Detection system for scanning probe microscope and method for operating scanning probe microscope

Abstract

The invention provides a detection system for a scanning probe microscope, which comprises a light source, a probe, a detector and a light guide mechanism, and is characterized in that primary detection light and secondary detection light comprise sections propagating along three translation axes respectively, so that the detection light can always irradiate the same position of the probe when the probe translates, and the position of the detector irradiated by the detection light is kept unchanged; therefore, the translation of the probe does not affect the detection of the detected object by the probe. The invention also provides an operation method of the scanning probe microscope, which comprises the following steps: before starting detection, when the primary detection light is adjusted to a corresponding position on the cantilever of the probe and can be irradiated, the corresponding secondary detection light is also adjusted; when the device is used, the corresponding optical deflection element and the focusing lens are moved according to the translation requirement of the probe so as to ensure that the detected object can be synchronously detected when the probe translates, or the position of the detection light irradiated on the probe is kept unchanged when the probe translates.

Description

Technical Field

[0001] The present invention belongs to the technical field of scanning probes, and in particular relates to a detection system for a scanning probe microscope and an operating method of the scanning probe microscope. Background Art

[0002] Scanning Probe Microscope (SPM) measures the surface shape of a sample by bringing a probe close to or in contact with the sample surface. It has a wide range of applications, including the surface structure, physical properties, chemical reactions, nano-processing, and information storage of conductors, semiconductors, insulators, biological, organic, and nano materials. Most existing scanning probe microscopes use a so-called optical lever method to detect the object being measured. Specifically, the optical lever method mainly detects the position and / or posture of the probe by irradiating the laser on the cantilever of the probe and detecting the position change of the laser reflected by the probe through a detector, thereby obtaining the position of the probe tip and / or the interaction force between the tip and the object being measured.

[0003] In order to achieve translation between the probe and the object under test, it is usually necessary to drive at least one of the probe or the object under test to move. Usually, since it is difficult for the optical path to translate along with the probe, the relative translation between the probe and the object under test is generally achieved by moving the object under test.

[0004] The above information disclosed in this Background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is already known to a person of ordinary skill in the art. Summary of the invention

[0005] In order to achieve relative translation between the probe and the object to be measured, the present invention provides a solution that is different from the existing solution for moving the object to be measured, namely, by making the optical element translate synchronously with the probe, and keeping the position of the laser reflected by the probe on the detector unchanged during the translation, so as to achieve relative translation between the probe and the object to be measured without interfering with the detection of the object to be measured.

[0006] The present invention first provides a detection system for a scanning probe microscope, characterized in that it comprises: a light source capable of emitting primary detection light; A probe, wherein the probe is configured to be capable of translation along three translation axes forming a spatial angle; a detector capable of outputting a corresponding signal according to the position of the light impinging thereon; a light guide mechanism configured to guide the primary detection light to the cantilever of the probe, and to guide the secondary detection light formed by the cantilever reflecting the primary detection light from the cantilever to the detector; Wherein, the light guide mechanism includes at least two optical deflection elements and a focusing lens, the focus of the focusing lens is located on the cantilever, the primary detection light is incident on the focusing lens along a direction parallel to the optical axis of the focusing lens, and the light guide mechanism is constructed so that the primary detection light incident on the two optical deflection elements and the focusing lens can propagate along the three translation axes respectively, and the optical deflection element and the focusing lens are arranged in a form that can move synchronously with the probe along the corresponding translation axis.

[0007] According to one embodiment of the present invention, the light guide mechanism further includes a beam splitter, the primary detection light propagates toward the optical deflection element through the beam splitter, and the secondary detection light propagates toward the detector through the beam splitter.

[0008] According to one embodiment of the present invention, the translation axis includes a first translation axis, a second translation axis, and a third translation axis, and the optical deflection element includes a first optical deflection element and a second optical deflection element; the primary detection light is incident on the first optical deflection element along the first translation axis, is reflected by the first optical deflection element, and then is incident on the second optical deflection element along the second translation axis, and is reflected by the second optical deflection element and then is incident on the focusing lens along the third translation axis.

[0009] According to one embodiment of the present invention, the three translation axes are perpendicular to each other.

[0010] According to one embodiment of the present invention, the optical deflection element and the focusing lens disposed in the corresponding optical paths on both sides of the primary detection light propagating along the translation axis move synchronously with the probe along the corresponding translation axis.

[0011] According to one embodiment of the present invention, the detection system also includes an observation mechanism, which includes an observation light source and an image sensor. The observation light emitted by the observation light source is irradiated to the cantilever via the light guide mechanism, and the observation light reflected by the cantilever is irradiated to the image sensor via the light guide mechanism.

[0012] According to one embodiment of the present invention, the observation light propagates along at least one of the translation axes.

