Coating equipment for uniformly depositing coating material

Abstract

The invention discloses coating equipment for uniformly depositing a coating material. A plurality of side glass plates are fixedly connected to the upper surface of a base, a glass back plate is fixedly connected to the upper surface of the base, a vacuum chamber top plate is fixedly connected to the upper surface of the glass back plate, a vacuum chamber rotating plate is rotationally connected to one side of each side glass plate, and a vacuum chamber rotating plate handle is arranged on one side of each vacuum chamber rotating plate. An operator can directly observe evaporation and sputtering of a coating material in the vacuum chamber and the deposition process of the coating material on a substrate through the glass window. For example, during evaporation coating, the dynamic condition that a coating material is gradually gasified from an evaporation source and diffused to a substrate for covering can be seen; during sputter coating, the process that the target material is bombarded by ions to sputter atoms and form a thin film on a substrate can be observed. Therefore, abnormal conditions, such as non-uniform distribution of coating materials and foreign matters on the surface of the substrate, which may occur in the coating process can be found in time, so that measures can be taken quickly for adjustment or treatment.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum coating, and in particular relates to a coating device for uniformly depositing coating materials. Background Art

[0002] Vacuum coating equipment is a device for preparing thin films in a vacuum environment. It uses physical or chemical methods to vaporize the coating material and deposit it on the substrate surface to form a thin film. It can improve the surface properties of objects, such as wear resistance and corrosion resistance.

[0003] In existing vacuum coating equipment, it is difficult for operators to directly see the deposition process of coating materials in the vacuum chamber. For example, during evaporation coating, it is impossible to see how the coating material gradually covers the substrate after being vaporized from the evaporation source, and during sputtering coating, it is impossible to observe the dynamic situation of the target material being bombarded by ions and sputtering atoms to form a thin film on the substrate. This makes it difficult to promptly detect abnormal conditions that may occur during the coating process, such as uneven distribution of coating materials and foreign matter on the substrate surface, which may lead to the production of poor quality coated products. Summary of the invention

[0004] The object of the present invention is to provide a coating device for uniformly depositing coating materials in order to solve the above-mentioned problem of observing coating operations.

[0005] The technical solution adopted by the present invention is as follows: a coating device for uniformly depositing a coating material, comprising a base, a plurality of side glass plates are fixedly connected to the upper surface of the base, a glass back plate is fixedly connected to the upper surface of the base, a vacuum chamber top plate is fixedly connected to the upper surface of the glass back plate, a vacuum chamber rotating plate is rotatably connected to one side of the side glass plate, and a vacuum chamber rotating plate handle is provided on one side of the vacuum chamber rotating plate.

[0006] By adopting the above technical solution, a vacuum chamber structure with observation glass around is added to a coating equipment for uniform deposition of coating materials. The operator can hold the handle of the vacuum chamber rotating plate to open or close the vacuum chamber rotating plate. The operator can directly observe the evaporation, sputtering and deposition process of the coating material on the substrate in the vacuum chamber through the glass window. For example, during evaporation coating, the dynamic situation of the coating material gradually vaporizing from the evaporation source and diffusing and covering the substrate can be seen; during sputtering coating, the process of the target material being bombarded by ions to sputter out atoms and form a thin film on the substrate can be observed. This helps to promptly discover abnormal situations that may occur during the coating process, such as uneven distribution of coating materials, foreign matter on the surface of the substrate, etc., so as to quickly take measures to adjust or deal with them. Through real-time observation, the operator can more accurately adjust the various process parameters of the equipment according to the actual progress of the coating. For example, if it is observed that the coating material is deposited too fast or too slow in a certain area on the substrate, the power, gas flow rate and other parameters of the evaporation source or sputtering source can be fine-tuned accordingly to ensure that a uniform, high-quality film is formed on the entire substrate surface, thereby improving the success rate of coating and product quality. During the equipment commissioning stage, the vacuum chamber structure with glass windows allows technicians to intuitively view the working status of each internal component during the operation of the equipment. For example, check whether the evaporation source or sputtering source is heating normally, generating electron beams or ion beams, and whether the substrate rack is rotating stably. Once a component is found to be working abnormally, such as sparks or component jitter, the problem component can be quickly located, so that debugging and troubleshooting can be carried out more efficiently, shortening the equipment commissioning time. During daily equipment maintenance or component replacement, the operator can see the layout of the vacuum chamber and the location of the components to be operated through the glass window, and plan the maintenance steps and operation paths in advance. This is especially important for some more complex maintenance operations, such as replacing small parts deep inside the vacuum chamber or cleaning dirt in specific areas. It can reduce the risk of equipment damage caused by blind operation and improve the efficiency and accuracy of maintenance work. For teaching and training activities of related majors, the vacuum chamber structure with glass windows provides very intuitive and vivid teaching materials. When the equipment is actually running, teachers or trainers can explain to trainees in detail the principles, process flow, equipment operation points and other knowledge of vacuum coating, combined with the coating process observed through the glass window. Trainees can see the application of theoretical knowledge in practice with their own eyes, which makes it easier for them to understand and master the relevant content, and improve the effect of teaching and training. When trainees are practicing the actual operation of the equipment, the instructor can closely observe the trainees' operation process through the glass window, promptly discover the errors or irregular behaviors of the trainees during the operation, such as improper parameter settings, incorrect substrate placement, etc., and provide real-time guidance and correction. This helps trainees become familiar with equipment operation more quickly, cultivate good operating habits, and improve practical operation capabilities.

