Device and method for determining equal-diameter part of crystal bar

Abstract

The invention provides a device and a method for determining an equal-diameter part of a crystal bar. The device comprises a supporting assembly used for fixing a crystal bar; the first measuring part can move along the length direction of the crystal bar and is used for measuring the vertical distance from the position of the first measuring part to the outer peripheral surface of the crystal bar before barreling; the second measuring part is used for measuring the moving distance of the first measuring part along the length direction of the crystal bar; the determining part is used for determining the equal-diameter part of the crystal bar before barreling according to the moving distance and the vertical distance; and determining the equal-diameter part of the crystal bar after barreling according to the equal-diameter part of the crystal bar before barreling.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor manufacturing technology, and in particular to a device and method for determining equal-diameter portions of a crystal rod. Background Art

[0002] At present, single crystal silicon wafers used to manufacture semiconductor devices are mainly manufactured through a series of process steps such as crystal pulling, rolling, cutting, grinding, etching, cleaning and polishing. In the crystal pulling process, the process of pulling a single crystal silicon rod (also called a crystal rod) by the Czochralski method can include: neck growth, crown growth, body growth and tail growth. Corresponding to the above process, the crystal rod obtained by the crystal pulling process includes a seeding part, a crown part, an equal diameter part and a tail part. Among these parts, the seeding part, the crown part and the tail part are usually cut off, and only the equal diameter part is retained for the subsequent cutting process.

[0003] However, the crystal rods obtained by the crystal pulling process are usually cylinders with irregular diameters, which need to be tumbled to a uniform standard diameter. After tumbling, a part of the crown and tail of the crystal rod will be tumbled to the same diameter as the equal-diameter part, and after tumbling, they will be mistaken for the equal-diameter part and retained for subsequent processes such as cutting, resulting in the processing of parts that should not be processed in the subsequent process, wasting processing resources. Summary of the invention

[0004] The present disclosure provides a device and method for determining the equal-diameter portion of a crystal rod, which can avoid being mistaken for the equal-diameter portion after rolling and grinding, thereby saving processing resources.

[0005] The technical solution of the present disclosure is achieved as follows: In a first aspect, the present disclosure provides a device for determining a portion of a crystal rod having equal diameter, the device comprising: A support assembly for fixing the crystal rod; A first measuring part capable of moving along the length direction of the crystal ingot, used to measure the vertical distance from the position of the first measuring part itself to the outer peripheral surface of the crystal ingot before rolling; A second measuring part, used for measuring a moving distance of the first measuring part along the length direction of the crystal rod; The determination unit is used to determine the equal-diameter portion of the crystal rod before rolling according to the moving distance and the vertical distance; and to determine the equal-diameter portion of the crystal rod after rolling according to the equal-diameter portion of the crystal rod before rolling.

[0006] In some examples, the determining unit is used to receive the vertical distance transmitted by the first measuring unit and the moving distance transmitted by the second measuring unit before the crystal ingot is rolled; When the vertical distance decreases to a fixed distance value and the deviation of the vertical distance caused by the movement of the first measuring part is less than a distance threshold, determining the starting point of the equal-diameter portion of the crystal rod before rolling according to the first moving distance measured by the second measuring part; When the vertical distance begins to be greater than the fixed distance value, the end point of the equal-diameter portion of the crystal rod before rolling is determined according to the second moving distance measured by the second measuring part.

[0007] In some examples, the determining unit is used to determine the area originally belonging to the equal-diameter portion before rolling on the crystal rod after rolling according to the starting point of the equal-diameter portion of the crystal rod before rolling and the end point of the equal-diameter portion of the crystal rod before rolling.

[0008] In some examples, the support assembly includes: Base or stand; Two clamping parts symmetrically arranged along the length direction of the base or the support are used to relatively press the two ends of the crystal rod to clamp the crystal rod.

[0009] In some examples, the device further includes: a sliding guide rail arranged along the length direction of the crystal rod, for carrying the movement of the first measuring part.

[0010] In some examples, the first measuring unit includes a wireless ranging sensor or a contact displacement sensor.

