding sampling signals.

[0036] The signal collection device 21 is installed on the back side of the parasol 14 and is in communication connection with each Faraday ion receiver, and is used to receive the sampling signal collected by the Faraday ion receiver in real time.

[0037] Illustratively, the signal acquisition device 21 includes an acquisition device housing 211, mounting feet 212, and an integrated circuit board 213. The acquisition device housing 211 has an internal cavity, the mounting feet 212 are disposed at the bottom of the acquisition device housing 211, and the integrated circuit board 213 is disposed in the internal cavity of the acquisition device housing 211.

[0038] Due to different application scenarios, the rotation speed requirements for the umbrella sheet 14 are different, some are relatively low (for example, less than 60 revolutions per minute) and some are relatively high (more than 60 revolutions per minute, for example, 300 revolutions per minute). For low-speed application scenarios, there is no need to consider too much about the overall shape design of the signal acquisition device 21 and the location of the arrangement on the back of the umbrella sheet 14. The impact on the balance of the umbrella sheet 14 is very low and can be ignored. Therefore, in this case, the shape of the acquisition device housing 211 can be a common small square box design, which can be installed at any position on the back of the umbrella sheet 14 (such as Figure 1-3 shown).

[0039] For applications with relatively high rotation speeds, the overall shape design of the signal acquisition device 21 and its location on the back side of the parasol 14 need to be considered to minimize or even eliminate the impact on the balance of the parasol 14.

[0040] like Figure 4 As shown, the collecting device housing 211 is designed to be annular, and the hollow portion inside the ring is larger than the portion where the back side of the parasol 14 is connected to the rotating shaft 13 . The mounting feet 212 are distributed around the bottom surface of the acquisition device shell 211 (for example, four mounting feet 212, three mounting feet 212, six mounting feet 212, etc., and this embodiment takes four mounting feet 212 as an example), and each mounting foot 212 has a curvature that matches the back side of the umbrella leaf 14 (generally speaking, the curvature difference of the part where the umbrella leaf 14 of different specifications is connected to the rotating shaft 13 on the back side of the umbrella leaf 14 is very small and basically applicable. Of course, the mounting feet 212 can also be made of a slightly elastic metal material to adapt to the small range of curvature differences existing in umbrella leaves 14 of different specifications). A mounting groove is provided in the mounting foot 212 for fixing the mounting foot 212 on the back side of the umbrella leaf 14 (for example, by means of bolts, nailed into different positions of the mounting groove and fixed to the back side of the umbrella leaf 14, and of course screw holes need to be opened on the back side of the umbrella leaf 14) to fix the signal acquisition device 21.

[0041] like Figure 5As shown, the integrated circuit board 213 integrates a sampling and analysis module 2131, a data storage module 2132, a wireless communication module 2133, and a power supply module 2134. The signal transmission device 22 includes a signal transceiver module 221 and a signal interface module 222. The signal transceiver module 221 and the signal interface module 222 penetrate the vacuum chamber 11 (to avoid affecting operation, the side walls of this chamber are usually not the first side wall 111 and the second side wall 112, but other side walls other than the first side wall 111 and the second side wall 112, preferably at the same height as the installation position of the signal acquisition device 21) to maintain a communication connection and keep the vacuum chamber 11 sealed. The signal transceiver module 221 maintains a wireless communication connection with the signal acquisition device 21, and the signal interface module 222 is used for communication connection with the external host 30.

[0042] Then, the sampling and analysis module 2131 is communicatively connected with each Faraday ion receiver to receive the sampling signal collected by the Faraday ion receiver in real time, the data storage module 2132 stores the received sampling signal (which can be used to obtain the corresponding stored data afterwards when a transmission failure occurs), the wireless communication module 2133 is wirelessly connected with the signal transceiver module 221 of the signal transmission device 22 to wirelessly transmit the sampling signal to the signal transceiver module 221, and the power supply module 2134 supplies power to the sampling and analysis module 2131, the data storage module 2132, the wireless communication module 2133 and each Faraday ion receiver.

[0043] The signal transceiver module 221 receives the sampling signal sent by the signal acquisition device 21 (including the wireless communication module 2133) via wireless communication and transmits it to the signal interface module 222. The signal interface module 222 is used to forward the sampling signal to the external host 30 to achieve real-time dynamic ion beam distribution measurement. The external host 30 is responsible for displaying, operating, and forwarding relevant data for data analysis and processing.