[0007] In a preferred embodiment, a plurality of connecting plates are fixedly connected to the upper surface of the base, a connecting column is fixedly connected to one end of the connecting plate relative to the base, a fixing plate is fixedly connected to the outer surface of the connecting column, a screw is provided on the upper surface of the fixing plate, and a fixed pressure plate is fixedly connected to the lower surface of the screw.

[0008] By adopting the above technical solution, a substrate fixing structure is added to a coating device for uniform deposition of coating materials. The operator can hold the screw to move the fixed pressure plate in the vertical direction, and the fixed pressure plate can be used to hold the substrate. During the coating process, various forces will exist inside the equipment, such as the impact of hot air flow generated by the evaporation source and the impact of ion beams emitted by the sputtering source. The substrate fixing structure can firmly fix the substrate so that it will not move or shake during the coating process. If the substrate moves, it will be difficult for the coating material to be evenly deposited on the surface of the substrate, which may lead to problems such as uneven coating thickness and local defects. The stable fixing structure can effectively avoid these situations and ensure that a uniform and high-quality film is formed on the entire surface of the substrate. Some substrate fixing structures also have the function of maintaining the flatness of the substrate. Some substrates themselves may have slight bends or unevenness. During the coating process, if there is no suitable fixation to correct it, the unevenness may be further aggravated due to uneven heating or uneven ion beam impact. The fixed structure can keep the substrate in a relatively flat state through appropriate clamping, support, etc., which is conducive to the uniform deposition of the coating material and improves the coating quality.

[0009] In a preferred embodiment, a workbench is fixedly connected to the upper surface of the base, and a plurality of support columns are fixedly connected to the upper surface of the base.

[0010] By adopting the above technical solution, the workbench, as a relatively flat and stable surface, provides a convenient working area for operators during equipment commissioning, coating sample placement and adjustment, equipment maintenance, etc. The support column connects the base and the power box connecting plate, which ensures that the base and the power box connecting plate are installed and laid out according to the required relative height, which helps to achieve precise coating process operation.

[0011] In a preferred embodiment, a power box connecting plate is fixedly connected to one end of the support column relative to the base, and a power box is provided on the upper surface of the power box connecting plate.

[0012] By adopting the above technical solution, the power box connecting plate mainly connects the power box and the support column. It ensures that the power box can be firmly installed in the overall structure of the equipment, prevents the power box from being displaced or loosened due to vibration or other external forces during the operation of the equipment, and ensures the stability and reliability of the power supply. As the power source of the entire vacuum coating equipment, the power box provides the required power for each electrical component in the equipment.

[0013] In a preferred embodiment, a DC sputtering source is disposed at the lower end of the power box, and a bottom plate is fixedly connected to the lower end of the base.

[0014] By adopting the above technical solution, the DC sputtering source is one of the core components for sputtering coating in vacuum coating equipment. In a vacuum environment, by establishing a DC electric field between the target and the substrate, the positive ions generated by the ionization of the inert gas filled into the coating chamber are accelerated to bombard the target under the action of the electric field, and the atoms on the surface of the target are sputtered out and deposited on the substrate, thereby forming the desired thin film on the substrate.

[0015] The bottom plate is the bottom support structure of the entire vacuum coating equipment, bearing the entire weight of the equipment, including various components and other items that may be placed on it during the operation of the equipment. It provides a stable standing foundation for the equipment, ensuring that the equipment will not shake or tip over due to an unstable bottom during operation.

[0016] In a preferred embodiment, a gas storage tank is fixedly connected to the upper surface of the base plate, and an air intake pipeline pump is provided on one side of the gas storage tank.

[0017] By adopting the above technical solution, the gas storage tank is used to store various gases required in the coating process, such as argon, nitrogen, oxygen, etc. These gases have different uses in the coating process. For example, argon is often used as an inert gas in sputtering coating to ionize and generate positive ions to bombard the target material; nitrogen can be used as a protective gas to prevent the substrate or film from being oxidized during the coating process. The gas storage tank can ensure sufficient gas supply to meet the needs of continuous operation of the equipment. The air intake pipeline pump is responsible for providing power for the gas to be transported from the gas storage tank to the coating room through the air intake pipeline. Since the gas will encounter resistance when flowing in the pipeline, the air intake pipeline pump overcomes these resistances by generating sufficient pressure difference, so that the gas can flow smoothly and stably from the storage tank to the coating room, ensuring that the gas required in the coating process can reach the coating room in a timely and sufficient manner.

[0018] In a preferred embodiment, an air intake pipe is provided at one end of the air intake pipe pump relative to the gas storage tank, and an exhaust gas storage box is fixedly connected to the upper surface of the base plate.

[0019] By adopting the above technical solution, the air intake pipe serves as a channel connecting the gas storage tank and the coating chamber, and transports various gases stored in the storage tank to the coating chamber. It ensures that the gas can smoothly reach the coating chamber from the storage source, providing the necessary gas environment for the coating process. The waste gas storage box is used to collect waste gas generated during the coating process. During the coating process, such as sputtering coating, some waste gas may be generated, which may contain target material atoms, reaction products and other components. The waste gas storage box can collect these waste gases to prevent them from being directly discharged into the surrounding environment, avoiding pollution to the environment.