[0011] In some examples, the second measuring portion is used to measure toward the first measuring portion to obtain a moving distance of the first measuring portion along the length direction of the crystal rod.

[0012] In some examples, the device further includes: a marking unit for marking, on the crystal rod after tumbling, the equal-diameter portion of the crystal rod after tumbling determined by the determining unit.

[0013] In a second aspect, the present disclosure provides a method for determining a portion of a crystal rod having equal diameters, the method being applied to the apparatus for determining a portion of a crystal rod having equal diameters as described in any one of the first aspect and examples thereof, the method comprising: The first measuring part moves along the length direction of the crystal rod and measures the vertical distance from the position of the first measuring part itself to the outer peripheral surface of the crystal rod before rolling; Measuring the moving distance of the first measuring part along the length direction of the crystal rod by the second measuring part; Determining, by a determination unit, the equal-diameter portion of the crystal rod before tumbling according to the moving distance and the vertical distance; The equal-diameter portion of the crystal rod after tumbling is determined by the determining unit according to the equal-diameter portion of the crystal rod before tumbling.

[0014] In some examples, the determining unit determines the equal-diameter portion of the crystal rod before tumbling according to the moving distance and the vertical distance, including: When the vertical distance decreases to a fixed distance value and the deviation of the vertical distance caused by the movement of the first measuring part is less than a distance threshold, determining the starting point of the equal-diameter portion of the crystal rod before rolling according to the first moving distance measured by the second measuring part; When the vertical distance begins to be greater than the fixed distance value, determining the end point of the equal-diameter portion of the crystal rod before rolling according to the second moving distance measured by the second measuring part; According to the starting point of the equal-diameter portion of the crystal rod before tumbling and the end point of the equal-diameter portion of the crystal rod before tumbling, the area originally belonging to the equal-diameter portion before tumbling is determined on the crystal rod after tumbling.

[0015] The present disclosure provides an apparatus and method for determining the equal-diameter portion of a crystal rod; a first measuring part is moved along the length direction of the crystal rod to measure the vertical distance, and the equal-diameter portion of the crystal rod before rolling is determined according to the vertical distance and the moving distance of the first measuring part; then, after the crystal rod is rolled, the equal-diameter portion of the crystal rod after rolling is determined according to the equal-diameter portion of the crystal rod before rolling, thereby avoiding the situation where part of the area originally belonging to the crown portion and the tail portion is mistakenly regarded as the equal-diameter portion, saving processing resources, and improving the overall quality of the single crystal silicon wafer finally produced. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of a crystal rod structure provided by the present invention.

[0017] Figure 2 A schematic diagram of the composition of a device for determining equal-diameter portions of a crystal rod provided in the present invention.

[0018] Figure 3 A schematic diagram of the composition of the first measuring unit provided in the present invention.

[0019] Figure 4 A schematic diagram of another device for determining equal-diameter portions of a crystal rod provided in the present invention.

[0020] Figure 5 A schematic diagram of a corresponding curve between the moving distance of the first measuring part provided in the present invention along the length direction of the crystal rod and the vertical distance from the position of the first measuring part itself to the outer peripheral surface of the crystal rod before rolling.

[0021] Figure 6 A schematic diagram of another device for determining equal-diameter portions of a crystal rod provided in the present invention.

[0022] Figure 7 A schematic flow chart of a method for determining equal-diameter portions of a crystal rod provided in the present disclosure. DETAILED DESCRIPTION

[0023] The technical solutions in the present disclosure will be described clearly and completely below in conjunction with the accompanying drawings in the present disclosure.