[0044] Exemplarily, the signal interface module 222 can be a line interface (transmitting relevant data to the external host 30 via a wired manner) or a wireless communication module 2133 (transmitting relevant data to the external host 30 via a wireless manner). The signal interface module 222 and the signal transceiver module 221 can be connected via a vacuum flange harness to overcome the vacuum barrier, ensuring that data is transmitted from the vacuum side (inside the vacuum chamber 11) to the atmosphere side (outside the vacuum chamber 11) while ensuring the sealing of the vacuum chamber 11. Alternatively, the signal interface module 222 and the signal transceiver module 221 can also be connected via a vacuum conductive flange to transmit the sampling signal from the signal transceiver module 221 inside the vacuum chamber 11 to the signal interface module 222 outside the vacuum chamber 11.

[0045] Due to the high-speed rotation of the umbrella piece 14 in the vacuum system, the signal acquisition device 21 installed on the back side of the umbrella piece 14 also rotates. The wireless communication module 2133 integrated in the integrated circuit board 213 therein also rotates at high speed. In order to wirelessly transmit the sampling signal to the signal transceiver module 221 fixedly installed on the inner wall of the vacuum chamber 11, the transmission quality needs to be guaranteed.

[0046] Accordingly, a positioning signal transmission module can be integrated into the integrated circuit board 213, and the signal transceiver module 221 can be designed to include a wireless signal transceiver unit and a positioning signal receiving unit. The positioning signal transmission module transmits positioning signals, while the positioning signal receiving unit receives positioning signals. The positioning signal transmission module rotates with the parasol 14, and the positioning signal receiving unit receives a positioning signal once per rotation. Of course, the integrated circuit board 213 also integrates a main control module for controlling the operation of each module, which will not be described in detail here.

[0047] Specifically, a housing with a strip-shaped window can be placed over the outer layer of the positioning signal receiving unit, with the strip-shaped window facing the installation position of the positioning signal transmitting module. The positioning signal receiving unit and the positioning signal transmitting module are installed at the same height. Then, the positioning signal receiving unit can receive a positioning signal every time the positioning signal transmitting module rotates one circle with the umbrella piece 14. Based on this positioning signal, combined with the rotation speed of the umbrella piece 14, the real-time rotation status of the umbrella piece 14 can be determined. Each time the positioning signal transmitting module (and the wireless communication module 2133) rotates past the signal transceiver module 221 (positioning signal receiving unit and wireless signal transceiver unit), the transmission timing and frequency of the wireless communication can be adjusted, which is conducive to improving the quality of wireless transmission.

[0048] Of course, in addition to this positioning solution, an encoder can also be designed and installed to perform more precise rotational positioning, which is not limited here.

[0049] In the dynamic ion beam distribution measurement system in the vacuum system of this embodiment, a signal acquisition device 21 is mounted on the back side of the umbrella piece 14, communicating with each Faraday ion receiver and receiving sampling signals collected in real time by the Faraday ion receiver. A signal transmission device 22 is designed, comprising a signal transceiver module 221 and a signal interface module 222. The signal transceiver module 221 and the signal interface module 222 penetrate the vacuum chamber 11 to maintain communication connection and maintain the vacuum chamber 11 sealed. The signal interface module 222 is used to communicate with an external host 30. The signal transceiver module 221 maintains a wireless communication connection with the signal acquisition device 21, thereby receiving sampling signals sent by the signal acquisition device 21 and transmitting them to the signal interface module 222. The signal interface module 222 is used to forward the sampling signals to the external host 30. This method allows the signal acquisition device 21 to rotate with the rotation of the umbrella piece 14, thereby achieving dynamic measurement of the ion beam distribution. The designed signal transmission device 22 includes a signal transceiver module 221 installed inside the vacuum chamber 11 and a signal interface module 222 installed outside the vacuum chamber 11. The two modules penetrate the vacuum chamber 11 and maintain the communication and sealing of the vacuum chamber 11, thereby completing the separation of signal transmission inside the vacuum chamber 11 and signal transmission across the vacuum chamber 11 after signal acquisition: inside the vacuum chamber 11, the sampling signal is dynamically collected by the signal acquisition device 21 (connected Faraday ion receiver) on the umbrella piece 14, and is transmitted to the signal transceiver module 221 inside the vacuum chamber 11 through wireless communication, thereby realizing the transmission of the sampling signal within the vacuum chamber 11; then, through the wired connection between the signal transceiver module 221 inside the vacuum chamber 11 and the signal interface module 222 outside the vacuum chamber 11 (realized by penetrating the vacuum chamber 11 and combining the vacuum flange type wiring harness), the sampling signal is transmitted from the vacuum side to the atmosphere side, and further transmitted to the external host 30, thereby realizing real-time and dynamic ion beam distribution measurement.