[0020] In a preferred embodiment, an air outlet pipeline pump is fixedly connected to one side of the exhaust gas storage box, and an air outlet pipeline is provided at one end of the air outlet pipeline pump relative to the exhaust gas storage box.

[0021] By adopting the above technical solution, the outlet pipe pump is responsible for providing power for transporting the exhaust gas from the coating room to the exhaust gas storage box through the outlet pipe. Similar to the intake pipe pump, the outlet pipe pump generates a sufficient pressure difference to overcome the resistance of the exhaust gas flowing in the pipe, so that the exhaust gas can flow smoothly and stably from the coating room to the exhaust gas storage box, ensuring that the exhaust gas can be collected in a timely and sufficient manner. The outlet pipe serves as a channel connecting the coating room and the exhaust gas storage box, and transports the exhaust gas generated during the coating process to the exhaust gas storage box. It ensures that the exhaust gas can smoothly reach the exhaust gas storage box from the coating room, completing the exhaust gas collection process.

[0022] In a preferred embodiment, a vacuum pump is fixedly connected to the upper surface of the base plate, and a vacuum exhaust pipe is provided on the upper surface of the vacuum pump.

[0023] By adopting the above technical solutions, the vacuum pump is the core component for creating the vacuum environment required by the vacuum coating equipment. By continuously extracting the air in the coating room and related pipelines, the air pressure is reduced to achieve the vacuum degree required by the coating process. Different coating processes may require different vacuum degrees. The vacuum pump can reduce the air pressure in the coating room and other areas to a suitable level as required, providing an ideal vacuum environment for the coating process. The vacuum exhaust pipe serves as a channel for the vacuum pump to extract gas, and transports the air and other gases in the coating room and related pipelines to the vacuum pump. It ensures that the vacuum pump can effectively extract the gas that needs to be removed, and is an important part of creating and maintaining a vacuum environment.

[0024] In a preferred embodiment, a control panel is provided on the upper surface of the base plate, the inner wall of the control panel is rotatably connected to a rotating shaft, a control panel protective cover top plate is provided on the outer surface of the rotating shaft, a control panel protective cover panel is fixedly connected to the lower surface of the control panel protective cover top plate, a control panel protective cover observation window is provided on one side of the control panel protective cover panel, and a control panel protective cover handle is fixedly connected to one side of the control panel protective cover panel.

[0025] By adopting the above technical solution, a reversible control panel protective cover structure is added to a coating device for uniform deposition of coating materials. The operator can flip the protective cover by holding the handle of the control panel protective cover. The observation window of the control panel protective cover can be used to observe the situation of the control panel when the protective cover is closed. During the daily use of the equipment, dust and debris in the surrounding environment are easy to fall and adhere to the control panel. The reversible protective cover can cover the control panel during the non-operating period of the equipment, effectively preventing tiny particles such as dust, hair, and fiber from entering the gaps of the control panel or covering the surfaces of components such as buttons and display screens, keeping the control panel clean, and reducing the risk of short circuits, button failures, and other faults that may be caused by dust accumulation. If the environment where the equipment is located has a certain humidity, or water stains may splash onto the equipment when cleaning the area around the equipment, the protective cover can play a waterproof role, prevent water droplets from entering the interior of the control panel, avoid damage to electronic components due to moisture, ensure that the control panel works normally in a relatively dry environment, and extend its service life. In the workshop or laboratory environment where the equipment is running, people walking, equipment handling, or other operating activities may accidentally touch the control panel, causing it to be collided or scratched. The reversible protective cover can provide a layer of physical protection for the control panel during normal operation or shutdown of the equipment, reducing the possibility of damage to the control panel due to accidental impact or scratches, and protecting its appearance and the integrity of internal components.

[0026] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0027] 1. In the present invention, a vacuum chamber structure with observation glass around is added to a coating equipment for uniform deposition of coating materials. The operator can hold the handle of the vacuum chamber rotating plate to open or close the vacuum chamber rotating plate. The operator can directly observe the evaporation, sputtering and deposition process of the coating material on the substrate in the vacuum chamber through the glass window. For example, during evaporation coating, the dynamic situation of the coating material gradually vaporizing from the evaporation source and diffusing and covering the substrate can be seen; during sputtering coating, the process of the target material being bombarded by ions to sputter out atoms and forming a thin film on the substrate can be observed. This helps to promptly discover abnormal situations that may occur during the coating process, such as uneven distribution of the coating material, foreign matter on the surface of the substrate, etc., so as to quickly take measures to adjust or deal with them. Through real-time observation, the operator can more accurately adjust the various process parameters of the equipment according to the actual progress of the coating. For example, if it is observed that the coating material is deposited too quickly or too slowly in a certain area on the substrate, the power, gas flow rate and other parameters of the evaporation source or sputtering source can be fine-tuned accordingly to ensure that a uniform, high-quality film is formed on the entire substrate surface, thereby improving the success rate of coating and product quality. During the equipment debugging stage, the vacuum chamber structure with glass windows allows technicians to intuitively view the working status of each internal component during the operation of the equipment.