[0013] The present invention also provides a detection system for a scanning probe microscope, characterized in that it comprises: a light source, a probe, a light guide mechanism, and a detector, wherein the probe is constructed to be able to translate along a first translation axis, a second translation axis, and a third translation axis that form a spatial angle with each other; the light guide mechanism is constructed to be able to guide the primary detection light emitted by the light source to the cantilever of the probe, and to guide the secondary detection light formed by the cantilever reflecting the primary detection light to the detector; the detector can output a corresponding signal according to the position of the light irradiated thereon; The light guide mechanism includes a first optical deflection element, a second optical deflection element, and a focusing lens. The light guide mechanism is constructed in a form in which the primary detection light is incident on the first optical deflection element along the first translation axis. The first optical deflection element, the second optical deflection element, and the focusing lens can be translated along the first translation axis synchronously with the probe; the first optical deflection element and the second optical deflection element are arranged along the second translation axis, and the second optical deflection element and the focusing lens can be translated along the first translation axis and the second translation axis synchronously with the probe; the focusing lens and the second optical deflection element are arranged along the third translation axis, the focus of the focusing lens is located on the cantilever of the probe, the optical axis of the focusing lens is parallel to the third translation axis, and the focusing lens can be translated along the first translation axis, the second translation axis, and the third translation axis synchronously with the probe.

[0014] According to one embodiment of the present invention, the light guiding mechanism further includes a beam splitter, which is arranged along a first translation axis with the first optical deflection element, and the beam splitter is constructed in a form capable of directing the primary detection light to the first optical deflection element and directing the secondary detection light to the detector.

[0015] According to one embodiment of the present invention, the three translation axes are perpendicular to each other.

[0016] According to one embodiment of the present invention, the detection system also includes an observation mechanism, which includes an observation light source and an image sensor. The observation light emitted by the observation light source is irradiated to the cantilever via the light guide mechanism, and the observation light reflected by the cantilever is irradiated to the image sensor via the light guide mechanism.

[0017] According to one embodiment of the present invention, the observation light propagates along at least one of the translation axes.

[0018] The present invention also provides a method for operating a scanning probe microscope, comprising the detection system as described above, characterized in that: the light source emits primary detection light, the light guide mechanism is adjusted so that the primary detection light is irradiated on the cantilever, the secondary detection light is received by the detector and a corresponding signal is output; along at least one of the translation axes, the optical deflection element, at least one of the focusing lenses and the probe are synchronously moved to keep the position where the primary detection light irradiates the cantilever unchanged.

[0019] According to one embodiment of the present invention, the scanning probe microscope operating method further includes adjusting the position of the detector so that the secondary detection light is irradiated near the center of the detector.

[0020] The detection system provided by the present invention has at least the following beneficial effects: by making the primary detection light and the secondary detection light include segments propagating along three translation axes respectively, when the probe is translated, the light guide mechanism can translate the corresponding optical elements therein together with the probe, so that the detection light can always be irradiated on the same position of the probe, and at the same time, the irradiation position of the detection light irradiated to the detector through the light guide mechanism remains unchanged, so that the translation of the probe does not affect the detection of the object to be measured by the probe, thereby meeting the needs of the scanning probe microscope to scan and detect the object to be measured; the optical path of the detection light can be synchronously adjusted when the probe moves, so that there is no need to align and adjust the optical path again before and after the probe moves, which is convenient for the use of the scanning probe microscope.

[0021] The operating method provided by the present invention has at least the following beneficial effects: in this way, before starting the detection, when the primary detection light is adjusted to a corresponding position on the cantilever of the probe that can be irradiated, the corresponding secondary detection light is also adjusted, so that the optical path of the detection light can be conveniently adjusted, and the optical path adjustment state of the detection light can be determined conveniently; when in use, according to the requirements of the translation of the probe, the corresponding optical deflection element and focusing lens are moved to ensure that the object to be measured can be detected synchronously when the probe is translated, or the position of the detection light irradiated on the probe is kept unchanged when the probe is translated. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of an implementation scheme of a detection system for a scanning probe microscope.

[0023] Figure 2 A view along one translation axis of one embodiment of a detection system for a scanning probe microscope.

[0024] Figure 3 A view along one translation axis of one embodiment of a detection system for a scanning probe microscope.

[0025] Figure 4A view along one translation axis of one embodiment of a detection system for a scanning probe microscope.

[0026] Figure 5 A view along one translation axis of one embodiment of a detection system for a scanning probe microscope.

[0027] Figure 6 A view along one translation axis of one embodiment of a detection system for a scanning probe microscope.

[0028] Figure 7 A view along one translation axis of one embodiment of a detection system for a scanning probe microscope.

[0029] Figure 8 It is a schematic diagram of the overall structure of an implementation scheme of a detection system for a scanning probe microscope.

[0030] Fig. 9 It is a schematic diagram of the overall structure of an implementation scheme of a detection system for a scanning probe microscope. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. It should be noted that the drawings are all in a very simplified form and use inaccurate ratios, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0032] The present invention first provides a detection system for a scanning probe microscope, comprising a light source 1, a probe 7, a detector 6, and a light guide mechanism.