[0024] See also Figure 1 , which shows an exemplary schematic diagram of the structure of a crystal rod obtained by the CZ method. Figure 1 As shown in the upper half of the image, the crystal rod 1A obtained by the Czochralski method includes a seeding portion 11A, a crown portion 12A, a constant diameter portion 13A, and a tail portion 14A. In the pulling process corresponding to the seeding portion 11A, the crown portion 12A, and the tail portion 14A, due to the instability of the pulling speed and the thermal field, these portions will have many defects and cannot be applied to the subsequent processing to obtain semiconductor products. In the pulling process of the constant diameter portion 13A, because the pulling speed and the thermal field have become stable and the defects are less, the seeding portion 11A, the crown portion 12A, and the tail portion 14A are usually cut off, and then the constant diameter portion 13 is subjected to a series of subsequent processes such as cutting, grinding, etching, cleaning, and polishing to obtain a single crystal silicon wafer.

[0025] Before the seeding portion 11A, the crown portion 12A and the tail portion 14A are cut off, the outer circumference of the crystal rod 1A is usually ground into a regular cylinder with a standard diameter by rolling. As the rolling progresses, the part where the crown portion 12A connects with the equal diameter portion 13A and the part where the tail portion 14A connects with the equal diameter portion 13A will be rolled to be consistent with the equal diameter portion 13A. The crystal rod 1B finally obtained by rolling is as follows: Figure 1 As shown in the lower half of the image. Figure 1 In the lower half of the image, the two oblique line filled areas belonged to the crown portion 12A and the tail portion 14A before tumbling, but after tumbling, the diameters of the two oblique line filled areas were tumbled to be consistent with the diameter of the equal diameter portion 13B and were mistakenly considered to be part of the equal diameter portion 13B. Figure 1 In the lower half of the image, it can be found that the radial lengths of the crown portion 12B and the tail portion 14B after rolling are reduced compared to before rolling, while the radial length of the seeding portion 11B after rolling is consistent with that before rolling.

[0026] Figure 1The two oblique filling areas shown in the figure are not equal diameter parts, but belong to the crown and tail parts of the crystal rod, and should be cut off after rolling. However, since the diameter of the two oblique filling areas is consistent with the equal diameter part after rolling, they are usually mistaken for equal diameter parts and retained. After being mistaken for equal diameter parts and retained, the two oblique filling areas will also go through a series of process steps such as cutting, grinding, etching, cleaning and polishing to obtain single crystal silicon wafers, and after obtaining the single crystal silicon wafers, the quality of these silicon wafers will also be tested.

[0027] Understandably, since the crown and tail parts have many defects and cannot be used for the manufacture of subsequent semiconductor products, there is a high probability that the single crystal silicon wafers processed from these two oblique line filling areas will fail the silicon wafer quality inspection. Figure 1 The two oblique line filled areas shown in the figure undergo a series of process steps such as cutting, grinding, etching, cleaning and polishing, which not only wastes processing resources, but also reduces the overall quality of the single crystal silicon wafers finally produced.

[0028] In view of the above situation, the present disclosure hopes to avoid the above situation of being mistaken for equal diameter parts to save processing resources. Based on this, see Figure 2 , which shows a device 20 for determining the equal diameter portion of a crystal rod provided by the present disclosure, the device 20 may include: A support assembly 21 for fixing the crystal rod S; The first measuring part 22 can be moved along the length direction of the crystal ingot S indicated by the straight arrow, and is used to measure the vertical distance from the position of the first measuring part 22 itself to the outer peripheral surface of the crystal ingot S before rolling; The second measuring part 23 is used to measure the moving distance of the first measuring part 22 along the length direction of the crystal rod S; The determination unit 24 is used to determine the equal-diameter portion of the crystal rod S before rolling according to the moving distance and the vertical distance; and to determine the equal-diameter portion of the crystal rod S after rolling according to the equal-diameter portion of the crystal rod S before rolling.

[0029] In some examples, such as Figure 2 As shown in the example, the support assembly 21 can be implemented as a base 211 to support the crystal rod S. The base 211 can be implemented as a long strip platform, and two clamping parts 212 symmetrically arranged along the length direction of the base at both ends of the platform are used to press the two ends of the crystal rod S relatively to clamp the crystal rod S.

[0030] In some examples, the support assembly 21 may also be implemented as a long strip-shaped support, and clamping portions for clamping the crystal rod S are also provided at both ends of the support.