[0028] 2. For example, check whether the evaporation source or sputtering source is heating normally, generating electron beams or ion beams, and whether the substrate rack is rotating stably. Once a component is found to be working abnormally, such as sparks or component jitter, the problem component can be quickly located, so that debugging and troubleshooting can be carried out more efficiently, shortening the equipment debugging time. During daily maintenance of the equipment or replacement of components, the operator can see the layout of the vacuum chamber and the location of the components to be operated through the glass window, and plan the maintenance steps and operation paths in advance. This is especially important for some more complex maintenance operations, such as replacing small parts deep inside the vacuum chamber or cleaning dirt in specific areas. It can reduce the risk of equipment damage caused by blind operation and improve the efficiency and accuracy of maintenance work. For teaching and training activities of related majors, the vacuum chamber structure with glass windows provides very intuitive and vivid teaching materials. When the equipment is actually running, teachers or trainers can explain to trainees in detail the principles, process flow, equipment operation points and other knowledge of vacuum coating in combination with the coating process observed through the glass window. Trainees can see the application of theoretical knowledge in practice with their own eyes, which makes it easier to understand and master the relevant content and improve the effectiveness of teaching and training. When trainees are practicing the actual operation of the equipment, the instructor can closely observe the trainees' operation process through the glass window, promptly discover the errors or irregular behaviors of the trainees during the operation, such as improper parameter settings, incorrect substrate placement, etc., and provide real-time guidance and correction. This helps trainees become familiar with the equipment operation more quickly, cultivate good operating habits, and improve practical operation capabilities.

[0029] 3. In the present invention, a substrate fixing structure is added to a coating device for uniform deposition of coating materials. The operator can hold the screw to move the fixed pressing plate in the vertical direction, and the fixed pressing plate can be used to hold the substrate. During the coating process, various forces will exist inside the equipment, such as the impact of hot air flow generated by the evaporation source and the impact of ion beams emitted by the sputtering source. The substrate fixing structure can firmly fix the substrate so that it will not be displaced or shake during the coating process. If the substrate moves, it will be difficult for the coating material to be uniformly deposited on the surface of the substrate, which may lead to problems such as uneven coating thickness and local defects. The stable fixing structure can effectively avoid these situations and ensure that a uniform and high-quality film is formed on the entire surface of the substrate. Some substrate fixing structures also have the function of maintaining the flatness of the substrate. Some substrates themselves may have slight bends or unevenness. During the coating process, if there is no suitable fixation to correct it, the unevenness may be further aggravated due to uneven heating or uneven ion beam impact. The fixed structure can keep the substrate in a relatively flat state through appropriate clamping, support, etc., which is conducive to the uniform deposition of the coating material and improves the coating quality.

[0030] 4. In the present invention, a reversible control panel protective cover structure is added to a coating device for uniform deposition of coating materials. The operator can flip the protective cover by holding the handle of the control panel protective cover. The observation window of the control panel protective cover can be used to observe the situation of the control panel when the protective cover is closed. During the daily use of the equipment, dust and debris in the surrounding environment are easy to fall and adhere to the control panel. The reversible protective cover can cover the control panel during the non-operating period of the equipment, effectively preventing tiny particles such as dust, hair, and fiber from entering the gaps of the control panel or covering the surfaces of components such as buttons and display screens, keeping the control panel clean, and reducing the risk of short circuits, button failures, etc. that may be caused by dust accumulation. If there is a certain humidity in the environment where the equipment is located, or water stains may splash onto the equipment when cleaning the area around the equipment, the protective cover can play a waterproof role, prevent water droplets from entering the interior of the control panel, avoid damage to electronic components due to moisture, ensure that the control panel works normally in a relatively dry environment, and extend its service life. In a workshop or laboratory environment where the equipment is running, people walking, equipment handling, or other operating activities may accidentally touch the control panel, causing it to be collided or scratched. The reversible protective cover can provide a layer of physical protection for the control panel during normal operation or shutdown of the equipment, reducing the possibility of damage to the control panel due to accidental impact or scratches, and protecting its appearance and the integrity of internal components. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0032] Figure 2 It is a schematic diagram of the vacuum chamber structure in the present invention;

[0033] Figure 3 It is a schematic diagram of the fixed structure in the present invention;

[0034] Figure 4 It is a schematic diagram of the workbench structure in the present invention;

[0035] Figure 5 It is a schematic diagram of the structure of the flippable control panel protection cover in the present invention;

[0036] Figure 6 It is a schematic diagram of the air inlet and outlet structure in the present invention.