[0050] For applications where the slats 14 rotate at low speeds (e.g., below 60 rpm), the signal acquisition device 21 mounted on the back side of the slats 14 does not require a specific mounting position due to the low rotational speed. This does not affect the balance of the slats 14's rotation and causes little damage to the slats 14 or the vacuum system. However, for applications where the slats 14 rotate at relatively high speeds (e.g., above 60 rpm, or even above 300 rpm), the design and mounting position of the signal acquisition device 21 on the back side of the slats 14 need to be considered. Therefore, an annular acquisition device housing 211 is designed. The hollow portion within the ring is larger than the portion of the slats 14's back side connected to the rotating shaft 13. This allows the annular acquisition device housing 211 to be mounted on the back side of the slats 14, centered at the connection to the rotating shaft. This more evenly distributes the mass of the signal acquisition device 21 and mitigates the impact of the signal acquisition device 21 on the slats 14 as they rotate with the slats 14. In addition, the mounting feet 212 are designed to be distributed around the bottom surface of the collection device shell 211, and each mounting foot 212 has a curvature that matches the back side of the umbrella piece 14. A mounting groove is provided in the mounting foot 212, which is used to fix the mounting foot 212 on the back side of the umbrella piece 14 to fix the signal collection device 21. This not only allows the signal collection device 21 to be more stably installed on the back side of the umbrella piece 14, but also allows the specific fixed position to be adjusted according to the different specifications of the umbrella piece 14 through the mounting groove in the mounting foot 212, thereby better adapting to umbrella pieces 14 of different specifications, and has greater prospects for the transformation of existing equipment.

[0051] Based on the above introduction to the dynamic ion beam distribution measurement system in a vacuum system, this embodiment further provides a dynamic ion beam distribution measurement method in a vacuum system. Figure 6 , Figure 6 This is a flow chart of a method for measuring dynamic ion beam distribution in a vacuum system, including step S1, step S2, step S3, step S4, and step S5.

[0052] Step S1: Determine a measurement point from a plurality of Faraday cages 15 arranged on the back side of the parasol 14, install a Faraday ion receiver in the Faraday cage 15 corresponding to each point, and connect the signal acquisition device 21 to each Faraday ion receiver for communication.

[0053] Step S2 : connecting the external host 30 to the signal interface module 222 .

[0054] Step S3: Start the vacuum system and make the vacuum system reach the set vacuum degree.

[0055] Step S4: Start the ion generator to generate an ion beam, and adjust the parameters of the ion beam and the rotation speed of the umbrella piece 14 to meet the measurement requirements.

[0056] Step S5: The sampling signal is collected in real time through a Faraday ion receiver, and the sampling signal is wirelessly transmitted to the signal transceiver module 221 through the signal acquisition device 21. After the signal transceiver module 221 transmits the sampling signal to the signal interface module 222, the sampling signal is transmitted to the external host 30 through the signal interface module 222 to realize real-time dynamic ion beam distribution measurement.

[0057] Steps S1 and S2 are preliminary preparations. Based on the measurement requirements, measurement points are determined from the multiple Faraday cages 15 arranged on the backside of the parapet 14. A Faraday ion receiver is installed in the Faraday cage 15 corresponding to each point, and the signal acquisition device 21 is communicatively connected to each Faraday ion receiver. Furthermore, the external host 30 is connected to the signal interface module 222. Steps S3 and S4 are the operational procedures, which involve activating the vacuum system to achieve a set vacuum level. Furthermore, the ion generator is activated to generate an ion beam, and the ion beam parameters (such as beam current, ion emission energy, etc.) and the rotational speed of the parapet 14 are adjusted to meet the measurement requirements. Step S5 is the signal acquisition and transmission process within the dynamic ion beam distribution measurement system within the vacuum system, enabling real-time dynamic measurement of the ion beam distribution.