[0031] It should be noted that, in the above examples, no matter it is implemented as a base or a bracket, the support assembly 21 can be configured to fix the crystal rod S in the horizontal direction. In this case, when the support assembly 21 implemented by the base or the bracket is in the shape of a long strip, its length direction is consistent with the horizontal direction, and is also consistent with the length direction of the crystal rod S. It can be understood that other means for fixing the crystal rod S can also be applied to Figure 2 The supporting assembly 21 shown in the figure will not be described in detail here.

[0032] In some examples, the first measuring unit 22 may be implemented as a wireless distance measuring sensor, such as a laser distance measuring sensor, an infrared distance measuring sensor, a millimeter wave radar, or a sensor based on time of flight (TOF), etc. When the first measuring unit 22 is a wireless distance measuring sensor, it may measure the vertical distance between its own position and the outer peripheral surface of the crystal ingot S in a direction perpendicular to the axial direction of the crystal ingot S.

[0033] In some examples, the first measuring part 22 may also be implemented as a contact displacement sensor, such as Figure 3 As shown, the contact displacement sensor 220 includes an abutting contact 222 and a receiving cavity 223 capable of receiving the abutting contact 222. The abutting contact 222 can abut against the outer peripheral surface of the crystal rod S. When the contact displacement sensor 220 moves along the length direction of the crystal rod S as indicated by the solid arrow, the abutting contact 222 can extend from the receiving cavity 223 or retract into the receiving cavity 223 as indicated by the dotted arrow due to the change in the diameter of the outer peripheral surface. The distance by which the abutting contact 222 extends or retracts can represent the vertical distance between the position of the contact displacement sensor 220 itself and the outer peripheral surface of the crystal rod S.

[0034] In some examples, the first measuring portion 22 may be disposed above the crystal rod S, such as Figure 2 The first measuring part 22 shown by the solid line in the middle may also be arranged below the crystal rod S, such as Figure 2 When the first measuring part 22 is arranged below the crystal rod S, as shown in the dashed line. Figure 2 As shown, the first measuring part 22 is preferably arranged on the base 211 .

[0035] In some examples, in order to enable the first measuring portion 22 to move along the length direction of the crystal rod S indicated by the straight arrow, in the present disclosure, Figure 4 As shown, the device 20 further includes: a sliding guide rail 25 arranged along the length direction of the crystal rod S, for carrying the first measuring part 22 to move.

[0036] For the above example, specifically, during the process in which the first measuring unit 22 moves along the length direction of the crystal rod S indicated by the straight arrow, Figure 1The morphology of the seeding part, the crown part, the equal diameter part and the tail part of the crystal ingot before rolling is shown in FIG. The corresponding curve between the moving distance of the first measuring part 22 along the length direction of the crystal ingot S and the vertical distance from the position of the first measuring part 22 itself to the outer peripheral surface of the crystal ingot S before rolling is shown in FIG. Figure 5 As shown. Figure 5 In the figure, the abscissa (X) axis represents the moving distance of the first measuring part 22 from left to right along the length direction of the crystal ingot S, and the ordinate (Y) axis represents the vertical distance from the position of the first measuring part 22 itself to the outer peripheral surface of the crystal ingot S before rolling.

[0037] exist Figure 5 In the process of moving from left to right along the length direction of the crystal rod S, the first measuring part 22 will sequentially pass through the seeding part, the crown part, the equal diameter part and the tail part. Figure 5 It can be found from the curve shown in that when the first measuring part 22 moves to make the vertical distance drop to a fixed distance value, and the deviation of the vertical distance with the movement of the first measuring part 22 is small, it can be determined as the left starting point D1 of the equal diameter part. For this deviation, since the outer peripheral surface of the crystal rod S before rolling is not smooth, but has some defects, the vertical distance will cause a small deviation due to these non-smooth defects. The present disclosure uses a distance threshold to characterize this small deviation. In other words, when the deviation of the vertical distance with the movement of the first measuring part 22 from the fixed distance value is less than the distance threshold, it can be considered that the first measuring part 22 measures the equal diameter part at this time.