[0033] The translation of the probe 7 mainly refers to the movement of the probe 7 when the angle of the probe 7 is fixed unchanged, and the moving path and direction of the probe 7 are not restricted; in addition, the translation referred to here does not involve the description of the vibration state of the probe 7, that is, when the probe 7 translates, the probe 7 may be in a vibrating state or not.

[0034] The light source 1 is used to emit detection light to form an optical lever and to detect the object to be detected. For the sake of convenience, the detection light irradiated before the probe 7 is called primary detection light, and the detection light reflected by the cantilever of the probe 7 is called secondary detection light; accordingly, the ability of the light source 1 to emit primary detection light is the same as the ability of the light source 1 to emit detection light.

[0035] The probe 7 is configured to be able to translate along three translation axes that form a spatial angle. It should be noted that the three translation axes can be either spatially orthogonal or in other spatial angles, and the specific configuration can be adjusted according to the specific translation requirements of the probe 7. It can be understood that the translation axis can be either an axis defined by an actual moving mechanism or a virtual axis simulated in the direction in which the probe 7 can translate.

[0036] The detector 6 can output a corresponding signal according to the position of the light irradiated thereon. Specifically, the detector 6 can be a position sensitive detector, and when the light irradiates different positions on the detector 6, the detector 6 outputs different signals.

[0037] The light guide mechanism is constructed to guide the primary detection light to the cantilever of the probe 7, and guide the secondary detection light formed by the cantilever reflecting the primary detection light from the cantilever to the detector 6. In the process of the detection light propagating from the light source 1 to the detector 6, by utilizing the characteristics of the cantilever of the probe 7 reflecting the detection light, when the probe 7 vibrates, the position of the detection light reflected by the cantilever of the probe 7 will also change, and the propagation characteristics of light will be used to amplify the change, so as to convert the slight angle change of the cantilever of the probe 7 into a change in the position or direction of the detection light that is easily detected, thereby causing the position of the detection light irradiated on the detector 6 to change. By acquiring the signal of the detector 6, the corresponding angle change of the probe 7 can be obtained, and the vibration state of the probe 7 can be detected; further, by analyzing the vibration state of the probe 7, the relationship between the force between the probe 7 and the object to be measured can be calculated, and the object to be measured can be detected in combination with the position of the probe 7.

[0038] The light guide mechanism comprises at least two optical deflection elements 3, 4 and a focusing lens 5, so that the detection light is divided into a plurality of segments by the optical deflection elements 3, 4 and the focusing lens 5, thereby facilitating the adjustment of the positions of the optical elements in the light guide mechanism.

[0039] The focus of the focusing lens 5 is located at the cantilever of the probe 7, and the primary detection light is incident on the focusing lens 5 along a direction parallel to the optical axis of the focusing lens 5, so that the direction of the primary detection light L14 incident on the focusing lens 5 and the direction of the secondary detection light L22 out of the focusing lens 5 are parallel. Figure 2 , 46 shows an implementation method in which the primary detection light L14 and L14' are incident on the focusing lens 5 along different paths. It can be seen that since the cantilever of the probe 7 capable of reflecting the detection light is located at the focus of the focusing lens 5, the primary detection light L14 and L14' incident on the focusing lens 5 in a direction parallel to the optical axis of the focusing lens 5 can both irradiate the cantilever of the probe 7; the primary detection light L15 and L15' deflected by the focusing lens 5, after being reflected by the cantilever of the probe 7, forms a self-focusing lens 5, after the secondary detection lights L21 and L21' are deflected by the focusing lens 5, secondary detection lights L22 and L22' parallel to the optical axis of the focusing lens 5 are formed; the primary detection lights L14 and L14', and the secondary detection lights L22 and L22' are all parallel to the optical axis of the focusing lens 5 and parallel to each other; further, it can be inferred from the above records that the primary detection lights L13 and L13', and the secondary detection lights L23 and L23' are parallel to each other.

[0040] The optical waveguide mechanism is constructed in a manner that enables the primary detection light incident on the two optical deflection elements 3, 4 and the focusing lens 5 to propagate along the three translation axes respectively. At the same time, the optical deflection elements 3, 4 and the focusing lens 5 are arranged in a manner that allows them to move synchronously with the probe 7 along the corresponding translation axes, so that the corresponding optical elements can move along the corresponding translation axes without affecting the optical path.