[0037] Markings in the figure: 1-base, 2-side glass plate, 3-glass back plate, 4-vacuum chamber top plate, 5-vacuum chamber rotating plate, 6-vacuum chamber rotating plate handle, 7-connecting plate, 8-connecting column, 9-fixed plate, 10-screw, 11-fixed pressure plate, 12-workbench, 13-support column, 14-power box connecting plate, 15-power box, 16-DC sputtering source, 17-bottom plate, 18-gas storage tank, 19-intake pipe pump, 20-intake pipe, 21-exhaust gas storage box, 22-outlet pipe pump, 23-outlet pipe, 24-vacuum pump, 25-vacuum exhaust pipe, 26-control panel, 27-rotating shaft, 28-control panel protective cover top plate, 29-control panel protective cover panel, 30-control panel protective cover observation window, 31-control panel protective cover handle. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0039] Reference Figure 1-6 ,

[0040] Reference Figure 1-2, a plurality of side glass plates 2 are fixedly connected to the upper surface of the base 1, a glass back plate 3 is fixedly connected to the upper surface of the base 1, a vacuum chamber top plate 4 is fixedly connected to the upper surface of the glass back plate 3, a vacuum chamber rotating plate 5 is rotatably connected to one side of the side glass plate 2, and a vacuum chamber rotating plate handle 6 is provided on one side of the vacuum chamber rotating plate 5. A vacuum chamber structure with observation glass around is added to a coating device for uniform deposition of coating materials, and the operator can hold the vacuum chamber rotating plate handle 6 to open or close the vacuum chamber rotating plate 5. The operator can directly observe the evaporation, sputtering and deposition process of the coating material in the vacuum chamber on the substrate through the glass window. For example, during evaporation coating, the dynamic situation of the coating material gradually vaporizing from the evaporation source and diffusing and covering the substrate can be seen; during sputtering coating, the process of the target material being bombarded by ions to sputter out atoms and form a thin film on the substrate can be observed. This helps to timely discover abnormal conditions that may occur during the coating process, such as uneven distribution of the coating material, foreign matter on the surface of the substrate, etc., so as to quickly take measures to adjust or deal with it. Through real-time observation, operators can more accurately adjust the various process parameters of the equipment according to the actual progress of the coating. For example, if it is observed that the coating material is deposited too quickly or too slowly in a certain area on the substrate, the power, gas flow rate and other parameters of the evaporation source or sputtering source can be fine-tuned accordingly to ensure that a uniform, high-quality film is formed on the entire substrate surface, thereby improving the success rate of coating and product quality. During the equipment commissioning stage, the vacuum chamber structure with glass windows allows technicians to intuitively view the working status of each internal component during the operation of the equipment. For example, check whether the evaporation source or sputtering source is heating normally, generating electron beams or ion beams, and whether the substrate rack is rotating stably. Once a component is found to be working abnormally, such as sparks or component jitter, the problem component can be quickly located, so that debugging and troubleshooting can be carried out more efficiently, shortening the equipment commissioning time. During daily equipment maintenance or component replacement, operators can see the layout of the vacuum chamber and the location of the components to be operated through the glass window, and plan the maintenance steps and operation paths in advance. This is especially important for some more complex maintenance operations, such as replacing small parts deep in the vacuum chamber or cleaning dirt in specific areas. It can reduce the risk of equipment damage caused by blind operation and improve the efficiency and accuracy of maintenance work.

[0041] For teaching and training activities of related majors, the vacuum chamber structure with glass windows provides very intuitive and vivid teaching materials. When the equipment is actually running, teachers or trainers can explain to trainees in detail the principles, process flow, equipment operation points and other knowledge of vacuum coating, combined with the coating process observed through the glass window. Trainees can see the application of theoretical knowledge in practice with their own eyes, which makes it easier for them to understand and master the relevant content, and improve the effect of teaching and training. When trainees are practicing the actual operation of the equipment, the instructor can closely observe the trainees' operation process through the glass window, promptly discover the errors or irregular behaviors of the trainees during the operation, such as improper parameter settings, incorrect substrate placement, etc., and provide real-time guidance and correction. This helps trainees become familiar with equipment operation more quickly, cultivate good operating habits, and improve practical operation capabilities.

[0042] Reference Figure 1 , Figure 3 , a plurality of connecting plates 7 are fixedly connected to the upper surface of the base 1, a connecting column 8 is fixedly connected to one end of the connecting plate 7 relative to the base 1, a fixing plate 9 is fixedly connected to the outer surface of the connecting column 8, a screw 10 is arranged on the upper surface of the fixing plate 9, and a fixing plate 11 is fixedly connected to the lower surface of the screw 10. A substrate fixing structure is added to a coating device for uniform deposition of coating materials, and an operator can hold the screw 10 to move the fixing plate 11 in a vertical direction, and the fixing plate 11 can be used to press the substrate. During the coating process, various forces will exist inside the equipment, such as the impact of hot air flow generated by the evaporation source and the impact of ion beams emitted by the sputtering source. The substrate fixing structure can firmly fix the substrate so that it will not be displaced or shaken during the coating process. If the substrate moves, it is difficult for the coating material to be uniformly deposited on the substrate surface, which may lead to problems such as uneven coating thickness and local defects. The stable fixing structure can effectively avoid these situations and ensure that a uniform and high-quality film is formed on the entire surface of the substrate. Some substrate fixing structures also have the function of maintaining the flatness of the substrate. Some substrates may have slight bends or unevenness. During the coating process, if there is no proper fixation to correct it, the unevenness may be further aggravated due to uneven heating or uneven ion beam impact. The fixing structure can keep the substrate relatively flat through proper clamping and support, which is conducive to the uniform deposition of coating materials and improves the coating quality.