[0038] As the first measuring part 22 continues to move rightward, when the first measuring part 22 moves to a point where the vertical distance begins to be greater than the fixed distance value, it can be determined as the right end point D2 of the equal-diameter portion. Specifically, when the deviation between the vertical distance and the fixed distance value begins to be greater than the distance threshold, it means that the first measuring part 22 has ended the measurement of the equal-diameter portion and started to measure the tail portion.

[0039] In some examples, the second measuring unit 23 may also be implemented as a wireless distance measuring sensor, such as a laser distance measuring sensor, an infrared distance measuring sensor, a millimeter wave radar, or a sensor based on the light flight time, etc. When the second measuring unit 23 is a wireless distance measuring sensor, it may measure toward the first measuring unit 22 to obtain the moving distance of the first measuring unit 22 from left to right along the length direction of the crystal ingot S.

[0040] In some examples, before the crystal ingot S is rolled, the determination unit 24 receives the vertical distance transmitted by the first measuring unit 22 and the moving distance transmitted by the second measuring unit 23. Moreover, after receiving the data transmitted by the first measuring unit 22 and the second measuring unit 23, when the vertical distance drops to a fixed distance value and the deviation of the vertical distance with the movement of the first measuring unit 22 is small, the starting point D1 of the equal-diameter portion of the crystal ingot S before rolling is determined according to the first moving distance measured by the second measuring unit 23, and when the vertical distance begins to be greater than the fixed distance value, the end point D2 of the equal-diameter portion of the crystal ingot S before rolling is determined according to the second moving distance measured by the second measuring unit.

[0041] In the present disclosure, the determination unit 24 may be implemented as an electronic device having data processing and computing functions, such as at least one of a smart phone, a smart watch, a desktop computer, a laptop computer, a virtual reality terminal, an augmented reality terminal, a wireless terminal, and a laptop computer, etc. The electronic device has a communication function, can access a wired network or a wireless network, and receives data transmitted by the first measurement unit 22 and the second measurement unit 23 based on the accessed wired network or wireless network.

[0042] In some examples, after the crystal rod S is tumbled, Figure 1 The regions originally belonging to the crown and the tail shown in the two oblique line filled regions in the figure have the same diameter as the equal diameter portion. However, since the determination unit 24 has determined the starting point D1 and the end point D2 of the equal diameter portion before the crystal ingot S is tumbled, the determination unit 24 can determine the region originally belonging to the equal diameter portion before tumbling on the crystal ingot S after tumbling according to the starting point D1 and the end point D2, thereby avoiding the problem of Figure 1 The areas indicated by the two diagonal filled areas in the figure were mistakenly considered to be equal-diameter parts and were retained.

[0043] In some examples, such as Figure 6 As shown, the device 20 further includes: a marking unit 26 for marking the equal-diameter portion of the crystal rod S after tumbling according to the equal-diameter portion of the crystal rod S after tumbling determined by the determining unit 24 .

[0044] Specifically, the marking part 26 can also be set on the sliding guide rail 25 so that it can move along the length direction of the crystal ingot S. Combined with the above example, the determination part 24 has determined the starting point D1 and the end point D2 of the equal diameter part before the crystal ingot S is rolled, then after the crystal ingot S is rolled, the marking part 26 can be moved to the starting point D1 and the end point D2 respectively along the length direction of the crystal ingot S through the sliding guide rail 25, and mark the outer peripheral surface of the crystal ingot S after rolling at two points D1 and D2 respectively. On the outer peripheral surface of the crystal ingot S after rolling, the area between the two marks is the equal diameter part, for example Figure 1In the lower half of the image, the portion 13B that is mistakenly considered to be equal diameter is the remaining portion after removing the diagonal line filling area. Figure 1 By comparing the upper half image and the lower half image, it can be seen that the remaining area is the equal-diameter portion 13A that originally belonged to the crystal rod S before rolling.