[0041] Figures 1 to 9 Various embodiments of the detection system are shown. Figures 1 to 3The embodiment shown illustrates the specific principle of the aforementioned light guide mechanism. The optical deflection element includes a first optical deflection element 3 and a second optical deflection element 4. The primary detection light passes through the first optical deflection element 3, the second optical deflection element 4, and the focusing lens 5 in sequence. The primary detection light is at least segmented into segments L12, L13, and L14 by the first optical deflection element 3, the second optical deflection element 4, and the focusing lens 5; the secondary detection light passes through the focusing lens 5, the second optical deflection element 4, and the first optical deflection element 3 in sequence. The secondary detection light is at least segmented into segments L21, L22, L23, and L24 by the focusing lens 5, the second optical deflection element 4, and the first optical deflection element 3. The L12 segment of the primary detection light is along the first translation axis X, the L13 segment is along the second translation axis Y, and the L14 segment is along the third translation axis Z. Since the directions of the primary detection light L14 incident on the focusing lens 5 and the secondary detection light L22 exiting the focusing lens 5 are parallel, and the optical elements passed by the primary detection light and the secondary detection light are the same, it can be known that the corresponding segments of the secondary detection light and the primary detection light are parallel to each other. Specifically, segment L12 of the primary detection light is parallel to segment L24 of the secondary detection light, segment L13 of the primary detection light is parallel to segment L23 of the secondary detection light, segment L14 of the primary detection light is parallel to segment L22 of the secondary detection light, and accordingly, segment L24 of the secondary detection light is along the first translation axis X, segment L23 is along the second translation axis Y, and segment L22 is along the third translation axis Z.

[0042] For the L12 segment of the primary detection light and the L24 segment of the secondary detection light, the change in the distance between the optical elements disposed at both ends of the L12 segment and the L24 segment along the corresponding first translation axis X will not cause the optical path of the primary detection light and the secondary detection light to change. Figure 3 , Figure 5 , Figure 7 The optical elements on which the primary detection light L12 is incident form a first translation group Gx. The first translation group Gx may include a first optical deflection element 3, a second optical deflection element 4, a focusing lens 5, and a probe 7. When the optical devices in the first translation group Gx move together with the probe 7 along the first translation axis X, the directions and positions of the primary detection light L12 and the secondary detection light L24 are not affected.

[0043] For the L13 segment of the primary detection light and the L23 segment of the secondary detection light, the change in the distance between the optical elements disposed at both ends of the L13 segment and the L23 segment along the corresponding second translation axis Y will not cause the optical path of the primary detection light and the secondary detection light to change. Figures 2 to 7The optical element on which the primary detection light L13 is incident forms a second translation group Gy. The second translation group Gy may include a second optical deflection element 4, a focusing lens 5, and a probe 7. When the optical devices in the second translation group Gy move together with the probe 7 along the second translation axis Y, the directions and positions of the primary detection light L13 and the secondary detection light L23 are not affected.

[0044] For the L14 segment of the primary detection light and the L22 segment of the secondary detection light, the change in the distance between the optical elements arranged at both ends of the L14 segment and the L22 segment along the corresponding third translation axis Z will not cause the optical path of the primary detection light and the secondary detection light to change. Figure 2 , Figure 4 , Figure 6 The optical element on which the primary detection light L14 is incident forms a third translation group Gz. The third translation group Gz may include a focusing lens 5 and a probe 7. When the optical devices in the third translation group Gz move together with the probe 7 along the third translation axis Z, the directions and positions of the primary detection light L14 and the secondary detection light L22 are not affected.

[0045] According to the foregoing content, the present invention provides a solution that allows the primary detection light to include segments propagating along three translation axes respectively, and allows the focus of the focusing lens 5 to be located at the cantilever of the probe 7 so that the secondary detection light also includes segments propagating along three translation axes respectively. When the probe is translated, the light guide mechanism can translate the corresponding optical elements therein together with the probe so that the detection light can always be irradiated on the same position of the probe 7, and at the same time, the irradiation position of the detection light irradiated to the detector 6 by the light guide mechanism remains unchanged, thereby achieving the effect that the translation of the probe 7 will not change the position of the light received by the detector 6, so that the translation of the probe 7 does not affect the detection of the object to be measured by the probe 7, thereby meeting the requirements of the scanning probe microscope for scanning and detecting the object to be measured. In addition, the optical path of the detection light can be synchronously adjusted when the probe 7 moves, so that the optical path does not need to be aligned and adjusted again before and after the probe 7 moves, which is convenient for the use of the scanning probe microscope.

[0046] It should be noted that the directions of the primary detection light and the secondary detection light of each segment are parallel, which refers to the optical path of the detection light when the detection light does not include the influence of the vibration and / or deformation of the probe 7. It can be understood that when the probe 7 vibrates and / or the probe 7 is used to detect the object to be measured, the secondary detection light may be affected by the vibration and / or deformation of the probe 7 and the optical path changes, which is then reflected as a change in the position of the secondary detection light irradiated on the detector 6; because the solution provided by the present invention has eliminated the optical path changes caused by the movement of the probe 7, the change in the position of the detection light irradiated on the detector 6 can reflect the vibration and / or deformation of the probe 7 itself, so as to be used for the detection of the object to be measured.