[0058] In order to improve the signal transmission quality, in this embodiment, the signal acquisition device 21 of the dynamic ion beam distribution measurement system includes an acquisition device shell 211, a mounting foot 212, and an integrated circuit board 213. The integrated circuit board 213 integrates a sampling and analysis module 2131, a data storage module 2132, a wireless communication module 2133, a power supply module 2134 and a positioning signal sending module. On the basis that the signal transceiver module 221 includes a wireless signal transceiver unit and a positioning signal receiving unit, a suitable wireless transmission scheme can be determined before the sampling signal is collected in real time through a Faraday ion receiver to improve the transmission quality of the sampling signal dynamically collected in the vacuum system.

[0059] Specifically, the positioning signal transmitting module can transmit a positioning signal. After receiving the positioning signal, the positioning signal receiving unit records the positioning signal reception data. The positioning signal transmitting module rotates with the parasol 14, and the positioning signal receiving unit receives a positioning signal once per rotation. The external host 30 can then receive the transmitted positioning signal reception data. Based on the positioning signal reception data and the rotational speed (presumably set) of the parasol 14, the external host 30 can determine the transmission timing and frequency of the sampling signal. This allows the wireless communication module 2133 integrated on the integrated circuit board 213 within the signal acquisition device 21 to transmit the sampling signal, collected in real time by the Faraday ion receiver, to the signal transceiver module 221 according to the transmission timing and frequency.

[0060] For example, based on the positioning signal reception data and the rotational speed of the parasol 14, we can analyze and predict the time point when the distance between the positioning signal receiving unit and the positioning signal transmitting module is closest. Furthermore, based on the location of the wireless communication module 2133 in the signal acquisition device 21 (relative to the angle between the positioning signal transmitting modules), we can determine the time point when the distance between the wireless communication module 2133 in the signal acquisition device 21 and the wireless signal transceiver unit in the signal transceiver module 221 is closest. Data transmission is prioritized at these time points (i.e., transmission opportunities) (the start and end times of the communication window can be pre-set), thereby minimizing signal attenuation and maximizing transmission quality. Furthermore, the transmission frequency can be adaptively adjusted. For example, within the communication window, a fixed, higher frequency can be used for data transmission to ensure continuous and stable data transmission. Outside the communication window, the frequency can be dynamically adjusted as needed to mitigate potential interference: when the distance between the two is close, a higher frequency is used for transmission to take advantage of better channel conditions; as the distance increases, the frequency can be reduced to maintain communication stability.

[0061] This is just an example. The quality of wireless transmission can be improved by receiving data through positioning signals and the rotation speed of the umbrella piece 14. The specific algorithm design is not described in detail in this embodiment because a specific transmission scheme (such as transmission timing, transmission frequency, transmission power, etc.) needs to be designed according to the actual measurement scenario. Because different vacuum levels, ion beam parameters, and the rotation speed of the umbrella piece 14 all need to be specifically considered, the example introduction here should not be regarded as a restriction or limitation on this application.

[0062] Therefore, a group of mutually cooperating positioning devices are arranged on the umbrella piece 14 and the side wall of the vacuum chamber 11. One part is a positioning signal sending module, which is integrated on the integrated circuit board 213 of the signal acquisition device 21. It can emit positioning signals outward and can also rotate periodically with the rotation of the umbrella piece 14; the other part is a positioning signal receiving unit of the signal transceiver module 221, which is fixedly arranged on the side wall of the vacuum chamber 11 and can periodically receive the positioning signal emitted outward by the positioning signal sending module (the positioning signal receiving unit receives a positioning signal once per rotation). Therefore, according to the reception of the positioning signal, the rotation position of the umbrella piece 14 is judged, thereby determining the position of the umbrella piece 14 in the signal acquisition device 21. The position of the wireless communication module 2133 (located in the annular signal acquisition device 21 and relatively fixed to the position of the positioning signal sending module) is determined so that the external host 30 can determine the transmission timing and transmission frequency of the sampling signal based on the positioning signal reception data and the rotation speed of the umbrella piece 14, so that the wireless communication module 2133 integrated on the integrated circuit board 213 in the signal acquisition device 21 can transmit the sampling signal collected in real time by the Faraday ion receiver to the signal transceiver module 221 according to the transmission timing and transmission frequency. In this way, the transmission quality problem that may be caused by the wireless communication module 2133 transmitting data (sampling signal) to the wireless signal transceiver unit in a fixed position when rotating at high speed can be weakened as much as possible, thereby improving the transmission quality.

