Surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupling heat dissipation multi-layer co-construction micro-nano structure and manufacturing method and application thereof

Abstract

The invention discloses a surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupling heat dissipation multi-layer co-construction micro-nano structure and a manufacturing method and application thereof, and belongs to the technical field of micro-nano manufacturing and functional structure surfaces, and the multi-layer co-construction micro-nano structure is composed of three layers of structures; the bottom layer structure is a substrate; the top of the bottom layer structure is a near-infrared wavelength scale grating structure; the middle-layer structure is a high-thermal-conductivity diamond film and covers and fills the bottom-layer structure; the top of the middle-layer structure is of a lyophilic micro-nano structure; the top layer structure is a silicon dioxide film. Radiation cooling, efficient heat conduction and liquid film evaporation / boiling phase change heat transfer are coupled, the heat transfer and heat dissipation level is greatly improved, additional external energy input is not needed, and positive significance is achieved for research and development of a novel high-performance and zero-energy-consumption radiator, promotion of development of a high-heat-flow-density advanced system and improvement of the ecological environment.

Description

Technical Field

[0001] The present invention belongs to the field of micro-nano manufacturing and functional structure surface technology, and relates to a heat dissipation structure, in particular to a surface plasma resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure and a manufacturing method and application. Background Art

[0002] With the development momentum of high-precision electronic equipment such as integrated circuits and Ai chips towards high integration and high-intensity computing power, their thermal power density and power loss continue to rise, and the heat dissipation problem has long become a bottleneck restricting its development. Today, traditional heat dissipation methods, such as natural convection, forced convection, and heat conduction, are difficult to meet the heat dissipation needs of high heat flux electronic devices due to their limited heat transfer capacity. In addition, with the development trend of integration, lightweight and extreme service environment of aerospace vehicles, the heat load problem generated by energy conversion is also becoming increasingly prominent. For example, the temperature of hot parts of aircraft engines (turbine blades, tail nozzles) has reached 1173K, and traditional heat dissipation devices not only consume huge energy but also occupy a lot of space, which seriously restricts its lightweight integration development. In outer space without convective heat exchange, the surface temperature of spacecraft facing the sun is as high as 423K. In order to solve the problem of unbalanced surface temperature of spacecraft and maintain a stable internal temperature, radiation cooling has become its main heat dissipation method. How to dissipate low-energy and high-efficiency heat for artificial structures such as electronic equipment and aerospace vehicles has become a major challenge for the development of the next generation of high-performance systems and the realization of energy conservation and emission reduction. Therefore, it is urgent to develop heat dissipation and cooling technology with low energy consumption, low carbon emissions, and no need for additional energy input. Summary of the invention

[0003] The present invention provides a surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure and a manufacturing method and application to overcome the defects of the prior art.

[0004] To achieve the above object, the present invention adopts the following technical solutions:

[0005] In the first aspect, the present invention provides a surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure, which consists of a three-layer structure; the bottom layer structure is a substrate; the top of the bottom layer structure is a grating structure of near-infrared wavelength scale; the middle layer structure is a high thermal conductivity diamond film, covering and filling the bottom layer structure; the top of the middle layer structure is a liquid-philic micro-nano structure; and the top layer structure is a silicon dioxide film.

[0006] By simply adjusting the size and cross-sectional shape of the near-wavelength grating structure, coupling incident electromagnetic waves of different bands, and stimulating the surface plasmon resonance effect, the structure can radiate highly in the atmospheric window band (8-14μm), dissipating heat to the low-temperature outer space, and realizing efficient selective radiation cooling; and by relying on the dense combination of the diamond film with high infrared transmittance and the grating microgrooves, the specific surface area is increased to reduce the interface thermal resistance, and the bottom heat is efficiently conducted upward through the high thermal conductivity diamond film; at the same time, the randomly distributed super-hydrophilic micro-nanostructure on the top layer of the diamond film is combined with the liquid-philic silicon dioxide nanofilm, which enhances the capillary diffusion level of the working fluid, absorbs heat by evaporation, and realizes efficient phase change heat dissipation. The multiple heat dissipation coupling mechanisms of radiation cooling-heat conduction-liquid film evaporation greatly improve heat transfer, reduce the surface temperature and thermal stress of the structure, and realize high-performance zero-energy heat dissipation.

[0007] Optionally, the substrate is made of high-temperature alloy, titanium, copper, nickel, gold, platinum, silver or other metal.

[0008] Optionally, the grating structure is composed of a plurality of microgrooves arranged in a parallel or orthogonal array, the cross-section of the microgrooves is V-shaped, rectangular or trapezoidal, and the inside of the microgrooves is smooth and the edges are sharp.

[0009] Optionally, the top width of the microgrooves is 1.0-10 μm, the depth is 1-5 μm, the spacing between the microgrooves is 2.0-20 μm, and the thickness of the substrate is 0.3-1 mm.

[0010] Optionally, the lyophilic micro-nano structure is a randomly distributed papilla and / or porous micro- and / or nano-scale structure.