[0047] The optical deflection elements 3, 4 and focusing lens 5 arranged in the corresponding optical paths on both sides of the primary detection light propagating along the translation axis move synchronously with the probe along the corresponding translation axis. The three translation axes may include a first translation axis X, a second translation axis Y, and a third translation axis Z, and the optical deflection elements may include a first optical deflection element 3 and a second optical deflection element 4. Specifically, the optical deflection elements on one side of the primary detection light L12 along the first translation axis X are the first optical deflection element 3, the second optical deflection element 4, and the focusing lens 5, that is, the first optical deflection element 3, the second optical deflection element 4, and the focusing lens 5 can translate along the first translation axis X together with the probe 7; the optical deflection elements on one side of the primary detection light L13 along the second translation axis Y are the first optical deflection element 3, and the other side are the second optical deflection element 4 and the focusing lens 5, that is, the second optical deflection element 4 and the focusing lens 5 can It can translate together with the probe 7 along the first translation axis X and the second translation axis Y. For the first optical deflection element 3, it can translate along the first translation axis X; the optical deflection elements on one side of the primary detection light L14 along the third translation axis Z are the first optical deflection element 3 and the second optical deflection element 4, and the other side is the focusing lens 5. That is to say, the focusing lens 5 can translate together with the probe 7 along the three translation axes X, Y, and Z. The first optical deflection element 3 can translate along the first translation axis X, and the second optical deflection element 4 can translate along the first translation axis X and the second translation axis Y.

[0048] In some cases, the first translation axis X, the second translation axis Y, and the third translation axis Z may be perpendicular to each other, or at least one of the angles formed by the three translation axes X, Y, and Z may be a non-perpendicular angle. Figures 1 to 5 , Figure 8 , Fig. 9 , shows several implementations in which the first translation axis X, the second translation axis Y, and the third translation axis Z are perpendicular to each other. Among them, the primary detection light L12 is incident on the first optical deflection element 3 along the first translation axis X, the primary detection light L13 reflected by the first optical deflection element 3 is incident on the second optical deflection element 4 along the second translation axis Y, and the primary detection light L14 reflected by the second optical deflection element 4 is incident on the focusing lens 5 along the third translation axis Z. Please refer to Figure 6 , showing that the second translation axis Y and the third translation axis Z form a non-vertical angle. Figure 7 , showing that the first translation axis X and the second translation axis Y are at a non-vertical angle. It can be seen that even if the translation axes are not arranged vertically, as long as the detection light propagates along the corresponding translation axes, the corresponding optical element can still be moved along the corresponding translation axis without affecting the detection light path.

[0049] The optical deflection elements 3 and 4 refer to elements that can deflect the direction of the detection light, and may be beam splitters, penta-prisms, reflectors, and similar elements. Figures 1 to 3 When the first translation axis X and the second translation axis Y are perpendicular to each other, as a better implementation, the optical deflection element 3 for switching the detection light between the directions of the first translation axis X and the second translation axis Y can adopt a pentagonal prism; when it is necessary to further add the optical path of the observation probe 7, the optical deflection element involved in the optical path of the observation probe 7 can be set as a beam splitter.

[0050] When the detection light propagates along the translation axis, it mainly means that the propagation direction of the detection light is parallel to the corresponding translation axis. Figures 1 to 9 , each segment of detection light is parallel to the corresponding translation axis, and the specific optical path can be adjusted as needed.

[0051] In some cases, in order to guide the primary detection light L12 and the secondary detection light L24 whose optical paths are parallel to each other to the corresponding optical elements, a beam splitter 2 can be further arranged in the optical guide mechanism, so that the beam splitter 2 and the first optical deflection element 3 are arranged along the first translation axis X, and the primary detection light L11 emitted by the light source 1 is incident on the first optical deflection element 3 through the beam splitter 2, and the secondary detection light L24 emitted from the first optical deflection element 3 is incident on the detector 6 through the beam splitter 2.

[0052] In some cases, the detection system provided by the present invention further includes an observation mechanism, which includes an observation light source 8 and an image sensor 10. The observation light emitted by the observation light source 8 is irradiated to the cantilever of the probe 7 via the light guide mechanism, and the observation light reflected by the cantilever is irradiated to the image sensor 10 via the light guide mechanism. Figure 8 , shows an embodiment including an observation mechanism, wherein the observation mechanism also includes a beam splitter 9, the observation light L31 emitted by the observation light source 8 first enters the beam splitter 9, the observation light L32 emitted by the beam splitter 9 enters the second optical deflection element 4, the observation light L33 emitted from the second optical deflection element 4 enters the focusing lens 5, and the observation light L34 deflected by the focusing lens 5 is irradiated to the probe 7; the probe 7 reflects the observation light L41, the observation light L42 deflected by the focusing lens 5 enters the second optical deflection element 4, the observation light L43 emitted from the second optical deflection element 4 enters the beam splitter 9, and then the observation light L44 enters the image sensor 10 to display the image of the probe 7 through the image sensor 10 to observe the position and / or morphology of the probe 7.