[0063] It should be noted that the dynamic ion beam distribution measurement system and measurement method in the vacuum system provided in this embodiment are currently mainly used in dynamic measurement scenarios such as rotation measurement in a vacuum system. When the application scenarios of ion radio frequency technology are more extensive in the future (for example, new dynamic measurement scenarios are generated, such as mobile measurement in a vacuum system, or other dynamic forms of motion measurement scenarios), this solution can still be applied. In addition, the dynamic ion beam distribution measurement system and measurement method provided in the vacuum system of this embodiment can be applied not only to a series of application scenarios given in this embodiment, but also to other application scenarios.

[0064] In summary, the present invention provides a dynamic ion beam distribution measurement system and method in a vacuum system. A signal acquisition device 21 is mounted on the back side of the umbrella 14 and is communicatively connected to each Faraday ion receiver to receive sampling signals collected in real time by the Faraday ion receiver. A signal transmission device 22 is designed, comprising a signal transceiver module 221 and a signal interface module 222. The signal transceiver module 221 and the signal interface module 222 penetrate the vacuum chamber 11 to maintain communication connection and maintain the vacuum chamber 11 sealed. The signal interface module 222 is used to communicate with an external host 30. The signal transceiver module 221 maintains a wireless communication connection with the signal acquisition device 21 to receive sampling signals sent by the signal acquisition device 21 via wireless communication and transmit them to the signal interface module 222. The signal interface module 222 is used to forward the sampling signals to the external host 30. In this way, the signal acquisition device 21 can rotate with the rotation of the umbrella 14, thereby achieving dynamic measurement of the ion beam distribution. The designed signal transmission device 22 includes a signal transceiver module 221 installed inside the vacuum chamber 11 and a signal interface module 222 installed outside the vacuum chamber 11. The two modules penetrate the vacuum chamber 11 and maintain the communication and sealing of the vacuum chamber 11, thereby completing the separation of signal transmission inside the vacuum chamber 11 and signal transmission across the vacuum chamber 11 after signal acquisition: inside the vacuum chamber 11, the sampling signal is dynamically collected by the signal acquisition device 21 (connected Faraday ion receiver) on the umbrella piece 14, and is transmitted to the signal transceiver module 221 inside the vacuum chamber 11 through wireless communication, thereby realizing the transmission of the sampling signal within the vacuum chamber 11; then, through the wired connection between the signal transceiver module 221 inside the vacuum chamber 11 and the signal interface module 222 outside the vacuum chamber 11 (realized by penetrating the vacuum chamber 11 and combining the vacuum flange type wiring harness), the sampling signal is transmitted from the vacuum side to the atmosphere side, and further transmitted to the external host 30, thereby realizing real-time and dynamic ion beam distribution measurement.

[0065] In this document, relational terms such as first and second, etc. are used merely to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any actual relationship or order between these entities or operations.

[0066] The above description is merely an embodiment of the present application and is not intended to limit the scope of protection of the present application. For those skilled in the art, various modifications and variations of the present application are possible. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A dynamic ion beam distribution measurement system in a vacuum system, characterized in that: The vacuum system includes a vacuum chamber, the emission end of the ion generator penetrates and is sealed on the first side wall of the vacuum chamber, a rotating shaft is provided on the second side wall of the vacuum chamber, the back side of the umbrella piece is transmission-connected with the rotating shaft, the front side of the umbrella piece faces the emission end of the ion generator, and a plurality of Faraday cages are arranged on the back side of the umbrella piece. The dynamic ion beam distribution measurement system includes: A number of Faraday ion receivers installed in any Faraday cage; A signal acquisition device is installed on the back side of the parachute, is connected to each Faraday ion receiver in communication, and is used to receive the sampling signal collected by the Faraday ion receiver in real time; The signal transmission device includes a signal transceiver module and a signal interface module. The signal transceiver module and the signal interface module penetrate the vacuum chamber to maintain communication connection and maintain the sealing of the vacuum chamber. The signal interface module is used for communication connection with an external host. The signal transceiver module maintains a wireless communication connection with a signal acquisition device and is used to receive a sampling signal sent by the signal acquisition device through wireless communication and transmit it to the signal interface module. The signal interface module is used to forward the sampling signal to the external host to realize real-time dynamic ion beam distribution measurement.