[0011] Optionally, the diamond film has a thickness of 10 to 100 μm; and the texture thickness of the lyophilic micro-nanostructure is 1 to 100 μm.

[0012] Optionally, the silicon dioxide film has a thickness of 100 to 1000 nm.

[0013] In the second aspect, the present invention provides a method for manufacturing the above-mentioned surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure, comprising the following steps: step one, processing a grating structure of near-infrared wavelength scale on the surface of the substrate to form a bottom structure; step two, processing a diamond film on the surface of the bottom structure, and making it cover and fill the grating structure; processing a hydrophilic micro-nano structure on the top of the diamond film to form a middle-layer structure; step three, coating a silicon dioxide film on the surface of the middle-layer structure to form a top structure.

[0014] Optionally, in step one, the near-infrared wavelength-scale grating structure is processed by femtosecond laser direct writing or photolithography; in step two, the diamond film is processed by CVD chemical vapor deposition; and the hydrophilic micro-nano structure is processed by picosecond / nanosecond pulsed laser scanning.

[0015] In a third aspect, the present invention provides the application of the above-mentioned surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure in heat dissipation.

[0016] The beneficial effects of the present invention are:

[0017] 1. The multi-layer co-constructed structure of the present invention couples radiation cooling, efficient heat conduction and liquid film evaporation / boiling phase change heat transfer, greatly improving the heat transfer and heat dissipation level without the need for additional external energy input. It has positive significance for the research and development of new high-performance, zero-energy radiators, promoting the development of high heat flux density advanced systems, and improving the ecological environment.

[0018] 2. The multi-layer co-construction structure of the present invention is jointly designed in the coupling of three heat transfer processes, which effectively avoids energy loss in any link: the bottom radiation electromagnetic waves are transmitted to the outer space through the middle layer and the top layer of high-transmittance medium to dissipate heat, the middle layer transfers the heat from the bottom layer to the top layer through heat conduction, and the top layer directly dissipates the heat through phase change heat transfer.

[0019] 3. The present invention has a simple structure and high design flexibility. It can stimulate the surface plasmon resonance effect and regulate the selective high radiation of electromagnetic waves by simply changing the grating microgroove period and aspect ratio. It can be used not only in the field of radiation cooling, but also in the fields of infrared sensing and camouflage.

[0020] 4. The bottom near-wavelength scale grating structure greatly increases the specific surface area, improves the contact area between the middle diamond film and the bottom layer, achieves dense bonding, greatly reduces the interfacial thermal resistance, and the high thermal conductivity and high thermal stability of the diamond film accelerate the transfer of heat. In addition, its good infrared transmittance (transmittance>71%) perfectly matches the bottom grating thermal radiation band, further reducing the surface temperature of the structure.

[0021] 5. The lyophilic micro-nano structure processed on the top of the middle diamond film is combined with a nano-scale silicon dioxide coating with lyophilic properties. Without changing the micro-nano structure, the capillary diffusion level is greatly enhanced, and the heat dissipation efficiency is improved by evaporative heat absorption. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the three-dimensional structure of multi-layer co-constructed micro-nano structure;

[0023] Figure 2 It is a schematic diagram of a half-cut three-dimensional structure of a multi-layer co-constructed micro-nano structure;

[0024] Figure 3 It is a schematic diagram of the principle of coupled heat dissipation of multi-layer co-constructed micro-nanostructure radiation cooling-heat conduction-liquid film evaporation. DETAILED DESCRIPTION

[0025] The specific implementation of the present invention is described below with reference to the accompanying drawings.

[0026] like Figure 1 and Figure 2 As shown, the present invention provides a multi-layer co-constructed micro-nano structure for heat dissipation of surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation, which includes, from bottom to top:

[0027] The substrate 1 is used as the bottom structure. The material of the substrate 1 is nickel-based high-temperature alloy K424, and the thickness is 1mm. The top of the substrate 1 is a grating structure 11 of near-infrared wavelength scale. The grating structure 11 is composed of a number of V-shaped cross-section microgrooves arranged in an orthogonal array, with a microgroove period of 9μm, a top groove width of 4.7μm, and a groove depth of 2.1μm.

[0028] The diamond film 2 as the middle layer structure. The diamond film 2 covers and fills the grating structure 11, with a thickness of 100 μm. The top of the diamond film 2 has a liquid-philic micro-nano structure 21, with a texture thickness of 20 μm.

[0029] The top structure is a lyophilic nano-silicon dioxide film 3. The thickness of the silicon dioxide film 3 is 200 nm.

[0030] like Figure 3 As shown, the lower surface of the substrate 1 is regarded as one end of the heat carrier, and the characteristic size of the upper surface grating structure 11 is used to interact with the electromagnetic wave to stimulate the surface plasmon resonance effect, thereby enhancing the emissivity of the atmospheric transparent window (8-14μm) band to achieve selective radiation cooling. At the same time, the diamond film 2 is densely combined with the grating structure 11 to significantly reduce the interface thermal resistance. With the high thermal conductivity of diamond, the heat transfer rate from the bottom substrate 1 to the liquid-philic micro-nanostructure 21 deposited on the top silicon dioxide film 3 is increased, and the capillary diffusion and liquid film evaporation process of the working fluid are accelerated to achieve drastic phase change heat dissipation. The multiple heat dissipation coupling mechanisms of radiation cooling-heat conduction-liquid film evaporation greatly enhance the system's operable temperature and reduce the adverse effects of thermal stress.