[0043] Reference Figure 4The upper surface of the base 1 is fixedly connected with a workbench 12, and the upper surface of the base 1 is fixedly connected with a plurality of support columns 13. The workbench 12 is a relatively flat and stable plane, providing a convenient working area for operators during equipment debugging, coating sample placement and adjustment, equipment maintenance and other operations. The support column 13 connects the base 1 and the power box connecting plate 14, which ensures that the base 1 and the power box connecting plate 14 are installed and arranged according to the required relative height, which helps to achieve precise coating process operation.

[0044] Reference Figure 4 The support column 13 is fixedly connected to a power box connecting plate 14 at one end relative to the base 1, and a power box 15 is arranged on the upper surface of the power box connecting plate 14. The power box connecting plate 14 mainly serves to connect the power box 15 and the support column 13. It ensures that the power box 15 can be firmly installed in the overall structure of the equipment, prevents the power box from being displaced or loosened due to vibration or other external forces during the operation of the equipment, and ensures the stability and reliability of the power supply. As the power source of the entire vacuum coating equipment, the power box 15 provides the required power for each electrical component in the equipment.

[0045] Reference Figure 1 , Figure 4 , Figure 6 , a DC sputtering source 16 is provided at the lower end of the power box 15, and a bottom plate 17 is fixedly connected to the lower end of the base 1. The DC sputtering source 16 is one of the core components for realizing sputtering coating in the vacuum coating equipment. In a vacuum environment, by establishing a DC electric field between the target material and the substrate, the positive ions generated by the ionization of the inert gas filled into the coating chamber are accelerated to bombard the target material under the action of the electric field, and the atoms on the surface of the target material are sputtered out and deposited on the substrate, thereby forming the desired thin film on the substrate. The bottom plate 17 serves as the bottom support structure of the entire vacuum coating equipment, bearing the entire weight of the equipment, including various components and other items that may be placed on it during the operation of the equipment. It provides a stable standing foundation for the equipment to ensure that the equipment will not shake or tip over due to an unstable bottom during operation.

[0046] Reference Figure 6 A gas storage tank 18 is fixedly connected to the upper surface of the bottom plate 17, and an air intake pipeline pump 19 is provided on one side of the gas storage tank 18. The gas storage tank 18 is used to store various gases required in the coating process, such as argon, nitrogen, oxygen, etc. These gases have different uses in the coating process. For example, argon is often used as an inert gas in sputtering coating to ionize and generate positive ions to bombard the target material; nitrogen can be used as a protective gas to prevent the substrate or film from being oxidized during the coating process.

[0047] The gas storage tank can ensure sufficient gas supply to meet the needs of continuous operation of the equipment. The air intake pipeline pump 19 is responsible for providing power for the gas to be transported from the gas storage tank to the coating room through the air intake pipeline. Since the gas will encounter resistance when flowing in the pipeline, the air intake pipeline pump 19 overcomes these resistances by generating sufficient pressure difference, so that the gas can flow smoothly and stably from the storage tank to the coating room, ensuring that the gas required during the coating process can reach the coating room in a timely and sufficient manner.

[0048] Reference Figure 6 An air intake pipe 20 is provided at one end of the air intake pipe pump 19 relative to the gas storage tank 18, and a waste gas storage box 21 is fixedly connected to the upper surface of the bottom plate 17. The air intake pipe 20 serves as a passage connecting the gas storage tank and the coating chamber, and transports various gases stored in the storage tank to the coating chamber. It ensures that the gas can smoothly reach the coating chamber from the storage source, providing the necessary gas environment for the coating process. The waste gas storage box 21 is used to collect waste gas generated during the coating process. During the coating process, such as sputtering coating, some waste gas may be generated, and these waste gases may contain target material atoms, reaction products and other components. The waste gas storage box 21 can collect these waste gases to prevent them from being directly discharged into the surrounding environment, thereby avoiding pollution to the environment.

[0049] Reference Figure 6 An outlet pipe pump 22 is fixedly connected to one side of the waste gas storage box 21, and an outlet pipe 23 is provided at one end of the outlet pipe pump 22 relative to the waste gas storage box 21. The outlet pipe pump 22 is responsible for providing power for transporting the waste gas from the coating room to the waste gas storage box through the outlet pipe. Similar to the intake pipe pump, the outlet pipe pump 22 overcomes the resistance of the waste gas flowing in the pipe by generating a sufficient pressure difference, so that the waste gas can flow smoothly and stably from the coating room to the waste gas storage box, ensuring that the waste gas can be collected in a timely and sufficient manner. The outlet pipe 23 serves as a channel connecting the coating room and the waste gas storage box, and transports the waste gas generated during the coating process to the waste gas storage box. It ensures that the waste gas can smoothly reach the waste gas storage box from the coating room, completing the waste gas collection process.

[0050] Reference Figure 6, a vacuum pump 24 is fixedly connected to the upper surface of the bottom plate 17, and a vacuum exhaust pipe 25 is provided on the upper surface of the vacuum pump 24. The vacuum pump 24 is the core component for creating the vacuum environment required for the vacuum coating equipment. By continuously extracting the air in the coating room and related pipelines, the air pressure is reduced to reach the vacuum degree required by the coating process. Different coating processes may require different vacuum degrees. The vacuum pump 24 can reduce the air pressure in the coating room and other areas to a suitable level as required, providing an ideal vacuum environment for the coating process. The vacuum exhaust pipe 25 serves as a channel for the vacuum pump to extract gas, and transports air and other gases in the coating room and related pipelines to the vacuum pump. It ensures that the vacuum pump can effectively extract the gas that needs to be removed, and is an important part of creating and maintaining a vacuum environment.