2. The dynamic ion beam distribution measurement system in a vacuum system according to claim 1, characterized in that: The signal acquisition device includes an acquisition device housing, a mounting foot, and an integrated circuit board. The collection device housing has an internal cavity; The mounting feet are arranged at the bottom of the collection device housing; The integrated circuit board is arranged in the internal cavity of the collection device shell, and integrates a sampling and analysis module, a data storage module, a wireless communication module and a power supply module, wherein the sampling and analysis module is communicatively connected with each Faraday ion receiver to receive the sampling signal collected by the Faraday ion receiver in real time, the data storage module stores the received sampling signal, the wireless communication module is wirelessly connected with the signal transceiver module of the signal transmission device to wirelessly transmit the sampling signal to the signal transceiver module, and the power supply module supplies power to the sampling and analysis module, the data storage module, the wireless communication module and each Faraday ion receiver.

3. The dynamic ion beam distribution measurement system in a vacuum system according to claim 2, characterized in that: The shell of the collecting device is annular, and the hollow part inside the ring is larger than the part where the back side of the umbrella piece is connected to the rotating shaft.

4. The dynamic ion beam distribution measurement system in a vacuum system according to claim 3, characterized in that: The mounting feet are distributed around the bottom surface of the acquisition device shell, and each mounting foot has an arc that matches the back side of the umbrella piece. A mounting groove is provided in the mounting foot for fixing the mounting foot on the back side of the umbrella piece to fix the signal acquisition device.

5. The dynamic ion beam distribution measurement system in a vacuum system according to claim 3, characterized in that: A positioning signal sending module is also integrated on the integrated circuit board. The signal transceiver module includes a wireless signal transceiver unit and a positioning signal receiving unit. The positioning signal sending module transmits a positioning signal outwardly, and the positioning signal receiving unit is used to receive the positioning signal. The positioning signal sending module rotates with the umbrella piece, and the positioning signal receiving unit receives a positioning signal once every rotation.

6. The dynamic ion beam distribution measurement system in a vacuum system according to claim 2, characterized in that: The shell of the collecting device is installed at any position on the back side of the umbrella piece through the installation feet.

7. The dynamic ion beam distribution measurement system in a vacuum system according to claim 1, characterized in that: The signal interface module is a line interface or a wireless communication module.

8. The dynamic ion beam distribution measurement system in a vacuum system according to claim 7, characterized in that: The signal interface module is connected to the signal transceiver module through a vacuum flange type wiring harness or a vacuum conductive flange.

9. A method for measuring dynamic ion beam distribution in a vacuum system, characterized in that: A dynamic ion beam distribution measurement system applied to the vacuum system of claim 1, the method comprising: Determine the measurement point from multiple Faraday cups arranged on the back side of the parachute, install a Faraday ion receiver in the Faraday cup corresponding to each point, and connect the signal acquisition device to each Faraday ion receiver for communication; Connect the external host to the signal interface module; Start the vacuum system and make it reach the set vacuum degree; Start the ion generator to generate an ion beam, and adjust the parameters of the ion beam and the rotation speed of the umbrella to meet the measurement requirements; The sampling signal is collected in real time by a Faraday ion receiver, and the sampling signal is wirelessly transmitted to the signal transceiver module through the signal acquisition device. After the signal transceiver module transmits the sampling signal to the signal interface module, the sampling signal is transmitted to the external host through the signal interface module to realize real-time dynamic ion beam distribution measurement.

10. The method for measuring dynamic ion beam distribution in a vacuum system according to claim 9, characterized in that: The signal acquisition device includes an acquisition device housing, a mounting foot, and an integrated circuit board, wherein the integrated circuit board integrates a sampling and analysis module, a data storage module, a wireless communication module, a power supply module, and a positioning signal sending module, and when the signal transceiver module includes a wireless signal transceiver unit and a positioning signal receiving unit, before the sampling signal is collected in real time by a Faraday ion receiver, the method further includes: The positioning signal is transmitted outwardly through the positioning signal sending module, and after the positioning signal receiving unit receives the positioning signal, the positioning signal receiving data is recorded, wherein the positioning signal sending module rotates with the parasol piece, and the positioning signal receiving unit can receive a positioning signal once for each rotation; The external host determines the transmission timing and frequency of the sampling signal based on the positioning signal receiving data and the rotation speed of the parachute, so that the wireless communication module integrated on the integrated circuit board in the signal acquisition device transmits the sampling signal collected in real time by the Faraday ion receiver to the signal transceiver module according to the transmission timing and transmission frequency.

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