[0045] In the present disclosure, the marking part 26 can be specifically implemented as a laser marker, a diamond scriber, an etching device, etc. It can be understood that other marking means that can be implemented on the outer peripheral surface of the crystal rod S can also be applied to the marking part 26 of the present disclosure, which will not be repeated here.

[0046] It should be noted that after the marking part 26 completes the marking, the areas originally belonging to the seeding part, the crown part and the tail part of the rolled crystal rod S can be cut off based on the marking, and the areas originally belonging to the equal-diameter part can be retained to perform a series of subsequent processes such as cutting, grinding, etching, cleaning and polishing to obtain a single crystal silicon wafer.

[0047] Through the above technical scheme, the present invention utilizes the first measuring part to move along the length direction of the crystal rod and measure the vertical distance, and determines the equal-diameter part of the crystal rod before rolling according to the vertical distance and the moving distance of the first measuring part. Then, after the crystal rod is rolled, the equal-diameter part of the crystal rod after rolling is determined according to the equal-diameter part of the crystal rod before rolling, thereby avoiding the situation where part of the area originally belonging to the crown part and the tail part is mistakenly regarded as the equal-diameter part, saving processing resources and improving the overall quality of the single crystal silicon wafer finally produced.

[0048] Based on the invention concept of the above technical solution, see Figure 7 , which shows a method for determining the equal-diameter portion of a crystal rod provided by the present disclosure, which can be applied to the device for determining the equal-diameter portion of a crystal rod described in the aforementioned technical solution, and the method may include: S701: Move the first measuring part along the length direction of the crystal ingot and measure the vertical distance from the position of the first measuring part itself to the outer peripheral surface of the crystal ingot before rolling; S702: measuring the moving distance of the first measuring part along the length direction of the crystal ingot by the second measuring part; S703: determining, by a determining unit, the equal-diameter portion of the crystal rod before rolling according to the moving distance and the vertical distance; S704: determining, by a determining unit, the equal-diameter portion of the crystal rod after tumbling according to the equal-diameter portion of the crystal rod before tumbling.

[0049] In some examples, the determining unit determines the equal-diameter portion of the crystal rod before tumbling according to the moving distance and the vertical distance, including: When the vertical distance decreases to a fixed distance value and the deviation of the vertical distance caused by the movement of the first measuring part is less than a distance threshold, determining the starting point of the equal-diameter portion of the crystal rod before rolling according to the first moving distance measured by the second measuring part; When the vertical distance begins to be greater than the fixed distance value, determining the end point of the equal-diameter portion of the crystal rod before rolling according to the second moving distance measured by the second measuring part; According to the starting point of the equal-diameter portion of the crystal rod before tumbling and the end point of the equal-diameter portion of the crystal rod before tumbling, the area originally belonging to the equal-diameter portion before tumbling is determined on the crystal rod after tumbling.

[0050] In some examples, the method further includes: On the crystal rod after tumbling, the marking unit marks the equal-diameter portion of the crystal rod after tumbling according to the determination unit.

[0051] In some examples, marking, on the tumbled crystal rod, by the marking unit according to the equal-diameter portion of the crystal rod after tumbled determined by the determining unit, includes: On the crystal rod after tumbling, the marking unit marks the area that originally belonged to the equal-diameter portion before tumbling determined by the determining unit.

[0052] In some examples, marking, on the tumbled crystal rod, the region that originally belonged to the equal-diameter portion before tumbling determined by the determining unit, by the marking unit includes: After the crystal ingot is tumbled, the marking portion is moved along the length direction of the crystal ingot to the starting point of the equal-diameter portion of the crystal ingot before tumbling and the end point of the equal-diameter portion of the crystal ingot before tumbling respectively; The outer peripheral surface of the barrel-polished crystal rod is marked at two locations, the starting point and the end point.

[0053] In this disclosure, Figure 7 The specific implementation process and details of the scheme and its examples shown are the same as the device for determining the equal-diameter portion of the crystal rod and its examples and details described in the aforementioned technical scheme, and the present disclosure will not elaborate on this.

[0054] It should be noted that the technical solutions described in the present disclosure can be combined arbitrarily without conflict.