[0051] Reference Figure 1 , Figure 5 A control panel 26 is provided on the upper surface of the bottom plate 17, a rotating shaft 27 is rotatably connected to the inner wall of the control panel 26, a control panel protective cover top plate 28 is provided on the outer surface of the rotating shaft 27, a control panel protective cover panel 29 is fixedly connected to the lower surface of the control panel protective cover top plate 28, a control panel protective cover observation window 30 is provided on one side of the control panel protective cover panel 29, and a control panel protective cover handle 31 is fixedly connected to one side of the control panel protective cover panel 29. A reversible control panel protective cover structure is added to a coating device for uniform deposition of coating materials, and the operator can flip the protective cover by holding the control panel protective cover handle 31, and the control panel protective cover observation window 30 can be used to observe the condition of the control panel when the protective cover is closed. During the daily use of the equipment, dust and debris in the surrounding environment are easy to fall and adhere to the control panel. The reversible protective cover can cover the control panel during the non-operating period of the equipment, effectively preventing tiny particles such as dust, hair, and fiber from entering the gaps of the control panel or covering the surfaces of components such as buttons and display screens, keeping the control panel clean and reducing the risk of short circuits, button failures, and other faults that may be caused by dust accumulation. If the environment where the equipment is located has a certain humidity, or water stains may splash onto the equipment when cleaning the area around the equipment, the protective cover can play a waterproof role, preventing water droplets from entering the interior of the control panel, avoiding damage to electronic components due to moisture, ensuring that the control panel works normally in a relatively dry environment, and extending its service life. In the workshop or laboratory environment where the equipment is operating, people walking, equipment handling, or other operating activities may accidentally touch the control panel, causing it to be bumped or scratched. The reversible protective cover can provide a layer of physical protection for the control panel during normal operation or shutdown of the equipment, reducing the possibility of damage to the control panel due to accidental impact or scratching, and protecting its appearance and the integrity of internal components.

[0052] Working principle:

[0053] In the present invention, a vacuum chamber structure with observation glass around is added to a coating device for uniform deposition of coating materials, and the operator can directly observe the evaporation, sputtering and deposition process of the coating material on the substrate in the vacuum chamber through the glass window. For example, during evaporation coating, the dynamic situation of the coating material gradually vaporizing from the evaporation source and diffusing and covering the substrate can be observed; during sputtering coating, the process of the target material being bombarded by ions and sputtering atoms to form a thin film on the substrate can be observed. This helps to timely discover abnormal situations that may occur during the coating process, such as uneven distribution of coating materials, foreign matter on the surface of the substrate, etc., so as to quickly take measures to adjust or deal with them. Through real-time observation, the operator can more accurately adjust the various process parameters of the equipment according to the actual progress of the coating. For example, if it is observed that the coating material is deposited too fast or too slow in a certain area on the substrate, the power, gas flow rate and other parameters of the evaporation source or sputtering source can be fine-tuned accordingly to ensure that a uniform and high-quality thin film is formed on the entire substrate surface, thereby improving the success rate of coating and product quality. During the equipment debugging stage, the vacuum chamber structure with glass windows allows technicians to intuitively view the working status of each internal component during the operation of the equipment. For example, check whether the evaporation source or sputtering source is heating normally, generating electron beams or ion beams, and whether the substrate rack is rotating stably. Once a component is found to be working abnormally, such as sparks, component jitter, etc., the problem component can be quickly located, so that debugging and troubleshooting can be carried out more efficiently, shortening the equipment debugging time. During daily equipment maintenance or component replacement, the operator can see the layout of the vacuum chamber and the location of the components to be operated through the glass window, and plan the maintenance steps and operation paths in advance. This is especially important for some more complex maintenance operations, such as replacing small parts deep inside the vacuum chamber or cleaning dirt in specific areas. It can reduce the risk of equipment damage caused by blind operation and improve the efficiency and accuracy of maintenance work. For teaching and training activities in related majors, the vacuum chamber structure with glass windows provides very intuitive and vivid teaching materials. When the equipment is actually running, teachers or trainers can explain to trainees in detail the principles, process flow, equipment operation points and other knowledge of vacuum coating in combination with the coating process observed through the glass window. Trainees can see the application of theoretical knowledge in practice, which makes it easier for them to understand and master relevant content, and improve the effectiveness of teaching and training. When trainees are practicing the actual operation of the equipment, the instructor can closely observe the trainees' operation process through the glass window, and promptly discover the errors or irregular behaviors that occur during the operation, such as improper parameter settings, incorrect substrate placement, etc., and provide real-time guidance and correction. This helps trainees become familiar with equipment operation more quickly, cultivate good operating habits, and improve practical operation capabilities.