[0053] In addition, in some cases, the reflection of the detection light on the cantilever of the probe 7 has a certain degree of diffuse reflection, and the corresponding diffusely reflected detection light can also enter the image sensor 10 through the focusing lens 5, the second optical deflection element 4, and the beam splitter 9, so that the position and focusing state of the detection light on the probe 7 can be observed through the image obtained by the image sensor 10. In order to ensure that the observation mechanism can be translated together with the probe 7 and the optical elements in the corresponding light guide mechanism, the observation light can be propagated along at least one of the translation axes. For example, the observation light L33 and L42 can be propagated along the third translation axis Z, so that when the corresponding optical elements of the observation light L33 and L42 are translated along the third translation axis Z, the optical path of the observation light remains substantially unchanged. In addition, the observation light can be further propagated along the second translation axis Y and the third translation axis Z, or the observation light can be further propagated along the first translation axis X, the second translation axis Y and the third translation axis Z, so as to realize the joint movement of the observation mechanism and the probe 7. For the specific movement principle, please refer to the above content, which will not be repeated here. Accordingly, the optical elements in the corresponding observation mechanism can be arranged as required to meet the corresponding observation requirements.

[0054] In addition, in some cases, the optical paths of the observation lights L31 and L41 and the optical paths of the detection lights can be made independent of each other. For example, see Fig. 9 , the light L31 emitted by the observation light source 8 can be directly irradiated to the probe 7, and the corresponding observation light L44 can be acquired through the image sensor 10 to form a corresponding image; similarly, since there is a certain diffuse reflection of the detection light on the cantilever of the probe 7, the position and focusing state of the detection light on the probe 7 can also be observed through the image acquired by the image sensor 10.

[0055] The installation and connection mode of the optical deflection elements 3, 4, the focusing lens 5, and the probe 7 can be set accordingly as needed. As a feasible solution, the optical deflection elements 3, 4, the focusing lens 5, and the probe 7 are set together as the first translation group Gx on the corresponding first fixed element, and the first fixed element can be moved along the first translation axis X; the optical deflection elements 4, the focusing lens 5, and the probe 7 are set together as the second translation group Gy on the corresponding second fixed element, and the second fixed element and the first fixed element are movable in the second translation axis Y direction and fixedly connected in the first translation axis X direction; the focusing lens 5 and the probe 7 are set together as the third translation group Gz on the corresponding third fixed element, and the third fixed element and the second fixed element are movable in the third translation axis Z direction and fixedly connected in the second translation axis Y direction. The specific driving mode of movement can also be set as needed, for example, driven by a driving motor, piezoelectric material, manual, pneumatic, hydraulic, etc.

[0056] In addition, the present invention also provides a detection system for a scanning probe microscope, including a light source 1, a probe 7, a light guide mechanism, and a detector 6. The probe 7 is constructed to be able to translate along a first translation axis X, a second translation axis Y, and a third translation axis Z that form a spatial angle with each other; the light guide mechanism is constructed to be able to guide the primary detection light emitted by the light source 1 to the cantilever of the probe 7, and to guide the secondary detection light formed by the cantilever of the probe 7 reflecting the primary detection light to the detector 6; the detector 6 can output a corresponding signal according to the position of the light irradiated thereon.

[0057] The light guide mechanism includes a first optical deflection element 3, a second optical deflection element 4, and a focusing lens 5. The light guide mechanism is configured to enable the primary detection light to be incident on the first optical deflection element 3 along the first translation axis X; specifically, the light emission direction of the light source 1 can be set along the first translation axis X so that the primary detection light L12 propagates along the first axis and is incident on the first optical deflection element 3. The first optical deflection element 3, the second optical deflection element 4, the focusing lens 5 and the probe 7 are configured as a first translation group Gx, which are capable of synchronous translation along the first translation axis X; the first optical deflection element 3 and the second optical deflection element 4 are arranged along the second translation axis Y, the second optical deflection element 4, the focusing lens 5 and the probe 7 are configured as a second translation group Gy, which are capable of synchronous translation along the first translation axis X and the second translation axis Y; the focusing lens 5 and the second optical deflection element 4 are arranged along the third translation axis Z, the focus of the focusing lens 5 is located at the cantilever of the probe 7, the optical axis of the focusing lens 5 is parallel to the third translation axis Z, and the focusing lens 5 and the probe 7 are configured as a third translation group Gz, which are capable of synchronous translation along the first translation axis X, the second translation axis Y and the third translation axis Z.

[0058] The above scheme enables the primary detection light to pass through the first optical deflection element 3, the second optical deflection element 4, and the focusing lens 5 in sequence, and respectively form the primary detection light L12 propagating along the first translation axis X, the primary detection light L13 propagating along the second translation axis Y, and the primary detection light L14 propagating along the third translation axis Z; at the same time, by setting the direction of the primary detection light incident on the focusing lens 5, the focus of the focusing lens 5 and the position of the cantilever of the probe 7, the secondary detection light also includes the secondary detection light L24 propagating along the first translation axis X, the secondary detection light L23 propagating along the second translation axis Y, The secondary detection light L22 propagates along the third translation axis Z, and the aforementioned optical elements and probes are composed of the first translation group Gx, the second translation group Gy, and the third translation group Gz and translated together, so that when the probe 7 is translated, the light guide mechanism can translate the corresponding optical elements therein together with the probe 7, so that the detection light can always be irradiated on the same position of the probe 7, and at the same time, the irradiation position of the detection light irradiated to the detector 6 by the light guide mechanism remains unchanged, so that the translation of the probe 7 does not affect the detection of the object by the probe 7, thereby meeting the requirements of the scanning probe microscope for scanning and detecting the object. For the specific implementation principle, please refer to the aforementioned content, which will not be repeated here.