[0031] The method for manufacturing a multi-layer co-constructed micro-nano structure comprises the following steps:

[0032] Step 1: Use femtosecond laser direct writing process to process near-infrared wavelength scale grating structure on metal substrate, set laser energy density to 2.1nJ, spot overlap rate to 88%, feed direction to X-axis, Z-axis compensation distance to 0.5μm, and compensation times to 3 times.

[0033] Step 2: Use CVD chemical vapor deposition to deposit a diamond film to cover and fill the bottom surface grating structure, and control the thickness to be 100 μm higher than the upper surface of the bottom layer.

[0034] Then, a picosecond / nanosecond pulse laser is used to scan the top of the diamond film to process the lyophilic micro-nano structure.

[0035] Step 3: Coating a silicon dioxide film on the surface of the lyophilic micro-nanostructure to increase wettability and obtain super-hydrophilicity.

[0036] The multi-layer co-constructed micro-nanostructure of surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation is a zero-energy radiator that integrates three heat transfer processes: radiation cooling-heat conduction-liquid film evaporation. Based on the surface plasmon resonance mechanism to stimulate the radiation cooling effect, combined with the high thermal conductivity diamond film efficient heat conduction, relying on the lyophilic silica nanofilm plus the hydrophilic micro-nanostructure to use evaporation heat absorption to improve the heat dissipation efficiency. This co-constructed composite multi-layer heat dissipation micro-nanostructure has good performance such as high efficiency, environmental protection, and economy, and can achieve high heat transfer and large-scale cooling.

[0037] In the present invention, unless otherwise specified, the scientific and technical terms used herein have the meanings commonly understood by those skilled in the art. In addition, the reagents, materials and operating procedures used herein are reagents, materials and conventional procedures widely used in the corresponding fields.

[0038] It should be noted that the terms such as "upper", "lower", "left", "right", "front", "back", etc. cited in the invention are only for the convenience of description and are not used to limit the scope of implementation of the present invention. Changes or adjustments in their relative relationships should be regarded as the scope of implementation of the present invention without substantially changing the technical content.

[0039] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A multi-layer co-constructed micro-nano structure of surface plasmon resonance radiation cooling, heat conduction, and liquid film evaporation coupled heat dissipation, characterized in that: It consists of three layers; The bottom structure is a substrate; the top of the bottom structure is a grating structure of near-infrared wavelength scale; The middle layer structure is a diamond film, which covers and fills the bottom layer structure; the top of the middle layer structure is a liquid-philic micro-nano structure; The top layer is a silicon dioxide film.

2. The surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure according to claim 1, characterized in that: The material of the substrate is metal.

3. The surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure according to claim 1, characterized in that: The grating structure is composed of a plurality of microgrooves arranged in a parallel or orthogonal array, the cross section of the microgrooves is V-shaped, rectangular or trapezoidal, the inside of the microgrooves is smooth and the edges are sharp.

4. The surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure according to claim 3, characterized in that: The top groove width of the micro groove is 1.0-10 μm, the groove depth is 1-5 μm; the spacing between the micro grooves is 2.0-20 μm. The thickness of the substrate is 0.3 to 1 mm.

5. The surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure according to claim 1, characterized in that: The lyophilic micro-nano structure is a randomly distributed papilla and / or porous micro- and / or nano-scale structure.

6. The surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure according to claim 1, characterized in that: The thickness of the diamond film is 10-100 μm; the texture thickness of the lyophilic micro-nano structure is 1-100 μm.

7. The surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-built micro-nano structure according to claim 1, characterized in that: The thickness of the silicon dioxide film is 100-1000 nm.

8. The method for manufacturing a multi-layer co-constructed micro-nano structure of surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation according to any one of claims 1 to 7, characterized in that: The following steps are involved: Step 1: Processing a grating structure of near-infrared wavelength scale on the surface of the substrate to form a bottom layer structure; Step 2: Processing a diamond film on the surface of the underlying structure to cover and fill the grating structure; A hydrophilic micro-nano structure is machined on top of the diamond film to form a middle-layer structure; Step 3: Coat a silicon dioxide film on the surface of the middle layer structure to form a top layer structure.

9. The method for manufacturing a multi-layer co-constructed micro-nano structure of surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation according to claim 8, characterized in that: In step 1, a near-infrared wavelength-scale grating structure is processed by femtosecond laser direct writing or photolithography; In step 2, the diamond film is processed by CVD chemical vapor deposition; and the hydrophilic micro-nano structure is processed by picosecond / nanosecond pulse laser scanning.

10. Application of the surface plasmon resonance radiation cooling-heat conduction-liquid film evaporation coupled heat dissipation multilayer co-constructed micro-nano structure as claimed in any one of claims 1 to 7 in heat dissipation.

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