[0054] In the present invention, a substrate fixing structure is added to a coating device for uniform deposition of coating materials. During the coating process, various forces will exist inside the device, such as the impact of hot air flow generated by the evaporation source, the impact of ion beams emitted by the sputtering source, etc. The substrate fixing structure can firmly fix the substrate so that it will not be displaced or shake during the coating process. If the substrate moves, it is difficult for the coating material to be uniformly deposited on the surface of the substrate, which may lead to problems such as uneven coating thickness and local defects. The stable fixing structure can effectively avoid these situations and ensure that a uniform and high-quality film is formed on the entire surface of the substrate. Some substrate fixing structures also have the function of maintaining the flatness of the substrate. Some substrates themselves may have slight bends or unevenness. During the coating process, if there is no suitable fixation to correct it, the unevenness may be further aggravated due to uneven heating or uneven ion beam impact. The fixing structure can keep the substrate in a relatively flat state by appropriate clamping, support, etc., which is conducive to the uniform deposition of coating materials and improves the coating quality.

[0055] 3. In the present invention, a reversible control panel protective cover structure is added to a coating device for uniformly depositing coating materials. During the daily use of the device, dust and debris in the surrounding environment are easy to fall and adhere to the control panel. The reversible protective cover can cover the control panel during the non-operating period of the device, effectively preventing tiny particles such as dust, hair, and fiber from entering the gaps of the control panel or covering the surfaces of components such as buttons and display screens, keeping the control panel clean, and reducing the risk of short circuits, button failures, and other faults that may be caused by dust accumulation. If there is a certain humidity in the environment where the device is located, or water stains may splash onto the device when cleaning the area around the device, the protective cover can play a waterproof role, preventing water droplets from entering the interior of the control panel, avoiding damage to electronic components due to moisture, ensuring that the control panel works normally in a relatively dry environment, and extending its service life. In a workshop or laboratory environment where the equipment is operating, people walking, equipment handling, or other operating activities may accidentally touch the control panel, causing it to be collided or scratched. The reversible protective cover can provide a layer of physical protection for the control panel during normal operation or shutdown of the equipment, reducing the possibility of damage to the control panel due to accidental impact or scratches, and protecting its appearance and the integrity of internal components.

[0056] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A coating device for uniformly depositing a coating material, comprising a base (1), characterized in that: A plurality of side glass plates (2) are fixedly connected to the upper surface of the base (1), a glass back plate (3) is fixedly connected to the upper surface of the base (1), a vacuum chamber top plate (4) is fixedly connected to the upper surface of the glass back plate (3), one side of the side glass plate (2) is rotatably connected to a vacuum chamber rotating plate (5), and a vacuum chamber rotating plate handle (6) is provided on one side of the vacuum chamber rotating plate (5).

2. A coating device for uniform deposition of coating materials as claimed in claim 1, characterized in that: A plurality of connecting plates (7) are fixedly connected to the upper surface of the base (1); a connecting column (8) is fixedly connected to one end of the connecting plate (7) relative to the base (1); a fixing plate (9) is fixedly connected to the outer surface of the connecting column (8); a screw rod (10) is provided on the upper surface of the fixing plate (9); and a fixing pressure plate (11) is fixedly connected to the lower surface of the screw rod (10).

3. A coating device for uniform deposition of coating materials as claimed in claim 1, characterized in that: A workbench (12) is fixedly connected to the upper surface of the base (1), and a plurality of support columns (13) are fixedly connected to the upper surface of the base (1).

4. A coating device for uniform deposition of coating materials as claimed in claim 1, characterized in that: One end of the support column (13) relative to the base (1) is fixedly connected to a power box connecting plate (14), and a power box (15) is provided on the upper surface of the power box connecting plate (14).

5. A coating device for uniform deposition of coating materials as claimed in claim 4, characterized in that: A direct current sputtering source (16) is provided at the lower end of the power supply box (15), and a bottom plate (17) is fixedly connected to the lower end of the base (1).

6. A coating device for uniformly depositing coating materials as claimed in claim 5, characterized in that: A gas storage tank (18) is fixedly connected to the upper surface of the bottom plate (17), and an air intake pipeline pump (19) is arranged on one side of the gas storage tank (18).

7. A coating device for uniformly depositing coating materials as claimed in claim 6, characterized in that: An air intake pipeline (20) is provided at one end of the air intake pipeline pump (19) relative to the gas storage tank (18), and an exhaust gas storage box (21) is fixedly connected to the upper surface of the bottom plate (17).

8. A coating device for uniformly depositing coating materials as claimed in claim 7, characterized in that: An air outlet pipeline pump (22) is fixedly connected to one side of the waste gas storage box (21), and an air outlet pipeline (23) is arranged at one end of the air outlet pipeline pump (22) opposite to the waste gas storage box (21).

9. A coating device for uniformly depositing coating materials as claimed in claim 5, characterized in that: A vacuum pump (24) is fixedly connected to the upper surface of the bottom plate (17), and a vacuum exhaust pipe (25) is provided on the upper surface of the vacuum pump (24).

10. The coating device for uniformly depositing coating materials according to claim 5, characterized in that: A control panel (26) is arranged on the upper surface of the bottom plate (17); a rotating shaft (27) is rotatably connected to the inner wall of the control panel (26); a control panel protection cover top plate (28) is arranged on the outer surface of the rotating shaft (27); a control panel protection cover panel (29) is fixedly connected to the lower surface of the control panel protection cover top plate (28); a control panel protection cover observation window (30) is arranged on one side of the control panel protection cover panel (29); and a control panel protection cover handle (31) is fixedly connected to one side of the control panel protection cover panel (29).

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