[0059] In some cases, the optical waveguide mechanism also includes a beam splitter 2, which is arranged along the first translation axis X with the first optical deflection element 3, and the beam splitter 2 is constructed to guide the primary detection light L11 to the first optical deflection element 3 and guide the secondary detection light L24 to the detector 6.

[0060] As a feasible implementation, the three translation axes are perpendicular to each other. As another feasible implementation, at least one of the angles formed between the three translation axes can be a non-perpendicular angle.

[0061] The detection system also includes an observation mechanism, which includes an observation light source 8 and an image sensor 10. The observation light L31 emitted by the observation light source 8 is irradiated to the cantilever of the probe 7 via the light guide mechanism, and the observation light reflected by the cantilever of the probe 7 is irradiated to the image sensor via the light guide mechanism. Specifically, the observation light L31 can pass through the beam splitter 9, the second optical deflection element 4, and the focusing lens 5 in sequence and irradiate to the probe 7. In addition, the specific configuration of the observation mechanism can be adjusted as needed, for example, the observation light L31 is directly irradiated to the probe 7, and the observation light L41 reflected by the probe 7 is received by the image sensor 10. The observation light propagates along at least one of the translation axes X, Y, and Z, so as to achieve that the position of the observation light L34 / L31 irradiated on the probe 7 remains substantially unchanged when the probe 7 is translated.

[0062] The present invention also provides a method for operating a scanning probe microscope, including the detection system as described above, so that the light source 1 emits a primary detection light L11, the light guide mechanism is adjusted to allow the primary detection light L15 to irradiate the cantilever, the secondary detection light L25 is received by the detector 6 and a corresponding signal is output; along at least one of the translation axes X, Y, and Z, the optical deflection elements 3, 4, at least one of the focusing lenses 5, and the probe 7 are synchronously moved to keep the position where the primary detection light L15 irradiates the cantilever unchanged.

[0063] In this way, before starting the detection, the optical path of the primary detection light is adjusted so that the primary detection light L15 can be accurately irradiated on the cantilever of the probe 7 for detecting the object to be detected, and at the same time, the secondary detection light can be guided to the detector 6. Specifically, adjusting the light guide mechanism mainly includes operating the positions of the optical deflection elements 3, 4 and the focusing lens 5 on the translation axes X, Y, and Z to adjust the optical path position of the primary detection light; according to the records in the aforementioned detection system, the detection system can make the secondary detection light at least include a portion propagating along the three translation axes X, Y, and Z, and at the same time be parallel to the corresponding primary detection light when propagating along the translation axes X, Y, and Z. Therefore, when the primary detection light is adjusted to the corresponding position on the cantilever of the probe 7, the corresponding secondary detection light is also adjusted, so that the optical path of the detection light can be adjusted conveniently, and the optical path adjustment state of the detection light can be determined conveniently. When in use, according to the requirements of the translation of the probe 7, the corresponding optical deflection elements 3, 4 and the focusing lens 5 are moved to ensure that the optical path direction of the detection light remains roughly unchanged when the probe 7 is translated, so as to ensure that the object to be measured can be detected synchronously when the probe 7 is translated, or to keep the position of the detection light irradiated on the probe 7 unchanged when the probe 7 is translated.

[0064] In addition, in some cases, the aforementioned scanning probe microscope operation method further includes adjusting the position of the detector 6 so that the secondary detection light is irradiated near the center of the detector. Figures 1 to 9 , the optical paths of the primary detection light and the secondary detection light at the corresponding positions are parallel and have a certain distance between them. When the primary detection light is adjusted, it is easy to cause the distance between the primary detection light and the secondary detection light to change. Therefore, in some cases, when the primary detection light is adjusted, the position of the detector 6 needs to be adjusted accordingly to adapt to the change in the distance between the primary detection light and the secondary detection light. In addition, in some cases, the signal of the detector 6 can also be further processed and analyzed to correct the influence of the change in the position of the secondary detection light caused by the adjustment of the primary detection light.

[0065] The above shows and describes the basic principles, main features and advantages of the present invention, so the above is only an embodiment of the present invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the above embodiments and descriptions only describe the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention also includes various equivalent changes and improvements, which will fall within the scope of the present invention to be protected.