[0055] The above description is only a specific implementation mode of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure.

Claims

1. A device for determining the equal diameter portion of a crystal rod, characterized in that: The device comprises: A support assembly for fixing the crystal rod; A first measuring part capable of moving along the length direction of the crystal ingot, used to measure the vertical distance from the position of the first measuring part itself to the outer peripheral surface of the crystal ingot before rolling; A second measuring part, used for measuring a moving distance of the first measuring part along the length direction of the crystal rod; The determination unit is used to determine the equal-diameter portion of the crystal rod before rolling according to the moving distance and the vertical distance; and to determine the equal-diameter portion of the crystal rod after rolling according to the equal-diameter portion of the crystal rod before rolling.

2. The device according to claim 1, characterized in that The determining unit is used to receive the vertical distance transmitted by the first measuring unit and the moving distance transmitted by the second measuring unit before the crystal ingot is rolled; When the vertical distance decreases to a fixed distance value and the deviation of the vertical distance caused by the movement of the first measuring part is less than a distance threshold, determining the starting point of the equal-diameter portion of the crystal rod before rolling according to the first moving distance measured by the second measuring part; When the vertical distance begins to be greater than the fixed distance value, the end point of the equal-diameter portion of the crystal rod before rolling is determined according to the second moving distance measured by the second measuring part.

3. The device according to claim 2, characterized in that The determining unit is used to determine the area that originally belonged to the equal diameter part before rolling on the crystal rod after rolling according to the starting point of the equal diameter part of the crystal rod before rolling and the end point of the equal diameter part of the crystal rod before rolling.

4. The device according to claim 1, characterized in that The support assembly comprises: Base or stand; Two clamping parts symmetrically arranged along the length direction of the base or the support are used to relatively press the two ends of the crystal rod to clamp the crystal rod.

5. The device according to claim 1, characterized in that The device further includes: a sliding guide rail arranged along the length direction of the crystal rod, for carrying the first measuring part to move.

6. The device according to claim 1, characterized in that The first measuring unit includes a wireless distance measuring sensor or a contact displacement sensor.

7. The device according to claim 1, characterized in that The second measuring part is used to measure toward the first measuring part to obtain a moving distance of the first measuring part along the length direction of the crystal rod.

8. The device according to claim 1, characterized in that The device further comprises: a marking unit, which is used to mark the equal-diameter portion of the crystal rod after tumbling according to the equal-diameter portion of the crystal rod after tumbling determined by the determining unit.

9. A method for determining the equal diameter portion of a crystal rod, characterized in that: The method is applied to the device for determining the equal-diameter portion of a crystal rod as claimed in any one of claims 1 to 8, and the method comprises: The first measuring part moves along the length direction of the crystal rod and measures the vertical distance from the position of the first measuring part itself to the outer peripheral surface of the crystal rod before rolling; Measuring the moving distance of the first measuring part along the length direction of the crystal rod by the second measuring part; Determining, by a determination unit, the equal-diameter portion of the crystal rod before tumbling according to the moving distance and the vertical distance; The equal-diameter portion of the crystal rod after tumbling is determined by the determining unit according to the equal-diameter portion of the crystal rod before tumbling.

10. The method according to claim 9, characterized in that The determining unit determines the equal-diameter portion of the crystal rod before rolling according to the moving distance and the vertical distance, including: When the vertical distance decreases to a fixed distance value and the deviation of the vertical distance caused by the movement of the first measuring part is less than a distance threshold, determining the starting point of the equal-diameter portion of the crystal rod before rolling according to the first moving distance measured by the second measuring part; When the vertical distance begins to be greater than the fixed distance value, determining the end point of the equal-diameter portion of the crystal rod before rolling according to the second moving distance measured by the second measuring part; According to the starting point of the equal-diameter portion of the crystal rod before tumbling and the end point of the equal-diameter portion of the crystal rod before tumbling, the area originally belonging to the equal-diameter portion before tumbling is determined on the crystal rod after tumbling.

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