Claims

1. A detection system for a scanning probe microscope, characterized in that: include: a light source capable of emitting primary detection light; A probe, wherein the probe is configured to be capable of translation along three translation axes forming a spatial angle; a detector capable of outputting a corresponding signal according to the position of the light impinging thereon; a light guide mechanism configured to guide the primary detection light to the cantilever of the probe, and to guide the secondary detection light formed by the cantilever reflecting the primary detection light from the cantilever to the detector; Wherein, the light guide mechanism includes at least two optical deflection elements and a focusing lens, the focus of the focusing lens is located on the cantilever, the primary detection light is incident on the focusing lens along a direction parallel to the optical axis of the focusing lens, and the light guide mechanism is constructed so that the primary detection light incident on the two optical deflection elements and the focusing lens can propagate along the three translation axes respectively, and the optical deflection element and the focusing lens are arranged in a form that can move synchronously with the probe along the corresponding translation axis.

2. A detection system for a scanning probe microscope as claimed in claim 1, characterized in that: The optical guide mechanism further includes a beam splitter, through which the primary detection light propagates toward the optical deflection element, and through which the secondary detection light propagates toward the detector.

3. A detection system for a scanning probe microscope as claimed in claim 1, characterized in that: The translation axis includes a first translation axis, a second translation axis, and a third translation axis; the optical deflection element includes a first optical deflection element and a second optical deflection element; the primary detection light is incident on the first optical deflection element along the first translation axis, is reflected by the first optical deflection element, and then is incident on the second optical deflection element along the second translation axis, and then is reflected by the second optical deflection element and then is incident on the focusing lens along the third translation axis.

4. A detection system for a scanning probe microscope as claimed in claim 1, characterized in that: The three translation axes are perpendicular to each other.

5. A detection system for a scanning probe microscope as claimed in claim 1, characterized in that: The optical deflection elements and focusing lenses arranged in the corresponding optical paths on both sides of the primary detection light propagating along the translation axis move synchronously with the probe along the corresponding translation axis.

6. A detection system for a scanning probe microscope as claimed in claim 1, characterized in that: The detection system further includes an observation mechanism, which includes an observation light source and an image sensor. The observation light emitted by the observation light source is irradiated to the cantilever via the light guide mechanism, and the observation light reflected by the cantilever is irradiated to the image sensor via the light guide mechanism.

7. A detection system for a scanning probe microscope as claimed in claim 6, characterized in that: The observation light propagates along at least one of the translation axes.

8. A detection system for a scanning probe microscope, characterized in that: include: A light source, a probe, a light guide mechanism, and a detector, wherein the probe is configured to be capable of translation along a first translation axis, a second translation axis, and a third translation axis that form a spatial angle with each other; the light guide mechanism is configured to be capable of guiding the primary detection light emitted by the light source to the cantilever of the probe, and to be capable of guiding the secondary detection light formed by the cantilever reflecting the primary detection light to the detector; the detector is capable of outputting a corresponding signal according to the position of the light irradiated thereon; The light guide mechanism includes a first optical deflection element, a second optical deflection element, and a focusing lens. The light guide mechanism is constructed in a form in which the primary detection light is incident on the first optical deflection element along the first translation axis. The first optical deflection element, the second optical deflection element, and the focusing lens can be translated along the first translation axis synchronously with the probe; the first optical deflection element and the second optical deflection element are arranged along the second translation axis, and the second optical deflection element and the focusing lens can be translated along the first translation axis and the second translation axis synchronously with the probe; the focusing lens and the second optical deflection element are arranged along the third translation axis, the focus of the focusing lens is located on the cantilever of the probe, the optical axis of the focusing lens is parallel to the third translation axis, and the focusing lens can be translated along the first translation axis, the second translation axis, and the third translation axis synchronously with the probe.

9. A detection system for a scanning probe microscope as claimed in claim 8, characterized in that: The light guide mechanism further comprises a beam splitter, which is arranged along a first translation axis with the first optical deflection element, and is configured to guide the primary detection light to the first optical deflection element and guide the secondary detection light to the detector.

10. A detection system for a scanning probe microscope as claimed in claim 8, characterized in that: The three translation axes are perpendicular to each other.

11. A detection system for a scanning probe microscope according to claim 8, characterized in that: The detection system further includes an observation mechanism, which includes an observation light source and an image sensor. The observation light emitted by the observation light source is irradiated to the cantilever via the light guide mechanism, and the observation light reflected by the cantilever is irradiated to the image sensor via the light guide mechanism.

12. A detection system for a scanning probe microscope according to claim 11, characterized in that: The observation light propagates along at least one of the translation axes.

13. A method for operating a scanning probe microscope, comprising the detection system according to any one of claims 1 and 8, characterized in that: The light source emits a primary detection light, the light guide mechanism is adjusted to allow the primary detection light to illuminate the cantilever, the secondary detection light is received by the detector and a corresponding signal is output; along at least one of the translation axes, the optical deflection element, at least one of the focusing lenses and the probe are synchronously moved to keep the position where the primary detection light illuminates the cantilever unchanged.

14. A scanning probe microscope operating method according to claim 13, characterized in that: The scanning probe microscope operation method further includes adjusting the position of the detector so that the secondary detection light is irradiated near the center of the detector.

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